CN116352690A - Vertical travel range extending mechanism based on atmospheric manipulator - Google Patents
Vertical travel range extending mechanism based on atmospheric manipulator Download PDFInfo
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- CN116352690A CN116352690A CN202310637770.6A CN202310637770A CN116352690A CN 116352690 A CN116352690 A CN 116352690A CN 202310637770 A CN202310637770 A CN 202310637770A CN 116352690 A CN116352690 A CN 116352690A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
- B25J18/025—Arms extensible telescopic
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Abstract
The invention belongs to the technical field of wafer manufacturing, and particularly relates to a vertical stroke range extending mechanism based on an atmospheric manipulator. The lifting device comprises a base unit, a supporting unit, a transmission assembly unit and a lifting slide seat unit, wherein the supporting unit and the transmission assembly unit are arranged on the base unit, the supporting unit is used for supporting the transmission assembly unit, the lifting slide seat unit is connected with the transmission assembly unit, the transmission assembly unit provides lifting power for the lifting slide seat unit, and the lifting slide seat unit is used for installing a load robot. According to the invention, the guide rails are arranged in different planes, so that rigid supports in two span directions are obtained on the basis of not increasing the overall size; the guide rail pressing mechanism is applied, so that the local rigidity of the guide rail is greatly enhanced, and meanwhile, the smaller installation size is ensured, so that the mechanism is more convenient to adapt to the equipment machine.
Description
Technical Field
The invention belongs to the technical field of wafer manufacturing, and particularly relates to a vertical stroke range extending mechanism based on an atmospheric manipulator.
Background
The conventional stock specifications of the conventional SCARA robot are two types of vertical travel of 300mm/450mm, and the conventional stock specifications are respectively used for conveying wafers with short travel and long travel. However, with the intensification of the size and the centralization of functions of the wafer manufacturing equipment, the workflow and the process realized by a single equipment are more and more complex, and the internal process units and process stations are more and more diversified. A vertical stroke of 450mm has not been able to accommodate the wafer handling requirements of the apparatus in many applications. However, simply increasing the vertical stroke of the SCARA robot often cannot guarantee the 900mm film taking position specified by SEMI standard. Thus, a popular solution in the industry is to replace dual Z-axis SCARA robots or to increase the range-extending mechanism of vertical travel. The structure of the double-Z-axis SCARA robot is complex, the double-Z-axis SCARA robot is not friendly to equipment manufacturers in terms of manufacturing cost and supply period, and the range-extending mechanism is relatively flexible relative to the arrangement mode of the double-Z-axis SCARA robot.
In the design of the existing range-extending mechanism, three types of guide rail arrangement modes are adopted, namely a SCARA mode, guide rail coplanar arrangement and guide rail opposite arrangement, as shown in fig. 1 (a) - (b). However, since the load M (SCARA robot) is located at an upper position of the entire mechanism, the center of gravity during movement is liable to be unstable, and thus it is necessary to increase the rigidity of the entire structure and to increase the size of the base. The arrangement of the three guide rails or the transmission chain is not beneficial to the enhancement of the movement rigidity, and the size of the whole mechanism is increased for enhancing the rigidity. In increasingly intensive equipment stations, excessive mechanical dimensions are detrimental to the arrangement and deployment of the equipment modules.
Disclosure of Invention
Aiming at the problems, the invention aims to provide a vertical stroke range-extending mechanism based on an atmospheric manipulator, so as to solve the problems that the existing range-extending mechanism cannot be compatible between rigidity and mechanism size, the gravity center is unstable and the mechanism volume is large.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the invention provides a vertical travel range extending mechanism based on an atmospheric manipulator, which comprises a base unit, a transmission assembly unit and a lifting slide seat unit, wherein the transmission assembly unit is arranged on the base unit, the lifting slide seat unit is connected with the transmission assembly unit, the transmission assembly unit provides lifting power for the lifting slide seat unit, and the lifting slide seat unit is used for installing a load robot.
