CN116315996A

CN116315996A - Mirror module, synchrotron radiation device and free electron laser device

Info

Publication number: CN116315996A
Application number: CN202310286776.3A
Authority: CN
Inventors: 徐中民
Original assignee: Shenzhen Integrated Particle Facility Research Institute
Current assignee: Shenzhen Integrated Particle Facility Research Institute
Priority date: 2023-03-15
Filing date: 2023-03-15
Publication date: 2023-06-23

Abstract

The application discloses a reflector module, a synchronous radiation device and a free electron laser device, and relates to the technical field of synchronous radiation and free electron laser. The reflector module comprises a reflector body, a first groove, a cooling module and a heating module, wherein the reflector body is provided with an upper surface and a side surface adjacent to the upper surface, the upper surface is a reflecting surface of a light beam, and the first groove is arranged on the side surface; the cooling module comprises a first cooling structure and a second cooling structure, the first cooling structure is arranged below the upper surface, the second cooling structure is arranged on one side, close to the side surface, of the first cooling structure, and the cooling module is used for reducing the temperature of the mirror body; the heating module is used for heating the mirror body. The mirror module provided by the application can play a role in meeting preset requirements on the condition that the light spot center is inconsistent with the physical center of the reflecting surface, and the height error RMS value and the slope error RMS value of the mirror surface are both satisfied.

Description

Mirror module, synchrotron radiation device and free electron laser device

Technical Field

The application relates to the technical field of synchronous radiation and free electron laser, in particular to a reflector module, a synchronous radiation device and a free electron laser device.

Background

The mirrors of beam lines in synchrotron radiation and free electron laser devices typically absorb the thermal load from the light source. After the reflector absorbs the heat power of the light source, a temperature gradient is generated on the reflector, so that the thermal deformation of the reflector occurs, and the transmission efficiency and the transmission quality of X-rays are finally adversely affected.

The fourth generation light source, whether it is a diffraction limit ring or a free electron laser device, puts very high demands on the shape control of the mirror body of the mirror, and generally requires a height error RMS (Root Mean Square) value of about 1nm and a slope error RMS value of about 100nrad, so that a proper shape scheme must be adopted for the mirror.

The current cooling scheme of the beam line reflector has the side grooving design adopted in the related technology besides the common side contact cooling, and the surface thermal deformation under the action of specific heat load is minimized by optimizing parameters such as grooving position, depth, width and the like. The domestic Shanghai light source provides a side local cooling scheme, and under the condition that the appearance of the reflector is kept complete, the length and the width of a side contact area of the cooling copper block and the reflector are optimized, so that a very small surface shape error can be obtained for a certain load. In addition to side contact cooling, there are also solutions for short-sized optical elements that utilize internal channel cooling. On the basis of this, cooling solutions for free electron laser device beam line optics have also been developed. For example, a cooling scheme using an electric heating plate for temperature compensation is proposed in the related art.

The common point of these schemes is that they are only effective for a substantial coincidence of the spot center and the surface center of the mirror. When the spot center on the reflecting surface is inconsistent with the physical center of the reflecting surface, the scheme is not applicable.

Disclosure of Invention

In view of this, the present application aims to overcome the defects in the prior art, and provides a reflector module, a synchrotron radiation device and a free electron laser device, so as to solve the technical problem that the reflector module that can cope with the inconsistent condition of the spot center on the reflecting surface and the physical center of the reflecting surface is lacking in the prior art.

The present application provides:

the reflector module comprises a reflector body, wherein the reflector body is provided with an upper surface and a side surface adjacent to the upper surface, and the upper surface is a reflecting surface of a light beam;

the reflector module further comprises a first groove which is formed in the reflector body, and the first groove is formed in the side face and penetrates through the reflector body along the length direction of the reflector body;

the reflector module further comprises a cooling module, the cooling module comprises a first cooling structure and a second cooling structure, the first cooling structure is arranged below the upper surface and along the length direction of the reflector body, and the first cooling structure is externally connected with a cooling system to reduce the temperature of the reflector body; the second cooling structure is arranged on one side, close to the side surface, of the first cooling structure, and comprises a first channel and a heat conducting fin, wherein the heat conducting fin is used for conducting heat with the mirror body, and the first channel is externally connected with a cooling system to take away heat on the heat conducting fin so as to reduce the temperature of the mirror body;

the reflector module further comprises a heating module, the heating module is connected to the heat conducting fin, and the heating module heats the reflector body.

