CN116321670A - Circuit board and manufacturing method thereof - Google Patents

Circuit board and manufacturing method thereof Download PDF

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Publication number
CN116321670A
CN116321670A CN202111463078.3A CN202111463078A CN116321670A CN 116321670 A CN116321670 A CN 116321670A CN 202111463078 A CN202111463078 A CN 202111463078A CN 116321670 A CN116321670 A CN 116321670A
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circuit board
metal
shell
metal shell
heat
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廖俊霖
黄培彰
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Unimicron Technology Corp
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0201Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203Cooling of mounted components
    • H05K1/0204Cooling of mounted components using means for thermal conduction connection in the thickness direction of the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0201Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203Cooling of mounted components
    • H05K1/021Components thermally connected to metal substrates or heat-sinks by insert mounting

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  • Microelectronics & Electronic Packaging (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

本发明是一种电路板及其制造方法。所述电路板包括绝缘部、配置在绝缘部上的承载层、配置在绝缘部内并热耦接承载层的金属壳。金属壳具有第一内表面、相对于第一内表面的第二内表面、连接第一内表面与第二内表面的第三内表面以及密闭空间,其中第二内表面在第一内表面与承载层之间,密闭空间被第一内表面、第二内表面与第三内表面围绕。电路板还包括分布在密闭空间内的热交换流体。电路板还包括分布在密闭空间内的第一孔隙材料,其中第一孔隙材料配置在第一内表面上。借此增加电路板的散热效率。

Figure 202111463078

The invention is a circuit board and its manufacturing method. The circuit board includes an insulating part, a bearing layer disposed on the insulating part, and a metal shell disposed in the insulating part and thermally coupled to the bearing layer. The metal shell has a first inner surface, a second inner surface opposite to the first inner surface, a third inner surface connecting the first inner surface and the second inner surface, and a closed space, wherein the second inner surface is between the first inner surface and the second inner surface. Between the bearing layers, the airtight space is surrounded by the first inner surface, the second inner surface and the third inner surface. The circuit board also includes a heat exchange fluid distributed within the enclosed space. The circuit board also includes a first porous material distributed in the closed space, wherein the first porous material is arranged on the first inner surface. In this way, the heat dissipation efficiency of the circuit board is increased.

Figure 202111463078

Description

电路板及其制造方法Circuit board and manufacturing method thereof

技术领域technical field

本揭示案提供一种电路板及其制造方法,尤其是一种具有散热效果的电路板及其制造方法。The disclosure provides a circuit board and a manufacturing method thereof, especially a circuit board with a heat dissipation effect and a manufacturing method thereof.

背景技术Background technique

目前的电子装置,例如手机或平板电脑,都包括电子元件与电路板,其中电子元件例如是集成电路(Integrated Circuit,IC),并装设在电路板上。电子元件在运作过程中所产生的热能通常会累积在电子元件和电路板中,累积的热能可能造成电子元件过热,进而影响电子元件的效能,甚至导致电子元件烧毁。因此,具有散热效果的电路板可有助于抑制电子元件的温度上升,进而提升电子元件的效能。Current electronic devices, such as mobile phones or tablet computers, include electronic components and circuit boards, wherein the electronic components are, for example, integrated circuits (ICs) mounted on the circuit boards. The heat energy generated by electronic components during operation usually accumulates in the electronic components and circuit boards. The accumulated heat energy may cause the electronic components to overheat, thereby affecting the performance of the electronic components, and even causing the electronic components to burn out. Therefore, the circuit board with heat dissipation effect can help to suppress the temperature rise of the electronic components, thereby improving the performance of the electronic components.

发明内容Contents of the invention

根据本揭示案的一些实施例,一种电路板包括绝缘部、配置在绝缘部上的承载层、配置在绝缘部内并热耦接承载层的金属壳。金属壳具有第一内表面、相对于第一内表面的第二内表面、连接第一内表面与第二内表面的第三内表面以及密闭空间,其中第二内表面在第一内表面与承载层之间,密闭空间被第一内表面、第二内表面与第三内表面围绕。电路板还包括分布在密闭空间内的热交换流体。电路板还包括分布在密闭空间内的第一孔隙材料,其中第一孔隙材料配置在第一内表面上。According to some embodiments of the present disclosure, a circuit board includes an insulating part, a bearing layer disposed on the insulating part, and a metal shell disposed in the insulating part and thermally coupled to the bearing layer. The metal shell has a first inner surface, a second inner surface opposite to the first inner surface, a third inner surface connecting the first inner surface and the second inner surface, and a closed space, wherein the second inner surface is between the first inner surface and the second inner surface. Between the bearing layers, the airtight space is surrounded by the first inner surface, the second inner surface and the third inner surface. The circuit board also includes a heat exchange fluid distributed within the enclosed space. The circuit board also includes a first porous material distributed in the closed space, wherein the first porous material is arranged on the first inner surface.

在一些实施例中,电路板进一步包括电子元件,配置于承载层上并经由承载层而热耦接金属壳,其中电子元件不电性连接金属壳。电路板进一步包括散热件,配置于金属壳下并热耦接金属壳,其中金属壳位于电子元件与散热件之间。In some embodiments, the circuit board further includes electronic components disposed on the carrying layer and thermally coupled to the metal shell through the carrying layer, wherein the electronic components are not electrically connected to the metal shell. The circuit board further includes a heat sink disposed under the metal shell and thermally coupled to the metal shell, wherein the metal shell is located between the electronic component and the heat sink.

在一些实施例中,电子元件在第二内表面的正投影与散热件在第二内表面的正投影彼此分离。In some embodiments, the orthographic projection of the electronic component on the second inner surface and the orthographic projection of the heat sink on the second inner surface are separated from each other.

在一些实施例中,电路板进一步包括第一导热柱,配置于绝缘部中,连接承载层和金属壳,并位于承载层和金属壳之间。In some embodiments, the circuit board further includes a first heat conduction column, configured in the insulating portion, connected to the bearing layer and the metal shell, and located between the bearing layer and the metal shell.

在一些实施例中,绝缘部包括第一介电层与第二介电层,金属壳位于第一介电层与第二介电层之间,第一导热柱配置在第一介电层中,并热耦接承载层与金属壳。In some embodiments, the insulation part includes a first dielectric layer and a second dielectric layer, the metal shell is located between the first dielectric layer and the second dielectric layer, and the first heat conduction column is disposed in the first dielectric layer. , and thermally couple the bearing layer and the metal shell.

在一些实施例中,电路板进一步包括第二导热柱,配置于第二介电层,连接散热件和金属壳,并位于散热件和金属壳之间。In some embodiments, the circuit board further includes a second heat conduction column, disposed on the second dielectric layer, connected to the heat sink and the metal shell, and located between the heat sink and the metal shell.

在一些实施例中,绝缘部完全包覆金属壳。In some embodiments, the insulating portion completely covers the metal shell.

在一些实施例中,第一孔隙材料接触金属壳。In some embodiments, the first porous material contacts the metal shell.

在一些实施例中,热交换流体包括液体与气体。In some embodiments, the heat exchange fluid includes liquids and gases.

