CN116313931B - High-voltage schottky product production equipment and application method thereof - Google Patents

High-voltage schottky product production equipment and application method thereof Download PDF

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Publication number
CN116313931B
CN116313931B CN202310519112.7A CN202310519112A CN116313931B CN 116313931 B CN116313931 B CN 116313931B CN 202310519112 A CN202310519112 A CN 202310519112A CN 116313931 B CN116313931 B CN 116313931B
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China
Prior art keywords
frame
pickling
voltage schottky
threaded rod
plate
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CN202310519112.7A
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Chinese (zh)
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CN116313931A (en
Inventor
王黎明
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Jiangsu Shengchi Microelectronics Co ltd
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Jiangsu Shengchi Microelectronics Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041Cleaning
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67063Apparatus for fluid treatment for etching
    • H01L21/67075Apparatus for fluid treatment for etching for wet etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007Multistep manufacturing processes
    • H01L29/66075Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66083Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
    • H01L29/66196Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices with an active layer made of a group 13/15 material
    • H01L29/66204Diodes
    • H01L29/66212Schottky diodes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The utility model discloses high-voltage schottky product production equipment which comprises an equipment main body, a pickling rack and a mounting rack, wherein an adjusting rack is arranged at the top of the equipment main body, the pickling rack is arranged on the front surface of the connecting rack, a mounting cavity is formed in the inner side of the pickling rack, the mounting rack is arranged on the inner side of the mounting cavity, a moving block is arranged on the outer side of a second threaded rod, a movable rack is arranged on the front surface of the moving block, and a vibration frame is arranged on the opposite side of the movable rack. According to the utility model, the movable frame is arranged on the front surface of the movable block, the worker opens the protective door and pulls the baffle plate to release the connection relation between the clamping column and the clamping hole, the motor II operates to drive the threaded rod II to rotate, the threaded rod II rotates to enable the movable block to slide on the inner side of the movable groove, the movable block drives the movable frame to move on the inner side of the mounting frame to move the filter orifice plate to the outside of the pickling frame, so that the worker can conveniently take out the pickled high-voltage Schottky diode chip, and the labor intensity of the worker is reduced.

Description

High-voltage schottky product production equipment and application method thereof
Technical Field
The utility model relates to the technical field of high-voltage Schottky diode production, in particular to high-voltage Schottky product production equipment and a use method thereof.
Background
The schottky diode is a metal-semiconductor device which is made by using a metallized A as a positive electrode and an N-type semiconductor B as a negative electrode, and utilizing the fact that a potential barrier is formed on the contact surface of the metallized A and the N-type semiconductor B and has rectification characteristic.
The production equipment in the prior art has the following defects:
1. patent document CN212874433U discloses a diode pickling apparatus, "including the acidizing fluid case, acidizing fluid case and recovery tank, the acidizing fluid case is linked together through feed liquor pipe and acidizing fluid case upper portion, be equipped with feed liquor valve and feed pump on the feed liquor pipe, the pickling tank lower part is linked together through the drain pipe and recovery tank, be equipped with the fluid-discharge valve on the drain pipe, the acidizing fluid case top is equipped with the feed liquor pipe, the inside temperature control device that is equipped with of acidizing fluid case, annular spout has been seted up to the bottom in the pickling tank, the lower part transversely is provided with the rolling disc in the pickling tank, the rolling disc bottom is provided with the sliding block, the sliding block slides and sets up in annular spout, the pickling tank bottom is provided with driving motor, driving motor's output runs through the pickling tank bottom and is connected with rolling disc bottom intermediate department, the rolling disc top is provided with the pickling frame, be equipped with pendulous device between pickling frame bottom and the rolling disc top. The temperature of the pickling solution in the pickling tank is kept constant, the surface of the diode is fully contacted with the pickling solution, and the pickling efficiency and the pickling effect of the diode are improved. The diode can not be spread when the diode is cleaned by the pickling equipment, and the diode is easy to stack, so that the pickling contact area is reduced, and the pickling effect is poor.
2. Patent document CN212517126U discloses a rectifier diode chip pickling device, "comprising a base, wherein the left and right sides of the bottom of the base are fixedly provided with balance support legs. This rectifier diode chip pickling equipment opens driving motor for the threaded rod rotates, promotes the pickling dish and removes to the bottom of pickling pipe, opens the control valve on the transfer line, sprays the pickling liquid to the chip by the pickling shower nozzle of pickling pipe bottom, has the pickling liquid of certain temperature and can make the spot on the chip clean, after the washing finishes, continues to open driving motor, makes the pickling dish move to the bottom of water receiving pipe to open its control valve, washes the chip by the clear water shower nozzle of water receiving pipe lower extreme, washes remaining pickling liquid and spot clean, after finishing, takes out it can accomplish whole pickling process, and whole pickling process adopts mechanized mode to realize, makes equipment use more convenient practicality. The acid washing equipment can not disperse the impurities corroded on the surface of the chip when the chip is washed, the impurities are easy to continuously remain on the surface of the chip, and the acid washing quality of the chip can not be guaranteed.