In addition, the reflector module according to the application can also have the following additional technical characteristics:

in some embodiments of the present application, the first cooling structure includes a plurality of second channels, and the plurality of second channels are disposed in parallel along a width direction of the mirror body.

In some embodiments of the present application, the second cooling structure further includes a second groove formed on the mirror body, the second groove is located on the upper surface and is disposed along the length direction of the mirror body, and the opening of the second groove faces upwards and is uniformly filled with a heat conduction medium.

In some embodiments of the present application, one end of the heat conductive sheet is inserted into the heat conductive medium, the other end is connected to the first channel, and the heat conductive sheet and the body of the second groove are separated from each other.

In some embodiments of the present application, the heating module includes at least two heating plates and a heating controller, the heating plates are connected to a portion of the heat conducting plate exposing the heat conducting medium, and each heating plate is disposed at intervals along the length direction of the mirror body;

the heating controller is used for determining a heating control instruction of the heating sheet according to the surface shape of the reflector, and the heating sheet heats the reflector body according to the heating control instruction.

In some embodiments of the present application, the first groove is located on a side of the second groove away from the upper surface.

In some embodiments of the present application, the number of the side surfaces is two, and the two side surfaces are respectively connected to two sides of the upper surface along the width direction of the mirror body;

the number of the first grooves is two, and the two first grooves are symmetrically distributed on the two side surfaces;

the number of the second cooling structures is two, and the two second cooling structures are symmetrically distributed on two sides of the first cooling structure along the width direction of the mirror body;

the number of the heating modules is two, and the two heating modules are respectively connected with the two heat conducting fins.

In some embodiments of the present application, the thermally conductive sheet has a length that is less than a length of the light spot on the mirror.

The application also provides a synchronous radiation device which comprises the reflector module.

The application also provides a free electron laser device, which comprises the reflector module.

Compared with the prior art, the beneficial effects of this application are: the utility model provides a reflector module, under the inconsistent circumstances of facula center and reflecting surface physical center, thereby through making first recess is used for restraining the deformation of mirror body control the profile of mirror, thereby the cooling module is used for reducing again the cooling module is used for controlling the profile of mirror, thereby the heating module is matched again to the mirror body heats the profile of mirror and compensates for the profile of mirror for this reflector control module can be when handling the high heat load, can cool off the mirror through cooling module, control the profile of mirror, again can compensate the mirror profile through heating module, finally realize that mirror surface altitude error RMS value keeps about 1nm, slope error RMS value keeps about 100nrad, satisfies the requirement of predetermineeing.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered limiting the scope, and that other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 shows a schematic diagram of the operation of a mirror;

FIG. 2 shows a schematic structural diagram of a mirror module of the present application;

FIG. 3 shows a schematic cross-sectional view at A-A in FIG. 2;

FIG. 4 shows a schematic diagram of the operation of the mirror module;

fig. 5 shows a deformation distribution graph in the normal direction of a meridian line obtained by irradiation of X-rays to a reflecting surface;

fig. 6 is a graph showing a slope error distribution in a normal direction of a meridian line obtained by irradiating an X-ray to a reflecting surface;

FIG. 7 is a schematic diagram of the second channel in some embodiments with a circular arc shape;

fig. 8 shows a schematic structural view of the second channels in a zigzag distribution in some embodiments.

