CN1095536C - Instrument for measuring shift and vibration of object by polarized light interference of optical fibre - Google Patents
Instrument for measuring shift and vibration of object by polarized light interference of optical fibre Download PDFInfo
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- CN1095536C CN1095536C CN 99111592 CN99111592A CN1095536C CN 1095536 C CN1095536 C CN 1095536C CN 99111592 CN99111592 CN 99111592 CN 99111592 A CN99111592 A CN 99111592A CN 1095536 C CN1095536 C CN 1095536C
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Abstract
The present invention belongs to the technical field of mechanical precise measurement, which comprises a laser device, a laser power supply, a polarization-preserving optical fiber with high birefringence, a directional coupler of an optical fiber, a photoelectric detector, a signal detecting system, a polarizer arranged at an output end of the laser device, a measuring head and a polarization detecting device arranged in front of the photoelectric detector, wherein the measuring head is composed of a self-focusing lens at an optical fiber end, and a quarter wave plate. The present invention can measure the displacement and the vibration of an object with high accuracy, improves the capability for resisting external interference, and reduces the influence from stray light in a light path. The present invention has the advantages of high sensitivity, noncontact measurement, electromagnetic interference resistance, compact structure of the entire measuring instrument, etc.
Description
Technical field
The invention belongs to the technical field of mechanical precision measurement, particularly belong to the nano level high-acruracy survey of displacement and vibratory output, and to other mechanical quantity that can be converted into displacement directly or indirectly and the measurement of physical quantity.
Background technology
Current is in the modern times manufacturing, microelectronics system, micro-nano engineering of feature, can realize that the ultraprecise processing of measurement and control integration is generally paid attention to the equipment made from accurate and nanotechnolgy.In can realizing the contactless high-acruracy survey of displacement and vibratory output, optical fiber sensing technology provides new important measurement means, and has begun to enter practical application area.Existing a kind of two-beam interference position phase modulation type displacement surveying meter of optic fibre as shown in Figure 1, mainly is made of parts such as laser instrument 101, coupled lens 113, optical fiber 103, optical fiber gauge head 109,110, photodetectors 119.Its measuring principle is: with the Michaelson optical interdferometer is ultimate principle, a branch of optically-coupled of being sent by laser instrument 101 enters optical fiber 103, be divided into by optical fiber directional coupler 102 again and survey sense light and reference light, respectively by two-way optical fiber 104,105 conduction, and through optical fiber gauge head 109,110 penetrate, emergent light is mapped to catoptron 111,112, be reflected respectively again and enter optical fiber 104,105, catoptron 112 is fixed, catoptron 111 is transportable, an optical path difference that is directly proportional with tested distance L is arranged between this two-beam, this two bundle interferes the beat signal that forms to be received by detector 119 mutually, utilize the position to compare then and measure the phase change of introducing by optical path difference, thereby obtain displacement.
Adopt this optical fiber position phase modulation type sensing displacement measurement technology to have bigger measurement range, higher measuring accuracy and response speed faster, and characteristics such as gauge head is small and exquisite.But this measuring instrument is based on two-beam interference, detect and interfere phase change, its accuracy of detection depends on the precision of phase discrimination of interference fringe, and precision of phase discrimination is λ/50～λ/100 usually, if optical wavelength is 0.6um, then its measuring accuracy is generally 0.06um or 60nm like this.And in many fields such as process industry, information industry, space flight and aviation industry and national defense and military industry, more and more need measurement accurate and ultraprecise processing, with assurance and the online Detection ﹠ Controling of part processing of satisfying various workpiece size quality.
Summary of the invention
The objective of the invention is to propose a kind of polarized light interference of optical fibre displacement and vibration measuring set, can realize ohject displacement and vibration are carried out high-precision measurement for overcoming the weak point of above-mentioned measuring instrument.
