CN116399232B - Coordinate measuring apparatus for maintaining thermal balance - Google Patents

Coordinate measuring apparatus for maintaining thermal balance Download PDF

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Publication number
CN116399232B
CN116399232B CN202310606577.6A CN202310606577A CN116399232B CN 116399232 B CN116399232 B CN 116399232B CN 202310606577 A CN202310606577 A CN 202310606577A CN 116399232 B CN116399232 B CN 116399232B
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Prior art keywords
unit
heating
monitoring
coordinate measuring
measuring apparatus
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CN202310606577.6A
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CN116399232A (en
Inventor
张和君
陈源
廖学文
章智伟
冯福荣
张琥杰
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Chotest Technology Inc
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Chotest Technology Inc
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C15/00Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
    • G01C15/002Active optical surveying means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/66Tracking systems using electromagnetic waves other than radio waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4811Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4813Housing arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4817Constructional features, e.g. arrangements of optical elements relating to scanning
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/30Nuclear fission reactors

Abstract

The present disclosure provides a coordinate measuring apparatus for maintaining thermal balance, which is a coordinate measuring apparatus for tracking an auxiliary measuring device and measuring spatial coordinates of the auxiliary measuring device, comprising: the temperature control device comprises a base, an optical mechanism arranged on the base, and a heat balance module for maintaining the optical mechanism in a preset heat balance state, wherein the heat balance state refers to the same temperature of components at the same level, the optical mechanism comprises a first rotating device which is arranged on the base and can rotate relative to the base along a first axis, a second rotating device which is arranged on the first rotating device and has a second axis, and an optical main body which is arranged on the second rotating device and can rotate relative to the first rotating device around the second axis, and the heat balance module comprises a plurality of heating modules which are arranged in the optical mechanism, a plurality of monitoring modules which are arranged in the optical mechanism and are used for measuring the temperature in the optical mechanism, and a temperature control module which controls the plurality of heating modules according to the temperature obtained by the plurality of monitoring modules.

Description

Coordinate measuring apparatus for maintaining thermal balance
The application is a divisional application of patent application of 2021, 07, 23, 2021108396844 and the name of coordinate measuring instrument considering thermodynamic load balance.
Technical Field
The present invention relates to a coordinate measuring apparatus for maintaining thermal equilibrium.
Background
In the coordinate measuring apparatus, there are problems of heat generation and heat dissipation in the working process of the electronic device, and an unstable heat source is formed in the coordinate measuring apparatus in the heat generation and heat dissipation process, which can cause thermal deformation of the structure of the coordinate measuring apparatus, further cause laser beam drift, and affect the precision of the coordinate measuring apparatus. Second, there is eccentricity due to the fact that the center of gravity of the fuselage or shaft is not matched with the shaft system (azimuth shaft system and pitch shaft system) due to various reasons of the installation process, so that moment imbalance or insufficient control is caused when a servo motor drives a rotating shaft.
In the prior art, heat dissipation is mostly carried out in the coordinate measuring apparatus by adopting a heat dissipation mode such as a fan or semiconductor refrigeration, however, the heat source instability factors are not eliminated in the solutions of the prior art, and the fine thermal deformation of the internal structure of the coordinate measuring apparatus cannot be restrained or controlled. In the process of overcoming the eccentricity by adding load compensation on the shafting, unbalance can occur to other parts of the coordinate measuring instrument easily, and the eccentricity cannot be completely overcome. In addition, in the prior art, in order to ensure the accuracy or the motion stability of the shafting, a scheme of bearing to realize preload interference, that is, a certain negative running play is usually adopted. However, the process of the scheme is complex, and if the bearing clearance is too small, larger negative clearance (interference) can occur in actual operation, so that the friction heating of the bearing is increased, the temperature rise is improved, the effective clearance interference is further larger, and thus, the bearing is stopped and locked due to vicious circulation.
Disclosure of Invention
The present invention has been made in view of the above-mentioned prior art, and an object of the present invention is to improve measurement accuracy by controlling thermal balance of a coordinate measuring machine to control thermal deformation of a key member by the scheme of the present invention, and to overcome problems of eccentricity remaining when other parts of the coordinate measuring machine are installed after compensating for loads of a shafting, and problems of stable operation of the shafting by the scheme of the present invention.
To this end, the present invention discloses a coordinate measuring apparatus considering thermal load balance, which is a coordinate measuring apparatus for tracking an auxiliary measuring device and measuring spatial coordinates of the auxiliary measuring device, characterized by comprising: the temperature control device comprises a base, an optical mechanism arranged on the base, a heat balance module for maintaining the optical mechanism in a preset heat balance state, and a control mechanism for controlling the optical mechanism, wherein the optical mechanism comprises a first rotating device which is arranged on the base and can rotate relative to the base along a first axis, a second rotating device which is arranged on the first rotating device and has a second axis, and an optical main body which is arranged on the second rotating device and can rotate relative to the first rotating device around the second axis, the first axis is orthogonal to the second axis, the second rotating device comprises a first supporting part, a second supporting part and a second rotating shaft which is rotatably arranged between the first supporting part and the second supporting part, the optical main body is arranged on the second rotating shaft, at least a first load unit and a second load unit are arranged in the optical main body in a mode that the second rotating device is positioned on the second axis, and the heat balance module comprises a plurality of heating modules which are arranged in the optical mechanism, a plurality of heating modules which are arranged in the optical mechanism and are used for temperature control by the plurality of temperature control modules.
In this case, the first load unit and the second load unit are provided in the optical body so that the center of gravity of the second rotating device and the second axis overlap each other, and the eccentricity caused by misalignment of the center of gravity of the optical body and the axis is reduced, thereby improving the running stability of the shafting. In addition, in the heat balance module, the temperature control module can control whether the heating module works according to the information of the monitoring module, so that each key part in the coordinate measuring instrument reaches a preset heat balance state, and further, the heat deformation of each key part is synchronous, and the measurement precision of the coordinate measuring instrument is ensured.
In addition, the plurality of monitoring modules comprise a first monitoring unit arranged on the first supporting part and a second monitoring unit arranged on the second supporting part, and the positions of the first monitoring unit and the second monitoring unit are symmetrically distributed about the first axis. In this case, the first monitoring unit and the second monitoring unit monitor the temperatures of the first supporting portion and the second supporting portion, respectively, form temperature area information and send the temperature area information to the temperature control module, and the symmetrically distributed monitoring units can obtain the temperatures of the same gradient.
