CN1163391A - 分相式高分辨率容栅位移传感器 - Google Patents
分相式高分辨率容栅位移传感器 Download PDFInfo
- Publication number
- CN1163391A CN1163391A CN97101315.2A CN97101315A CN1163391A CN 1163391 A CN1163391 A CN 1163391A CN 97101315 A CN97101315 A CN 97101315A CN 1163391 A CN1163391 A CN 1163391A
- Authority
- CN
- China
- Prior art keywords
- grizzly bar
- displacement transducer
- split
- phase
- resolution ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
- G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
本发明是一种使用在数显式测量位移量仪器中的传感器,它在陶瓷或玻璃片上用多层布线法做成栅条板,但副栅栅条在连续的几个主栅节距上作分相排列,每个主栅节距错位排列,这样缩小了多相栅条的分布空间,用此传感器安装在百分表或千分表、卡尺上,能提高1-2个精度等级,且制作成本低,稳定性好。
Description
本发明涉及一种使用在数显式高精度测量位移量仪器中的传感器,具体的说是一种鉴相式容栅位移传感器。
目前市场上所见的瑞士产数显量表的容栅位移传感器主副栅采用材料为环氧玻璃纤维布制作的印刷电路板,这种传感器由于电路板材料尺寸稳定性差、易吸潮、基材受潮后影响了测量的准确性,而且采用这种结构的传感器栅条间距不能做得很小,布线只能采用两面布线的方法,用金属化小孔连接两面线路,又因为金属化小孔不可能做得太小(不能小于300μm),要使容栅位移传感器的分辨率提高很困难。
中国专利CN86107942A改进了传感器的结构,将耦合电极(栅条)的形状做成L型和倒L型,相互镶嵌,其L型和倒L型的垂直部分面向发射极,水平部分则面向一个或另一个接收电极,用这种传感器做成的侧量仪器能满足不同测量的需要,在一定范围内提高了精度,但栅条布线仍很复杂,且需要配套专用的集成电路才能工作,使制作成本提高。
中国专利CN2072210U也公开了一种容栅位移传感器,它将副栅的一排栅条改为若干排的砖墙式结构,使发射极节距为原来的数倍,可提高测量精度,但缺点是结构复杂,栅条(块)连线交叉,仍需采用双面布线,无法回避金属化小孔的制作难点。
本发明人为了解决上述难题,1993年申请了《高分辨率鉴相式容栅位移传感器》的发明专利,申请号CN93118916.0,提出了将副栅八路输出栅条采用分布排列方法,输出相位角相差180°的两栅条在同一节距内,且各栅条所在位置与按输出相位角顺序依次排列时各自所应在位置相差整数倍节距,每相邻两栅条间用地线隔离,相应的主栅节距也与副栅保持一致。在制作传感器栅条时彻底改变了用环氧纤维布制作的刷电路板的方法,采用陶瓷或玻璃为基片,基片上镀两层金属,并在中间用绝缘层相隔,然后用光刻制作栅条,引出布线到与其重叠在一起的控制电路板,这样处理后不需要制作金属化小孔,材料的稳定性大为提高,布线也方便多了,使传感器的分辨率、可靠性得到了提高,制作也不复杂,数显仪器的精度可提高1-2个数量级。但还存在的不足之处是由于将多相栅条在不同几何位置作分布排列,如在实施例中同组八相栅条分布于四个空间区域,相距几十毫米,这样就造成该传感器对与之配套的机械构件的平行性要求很高,大批生产时要保证全部产品的精度还得增加机械构件的加工成本。
本发明的目的是提供一种能克服现有技术的不足之处,具有分辨率高、可靠性好、制作方便,对机械构件精度要求不高的鉴相式容栅位移传感器。
本发明是这样实现的:分相式高分辨率容栅位移传感器包括用陶瓷或玻璃基片做成的栅条板,副栅的各栅条所在位置与输出相位角顺序依次排列时所应在位置相差数倍节距,其特点是将副栅栅条在连续的几个主栅节距作分相排列(不再分区域排列),每个主栅节距错位相排,例如在三个连续主栅节距中副栅作1,4,7,2,5,8,3,6顺序排列,每相邻两栅条间用地线相隔,栅条引出的连线通过金属引脚与电路相通,这样就能大大缩小多相栅条的分布空间位置,大大降低了对机械构件的几何精度要求,保证了在低成本下完成数显量仪器的制作。
在一些特殊的情况下,对配套的机械结构精度要求不太高时,也可沿用本申请CN93118916中提出的分布式排列方法排列栅条,将主栅和对应的输出副栅分布成若干个区(一般是1~4个)的空间位置,其余方法不变。
在测量角位移量时,将主副栅栅条首尾相接,作圆周排列,连接主栅节距中副栅一样作分相排列,即可完成多种功能容栅位移传感器的制作。