The present invention proposes a kind of polarized light interference of optical fibre displacement and vibration measuring set, comprise laser instrument (1), Laser Power Devices, optical fiber (3,4,6) and optical fiber directional coupler (2), photodetector (19) and signal detection system, it is characterized in that, also comprise the polarizer (14) that is arranged on said laser output, by the GRIN Lens (8 that is arranged on said optical fiber end, 9), quarter-wave plate (16,17) first and second optical fiber gauge heads of Gou Chenging, be arranged on the preceding Calibrator (18) of said photodetector (19), said optical fiber adopts high-birefringence polarisation-maintaining optical fiber; Said laser instrument sends laser becomes linearly polarized light beam behind the polarizer, this light beam part by the end face reflection of first optical fiber gauge head as reference light, another part is derived by first optical fiber gauge head and is mapped to the measured object surface, enter first optical fiber gauge head after the reflection again as surveying sense light, said detection sense light and reference light interfere the back to be received by photodetector through Calibrator by the derivation of second optical fiber gauge head mutually.Said detection sense light and reference light are total to light path, also can not be total to light path.
The said laser instrument of the present invention can adopt the semiconductor laser of magnetic tape trailer fibre and optical fiber directly to be coupled, and the said polarizer adopts the optical fiber polarizer, also comprises the optical fiber polarisation retainer that links to each other with this optical fiber polarizer.The said optical fiber polarizer, optical fiber polarisation retainer, optical fiber directional coupler and optical fiber gauge head constitute a full optical fiber integrated polarized light interference of optical fibre instrument.
The GRIN Lens end face of said optical fiber gauge head can be the total transmissivity face, and a surface of said quarter-wave plate is set to the partial reflection surface; The GRIN Lens end face of said optical fiber gauge head also can be set to the partial reflection surface, and said quarter-wave plate surface is the total transmissivity face.Said optical fiber gauge head can comprise that also the one section two ends that is arranged on the said quarter-wave plate outside have the polarization maintaining optical fibre of GRIN Lens.This structure can be used in the optical fiber gauge head miniaturization of measurement.
The said Laser Power Devices of the present invention can adopt direct supply or direct current to be biased the power supply of modulating current.
For guaranteeing that the measuring light electric signal that is obtained has higher signal to noise ratio (S/N ratio), the present invention also comprises another optical fiber that links to each other with said optical fiber directional coupler and the photo-detector that receives this another optical fiber outgoing beam.Note the light intensity variation that LASER Light Source is sent, compare with the detection light intensity to eliminate the influence of light source intensity variation to measuring-signal.
The principle of work of high-precision optical fiber polarized light interference of the present invention displacement and vibration measuring set is described as follows:, as shown in Figure 2, the present invention includes semiconductor laser 1, coupled lens 13, the polarizer 14, polarization maintaining optical fibre 3 and optical fiber directional coupler 2, polarization maintaining optical fibre 4 and 6, parts such as quarter-wave plate (λ/4 wave plates) 16 and 17, analyzer 18, photodetector 19 and signal detection system.It is characterized in that sending a branch of light by laser instrument becomes a branch of linearly polarized light behind the polarizer, enter optical fiber 3 through coupled lens, this optical fiber other end links to each other with optical fiber directional coupler, said linearly polarized light beam arrives other end optical fiber 4 through directional coupler, and derive through the GRIN Lens 8 of optical fiber gauge head, this light beam shines λ/4 wave plates 16, the part of this light beam is directly reflected by λ/4 wave plates surface returns optical fiber as reference light through the GRIN Lens of optical fiber gauge head, another part of this light beam shines the measured object surface after by λ/4 wave plates, enter optical fiber 4 as surveying sense light through λ/4 wave plates and GRIN Lens again after being reflected, said detection sense light and reference light are common light paths, receive by photodetector 19 through another λ/4 wave plates 17 and analyzer 18 again after they are interfered mutually, constitute a polarized light interference of optical fibre instrument.
By optical polarization interference of light principle as can be known, one linearly polarized light is by λ/4 wave plate surface reflections, reflected light still keeps the polarization direction of former incident ray polarized light, be reference line polarized light a, become circularly polarized light behind this linearly polarized light λ/4 wave plates, shine measured object and still be circularly polarized light by its surface reflection, said circularly polarized light is again through becoming the linearly polarized light of other direction behind λ/4 wave plates, be sense line polarized light b, the polarization direction of this linearly polarized light b and incident ray polarized light are that the polarization direction of linearly polarized light a is mutually orthogonal, when said two the bundle quadratures linearly polarized light via another λ/4 wave plates after, (promptly one is left circularly polarized light to the circularly polarized light of two bundle quadratures, one is right-circularly polarized light), because the circularly polarized light of this two bundles quadrature is a common optical axis, to synthesize a linearly polarized light, owing to having the phasic difference of introducing by testee displacement 1 between this two bundles orthogonal circular polarizations light, the polarization direction of said synthetic thread polarized light will change with the difference of phasic difference, perhaps said synthetic thread polarized light will have different polarization angle α with the change of phasic difference, this linearly polarized light is received by photodetector through linearly polarized light analyzing system, be exportable measuring-signal, after signal Processing, obtain tested displacement or vibratory output again.