In addition, in the coordinate measuring apparatus according to the present invention, the heating module may include a first heating unit provided at the first supporting portion and a second heating unit provided at the second supporting portion, the first heating unit being adjacent to the first monitoring unit, the second heating unit being adjacent to the second monitoring unit, and the temperature control module may control the first heating unit and the second heating unit according to the first monitoring unit and the second monitoring unit so that the first supporting portion and the second supporting portion are in a thermal equilibrium state. In this case, the monitoring unit sends the monitored temperature information to the temperature control module, and the temperature control module controls whether the heating module works, so that the temperatures of the first supporting part and the second supporting part are consistent, namely, the temperatures of the first supporting part and the second supporting part are balanced, and the deformation of key parts in the coordinate measuring instrument in the thermal balance state is approximately consistent in the same gradient.
In addition, in the coordinate measuring apparatus according to the present invention, optionally, the temperature control module controls the first heating unit and the second heating unit based on a difference between a first temperature obtained by the first monitoring unit and a second temperature obtained by the second monitoring unit, and if the difference is greater than a preset threshold, the temperature control module controls the first heating unit and the second heating unit to operate. In this case, when the difference between the first temperature obtained by the first monitoring unit and the second temperature obtained by the second monitoring unit is compared and whether the difference is greater than a preset threshold is determined, the temperature control module may issue a control instruction to control the heating module to operate so as to maintain the temperature of the monitored portion in a consistent, i.e., thermal equilibrium state.
In addition, in the coordinate measuring apparatus according to the present invention, the plurality of monitoring modules may further include a third monitoring unit disposed on the optical body, the heating module may further include a third heating unit disposed on the optical body, and the temperature control module may control the first heating unit, the second heating unit, and the third heating unit according to the first monitoring unit, the second monitoring unit, and the third monitoring unit so that the optical body, the first supporting portion, and the second supporting portion are in a thermal equilibrium state. In this case, the third monitoring module obtains the temperature in the optical body and feeds back to the temperature control module, and the temperature control module calculates the information with the first monitoring module, the second monitoring module and the preset threshold value, and then controls the third heating unit to make the temperature of the optical body consistent with the temperature of the same gradient of the first supporting portion and the second supporting portion, that is, the thermal balance state.
In the coordinate measuring machine according to the present invention, the first rotating device may have a first rotating shaft rotatable along the first axis and a rotating body attached to the base by the first rotating shaft, and a third load unit and a fourth load unit may be provided in the rotating body so that a center of gravity of the first rotating device and the first axis overlap each other, and the third load unit and the fourth load unit may be distributed on both sides of the first axis. In this case, the third weight unit and the fourth weight unit are provided in the rotating body so that the center of gravity of the first rotating device and the first axis overlap each other, and the eccentricity caused by misalignment between the center of gravity of the rotating body and the axis is reduced, thereby improving the running stability of the shafting.
In addition, the coordinate measuring apparatus according to the present invention may be configured such that the first rotation shaft is rotatably mounted on the base by a first bearing mechanism including a first damping unit, a first preload unit, a first bearing, a first transmission unit, a second bearing, and a second preload unit provided along the first rotation shaft. Under the condition, the damping and preload unit in the first bearing mechanism can eliminate the damage of preload interference, and meanwhile, the first rotating shaft can be enabled to perform stable rotating motion through the damping action of the damping and preload, so that the control accuracy of the control mechanism on the first rotating shaft is improved.
In addition, in the coordinate measuring apparatus according to the present invention, optionally, the first support portion and the second support portion are mounted to the rotating body, one end of the second rotating shaft is rotatably mounted to the first support portion through a second bearing mechanism including a second transmission unit, a third preload unit, and a third bearing provided along the second rotating shaft, and the other end of the second rotating shaft is rotatably mounted to the second support portion through a third bearing mechanism including a second damping unit, a fourth preload unit, and a fourth bearing provided along the second rotating shaft. Under the condition, the first damping unit and the preload unit in the second bearing mechanism can eliminate the damage of preload interference, and meanwhile, the second rotating shaft can be enabled to perform stable rotating motion through damping and the damping effect of preload, so that the control precision of the control mechanism on the second rotating shaft is improved.
In addition, the coordinate measuring apparatus according to the present invention may further include at least one of a heating rod, a heating film and a heat conductive copper wire, and the second heating unit may include at least one of a heating rod, a heating film and a heat conductive copper wire. In this case, the heating rod or the heating copper wire can be embedded or buried on the inner surface of the supporting part to heat the supporting part, and the heating film can be attached to the inner surface of the supporting part to heat the supporting part, so that the installation is convenient.
In the coordinate measuring apparatus according to the present invention, the first heating means may be provided so as to be dispersed in the first support portion, and the second heating means may be provided so as to be dispersed in the second support portion. In this case, the dispersed heating units may heat different critical portions, and different gradients of the thermal equilibrium state may be generated according to the internal structure of the coordinate measuring apparatus.
According to the invention, the coordinate measuring instrument considering thermodynamic load balance can be provided, the scheme of the invention is used for controlling the thermodynamic balance of the coordinate measuring instrument so as to control the thermal deformation of key components to improve the measurement precision, and in addition, the scheme of the invention is used for solving the problems that the eccentricity of the coordinate measuring instrument is still existed when other components are installed after the load of a shafting is compensated and the problem of the running stability of the shafting.
Drawings
Embodiments of the application will now be explained in further detail by way of example only with reference to the accompanying drawings, in which:
FIG. 1 is a schematic perspective view showing a coordinate measuring apparatus according to the present application;
fig. 2 is a perspective view showing an optical mechanism according to the present application;
FIG. 3 is a schematic front view showing a coordinate measuring apparatus according to the present application;
FIG. 4 is a partial cross-sectional view showing a coordinate measuring machine in accordance with the present application;
FIG. 5 is a partial cross-sectional view showing a first rotation device and a base of the coordinate measuring machine according to the present application;
FIG. 6 is a partial cross-sectional view showing a second rotation device and an optical body of the coordinate measuring machine according to the present application;
FIG. 7 is a schematic diagram showing the distribution of monitoring modules of the coordinate measuring machine according to the present application;
fig. 8 is a schematic diagram showing the distribution of the heating module and the temperature control module of the coordinate measuring apparatus according to the present application.
