CN116339070A - Novel UV curing nanoimprint device and method - Google Patents
Novel UV curing nanoimprint device and method Download PDFInfo
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- CN116339070A CN116339070A CN202310101942.8A CN202310101942A CN116339070A CN 116339070 A CN116339070 A CN 116339070A CN 202310101942 A CN202310101942 A CN 202310101942A CN 116339070 A CN116339070 A CN 116339070A
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- sealing cavity
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Abstract
The invention discloses a novel UV curing embossing device which comprises a mounting panel, a pressurizing sealing cavity, a one-way cylinder and a UV curing lamp, wherein the pressurizing sealing cavity is arranged on the front side of the mounting panel, the pressurizing sealing cavity is rotationally connected with the mounting panel, a template is arranged at the bottom of the pressurizing sealing cavity, the one-way cylinder is arranged on one side of the pressurizing sealing cavity, and a cylinder rod of the one-way cylinder is positioned at the lower part of the one-way cylinder; a pressurizing air pipe is arranged on the pressurizing sealing cavity, and a UV curing lamp is arranged above the pressurizing sealing cavity; the invention can realize the dynamic bonding of the template and the substrate, and is beneficial to the sufficient discharge of the gas between the substrate and the template. And the air with certain pressure is assisted in the attaching process, so that the full filling of the structure is ensured. The novel UV imprinting device not only avoids the defect caused by incomplete gas discharge in UV imprinting, but also can ensure complete filling of the pattern structure.
Description
Technical Field
The invention relates to the technical field of nanoimprint, in particular to a novel UV curing imprint device and method.
Background
Nanoimprint technology is one method of preparing nanoscale patterns. The method has simple process and low cost, can be used for mass production, and the produced pattern has high resolution. With the development of nanoimprint technology in recent years, nanoimprint methods and nanoimprint apparatuses have been increasingly used. The current embossing methods are mainly hot embossing and UV curing embossing. UV curing embossing is relatively simple due to its operational flow; express developments have been made over the years, and devices and templates for UV curing imprinting have also presented a variety of developments.
The existing UV curing nanoimprint technology mainly comprises rolling imprint and planar imprint: the rolling imprinting is to stack a substrate to be imprinted and a template, then realize bubble removal and compaction structure through rolling pressurization of a roller, and then realize pattern transfer through solidification of a UV (ultraviolet) solidification lamp; still another is to wind the stencil directly onto a roller to effect pattern replication by rolling the roller over the substrate, and then curing with a UV lamp to effect pattern transfer. The planar imprinting directly stacks the substrate and the template, and is cured by a UV lamp after being pressurized by means of vacuumizing, blowing pressurizing or mechanical pressurizing.
The UV curing technology after the substrate and the template are overlapped and rolled for imprinting can realize rapid transfer of patterns, but for large-area pattern copying, because the rolling imprinting roller has a limited disposable contact surface, after the roller rolls over, the stress difference between the front and the back of the roller on the substrate causes the phenomenon of tilting and air inlet at the pressed position of the roller, so that the pattern copying has large-area defects.
The rolling mode of winding the template on the roller, and the bending winding of the template on the roller can cause the microstructure deformation. Resulting in deviations of the reproduced pattern from the original pattern.
Directly superposing the template and the substrate, vacuumizing, pressurizing, and carrying out UV curing imprinting, wherein the problem is not existed for the UV imprinting with a very small area, but when the area needing to be imprinted is enlarged, vacuumizing and pressurizing cannot remove the middle gas, so that the pattern with a large area is lost.
Disclosure of Invention
The invention aims to provide a novel UV curing embossing device and method for overcoming the defects in the prior art.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the application discloses novel UV solidification impression device, including installation panel, pressurization seal chamber, one-way cylinder and UV curing lamp, the front side of installation panel is equipped with pressurization seal chamber, rotate between pressurization seal chamber and the installation panel and be connected, the bottom of pressurization seal chamber is equipped with the template, one side of pressurization seal chamber is equipped with one-way cylinder, the cylinder pole of one-way cylinder is located the lower part of one-way cylinder; the pressurizing sealing cavity is provided with a pressurizing air pipe, and a UV curing lamp is arranged above the pressurizing sealing cavity.