在一些实施例中,电路板进一步包括第二孔隙材料,配置在第三内表面上。In some embodiments, the circuit board further includes a second porous material disposed on the third inner surface.

在一些实施例中,电路板进一步包括第三孔隙材料,配置在第二内表面上。In some embodiments, the circuit board further includes a third porous material disposed on the second inner surface.

根据本揭示案的另一些实施例,一种制造电路板的方法包括形成凹槽在第一绝缘部中、形成第一金属子壳在凹槽内、配置第一孔隙材料在第一金属子壳内、加入热交换流体至第一金属子壳内、形成第二金属子壳在第二绝缘部上、以及压合第一绝缘部与第二绝缘部。压合第一绝缘部与第二绝缘部以使第一金属子壳与第二金属子壳形成具有密闭空间的金属壳,其中热交换流体与第一孔隙材料皆密封于金属壳的密闭空间中。According to some other embodiments of the present disclosure, a method of manufacturing a circuit board includes forming a groove in the first insulating part, forming a first metal sub-shell in the groove, disposing a first porous material in the first metal sub-shell adding heat exchange fluid into the first metal sub-shell, forming the second metal sub-shell on the second insulating part, and pressing the first insulating part and the second insulating part. Pressing the first insulating part and the second insulating part so that the first metal sub-shell and the second metal sub-shell form a metal shell with a closed space, wherein the heat exchange fluid and the first pore material are sealed in the closed space of the metal shell .

在一些实施例中,形成第一金属子壳的方法包括沿着凹槽的内表面保形地沉积金属。In some embodiments, the method of forming the first metal subshell includes conformally depositing metal along an inner surface of the groove.

在一些实施例中,制造电路板的方法进一步包括在压合第一绝缘部与第二绝缘部之前,放置第二孔隙材料在第一金属子壳内,其中第二孔隙材料的位置与第一孔隙材料的位置不同。In some embodiments, the method of manufacturing a circuit board further includes placing a second porous material in the first metal sub-shell before laminating the first insulating part and the second insulating part, wherein the position of the second porous material is the same as that of the first insulating part. The position of the porous material is different.

在一些实施例中,制造电路板的方法进一步包括在形成第二金属子壳之后,放置第三孔隙材料在第二金属子壳内。In some embodiments, the method of manufacturing a circuit board further includes placing a third porous material within the second metal sub-case after forming the second metal sub-case.

在一些实施例中,制造电路板的方法进一步包括形成第一导热柱在该第一绝缘部中、以及形成第二导热柱在第二绝缘部中。In some embodiments, the method of manufacturing a circuit board further includes forming a first thermally conductive post in the first insulating portion, and forming a second thermally conductive post in the second insulating portion.

在一些实施例中,制造电路板的方法进一步包括配置电子元件在第二绝缘部上,其中第二导热柱热耦接电子元件和第二金属子壳。In some embodiments, the method of manufacturing the circuit board further includes disposing the electronic component on the second insulating portion, wherein the second heat conduction column is thermally coupled to the electronic component and the second metal sub-case.

在一些实施例中,制造电路板的方法进一步包括配置散热件在第一绝缘部下,其中第一导热柱热耦接散热件和第一金属子壳,及电子元件在第一金属子壳的正投影与散热件在第一金属子壳的正投影彼此分开。In some embodiments, the method for manufacturing a circuit board further includes disposing a heat sink under the first insulating part, wherein the first heat conduction column is thermally coupled to the heat sink and the first metal sub-case, and the electronic component is placed on the front of the first metal sub-case. The projection and the orthographic projection of the heat sink on the first metal sub-shell are separated from each other.

本揭示案的实施例提供的电路板及其制造方法可增加热传导的路径,借此增加电路板的散热效率,从而提高电子元件的效能。The circuit board and its manufacturing method provided by the embodiments of the present disclosure can increase the heat conduction path, thereby increasing the heat dissipation efficiency of the circuit board, thereby improving the performance of electronic components.

附图说明Description of drawings

阅读以下实施方法时搭配附图以清楚理解本揭示案的观点。应注意的是,根据业界的标准做法,各种特征并未按照比例绘制。事实上,为了能清楚地讨论,各种特征的尺寸可能任意地放大或缩小。When reading the following implementation methods with accompanying drawings, the viewpoints of the disclosure can be clearly understood. It should be noted that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily expanded or reduced for clarity of discussion.

图1根据本揭示案一些实施例绘示电路板的俯视简图。FIG. 1 illustrates a schematic top view of a circuit board according to some embodiments of the present disclosure.

图2A根据本揭示案一些实施例绘示电路板沿图1的剖线A-A的截面图。FIG. 2A shows a cross-sectional view of a circuit board along line A-A of FIG. 1 according to some embodiments of the present disclosure.

图2B根据本揭示案一些实施例绘示电路板沿图1的剖线B-B的截面图。FIG. 2B shows a cross-sectional view of the circuit board along the line B-B of FIG. 1 according to some embodiments of the present disclosure.

图3、图4、图5、图6、图7和图8依据本揭示案一些实施例绘示制造电路板的各个阶段的截面图。3 , 4 , 5 , 6 , 7 and 8 illustrate cross-sectional views of various stages of manufacturing a circuit board according to some embodiments of the present disclosure.

图9根据本揭示案另一些实施例绘示电路板的俯视图。FIG. 9 illustrates a top view of a circuit board according to other embodiments of the present disclosure.

【主要元件符号说明】[Description of main component symbols]

100:电路板 110:绝缘部100: Circuit board 110: Insulation part

110A:第一绝缘部 110B:第二绝缘部110A: first insulating part 110B: second insulating part

111:第一介电层 112:第二介电层111: first dielectric layer 112: second dielectric layer

113:第三介电层 120:金属壳113: third dielectric layer 120: metal shell

121:第一内表面 122:第二内表面121: first inner surface 122: second inner surface

123:第三内表面 124:密闭空间123: third inner surface 124: confined space

130:承载层 141:第一导热柱130: bearing layer 141: first thermal conduction column

142:第二导热柱 150:热交换流体142: second heat transfer column 150: heat exchange fluid

160:孔隙材料 161:第一孔隙材料160: Porous material 161: First porous material

162:第二孔隙材料 163:第三孔隙材料162: second porous material 163: third porous material

170:电子元件 180:散热件170: electronic components 180: heat sink

190:线路层 200:电路板190: circuit layer 200: circuit board

220:金属壳 300:凹槽220: metal shell 300: groove

310A:金属层 310B:金属层310A: metal layer 310B: metal layer

400:金属层 500:第一金属子壳400: metal layer 500: first metal subshell

700:第二金属子壳 A-A:剖线700: second metal sub-shell A-A: section line

B-B:剖线 X,Y,Z:参考坐标轴B-B: section line X, Y, Z: reference coordinate axis

具体实施方式Detailed ways

当一个元件被称为「在…上」时,它可泛指该元件直接在其他元件上,也可以是有其他元件存在于两者之中。相反地,当一个元件被称为「直接在」另一元件,它是不能有其他元件存在于两者的中间。如本文所用,词汇「及/或」包含了列出的关联项目中的一个或多个的任何组合。When an element is referred to as being "on", it can generally mean that the element is directly on other elements, or there may be other elements present in between. Conversely, when an element is said to be "directly on" another element, it cannot have other elements in between. As used herein, the word "and/or" includes any combination of one or more of the associated listed items.