In one possible implementation manner, the transmission assembly unit comprises a main guide rail, a guide rail substrate, a lifting driving mechanism and an auxiliary guide rail, wherein the guide rail substrate is vertically arranged on the base unit, the guide rail substrate comprises two vertical plates which are mutually perpendicular, the main guide rail and the auxiliary guide rail are respectively arranged on the two vertical plates, and two sides of the lifting sliding seat unit are respectively connected with the main guide rail and the auxiliary guide rail in a sliding manner; the lifting driving mechanism is arranged on the guide rail base plate and is connected with the lifting sliding seat unit.
In one possible implementation manner, the lifting driving mechanism comprises a motor, a belt transmission assembly, a screw rod and a screw nut, wherein the screw rod is arranged on the guide rail substrate along the vertical direction and can rotate; the motor is arranged on the guide rail substrate, the output end of the motor is connected with the screw rod through the belt transmission assembly, and the screw nut is in threaded connection with the screw rod to form a thread pair; the lifting sliding seat unit is connected with the screw nut.
In one possible implementation manner, the belt transmission assembly comprises a large belt pulley, a synchronous toothed belt, a small belt pulley and a belt breakage detection sensor, wherein the large belt pulley is arranged at the end part of the screw rod, and the small belt pulley is arranged at the output end of the motor and is in transmission connection with the large belt pulley through the synchronous toothed belt; the belt breakage detection sensor is arranged on the guide rail substrate and is close to the synchronous toothed belt, and the belt breakage detection sensor is used for detecting whether the synchronous toothed belt is broken or not.
In one possible implementation manner, the top of the guide rail substrate is relatively provided with a right top cover and a left top cover, and an avoidance opening through which the lifting sliding seat unit can pass is reserved between the right top cover and the left top cover.
In one possible implementation manner, the lifting sliding seat unit comprises a left reinforcing rib plate, a screw seat, a right reinforcing rib plate, a sliding seat substrate, a secondary sliding block connecting plate and a main sliding block connecting plate, wherein the sliding seat substrate is of a square structure, the secondary sliding block connecting plate and the main sliding block connecting plate are respectively connected to one adjacent edge of the sliding seat substrate, and the screw seat is connected to the sliding seat substrate and is positioned on the same side as the main sliding block connecting plate; the left reinforcing rib plate is used for connecting the main slide block connecting plate and the slide base plate, and the right reinforcing rib plate is used for connecting the auxiliary slide block connecting plate and the slide base plate.
In one possible implementation manner, the base unit is further provided with a supporting unit, and the supporting unit is arranged opposite to the transmission assembly unit and is used for supporting the transmission assembly unit.
In one possible implementation manner, the supporting unit comprises a supporting column and a plurality of transverse supporting plates arranged on two sides of the supporting column, wherein the lower end of the supporting column is connected with the base unit, the transverse supporting plates on two sides are mutually perpendicular, and the transverse supporting plates are connected with the guide rail base plate.
In one possible implementation, a protection unit is arranged outside the supporting unit and the transmission assembly unit; the protection unit comprises a front protection cover, a back protection cover and an electric interface cover, wherein the front protection cover and the back protection cover are enclosed to form a square structure, and the electric interface cover is arranged at the opening at the bottom of the back protection cover.
In one possible implementation, the base unit includes a base substrate and a fan disposed on the base substrate.
The invention has the advantages and beneficial effects that: aiming at the improvement of the structural rigidity of the range-extending mechanism and the compactness of the layout, the invention designs a layout mode of the different-surface arrangement of the guide rail, obtains the rigid support of two span directions on the basis of not increasing the whole size, is compatible with the mechanism size, has stable gravity center and smaller mechanism volume; the invention applies the guide rail compressing mechanism, thereby greatly enhancing the local rigidity of the guide rail. By the design, rigidity is improved, and meanwhile, smaller installation size is guaranteed, so that the mechanism is more convenient to adapt to the equipment machine.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention may be realized and attained by the structure particularly pointed out in the written description and drawings.