3. Patent document CN217876812U discloses a semiconductor diode production device, "including organism, placing mechanism and baffle, placing mechanism sets up in the inside of organism, baffle fixed mounting is in the inside of organism, the inside fixed mounting of organism has the mounting bracket, the inside fixed mounting of mounting bracket has the heating pipe, the inside fixed mounting of organism has the fan. According to the utility model, the placement mechanism is arranged, the semiconductor diode is placed on the metal screen plate in the placement frame, the placement frame is inserted into the fixing frame in the machine body after the placement is completed, the fan and the heating pipe are started to convey hot air to the interior of the machine body, and the semiconductor diode on the metal screen plate is dried. The production equipment carries out water filtering and drying treatment on the washed semiconductor diode, the diode is easily damaged by the cleaning liquid attached in the process of transferring and drying the semiconductor diode, and the independent equipment drying equipment causes resource waste, so that the production efficiency of the diode is reduced.
4. Patent document CN218039135U discloses a diode production facility, "including the chip pickling tank, the inside of chip pickling tank is provided with turning device, turning device includes upset box body, axis of rotation, rotation seat, step motor and mesh apron, the last port lid of upset box body is equipped with the mesh apron, the both sides surface of upset box body all is provided with the axis of rotation. According to the diode production equipment, the turnover device is arranged, the stepping motor drives the turnover box body to turn over at regular time in the pickling chamber of the chip pickling tank during the pickling treatment of the diode chips, so that the influence of the stacking problem on the pickling effect of the diode chips during the pickling treatment can be prevented, and the lifting device is arranged, so that after the pickling is finished, the lifting device lifts the assembly frame and the water filtering net upwards through the lifting pull ring, so that pickling liquid can be filtered, the diode chips can be lifted up in a concentrated manner, and the taking-out efficiency of the diode chips can be improved. The diode production equipment is inconvenient for workers to operate outside the equipment to take out the diode chip after the chip is cleaned.
Disclosure of Invention
The utility model aims to provide high-voltage schottky product production equipment and a using method thereof, so as to solve the problems in the background technology.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the high-voltage Schottky product production equipment comprises an equipment main body, an acid washing rack and a mounting rack, wherein an adjusting rack is arranged at the top of the equipment main body, a first threaded rod is arranged at the inner side of the adjusting rack, an adjusting plate is arranged at the outer side of the first threaded rod, and a connecting rack is arranged at the front side of the adjusting plate;
the front of the connecting frame is provided with an acid washing frame, the inner side of the acid washing frame is provided with an installation cavity, the inner side of the installation cavity is provided with an installation frame, the inner side of the installation frame is provided with a second threaded rod, the outer side of the second threaded rod is provided with a moving block, the front of the moving block is provided with a movable frame, the movable frame penetrates through the inner side of the limiting opening, the opposite sides of the movable frame are provided with vibrating frames, the inner wall of the vibrating frames is symmetrically provided with electric telescopic rods, the output ends of the two groups of electric telescopic rods are provided with sliding seats, the inner side of each sliding seat is provided with a connecting sleeve, the inner side of each connecting sleeve is provided with a filter orifice plate, the outer side of each electric telescopic rod is sleeved with a buffer spring, two ends of each electric telescopic rod are provided with protective sleeves, and the opposite sides of each protective sleeve are connected with two ends of each buffer spring;
the pickling rack is characterized in that a slide rail seat is symmetrically arranged on the inner wall of the pickling rack, an electric sliding block is embedded in the outer side of the slide rail seat, a limiting block is arranged on the outer side of the slide rail seat and used for limiting the electric sliding block, a connecting plate is arranged on the opposite side of the electric sliding block, and a soft scraping pad is arranged at the bottom of the connecting plate.
Preferably, the protection casing is installed at the top of equipment main part, and the guard gate is installed through the hinge in the front of protection casing, and the outside of protection casing is provided with the observation window, and control panel is installed in the outside of protection casing, and the top of protection casing is provided with the circulation mouth, and the dust screen is installed to the inboard of circulation mouth, and the mount is installed to the inboard of top of protection casing, and electric installation device is installed to the inboard of mount, and the motor is installed to the inboard of top of protection casing, and the flabellum is installed to the output of motor.
Preferably, the fixed plate is installed on the inner wall of the mounting frame, the second motor is installed on the back surface of the fixed plate, the output end of the second motor is connected with the input end of the second threaded rod, the moving groove is formed in the inner wall of the mounting frame, the moving block is embedded and installed on the inner side of the moving groove, and the limiting opening is formed in the front surface of the mounting frame.
Preferably, the pickling tank is installed to the inboard of equipment main part, and the outside of equipment main part is provided with the inlet, and the outside of equipment main part is provided with the liquid outlet, and the callus on the sole is installed to the bottom of equipment main part, and the baffle is installed through the hinge in the front of pickling frame, and fixed block one is installed at the top of pickling frame, and the card post is installed in the front of fixed block one, and fixed block two is installed at the top of baffle, and the card hole has been seted up in the front of fixed block two, and the inboard of card post block at the card hole.
Preferably, the first motor is installed at the top of alignment jig, and the output of first motor is connected with the input of threaded rod, is provided with the adjustment tank on the inner wall of alignment jig, and the inboard at the adjustment tank is installed in the gomphosis of the both ends of regulating plate, and the gag lever post is installed to the inboard of alignment jig, and the regulating plate cup joints in the outside of gag lever post.