在本文中,使用第一、第二与第三等等的词汇,是用于描述各种元件、组件、区域、层与/或区块是可以被理解的。但是这些元件、组件、区域、层与/或区块不应该被这些术语所限制。这些词汇只限于用来辨别单一元件、组件、区域、层与/或区块。因此,在下文中的第一元件、组件、区域、层与/或区块也可被称为第二元件、组件、区域、层与/或区块,而不脱离本揭示案的本意。It is understandable that terms such as first, second and third are used herein to describe various elements, components, regions, layers and/or blocks. But these elements, components, regions, layers and/or blocks should not be limited by these terms. These terms are limited to identifying a single element, component, region, layer and/or block. Therefore, a first element, component, region, layer and/or block hereinafter may also be referred to as a second element, component, region, layer and/or block without departing from the original meaning of the present disclosure.

电子元件在运作过程中所产生的热能可透过电路板上的散热件排出,以避免热能过度集中在电子元件和电路板内而造成电子元件过热,进而影响电子元件的表现,其中电路板散热效率受到电子元件与散热件之间的热能传导路径配置与热能传导速度影响。本揭示案的实施方式提供一种具有散热效果的电路板及其制造方法,借由增加热传导路径以有助于提高电子元件与散热件之间配置上的弹性及提升电路板的散热效率,从而提高电子元件的效能。The heat energy generated by electronic components during operation can be discharged through the heat sink on the circuit board to avoid excessive concentration of heat energy in the electronic components and the circuit board and cause overheating of the electronic components, thereby affecting the performance of the electronic components. The circuit board dissipates heat Efficiency is affected by the configuration of the heat conduction path between the electronic components and the heat sink and the speed of heat conduction. Embodiments of the present disclosure provide a circuit board with a heat dissipation effect and a manufacturing method thereof. By increasing the heat conduction path, it is helpful to improve the flexibility of the arrangement between the electronic component and the heat sink and improve the heat dissipation efficiency of the circuit board, thereby Improve the performance of electronic components.

请参照图1,图1是根据本揭示案一些实施例绘示电路板100的俯视图。电路板100可具有绝缘部110、配置在绝缘部110内的金属壳120、配置在绝缘部110上的电子元件170、以及配置在绝缘部110下的散热件180,其中图1以断线绘出在绝缘部110内部的金属壳120以及在绝缘部110下的散热件180的例示性配置。Please refer to FIG. 1 , which is a top view of a circuit board 100 according to some embodiments of the present disclosure. The circuit board 100 may have an insulating portion 110, a metal shell 120 disposed in the insulating portion 110, an electronic component 170 disposed on the insulating portion 110, and a heat sink 180 disposed under the insulating portion 110, wherein FIG. 1 is drawn with a broken line An exemplary configuration of the metal shell 120 inside the insulating part 110 and the heat sink 180 under the insulating part 110 is shown.

如图1所示,金属壳120的范围涵盖电子元件170和散热件180。当电子元件170的位置和散热件180的位置依产品设计和制成需求而调整时,金属壳120的范围亦可随着电子元件170的位置和散热件180的位置而相应调整。在如图1所示的实施例中,电子元件170的位置与散热件180的位置在水平方向上彼此分开(例如,在X轴方向上彼此分开)。在一些其他的实施例中,电子元件170的位置与散热件180的位置在水平方向上可部分地重叠(未绘出)。As shown in FIG. 1 , the range of the metal shell 120 covers the electronic component 170 and the heat sink 180 . When the position of the electronic component 170 and the position of the heat sink 180 are adjusted according to product design and manufacturing requirements, the range of the metal shell 120 can also be adjusted correspondingly with the position of the electronic component 170 and the position of the heat sink 180 . In the embodiment shown in FIG. 1 , the position of the electronic component 170 and the position of the heat sink 180 are separated from each other in the horizontal direction (eg, separated from each other in the direction of the X axis). In some other embodiments, the position of the electronic component 170 and the position of the heat sink 180 may partially overlap in the horizontal direction (not shown).

请同时参照图2A及图2B,图2A是根据本揭示案一些实施例绘示电路板100沿图1的剖线A-A的截面图、及图2B是根据本揭示案一些实施例绘示电路板100沿图1的剖线B-B的截面图。应注意的是,为了清楚说明,图1经简化而仅绘出电路板100的部分元件,所以图1(俯视图)和图2A/图2B(截面图)之间的元件未必能完全对应。Please refer to FIG. 2A and FIG. 2B at the same time. FIG. 2A is a cross-sectional view of the circuit board 100 along the section line A-A in FIG. 1 according to some embodiments of the disclosure, and FIG. 2B is a diagram of the circuit board according to some embodiments of the disclosure. 100 is a cross-sectional view along the section line B-B in FIG. 1 . It should be noted that, for clarity, FIG. 1 is simplified and only depicts some components of the circuit board 100 , so components between FIG. 1 (top view) and FIG. 2A/2B (cross-sectional view) may not be completely corresponding.

电子元件170设置在绝缘部110和金属壳120的上方,散热件180设置在绝缘部110和金属壳120的下方,应注意的是,散热件180因视角而仅绘示在图2B的截面图中。The electronic component 170 is disposed above the insulating portion 110 and the metal shell 120, and the heat sink 180 is disposed below the insulating portion 110 and the metal shell 120. It should be noted that the heat sink 180 is only shown in the cross-sectional view of FIG. 2B due to the viewing angle. middle.

绝缘部110可为多层结构,其具有第一介电层111介于电子元件170和金属壳120之间、第二介电层112介于散热件180和金属壳120之间、以及第三介电层113介于第一介电层111和第二介电层112之间。电子元件170配置在第一介电层111上而散热件180配置在第二介电层112下。值得一提的是,虽然第一介电层111和第二介电层112在图2A和图2B中绘示成单层,但实际操作上第一介电层111、第二介电层112和第三介电层113可分别具有任意介电层数量。The insulating part 110 can be a multilayer structure, which has a first dielectric layer 111 interposed between the electronic component 170 and the metal case 120, a second dielectric layer 112 interposed between the heat sink 180 and the metal case 120, and a third The dielectric layer 113 is interposed between the first dielectric layer 111 and the second dielectric layer 112 . The electronic component 170 is disposed on the first dielectric layer 111 and the heat sink 180 is disposed under the second dielectric layer 112 . It is worth mentioning that although the first dielectric layer 111 and the second dielectric layer 112 are shown as a single layer in FIG. 2A and FIG. and the third dielectric layer 113 may have any number of dielectric layers, respectively.

绝缘部110的材料可包括环氧玻璃布层压板(FR-4)、环氧树脂(epoxy resin)、预浸材料(prepreg,PP)或陶瓷,但不以此为限。The material of the insulating part 110 may include epoxy glass cloth laminated board (FR-4), epoxy resin (epoxy resin), prepreg material (prepreg, PP) or ceramics, but not limited thereto.