The technical scheme of the invention is further described in detail through the drawings and the embodiments.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a schematic diagram of a conventional range-extending mechanism;
FIG. 2 is an exploded view of a vertical travel range extender based on an atmospheric robot in accordance with the present invention;
FIG. 3 is a schematic view of a base unit according to the present invention;
FIG. 4 is a schematic view of a supporting unit according to the present invention;
FIG. 5 is an exploded view of the protection unit of the present invention;
FIG. 6 is a schematic diagram of a transmission assembly unit according to the present invention;
FIG. 7 is an exploded view of the drive assembly unit of the present invention;
fig. 8 is a schematic structural view of a lifting slide unit in the present invention.
In the figure: the device comprises a base unit, a 2-supporting unit, a 3-protecting unit, a 4-transmission assembly unit, a 5-lifting sliding seat unit, a 6-loading robot, a 7-base substrate, an 8-fan, a 9-supporting column, a 10-transverse supporting plate, an 11-front protective cover, a 12-back protective cover, a 13-interface sheet metal left supporting plate, a 14-electric interface cover, a 15-interface sheet metal right supporting plate, a 16-main guide rail, a 17-guide rail substrate, a 18-motor, a 19-lead screw supporting bearing floating end, a 20-lead screw, a 21-lead screw supporting bearing fixed end, a 22-large belt pulley, a 23-synchronous toothed belt, a 24-belt breakage detection sensor, a 25-auxiliary guide rail, a 26-towing chain assembly, a 27-right top cover, a 28-left top cover, a 29-slider pressing block, a 30-guide rail pressing block, a 31-left reinforcing rib plate, a 32-screw seat, a 33-right reinforcing rib plate, a 34-sliding seat substrate, a 35-auxiliary slider connecting plate, a 36-main slider connecting plate and a 37 which are small belt pulleys.
Detailed Description
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
The preferred embodiments of the present invention will be described below with reference to the accompanying drawings, it being understood that the preferred embodiments described herein are for illustration and explanation of the present invention only, and are not intended to limit the present invention.
The embodiment of the invention provides a vertical travel range-extending mechanism based on an atmospheric manipulator, which improves rigidity and ensures smaller installation size, so that the mechanism is more convenient to adapt to a machine station. Referring to fig. 2, the vertical stroke range extending mechanism based on the atmospheric manipulator comprises a base unit 1, a transmission component unit 4 and a lifting slide seat unit 5, wherein the transmission component unit 4 is arranged on the base unit 1, the lifting slide seat unit 5 is connected with the transmission component unit 4, the transmission component unit 4 provides lifting power for the lifting slide seat unit 5, and the lifting slide seat unit 5 is used for installing a load robot 6.
Referring to fig. 2, in the embodiment of the present invention, in order to improve stability of the transmission assembly unit 4, a support unit 2 is further provided on the base unit 1, and the support unit 2 is disposed opposite to the transmission assembly unit 4 and is used for supporting the transmission assembly unit 4. The support unit 2 and the transmission assembly unit 4 form a frame of the entire support structure to strengthen the rigidity of the entire support structure.
Referring to fig. 3, in the embodiment of the present invention, the base unit 1 includes a base substrate 7 and a fan 8 disposed on the base substrate 7. Specifically, the base substrate 7 has a square structure, the base substrate 7 serves as a base of the whole mechanism, two L-shaped engaging grooves are oppositely formed in the edge of the base substrate 7, and the support unit 2 and the transmission assembly unit 4 are respectively mounted on the two L-shaped engaging grooves. The center of the base substrate 7 is provided with a mounting hole for mounting a fan 8, and the fan 8 is used for being matched with the load robot 6 to form stable wind flow of the whole mechanism assembly.