Description of main reference numerals: 10-X rays; 20-facula; 30-meridian; a 100-mirror module; 110-mirror body; 111-upper surface; 112-side; d1-length direction; d2—widthwise; 120-a first groove; 130-a cooling module; 131-a first cooling structure; 132-a second cooling structure; 1311-a second channel; 1321-first channel; 13211-via; 1322-heat conductive sheet; 1323-second groove; 1324-a heat transfer medium; 140-a heating module; 141-heating plate.

Detailed Description

Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.

In the description of the present application, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," etc. indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be configured and operated in a particular orientation, and therefore should not be construed as limiting the present application.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In this application, unless specifically stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.

In this application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

As shown in fig. 1-3, embodiments of the present application provide a mirror module 100 for maintaining mirror surface height error RMS value on the order of 1nm and slope error RMS value on the order of 100nrad in the event of a mismatch between the spot center and the physical center of the reflecting surface. The reflector module 100 includes a mirror body 110, a first groove 120, a cooling module 130, and a heating module 140.

It will be appreciated that when the reflecting surface of the mirror body 110 is irradiated with light of a certain energy, the heat deposited on the reflecting surface will raise the temperature of the mirror body 110, and the mirror surface is deformed due to the non-uniformity of the temperature rise, thereby affecting the accuracy of the surface shape of the mirror, and it is necessary to control the surface shape of the mirror by using the first groove 120, the cooling module 130 and the heating module 140.

The first groove 120 is formed on the mirror body 110 and is used for inhibiting thermal deformation of the mirror body 110 so as to control the surface shape of the reflecting mirror, the cooling module 130 is used for cooling the mirror body 110 so as to control the surface shape of the reflecting mirror, the heating module 140 is used for heating the mirror body 110 so as to compensate the surface shape of the reflecting mirror, and under the synergistic effect of the first groove 120, the cooling module 130 and the heating module 140, the purposes that under the condition that the light spot center is inconsistent with the physical center of the reflecting surface, the height error RMS value and the slope error RMS value of the reflecting surface meet preset requirements are achieved.

In the present embodiment, the mirror body 110 has an upper surface 111 and a side surface 112 adjacent to the upper surface 111, and the upper surface 111 is a reflecting surface of the light beam.

The mirror body 110 is rectangular, and has the following length, width and height dimensions: 700mm, 60mm. The beam is X-ray 10, and the spot 20 is formed when the X-ray 10 irradiates the reflecting surface, and the spot 20 is positioned on a meridian line 30 of the reflecting surface, wherein the meridian line 30 is a symmetrical central line of the reflecting surface in the extending direction.

The cooling module 130 includes a first cooling structure 131 and a second cooling structure 132.

The first cooling structure 131 is disposed below the upper surface 111 and along the length direction D1 of the mirror body 110.

Specifically, in the present embodiment, the first cooling structure 131 includes a plurality of second channels 1311, where the plurality of second channels 1311 are disposed in parallel along the width D2 of the mirror body 110, and the plurality of second channels 1311 are symmetrically distributed on the mirror body 110 along the meridian 30. The second channel 1311 is a micro channel, and its cross-section is in the shape of a direction, a circle, a hexagon, etc., without limitation.

In this embodiment, the cross section of the second channels 1311 is square, and the adjacent second channels 1311 are uniformly spaced apart. Specifically, each second channel 1311 has a size of 5mm×1mm, and the space between the second channels 1311 is 1.5mm. In other embodiments, the cross-section of the second channels 1311 is circular, each second channel 1311 has a radius dimension of 1.26mm, and the spacing between the second channels 1311 is 1.5mm.

It will be appreciated that the closer the distance from spot 20 on mirror 110, the higher the temperature. In other embodiments, the spacing between the second channels 1311 may taper in a direction closer to the side surface 112, which may provide more uniform temperature across the reflective surface and thus better control of the mirror profile.

As shown in fig. 7 and 8, of course, in other embodiments, the second channels 1311 are not disposed along the width direction D2 of the mirror body 110, for example, the connection line of the center lines of the second channels 1311 may be configured as a circular arc shape or a folded line shape, and the second channels 1311 are disposed on the mirror body 110, so that the second channels 1311 near the light spot 20 are more densely distributed than the second channels 1311 far from the light portion 20. The temperature of each part on the reflecting surface can be more uniform, so that the surface shape of the reflecting mirror can be better controlled.