金属壳120嵌埋在绝缘部110中。金属壳120配置在第一介电层111和第二介电层112之间,并延伸在第三介电层113内。换句话说,绝缘部110包覆金属壳120。金属壳120配置在电子元件170和散热件180之间,因此金属壳120在垂直方向的尺寸(例如在Z轴方向的尺寸)小于或等于电子元件170和散热件180之间的垂直距离。在一些实施例中,金属壳120在垂直方向的尺寸(例如在Z轴方向的尺寸)可大于单层介电层的厚度。The metal shell 120 is embedded in the insulating part 110 . The metal shell 120 is disposed between the first dielectric layer 111 and the second dielectric layer 112 and extends in the third dielectric layer 113 . In other words, the insulating part 110 covers the metal shell 120 . The metal shell 120 is disposed between the electronic component 170 and the heat sink 180 , so the vertical dimension of the metal shell 120 (eg, the dimension along the Z axis) is smaller than or equal to the vertical distance between the electronic component 170 and the heat sink 180 . In some embodiments, the size of the metal shell 120 in the vertical direction (eg, the size in the Z-axis direction) may be greater than the thickness of the single dielectric layer.

金属壳120可包括第一内表面121、第二内表面122、以及第三内表面123,其中第一内表面121与第二内表面122彼此相对。第一内表面121邻近散热件180,第二内表面122邻近电子元件170,而第三内表面123连接第一内表面121与第二内表面122。再者,金属壳120还可包括密闭空间124,其被第一内表面121、第二内表面122与第三内表面123围绕,其中密闭空间124基本上是由金属壳120所定义。由于金属壳120配置在绝缘部110中,故金属壳120的密闭空间124可使绝缘部110呈现出中空结构。在一些实施例中,金属壳120的材料可包括金属(例如铜)或合金。The metal shell 120 may include a first inner surface 121 , a second inner surface 122 , and a third inner surface 123 , wherein the first inner surface 121 and the second inner surface 122 are opposite to each other. The first inner surface 121 is adjacent to the heat sink 180 , the second inner surface 122 is adjacent to the electronic component 170 , and the third inner surface 123 connects the first inner surface 121 and the second inner surface 122 . Furthermore, the metal shell 120 may further include a closed space 124 surrounded by the first inner surface 121 , the second inner surface 122 and the third inner surface 123 , wherein the closed space 124 is basically defined by the metal shell 120 . Since the metal shell 120 is disposed in the insulating portion 110 , the enclosed space 124 of the metal shell 120 can make the insulating portion 110 present a hollow structure. In some embodiments, the material of the metal shell 120 may include metal (such as copper) or alloy.

电路板100可进一步具有承载层130、第一导热柱141和第二导热柱142。承载层130设置在绝缘部110上(例如,第一介电层111上),电子元件170设置在承载层130上并热耦接承载层130。第一导热柱141配置在绝缘部110中并位于承载层130和金属壳120之间。第一导热柱141可连接承载层130和金属壳120。具体而言,第一导热柱141配置在第一介电层111中并热耦接承载层130和金属壳120。因此,电子元件170可经由承载层130和第一导热柱141而热耦接至金属壳120。The circuit board 100 may further have a bearing layer 130 , a first heat conduction column 141 and a second heat conduction column 142 . The carrying layer 130 is disposed on the insulating portion 110 (for example, on the first dielectric layer 111 ), and the electronic component 170 is disposed on the carrying layer 130 and thermally coupled to the carrying layer 130 . The first heat conducting column 141 is disposed in the insulating portion 110 and located between the bearing layer 130 and the metal shell 120 . The first heat conducting column 141 can connect the carrying layer 130 and the metal shell 120 . Specifically, the first heat conduction column 141 is disposed in the first dielectric layer 111 and is thermally coupled to the bearing layer 130 and the metal shell 120 . Therefore, the electronic component 170 can be thermally coupled to the metal case 120 via the carrying layer 130 and the first heat conducting post 141 .

在一些实施例中,承载层130和第一导热柱141用于热传导,但非用于电流传导。因此,电子元件170不电性连接金属壳120,使电信号走线与热传导路径不彼此影响而降低电子元件170的效能或是干扰电子元件170的运作,借此简化系统设计。在一些实施例中,可省略第一导热柱141,使电子元件170经由承载层130而热耦接金属壳120。In some embodiments, the carrier layer 130 and the first thermally conductive pillar 141 are used for heat conduction, but not for current conduction. Therefore, the electronic component 170 is not electrically connected to the metal shell 120 , so that the electrical signal routing and the heat conduction path do not interfere with each other to reduce the performance of the electronic component 170 or interfere with the operation of the electronic component 170 , thereby simplifying the system design. In some embodiments, the first heat conduction column 141 can be omitted, so that the electronic component 170 is thermally coupled to the metal shell 120 through the carrying layer 130 .

第二导热柱142配置在绝缘部110中并位于散热件180和金属壳120之间。第二导热柱142可连接散热件180和金属壳120。具体而言,第二导热柱142配置在第二介电层112中并热耦接散热件180和金属壳120。相似于第一导热柱141,第二导热柱142提供热传导的功能,并且散热件180可通过第二导热柱142而热耦接至金属壳120,但第二导热柱142不用于电流传导。The second heat conducting column 142 is disposed in the insulating portion 110 and located between the heat sink 180 and the metal shell 120 . The second heat conducting column 142 can connect the heat sink 180 and the metal shell 120 . Specifically, the second heat conducting column 142 is disposed in the second dielectric layer 112 and is thermally coupled to the heat sink 180 and the metal shell 120 . Similar to the first heat conduction pillar 141 , the second heat conduction pillar 142 provides the function of heat conduction, and the heat sink 180 can be thermally coupled to the metal shell 120 through the second heat conduction pillar 142 , but the second heat conduction pillar 142 is not used for current conduction.

承载层130、第一导热柱141和第二导热柱142的材料可包括具有导热性的材料,例如金属、陶瓷等。在一些实施例中,承载层130、第一导热柱141和第二导热柱142的材料可为铜。The materials of the bearing layer 130 , the first heat conduction column 141 and the second heat conduction column 142 may include materials with thermal conductivity, such as metal, ceramics, and the like. In some embodiments, the material of the bearing layer 130 , the first heat conduction pillar 141 and the second heat conduction pillar 142 may be copper.

电路板100还具有热交换流体150,其配置在金属壳120内。详细而言,热交换流体150密封在金属壳120中并分布在密闭空间124内。在一些实施例中,热交换流体150可在密闭空间124中流动。热交换流体150在金属壳120中存在液体状态与气体状态。The circuit board 100 also has a heat exchange fluid 150 disposed within the metal shell 120 . In detail, the heat exchange fluid 150 is sealed in the metal shell 120 and distributed in the closed space 124 . In some embodiments, heat exchange fluid 150 may flow within confined space 124 . The heat exchange fluid 150 exists in a liquid state and a gas state in the metal shell 120 .

