CN116357760A - 一种半导体欠驱动l型运动真空阀门 - Google Patents

一种半导体欠驱动l型运动真空阀门 Download PDF

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CN116357760A
CN116357760A CN202211684786.4A CN202211684786A CN116357760A CN 116357760 A CN116357760 A CN 116357760A CN 202211684786 A CN202211684786 A CN 202211684786A CN 116357760 A CN116357760 A CN 116357760A
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seat
connecting rod
cylinder
screw
valve
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辛洪旭
李加平
姜小蛟
谭晓东
杨建辉
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Shenyang Fortune Precision Equipment Co Ltd
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Shenyang Fortune Precision Equipment Co Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00—Road transport of goods or passengers
    • Y02T10/10—Internal combustion engine [ICE] based vehicles
    • Y02T10/12—Improving ICE efficiencies

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)

Abstract

本发明属于半导体制造技术及真空阀门领域，具体涉及一种半导体欠驱动L型运动真空阀门。一种半导体欠驱动L型运动真空阀门，包括阀板，阀板座，真空螺钉，止推轴承，波纹管一体轴，气缸座，气缸，限位座，支点轴承，连杆座，支点连杆，连接轴，挡圈，衬套，短连杆，扭簧，气缸连接座，支撑板，封板，外壳；所述气缸上端通过螺钉与气缸座固接，气缸下端与气缸连接座连接；气缸连接座通过螺钉与连杆座连接。本发明实现阀板的竖直运动，降低制造成本，再通过平行四边形机构结合滑块压紧机构实现阀板的水平运动，保证阀板与门框密封面在完全贴合时，避免轻微摩擦产生的污染及损耗，且保证阀板及O‑ring受压均匀，保证阀的使用寿命。