Preferably, the working steps of the production equipment are as follows:
s1, firstly, a worker opens a protective door, sorts and places chips on a placing filter plate according to different specifications of chips of a high-voltage Schottky diode, closes a baffle, clamps a clamping column on the inner side of the clamping hole, operates a control panel to control the working state of production equipment, and an acid cleaning liquid enters the inside of an acid cleaning tank through a liquid inlet;
s2, the first motor operates to drive the first threaded rod to rotate, the first threaded rod rotates to enable the adjusting plate to move on the inner side of the adjusting frame to adjust the position in the vertical direction, the limiting rod ensures synchronous stability when the adjusting plate is adjusted, the pickling frame moves downwards to enter the pickling tank under the driving action of the adjusting plate, and acid cleaning liquid in the pickling tank enters the pickling frame through the placement of the filtering orifice plate;
s3, the electric sliding block moves on the sliding rail seat to enable the connecting plate to move horizontally, the connecting plate drives the soft scraping pad to push the stacked high-voltage Schottky diode chips to the filter plate, and the acidic cleaning liquid chemically corrodes organic particles, metal impurities and natural oxide layers attached to the surfaces of the high-voltage Schottky diode chips, so that the surface electric field is reduced;
s4, after the high-voltage Schottky diode chip is pickled, the motor is operated again to drive the pickling rack to move upwards and be located above the pickling tank, the acid cleaning liquid on the inner side of the pickling tank is discharged through the liquid outlet, the electric heating device starts to operate, the motor is operated to drive the fan blades to rotate, external air enters the protective cover from the circulation port through the dust screen for filtering, heat generated by the operation of the electric heating device is converted into hot air, and the hot air permeates and dries acid water drops attached to the surface of the high-voltage Schottky diode chip.
Preferably, in the step S3, the method further includes the following steps:
s31, after the acid cleaning liquid chemically corrodes the surface of the high-voltage Schottky diode chip for a period of time, the electric telescopic rod works to push the sliding seat to reciprocate in the vertical direction, the buffer spring buffers the impact force during reciprocating movement, the vibration frame operates to drive the placed filter plate to vibrate up and down so that the high-voltage Schottky diode chip shakes on the placed filter plate, and impurities corroded on the surface of the high-voltage Schottky diode chip are dispersed;
in the step S4, the method further includes the following steps:
s41, a worker opens the protective door and pulls the baffle to release the connection relation between the clamping column and the clamping hole, the second motor operates to drive the second threaded rod to rotate, the second threaded rod rotates to enable the movable block to slide on the inner side of the movable groove, the movable block drives the movable frame to move on the inner side of the mounting frame to move the filter orifice plate to the outside of the pickling frame, and the worker is convenient to take out the high-voltage Schottky diode chips after pickling.
Compared with the prior art, the utility model has the following beneficial effects:
according to the utility model, the connecting plates are arranged on opposite sides of the electric sliding block, the electric sliding block moves on the sliding rail seat to enable the connecting plates to move horizontally, the connecting plates drive the soft scraping pads to push the stacked high-voltage Schottky diode chips to the placing filter plates, the acid cleaning liquid chemically corrodes organic particles, metal impurities and natural oxide layers attached to the surfaces of the high-voltage Schottky diode chips, the surface electric field is reduced, the contact area between the diode chips and the acid cleaning liquid is increased by pushing the high-voltage Schottky diode chips flatly, and the good acid cleaning effect on the high-voltage Schottky diode chips is enhanced.
According to the utility model, the vibration frames are arranged on opposite sides of the movable frame, the electric telescopic rod works to push the sliding seat to reciprocate in the vertical direction after the acid cleaning liquid chemically corrodes the surface of the high-voltage Schottky diode chip for a period of time, the buffer spring buffers the impact force during reciprocating movement, the vibration frames operate to drive the placing filter plate to vibrate up and down so as to enable the high-voltage Schottky diode chip to shake on the placing filter plate, impurities corroded on the surface of the high-voltage Schottky diode chip are dispersed, the impurities are effectively prevented from continuously remaining on the surface of the chip, and the pickling quality of the high-voltage Schottky diode chip is improved.
According to the utility model, the electric heating device is arranged on the inner side of the fixing frame, the electric motor is operated again to drive the pickling frame to move upwards and be positioned above the pickling tank after the pickling of the high-voltage Schottky diode chip is completed, the acid cleaning liquid on the inner side of the pickling tank is discharged through the liquid outlet, the electric heating device starts to work, the motor is operated to drive the fan blades to rotate, external gas is filtered by the dustproof net and enters the protective cover from the circulation port, heat generated by the operation of the electric heating device is converted into hot air to permeate and dry the acid water beads attached to the surface of the high-voltage Schottky diode chip, the next working procedure operation of the high-voltage Schottky diode chip is facilitated, and the production efficiency of the high-voltage Schottky diode chip is improved.
According to the utility model, the movable frame is arranged on the front surface of the movable block, the worker opens the protective door and pulls the baffle plate to release the connection relation between the clamping column and the clamping hole, the motor II operates to drive the threaded rod II to rotate, the threaded rod II rotates to enable the movable block to slide on the inner side of the movable groove, the movable block drives the movable frame to move on the inner side of the mounting frame to move the filter orifice plate to the outside of the pickling frame, so that the worker can conveniently take out the pickled high-voltage Schottky diode chip, and the labor intensity of the worker is reduced.