Preferably, a first rotating hole is formed in the lower portion of the mounting panel, a second rotating hole is formed in the pressurizing sealing cavity, and the first rotating hole and the second rotating hole are connected through a first rotating shaft.
Preferably, the first rotating hole is positioned at one side of the lower part of the mounting panel far away from the unidirectional cylinder, an arc-shaped slot hole is arranged at one side of the lower part of the mounting panel near the unidirectional cylinder, the circle center of the arc-shaped slot hole is the same as the center of the first rotating hole, and the lowest height of the arc-shaped slot hole is the same as the height of the first rotating hole; the pressurizing sealing cavity is provided with a third rotating hole, the second rotating hole and the third rotating hole are respectively positioned at two sides of the pressurizing sealing cavity, and the second rotating hole and the third rotating hole are positioned at the same height; the second rotating hole is positioned corresponding to the first rotating hole, the third rotating hole is positioned corresponding to the arc-shaped slotted hole, and the third rotating hole is connected with the arc-shaped slotted hole through a second rotating shaft.
Preferably, one or more of the first, second or third swivel holes are provided with rolling bearings.
Preferably, the side surface of the pressurizing sealing cavity, which is close to the unidirectional cylinder, is provided with a cylinder support, the cylinder support is of an L-shaped structure, one side of the cylinder support is fixedly connected with the pressurizing sealing cavity, the other side of the cylinder support is provided with a mounting hole, and the unidirectional cylinder penetrates through the mounting hole and is fixedly connected to the mounting hole.
Preferably, the side surface of the pressurizing sealing cavity, which is far away from the unidirectional cylinder, is provided with an air pipe hole, and the air pipe hole is connected with a pressurizing air pipe.
Preferably, the pressurized sealing cavity comprises an embossing chamber, a glass pressing sheet and quartz glass, the embossing chamber is arranged in the middle of the embossing chamber and connected with a pressurized air pipe, the glass pressing sheet is arranged at the top of the embossing chamber, a groove is formed in the bottom of the glass pressing sheet, quartz glass is arranged in the groove, the quartz glass covers the upper portion of the embossing chamber, a transparent gasket is arranged between the quartz glass and the bottom surface of the groove, and a sealing ring is arranged between the embossing chamber and the quartz glass.
Preferably, a template is arranged at the bottom of the imprinting cavity, and two ends of the template are fixedly connected with the imprinting chamber through template clamping sleeves.
Preferably, the mounting panel is provided with a plurality of mounting holes, and the mounting panel is fixed on the three-dimensional moving platform through the mounting holes.
The invention also discloses a novel UV curing imprinting method, which comprises the following steps:
s1, adjusting a three-dimensional moving platform to enable a template at the bottom of a pressurizing sealing cavity to be overlapped with a substrate in a vertical projection manner; downwards adjusting the three-dimensional moving platform again to enable the template to be close to the substrate;
s3, opening an air cylinder charging valve, wherein an air cylinder rod of the unidirectional air cylinder extends downwards, and the air cylinder rod supports one side of the pressurizing sealing cavity;
s4, regulating the three-dimensional moving platform to descend so that one side, far away from the unidirectional cylinder, of the template contacts with one side of the substrate;
s5, closing an air cylinder inflation valve, opening an air cylinder deflation valve, simultaneously adjusting the three-dimensional moving platform to continuously descend, gradually putting down one side of the pressurizing sealing cavity supported along with the release of air in the air cylinder, and gradually attaching the template to the substrate;
s6, after the template is completely attached to the substrate, inflating the imprinting cavity of the pressurizing sealing cavity through the pressurizing air pipe, pressurizing the template, and realizing perfect filling of the nano pattern on the template on the substrate;
s7, turning on a UV curing lamp to realize the curing of the nano pattern on the substrate;
s8, after solidification is completed, deflating the imprinting cavity through a pressurizing air pipe; opening an air cylinder charging valve, wherein an air cylinder rod of the unidirectional air cylinder extends downwards, the air cylinder rod supports one side of the pressurizing sealing cavity, and the template is separated from the substrate from one side close to the unidirectional air cylinder; thereby completing the UV curing imprint.