本发明与现有技术相比,其突出的实质性特点和显著的进步是:
1.不改变传感器的工作方式及与之配套的控制电路,只对栅条板的材料及制作方法稍作改进,即可完成原有容栅位移传感器的所有功能,其稳定性好,制作方便,分辩率高。
2.能缩小多相栅条分布的空间位置,体积小,没有在栅条板上分布过多的金属化小孔,不需两面布线,与控制电路板的连接更为方便,容易在长度侧量、角位移侧量等仪器中实施,做出的仪器比现有机械类和数显类量具可提1-2个数量级的精度。
3.在陶瓷、玻璃片上还可制作出多层金属层和绝缘层相隔后的栅条板,适合更精密仪器的需求。
4.成本低,比本申请人原有的CN93118916号专利文件提到的容栅位移传感器易于制作,降低了对机械构件的几何精度要求,适合工业化生产。
以下结合附图描述本发明的实施例:
图1是分相式容栅位移传感器的栅条排列的结构图;
图2是传感器副栅栅条分布的一种实施结构图;
图3是分相式容栅位移传感器做成的数显式千分表的结构示意图。
从图1中看到,在由接收极1、栅条2、主栅4构成的传感器中,连接栅条2节距作分相排列,每个主栅节距错位相排,它的在多层布线连接的接点3按1,4,7,2,5,8,3,6顺序排列,在实际制作时,也可以按2,5,8,1,4,7,3,6的顺序排列或其它顺序的错位排列。
图2的副栅栅条制作也是按本申请人在中国专利申请号93118916中所述的多层布线制作方法相同,即在陶瓷或玻璃片5上先镀一层金属层,然后在金属层上制作绝缘层,在绝缘层上相对第一层金属层开窗口(如制作栅条8等),其后再在绝缘层上蒸镀第二层金属,并做出连线7、接地片9、接收极10等图形,最后在除引出脚处的整个工作面涂敷保护层,通过金属引脚和金属化孔6将连线引出端与背后的控制电路连通。
图3给出了用本发明制作的传感器做成数显式千分表的一种实施结构形式,它的液晶片11装在最上面,液晶片下为导电橡胶12,中间层为控制电路板13,底层为副栅14,副栅有金属孔15通到控制电路板上,作为导线用。
如果要制造数显卡尺或数显百分表,也可将上述的容栅位移传感器装上,其它结构与现有数显卡尺和百分表均相同。
Claims (3)
1.一种分相式高分辨率容栅位移传感器,包括在陶瓷或玻璃片上用多层布线法制成的栅条板,其特征在于:副栅栅条在连续的几个主栅节距作分相排列,每个主栅节距错位排列,栅条间用地线分隔,从栅条接出的连线通过金属引脚与电路相通。
2.根据权利要求1所述的分相式高分辨率容栅位移传感器,其特征在于副栅栅条也可按分布式排列方法排列栅条,将主栅和对应的输出副栅分布成若干个区,栅条间用地线分隔,从栅条接出的连线通过金属引脚与电路相通。
3.根据权利要求1或2所述的分相式高分辨率容栅位移传感器,其特征在于传感器在百分表或千分表、卡尺方面的应用。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN97101315.2A CN1163391A (zh) | 1997-01-10 | 1997-01-10 | 分相式高分辨率容栅位移传感器 |
PCT/CN1998/000002 WO1998030867A1 (fr) | 1997-01-10 | 1998-01-09 | Capteur de deplacement du type a capacite |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN97101315.2A CN1163391A (zh) | 1997-01-10 | 1997-01-10 | 分相式高分辨率容栅位移传感器 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN1163391A true CN1163391A (zh) | 1997-10-29 |
Family
ID=5165640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN97101315.2A Pending CN1163391A (zh) | 1997-01-10 | 1997-01-10 | 分相式高分辨率容栅位移传感器 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN1163391A (zh) |
WO (1) | WO1998030867A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104677390A (zh) * | 2013-11-26 | 2015-06-03 | 林立 | 电容式传感器及组合电容式位移测量传感系统 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1038342A (zh) * | 1988-05-31 | 1989-12-27 | 株式会社三丰 | 具有改进电极排列的电容型测量传感器 |