Drawings
FIG. 1 is a schematic perspective view of the present utility model;
fig. 2 is a schematic view of the internal structure of the apparatus body of the present utility model;
FIG. 3 is a schematic perspective view of the pickling rack of the present utility model;
FIG. 4 is a schematic diagram of the front internal structure of the pickling rack of the present utility model;
FIG. 5 is a schematic view showing the internal structure of the placement housing of the present utility model;
FIG. 6 is a schematic side view of the internal structure of the mounting frame of the present utility model;
FIG. 7 is an enlarged schematic view of the structure of the present utility model at A;
fig. 8 is a schematic perspective view of a connecting plate according to the present utility model.
In the figure: 1. an apparatus main body; 2. an adjusting frame; 3. a protective cover; 4. a pickling rack; 5. a mounting frame; 6. a movable frame; 7. a slide rail seat; 8. a pickling tank; 9. a liquid inlet; 10. a liquid outlet; 11. foot pads; 12. a first motor; 13. a first threaded rod; 14. an adjusting plate; 15. an adjustment tank; 16. a limit rod; 17. a connecting frame; 18. a protective door; 19. an observation window; 20. a control panel; 21. a flow port; 22. a dust screen; 23. a fixing frame; 24. an electric heating device; 25. a motor; 26. a fan blade; 27. a mounting cavity; 28. a baffle; 29. a first fixed block; 30. a clamping column; 31. a second fixed block; 32. a clamping hole; 33. a fixing plate; 34. a second motor; 35. a second threaded rod; 36. a moving block; 37. a moving groove; 38. a limit opening; 39. a vibration frame; 40. an electric telescopic rod; 41. a buffer spring; 42. a sliding seat; 43. connecting sleeves; 44. a protective sleeve; 45. placing a filter plate; 46. an electric slide block; 47. a limiting block; 48. a connecting plate; 49. a soft scraping pad.
Description of the embodiments
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific direction, be configured and operated in the specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "provided," "connected," and the like are to be construed broadly, and may be fixedly connected or movably connected, or may be detachably connected or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Referring to fig. 1, 2 and 3, an embodiment of the present utility model provides: high-voltage schottky product production equipment and a use method thereof;
comprises a device main body 1, a pickling tank 8 and an adjusting frame 2, wherein the pickling tank 8 is arranged on the inner side of the device main body 1, a liquid inlet 9 is arranged on the outer side of the device main body 1, a liquid outlet 10 is arranged on the outer side of the device main body 1, a foot pad 11 is arranged at the bottom of the device main body 1, acidic cleaning liquid is added through the liquid inlet 9, the foot pad 11 supports the device main body 1, the acidic cleaning liquid is discharged to the outside through the liquid outlet 10 after the cleaning of a high-voltage Schottky diode chip is finished, the adjusting frame 2 is arranged at the top of the device main body 1, a first threaded rod 13 is arranged on the inner side of the adjusting frame 2, an adjusting plate 14 is arranged on the outer side of the first threaded rod 13, a connecting frame 17 is arranged on the front of the adjusting plate 14, a first motor 12 is arranged at the top of the adjusting frame 2, and the output of motor one 12 is connected with the input of threaded rod one 13, be provided with adjustment tank 15 on the inner wall of regulating frame 2, and the both ends gomphosis of regulating plate 14 is installed in the inboard of adjustment tank 15, regulating plate 14 cup joints in the outside of gag lever post 16, gag lever post 16 is installed to the inboard of regulating frame 2, equipment main part 1 supports regulating frame 2, motor one 12 moves and drives threaded rod one 13 rotation, threaded rod one 13 rotates and makes regulating plate 14 move in regulating frame 2 inboard and carry out the ascending position adjustment of vertical direction, synchronous stability when regulating plate 14 adjusts is guaranteed to gag lever post 16, pickling frame 4 moves down and gets into inside the pickling frame 8 under the drive of regulating plate 14, the inside acid cleaning liquid of pickling frame 8 gets into in the pickling frame 4 through placing the filter plate 45.