Detailed Description
All references cited herein are incorporated by reference in their entirety as if fully set forth. Unless defined otherwise, technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. A general guide for many of the terms used in the present application is provided to those skilled in the art. Those skilled in the art will recognize many methods and materials similar or equivalent to those described herein that can be used in the practice of the present application. Indeed, the application is in no way limited to the methods and materials described.
FIG. 1 is a schematic perspective view showing a coordinate measuring apparatus according to the present invention; fig. 2 is a perspective view showing an optical mechanism according to the present invention; FIG. 3 is a schematic front view showing a coordinate measuring apparatus according to the present invention; FIG. 4 is a partial cross-sectional view showing a coordinate measuring machine in accordance with the present invention; fig. 5 is a partial cross-sectional view showing a first rotating device and a base of the coordinate measuring machine according to the present invention. FIG. 6 is a partial cross-sectional view showing a second rotating device and an optical body of the coordinate measuring machine according to the present invention, and FIG. 7 is a schematic diagram showing a distribution of monitoring modules of the coordinate measuring machine according to the present invention; fig. 8 is a schematic diagram showing the distribution of the heating module and the temperature control module of the coordinate measuring apparatus according to the present invention.
As shown in fig. 1, 2, 7 and 8, a coordinate measuring apparatus 1 according to the present invention, which is a coordinate measuring apparatus 1 for tracking an auxiliary measuring device (not shown) and measuring spatial coordinates of the auxiliary measuring device, includes: the temperature control device includes a base 10, an optical mechanism 20 provided above the base 10, a heat balance module (not shown) for maintaining the optical mechanism 20 in a preset heat balance state, and a control mechanism (not shown) for controlling the optical mechanism 20, the optical mechanism 20 including a first rotating device 21 mounted to the base 10 and rotatable about a first axis with respect to the base 10, a second rotating device 22 provided to the first rotating device 21 and having a second axis, and an optical body 30 mounted to the second rotating device 22 and rotatable about the second axis with respect to the first rotating device 21, the first axis being orthogonal to the second axis, the second rotating device 22 including a first support 222, a second support 223, and a second rotating shaft 221 rotatably provided between the first support 222 and the second support 223, the optical body 30 being mounted to the second rotating shaft 221, at least a first load cell 2244 and a second load cell 2245 being provided within the optical body 30 in such a manner that the second rotating device 22 is located at the second axis, the heat balance module including a plurality of heating modules arranged within the optical mechanism 20, a plurality of temperature control modules 431 arranged within the optical mechanism 20 and used in order to obtain a temperature control module (temperature control module) by the plurality of temperature control modules 20 and a temperature control module (temperature control module 432) being controllable by the temperature control module). In this case, the first load cell 2244 and the second load cell 2245 are provided in the optical body 30 so that the center of gravity of the second rotating device 22 and the second axis overlap each other, and the eccentricity caused by misalignment of the center of gravity and the axis of the optical body 30 is reduced, thereby improving the operational stability of the shafting. In addition, in the heat balance module, the temperature control module can control whether the heating module works according to the information of the monitoring module, so that each key part in the coordinate measuring apparatus 1 reaches a preset heat balance state, and further, the heat deformation of each key part is synchronous, and the measurement precision of the coordinate measuring apparatus 1 is ensured.
In some examples, as shown in fig. 7 and 8, the heat balance module may include a heating module, a monitoring module and a temperature control module, where the heating module may be further configured by a plurality of heating units with different materials, different shapes and different arrangements to better adapt to different heating requirements, the monitoring module may be further configured by a plurality of monitoring units with different types to adapt to different monitoring environments, the temperature control module may be configured by a general controller or a plurality of controllers, and the general controller may be convenient to install and may simultaneously receive different monitoring signals and simultaneously control different heating units, and the controllers may receive the respective working signals and control the heating units to which the working signals belong, so as to reduce operation errors.
In some examples, the thermal equilibrium may refer to a temperature or heat uniformity of the same gradient. The gradient direction may refer to a vertical direction, in other words, in the coordinate measuring apparatus 1, the temperatures of the components at the same level may be the same.
In some examples, as shown in fig. 7, the plurality of monitoring modules may include a first monitoring unit 421 (may include a first monitoring unit 421a, a first monitoring unit 421b, a first monitoring unit 421 c) disposed at the first support 222 and a second monitoring unit 422 (may include a second monitoring unit 421a, a second monitoring unit 421b, a second monitoring unit 421 c) disposed at the second support 223, and the positions of the first monitoring unit 421 and the second monitoring unit 422 may be symmetrically distributed about the first axis. In this case, the first monitoring unit 421 and the second monitoring unit 422 monitor the temperatures of the first supporting portion 222 and the second supporting portion 223, respectively, and the formed temperature area information is sent to the temperature control module, and the symmetrically distributed monitoring units can obtain the same gradient temperature.
In some examples, the first monitoring unit 421 may further be composed of a plurality of temperature sensors and distributed to the first support 222, and the second monitoring unit 422 may further be composed of a plurality of temperature sensors and distributed to the second support 223.
In some examples, the temperature sensor may be one of an RTD, a platinum thermal resistance temperature sensor, a thermistor temperature sensor, a thermocouple resistance temperature sensor, and a semiconductor temperature sensor, which may be selected according to different mounting requirements.
In some examples, the first and second monitoring units 421 and 422 may be symmetrically distributed about the first axis, in other examples, the first and second monitoring units 421 and 422 may not be symmetrically distributed about the first axis, in which case the first and second monitoring units 421 and 422 may be mounted for a specific heat source (a device capable of generating heat such as a laser generator or a motor) and a critical component (e.g., a bearing).
In some examples, the heating module may include a first heating unit 411 disposed at the first support 222 and a second heating unit 412 disposed at the second support 223, the first heating unit 411 may be adjacent to the first monitoring unit 421, the second heating unit 412 may be adjacent to the second monitoring unit 422, and the temperature control module may control the first heating unit 411 and the second heating unit 412 to be in a thermal equilibrium state between the first support 222 and the second support 223 according to the first monitoring unit 421 and the second monitoring unit 422, as shown in fig. 8. In this case, the monitoring unit sends the monitored temperature information to the temperature control module, and the temperature control module controls whether the heating module is operated so that the temperatures of the first support 222 and the second support 223 are in agreement, that is, the thermal equilibrium, and the deformation of the key components in the coordinate measuring apparatus 1 in the thermal equilibrium state is approximately in agreement at the same gradient.