The invention has the beneficial effects that:
the novel UV curing imprinting device can realize dynamic lamination of the template and the substrate, and is beneficial to full discharge of gas between the substrate and the template. And the air with certain pressure is assisted in the attaching process, so that the full filling of the structure is ensured. The novel UV imprinting device not only avoids the defect caused by incomplete gas discharge in UV imprinting, but also can ensure complete filling of the pattern structure.
Furthermore, the present device: the structure is small and compact; the imprinting process is accurately controlled; the progressive bonding mode of the template and the substrate is beneficial to exhausting gas between the template and the substrate; the template and the substrate are tightly attached; the pressure is uniform and controllable through gas pressurization; the imprinting resolution is high; by single sided cylinder movement. Controlling the lamination of the template and the substrate; demoulding after imprinting is finished; the operation is simple and easy; can realize automatic repeat operation, and is convenient for realizing the assembly imprinting of small patterns.
The features and advantages of the present invention will be described in detail by way of example with reference to the accompanying drawings.
Drawings
FIG. 1 is a schematic view of a novel UV curing imprinting apparatus;
FIG. 2 is a schematic view of a mounting panel according to an embodiment of the present invention;
FIG. 3 is a schematic view of the structure of a pressurized seal chamber according to an embodiment of the present invention;
FIG. 4 is a schematic elevational view of an imprint chamber according to an embodiment of the present invention;
FIG. 5 is a schematic view of the structure of the imprint chamber of the embodiment of the present invention near the unidirectional cylinder side;
FIG. 6 is a schematic view of the structure of the imprint chamber of the embodiment of the present invention away from the unidirectional cylinder side;
in the figure: the device comprises a 1-mounting panel, a 11-first rotating hole, a 12-second rotating hole, a 13-circular arc slotted hole, a 14-third rotating hole, a 15-mounting hole, a 2-pressurizing sealing cavity, a 21-imprinting chamber, a 211-imprinting cavity, a 22-glass pressing piece, 23-quartz glass, a 231-transparent gasket, a 232-sealing ring, a 3-one-way cylinder, a 31-cylinder support, a 4-UV curing lamp, a 5-template, a 51-template clamping sleeve, a 6-pressurizing air pipe and a 61-air pipe hole.
Detailed Description
The present invention will be further described in detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the detailed description and specific examples, while indicating the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present invention.
Referring to fig. 1, an embodiment of the invention provides a novel UV curing imprinting device, which comprises a mounting panel 1, a pressurizing sealing cavity 2, a unidirectional cylinder 3 and a UV curing lamp 4, wherein the pressurizing sealing cavity 2 is arranged at the front side of the mounting panel 1, the pressurizing sealing cavity 2 is rotationally connected with the mounting panel 1, a template 5 is arranged at the bottom of the pressurizing sealing cavity 2, the unidirectional cylinder 3 is arranged at one side of the pressurizing sealing cavity 2, and a cylinder rod of the unidirectional cylinder 3 is positioned at the lower part of the unidirectional cylinder 3; the pressurizing sealing cavity 2 is provided with a pressurizing air pipe 6, and a UV curing lamp 4 is arranged above the pressurizing sealing cavity 2.
In a possible embodiment, a first rotating hole 11 is provided at the lower part of the mounting panel 1, a second rotating hole 12 is provided on the pressurized sealing cavity 2, and the first rotating hole 11 and the second rotating hole 12 are connected through a first rotating shaft.
As shown in fig. 2 and 4; in a possible embodiment, the first rotating hole 11 is located at one side of the lower part of the mounting panel 1 away from the unidirectional cylinder 3, an arc-shaped slot 13 is arranged at one side of the lower part of the mounting panel 1 close to the unidirectional cylinder 3, the center of the arc-shaped slot 13 is the same as the center of the first rotating hole 11, and the lowest height of the arc-shaped slot 13 is the same as the height of the first rotating hole 11; the pressurizing sealing cavity 2 is provided with a third rotating hole 14, the second rotating hole 12 and the third rotating hole 14 are respectively positioned at two sides of the pressurizing sealing cavity 2, and the second rotating hole 12 and the third rotating hole 14 are positioned at the same height; the position of the second rotating hole 12 corresponds to the position of the first rotating hole 11, the position of the third rotating hole 14 corresponds to the position of the circular arc-shaped slot 13, and the third rotating hole 14 is connected with the circular arc-shaped slot 13 through a second rotating shaft.
