CN116464912A - Special gas supply system in laboratory - Google Patents
Special gas supply system in laboratory Download PDFInfo
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- CN116464912A CN116464912A CN202310584228.9A CN202310584228A CN116464912A CN 116464912 A CN116464912 A CN 116464912A CN 202310584228 A CN202310584228 A CN 202310584228A CN 116464912 A CN116464912 A CN 116464912A
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- 238000010926 purge Methods 0.000 claims abstract description 93
- 238000002955 isolation Methods 0.000 claims description 94
- 238000012544 monitoring process Methods 0.000 claims description 37
- 238000005070 sampling Methods 0.000 claims description 21
- 238000003860 storage Methods 0.000 claims description 19
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 4
- 230000008901 benefit Effects 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- 238000005260 corrosion Methods 0.000 abstract description 3
- 238000012423 maintenance Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 239
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000001914 filtration Methods 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000005922 Phosphane Substances 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910000064 phosphane Inorganic materials 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/005—Protection or supervision of installations of gas pipelines, e.g. alarm
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Pipeline Systems (AREA)
Abstract
The invention relates to the technical field of special gas supply, in particular to a laboratory special gas supply system, which comprises a special gas supply module, a purging module, an exhaust module and a vacuum module, wherein the special gas supply module ensures that the gas supply process is continuous and stable, safe and reliable, and has high automation degree; the purging module not only can be used for purging the pipeline in the special gas supply module, but also can timely remove the special gas remained in the pipeline, further prolong the service life of components, improve the economical efficiency of the special gas supply system, avoid the influence of corrosion on the gas supply system, and simultaneously can prevent accidents caused by blockage of the special gas supply pipeline; and an exhaust module and a vacuum module are constructed to ensure that the pipeline of the special gas supply system is clean, and the leakage of the special gas is fully prevented from multiple angles. Therefore, the laboratory special gas supply system provided by the invention is based on gas characteristic setting, so that the continuous use of the system is fully ensured, the maintenance cost is reduced, and the economic benefit is improved.
Description
Technical Field
The invention relates to the technical field of special gas supply, in particular to a laboratory special gas supply system.
Background
Along with the social demands, the development of related hot spot industries such as new energy, materials, microelectronics, photovoltaics, biomedical and the like is directly promoted, and special gases such as hydrogen (H) 2 ) Acetylene (C) 2 H 2 ) Methane (CH) 4 ) Ethylene (C) 2 H 4 ) And the like are inflammable and explosive gases, and high-risk special gases such as Silane (SiH) 4 ) Phosphane (PH) 3 ) Etc. are pyrophoric gases, e.g. ammonia (NH) 3 ) Hydrogen chloride (HCl), chlorine (Cl) 2 ) And the like are toxic and corrosive gases. More and more special gases are used in related hot spot industries such as IC chips, new energy sources, materials, microelectronics, photovoltaics, biomedical and the like, and the gas use safety of the special gases is increasingly emphasized.
At present, various scientific institute and university laboratories use gas equipment with different degrees, such as: inductively coupled plasma spectroscopy generators, plasma enhanced chemical vapor deposition, film plating machines, furnaces, gas chromatographs, and the like. These devices use inert gases, such as argon (Ar), nitrogen, in addition to flammable and explosive or toxic gasesGas (N) 2 ) Helium (He), and the like.
The current laboratory gas supply system can ensure the supply of common gas, but aiming at special gas, the defects of easy leakage, unstable gas flow, insufficient use safety and the like often exist in the supply process due to the property or the existing state of the special gas. In addition, the existing special gas supply equipment is mainly controlled manually, and has high requirements on operators, on one hand, the operators need to be trained for a long time on duty, and on the other hand, once the operators have misoperation, if special gas leaks, the special gas can cause great harm to the environment and the operators, and even influence the life safety.
In view of this, the present invention has been made.
Disclosure of Invention
The invention aims to provide a laboratory special gas supply system which is based on gas characteristic setting, fully ensures continuous use of the system, reduces maintenance cost and improves economic benefit.