热交换流体150的材料(液体状态)可包括氨、丙酮、甲醇、乙醇、庚皖、纯水、其他合适的材料、或上述材料的组合。由于热交换流体150是借由相变化来吸收并释放热能(稍后讨论),所以热交换流体150的材料选择应考虑到电路板100操作过程的温度范围,以确保热交换流体150会在相同的温度范围内产生相变化。在一些实施例中,电路板100操作过程的温度在-70℃到200℃之间,所以可选择在-70℃到200℃之间产生相变化的材料做为热交换流体150。The material (in liquid state) of the heat exchange fluid 150 may include ammonia, acetone, methanol, ethanol, hydrogen peroxide, pure water, other suitable materials, or a combination of the above materials. Since the heat exchange fluid 150 absorbs and releases thermal energy by phase change (discussed later), the material selection of the heat exchange fluid 150 should take into account the temperature range during operation of the circuit board 100 to ensure that the heat exchange fluid 150 will be at the same temperature. A phase change occurs in the temperature range. In some embodiments, the operating temperature of the circuit board 100 is between -70° C. and 200° C., so a material that undergoes a phase change between -70° C. and 200° C. can be selected as the heat exchange fluid 150 .

电路板100可进一步具有孔隙材料160,其配置在金属壳120内。详细而言,孔隙材料160密封在金属壳120中并分布在密闭空间124内。在一些实施例中,孔隙材料160设置在金属壳120的内表面上。在一些实施例中,孔硅材料160可直接接触金属壳120。孔隙材料160可包括例如金属、陶瓷等,以提供导热功能。在一些实施例中,孔隙材料160的材料可包括铜、金、银、铝等。在一些实施例中,孔隙材料160可为铜纤维。The circuit board 100 may further have a porous material 160 disposed in the metal shell 120 . In detail, the porous material 160 is sealed in the metal shell 120 and distributed in the closed space 124 . In some embodiments, the porous material 160 is disposed on the inner surface of the metal shell 120 . In some embodiments, the porous silicon material 160 may directly contact the metal shell 120 . The porous material 160 may include, for example, metal, ceramics, etc., to provide a heat conduction function. In some embodiments, the material of the porous material 160 may include copper, gold, silver, aluminum, and the like. In some embodiments, the porous material 160 may be copper fibers.

孔隙材料160的孔隙结构足以使热交换流体150吸附在其中。除此之外,孔隙材料160的孔隙结构可增加孔隙材料160的表面积。增加的表面积可增大接触热交换流体150的面积,从而提升孔隙材料160与热交换流体150之间的热能传导。The porous structure of the porous material 160 is sufficient for the heat exchange fluid 150 to be adsorbed therein. In addition, the porous structure of the porous material 160 may increase the surface area of the porous material 160 . The increased surface area may increase the area contacting the heat exchange fluid 150 , thereby improving the transfer of thermal energy between the porous material 160 and the heat exchange fluid 150 .

当电子元件170运作时,产生的热能可经由承载层130和第一导热柱141迅速地传导至金属壳120。金属壳120接近电子元件170的一区域为热能输入区,金属壳120接近散热件180的另一区域为热能输出区。在热能输入区中,金属壳120可直接传导热能给液态的热交换流体150,或是经由孔隙材料160传导热能给液态的热交换流体150。液态的热交换流体150吸收热能而蒸发成气态的热交换流体150,并且气态的热交换流体150往散热件180的方向移动,意即,热交换流体150从热能输入区移动至热能输出区。When the electronic component 170 is in operation, the generated heat energy can be rapidly conducted to the metal shell 120 through the carrying layer 130 and the first heat conducting column 141 . A region of the metal shell 120 close to the electronic component 170 is a heat input area, and another area of the metal shell 120 close to the heat sink 180 is a heat output area. In the heat input area, the metal shell 120 can directly conduct heat energy to the liquid heat exchange fluid 150 , or conduct heat energy to the liquid heat exchange fluid 150 through the porous material 160 . The liquid heat exchange fluid 150 absorbs heat energy and evaporates into a gaseous heat exchange fluid 150 , and the gaseous heat exchange fluid 150 moves toward the heat sink 180 , that is, the heat exchange fluid 150 moves from the heat input area to the heat output area.

当气态的热交换流体150到达热能输出区,气态的热交换流体150可凝结成液体的热交换流体150,同时,在热交换流体150的相变化过程中,热能被释出并传给金属壳120和孔隙材料160。热能进一步地经由第二导热柱142传导至散热件180,再由散热件180排出,以避免热能累积在电路板100中。When the gaseous heat exchange fluid 150 reaches the heat output area, the gaseous heat exchange fluid 150 can be condensed into a liquid heat exchange fluid 150, and at the same time, during the phase change of the heat exchange fluid 150, heat energy is released and transferred to the metal shell 120 and porous material 160. The heat energy is further conducted to the heat dissipation element 180 through the second heat conduction column 142 , and then discharged by the heat dissipation element 180 to prevent heat energy from accumulating in the circuit board 100 .

在气态的热交换流体150凝结成液态的热交换流体150之后,液态的热交换流体150可吸附在孔隙材料160中,并因毛细现象从热能输出区(金属壳120邻近散热件180的区域)移动到至热能输入区(金属壳120邻近电子元件170的区域)。如此一来,热交换流体150可反复循环在金属壳120内,电子元件170产生的热能可借由上述的方式持续从电子元件170传导至散热件180排出。After the gaseous heat exchange fluid 150 is condensed into the liquid heat exchange fluid 150, the liquid heat exchange fluid 150 can be adsorbed in the porous material 160, and due to the capillary phenomenon, it will flow from the heat output area (the area of the metal shell 120 adjacent to the heat sink 180) Move to the heat input area (the area where the metal shell 120 is adjacent to the electronic component 170 ). In this way, the heat exchange fluid 150 can circulate repeatedly in the metal shell 120 , and the heat energy generated by the electronic component 170 can be continuously conducted from the electronic component 170 to the heat sink 180 to be discharged in the above-mentioned manner.

孔隙材料160的配置有助于热交换流体150的循环。在一些实施例中,孔隙材料160至少要具有第一孔隙材料161配置在第一内表面121上,以协助热交换流体150在水平方向(例如,XY平面上)的移动。在一些实施例中,第一孔隙材料161直接接触第一内表面121,以和金属壳120互相传导热能。The configuration of the porous material 160 facilitates circulation of the heat exchange fluid 150 . In some embodiments, the porous material 160 has at least the first porous material 161 disposed on the first inner surface 121 to facilitate the movement of the heat exchange fluid 150 in the horizontal direction (eg, on the XY plane). In some embodiments, the first porous material 161 directly contacts the first inner surface 121 to conduct heat energy with the metal shell 120 .