In one possible embodiment, the arc of the arc-shaped slot 13 is 60 degrees.
In a possible embodiment, one or more of the first, second or third swivel holes 11, 12 or 14 are provided with rolling bearings.
As shown in fig. 5, in a possible embodiment, three threaded holes are formed on the right side of the pressurizing sealing cavity 2, the three threaded holes are distributed in an isosceles triangle shape, the cylinder bracket 31 is fixed on the right side of the pressurizing sealing cavity 2 by using screws, a cylinder fixing hole is formed on the cylinder bracket 31, the unidirectional cylinder 3 passes through the cylinder fixing hole on the cylinder bracket, and the unidirectional cylinder 3 is screwed up and down by using screws on the cylinder fixing hole; the unidirectional cylinder 3 is connected with an inlet electromagnetic valve and an outlet electromagnetic valve and is used for controlling movement.
As shown in fig. 6, in a possible embodiment, an air pipe hole 61 is formed on the left side of the pressurizing sealing cavity 2, an air pipe quick connector is mounted on the outer side of the hole by using a threaded hole, and the air pipe quick connector is connected with the pressurizing air pipe 6; the pressurizing air pipe 6 is connected with high-pressure gas; for embossing pressurization.
As shown in fig. 3; in a possible embodiment, the pressurized sealing cavity 2 includes an imprint chamber 21, a glass pressing sheet 22 and quartz glass 23, an imprint chamber 211 is disposed in the middle of the imprint chamber 21, the imprint chamber 211 is connected with the pressurized air pipe 6, the glass pressing sheet 22 is disposed at the top of the imprint chamber 21, a groove is disposed at the bottom of the glass pressing sheet 22, quartz glass 23 is disposed in the groove, the quartz glass 23 covers the imprint chamber 211, a transparent gasket 231 is disposed between the quartz glass 23 and the bottom of the groove, and a sealing ring 232 is disposed between the imprint chamber 21 and the quartz glass 23.
In a possible embodiment, a template 5 is disposed at the bottom of the imprint cavity 211, and two ends of the template 5 are fixedly connected with the imprint chamber 21 through a template ferrule 51.
Specifically: the upper surface of the impression chamber 21 is provided with a rectangular sealing groove, and four corners of the rectangular groove are rounded (convenient for the installation of a sealing ring 232); the sealing ring 232 is arranged in the sealing groove of the imprinting chamber 21; the quartz glass 23 is arranged on the upper side of the impression chamber 21, and the periphery of the quartz glass is uniformly pressed on the sealing ring 232; a transparent spacer 231 is placed on the quartz glass 23 with the outer edge aligned with the outer edge of the quartz glass 23; the glass pressing sheet 22 is installed on the transparent spacer 231 with the concave surface facing downwards, and the inner edge of the glass pressing sheet 22 is aligned with the inner edge of the transparent spacer 231; the glass pressing sheet 22 is fixed by screws and connected with a threaded hole on the upper surface of the pressing chamber 21, so as to realize the sealing connection combination of the pressing chamber 21, the glass pressing sheet 22, the transparent gasket 231, the sealing ring 232 and the quartz glass 23.
In a possible embodiment, the mounting panel 1 is provided with a plurality of mounting holes 15, and the mounting panel 1 is fixed on the three-dimensional moving platform through the mounting holes.