The measuring light signal that is obtained by the polarized light interference of optical fibre instrument has by measured object and moves and the phasic difference information introduced, promptly this measuring light signal is a linearly polarized light that has with phasic difference change polarization angle α, therefore different with position phase modulation type fibre optic interferometer sensed light signal interference fringe phase change, measurement sensitivity of polarized light interference of optical fibre instrument and precision depend on the angle-measurement accuracy of the polarization angle α of light signal.The polarization angle of detection line polarized light can have many methods, and its angular detection precision generally can reach 1 ', even can reach 1 ' (angle branch), and the measuring accuracy of polarized light interference of optical fibre instrument can reach very high level, i.e. nanometer scale thus.Promptly as can be known by the said principle of the present invention, when displacement l changes a wavelength X, be that corresponding interferometric phase is when changing one-period 2 π, said polarization angle α is that the polarisation of light direction is rotated 2 π angles, be α=2 π l/ λ, the variation delta l of corresponding testee displacement is: Δ l=λ/2 π Δ α.If used light wavelength lambda is 0.6um, angle-measurement accuracy Δ α is 1 ', then measure sensitivity, be that displacement variation delta l can reach 0.0017um, if angle-measurement accuracy Δ α is 1 ', then displacement measurement sensitivity Δ l can reach 0.028nm, therefore considers various The noise, and the realization measuring accuracy is that the displacement measurement of 1nm is fully possible.
The present invention has following characteristics:
One, this detector for displacement measuring of the present invention is applicable to the detection of high precision displacement amount, owing to adopt detection sense light and reference light light path fibre optic interferometer structure altogether, adopt polarization maintaining optical fibre and other devices, strengthened anti-external interference ability and reduced the influence of parasitic light in the light path, have highly sensitive, non-contact measurement, anti-electromagnetic interference (EMI), plurality of advantages such as whole surveying instrument compact conformation.
They are two years old, this detector for displacement measuring of the present invention can be used for mechanical vibration measurement amount, its amplitude measurement can as above saidly reach very high precision, and the measuring accuracy of its vibration frequency depends on the frequency response characteristic of photodetector and signal processing system, general 1Hz ~ 10
5The frequency measurement of Hz can realize fully.
They are three years old, this detector for displacement measuring of the present invention not only can be directly used in the Displacement Measurement amount, and can be used to measure other mechanical quantity and the physical quantity that can directly or indirectly be converted into displacement, such as: rising-heat contracting-cold effect or the magnetostrictive effect of utilizing material, cause length of material to change, thereby can measure temperature or magnetic field intensity respectively; Utilize because pressure causes the deformational displacement of film, thus can gaging pressure; Utilize the birefringence or the external physical quantity of some crystal to cause the crystal birefringence variation, thus the birefringent characteristic parameter that can measure crystal and relevant therewith physical quantity etc.In above-mentioned various measurement applications,, can realize measurement to many different physical quantities as long as optical fiber gauge head of the present invention is linked to each other with parts or material to above-mentioned various mechanical quantity and physical quantity sensitivity.Therefore, the present invention has broad application.
Description of drawings
Fig. 1 is an existing position phase modulation type fiber optic interferometric detector for displacement measuring synoptic diagram.
Fig. 2 is polarized light interference of optical fibre displacement provided by the invention and vibration measuring set synoptic diagram.
Fig. 3 is an embodiment of the present invention general structure synoptic diagram.
Fig. 4 is an embodiment of the present invention optical fiber gauge head structural representation.
Fig. 5 is the another kind of embodiment optical fiber gauge head of the present invention structural representation.
