CN116265172A - Correction method and device for vibrating mirror - Google Patents

Correction method and device for vibrating mirror Download PDF

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Publication number
CN116265172A
CN116265172A CN202111548994.7A CN202111548994A CN116265172A CN 116265172 A CN116265172 A CN 116265172A CN 202111548994 A CN202111548994 A CN 202111548994A CN 116265172 A CN116265172 A CN 116265172A
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correction
sheet
pattern
area
points
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袁泉
艾辉
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Wuhan DR Llaser Technology Corp Ltd
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Wuhan DR Llaser Technology Corp Ltd
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Priority to CN202111548994.7A priority Critical patent/CN116265172A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Abstract

The invention discloses a correction method and equipment of a vibrating mirror, which are used for obtaining the size of a correction breadth, wherein the size of the correction breadth is larger than the size of a workpiece to be processed; dividing the correction breadth into N areas; selecting N correction sheets, wherein the N correction sheets are in one-to-one correspondence with the N areas, and the size of each correction sheet is respectively larger than that of the corresponding area; acquiring a preset integral pattern and a processing pattern on each correction sheet according to the size of the correction format and the mode of dividing the correction format into areas; and correcting the corresponding areas by adopting the correction sheets one by one according to a preset integral pattern by the vibrating mirror. According to the invention, the correction breadth is partitioned to form a plurality of small correction breadth, and each area corresponds to one correction sheet for correction, so that the correction of the whole correction breadth is completed, the size limit of the correction sheet is reduced, the material of the correction sheet and the correction method of a single area are not required to be changed, and the correction efficiency and effect are effectively improved.

Description

Correction method and device for vibrating mirror
Technical Field
The invention relates to the field of lasers, in particular to a method and equipment for correcting a galvanometer.
Background
The laser carries out pattern processing on the workpiece through high-speed scanning movement of the vibrating mirror. In order to ensure the processing precision of the graph, the vibrating mirror needs to be corrected, and the existing correction method comprises the following steps: and opening laser, marking a dot matrix on a correction sheet through the movement of the vibrating mirror, for example, a3 multiplied by 3,15 multiplied by 15, 27 multiplied by 27, and the like dot array, detecting the coordinate value of each dot through a secondary element or similar detection instrument, and finally inputting the coordinate value into a correction document of the vibrating mirror to achieve the purpose of correcting the vibrating mirror. According to the method, the reference points of the outer frame of the point array are fewer, the edge accuracy after correction is worse than that of the inner part, and the size of a correction sheet required during correction is larger than that of a workpiece in order to ensure the overall pattern accuracy of the workpiece.
With the gradual increase of the size of the workpiece, the size of the existing correction sheet is limited, so that the correction requirement cannot be met, and a mode of correcting by using the correction sheet with one material is adopted at present, but the correction effect of the correction sheet with other materials is poor, so that a better vibration mirror correction mode suitable for a large-size workpiece is not found.
Disclosure of Invention
The invention mainly aims at: a method and apparatus for correcting a galvanometer are provided, which can improve correction efficiency and effect.
The technical scheme adopted by the invention is as follows: a method for correcting a vibrating mirror,
acquiring the size of a correction breadth, wherein the size of the correction breadth is larger than the size of a to-be-machined piece;
dividing the correction breadth into N areas, wherein N is a natural number more than or equal to 2;
selecting N correction sheets, wherein the N correction sheets are in one-to-one correspondence with the N areas, and the size of each correction sheet is respectively larger than that of the corresponding area;
acquiring a preset integral pattern and a processing pattern on each correction sheet according to the size of the correction format and the mode of dividing the correction format into areas;
and correcting the corresponding areas by adopting the correction sheets one by one according to the preset integral pattern by the vibrating mirror.
According to the method, the processing pattern of each correction sheet comprises a part which is repeated with the processing pattern of the adjacent correction sheet, the repeated part corresponds to the same position in the preset integral pattern, and the same position is taken as a superposition characteristic part;
the correction sheets are adopted one by one to correct the corresponding areas, specifically:
firstly, selecting a correction sheet to correct a corresponding area;
then selecting a correction sheet corresponding to the adjacent area of the corrected area, and correcting the adjacent area of the corrected area according to the superposition characteristic part;
until all the areas are corrected.
According to the method, the preset integral pattern is a mark point array, and the coincident characteristic part is at least 2 mark points in the mark point array.