The invention provides a laboratory special gas supply system which comprises a special gas supply module, a purging module, an exhaust module and a vacuum module, wherein the purging module is communicated with the special gas supply module and is used for purging a pipeline in the special gas supply module, the exhaust module is communicated with the special gas supply module and the purging module and is used for exhausting special gas and purge gas, and the vacuum module is communicated with the exhaust module and is used for collecting and exhausting gas in the exhaust module.
Preferably, the device further comprises a monitoring module, wherein the monitoring module is independently arranged and is used for monitoring whether special gas leaks or not and analyzing the content.
Preferably, the system further comprises a control module, wherein the control module is electrically connected with the special gas supply module, the purging module, the exhaust module, the vacuum module and the monitoring module.
As the technical scheme, preferably, the special gas supply module comprises a special gas storage device and a special gas supply main path, wherein an inlet of the special gas supply main path is communicated with the special gas storage device, and an outlet of the special gas supply main path is communicated with gas utilization equipment; the special gas supply main path is sequentially provided with a special gas isolation valve, a high-pressure isolation valve, a first filter, a pressure regulator, a low-pressure isolation valve, a manual isolation valve, a second filter and a first check valve along the gas flowing direction; the purging module is communicated with the extra-gas supply main path between the extra-gas isolation valve and the high-pressure isolation valve; the exhaust module is communicated with the special gas supply main path.
Preferably, in the technical scheme, a first pressure sensor is arranged between the extra gas isolation valve and the high pressure isolation valve on the extra gas supply main circuit, and a second pressure sensor is arranged between the pressure regulator and the low pressure isolation valve.
As the technical scheme, preferably, the purging module comprises a purging gas storage device and a purging gas channel, wherein an inlet of the purging gas channel is communicated with the purging gas storage device, and an outlet of the purging gas channel is communicated with the special gas supply main channel between the special gas isolation valve and the high-pressure isolation valve; and the outlet of the purge gas isolation valve is communicated with the special gas supply main path and the exhaust module between the special gas isolation valve and the high-pressure isolation valve.
As the technical scheme, preferably, the exhaust module comprises a first exhaust pipeline, a second exhaust pipeline and a third exhaust pipeline which are sequentially arranged in parallel, a high-pressure exhaust valve is arranged on the first exhaust pipeline, and an inlet of the first exhaust pipeline is communicated with the tail end of the purging gas circuit, the special gas isolation valve and the special gas supply main pipeline between the high-pressure isolation valves; a low-pressure exhaust valve and a third one-way valve are sequentially arranged on the second exhaust pipeline along the gas flowing direction, and an inlet of the second exhaust pipeline is communicated with the special gas supply main pipeline between the pressure regulator and the low-pressure isolation valve; a pressure reducing valve is arranged on the third exhaust pipeline, and an inlet of the third exhaust pipeline is communicated with the special gas supply main pipeline between the pressure regulator and the low-pressure isolation valve; the tail ends of the first exhaust pipeline, the second exhaust pipeline and the third exhaust pipeline are communicated with the vacuum module.
As the technical scheme, preferably, the vacuum module comprises a vacuum generator and a vacuum pipeline, a venturi valve, a fourth one-way valve and a vacuum supply valve are sequentially arranged on the vacuum pipeline along the gas flowing direction, an outlet of the vacuum supply valve is communicated with a vacuum port of the vacuum generator, and the tail ends of the first exhaust pipeline, the second exhaust pipeline and the third exhaust pipeline are communicated with an air inlet of the vacuum generator.
As this technical scheme preferably, monitoring module includes sampling filter and monitoring gas circuit, the entry end of monitoring gas circuit with the exit end intercommunication of sampling filter, and along the direction of gas flow, monitoring gas circuit has set gradually gas sensor, sampling pump and flowmeter.
As the technical scheme, preferably, the control module comprises a PLC controller and a PCB controller, wherein the PLC controller is electrically connected with a special gas isolation valve, a high-pressure isolation valve, a low-pressure isolation valve, a first pressure sensor, a second pressure sensor, a purge gas isolation valve, a high-pressure exhaust valve, a low-pressure exhaust valve, a pressure reducing valve and a vacuum supply valve; the PCB controller is electrically connected with the sampling pump and the gas sensor.