In this embodiment, the first cooling structure 131 is externally connected with a cooling system (not shown) to reduce the temperature of the mirror body 110, and the externally connected cooling system is used for providing circulating cooling water as a cooling source. Further, the circulating cooling water flows through each of the second channels 1311 to remove heat to cool the mirror body 110.

The second cooling structure 132 is disposed on a side of the first cooling structure 131 near the side surface 112. In the present embodiment, the number of the second cooling structures 132 is two, and the two second cooling structures 132 are symmetrically distributed on two sides of the first cooling structure 131 along the width direction of the mirror body 110. The two second cooling structures 132 are symmetrically disposed on two sides of the upper surface 111 along the width direction, so that the mirror module 100 has better mirror surface shape control capability.

The second cooling structure 132 includes a first passage 1321, a heat conductive sheet 1322, and a second groove 1323.

The second recess 1323 is disposed on the mirror body 110. Specifically, the second recess 1323 is formed by the upper surface 111 being recessed inward. The second groove 1323 is disposed along the length direction D1 of the mirror body 110, and has an opening facing upward and is uniformly filled with the heat conductive medium 1324.

In this embodiment, the heat conductive medium 1324 is preferably an indium gallium eutectic solution.

The depth and width of the second recess 1323 are 18mm and 6mm, respectively, and the depth of the indium gallium eutectic solution in the second recess 1323 is 4mm.

One end of the heat conductive sheet 1322 is inserted into the heat conductive medium 1324, and the other end is connected to the first passage 1321, and the heat conductive sheet 1322 and the groove body of the second groove 1323 are separated from each other.

Specifically, the thickness of the heat conductive sheet 1322 is 2mm, the distance between the side surface of the heat conductive sheet 1322 and the groove wall of the second groove 1323 is 2mm, and the distance between the bottom surface of the heat conductive sheet 1322 and the groove bottom of the second groove 1323 is 2mm. Such a separation structure blocks vibration generated by the heat conductive sheet 1322 and the first passage 1321 in operation from being directly transferred to the mirror body 110 by the heat conductive medium 1324, ensuring normal and stable operation of the mirror body 110.

The heat-conducting sheet 1322 is used for conducting heat with the mirror 110, and the first channel 1321 is externally connected with a cooling system to take away the heat on the heat-conducting sheet 1322 so as to reduce the temperature of the mirror 110.

Further, the heat conductive sheet 1322 is inserted into the heat conductive medium 1324 and is not in contact with the second groove 1323. Accordingly, the cold source provided by the cooling system is sequentially transferred to the mirror body 110 through the first channel 1321, the heat conducting sheet 1322 and the heat conducting medium 1324, so as to cool the reflecting surface on the mirror body 110, thereby achieving the purpose of controlling the surface shape of the reflecting surface.

The first passage 1321 is 55mm in length. In this embodiment, the first channel 1321 is in a hollow long strip shape, and a through hole 13211 with a diameter of 8mm is formed in the middle of the first channel 1321, and the through hole 13211 is used for cooling the mirror body 110 by circulating cooling water externally connected with a circulating cooling system, wherein the cooling water takes away heat of the first channel 1321.

In some embodiments, the thermally conductive sheet 1322 is an integrally cast structure with the first passage 1321.

In some embodiments, the thermally conductive sheet 1322 is integral with the first passage 1321 by welding.

In some embodiments, the thermally conductive sheet 1322 and the first channel 1321 are both made of a thermally conductive material. Alternatively, the heat conducting material may be copper or aluminum.

It is understood that the length of the heat conductive sheet 1322 is smaller than the length of the second groove 1323.

Preferably, in the present embodiment, the length of the heat conductive sheet 1322 is smaller than the length of the spot 20 formed on the reflecting surface by the X-ray 10, so as to effectively reduce the temperature gradient of the spot 20 in the meridian 30 direction.