Referring to fig. 1, 3, 4, 5 and 6, a high voltage schottky product manufacturing apparatus and method of use thereof;
comprises a protective cover 3, a pickling rack 4 and a mounting frame 5, wherein the protective cover 3 is arranged at the top of the equipment main body 1, a protective door 18 is arranged on the front surface of the protective cover 3 through a hinge, an observation window 19 is arranged on the outer side of the protective cover 3, a control panel 20 is arranged on the outer side of the protective cover 3, a circulation port 21 is arranged at the top of the protective cover 3, a dust screen 22 is arranged on the inner side of the circulation port 21, a fixing frame 23 is arranged on the inner side of the top of the protective cover 3, an electric heating device 24 is arranged on the inner side of the fixing frame 23, a motor 25 is arranged on the inner side of the top of the protective cover 3, a fan blade 26 is arranged at the output end of the motor 25, the protective cover 3 improves the drying effect of high-voltage Schottky diode chips when protecting the pickling production process, the motor 12 runs again to drive the pickling rack 4 to move upwards and be positioned above the pickling tank 8 after the pickling of the high-voltage Schottky diode chips is completed, the acid cleaning liquid at the inner side of the pickling tank 8 is discharged through the liquid outlet 10, the electric heating device 24 starts to work, the motor 25 drives the fan blades 26 to rotate, external air is filtered by the dustproof net 22 and enters the protective cover 3 from the circulation port 21, heat generated by the work of the electric heating device 24 is converted into hot air to permeate and dry acid water drops attached to the surface of the high-voltage Schottky diode chip, the dustproof net 22 prevents dust in the external air from entering the protective cover 3 to adversely affect the drying process, the pickling rack 4 is arranged at the front side of the connecting frame 17, the baffle 28 is arranged at the front side of the pickling rack 4 through a hinge, the first fixing block 29 is arranged at the top of the pickling rack 4, the clamping post 30 is arranged at the front side of the first fixing block 29, the second fixing block 31 is arranged at the top of the baffle 28, the front side of the second fixing block 31 is penetrated and provided with a clamping hole 32, the clamping post 30 is clamped at the inner side of the clamping hole 32, the steadiness of being connected between movable block 36 and pickling frame 4 has been guaranteed to link 17, baffle 28 has prevented dropping of high-pressure schottky diode chip in the pickling process, close baffle 28 and with the inboard of clamping post 30 block at clamping hole 32, the inboard of pickling frame 4 is provided with installation cavity 27, installation frame 5 is installed to the inboard of installation cavity 27, install fixed plate 33 on the inner wall of installation frame 5, the back-mounted of fixed plate 33 has motor second 34, the output of motor second 34 is connected with the input of threaded rod second 35, be provided with movable groove 37 on the inner wall of installation frame 5, and movable block 36 gomphosis is installed in the inboard of movable groove 37, the front of installation frame 5 is provided with spacing mouth 38, movable frame 6 runs through the inboard of spacing mouth 38, threaded rod second 35 is installed to the inboard of installation frame 5, movable block 36 is installed to the outside of threaded rod second 35, installation cavity 27 provides the mounted position for installation frame 5, the stability when guaranteeing its operation, staff opens guard gate 18 and pulls baffle 28 to remove the output of motor second 34 and is connected with threaded rod second 35, the movable plate 36 is driven to the movable plate 36 to the movable plate 6 is moved to the movable plate 37, take out movable plate 36 after the movable plate 6 runs to the movable plate 37, the movable plate is rotated to the movable plate 6, the movable plate is convenient for the movable plate is moved to take out movable plate 36 to the movable plate is moved to the movable plate 6 inside to the movable plate is moved to the movable plate 35.
Referring to fig. 3, 4, 6, 7 and 8, a high voltage schottky product manufacturing apparatus and method of use thereof;
comprises a movable frame 6, a vibration frame 39 and a sliding rail seat 7, wherein the front surface of a movable block 36 is provided with the movable frame 6, the opposite sides of the movable frame 6 are provided with the vibration frame 39, the inner wall of the vibration frame 39 is symmetrically provided with electric telescopic rods 40, the output ends of the two groups of electric telescopic rods 40 are provided with sliding seats 42, the inner sides of the sliding seats 42 are provided with connecting sleeves 43, the inner sides of the connecting sleeves 43 are provided with filter screen plates 45, the outer sides of the electric telescopic rods 40 are sleeved with buffer springs 41, the two ends of the electric telescopic rods 40 are provided with protective sleeves 44, the opposite sides of the protective sleeves 44 are connected with the two ends of the buffer springs 41, the electric telescopic rods 40 work to push the sliding seats 42 to reciprocate in the vertical direction after the acid cleaning liquid chemically corrodes the surface of a high-voltage Schottky diode chip for a period of time, the buffer springs 41 buffer the impact force during reciprocating movement, the vibration frame 39 operates to drive the placement filter plate 45 to vibrate up and down so as to enable the high-voltage Schottky diode chip to shake on the placement filter plate 45, impurities corroded on the surface of the high-voltage Schottky diode chip are dispersed, the connecting sleeve 43 is detachably connected with the placement filter plate 45, the inner wall of the pickling frame 4 is symmetrically provided with the slide rail seat 7, the outer side of the slide rail seat 7 is embedded with the electric slide block 46, the outer side of the slide rail seat 7 is provided with the limiting block 47, the limiting block 47 is used for limiting the electric slide block 46, the opposite side of the electric slide block 46 is provided with the connecting plate 48, the bottom of the connecting plate 48 is provided with the soft scraping pad 49, the electric slide block 46 operates on the slide rail seat 7 to enable the connecting plate 48 to move horizontally, the connecting plate 48 drives the soft scraping pad 49 to push the stacked high-voltage Schottky diode chip to the placement filter plate 45, the flattening of the high voltage schottky diode chip increases the contact area of the diode chip with the acidic cleaning solution, and the soft scratch pad 49 is softer in texture and does not damage the high voltage schottky diode chip.