In some examples, the monitoring units (e.g., the first monitoring unit 421b, the second monitoring unit 422b, and the third monitoring unit 423 b) may also be disposed on key components, and the heating modules may be disposed around the monitoring modules in a scattered manner.
In some examples, key components of the coordinate measuring apparatus 1 may refer to the first rotation axis 211, the second rotation axis 221, and the optical body 30.
In some examples, as shown in fig. 7, a fourth monitoring unit 424 (may include a fourth monitoring unit 424a, a fourth monitoring unit 424b, a fourth monitoring unit 424 c), a fifth monitoring unit 425 (may include a fifth monitoring unit 424a, a fifth monitoring unit 424b, a fifth monitoring unit 424 c), and a sixth monitoring unit 426 (may include a sixth monitoring unit 424a, a sixth monitoring unit 424b, a sixth monitoring unit 424 c) may be provided at the base 10 and the rotating body 212 of the coordinate measuring apparatus 1 and form a monitoring network that monitors different gradient temperatures with the first, second, and third monitoring units 421, 422, 423 (may include a third, 423b, 423 c). For example, the first monitoring unit 421a, the second monitoring unit 422a and the third monitoring unit 423a form a first monitoring gradient, and the first monitoring unit 421b, the second monitoring unit 422b and the third monitoring unit 423b form a second monitoring gradient and further form a further gradient.
In some examples, a fourth heating unit 414, a fifth heating unit 415, and a sixth heating unit 416 may be provided at the base 10 and the rotating body 212 of the coordinate measuring apparatus 1 as shown in fig. 8 and constitute heating networks of different gradient temperatures with the first heating unit 411, the second heating unit 412, and the third heating unit 413 (may include the third heating unit 413a and the third heating unit 413 b).
In some examples, the temperature control module may control the first heating unit 411 and the second heating unit 412 based on a difference between the first temperature obtained by the first monitoring unit 421 and the second temperature obtained by the second monitoring unit 422, and if the difference is greater than a preset threshold, the temperature control module controls the first heating unit 411 and the second heating unit 412 to operate. In this case, when the difference between the first temperature obtained by the first monitoring unit 421 and the second temperature obtained by the second monitoring unit 422 is compared and whether the difference is greater than the preset threshold is determined, the temperature control module may issue a control command to control the heating module to operate so as to maintain the temperature of the monitored portion in a consistent, i.e., thermal equilibrium state.
In some examples, the plurality of monitoring modules may further include a third monitoring unit 423 disposed at the optical body 30, the heating module may further include a third heating unit 413 disposed at the optical body 30, and the temperature control module may control the first heating unit 411, the second heating unit 412, and the third heating unit 413 according to the first monitoring unit 421, the second monitoring unit 422, and the third monitoring unit 423 to place the optical body 30, the first support 222, and the second support 223 in a thermal equilibrium state. In this case, the third monitoring unit 423 obtains the temperature in the optical body 30 and feeds back to the temperature control module, which performs calculation processing on the information with the first monitoring unit 421, the second monitoring unit 422, and the preset threshold value, and then controls the third heating unit 413 so that the temperature of the optical body 30 coincides with the temperature of the same gradient of the first support 222 and the second support 223, that is, the thermal equilibrium state.
In some examples, the first heating unit 411 may include at least one of a heating rod, a heating film, and a heat conductive copper wire, and the second heating unit 412 may include at least one of a heating rod, a heating film, and a heat conductive copper wire. In this case, the heating rod or the heating copper wire can be embedded or buried on the inner surface of the supporting part to heat the supporting part, and the heating film can be attached to the inner surface of the supporting part to heat the supporting part, so that the installation is convenient.
In some examples, the first heating unit 411 may be disposed at the first support 222 in such a manner as to be dispersed at the first support 222, and the second heating unit 412 may be disposed at the second support 223 in such a manner as to be dispersed at the second support 223. In this case, the dispersed heating units may heat different critical portions, and different gradients of the state of thermal equilibrium may be generated according to the internal structure of the coordinate measuring apparatus 1.
In some examples, the base 10, the first rotating device 21, and the second rotating device 22 may be formed with cavities, and the heating module may be provided at inner surfaces of the cavities of the base 10, the first rotating device 21, and the second rotating device 22 in one of a fitting, a inlay, or a buried manner.
In some examples, as shown in fig. 3, the coordinate measuring apparatus 1 may include: a base 10, an optical mechanism 20, and a control mechanism that controls the optical mechanism 20. In some examples, the optical mechanism 20 may be disposed above the base 10.
In some examples, a handle connecting the first support 222 and the second support 223 may be further provided on the first support 222 and the second support 223. In this case, the coordinate measuring apparatus 1 can be moved and detached easily.
In some examples, as shown in fig. 6, the optical mechanism 20 may include a first rotation device 21 mounted to the base 10 and rotatable relative to the base 10 about a first axis, a second rotation device 22 having a second axis disposed at the first rotation device 21, and an optical body 30 mounted to the second rotation device 22 and rotatable relative to the first rotation device 21 about the second axis. The first axis is disposed along a vertical direction and orthogonal to the second axis.
In some examples, the rotating body 212 of the first rotating device 21 and the first and second supporting parts 222, 223 of the second rotating device 22 may be integrally formed, in other words, the rotating body 212 and the supporting parts may be connected to each other without absolute dividing lines.
In some examples, the first rotation shaft 211 may be connected to the first rotation device 21 by a bearing, and after the first control mechanism may drive the first transmission unit 2136, the first transmission unit 2136 may drive the first rotation shaft 211, that is, implement the rotation motion of the first rotation device 21.
In some examples, the second rotation shaft 221 may be connected to a bearing fixed to a supporting portion of the second rotation device 22, the optical body 30 is installed on the second rotation shaft 221, and the second control mechanism may drive the second transmission unit 2246, and then the second transmission unit 2246 may drive the second rotation shaft 221, that is, implement the rotation movement of the optical body 30.