The invention also provides a laboratory special gas supply method:
when in gas supply, the special gas is sequentially conveyed to gas utilization equipment after passing through a special gas storage device, a special gas isolation valve, a high-pressure isolation valve, a first filter, a pressure regulator, a low-pressure isolation valve, a manual isolation valve, a second filter and a first one-way valve, whether the special gas is supplied or not, a vacuum system keeps working, and the gas is emptied through a pressure reducing valve and a vacuum generator when the pressure is excessively high during the gas supply;
when the air supply is stopped, the air supply pipeline is purged by the purge air passing through the purge air supply system, the purge air can be emptied after sequentially passing through the high-pressure isolation valve, the first filter, the pressure regulator, the low-pressure exhaust valve, the third one-way valve and the vacuum generator, and the purge air can also purge the special air supply system to purge air to the tail end of the air.
In addition, when the special gas outlet pipeline is blocked, the blocked section can be purged and emptied through purge gas and a high-pressure exhaust valve. The vacuum system continuously works, so that the formation of vacuum is ensured, and the special gas can be timely extracted and emptied when leakage occurs in the supply system. The monitoring module continuously works and analyzes the content of the extracted gas to effectively early warn and prevent special gas leakage.
The laboratory special gas supply system of the invention has at least the following technical effects:
the laboratory special gas supply system integrates the special gas supply module, the purging module, the exhaust module and the vacuum module, wherein the arrangement of the special gas supply module ensures that the gas supply process is continuous and stable, safe and reliable, and the automation degree is high; the purging module not only can be used for purging the pipeline in the special gas supply module, but also can timely remove the special gas remained in the pipeline, further prolong the service life of components, improve the economical efficiency of the special gas supply system, avoid the influence of corrosion on the gas supply system, and simultaneously can prevent accidents caused by blockage of the special gas supply pipeline; and an exhaust module and a vacuum module are constructed to ensure that the pipeline of the special gas supply system is clean, and the leakage of the special gas is fully prevented from multiple angles. The laboratory special gas supply system provided by the invention is based on gas characteristic setting, so that the continuous use of the system is fully ensured, the maintenance cost is reduced, and the economic benefit is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a laboratory extra-gas supply system of the invention.
Reference numerals illustrate:
1: a special gas storage device; 2: a main special gas supply path; 3: a gas utilization device; 4: a special gas isolation valve; 5: a high pressure isolation valve; 6: a first filter; 7: a pressure regulator; 8: a low pressure isolation valve; 9: a manual isolation valve; 10: a second filter; 11: a first one-way valve; 12: a first pressure sensor; 13: a second pressure sensor; 14: a purge gas storage device; 15: a purge gas path; 16: a pressure regulating valve; 17: a second one-way valve; 18: a purge gas isolation valve; 19: a first exhaust line; 20: a second exhaust line; 21: a third exhaust line; 22: a high pressure exhaust valve; 23: a low pressure vent valve; 24: a third one-way valve; 25: a pressure reducing valve; 26: a vacuum generator; 27: a vacuum pipeline; 28: a venturi valve; 29: a fourth one-way valve; 30: a vacuum supply valve; 31: a sampling filter; 32: monitoring an air path; 33: a gas sensor; 34: a sampling pump; 35: a flow meter; 36: and a control module.
Detailed Description
The technical solutions of the present invention will be clearly and completely described in connection with the embodiments, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise. Furthermore, the terms "mounted," "connected," "coupled," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
As shown in fig. 1, the embodiment provides a laboratory special gas supply system, which comprises a special gas supply module, a purging module, an exhaust module and a vacuum module, wherein the purging module is communicated with the special gas supply module and is used for purging a pipeline in the special gas supply module, the exhaust module is communicated with the special gas supply module and the purging module and is used for exhausting special gas and purge gas, and the vacuum module is communicated with the exhaust module and is used for collecting and exhausting gas in the exhaust module.
The laboratory special gas supply system integrates a special gas supply module, a purging module, an exhaust module and a vacuum module, wherein the arrangement of the special gas supply module ensures that the gas supply process is continuous and stable, safe and reliable, and the automation degree is high; the purging module not only can be used for purging the pipeline in the special gas supply module, but also can timely remove the special gas remained in the pipeline, further prolong the service life of components, improve the economical efficiency of the special gas supply system, avoid the influence of corrosion on the gas supply system, and simultaneously can prevent accidents caused by blockage of the special gas supply pipeline; and finally, constructing an exhaust module and a vacuum module to ensure the cleaning of a special gas supply system pipeline and fully prevent special gas leakage from multiple angles.