The invention discloses a novel UV curing imprinting method, which specifically comprises the following steps:
s1, adjusting a three-dimensional moving platform to enable a template 5 at the bottom of a pressurizing sealing cavity 2 to be overlapped with a substrate in a vertical projection manner; downwards adjusting the three-dimensional moving platform again to enable the template 5 to be close to the substrate;
s3, opening an air cylinder charging valve, wherein an air cylinder rod of the unidirectional air cylinder 3 extends downwards, and the air cylinder rod supports one side of the pressurizing sealing cavity 2;
s4, regulating the three-dimensional moving platform to descend so that one side, far away from the unidirectional cylinder 3, of the template 5 contacts with one side of the substrate;
s5, closing an air cylinder inflation valve, opening an air cylinder deflation valve, simultaneously adjusting the three-dimensional moving platform to continuously descend, gradually putting down one side of the pressurizing sealing cavity 2 supported by the air cylinder along with the gas release in the air cylinder, and gradually attaching the template 5 to the substrate;
s6, after the template 5 is completely attached to the substrate, inflating the imprinting cavity 211 of the pressurizing sealing cavity 2 through the pressurizing air pipe 6, pressurizing the template 5, and realizing perfect filling of the nano pattern on the template 5 on the substrate;
s7, turning on the UV curing lamp 4 to realize the curing of the nano pattern on the substrate;
s8, after solidification is completed, the imprinting cavity 211 is deflated through the pressurizing air pipe 6; opening the cylinder charging valve, and enabling the cylinder rod of the unidirectional cylinder 3 to extend downwards, wherein the cylinder rod supports one side of the pressurizing sealing cavity 2, and the template 5 is separated from the substrate from one side close to the unidirectional cylinder 3; thereby completing UV curing imprinting;
the UV curing nano imprinting process is perfectly realized, and the splicing imprinting of small patterns can be realized by moving the substrate to perform imprinting again.
The novel UV curing imprinting device can realize dynamic lamination of the template and the substrate, and is favorable for full discharge of gas between the substrate and the template. And the air with certain pressure is assisted in the attaching process, so that the full filling of the structure is ensured. The novel UV imprinting device not only avoids the defect caused by incomplete gas discharge in UV imprinting, but also can ensure complete filling of the pattern structure.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, or alternatives falling within the spirit and principles of the invention.
Claims (10)
1. Novel UV solidification impression device, its characterized in that: the ultraviolet curing device comprises a mounting panel (1), a pressurizing sealing cavity (2), a one-way air cylinder (3) and a UV curing lamp (4), wherein the pressurizing sealing cavity (2) is arranged on the front side of the mounting panel (1), the pressurizing sealing cavity (2) is rotationally connected with the mounting panel (1), a template (5) is arranged at the bottom of the pressurizing sealing cavity (2), the one-way air cylinder (3) is arranged on one side of the pressurizing sealing cavity (2), and an air cylinder rod of the one-way air cylinder (3) is positioned at the lower part of the one-way air cylinder (3); the pressurizing sealing cavity (2) is provided with a pressurizing air pipe (6), and a UV curing lamp (4) is arranged above the pressurizing sealing cavity (2).
2. A novel UV curing embossing apparatus as set forth in claim 1, wherein: the lower part of the installation panel (1) is provided with a first rotating hole (11), the pressurizing sealing cavity (2) is provided with a second rotating hole (12), and the first rotating hole (11) is connected with the second rotating hole (12) through a first rotating shaft.
3. A novel UV curing embossing apparatus as set forth in claim 2, wherein: the first rotating hole (11) is positioned at one side of the lower part of the mounting panel (1) far away from the one-way air cylinder (3), an arc-shaped slot hole (13) is formed in one side of the lower part of the mounting panel (1) close to the one-way air cylinder (3), the circle center of the arc-shaped slot hole (13) is the same as the center of the first rotating hole (11), and the lowest height of the arc-shaped slot hole (13) is the same as the height of the first rotating hole (11); the pressurizing sealing cavity (2) is provided with a third rotating hole (14), the second rotating hole (12) and the third rotating hole (14) are respectively positioned at two sides of the pressurizing sealing cavity (2), and the second rotating hole (12) and the third rotating hole (14) are positioned at the same height; the position of the second rotating hole (12) corresponds to the position of the first rotating hole (11), the position of the third rotating hole (14) corresponds to the position of the circular arc-shaped slot hole (13), and the third rotating hole (14) is connected with the circular arc-shaped slot hole (13) through a second rotating shaft.
4. A novel UV curing embossing apparatus as set forth in claim 3, wherein: one or more of the first (11), second (12) or third (14) swivel bores are provided with rolling bearings.