CN1033339C (zh) * | 1992-12-09 | 1996-11-20 | 航空航天工业部第一研究院第一○一研究所 | 电容式位移传感器 |
CN1047436C (zh) * | 1993-10-17 | 1999-12-15 | 赵飚 | 高分辨率鉴相式容栅位移传感器及其制作方法 |
-
1997
- 1997-01-10 CN CN97101315.2A patent/CN1163391A/zh active Pending
-
1998
- 1998-01-09 WO PCT/CN1998/000002 patent/WO1998030867A1/zh active Application Filing
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104677390A (zh) * | 2013-11-26 | 2015-06-03 | 林立 | 电容式传感器及组合电容式位移测量传感系统 |
CN104677390B (zh) * | 2013-11-26 | 2017-09-29 | 林立 | 电容式传感器及组合电容式位移测量传感系统 |
Also Published As
Publication number | Publication date |
---|---|
WO1998030867A1 (fr) | 1998-07-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6367821B2 (ja) | タッチセンサ電極用のメッシュパターン | |
JP2015510191A (ja) | タッチセンサ電極用のメッシュパターン | |
CN102016768A (zh) | 具有变化的薄层电阻的触屏传感器 | |
EP0432365A2 (en) | Low-power electromagnetic digitizer tablet | |
NO20003004D0 (no) | Substrat | |
US5049824A (en) | Phase discrimination type electrostatic capacity detector | |
CN203535592U (zh) | 触控板 | |
JPS57133674A (en) | Structure of multilayer wiring | |
CN1163391A (zh) | 分相式高分辨率容栅位移传感器 | |
US6525546B1 (en) | Capacitive displacement sensor | |
JP3180187B2 (ja) | 寸法測定用容量性装置 | |
CN1822356A (zh) | 用于电路板上的集成电路去藕的中介层 | |
EP1026928A3 (en) | Bond pads for fine-pitch applications on air bridge circuit boards | |
CN1657949A (zh) | 集成化探针卡及组装方式 | |
CN1469099A (zh) | 一种容栅位移传感器及其制作方法 | |
EP1106969A3 (en) | Capacitance type displacement measuring apparatus | |
CN1047436C (zh) | 高分辨率鉴相式容栅位移传感器及其制作方法 | |
US6621069B2 (en) | Optical encoder with an electric field—screening grit | |
CN113945232B (zh) | 电阻式传感器及其制备方法 | |
CN2402995Y (zh) | 容栅角位移传感器 | |
CN113008120B (zh) | 一种电容式直线位移传感器及其动尺 | |
CN210689523U (zh) | 一种阵列式红外单场接收器 | |
CN1461412A (zh) | 用于测试印刷电路板的测试装置的模块 | |
CN2378714Y (zh) | 扩展式鉴相型容栅传感器 | |
CN111697102A (zh) | 一种分步印刷太阳能电池主副栅偏移的调整方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C06 | Publication | ||
PB01 | Publication | ||
C01 | Deemed withdrawal of patent application (patent law 1993) | ||
WD01 | Invention patent application deemed withdrawn after publication |