Referring to fig. 4, in the embodiment of the present invention, the supporting unit 2 includes a supporting column 9 and a plurality of transverse supporting plates 10 disposed at two sides of the supporting column 9, wherein the lower end of the supporting column 9 is connected with the base substrate 7 of the base unit 1, the transverse supporting plates 10 at two sides are perpendicular to each other, and the transverse supporting plates 10 are connected with the transmission assembly unit 4. Specifically, the support column 9 has an L-shaped structure, the lower end of the support column is connected with an L-shaped handle combination groove on the base substrate 7 through a bolt, and the upper end and the lower end of the support column 9 are respectively provided with two groups of transverse support plates 10. The support column 9 is used for forming a frame of the whole support structure with the transmission assembly unit 4, and the transverse support plate 10 is connected with the transmission assembly unit 4 and used as a transverse auxiliary support to strengthen the rigidity of the frame.
On the basis of the embodiment, the vertical stroke extension mechanism based on the atmospheric manipulator provided by the invention further comprises a protection unit 3 arranged on the outer sides of the supporting unit 2 and the transmission assembly unit 4, wherein the protection unit 3 is used for protecting the transmission assembly unit 4.
Referring to fig. 5, in the embodiment of the present invention, the protection unit 3 includes a front protection cover 11, a back protection cover 12, and an electrical connection mask 14, where the front protection cover 11 and the back protection cover 12 enclose a square structure, and the electrical connection mask 14 is disposed at a notch at the bottom of the back protection cover 12. Further, the two sides of the electric connection mask 14 are provided with a left connection sheet metal support plate 13 and a right connection sheet metal support plate 15.
In this embodiment, the front protection cover 11 and the back protection cover 12 jointly enclose the protection contour of the whole mechanism, and play a role in blocking the moisture particles. The left support plate 13 and the right support plate 15 are combined on the transmission assembly unit 4 to support the electric connection mask 14 for connecting the electric connection plate for wiring of the whole mechanism.
Referring to fig. 6 and 7, in the embodiment of the present invention, the transmission assembly unit 4 includes a main rail 16, a rail base plate 17, a lifting driving mechanism and a sub rail 25, wherein the rail base plate 17 is vertically disposed on the base plate 7 of the base unit 1, and the rail base plate 17 includes two vertical plates perpendicular to each other to form an L-shaped reference part. The two vertical plates are respectively provided with a main guide rail 16 and a secondary guide rail 25, and two sides of the lifting slide seat unit 5 are respectively connected with the main guide rail 16 and the secondary guide rail 25 in a sliding manner; the lifting driving mechanism is arranged on the guide rail base plate 17 and connected with the lifting slide seat unit 5, and is used for driving the lifting slide seat unit 5 to lift along the main guide rail 16 and the auxiliary guide rail 25. Because the main guide rail 16 and the auxiliary guide rail 25 are respectively arranged on the two vertical plates of the L-shaped guide rail baseplate 17, the different-surface layout mode of the guide rails ensures equal bending resistance and torsion resistance moment in two directions, and ensures the stability of the gravity center and stable operation of the load robot 6 in the moving process.
In the embodiment of the invention, the lifting driving mechanism comprises a motor 18, a belt transmission assembly, a lead screw 20 and a screw nut, wherein the lead screw 20 is arranged on the guide rail substrate 17 along the vertical direction and can rotate; the motor 18 is arranged on the guide rail substrate 17, the output end of the motor is connected with the screw rod 20 through the belt transmission assembly, and the screw nut is in threaded connection with the screw rod 20 to form a thread pair; the lifting slide seat unit 5 is connected with a screw nut. The motor 18 drives the screw rod 20 to rotate through the belt transmission assembly, and the screw rod drives the lifting slide seat unit 5 to lift.
In the embodiment of the invention, the belt transmission assembly comprises a large belt pulley 22, a synchronous toothed belt 23, a small belt pulley 37 and a belt breakage detection sensor 24, wherein the large belt pulley 22 is arranged at the end part of a screw rod 20, and the small belt pulley 37 is arranged at the output end of a motor 18 and is in transmission connection with the large belt pulley 22 through the synchronous toothed belt 23; the belt breakage detection sensor 24 is provided on the guide rail base plate 17 near the timing belt 23, and the belt breakage detection sensor 24 is for detecting whether the timing belt 23 is broken.