According to the method, the preset integral pattern is obtained by the following steps:
firstly, presetting a limited number of mark points and relative positions according to the contour of the corrected breadth, and taking the mark points and the relative positions as the contour of a preset integral pattern;
then, according to the area divided by the correction breadth, the same area division is carried out on the outline of the preset integral pattern;
n areas of the preset integral pattern are in one-to-one correspondence with N correction sheets, and a part of marking points are preset as coincident characteristic parts at the splicing positions of adjacent areas in the N areas of the preset integral pattern;
the finite number of marking points and the marking points of the coincident characteristic part integrally form the preset integral pattern;
and according to all the marking points and the relative positions of the preset integral pattern, the marking points included in each area of the preset integral pattern are corresponding to each correction sheet corresponding to each area, and the processing pattern of each correction sheet is processed and formed.
According to the method, firstly, a piece of correction sheet is selected to correct the corresponding area, and the method specifically comprises the following steps:
selecting a first correction piece, and engraving a corresponding processing pattern on the first correction piece under the control of a galvanometer by adopting a laser;
measuring the obtained processing pattern under the secondary element, and measuring the coordinates of all processing points forming the processing pattern on the first correcting sheet;
the coordinates of the measured processing points are led into a galvanometer correction file to finish the correction of the corresponding area of the first correction piece;
the correcting the adjacent area of the corrected area according to the coincident characteristic part specifically comprises the following steps:
selecting a correction sheet corresponding to an adjacent area of the corrected area, and engraving a corresponding processing pattern on the correction sheet under the control of a galvanometer by adopting a laser;
measuring the obtained processing pattern under a secondary element, selecting processing points carved out according to the coincident characteristic parts to establish a coordinate system as the coordinates of the marking points of the coincident characteristic parts in the corrected area are determined, and measuring the coordinates of all the processing points on the corrected sheet;
and (5) introducing the measured coordinates of the processing points into a galvanometer correction file to finish the correction of the corresponding area of the correction piece.
After finishing the correction of the corresponding area of the correction sheet according to the method, engraving the corresponding processing pattern on the correction sheet again, measuring the coordinates of each processing point obtained by the second engraving, and taking the correction sheet after determining that the coordinates meet the requirements.
According to the method, the machined part is rectangular, and the correction breadth is rectangular with the size larger than that of the machined part;
the processing pattern specifically comprises: forming a machining point array with at least 2 machining points in the transverse direction and the longitudinal direction by laser machining on each calibration sheet, wherein the transverse direction and the longitudinal direction are two directions which are perpendicular to each other in the same plane;
from the second correction, each correction establishes a planar coordinate system using at least 2 mark points of the coincident feature portion, and performs correction.
According to the method, the method further comprises the following steps:
and after the correction sheets are adopted one by one to correct the corresponding areas, scaling adjustment is carried out on the corrected overall graph, so that the dimensional accuracy of the overall graph meets the requirement.
According to the method, the material of the correction sheet is the same as that of the machined part.
A correction device of a galvanometer comprises a galvanometer control unit, wherein the galvanometer control unit is used for controlling the galvanometer to complete the correction method of the galvanometer.
The invention has the beneficial effects that:
1. through dividing the correction breadth, a plurality of small correction breadth are formed, each area corresponds to one correction sheet for correction, thereby the correction of the whole correction breadth is completed, the size limit of the correction sheet is reduced, the problem of precision deviation generated when the correction sheet made of other materials is adopted for correction is avoided, and the correction efficiency and effect are effectively improved due to the repeated correction work.
2. By establishing a correction sequence among a plurality of correction sheets and a reference standard, namely setting a superposition characteristic part in a preset integral pattern, selecting the correction sheet corresponding to the adjacent region of the corrected region, correcting the adjacent region of the corrected region according to the superposition characteristic part, thereby completing the correction of the whole correction breadth, avoiding errors and adjustment time among a plurality of times of correction, and improving correction accuracy and correction efficiency.
3. After all correction is finished, the overall dimension precision of the overall pattern is further improved by adopting a mode of integrally zooming the pattern.
Drawings
The invention will be further described with reference to the accompanying drawings and examples, in which:
FIG. 1 is a schematic diagram of a calibration web and calibration sheet size overlay in accordance with an embodiment of the present invention.
FIG. 2 is a schematic diagram showing the relationship between the calibration sheet and the dot matrix of each region of the calibration format in accordance with one embodiment of the present invention.
Fig. 3 is a schematic diagram of a preset pattern in accordance with a first embodiment of the present invention.
FIG. 4 is a schematic diagram of the coverage of the calibration width and the calibration sheet according to the second embodiment of the present invention.
FIG. 5 is a schematic diagram of the coverage of the calibration web and calibration sheet dimensions in a third embodiment of the present invention.
In the figure: 1-correction of the breadth, 2-processing of the workpiece and 3-correction of the sheet.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
The invention provides a correction method of a vibrating mirror, which comprises the following steps:
s1, acquiring the size of a correction breadth, wherein the size of the correction breadth 1 is larger than the size of a workpiece to be machined.