在存在第一孔隙材料161的实施例中,孔隙材料160可进一步具有第二孔隙材料162配置在第三内表面123上。在此实施例中,第二孔隙材料162可使热能在垂直方向(例如,Z轴方向)传导或是协助热交换流体150在垂直方向(例如,Z轴方向)移动。在存在第一孔隙材料161和第二孔隙材料162的实施例中,孔隙材料160可进一步具有第三孔隙材料163,配置在第二内表面122上,以提供额外的热能传导。In the embodiment where the first porous material 161 is present, the porous material 160 may further have a second porous material 162 disposed on the third inner surface 123 . In this embodiment, the second porous material 162 can conduct heat energy in the vertical direction (eg, the Z-axis direction) or assist the heat exchange fluid 150 to move in the vertical direction (eg, the Z-axis direction). In the embodiment where the first porous material 161 and the second porous material 162 exist, the porous material 160 may further have a third porous material 163 disposed on the second inner surface 122 to provide additional thermal energy conduction.

金属壳120的密闭空间124可决定热交换流体150分布范围,而在金属壳120内的孔隙材料160可有助于热交换流体150的流动和循环。当金属壳120位于电子元件170与散热件180之间并热耦接两者时,金属壳120即可形成电子元件170与散热件180之间的热能传导路径。换言之,可根据系统设计或制程要求来调整金属壳120,借此调整电子元件170与散热件180之间的热能传导路径。The closed space 124 of the metal shell 120 can determine the distribution range of the heat exchange fluid 150 , and the porous material 160 in the metal shell 120 can facilitate the flow and circulation of the heat exchange fluid 150 . When the metal shell 120 is located between the electronic component 170 and the heat sink 180 and is thermally coupled to the two, the metal shell 120 can form a heat conduction path between the electronic component 170 and the heat sink 180 . In other words, the metal shell 120 can be adjusted according to system design or process requirements, thereby adjusting the heat conduction path between the electronic component 170 and the heat sink 180 .

在一些实施例中,电子元件170与散热件180之间的热能传导路径可设计在水平方向延伸(例如,在XY平面上延伸),如图1所示。在此实施例中,电子元件170的正投影可能不重叠散热件180的正投影。换言之,电子元件170在第一内表面121的正投影与散热件180在第一内表面121的正投影彼此分离。同样地,第一导热柱141的正投影可能不重叠第二导热柱142的正投影。当然,在其他未绘示的实施例中,电子元件170在第一内表面121的正投影亦可重叠散热件180在第一内表面121的正投影,此仍属于本揭示案所欲保护的范围。In some embodiments, the heat conduction path between the electronic component 170 and the heat sink 180 can be designed to extend in the horizontal direction (for example, extend on the XY plane), as shown in FIG. 1 . In this embodiment, the orthographic projection of the electronic component 170 may not overlap the orthographic projection of the heat sink 180 . In other words, the orthographic projection of the electronic component 170 on the first inner surface 121 and the orthographic projection of the heat sink 180 on the first inner surface 121 are separated from each other. Likewise, the orthographic projection of the first thermally conductive column 141 may not overlap the orthographic projection of the second thermally conductive column 142 . Of course, in other unillustrated embodiments, the orthographic projection of the electronic component 170 on the first inner surface 121 can also overlap the orthographic projection of the heat sink 180 on the first inner surface 121, which still belongs to the protection intended by this disclosure. scope.

因此,金属壳120的密闭空间124搭配热交换流体150和孔隙材料160可提供较多元的热能传导路径,以增加电路板100的设计弹性,亦可快速地将电子元件170所产生的热能传导至散热件180以提升电路板100的散热效率。Therefore, the enclosed space 124 of the metal shell 120 together with the heat exchange fluid 150 and the porous material 160 can provide more multiple heat conduction paths, so as to increase the design flexibility of the circuit board 100, and can also quickly conduct heat energy generated by the electronic components 170 to The heat sink 180 is used to improve the heat dissipation efficiency of the circuit board 100 .

电路板100还包括线路层190。绝缘部110电性隔离了线路层190与金属壳120,所以线路层190不电性连接金属壳120。因此,用于传递电信号的线路层190与热传导路径不会彼此影响而降低电子元件170的效能或是干扰电子元件170的运作,而且也有助于简化系统设计。The circuit board 100 also includes a circuit layer 190 . The insulation part 110 electrically isolates the circuit layer 190 from the metal shell 120 , so the circuit layer 190 is not electrically connected to the metal shell 120 . Therefore, the circuit layer 190 and the heat conduction path for transmitting electrical signals will not affect each other to reduce the performance of the electronic component 170 or interfere with the operation of the electronic component 170 , and also help to simplify the system design.

图3、图4、图5、图6、图7和图8为依据本揭示案一些实施例绘示制造电路板100的各个阶段的截面图。图3、图4、图5、图6、图7和图8的参考截面与图2A一致。3 , 4 , 5 , 6 , 7 and 8 are cross-sectional views illustrating various stages of manufacturing the circuit board 100 according to some embodiments of the present disclosure. The reference sections of Figs. 3, 4, 5, 6, 7 and 8 are consistent with Fig. 2A.

应注意的是,除非有额外说明,当以下实施例绘示或描述成一系列的操作或事件时,这些操作或事件的描述顺序不应受到限制。例如,部分操作或事件可采取与本揭示案不同的顺序、部分操作或事件可同时发生、部分操作或事件可以不须采用、及/或部分操作或事件可重复进行。并且,实际的制程可能须各步骤之前、过程中、或之后进行额外的操作以完整形成电路板100。因此,本揭示案可能将简短地说明其中一些额外的操作。It should be noted that, unless otherwise specified, when the following embodiments are shown or described as a series of operations or events, the description order of these operations or events should not be limited. For example, some operations or events may be undertaken in a different order than in the present disclosure, some operations or events may occur concurrently, some operations or events may not be required, and/or some operations or events may be repeated. Moreover, the actual manufacturing process may require additional operations before, during, or after each step to completely form the circuit board 100 . Therefore, this disclosure may briefly illustrate some of these additional operations.

请参照图3,首先,形成凹槽300在第一绝缘部110A中。第一绝缘部110A为多层结构,并在后续流程中形成如图2A所示的第二介电层112和第三介电层113,而第二导热柱142(见图2B此视角的截面图)可形成在第一绝缘部110A中。凹槽300的形成方式可包括激光钻孔、机械钻孔、其他合适的技术、或上述的组合。在一些实施例中,金属层310A分布在第一绝缘部110A上。在一些实施例中,金属层310B配置在凹槽300的底表面上。在一些实施例中,金属层310A和金属层310B由不同的金属薄片形成。Referring to FIG. 3 , firstly, a groove 300 is formed in the first insulating portion 110A. The first insulating part 110A is a multi-layer structure, and the second dielectric layer 112 and the third dielectric layer 113 as shown in FIG. ) may be formed in the first insulating part 110A. The groove 300 may be formed by laser drilling, mechanical drilling, other suitable techniques, or a combination thereof. In some embodiments, the metal layer 310A is distributed on the first insulating portion 110A. In some embodiments, the metal layer 310B is disposed on the bottom surface of the groove 300 . In some embodiments, metal layer 310A and metal layer 310B are formed from different metal sheets.