Further, the top of the guide rail base plate 17 is relatively provided with a right top cover 27 and a left top cover 28, and a avoiding opening through which the lifting slide seat unit 5 can pass is reserved between the right top cover 27 and the left top cover 28.
Specifically, the guide rail base plate 17 is an L-shaped reference part, and the main guide rail 16 and the auxiliary guide rail 25 are combined on the guide rail base plate 17, and the L-shaped guide rail layout mode ensures equal bending resistance and torsional moment in two directions. In order to increase the local rigidity of the main guide rail 16, the corresponding positioning surfaces of the slide block and the guide rail are respectively pressed by the slide block pressing block 29 and the guide rail pressing block 30, so that the effects of improving the precision and increasing the rigidity are achieved. The screw 20 is fixed on the guide rail substrate 17 by two groups of bearing seats of a screw support bearing fixed end 21 and a screw support bearing floating end 19, the screw support bearing fixed end 21 is arranged on one side of a large belt wheel 22 so as to improve transmission rigidity, and the large belt wheel 22 realizes transmission with the motor 18 through a synchronous toothed belt 23. The transmission assembly unit 4 top comprises right top cap 27 and left top cap 28, and the installation and the dismantlement of being convenient for wherein right top cap 27 has still played the effect of being convenient for maintain the hold-in range after dismantling. The tow chain assembly 26 carries the function of the cables linking the load robot 6 and the motor 18.
Referring to fig. 8, in the embodiment of the present invention, the lifting slide unit 5 includes a left reinforcement rib 31, a nut seat 32, a right reinforcement rib 33, a slide base 34, a secondary slide connecting plate 35, and a primary slide connecting plate 36, wherein the slide base 34 has a square structure, the secondary slide connecting plate 35 and the primary slide connecting plate 36 are respectively connected to an adjacent edge of the slide base 34, and the nut seat 32 is connected to the slide base 34 and is located on the same side as the primary slide connecting plate 36; the left reinforcing rib 31 is used to connect the main slider connecting plate 36 and the slider base plate 34, the right reinforcing rib 33 is used to connect the sub slider connecting plate 35 and the slider base plate 34, and the left reinforcing rib 31 and the right reinforcing rib 33 function to strengthen the structural rigidity.
In the present embodiment, the carriage substrate 34 is used as a base of the lifting carriage unit 5, and connects the transmission unit 4 and the load robot 6. The main slide block connecting plate 36 is connected with the main guide rail 16, and the auxiliary slide block connecting plate 35 is connected with the auxiliary guide rail 25 to play a role in guiding. The screw seat 32 is connected with the screw on the screw rod 20 so as to transmit lifting power.
The invention can be applied to the transmission and the transportation of wafers, battery pieces or liquid crystal panels in the semiconductor industry, the photovoltaic industry and the liquid crystal panel industry. The invention has simple transmission, the synchronous toothed belt is driven by the motor, the ball screw is driven by the large belt wheel to rotate through the primary speed reduction of the synchronous belt, and the lifting sliding seat drives the load robot to lift, thereby realizing the range increase.
Aiming at the improvement of the structural rigidity of the range-extending mechanism and the compactness of the layout, the invention designs a layout mode of the different-surface arrangement of the guide rail, and obtains the rigid support of two span directions on the basis of not increasing the whole size; the guide rail compressing mechanism is used, so that the local rigidity of the guide rail is greatly enhanced. By the design, rigidity is improved, and meanwhile, smaller installation size is guaranteed, so that the mechanism is more convenient to adapt to the equipment machine.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (10)
1. The utility model provides a vertical stroke increases journey mechanism based on atmospheric robot, a serial communication port, including base unit (1), drive assembly unit (4) and lift slide unit (5), wherein drive assembly unit (4) all set up on base unit (1), lift slide unit (5) are connected with drive assembly unit (4), drive assembly unit (4) provide lift power for lift slide unit (5), and lift slide unit (5) are used for installing load robot (6).