In order to further ensure safe and stable operation of the gas supply system, the laboratory special gas supply system in this embodiment further includes a monitoring module, where the monitoring module is independently disposed in the laboratory special gas supply system, and is mainly used for monitoring whether special gas leaks and analyzing the content.
On the basis of the technical scheme, in order to ensure continuous and stable air supply for 24 hours and improve the intelligence and the self-adaption of the system, the system is also provided with a control module 36, wherein the control module 36 is electrically connected with the special air supply module, the purging module, the exhaust module, the vacuum module and the monitoring module, namely, the control module 36 can realize remote control on the special air supply module, the purging module, the exhaust module, the vacuum module and the monitoring module. .
In this embodiment, the extra-gas supply module specifically includes an extra-gas storage device 1 and an extra-gas supply main path 2, wherein an inlet of the extra-gas supply main path 2 is communicated with the extra-gas storage device 1, and an outlet of the extra-gas supply main path 2 is communicated with the gas utilization device 3, that is, special gas of the extra-gas storage device 1 is mainly supplied to the gas utilization device 3 through the extra-gas supply main path 2; specifically, in the gas flow direction, the extra gas supply main path 2 is sequentially provided with an extra gas isolation valve 4, a high pressure isolation valve 5, a first filter 6, a pressure regulator 7, a low pressure isolation valve 8, a manual isolation valve 9, a second filter 10 and a first check valve 11; the purging module is communicated with the extra-gas supply main circuit 2 between the extra-gas isolation valve 4 and the high-pressure isolation valve 5; the exhaust module is communicated with the special gas supply main path 2.
The special gas storage device 1 is used for storing special gases such as sulfur dioxide, ammonia and the like; the special gas isolation valve 4 is used for isolating special gas from a rear end supply system; the high-pressure isolation valve 5 is used for isolating the front-end high-pressure pipeline; the first filter 6 is used for pre-filtering the extra gas, preferably a 0.4-0.6 μm conical filter; the pressure regulator 7 is used for the regulation of the gas supply pressure; the low-pressure isolation valve 8 is used for isolating the low-pressure pipeline at the rear end; the manual isolation valve 9 is used for manually controlling the on-off of the gas supply; the second filter 10 is used for final filtration of the off-gas, preferably a 0.003-0.005 μm metal filter; the first check valve 11 is for preventing the reverse flow of the gas.
The point to be described here is that the extra-gas isolation valve 4 and the high-pressure isolation valve 5 are simultaneously arranged, and the extra-gas isolation valve 4 can effectively isolate the influence of the purge gas and the rear-end supply pipeline based on the fact that the purge module is arranged between the extra-gas isolation valve 4 and the high-pressure isolation valve 5.
On the basis of the above technical solution, it is further preferred that a first pressure sensor 12 is disposed between the extra gas isolation valve 4 and the high pressure isolation valve 5 on the extra gas supply main path 2, and a second pressure sensor 13 is disposed between the pressure regulator 7 and the low pressure isolation valve 8, wherein the first pressure sensor 12 is mainly used for monitoring the gas pressure of the gas source, and the second pressure sensor 13 is mainly used for monitoring the pressure of the conveying gas.
In this embodiment, the purge module specifically includes a purge gas storage device 14 and a purge gas path 15, an inlet of the purge gas path 15 is communicated with the purge gas storage device 14, and an outlet of the purge gas path 15 is communicated with the extra gas supply main path 2 between the extra gas isolation valve 4 and the high pressure isolation valve 5; along the gas flow direction, the purge gas path 15 is sequentially provided with a pressure regulating valve 16, a second one-way valve 17 and a purge gas isolation valve 18, and an outlet of the purge gas isolation valve 18 is communicated with the special gas supply main path 2 and the exhaust module between the special gas isolation valve 4 and the high-pressure isolation valve 5.