In some examples, the control mechanism may adjust the control output to control the first and second rotating devices 21, 22 to track the target based on feedback or instructions. In this case, the damage of the preload interference can be eliminated, and the rotation shaft can be stably rotated by the damping action of the damping and the preload, so that the control accuracy of the control mechanism to the rotation shaft (including the first rotation shaft 211 and the second rotation shaft 221) can be improved. Further, since the third load cell 2134 and the fourth load cell 2134 are provided in the rotating body 212 so that the center of gravity of the first rotating device 21 and the first axis are overlapped with each other, and the first load cell 2244 and the second load cell 2245 are provided in the optical body 30 so that the center of gravity of the second rotating device 22 and the second axis are overlapped with each other, the eccentricity generated by the misalignment of the center of gravity of the second rotating device 22 and the axis of the optical body 30 can be reduced by using a plurality of load cells, and the running stability of the shafting can be improved.
In some examples, the load cells may include a first load cell 2244, a second load cell 2245, a third load cell 2134, a fourth load cell 2135.
In some examples, as shown in fig. 4 and 5, the first bearing mechanism 213 may be provided with a first damping unit 2131, a first preload unit 2132, a first bearing 2137, a first transmission unit 2136, a second bearing 2138, and a second preload unit 2133 in this order from the bottom of the base 10.
In some examples, the base 10 of the coordinate measuring machine 1 may be used to carry a rotation device and a control device of the coordinate measuring machine 1, and the first rotation device 21 may be connected to the first rotation device 21 through a bearing, so that the first rotation device 21 may be driven by a motor to perform a rotation motion relative to the base 10.
In some examples, the base 10 may also be used to mount a first control mechanism of the first rotation device 21, a first damping unit 2131, a first preload unit 2132, a second preload unit 2133, a first bearing 2137, a second bearing 2138, and the like.
In some examples, the base 10 may be cylindrical, frustoconical, hemispherical, square, or other irregularities to accommodate installation and design requirements.
In some examples, as shown in fig. 4 and 5, the first rotating device 21 may have a first rotating shaft 211 rotatable along a first axis and a rotating body 212 mounted to the base 10 through the first rotating shaft 211, the first rotating shaft 211 rotatably passing through the second preload unit 2133, the second bearing 2138, the first transmission unit 2136, the first bearing 2137, the first preload unit 2132, and the first damping unit 2131 of the first bearing mechanism 213 in this order. In this case, the damping and preload units (including the first preload unit 2132 and the second preload unit 2133) in the first bearing mechanism 213 can eliminate the damage of the preload interference, and at the same time, the first rotation shaft 211 can be stably rotated by the damping action of the damping and preload, so that the control accuracy of the control mechanism on the first rotation shaft 211 can be improved.
In some examples, at least two or more load cells may be disposed within the rotating body 212, which may coincide the center of gravity of the first rotating device 21 with the first axis. The first rotating device 21 has a first rotating shaft 211 rotatable along a first axis and a rotating body 212 attached to the base 10 via the first rotating shaft 211, and a third load unit 2134 and a fourth load unit 2135 are provided in the rotating body 212 so that the center of gravity of the first rotating device 21 and the first axis overlap, and the third load unit 2134 and the fourth load unit 2135 are distributed on both sides of the first axis. In this case, the third and fourth counterweight units 2246 and 2135 are provided in the rotating body 212 so that the center of gravity of the first rotating device 21 and the first axis line overlap each other, and the eccentricity caused by misalignment of the center of gravity of the rotating body 212 and the axis line is reduced, whereby the running stability of the shafting can be improved.
In some examples, the rotation direction of the first rotation means 21 of the coordinate measuring machine 1, i.e. the first rotation direction, may be a clockwise or counterclockwise rotation direction, and the rotation angle may be any one of 0 ° -360 °.
In some examples, the outer race of the second bearing 2138 may be fixed to the base 10, and the outer race of the first bearing 2137 may be fixed to the base 10 and provided with at least 3 or more fixing rods connected to the first damping unit 2131.
In this case, the outer rings of the first bearing 2137 and the second bearing 2138 are fixed in the base 10 to fix the first rotation shaft 211, and the outer ring of the first bearing 2137 is provided with fixing rods connected to the first damping unit 2131, that is, the rotary damper, so that three or more fixing rods can better fix the first damping unit 2131 and maintain torque balance, thereby prolonging the service life of the first damping unit 2131.
In some examples, the first damping unit 2131 may be connected with the first rotation shaft 211 through a first connector (not shown). In this case, by means of the connector connection, the wear of the rotating shaft can be reduced while the damping force generated by the damping unit can play a role in maintaining a smooth rotating motion when accelerating, decelerating or otherwise interfering with the rotating shaft.
In some examples, the first preload unit 2132, the second preload unit 2133 may be provided as an external preload. In this case, the external preload can eliminate the problem of bearing locking caused by complicated installation process and frictional heat generation of the internal preload (i.e., negative play or preload interference), and the damping of the external preload can play a role in maintaining stable rotational motion when accelerating, decelerating or otherwise interfering with the rotating shaft.
In some examples, the first damping unit 2131 may be one of a damping ring, a damper, or damping oil, and the first preload unit 2132, the second preload unit 2133 may be one of a spacer ring, a gear, or a spring device. In this case, according to different installation requirements, a damper and a damping ring can be selected as a damping unit to stabilize the operation of the rotating shaft, and a spacer and a spring device can be selected as a preload to reduce bearing friction while providing a preload to stabilize the movement of the rotating shaft.
In some examples, the first damping unit 2131 may be damping oil and disposed in the third bearing 2247 and the fourth bearing 2248.
In some examples, the first load cell 2244, the second load cell 2245, the third load cell 2134, and the fourth load cell 2135 may be one of square, pie-shaped, semi-circular, or irregular. In this case, the third load unit 2134 and the fourth load unit 2135 may be provided in two and symmetrically distributed on the rotating body 212 to keep the axis of the rotating shaft coincident with the center of gravity of the coordinate measuring apparatus 1, so that the movement of the rotating shaft is more stable and precise.
In some examples, the load cells in the rotating body 212 may be secured within the rotating body 212 in one of screw-securing, adhesive-securing, snap-fit securing. In this case, the load unit may be fastened to the rotating body 212 by screws, and it is convenient to add a new load when the load does not meet the actual demand; the error of load compensation caused by screw tightening can be reduced by using the adhesive for tightening; the clamping and fastening mode can better reduce errors of screw fastening and adhesive fastening.
In some examples, load cells in the rotating body 212 may be formed on the rotating shaft to reduce the installation steps.
In some examples, the load cells in the rotating body 212 may be fabricated from a high temperature resistant material such as metal, alloy, plastic, and the like.