S2, dividing the correction breadth into N areas, wherein N is a natural number which is more than or equal to 2. The N regions may be the same size, or may be determined according to actual situations. For example, the workpiece and the correction area are both rectangular, and the divided areas may be both rectangular; if the work piece is circular, the correction web may be circular, rectangular or otherwise shaped to cover the work piece, then the N zones may be quarter-circular, rectangular, or partially fan-shaped partially rectangular.
S3, selecting N correction sheets, wherein the N correction sheets are in one-to-one correspondence with the N areas, and the size of each correction sheet is respectively larger than that of the corresponding area.
S4, acquiring a preset integral pattern and a processing pattern on each correction sheet according to the size of the correction format and the mode of dividing the correction format into areas.
The preset overall pattern is usually preset in the industrial personal computer in advance. Because the size of each correction sheet is larger than the corresponding correction breadth area, the processing pattern of each correction sheet comprises a part which is repeated with the processing pattern of the adjacent correction sheet, the repeated part corresponds to the same position in the preset integral pattern, and the same position is used as the superposition characteristic part. Generally, the preset overall pattern is a dot array, for convenience of distinguishing and describing, the application is a mark dot array, the coincident feature part is at least 2 mark dots in the mark dot array, and the mark dots are cross lines or dots or other patterns with the same function.
More refined, the preset integral pattern preset in advance in the industrial personal computer is obtained by the following modes: firstly, presetting a limited number of mark points and relative positions according to the contour of the corrected breadth, and taking the mark points and the relative positions as the contour of a preset integral pattern; then, according to the area divided by the correction breadth, the same area division is carried out on the outline of the preset integral pattern;
n areas of the preset integral pattern are in one-to-one correspondence with the N correction sheets, and a part of marking points are preset as coincident characteristic parts at the splicing positions of adjacent areas in the N areas of the preset integral pattern;
the finite number of mark points and the mark points of the coincident feature part integrally form the preset integral pattern.
After the preset integral pattern is obtained, according to all marking points and relative positions of the preset integral pattern, the marking points included in each area of the preset integral pattern are corresponding to each correction sheet corresponding to each area, and the processing pattern of each correction sheet is processed and formed. The process may be by laser scanning or other means to the calibration sheet.
S5, correcting the corresponding areas one by adopting the correction sheets according to the preset integral pattern and the processing pattern, wherein the correction sheets specifically comprise the following steps:
s51, firstly selecting a piece of correction sheet to correct the corresponding area.
Selecting a first correction piece, and engraving a corresponding processing pattern on the first correction piece under the control of a galvanometer by adopting a laser; measuring the obtained processing pattern under the secondary element, and measuring the coordinates of all processing points forming the processing pattern on the first correcting sheet; and (3) introducing the measured coordinates of the processing points into a galvanometer correction file to finish the correction of the corresponding area of the first correction piece. Specifically, after the coordinates of the processing point obtained by measurement are led into a galvanometer correction file, the galvanometer can be corrected by using a self-contained algorithm, and the purpose is to make the coordinates of the processing point with deviation from the preset integral pattern correct to be consistent with the coordinates of the preset pattern mark point. This section is prior art and is not the focus of the present invention and is therefore not repeated.
S52, selecting a correction sheet corresponding to the adjacent area of the corrected area, and correcting the adjacent area of the corrected area according to the superposition characteristic part.
Selecting a correction sheet corresponding to an adjacent area of the corrected area, and engraving a corresponding processing pattern on the correction sheet under the control of a galvanometer by adopting a laser; measuring the obtained processing pattern under a secondary element, selecting processing points carved out according to the coincident characteristic parts to establish a coordinate system as the coordinates of the marking points of the coincident characteristic parts in the corrected area are determined, and measuring the coordinates of all the processing points on the corrected sheet; and (5) introducing the measured coordinates of the processing points into a galvanometer correction file to finish the correction of the corresponding area of the correction piece.
Optionally, after finishing the correction of the corresponding area of the correction sheet, engraving the corresponding processing pattern again on the correction sheet, measuring the coordinates of each processing point in the processing point array obtained by the second engraving, and taking the correction sheet after determining that the coordinates meet the requirements. Then correction of the next adjacent area is performed.
Until all the areas are corrected.
Specifically, if the workpiece is rectangular, and the correction width is rectangular with a size larger than that of the workpiece, the processing pattern may be: and forming a machining point array with at least 2 machining points in the transverse direction and the longitudinal direction by laser machining on each calibration sheet, wherein the transverse direction and the longitudinal direction are two directions which are perpendicular to each other in the same plane.