Wherein the purge gas storage device 14 is mainly used for storing purge gas such as nitrogen; the pressure regulating valve 16 is used for monitoring the purge gas pressure and regulating the supply pressure; the second check valve 17 is used for preventing the gas from flowing backwards; the purge gas isolation valve 18 is used to isolate the purge module. The purge gas enters the extra-gas supply module from the purge gas path 15 to purge the extra-gas supply main path 2, and the purge gas can be sequentially discharged through the high-pressure isolation valve 5, the first filter 6, the pressure regulator 7, the low-pressure exhaust valve 23, the third one-way valve 24 and the vacuum generator 26, or can be purged to the tail end of the used gas through the extra-gas supply main path 2. In addition, when the outlet pipeline of the extra-gas storage device 1 is blocked, the blocked section can be purged and emptied through the purging gas and the exhaust module.
In this embodiment, the exhaust module specifically includes a first exhaust pipeline 19, a second exhaust pipeline 20, and a third exhaust pipeline 21 that are sequentially and parallelly disposed, where a high-pressure exhaust valve 22 is disposed on the first exhaust pipeline 19, where the high-pressure exhaust valve 22 is mainly used for exhausting special gas, and an inlet of the first exhaust pipeline 19 is communicated with the tail end of the purge gas path 15, the special gas supply main path 2 between the special gas isolation valve 4 and the high-pressure isolation valve 5, that is, a front end of the high-pressure exhaust valve 22 is connected between the special gas isolation valve 4 and the high-pressure isolation valve 5 and is communicated with the purge gas path 15; a low-pressure exhaust valve 23 and a third one-way valve 24 are sequentially arranged on the second exhaust pipeline 20 along the direction of gas flow, wherein the low-pressure exhaust valve 23 is used for exhausting gas during purging, the third one-way valve 24 is used for preventing gas from flowing backwards, an inlet of the second exhaust pipeline 20 is communicated with the special gas supply main pipeline 2 between the pressure regulator 7 and the low-pressure isolation valve 8, namely, the front end of the low-pressure exhaust valve 23 is connected between the pressure regulator 7 and the low-pressure isolation valve 8, and the rear end of the low-pressure exhaust valve 23 is connected with the third one-way valve 24; the third exhaust pipeline 21 is provided with a pressure reducing valve 25, the pressure reducing valve 25 is mainly used for providing protection when the pipeline gas pressure is too high, and an inlet of the third exhaust pipeline 21 is communicated with the special gas supply main pipeline 2 between the pressure regulator 7 and the low pressure isolation valve 8; the ends of the first exhaust line 19, the second exhaust line 20 and the third exhaust line 21 are all in communication with the vacuum module.
In this embodiment, the vacuum module includes a vacuum generator 26 and a vacuum pipeline 27, and a venturi valve 28, a fourth check valve 29 and a vacuum supply valve 30 are sequentially disposed on the vacuum pipeline 27 along the direction of gas flow, an outlet of the vacuum supply valve 30 is communicated with a vacuum port of the vacuum generator 26, and ends of the first exhaust pipeline 19, the second exhaust pipeline 20 and the third exhaust pipeline 21 are all communicated with an air inlet of the vacuum generator 26.
Wherein the venturi valve 28 is primarily used to generate exhaust pressure; the fourth check valve 29 is for preventing the reverse flow of the gas; the vacuum supply valve 30 is used for the supply of vacuum; the vacuum generator 26 is used for evacuation while vacuum is being generated. In the whole system, whether the vacuum module continuously keeps working or not, when the air is supplied, the air in the first exhaust pipeline 19 is exhausted through the pressure reducing valve 25 and the vacuum generator 26 when the pressure is too high; when the air supply is stopped, the special air supply main circuit 2 is purged by the purge air, and the purge air in the second exhaust pipeline 20 is emptied after passing through the high-pressure isolation valve 5, the first filter 6, the pressure regulator 7, the low-pressure exhaust valve 23, the third one-way valve 24 and the vacuum generator 26 in sequence; finally, when the extra-gas outlet line is blocked, the blocked section can be purged and emptied by means of a purge gas and a third exhaust line 21.
In this embodiment, the monitoring module includes a sampling filter 31 and a monitoring gas circuit 32, an inlet end of the monitoring gas circuit 32 is communicated with an outlet end of the sampling filter 31, and a gas sensor 33, a sampling pump 34 and a flowmeter 35 are sequentially disposed on the monitoring gas circuit 32 along a gas flowing direction.