The working steps of the production equipment are as follows:
s1, firstly, a worker opens a protective door 18, sorts and places chips on a placing filter plate 45 according to different specifications of chips of a high-voltage Schottky diode, closes a baffle 28, clamps a clamping column 30 on the inner side of a clamping hole 32, and operates a control panel 20 to control the working state of production equipment, and acidic cleaning liquid enters the inside of a pickling tank 8 through a liquid inlet 9;
s2, the motor I12 operates to drive the threaded rod I13 to rotate, the threaded rod I13 rotates to enable the adjusting plate 14 to move on the inner side of the adjusting frame 2 to adjust the position in the vertical direction, the limiting rod 16 ensures synchronous stability when the adjusting plate 14 is adjusted, the pickling frame 4 moves downwards to enter the pickling tank 8 under the driving action of the adjusting plate 14, and acid cleaning liquid in the pickling tank 8 enters the pickling frame 4 through the placing filter plate 45;
s3, the electric slide block 46 moves on the slide rail seat 7 to move the connecting plate 48 horizontally, the connecting plate 48 drives the soft scraping pad 49 to push the stacked high-voltage Schottky diode chips to the placement filter plate 45, and the acidic cleaning liquid chemically corrodes organic particles, metal impurities and natural oxide layers attached to the surfaces of the high-voltage diode chips to reduce the surface electric field;
s4, after the high-voltage Schottky diode chip is pickled, the first motor 12 operates again to drive the pickling rack 4 to move upwards and be located above the pickling tank 8, the acidic cleaning liquid on the inner side of the pickling tank 8 is discharged through the liquid outlet 10, the electric heating device 24 starts to work, the motor 25 operates to drive the fan blades 26 to rotate, external gas is filtered through the dustproof net 22 and enters the protective cover 3 from the circulation port 21, heat generated by the operation of the electric heating device 24 is converted into hot air, and the hot air permeates and dries acidic water drops attached to the surface of the high-voltage Schottky diode chip.
In step S3, the method further includes the steps of:
s31, after the acid cleaning liquid chemically corrodes the surface of the high-voltage Schottky diode chip for a period of time, the electric telescopic rod 40 works to push the sliding seat 42 to reciprocate in the vertical direction, the buffer spring 41 buffers the impact force during reciprocating movement, the vibration frame 39 operates to drive the placement filter plate 45 to vibrate up and down so that the high-voltage Schottky diode chip shakes on the placement filter plate 45, and impurities corroded on the surface of the high-voltage Schottky diode chip are dispersed;
in step S4, the method further includes the steps of:
s41, a worker opens the protective door 18 and pulls the baffle 28 to release the connection relation between the clamping post 30 and the clamping hole 32, the second motor 34 operates to drive the second threaded rod 35 to rotate, the second threaded rod 35 rotates to enable the movable block 36 to slide at the inner side of the movable groove 37, the movable block 36 drives the movable frame 6 to move at the inner side of the mounting frame 5 to move the filter screen plate 45 to the outside of the pickling frame 4, and the worker is convenient to take out the pickled high-voltage Schottky diode chips.
Working principle: when the device is used, firstly, a worker opens the protective door 18, sorts and places chips on the placing filter plate 45 according to different specifications of chips of the high-voltage Schottky diode, closes the baffle 28, clamps the clamping post 30 on the inner side of the clamping hole 32, operates the control panel 20 to control the working state of production equipment, the acid cleaning liquid enters the inside of the pickling tank 8 through the liquid inlet 9, the motor I12 operates to drive the threaded rod I13 to rotate, the threaded rod I13 rotates to enable the regulating plate 14 to move on the inner side of the regulating frame 2 to perform position adjustment in the vertical direction, the limiting rod 16 ensures synchronous stability when the regulating plate 14 is regulated, the pickling frame 4 moves downwards to enter the inside of the pickling tank 8 under the driving action of the regulating plate 14, the acid cleaning liquid in the inside of the pickling tank 8 enters the pickling frame 4 through the placing filter plate 45, the electric slide block 46 moves on the slide rail seat 7 to enable the connecting plate 48 to move horizontally, the connecting plate 48 drives the soft scraping pad 49 to push the stacked high-voltage Schottky diode chips to the placing filter plate 45, the acid cleaning liquid chemically corrodes organic particles, metal impurities and natural oxide layers attached to the surfaces of the high-voltage Schottky diode chips, the surface electric field is reduced, the electric telescopic rod 40 works to push the sliding seat 42 to reciprocate vertically after the acid cleaning liquid chemically corrodes the surfaces of the high-voltage Schottky diode chips for a period of time, the buffer spring 41 buffers the impact force during reciprocating, the vibration frame 39 operates to drive the placing filter plate 45 to vibrate up and down to enable the high-voltage Schottky diode chips to shake on the placing filter plate 45, the impurities corroded on the surfaces of the high-voltage Schottky diode chips are dispersed, after the high-voltage Schottky diode chip is pickled, the first motor 12 operates again to drive the pickling rack 4 to move upwards and be located above the pickling tank 8, the acid cleaning liquid on the inner side of the pickling tank 8 is discharged through the liquid outlet 10, the electric heating device 24 starts to work, the motor 25 operates to drive the fan blades 26 to rotate, external air enters the protective cover 3 from the circulation port 21 through the dust screen 22 for filtering, heat generated by the electric heating device 24 is converted into hot air to permeate and dry acid water drops attached to the surface of the high-voltage Schottky diode chip, a worker opens the protective door 18 and pulls the baffle 28 to release the connection relation between the clamping post 30 and the clamping hole 32, the second motor 34 operates to drive the threaded rod 35 to rotate, the threaded rod 35 rotates to enable the moving block 36 to slide on the inner side of the moving groove 37, the moving block 36 drives the movable frame 6 to move the filter orifice 45 on the inner side of the mounting rack 5 to the outside of the pickling rack 4, and the high-voltage Schottky diode chip after pickling is conveniently taken out by the worker.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims (7)