Description

一种半导体欠驱动L型运动真空阀门
技术领域
本发明属于半导体制造技术及真空阀门领域，具体涉及一种半导体欠驱动L型运动真空阀门。
背景技术
半导体制造工艺中，晶圆经常会被传送于各真空工艺腔室进行处理，阀门由于其可以快速启闭、较高的重复运行寿命以及高气密性，在隔绝和连通各真空工艺腔室时起到关键性作用。
现有的应用于半导体工艺腔室内的真空阀，为了减少阀板启闭时与门框密封面摩擦而产生的颗粒，阀在启闭过程的运动轨迹被设计成L型或伪L型运动轨迹。L型运动轨迹一般被拆解为竖直和水平两个动作，分别通过先后驱动两个气缸实现，但受限于各腔室布局尺寸，需要对阀结构特别是对其气路进行个性化定制，对各零部件的制造精度要求较高，增加了制造成本，而且由于气动控制精度存在缺陷，难以保证重复运动精度和使用寿命。伪L型运动轨迹一般被拆解为竖直和摆动两个动作，竖直运动通过驱动气缸实现，摆动运动可通过异形导向结构、连杆结构等实现，但在阀板与门框密封面贴合过程中，会产生轻微摩擦，造成污染及损耗，且O-ring及阀板受压不均匀，影响阀的使用寿命。
发明内容
本发明提供一种半导体欠驱动L型运动真空阀门。
本发明采用的技术方案是：
一种半导体欠驱动L型运动真空阀门，包括阀板，阀板座，真空螺钉，止推轴承，波纹管一体轴，气缸座，气缸，限位座，支点轴承，连杆座，支点连杆，连接轴，挡圈，衬套，短连杆，扭簧，气缸连接座，支撑板，封板，外壳；
所述气缸上端通过螺钉与气缸座固接，气缸下端与气缸连接座连接；气缸连接座通过螺钉与连杆座连接；
气缸座通过螺钉固定在阀体基板上；支撑板上端通过螺钉连接在气缸座上，支撑板下端通过螺钉连接在封板上；外壳通过螺钉连接在气缸座和封板上；阀体基板内固定连接有限位座；
所述阀板和阀板座通过真空螺钉与止推轴承连接在一起；
波纹管一体轴先端贯穿限位座和阀体基板通过真空螺钉与止推轴承连接；
波纹管一体轴通过支点连杆和短连杆与连杆座连接；
波纹管一体轴的上连接轴通过支点轴承和挡圈与支点连杆轴接。
波纹管一体轴的下连接轴通过支点轴承和挡圈与短连杆轴接；
连杆座通过衬套、扭簧和挡圈与支点连杆轴接；
连杆座通过衬套、扭簧和挡圈与短连杆轴接。
本发明的有益效果为：
1、本发明基于平行四边形机构结合滑块压紧机构提出一种欠驱动L型阀板运动机理。
2、本发明提出的一种半导体欠驱动L型运动真空阀门，结构简单，制造及维护成本较低。
3、本发明提出的一种半导体欠驱动L型运动真空阀门，在阀板与门框密封面贴合时没有摩擦，不易产生灰尘和细小颗粒，提高了对晶圆等洁净物料的保护，保证成品率。
4、本发明提出的一种半导体欠驱动L型运动真空阀门，在阀板闭合时，阀板及O-ring受压均匀，保证了阀的使用寿命。
附图说明
图1为本发明的结构示意图；
图2为本发明的侧视图；
图3为本发明的侧视剖面图；
图4为本发明波纹管一体轴俯视剖面图；
图5为本发明专利的实施例示意图。
具体实施方式
下面结合说明书附图1-5及附图标记对本发明进一步详细说明。
一种半导体欠驱动L型运动真空阀门，包括阀板100(阀板上设有O-ring圈)，阀板座101，真空螺钉102，止推轴承103，波纹管一体轴104，气缸座106，气缸107，限位座108，支点轴承109，连杆座110，支点连杆111，连接轴112，挡圈113，衬套114，短连杆115，扭簧116，气缸连接座117，支撑板118，封板119，外壳120；
所述气缸107上端通过螺钉与气缸座106固接，气缸107下端与气缸连接座117连接；气缸连接座117通过螺钉与连杆座110连接；
气缸座106通过螺钉固定在阀体基板105上；支撑板118上端通过螺钉连接在气缸座106上，支撑板118下端通过螺钉连接在封板119上；外壳120通过螺钉连接在气缸座106和封板119上；阀体基板105内固定连接有限位座108；
所述阀板100和阀板座101通过真空螺钉102与止推轴承103连接在一起；
波纹管一体轴104先端贯穿限位座108和阀体基板105通过真空螺钉102与止推轴承103连接；
波纹管一体轴104通过支点连杆111和短连杆115与连杆座110连接；
波纹管一体轴104的上连接轴112通过支点轴承109和挡圈113与支点连杆111轴接。
波纹管一体轴104的下连接轴112通过支点轴承109和挡圈113与短连杆115轴接；
连杆座110通过衬套114、扭簧116和挡圈113与支点连杆111轴接；
连杆座110通过衬套114、扭簧116和挡圈113与短连杆115轴接。
工作过程如图5所示，初始状态，阀板打开，气缸处于最大伸出位置，波纹管处于最小压缩状态；当气缸开始收缩，通过气缸连接座带动连杆座竖直向上运动，期间由于阀板自重及扭簧作用，短连杆和支点连杆与连杆座角度关系保持不变，直至支点连杆与支点轴承接触；气缸继续收缩，由于支点轴承起到滑块支撑限位作用，短连杆和支点连杆与连杆座角度发生改变，波纹管一体轴带动阀板水平运动，实现L型运动，直至阀板闭合。

Claims (1)

1.一种半导体欠驱动L型运动真空阀门，其特征在于，包括阀板，阀板座，真空螺钉，止推轴承，波纹管一体轴，气缸座，气缸，限位座，支点轴承，连杆座，支点连杆，连接轴，挡圈，衬套，短连杆，扭簧，气缸连接座，支撑板，封板，外壳；
所述气缸上端通过螺钉与气缸座固接，气缸下端与气缸连接座连接；气缸连接座通过螺钉与连杆座连接；
气缸座通过螺钉固定在阀体基板上；支撑板上端通过螺钉连接在气缸座上，支撑板下端通过螺钉连接在封板上；外壳通过螺钉连接在气缸座和封板上；阀体基板内固定连接有限位座；
所述阀板和阀板座通过真空螺钉与止推轴承连接在一起；
波纹管一体轴先端贯穿限位座和阀体基板通过真空螺钉与止推轴承连接；
波纹管一体轴通过支点连杆和短连杆与连杆座连接；
波纹管一体轴的上连接轴通过支点轴承和挡圈与支点连杆轴接。
波纹管一体轴的下连接轴通过支点轴承和挡圈与短连杆轴接；
连杆座通过衬套、扭簧和挡圈与支点连杆轴接；
连杆座通过衬套、扭簧和挡圈与短连杆轴接。
CN202211684786.4A 2022-12-27 2022-12-27 一种半导体欠驱动l型运动真空阀门 Pending CN116357760A (zh)

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