In other examples, the load cells in the rotating body 212 may be modular to facilitate matching actual installation requirements, or may be block-shaped, as integrated after computer simulation, to reduce installation steps.
In some examples, as shown in fig. 4 and 6, the second rotating device 22 may include a first support 222, a second support 223, and a second rotation shaft 221 rotatably disposed between the first support 222 and the second support 223, and the optical body 30 may be mounted to the second rotation shaft 221.
In some examples, the first support 222 may be provided with a second bearing mechanism 224, the second bearing mechanism 224 includes a second transmission unit 2246, a third preload unit 2242, and a third bearing 2247, one end of the second rotation shaft 221 is rotatably provided to pass through the third bearing 2247, the third preload unit 2242, and the second transmission unit 2246 of the second bearing mechanism 224 in order, the second support 223 may be provided with a third bearing mechanism 225, the third bearing mechanism 225 includes a fourth bearing 2248, a fourth preload unit 2243, and a second damping unit 2241, and the other end of the second rotation shaft 221 is rotatably provided to pass through the fourth bearing 2248, the fourth preload unit 2243, and the second damping unit 2241 in order. In this case, the damping (the second damping unit 2241) and the preload unit (including the third preload unit 2242 and the fourth preload unit 2243) in the second bearing mechanism 224 can eliminate the damage of the preload interference, and at the same time, the second rotation shaft 221 can be made to perform stable rotation movement by the damping action of the damping and the preload, so that the control accuracy of the control mechanism on the second rotation shaft 221 can be improved.
In some examples, first load cell 2244 and second load cell 2245 may be disposed within optical body 30, and at least two or more load cells of first load cell 2244 and second load cell 2245 may coincide with a center of gravity and a second axis of second rotating device 22.
In some examples, the rotation direction of the second rotation device 22 of the coordinate measuring apparatus 1, i.e., the second rotation direction, may be a clockwise or counterclockwise rotation direction, and the rotation angle may be any one of 0 ° -180 °.
In some examples, the outer race of the third bearing 2247 may be fixed to the base 10, and the outer race of the fourth bearing 2248 may be fixed to the base 10 and provided with at least 3 or more fixing bars connected with the second damping unit 2241.
In this case, the outer rings of the third and fourth bearings 2248 are fixed in the base 10 to fix the second rotation shaft 221, and fixing rods connected to the second damping unit 2241, that is, the rotary damper, are provided on the outer ring of the fourth bearing 2248, so that three or more fixing rods can better fix the first damping unit 2131 and maintain torque balance, thereby prolonging the service life of the second damping unit 2241.
In some examples, the second damping unit 2241 may be connected with the second rotation shaft 221 through a second connector (not shown). In this case, by means of the connector connection, the wear of the rotating shaft can be reduced while the damping force generated by the damping unit can play a role in maintaining a smooth rotating motion when accelerating, decelerating or otherwise interfering with the rotating shaft.
In some examples, third preload unit 2242, fourth preload unit 2243 may be provided as an external preload. In this case, the external preload can eliminate the problem of bearing locking caused by complicated installation process and frictional heat generation of the internal preload (i.e., negative play or preload interference), and the damping of the external preload can play a role in maintaining stable rotational motion when accelerating, decelerating or otherwise interfering with the rotating shaft.
In some examples, the second damping unit 2241 may be one of a damping ring, a damper, or damping oil, and the third and fourth preload units 2242, 2243 may be one of a spacer, a gear, or a spring device. In this case, according to different installation requirements, a damper and a damping ring can be selected as a damping unit to stabilize the operation of the rotating shaft, and a spacer and a spring device can be selected as a preload to reduce bearing friction while providing a preload to stabilize the movement of the rotating shaft.
In some examples, second damping unit 2241 may be damping oil and disposed in third bearing 2247 and fourth bearing 2248.
In some examples, the plurality of load cells may be one of square, pie-shaped, semi-circular, or irregular. In this case, the plurality of load units may be two and symmetrically distributed in the optical body 30 to keep the axis of the rotation shaft coincident with the center of gravity of the coordinate measuring apparatus 1, so that the movement of the rotation shaft is more stable and precise.
In some examples, the load cell is secured within the optical body 30 with one of screw-securing, adhesive-securing, snap-securing. In this case, the load unit may be fastened to the optical body 30 by screws, and it is convenient to add a new load when the load does not meet the actual demand; the error of load compensation caused by screw tightening can be reduced by using the adhesive for tightening; the clamping and fastening mode can better reduce errors of screw fastening and adhesive fastening.
In some examples, the load cells in the optical body 30 may be formed on the rotational axis to reduce the mounting steps.
In some examples, the load cell in the optical body 30 may be fabricated from a high temperature resistant material such as metal, alloy, plastic, or the like.
In other examples, the load cells in the optical body 30 may be modular to facilitate matching actual installation requirements, or may be block-shaped, as integrated after computer simulation, to reduce installation steps.
In some examples, the first support 222 and the second support 223 may be integrally formed or separately formed on the first rotation shaft 211, and have a U-shape or a concave shape.
In some examples, the support may be square, cylindrical, frustoconical, hemispherical, or irregularly shaped to accommodate different installation needs or designs. For example, the square body can better compensate the load of the internal parts so as to keep the parts symmetrical or balanced.
In some examples, a support may be used to support the second rotation shaft 221 and the optical body 30, and the U-shaped bottom of the two supports, i.e., the rotation body 212, may be used to mount a portion of the first rotation shaft 211 of the first rotation device 21, and may also be used to mount multiple load cells of the first rotation device 21.
In some examples, the first support 222 may be used to connect the second rotation shaft 221 and to mount a second control mechanism (not shown) of the second rotation device 22, a third bearing 2247, a third preload unit 2242; the second support 223 may be used to connect the second rotation shaft 221 and to mount the fourth bearing 2248, the fourth preload unit 2243, and the second damping unit 2241 of the second rotation device 22.
In some examples, the optical body 30 may be a pie-shaped, cylindrical, spherical, square, or other irregularly shaped box to accommodate different device mounting requirements. For example, the cylindrical optical body 30 may have more rotation angles and measurement ranges.
In some examples, a first control mechanism (not shown) may be disposed on the first rotation shaft 211 of the rotation body 212.
In some examples, the second preload unit 2133 may be disposed on the first rotational shaft 211 of the rotating body 212.