The monitoring module is independently arranged on one side of the special gas supply module and one side of the purging module, and can be used for monitoring whether leakage exists in the special supply gas and the purging gas in real time and analyzing the content. Specifically, the monitoring module includes a sampling filter 31 and a monitoring gas path 32, and a gas sensor 33, a sampling pump 34, and a flow meter 35 are sequentially disposed on the monitoring gas path 32. The sampling filter 31 is mainly used for filtering dust and the like in the sampled air; the gas sensor 33 is used for analyzing the gas content; the sampling pump 34 is used for pumping air; the flow meter 35 is used to eventually empty the gas.
The specific working principle is as follows: the gas pumped by the sampling pump 34 is filtered by the sampling filter 31 and then is introduced into the gas sensor 33 to analyze the gas content, if special gas is needed, the gas is analyzed immediately, and finally the pumped gas is emptied by the flowmeter 35 at the rear end of the sampling pump 34.
The control module 36 in the embodiment mainly adopts a PLC to control the special gas supply module, the purging module, the exhaust module and the vacuum module, adopts a PCB to control the monitoring module, and realizes the control of other components in the system through a human-computer interaction interface and a combined software platform, specifically, the PLC is electrically connected with the special gas isolation valve (4), the high-pressure isolation valve (5), the low-pressure isolation valve (8), the first pressure sensor (12), the second pressure sensor (13), the purging gas isolation valve (18), the high-pressure exhaust valve (22), the low-pressure exhaust valve (23), the pressure reducing valve (25) and the vacuum supply valve (30) to control the special gas isolation valve and display related data and states; the PCB controller is electrically connected to the sampling pump 34 and the gas sensor 33. Therefore, the control module 36 in this embodiment can control the actions of the related pipelines and components, and can display the information of the working state, related parameters, monitoring conditions, alarms and the like.
In addition, in order to avoid potential safety hazards caused by leakage of the pipeline, a corresponding ventilation facility can be arranged in a laboratory provided with the special gas supply system, and leaked gas can be timely discharged. And because the system is provided with the monitoring module, gas leakage can be timely found and controlled, so that the common ventilation facilities can meet the requirements.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.
Claims (10)
1. A laboratory special gas supply system is characterized by comprising a special gas supply module, a purging module, an exhaust module and a vacuum module,
the system comprises a special gas supply module, a purging module, an exhaust module, a vacuum module and a vacuum module, wherein the purging module is communicated with the special gas supply module and is used for purging pipelines in the special gas supply module, the exhaust module is communicated with the special gas supply module and the purging module and is used for exhausting special gas and purge gas, and the vacuum module is communicated with the exhaust module and is used for collecting and exhausting gas in the exhaust module.
2. The laboratory te gas supply system according to claim 1, further comprising a monitoring module, which is independently provided for monitoring whether a specific gas leaks and analyzing the content.
3. The laboratory te gas supply system according to claim 2, further comprising a control module (36), the control module (36) being electrically connected with the te gas supply module, the purge module, the exhaust module, the vacuum module, and the monitoring module.
4. Laboratory extra-gas supply system according to claim 1, wherein the extra-gas supply module comprises an extra-gas storage device (1) and an extra-gas supply main (2), the inlet of the extra-gas supply main (2) being in communication with the extra-gas storage device (1), the outlet of the extra-gas supply main (2) being in communication with a gas-consuming apparatus (3);
along the gas flow direction, a special gas isolation valve (4), a high-pressure isolation valve (5), a first filter (6), a pressure regulator (7), a low-pressure isolation valve (8), a manual isolation valve (9), a second filter (10) and a first one-way valve (11) are sequentially arranged on the special gas supply main path (2);
the purging module is communicated with the special gas supply main circuit (2) between the special gas isolation valve (4) and the high-pressure isolation valve (5);
the exhaust module is communicated with the special gas supply main path (2).
5. Laboratory extra-gas supply system according to claim 4, wherein a first pressure sensor (12) is arranged between the extra-gas isolation valve (4) and the high-pressure isolation valve (5) on the extra-gas supply main line (2), and a second pressure sensor (13) is arranged between the pressure regulator (7) and the low-pressure isolation valve (8).