1. The utility model provides a high-voltage schottky product production facility, includes equipment main part (1), pickling frame (4) and mounting bracket (5), its characterized in that: an adjusting frame (2) is arranged at the top of the equipment main body (1), a first threaded rod (13) is arranged at the inner side of the adjusting frame (2), an adjusting plate (14) is arranged at the outer side of the first threaded rod (13), and a connecting frame (17) is arranged at the front side of the adjusting plate (14);
the pickling device comprises a connecting frame (17), wherein a pickling frame (4) is arranged on the front surface of the connecting frame (17), an installation cavity (27) is formed in the inner side of the pickling frame (4), an installation frame (5) is arranged on the inner side of the installation cavity (27), a threaded rod II (35) is arranged on the inner side of the installation frame (5), a moving block (36) is arranged on the outer side of the threaded rod II (35), a movable frame (6) is arranged on the front surface of the moving block (36), the movable frame (6) penetrates through the inner side of a limiting opening (38), a vibrating frame (39) is arranged on the opposite side of the movable frame (6), electric telescopic rods (40) are symmetrically arranged on the inner wall of the vibrating frame (39), sliding seats (42) are arranged at the output ends of the two groups of the electric telescopic rods (40), connecting sleeves (43) are arranged on the inner sides of the sliding seats (42), filter pore plates (45) are arranged on the inner sides of the connecting sleeves (43), buffer springs (41) are sleeved on the outer sides of the electric telescopic rods (40), two ends of the electric telescopic rods (40) penetrate through the inner sides of the limiting sleeves, and the two ends of the protecting sleeves (44) are connected with the corresponding buffer springs (41);
the pickling rack is characterized in that the sliding rail seat (7) is symmetrically arranged on the inner wall of the pickling rack (4), the electric sliding block (46) is embedded in the outer side of the sliding rail seat (7), the limiting block (47) is arranged on the outer side of the sliding rail seat (7), the limiting block (47) is used for limiting the electric sliding block (46), the connecting plate (48) is arranged on the opposite side of the electric sliding block (46), and the soft scraping pad (49) is arranged at the bottom of the connecting plate (48).
2. The high voltage schottky product manufacturing apparatus of claim 1, wherein: the utility model discloses a protection casing, including equipment main part (1), protection casing (3) are installed at the top, protection casing (3) openly install guard gate (18) through the hinge, the outside of protection casing (3) is provided with observation window (19), control panel (20) are installed in the outside of protection casing (3), the top of protection casing (3) is provided with circulation mouth (21), dust screen (22) are installed to the inboard of circulation mouth (21), mount (23) are installed to the top inboard of protection casing (3), electric installation device (24) are installed to the inboard of mount (23), motor (25) are installed to the top inboard of protection casing (3), flabellum (26) are installed to the output of motor (25).
3. The high voltage schottky product manufacturing apparatus of claim 1, wherein: install fixed plate (33) on the inner wall of mounting bracket (5), the back-mounted of fixed plate (33) has motor two (34), and the output of motor two (34) is connected with the input of threaded rod two (35), is provided with on the inner wall of mounting bracket (5) and removes groove (37), and moves inboard at removing groove (37) of piece (36) gomphosis installation, and the front of mounting bracket (5) is provided with spacing mouth (38).
4. The high voltage schottky product manufacturing apparatus of claim 1, wherein: the pickling tank is characterized in that the pickling tank (8) is arranged on the inner side of the equipment main body (1), the liquid inlet (9) is formed in the outer side of the equipment main body (1), the liquid outlet (10) is formed in the outer side of the equipment main body (1), the foot pad (11) is arranged at the bottom of the equipment main body (1), the baffle (28) is arranged on the front side of the pickling frame (4) through a hinge, the first fixing block (29) is arranged on the top of the pickling frame (4), the clamping column (30) is arranged on the front side of the first fixing block (29), the second fixing block (31) is arranged on the top of the baffle (28), the clamping hole (32) is formed in the front side of the second fixing block (31) in a penetrating mode, and the clamping column (30) is clamped on the inner side of the clamping hole (32).
5. The high voltage schottky product manufacturing apparatus of claim 1, wherein: the top of regulating frame (2) is installed motor one (12), and the output of motor one (12) is connected with the input of threaded rod one (13), is provided with adjustment tank (15) on the inner wall of regulating frame (2), and the inboard at adjustment tank (15) is installed in the both ends gomphosis of regulating plate (14), and gag lever post (16) are installed to the inboard of regulating frame (2), and the outside at gag lever post (16) is cup jointed to regulating plate (14).