请同时参照图4和图5,接着,形成第一金属子壳500在凹槽300内。在图4中,形成第一金属子壳500的步骤可包括沿着凹槽300的内表面上保形地沉积金属,使得凹槽300的侧表面上形成金属层400。沉积方式可包括蒸镀、溅镀、电镀、其他合适的沉积技术、或上述的组合。举例来说,形成金属层400可包括使用电镀制程。在使用电镀制程的实施例中,可借由调整电镀参数(例如电流密度)使金属层400可保形地沉积在凹槽300上。在图5中,图案化金属层310A以形成线路层190。金属层400和金属层310B共同形成第一金属子壳500在凹槽300内,其中第一金属子壳500与线路层190彼此分离而无电性连接。Please refer to FIG. 4 and FIG. 5 at the same time. Next, a first metal sub-shell 500 is formed in the groove 300 . In FIG. 4 , the step of forming the first metal sub-shell 500 may include conformally depositing metal along the inner surface of the groove 300 such that the metal layer 400 is formed on the side surface of the groove 300 . Deposition methods may include evaporation, sputtering, electroplating, other suitable deposition techniques, or combinations thereof. For example, forming the metal layer 400 may include using an electroplating process. In an embodiment using an electroplating process, the metal layer 400 can be conformally deposited on the groove 300 by adjusting electroplating parameters (eg, current density). In FIG. 5 , the metal layer 310A is patterned to form the wiring layer 190 . The metal layer 400 and the metal layer 310B jointly form the first metal sub-shell 500 in the groove 300 , wherein the first metal sub-shell 500 and the circuit layer 190 are separated from each other without electrical connection.

请参照图6,配置第一孔隙材料161在第一金属子壳500内。详细而言,第一孔隙材料161设置在第一金属子壳500的底表面上。在一些实施例中,第一孔隙材料161接触第一金属子壳500。Referring to FIG. 6 , the first porous material 161 is disposed in the first metal sub-shell 500 . In detail, the first porous material 161 is disposed on the bottom surface of the first metal sub-case 500 . In some embodiments, the first porous material 161 contacts the first metal sub-shell 500 .

在一些实施例中,第一孔隙材料161呈现扁平状并且水平尺寸(例如XY平面的尺寸)相同或大于第一金属子壳500的底表面,因此第一孔隙材料161的边缘可切齐或抵着第一金属子壳500的侧壁,以固定在第一金属子壳500中。在配置第一孔隙材料161之后,可进一步地配置第二孔隙材料162在第一金属子壳500内。第二孔隙材料162配置位置不同于第一孔隙材料161。举例来说,第二孔隙材料162可配置在第一金属子壳500的侧壁上。In some embodiments, the first porous material 161 is flat and its horizontal dimension (for example, the size of the XY plane) is the same as or larger than the bottom surface of the first metal sub-shell 500, so the edges of the first porous material 161 can be cut or abutted. It touches the side wall of the first metal sub-shell 500 to be fixed in the first metal sub-shell 500 . After configuring the first porous material 161 , a second porous material 162 may be further configured in the first metal sub-shell 500 . The arrangement position of the second porous material 162 is different from that of the first porous material 161 . For example, the second porous material 162 can be disposed on the sidewall of the first metal sub-shell 500 .

请继续参照图6,加入热交换流体150至第一金属子壳500内。详细而言,加入液体状态的热交换流体150至第一金属子壳500内。液态状态的热交换流体150加入第一金属子壳500的体积或重量是根据产品设计、应用温度范围、工作流体材料特性而定。Please continue to refer to FIG. 6 , adding the heat exchange fluid 150 into the first metal sub-shell 500 . In detail, the heat exchange fluid 150 in a liquid state is added into the first metal sub-shell 500 . The volume or weight of the heat exchange fluid 150 in liquid state added to the first metal sub-shell 500 is determined according to product design, application temperature range, and material properties of the working fluid.

请参照图7,形成第二金属子壳700在第二绝缘部110B上。第二绝缘部110B为图2A的第一介电层111,并且,第一导热柱141可形成在第二绝缘部110B中,以及承载层130可形成在第二绝缘部110B上。Referring to FIG. 7 , a second metal sub-shell 700 is formed on the second insulating portion 110B. The second insulating part 110B is the first dielectric layer 111 of FIG. 2A , and the first thermally conductive pillar 141 may be formed in the second insulating part 110B, and the carrying layer 130 may be formed on the second insulating part 110B.

第二金属子壳700的形成方式可包括沉积金属层之后图案化此金属层。沉积方式可包括蒸镀、溅镀、电镀、其他合适的沉积技术、或上述的组合。举例来说,使用电镀制程。在一些实施例中,在形成第二金属子壳700之后,放置第三孔隙材料163在第二金属子壳700内。The second metal sub-shell 700 may be formed by patterning the metal layer after depositing the metal layer. Deposition methods may include evaporation, sputtering, electroplating, other suitable deposition techniques, or combinations thereof. For example, an electroplating process is used. In some embodiments, after forming the second metal sub-shell 700 , the third porous material 163 is placed within the second metal sub-shell 700 .

请参照图8,压合图6的结构和图7的结构。详细而言,压合第一绝缘部110A和第二绝缘部110B以形成绝缘部110,并且,第一金属子壳500(见图6)和第二金属子壳700(见图7)彼此对齐并结合成具有密闭空间124的金属壳120。在压合之后,原本配置在第一金属子壳500内的第一孔隙材料161和热交换流体150皆密封在金属壳120的密闭空间124中。在一些实施例中,第二孔隙材料162密封在金属壳120中。在一些实施例中,第三孔隙材料163密封在金属壳120中。Referring to FIG. 8 , the structure in FIG. 6 and the structure in FIG. 7 are laminated. In detail, the first insulating portion 110A and the second insulating portion 110B are press-bonded to form the insulating portion 110, and the first metal sub-shell 500 (see FIG. 6 ) and the second metal sub-shell 700 (see FIG. 7 ) are aligned with each other. And combined into a metal shell 120 with a closed space 124 . After pressing, the first porous material 161 and the heat exchange fluid 150 originally disposed in the first metal sub-shell 500 are sealed in the closed space 124 of the metal shell 120 . In some embodiments, second porous material 162 is sealed within metal shell 120 . In some embodiments, third porous material 163 is sealed within metal shell 120 .

在形成金属壳120之后,可配置电子元件170在图8的结构上(例如,配置在承载层130上)和配置散热件180在图8的结构下,从而形成如图2A和图2B所示的电路板100,其中电路板100如前所述,在此不再详述。After the metal shell 120 is formed, the electronic component 170 can be arranged on the structure of FIG. 8 (for example, arranged on the carrier layer 130) and the heat sink 180 can be arranged under the structure of FIG. 8, thereby forming the structure shown in FIGS. 2A and 2B The circuit board 100, wherein the circuit board 100 is as described above, and will not be described in detail here.