In some examples, the first damping unit 2131 may not be provided to accommodate different installation needs of the coordinate measuring device 1.
In some examples, the second damping unit 2241 may not be provided to accommodate different installation needs of the coordinate measuring apparatus 1.
In some examples, the first transmission unit 2136 may be one of a belt, gear, or other transmission. In this case, the motor may be driven to rotate the first rotation shaft 211 through the transmission unit after being started, and the motor may precisely control the movement speed according to the calculation requirement.
In some examples, the first control mechanism (not shown) may be configured to operate directly, in other words, the first transmission unit 2136 may not need to be provided, the first rotation shaft 211 may directly transmit with the first control mechanism (not shown), and the first control mechanism (not shown) may be configured to select one of a servo motor, a stepper motor, a piezoelectric motor, or a torque motor.
In some examples, the first control mechanism (not shown) may be a direct drive motor. In this case, the motor can directly drive the rotation motion of the rotation shaft without the need for the transmission mechanism for connection transmission, enabling the reduction of the assembly steps.
In some examples, the transmission unit may be integrally formed with the first rotation shaft 211 and transmit with the first motor using gears, a transmission belt, or the like.
In some examples, the second transmission unit 2246 may be one of a belt, a gear, or other transmission. In this case, the motor may be driven to rotate the second rotation shaft 221 through the transmission unit after being started, and the motor may precisely control the movement speed according to the calculation requirement.
In some examples, the second control mechanism (not shown) may be selectively operated in a direct-drive manner, in other words, the second transmission unit 2246 may not be provided, the second rotation shaft 221 may directly transmit with the second control mechanism (not shown), and the second control mechanism (not shown) may select one of a torque motor, a servo motor, a stepping motor, or a piezoelectric motor.
In some examples, the second transmission unit 2246 may be integrally formed with the second rotation shaft 221 and transmit with the second motor using gears, a transmission belt, or the like.
In some examples, optionally, third bearing 2247, fourth bearing 2248, third bearing 2247, and fourth bearing 2248 are one of ball bearings, cylindrical bearings, or conical bearings. In this case, the bearings can support the first and second rotation shafts 211 and 221, reduce the friction coefficient during the movement thereof, and secure the rotation accuracy thereof.
In some examples, the bearing and the rotating shaft may be mounted by way of an interference snap fit to reduce play between the rotating shaft and the bearing.
In some examples, the bearing may be provided with damping oil to reduce the step of installing the first damping unit 2131 and the second damping unit 2241.
According to the application, the coordinate measuring apparatus 1 can be provided, and the problems of eccentricity and running stability of the shaft system when other parts of the coordinate measuring apparatus 1 are installed after the load of the shaft system is compensated can be overcome through the scheme of the application.
Various embodiments of the present application are described above in the detailed description. While the description directly describes the above embodiments, it should be understood that modifications and/or variations to the specific embodiments shown and described herein will occur to those skilled in the art. Any such modifications or variations that fall within the scope of this specification are intended to be included therein. Unless specifically indicated otherwise, the inventors intend that words and phrases in the specification and claims be given the ordinary and accustomed meaning of a person of ordinary skill.
The foregoing description of various embodiments of the application, which are known to the inventors at the time of filing, has been presented and is intended for the purposes of illustration and description. It is not intended to be exhaustive or to limit the application to the precise form disclosed, and many modifications and variations are possible in light of the above teaching. The embodiments described are provided to explain the principles of the application and its practical application and to enable others skilled in the art to utilize the application in various embodiments and with various modifications as are suited to the particular use contemplated. Therefore, it is intended that the application not be limited to the particular embodiments disclosed for carrying out this application.
While particular embodiments of the present invention have been shown and described, it will be obvious to those skilled in the art that, based upon the teachings of this invention, changes and modifications may be made without departing from this invention and its broader aspects and, therefore, the appended claims are to encompass within their scope all such changes and modifications as are within the true spirit and scope of this invention. It will be understood by those within the art that, in general, terms used herein are generally intended to be "open" terms (e.g., the term "comprising" should be interpreted as "including but not limited to," the term "having" should be interpreted as "having at least," the term "comprising" should be interpreted as "including but not limited to," etc.).

Claims (10)

1. A coordinate measuring apparatus for maintaining thermal balance, which is a coordinate measuring apparatus for tracking an auxiliary measuring device and measuring spatial coordinates of the auxiliary measuring device, characterized in that,
comprising the following steps: the temperature control device comprises a base, an optical mechanism arranged on the base, and a thermal balance module used for maintaining the optical mechanism in a preset thermal balance state, wherein the thermal balance state refers to the same temperature of a component with the same level, the optical mechanism comprises a first rotating device which is arranged on the base and can rotate relative to the base along a first axis, a second rotating device which is arranged on the first rotating device and has a second axis, and an optical main body which is arranged on the second rotating device and can rotate relative to the first rotating device along the second axis, the thermal balance module comprises a plurality of heating modules which are arranged in the optical mechanism, a plurality of monitoring modules which are arranged in the optical mechanism and used for measuring the temperature in the optical mechanism, and a temperature control module which controls the plurality of heating modules according to the temperature of the same gradient obtained by the plurality of monitoring modules, and the temperature control module controls the plurality of heating modules according to the temperature of the same gradient obtained by the plurality of monitoring modules.
2. The coordinate measuring apparatus according to claim 1, wherein,
the second rotating device comprises a first supporting part, a second supporting part and a second rotating shaft rotatably arranged between the first supporting part and the second supporting part, the plurality of monitoring modules comprise a first monitoring unit arranged on the first supporting part and a second monitoring unit arranged on the second supporting part, and the positions of the first monitoring unit and the second monitoring unit are symmetrically distributed about the first axis.
3. The coordinate measuring apparatus according to claim 2, wherein,
the heating module comprises a first heating unit arranged on the first supporting part and a second heating unit arranged on the second supporting part, wherein the first heating unit is close to the first monitoring unit, and the second heating unit is close to the second monitoring unit.
4. The coordinate measuring apparatus according to claim 3, wherein,
the heating module further comprises a third heating unit, a fourth heating unit, a fifth heating unit and a sixth heating unit to form heating networks with different gradient temperatures.
5. The coordinate measuring apparatus according to claim 3, wherein,
The first heating unit comprises at least one of a heating rod, a heating film and a heat conducting copper wire, and the second heating unit comprises at least one of a heating rod, a heating film and a heat conducting copper wire.