In some embodiments, the temperature range of the circulating cooling provided by the cooling system external to the first cooling structure 131 and the first passage 1321 is 15 ℃ to 25 ℃.

In other embodiments, the temperature range of the circulating cooling provided by the cooling system external to the first cooling structure 131 and the first passage 1321 is 18 ℃ to 25 ℃.

Alternatively, the temperature of the circulated cooling provided by the cooling system may be selected to be 18.5 ℃, 18.9 ℃, 19 ℃, 19.4 ℃, 20.2 ℃, 20.6 ℃, 21 ℃, 21.8 ℃, 22.1 ℃, 22.5 ℃, 23 ℃, 23.5 ℃, 24 ℃, 24.2 ℃, 24.6 ℃ or 24.9 ℃. It is to be understood that the foregoing is illustrative only and is not to be construed as limiting the scope of the present application.

The heating module 140 is connected to the heat conductive sheet 1322. The number of the heating modules 140 is two, and the two heating modules 140 are respectively connected to the two heating plates 141. Thus, the mirror module 100 can better compensate the surface shape of the mirror.

Specifically, the heating module 140 includes at least two heating plates 141 and a heating controller (not shown), the heating plates 141 are connected to a portion of the heat conducting plate 1322 exposing the heat conducting medium 1324, and the heating plates 141 are disposed at intervals along the length direction D1 of the mirror body 110, so that the temperature gradient of the light spot 20 in the meridian 30 direction can be effectively reduced.

All the heating sheets 141 may be provided on the same side of the heat conductive sheet 1322, or each heating sheet 141 may be provided on a different side of the heat conductive sheet 1322.

The number of the heating sheets 141 may be set according to actual needs, and is not limited.

When the number of the heating sheets 141 is two, the two heating sheets 141 are respectively connected to two sides close to the length direction of the heat conductive sheet 1322.

When the number of the heating sheets 141 is plural, two of the heating sheets 141 are connected to two sides near the length direction of the heat conductive sheet 1322, and the remaining heating sheets 141 are uniformly distributed between the two heating sheets 141.

In the present embodiment, the number of the heating sheets 141 is two, and all the heating sheets 141 are provided on the same side of the heat conductive sheet 1322. Each heater chip 141 is a 9.8mm x 8mm rectangular ceramic chip.

The heating controller is used for determining a heating control instruction of the heating sheet 141 according to the surface shape of the mirror, and the heating sheet 141 changes voltage (or current) according to the heating control instruction to heat the mirror body 110 so as to compensate the surface shape of the mirror surface.

The first groove 120 is disposed on the side surface 112 and penetrates the mirror body 110 along the length direction D1 of the mirror body 110.

The number of the side surfaces 112 is two, and the two side surfaces 112 are respectively connected to two sides of the upper surface 111 along the width direction D2 of the mirror body 110.

In order to better inhibit the thermal deformation of the lens body 110, two first grooves 120 are symmetrically disposed on two side surfaces 112. The first grooves 120 are used to block and optimize the heat flow path inside the mirror 110, so that the heat distribution of the mirror 110 is more uniform.

The first grooves 120 were obtained to have a depth of 10.5mm and a height of 10mm by optimizing parameters such as the positions and dimensions of the first grooves 120 and the heat conductive sheet 1322, and the heat flux applied to the heating sheet 141, by finite element software.

In the present embodiment, the first groove 120 is located at a side of the bottom of the second groove 1323 away from the upper surface 111, and the second groove 1323 is disposed on the upper surface 111. In other embodiments, the second recess 1323 may be provided on the side 112. For example, the second groove 1323 is disposed on a side of the side surface 112 near the upper surface 111, and the first groove 120 is disposed at a distance from a bottom of the second groove 1323 on a side far from the upper surface 111. In this way, the first cooling structure 131 is disposed near the upper surface 111, which may facilitate cooling of the reflective surface by the first cooling structure 131.