2. The vertical stroke range extending mechanism based on the atmospheric manipulator according to claim 1, wherein the transmission assembly unit (4) comprises a main guide rail (16), a guide rail base plate (17), a lifting driving mechanism and an auxiliary guide rail (25), wherein the guide rail base plate (17) is vertically arranged on the base unit (1), the guide rail base plate (17) comprises two vertical plates which are mutually perpendicular, the main guide rail (16) and the auxiliary guide rail (25) are respectively arranged on the two vertical plates, and two sides of the lifting sliding seat unit (5) are respectively connected with the main guide rail (16) and the auxiliary guide rail (25) in a sliding manner; the lifting driving mechanism is arranged on the guide rail base plate (17) and is connected with the lifting sliding seat unit (5).
3. The vertical stroke extension mechanism based on the atmospheric robot according to claim 2, wherein the lifting driving mechanism comprises a motor (18), a belt transmission assembly, a screw (20) and a nut, wherein the screw (20) is arranged on the guide rail substrate (17) along the vertical direction and can rotate; the motor (18) is arranged on the guide rail substrate (17), the output end of the motor is connected with the screw rod (20) through the belt transmission assembly, and the screw nut is in threaded connection with the screw rod (20) to form a thread pair; the lifting sliding seat unit (5) is connected with a screw nut.
4. The vertical stroke extension mechanism based on an atmospheric manipulator according to claim 3, wherein the belt transmission assembly comprises a large belt wheel (22), a synchronous toothed belt (23), a small belt wheel (37) and a belt breakage detection sensor (24), wherein the large belt wheel (22) is arranged at the end part of the screw rod (20), and the small belt wheel (37) is arranged at the output end of the motor (18) and is in transmission connection with the large belt wheel (22) through the synchronous toothed belt (23); the belt breakage detection sensor (24) is arranged on the guide rail base plate (17) and is close to the synchronous toothed belt (23), and the belt breakage detection sensor (24) is used for detecting whether the synchronous toothed belt (23) is broken or not.
5. The vertical stroke extension mechanism based on the atmospheric manipulator according to claim 2, wherein a right top cover (27) and a left top cover (28) are oppositely arranged at the top of the guide rail substrate (17), and an avoidance opening through which the lifting slide seat unit (5) can pass is reserved between the right top cover (27) and the left top cover (28).
6. The vertical stroke extension mechanism based on the atmospheric robot according to claim 2, wherein the lifting slide unit (5) comprises a left reinforcement rib plate (31), a screw seat (32), a right reinforcement rib plate (33), a slide base plate (34), a secondary slide block connecting plate (35) and a main slide block connecting plate (36), wherein the slide base plate (34) is in a square structure, the secondary slide block connecting plate (35) and the main slide block connecting plate (36) are respectively connected to an adjacent edge of the slide base plate (34), and the screw seat (32) is connected to the slide base plate (34) and is positioned on the same side as the main slide block connecting plate (36); the left reinforcement rib plate (31) is used for connecting the main slide block connecting plate (36) and the slide base plate (34), and the right reinforcement rib plate (33) is used for connecting the auxiliary slide block connecting plate (35) and the slide base plate (34).
7. The vertical stroke extension mechanism based on the atmospheric manipulator according to claim 2, wherein the base unit (1) is further provided with a supporting unit (2), and the supporting unit (2) is disposed opposite to the transmission assembly unit (4) and is used for supporting the transmission assembly unit (4).
8. The vertical stroke extension mechanism based on the atmospheric robot according to claim 7, wherein the supporting unit (2) comprises a supporting column (9) and a plurality of transverse supporting plates (10) arranged at two sides of the supporting column (9), wherein the lower ends of the supporting column (9) are connected with the base unit (1), the transverse supporting plates (10) at two sides are mutually perpendicular, and the transverse supporting plates (10) are connected with the guide rail base plate (17).