Embodiment
A kind of most preferred embodiment of the present invention is full optical fiber integrated polarized light interference of optical fibre vibration measuring set, general structure is described in detail as follows as shown in Figure 3 in conjunction with the accompanying drawings: this measuring instrument comprises semiconductor laser 1, the optical fiber polarizer 14, optical fiber polarisation retainer 15, polarization maintaining optical fibre directional coupler 2, by parts such as GRIN Lens 8,9, quarter-wave plate 16,17, the gauge head that constitutes, polarization angle detecting device 18, photodetector 19 and signal processing units 21.A branch of light that laser instrument 1 sends directly is coupled into high-birefringence polarisation-maintaining optical fiber 7, this optical fiber links to each other with optical fiber polarisation retainer 15 with the optical fiber polarizer 14, this light beam becomes linearly polarized light and enters optical fiber 3, this optical fiber links to each other with optical fiber directional coupler 2, enter optical fiber 4 respectively after making this linearly polarized light beam be divided into two-beam, 5, the light beam that enters optical fiber 4 is divided into two parts again, part light is reference light, end face reflection by the GRIN Lens 8 of optical fiber gauge head goes back, this reflected light still keeps the polarization direction of former incident ray polarized light, another part light is derived by the GRIN Lens 8 of gauge head, become circularly polarized light after injecting and see through the quarter-wave plate 16 be coated with anti-reflection film, reenter and be mapped to measured object 23 and by its return reflection surface quarter-wave plate 16, said circularly polarized light becomes linearly polarized light through behind the quarter-wave plate again, and enter optical fiber 4 by gauge head, said this two parts linear polarization polarized state of light is a quadrature, together pass through optical fiber directional coupler 2, optical fiber 6 is derived by GRIN Lens 9, after the mutually orthogonal linearly polarized light of said these two parts is again via quarter-wave plate 17, become the circularly polarized light and a synthetic linearly polarized light of two bundle quadratures, the polarization angle of this linearly polarized light depends on the phasic difference between said reference light and the detection sense light two parts light, and the displacement and the vibration of measured object 23 are depended in the variation of this phasic difference, said linearly polarized light is received by photodetector 19 via polarization angle detecting device 18 backs that analyzer constitutes, the frequency of this photosignal and amplitude size can obtain the frequency values and the amplitude of measured object vibratory output after demarcating conversion.This measuring instrument can also be input to computing machine by computer interface and carry out the data in real time processing.
Present embodiment semiconductor laser power is more than the 5mw, optical wavelength is 1.3um, optical fiber, the optical fiber polarizer, optical fiber polarisation retainer and optical fiber directional coupler all adopt the panda type high-birefringence polarisation-maintaining optical fiber, the fiber work wavelength is 1.3um, the measuring accuracy of measuring instrument is better than 5mm, and survey frequency is 1Hz～100KHz.
For guaranteeing that the measuring light electric signal that is obtained has higher signal to noise ratio (S/N ratio), present embodiment can adopt the laser power system 22 with temperature control and constant current, with the stable laser beam of output intensity, can adopt and tell the light beam that enters optical fiber 5 by optical fiber directional coupler 2 and shine photo-detector 20, note the light intensity variation that LASER Light Source is sent, compare with the detection light intensity to eliminate the influence of light source intensity variation to measuring-signal.The polarization angle of linearly polarized light of the present invention detects can adopt raster method and photon flux method, raster method is that analyzer is linked to each other with circle grating angular instrument, can obtain very high measuring accuracy by raster method, photon flux method is divided single channel photon flux method and two-way photon flux method again, the method that the single channel photon flux method promptly will be used in the present embodiment, the two-way photon flux method is with Wollaston analyzing system of slotted line polarized light input, this linearly polarized light resolves into the vertical linearly polarized light of two-way polarization state, the variation of polarization angle can cause this two-way polarized light intensity variations, receive by detector, after signal Processing, compare two-way light intensity signal size, can obtain the size of the polarization angle of slotted line polarized light.