As shown in fig. 4, the reflector module 100 operates according to the following principle:

when the reflecting surface of the mirror body 110 is irradiated by the X-ray 10, the temperature of the mirror body 110 is increased by the heat deposited on the reflecting surface, and the reflecting surface is deformed by heating due to the non-uniformity of the temperature increase, thereby affecting the accuracy of the mirror surface shape.

Especially, under the condition that the spot center is inconsistent with the physical center of the reflecting surface, the RMS value of the deformation curve and the slope error in the meridian normal direction in the common cooling scheme can not meet the requirements.

The mirror module 100 of this application is used for suppressing the thermal deformation of the mirror body 110 thereby controlling the surface shape of the mirror through making first recess 120, thereby the cooperation sets up cooling module 130 again and is used for reducing the surface shape of the temperature control mirror of the mirror body 110, thereby cooperate heating module 140 to heat the mirror body 110 again and compensate the surface shape of the mirror for this mirror module 100 can be when handling high heat load, can cool off the mirror body 110 through cooling module 130, control the surface shape of the mirror, can compensate the mirror surface shape through heating module 140 again.

As shown in fig. 5 and 6, according to the above working principle, the thermal power absorbed by the mirror body 110 of the mirror module 100 of the present application is 16.6W, the height error RMS value of the mirror surface shape is 1.2nm, and the slope error RMS value is 38.7nrad. The RMS value is significantly reduced, both in terms of height error and slope error, which is highly advantageous for beam transport in fourth generation source beam lines.

The present application further provides a synchrotron radiation device, including the reflector module 100 as described above, which has all the beneficial effects of the reflector module 100 in any of the foregoing embodiments, and will not be described herein again.

The present application further provides a free electron laser device, including the foregoing mirror module 100, which has all the beneficial effects of the mirror module 100 in any of the foregoing embodiments, and will not be described herein in detail.

As can be seen from the results of fig. 5 and 6, after the reflector module 100 is used, the height error and the slope error of the surface shape of the reflector are both reduced by one order of magnitude, the height error RMS is in the order of magnitude of 1nm, the slope error RMS is in the order of magnitude of 100nrad, and the requirements of the synchrotron radiation light source and the free electron laser device on the rigorous surface shape can be met.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

Although embodiments of the present application have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the application, and that variations, modifications, alternatives, and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the application.

Claims

1. The reflector module comprises a reflector body having an upper surface and a side surface adjacent to the upper surface, wherein the upper surface is a reflecting surface for light beams,

2. The mirror module of claim 1, wherein the first cooling structure comprises a plurality of second channels, the plurality of second channels being disposed in parallel along a width direction of the mirror body.

3. The reflector module of claim 1, wherein the second cooling structure further comprises a second groove formed on the reflector body, the second groove is located on the upper surface and is disposed along the length direction of the reflector body, the opening of the second groove faces upwards, and the groove is uniformly filled with a heat conduction medium.

4. A mirror module according to claim 3, wherein one end of the heat conductive sheet is inserted into the heat conductive medium, and the other end is connected to the first passage, and the heat conductive sheet and the groove body of the second groove are separated from each other.

5. The reflector module as set forth in claim 3, wherein the heating module includes at least two heating plates and a heating controller, the heating plates are connected to a portion of the heat conducting plate exposing the heat conducting medium, and each of the heating plates is disposed at intervals along a length direction of the reflector body;

6. A mirror module according to claim 3, wherein the first recess is located on a side of the second recess remote from the upper surface.

7. The mirror module according to any one of claims 1 to 6, wherein the number of the side faces is two, and the two side faces are respectively connected to two sides of the upper surface arranged in the mirror body width direction;

8. The mirror module of any one of claims 1-6, wherein the thermally conductive sheet has a length that is less than a length of a spot on the mirror body.

9. A synchrotron radiation device comprising a mirror module as claimed in any one of claims 18.

10. A free electron laser device comprising a mirror module as claimed in any of claims 18.