5. A novel UV curing embossing apparatus as set forth in claim 1, wherein: the pressurizing sealing cavity (2) is close to the side of the unidirectional cylinder (3) and is provided with a cylinder support (31), the cylinder support (31) is of an L-shaped structure, one side of the cylinder support (31) is fixedly connected with the pressurizing sealing cavity (2), the other side of the cylinder support (31) is provided with a cylinder fixing hole, and the unidirectional cylinder (3) penetrates through the cylinder fixing hole and is fixedly connected to the cylinder fixing hole.
6. A novel UV curing embossing apparatus as set forth in claim 1, wherein: the side surface of the pressurizing sealing cavity (2) far away from the unidirectional cylinder (3) is provided with an air pipe hole (61), and the air pipe hole (61) is connected with a pressurizing air pipe (6).
7. A novel UV curing embossing apparatus as set forth in claim 1, wherein: the pressurizing sealing cavity (2) comprises an imprinting chamber (21), a glass pressing sheet (22) and quartz glass (23), wherein the imprinting chamber (211) is arranged in the middle of the imprinting chamber (21), the imprinting chamber (211) is connected with a pressurizing air pipe (6), the glass pressing sheet (22) is arranged at the top of the imprinting chamber (21), a groove is formed in the bottom of the glass pressing sheet (22), quartz glass (23) is arranged in the groove, the quartz glass (23) covers the upper portion of the imprinting chamber (211), a transparent gasket (231) is arranged between the quartz glass (23) and the bottom surface of the groove, and a sealing ring (232) is arranged between the imprinting chamber (21) and the quartz glass (23).
8. A novel UV curing embossing apparatus as set forth in claim 7, wherein: the bottom of the imprinting cavity (211) is provided with a template (5), and two ends of the template (5) are fixedly connected with the imprinting chamber (21) through a template clamping sleeve (51).
9. A novel UV curing embossing apparatus as set forth in claim 1, wherein: the mounting panel (1) is provided with a plurality of mounting holes (15), and the mounting panel (1) is fixed on the three-dimensional moving platform through the mounting holes.
10. The novel UV curing imprinting method is characterized by comprising the following steps of:
s1, adjusting a three-dimensional moving platform to enable a template (5) at the bottom of a pressurizing sealing cavity (2) to be overlapped with a substrate in a vertical projection manner; downwards adjusting the three-dimensional moving platform again to enable the template (5) to be close to the substrate;
s3, opening an air cylinder charging valve, wherein an air cylinder rod of the unidirectional air cylinder (3) extends downwards, and the air cylinder rod props up one side of the pressurizing sealing cavity (2);
s4, regulating the three-dimensional moving platform to descend so that one side, far away from the unidirectional cylinder (3), of the template (5) is contacted with one side of the substrate;
s5, closing an air cylinder inflation valve, opening an air cylinder deflation valve, simultaneously adjusting the three-dimensional moving platform to continuously descend, gradually putting down one propped side of the pressurizing sealing cavity (2) along with the gas release in the air cylinder, and gradually attaching the template (5) to the substrate;
s6, after the template (5) is completely attached to the substrate, inflating the imprinting cavity (211) of the pressurizing sealing cavity (2) through the pressurizing air pipe (6) to pressurize the template (5), so that the nano pattern on the template (5) is perfectly filled in the substrate;
s7, turning on a UV curing lamp (4) to realize the curing of the nano pattern on the substrate;
s8, after solidification is completed, deflating the imprinting cavity (211) through the pressurizing air pipe (6); opening an air cylinder charging valve, wherein an air cylinder rod of the unidirectional air cylinder (3) extends downwards, the air cylinder rod supports one side of the pressurizing sealing cavity (2), and the template (5) starts to separate from the substrate from one side close to the unidirectional air cylinder (3); thereby completing the UV curing imprint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310101942.8A CN116339070A (en) | 2023-02-13 | 2023-02-13 | Novel UV curing nanoimprint device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310101942.8A CN116339070A (en) | 2023-02-13 | 2023-02-13 | Novel UV curing nanoimprint device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116339070A true CN116339070A (en) | 2023-06-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310101942.8A Pending CN116339070A (en) | 2023-02-13 | 2023-02-13 | Novel UV curing nanoimprint device and method |
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| Country | Link |
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| CN (1) | CN116339070A (en) |
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2023
- 2023-02-13 CN CN202310101942.8A patent/CN116339070A/en active Pending
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