9. The vertical stroke extension mechanism based on the atmospheric robot according to claim 7, wherein a protection unit (3) is arranged outside the supporting unit (2) and the transmission assembly unit (4);
the protection unit (3) comprises a front protection cover (11), a back protection cover (12) and an electric connection mask (14), wherein the front protection cover (11) and the back protection cover (12) are enclosed to form a square structure, and the electric connection mask (14) is arranged at the opening at the bottom of the back protection cover (12).
10. The atmospheric robot-based vertical stroke extension mechanism according to claim 1, wherein the base unit (1) comprises a base substrate (7) and a fan (8) provided on the base substrate (7).
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|---|---|---|---|
| CN202310637770.6A CN116352690B (en) | 2023-06-01 | 2023-06-01 | Vertical travel range extending mechanism based on atmospheric manipulator |
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| CN202310637770.6A CN116352690B (en) | 2023-06-01 | 2023-06-01 | Vertical travel range extending mechanism based on atmospheric manipulator |
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| CN116352690A true CN116352690A (en) | 2023-06-30 |
| CN116352690B CN116352690B (en) | 2023-08-22 |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1617789A (en) * | 2001-12-04 | 2005-05-18 | 罗兹株式会社 | Scalar type robot for carrying flat plate-like object, and flat plate-like object processing system |
| CN106379730A (en) * | 2016-11-09 | 2017-02-08 | 北京工业大学 | Double-arm wafer transfer robot rotating mechanism adopting nut rotation type ball spline |
| CN106514638A (en) * | 2016-12-30 | 2017-03-22 | 深圳市小智勇机器人有限公司 | Five-axis robot |
| CN206156232U (en) * | 2016-08-10 | 2017-05-10 | 中科天工（武汉）智能技术有限公司 | Workpiece conveying device |
| CN206578819U (en) * | 2017-03-13 | 2017-10-24 | 大族激光科技产业集团股份有限公司上海分公司 | Polar coordinate plane transfer robot |
| CN108698222A (en) * | 2016-02-26 | 2018-10-23 | 川崎重工业株式会社 | Substrate conveyance robot and substrate conveyance device |
| CN210379004U (en) * | 2019-10-11 | 2020-04-21 | 冠礼控制科技（上海）有限公司 | Double-power automatic wafer carrying mechanism |
| CN113548602A (en) * | 2020-04-24 | 2021-10-26 | 上海大界机器人科技有限公司 | Stable high-load lifting system and device |
| CN218385173U (en) * | 2022-10-11 | 2023-01-24 | 上海大族富创得科技有限公司 | double-Z-axis wafer carrying robot |
-
2023
- 2023-06-01 CN CN202310637770.6A patent/CN116352690B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1617789A (en) * | 2001-12-04 | 2005-05-18 | 罗兹株式会社 | Scalar type robot for carrying flat plate-like object, and flat plate-like object processing system |
| CN108698222A (en) * | 2016-02-26 | 2018-10-23 | 川崎重工业株式会社 | Substrate conveyance robot and substrate conveyance device |
| CN206156232U (en) * | 2016-08-10 | 2017-05-10 | 中科天工（武汉）智能技术有限公司 | Workpiece conveying device |
| CN106379730A (en) * | 2016-11-09 | 2017-02-08 | 北京工业大学 | Double-arm wafer transfer robot rotating mechanism adopting nut rotation type ball spline |
| CN106514638A (en) * | 2016-12-30 | 2017-03-22 | 深圳市小智勇机器人有限公司 | Five-axis robot |
| CN206578819U (en) * | 2017-03-13 | 2017-10-24 | 大族激光科技产业集团股份有限公司上海分公司 | Polar coordinate plane transfer robot |
| CN210379004U (en) * | 2019-10-11 | 2020-04-21 | 冠礼控制科技（上海）有限公司 | Double-power automatic wafer carrying mechanism |
| CN113548602A (en) * | 2020-04-24 | 2021-10-26 | 上海大界机器人科技有限公司 | Stable high-load lifting system and device |
| CN218385173U (en) * | 2022-10-11 | 2023-01-24 | 上海大族富创得科技有限公司 | double-Z-axis wafer carrying robot |
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| CN116352690B (en) | 2023-08-22 |
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