6. The laboratory te gas supply system according to claim 5, characterized in that the purge module comprises a purge gas storage device (14) and a purge gas circuit (15),
an inlet of the purging gas circuit (15) is communicated with the purging gas storage device (14), and an outlet of the purging gas circuit (15) is communicated with the special gas supply main circuit (2) between the special gas isolation valve (4) and the high-pressure isolation valve (5);
along the gas flow direction, a pressure regulating valve (16), a second one-way valve (17) and a purge gas isolation valve (18) are sequentially arranged on the purge gas path (15), and an outlet of the purge gas isolation valve (18) is communicated with the special gas supply main path (2) between the special gas isolation valve (4) and the high-pressure isolation valve (5) and the exhaust module.
7. Laboratory specific gas supply system according to claim 6, characterized in that the exhaust module comprises a first exhaust line (19), a second exhaust line (20) and a third exhaust line (21) arranged in parallel in sequence,
the first exhaust pipeline (19) is provided with a high-pressure exhaust valve (22), and an inlet of the first exhaust pipeline (19) is communicated with the tail end of the purging gas path (15), the special gas supply main pipeline (2) between the special gas isolation valve (4) and the high-pressure isolation valve (5);
a low-pressure exhaust valve (23) and a third one-way valve (24) are sequentially arranged on the second exhaust pipeline (20) along the gas flowing direction, and an inlet of the second exhaust pipeline (20) is communicated with the special gas supply main pipeline (2) between the pressure regulator (7) and the low-pressure isolation valve (8);
a pressure reducing valve (25) is arranged on the third exhaust pipeline (21), and an inlet of the third exhaust pipeline (21) is communicated with the special gas supply main pipeline (2) between the pressure regulator (7) and the low-pressure isolation valve (8);
the tail ends of the first exhaust pipeline (19), the second exhaust pipeline (20) and the third exhaust pipeline (21) are communicated with the vacuum module.
8. Laboratory specific gas supply system according to claim 7, characterized in that the vacuum module comprises a vacuum generator (26) and a vacuum line (27),
the vacuum pipeline (27) is sequentially provided with a Venturi valve (28), a fourth one-way valve (29) and a vacuum supply valve (30) along the direction of gas flow, the outlet of the vacuum supply valve (30) is communicated with the vacuum port of the vacuum generator (26), and the tail ends of the first exhaust pipeline (19), the second exhaust pipeline (20) and the third exhaust pipeline (21) are communicated with the air inlet of the vacuum generator (26).
9. Laboratory specific gas supply system according to claim 2, characterized in that the monitoring module comprises a sampling filter (31) and a monitoring gas circuit (32),
the inlet end of the monitoring gas circuit (32) is communicated with the outlet end of the sampling filter (31), and a gas sensor (33), a sampling pump (34) and a flowmeter (35) are sequentially arranged on the monitoring gas circuit (32) along the gas flowing direction.
10. The laboratory te gas supply system according to claim 3, wherein the control module (36) comprises a PLC controller and a PCB controller,
the PLC is electrically connected with the extra-gas isolation valve (4), the high-pressure isolation valve (5), the low-pressure isolation valve (8), the first pressure sensor (12), the second pressure sensor (13), the purge gas isolation valve (18), the high-pressure exhaust valve (22), the low-pressure exhaust valve (23), the pressure reducing valve (25) and the vacuum supply valve (30);
the PCB controller is electrically connected with the sampling pump (34) and the gas sensor (33).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310584228.9A CN116464912A (en) | 2023-05-19 | 2023-05-19 | Special gas supply system in laboratory |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310584228.9A CN116464912A (en) | 2023-05-19 | 2023-05-19 | Special gas supply system in laboratory |
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| CN116464912A true CN116464912A (en) | 2023-07-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117450423A (en) * | 2023-09-20 | 2024-01-26 | 上海良薇机电工程有限公司 | Special gas conveying and supplying device, system and method and semiconductor process system |
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2023
- 2023-05-19 CN CN202310584228.9A patent/CN116464912A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117450423A (en) * | 2023-09-20 | 2024-01-26 | 上海良薇机电工程有限公司 | Special gas conveying and supplying device, system and method and semiconductor process system |
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