6. The coordinate measuring apparatus according to claim 3, wherein,
the temperature control module controls the first heating unit and the second heating unit based on a difference between a first temperature obtained by the first monitoring unit and a second temperature obtained by the second monitoring unit, and if the difference is greater than a preset threshold, the temperature control module controls the first heating unit and the second heating unit to work.
7. The coordinate measuring apparatus according to claim 2, wherein,
the monitoring module further comprises a third monitoring unit, a fourth monitoring unit, a fifth monitoring unit and a sixth monitoring unit to form a monitoring network for monitoring different gradient temperatures.
8. The coordinate measuring apparatus according to claim 2, wherein,
the first monitoring unit is composed of a plurality of temperature sensors, and the temperature sensors are one of RTDs, platinum thermal resistance temperature sensors, thermistors temperature sensors, thermocouple resistance temperature sensors and semiconductor temperature sensors.
9. The coordinate measuring apparatus according to claim 1, wherein,
the temperature control module is composed of a master controller or a plurality of controllers, and the master controller receives different monitoring signals and simultaneously controls different heating modules.
10. The coordinate measuring apparatus according to claim 1, wherein,
the first axis is arranged along a vertical direction and orthogonal to the second axis.
CN202310606577.6A 2020-12-25 2021-07-23 Coordinate measuring apparatus for maintaining thermal balance Active CN116399232B (en)

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CN202011566649.1A CN112556579A (en) 2020-12-25 2020-12-25 Six-degree-of-freedom space coordinate position and attitude measuring device
CN2020115666491 2020-12-25
CN202310606577.6A CN116399232B (en) 2020-12-25 2021-07-23 Coordinate measuring apparatus for maintaining thermal balance
CN202110839684.4A CN113432534B (en) 2020-12-25 2021-07-23 Coordinate measuring instrument considering thermodynamic load balance

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CN202011566649.1A Withdrawn CN112556579A (en) 2020-12-25 2020-12-25 Six-degree-of-freedom space coordinate position and attitude measuring device
CN202211371781.6A Active CN115540758B (en) 2020-12-25 2021-07-23 Coordinate measuring device
CN202211371760.4A Pending CN115523838A (en) 2020-12-25 2021-07-23 Optical body for distance measurement of a target ball
CN202121702821.1U Active CN215217506U (en) 2020-12-25 2021-07-23 Laser tracker
CN202310606577.6A Active CN116399232B (en) 2020-12-25 2021-07-23 Coordinate measuring apparatus for maintaining thermal balance
CN202110839682.5A Active CN113340205B (en) 2020-12-25 2021-07-23 Coordinate measuring instrument
CN202121696879.XU Active CN215217505U (en) 2020-12-25 2021-07-23 Laser tracker with attitude camera
CN202310601382.2A Active CN116399231B (en) 2020-12-25 2021-07-23 Thermal balancing module for coordinate measuring instrument
CN202110839684.4A Active CN113432534B (en) 2020-12-25 2021-07-23 Coordinate measuring instrument considering thermodynamic load balance
CN202311385944.0A Pending CN117433415A (en) 2020-12-25 2021-09-15 Orthogonal axis system of coordinate measuring instrument
CN202111081868.5A Active CN113566710B (en) 2020-12-25 2021-09-15 Ranging system with optical switch
CN202211345444.XA Active CN115597489B (en) 2020-12-25 2021-09-15 Distance measuring system
CN202311394815.8A Pending CN117433416A (en) 2020-12-25 2021-09-15 Method for calibrating orthogonal axis system and coordinate measuring device
CN202211345415.3A Active CN115540757B (en) 2020-12-25 2021-09-15 Distance measuring system for improving measuring accuracy
CN202111081855.8A Active CN113739700B (en) 2020-12-25 2021-09-15 Method for adjusting orthogonal axis system of coordinate measuring instrument
CN202122239940.4U Active CN215984384U (en) 2020-12-25 2021-09-15 Ranging system with polarization maintaining optical fiber
CN202210333866.9A Active CN115014196B (en) 2020-12-25 2021-09-18 Distance measuring system for absolute distance measurement
CN202111112195.5A Active CN113686245B (en) 2020-12-25 2021-09-18 Ranging system with polarization maintaining optical fiber
CN202210333868.8A Active CN114838658B (en) 2020-12-25 2021-09-18 Optical path system for improving beam combining precision

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CN202211371781.6A Active CN115540758B (en) 2020-12-25 2021-07-23 Coordinate measuring device
CN202211371760.4A Pending CN115523838A (en) 2020-12-25 2021-07-23 Optical body for distance measurement of a target ball
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CN202121696879.XU Active CN215217505U (en) 2020-12-25 2021-07-23 Laser tracker with attitude camera
CN202310601382.2A Active CN116399231B (en) 2020-12-25 2021-07-23 Thermal balancing module for coordinate measuring instrument
CN202110839684.4A Active CN113432534B (en) 2020-12-25 2021-07-23 Coordinate measuring instrument considering thermodynamic load balance
CN202311385944.0A Pending CN117433415A (en) 2020-12-25 2021-09-15 Orthogonal axis system of coordinate measuring instrument
CN202111081868.5A Active CN113566710B (en) 2020-12-25 2021-09-15 Ranging system with optical switch
CN202211345444.XA Active CN115597489B (en) 2020-12-25 2021-09-15 Distance measuring system
CN202311394815.8A Pending CN117433416A (en) 2020-12-25 2021-09-15 Method for calibrating orthogonal axis system and coordinate measuring device
CN202211345415.3A Active CN115540757B (en) 2020-12-25 2021-09-15 Distance measuring system for improving measuring accuracy
CN202111081855.8A Active CN113739700B (en) 2020-12-25 2021-09-15 Method for adjusting orthogonal axis system of coordinate measuring instrument
CN202122239940.4U Active CN215984384U (en) 2020-12-25 2021-09-15 Ranging system with polarization maintaining optical fiber
CN202210333866.9A Active CN115014196B (en) 2020-12-25 2021-09-18 Distance measuring system for absolute distance measurement
CN202111112195.5A Active CN113686245B (en) 2020-12-25 2021-09-18 Ranging system with polarization maintaining optical fiber
CN202210333868.8A Active CN114838658B (en) 2020-12-25 2021-09-18 Optical path system for improving beam combining precision

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