6. Use of a high voltage schottky product production plant according to any of the claims 1-5, characterized in that the working steps of the production plant are as follows:
s1, firstly, a worker opens a protective door (18), sorts and places chips on a placement filter plate (45) according to different specifications of high-voltage Schottky diode chips, closes a baffle (28) and clamps a clamping column (30) on the inner side of a clamping hole (32), and operates a control panel (20) to control the working state of production equipment, wherein acidic cleaning liquid enters the inside of a pickling tank (8) through a liquid inlet (9);
s2, a first motor (12) operates to drive a first threaded rod (13) to rotate, the first threaded rod (13) rotates to enable an adjusting plate (14) to move on the inner side of an adjusting frame (2) to adjust the position in the vertical direction, a limiting rod (16) ensures synchronous stability when the adjusting plate (14) is adjusted, a pickling frame (4) moves downwards under the driving action of the adjusting plate (14) to enter the inside of a pickling tank (8), and acid cleaning liquid in the pickling tank (8) enters the pickling frame (4) through a placing filter plate (45);
s3, an electric sliding block (46) moves on a sliding rail seat (7) to enable a connecting plate (48) to move horizontally, the connecting plate (48) drives a soft scraping pad (49) to push stacked high-voltage Schottky diode chips to a filter screen plate (45), and an acidic cleaning solution chemically corrodes organic particles, metal impurities and natural oxide layers attached to the surfaces of the high-voltage diode chips to reduce a surface electric field;
s4, after the high-voltage Schottky diode chip is pickled, the first motor (12) operates again to drive the pickling rack (4) to move upwards and be located above the pickling tank (8), the acid cleaning liquid on the inner side of the pickling tank (8) is discharged through the liquid outlet (10), the electric heating device (24) starts to work, the motor (25) operates to drive the fan blades (26) to rotate, external air enters the protective cover (3) from the circulation port (21) through the dust screen (22) for filtering, and heat generated by the operation of the electric heating device (24) is converted into hot air to permeate and dry acid water drops attached to the surface of the high-voltage Schottky diode chip.
7. The method of using a high voltage schottky product manufacturing apparatus according to claim 6, further comprising the steps of, in said step S3:
s31, after the acid cleaning liquid chemically corrodes the surface of the high-voltage Schottky diode chip for a period of time, the electric telescopic rod (40) works to push the sliding seat (42) to reciprocate in the vertical direction, the buffer spring (41) buffers the impact force during reciprocating movement, the vibration frame (39) operates to drive the placement filter plate (45) to vibrate up and down so that the high-voltage Schottky diode chip shakes on the placement filter plate (45), and impurities corroded on the surface of the high-voltage Schottky diode chip are dispersed;
in the step S4, the method further includes the following steps:
s41, a worker opens the protective door (18) and pulls the baffle (28) to release the connection relation between the clamping column (30) and the clamping hole (32), the motor II (34) operates to drive the threaded rod II (35) to rotate, the threaded rod II (35) rotates to enable the moving block (36) to slide on the inner side of the moving groove (37), the moving block (36) drives the movable frame (6) to move on the inner side of the mounting frame (5) to place the filter plate (45) to the outside of the pickling frame (4), and the worker is convenient to take out the pickled high-voltage Schottky diode chips.
CN202310519112.7A 2023-05-10 2023-05-10 High-voltage schottky product production equipment and application method thereof Active CN116313931B (en)

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CN110791766A (en) * 2019-11-12 2020-02-14 贵阳学院 A pickling installation for electronic components
CN216384838U (en) * 2021-09-17 2022-04-26 费家嘉 Drying device for electronic diode production
CN217451272U (en) * 2022-05-30 2022-09-20 常州极太汽车配件有限公司 Hydrocarbon cleaning machine that cleaning performance is good
CN218394995U (en) * 2022-08-10 2023-01-31 衢州市骞亿机械有限公司 Hardware component piece washs immersion oil case
CN115876596A (en) * 2023-01-02 2023-03-31 江苏联友科研仪器有限公司 Brand-new stretching and extruding knob structure simulation device
CN115939965A (en) * 2023-02-24 2023-04-07 国网山东省电力公司寿光市供电公司 Electric power distribution switch cabinet

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US20180183429A1 (en) * 2016-12-28 2018-06-28 Sirectifier Electronic Co., Ltd. Integrated series schottky diode rectifier

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Publication number Priority date Publication date Assignee Title
CN203526136U (en) * 2013-10-12 2014-04-09 然斯康波达机电设备(深圳)有限公司 Automatic bearing hydrocarbon washing machine
CN110791766A (en) * 2019-11-12 2020-02-14 贵阳学院 A pickling installation for electronic components
CN216384838U (en) * 2021-09-17 2022-04-26 费家嘉 Drying device for electronic diode production
CN217451272U (en) * 2022-05-30 2022-09-20 常州极太汽车配件有限公司 Hydrocarbon cleaning machine that cleaning performance is good
CN218394995U (en) * 2022-08-10 2023-01-31 衢州市骞亿机械有限公司 Hardware component piece washs immersion oil case
CN115876596A (en) * 2023-01-02 2023-03-31 江苏联友科研仪器有限公司 Brand-new stretching and extruding knob structure simulation device
CN115939965A (en) * 2023-02-24 2023-04-07 国网山东省电力公司寿光市供电公司 Electric power distribution switch cabinet

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