Optical fiber gauge head in the present embodiment is made up of GRIN Lens 8, quarter-wave plate 16 and sleeve pipe 24,25, quarter-wave plate two ends plating anti-reflection film, as shown in Figure 4.Fig. 5 is another kind of optical fiber gauge head structural representation, promptly on this basis at the polarization maintaining optical fibre 28 that one section two ends has GRIN Lens 26,27 that adds in said quarter-wave plate 16 outsides.This structure can be used in the optical fiber gauge head miniaturization of measurement, and external diameter is less than 3mm.
Claims (7)
1. polarized light interference of optical fibre displacement and vibration measuring set, comprise laser instrument (1), Laser Power Devices, optical fiber (3,4,6) and optical fiber directional coupler (2), photodetector (19) and signal detection system, it is characterized in that, also comprise the polarizer (14) that is arranged on said laser output, by the GRIN Lens (8 that is arranged on said optical fiber end, 9), quarter-wave plate (16,17) first and second optical fiber gauge heads of Gou Chenging, be arranged on the preceding Calibrator (18) of said photodetector (19), said optical fiber adopts high-birefringence polarisation-maintaining optical fiber; Said laser instrument sends laser becomes linearly polarized light beam behind the polarizer, this light beam part by the end face reflection of first optical fiber gauge head as reference light, another part is derived by first optical fiber gauge head and is mapped to the measured object surface, enter first optical fiber gauge head after the reflection again as surveying sense light, said detection sense light and reference light interfere the back to be received by photodetector through Calibrator by the derivation of second optical fiber gauge head mutually.
2. measuring instrument as claimed in claim 1, it is characterized in that, said laser instrument (1) adopts the semiconductor laser and the optical fiber of magnetic tape trailer fibre directly to be coupled, and the said polarizer (14) adopts the optical fiber polarizer, also comprises the optical fiber polarisation retainer (15) that links to each other with this optical fiber polarizer.
3. measuring instrument as claimed in claim 1 or 2, the GRIN Lens end face that it is characterized in that said first optical fiber gauge head is the total transmissivity face, a surface of said quarter-wave plate is set to the partial reflection surface.
4. measuring instrument as claimed in claim 1 or 2 is characterized in that the GRIN Lens end face of said first optical fiber gauge head is set to the partial reflection surface, and said quarter-wave plate surface is the total transmissivity face.
5. measuring instrument as claimed in claim 1 or 2 is characterized in that said first optical fiber gauge head also comprises, the one section two ends that is arranged on the said quarter-wave plate outside have the polarization maintaining optical fibre (28) of GRIN Lens.
6. measuring instrument as claimed in claim 1 or 2 is characterized in that said Laser Power Devices adopt direct supply or direct current to be biased the power supply of modulating current.
7. measuring instrument as claimed in claim 1 or 2 is characterized in that, also comprises another optical fiber (5) that links to each other with said optical fiber directional coupler and the photo-detector (20) that receives this another optical fiber outgoing beam.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 99111592 CN1095536C (en) | 1999-08-20 | 1999-08-20 | Instrument for measuring shift and vibration of object by polarized light interference of optical fibre |
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| CN 99111592 CN1095536C (en) | 1999-08-20 | 1999-08-20 | Instrument for measuring shift and vibration of object by polarized light interference of optical fibre |
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| CN1095536C true CN1095536C (en) | 2002-12-04 |
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| CN100337088C (en) * | 2005-11-28 | 2007-09-12 | 中国工程物理研究院流体物理研究所 | All-fiber displacement interference instrument |
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| CN101320055B (en) * | 2007-06-06 | 2011-05-11 | 上海康阔光通信技术有限公司 | Full optical fiber current sensor |
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1999
- 1999-08-20 CN CN 99111592 patent/CN1095536C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100337088C (en) * | 2005-11-28 | 2007-09-12 | 中国工程物理研究院流体物理研究所 | All-fiber displacement interference instrument |
| CN101320055B (en) * | 2007-06-06 | 2011-05-11 | 上海康阔光通信技术有限公司 | Full optical fiber current sensor |
| CN100547355C (en) * | 2007-11-14 | 2009-10-07 | 中国科学院上海光学精密机械研究所 | Single light source resonance sensor for excitation and vibration testing |
| CN102235968A (en) * | 2010-04-27 | 2011-11-09 | 清华大学 | Heterodyne interference-based optical fiber hydrogen sensing device and method |
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