请参照图9,图9根据本揭示案另一些实施例绘示电路板200的俯视图。图9中的电路板200与图1的电路板100相似,两者的差异在于图9的金属壳220的形貌。由于电子元件170的位置与散热件180的位置同时在X轴方向及Y轴方向上彼此分开,因此金属壳220在水平面上(例如,XY平面上)的形貌可具有弯折处,以连接电子元件170和散热件180。例如,在图9中,金属壳220在水平面上(例如,XY平面上)的形貌可设计成L型。简言之,图9提供一种金属壳220的例示性配置,用以说明在采用金属壳220、热交换流体150(见图2A)和孔隙材料160(见图2A)的情况下,电子元件170和散热件180之间的热传导路径可以是非直线的。Please refer to FIG. 9 , which shows a top view of a circuit board 200 according to another embodiment of the present disclosure. The circuit board 200 in FIG. 9 is similar to the circuit board 100 in FIG. 1 , the difference between the two lies in the shape of the metal shell 220 in FIG. 9 . Since the position of the electronic component 170 and the position of the heat sink 180 are separated from each other in the X-axis direction and the Y-axis direction at the same time, the shape of the metal shell 220 on the horizontal plane (for example, on the XY plane) can have a bend to connect Electronic components 170 and heat sink 180 . For example, in FIG. 9 , the shape of the metal shell 220 on the horizontal plane (for example, on the XY plane) can be designed as an L shape. Briefly, FIG. 9 provides an exemplary configuration of a metal shell 220 to illustrate the electronic components using the metal shell 220, the heat exchange fluid 150 (see FIG. The thermal conduction path between 170 and heat sink 180 may be non-linear.

综合以上所述,本揭示案的实施方式提供一种具有散热效果的电路板及其制造方法,在电路板中设置具有密闭空间的金属壳、热交换流体和孔隙材料,以增加热传导路径的配置弹性,借此增加电路板的散热效率并提升电路板设计与制程上的自由度,从而提高电子元件的效能。Based on the above, the embodiments of the disclosure provide a circuit board with a heat dissipation effect and its manufacturing method. A metal shell with a closed space, a heat exchange fluid and a porous material are arranged in the circuit board to increase the configuration of the heat conduction path Flexibility, so as to increase the heat dissipation efficiency of the circuit board and enhance the freedom of circuit board design and manufacturing process, thereby improving the performance of electronic components.

以上概略说明了本揭示案数个实施例的特征,使所属技术领域内具有通常知识者对于本揭示案可更为容易理解。任何所属技术领域内具有通常知识者应了解到本说明书可轻易作为其他结构或制程的变更或设计基础,以进行相同于本发明实施例的目的及/或获得相同的优点。任何所属技术领域内具有通常知识者亦可理解与上述等同的结构并未脱离本发明的精神及保护范围内,且可在不脱离本揭示案的精神及范围内,可作更动、替代与修改。The features of several embodiments of the present disclosure are briefly described above, so that those skilled in the art can understand the present disclosure more easily. Those skilled in the art should understand that this description can be easily used as a basis for other structural or process changes or designs to achieve the same purpose and/or obtain the same advantages as the embodiments of the present invention. Anyone with ordinary knowledge in the technical field can also understand that the structures equivalent to the above do not depart from the spirit and protection scope of the present invention, and can be modified, substituted and Revise.

Claims (18)

1. A circuit board, comprising:
an insulating part;
a carrier layer disposed on the insulating portion;
a metal shell disposed in the insulating portion and thermally coupled to the carrier layer, wherein the metal shell has:
a first inner surface;
a second inner surface opposite to the first inner surface, wherein the second inner surface is between the first inner surface and the carrier layer;
a third inner surface connecting the first inner surface and the second inner surface; and
a closed space surrounded by the first inner surface, the second inner surface and the third inner surface;
a heat exchange fluid distributed in the enclosed space; and
the first pore material is distributed in the closed space and is configured on the first inner surface.
2. The circuit board of claim 1, further comprising:
the electronic element is arranged on the bearing layer and is thermally coupled with the metal shell through the bearing layer, wherein the electronic element is not electrically connected with the metal shell; and
the heat dissipation piece is arranged below the metal shell and is thermally coupled with the metal shell, wherein the metal shell is positioned between the electronic element and the heat dissipation piece.
3. The circuit board of claim 2, wherein the front projection of the electronic component on the first inner surface and the front projection of the heat sink on the first inner surface are separated from each other.
4. The circuit board of claim 1, further comprising:
the first heat conduction column is arranged in the insulating part, connects the bearing layer and the metal shell and is positioned between the bearing layer and the metal shell.
5. The circuit board of claim 4, wherein the insulating portion comprises a first dielectric layer and a second dielectric layer, the metal shell is located between the first dielectric layer and the second dielectric layer, and the first conductive post is disposed in the first dielectric layer and thermally couples the carrier layer and the metal shell.
6. The circuit board of claim 5, further comprising:
the second heat conduction column is arranged in the second dielectric layer, connects the heat dissipation piece and the metal shell and is positioned between the heat dissipation piece and the metal shell.
7. The circuit board of claim 1, wherein the insulating portion completely encapsulates the metal shell.
8. The circuit board of claim 1, wherein the first porous material contacts the metal shell.
9. The circuit board of claim 1, wherein the heat exchange fluid comprises a liquid and a gas.
10. The circuit board of claim 1, further comprising:
and a second porous material disposed on the third inner surface.
11. The circuit board of claim 10, further comprising:
and a third porous material disposed on the second inner surface.
12. A method of manufacturing a circuit board, comprising:
forming a groove in the first insulating portion;
forming a first metal sub-shell in the groove;
disposing a first pore material within the first metal sub-shell;
adding a heat exchange fluid into the first metal sub-shell;
forming a second metal sub-shell on the second insulating part; and
and pressing the first insulating part and the second insulating part to enable the first metal sub-shell and the second metal sub-shell to form a metal shell with a closed space, wherein the heat exchange fluid and the first pore material are sealed in the closed space of the metal shell.
13. The method of manufacturing a circuit board of claim 12, wherein the method of forming the first metal sub-shell comprises conformally depositing metal along an inner surface of the recess.
14. The method of manufacturing a circuit board according to claim 12, further comprising:
before the first insulating part and the second insulating part are pressed, a second pore material is placed in the first metal sub-shell, wherein the position of the second pore material is different from that of the first pore material.
15. The method of manufacturing a circuit board according to claim 12, further comprising:
after forming the second metal sub-shell, a third pore material is placed within the second metal sub-shell.
16. The method of manufacturing a circuit board according to claim 12, further comprising:
forming a first heat conductive pillar in the first insulating portion; and
a second heat conductive pillar is formed in the second insulating portion.
17. The method of manufacturing a circuit board as defined in claim 16, further comprising:
and disposing an electronic component on the second insulating portion, wherein the second heat conductive post is thermally coupled to the electronic component and the second metal sub-case.
18. The method of manufacturing a circuit board as defined in claim 17, further comprising:
and disposing a heat sink under the first insulating portion, wherein the first heat conductive post is thermally coupled to the heat sink and the first metal sub-case, and an orthographic projection of the electronic component on the first metal sub-case and an orthographic projection of the heat sink on the first metal sub-case are separated from each other.
CN202111463078.3A 2021-12-03 2021-12-03 Circuit board and manufacturing method thereof Pending CN116321670A (en)

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