Then, after the first correction, based on the corrected area, the second correction is performed, each correction using at least 2 mark points of the coincident feature to establish a planar coordinate system (the second correction patch starts, and the points for establishing the coordinate system are engraved based on the at least 2 mark points of the coincident feature, and the establishment of the planar coordinate system using the at least 2 mark points of the coincident feature actually means the establishment of the coordinate system based on the processing points engraved based on the at least 2 mark points of the coincident feature). Since the processing points engraved according to the coincident feature portion are in the transverse direction or the longitudinal direction, a planar rectangular coordinate system can be obtained according to the connecting line of the 2 processing points and the direction perpendicular to the connecting line.
Since there may be some errors in the dimensions at the time of the first correction, and the post-correction is based on the corrected areas, there may be some errors in the dimensions of the overall pattern after all corrections are completed. Thus, preferably, the method may further comprise: and S6, after the correction sheets are adopted one by one to correct the corresponding areas, scaling adjustment is carried out on the corrected overall graph, so that the dimensional accuracy of the overall graph meets the requirement.
By adopting the method, the correction sheets which are the same as the workpiece in material can be adopted, and each correction sheet adopts a mature correction technology, so that the limitation of the material and the size of the correction sheet is reduced.
The invention also provides a correction device of the galvanometer, which comprises a galvanometer control unit, wherein the galvanometer control unit is used for controlling the galvanometer so as to complete the correction method of the galvanometer.
Specific examples:
embodiment one:
the work piece is a rectangular sheet material for example, and n=4 will be described in detail.
As shown in fig. 1 to 3, a correction web 1 larger than the size of the workpiece 2 is selected, and the correction web 1 is divided into 4 small rectangles, which are A, B, C, D areas respectively; taking 4 correction sheets 3 which are made of the same material as a workpiece, for convenience in description, namely, the correction sheets are named A, B, C and D, areas which are corresponding to A, B, C, D one by one respectively, and arranging the correction sheets on a correction platform as shown in figure 2 (note that 1, the workpiece 2 in the figure does not need to be placed on the correction platform in the correction process, the workpiece 2 is placed in the figure for convenience in checking the relative size of the workpiece size and the correction sheets, the correction sheets 3 of A, B, C, D4 in the figure are not placed on the correction platform at the same time, only 1 correction sheet 3 is placed in each time in the correction process for correcting one area, namely, only the correction corresponding to the one area is placed when correcting which area, and 3, all the correction sheets 3 are placed in the figure 2 for convenience in showing the dot matrix relation among the areas); the relative position of each calibration sheet 3 placed on the calibration platform has no special requirement, and only the mark points in each area are required to be completely processed on the calibration sheet 3 in the corresponding area.
Firstly, the working principle of the vibrating mirror is to control laser to scan on a workpiece according to a processing pattern preset in advance in an industrial personal computer. The preset integral pattern is a preset pattern in advance in the industrial personal computer, and the vibrating mirror controls the laser to punch the processing point for correction on the correction sheet according to the preset pattern. Therefore, in order to facilitate the later correction, patterns (including the relative positions thereof) to be processed on the 4 correction sheets in the correction process are preset to the industrial personal computer in advance, and the processed patterns adopted herein are dot arrays.
It should be noted that, because the correction is performed by dividing the areas, in order to ensure that the patterns of two adjacent areas can be perfectly spliced when the adjacent areas are processed by adopting the galvanometer after correction, when the processing points are processed on the correction sheet, the adjacent areas on the adjacent correction sheets share at least two preset marking points in the industrial personal computer, and the two points are positioned on horizontal or vertical lines (of course, 3, 4, 5, … and the like) and serve as the superposition characteristic parts.
Specifically, for a rectangular sheet material, after dividing 4 areas, each area is still rectangular, and preferably, a machining point matrix of m×n is formed on each calibration sheet by laser machining, where M and N respectively represent the number of transverse and longitudinal machining points, and M and N are both greater than or equal to 2. The more the number of machining points, the more accurate the result of the correction. The number of the transverse and longitudinal processing points on each calibration sheet can be set according to practical situations and are not necessarily the same.
The following description will take correction as an example of a processing point matrix processed by 2×2 on each correction sheet.
As described above, at least 2 marking points are required for the coincident feature, and each region includes a2×2 marking point matrix, so that a pattern preset in the industrial personal computer in advance is a 3*3 marking point matrix as shown in fig. 3.
Specifically, the positional relationship between the pattern in the industrial personal computer and the processing point on the calibration sheet is described by taking the A calibration sheet, the B calibration sheet and the D calibration sheet as examples. Wherein, fig. 2 shows the distribution of the processing points on each calibration sheet, and fig. 3 shows the distribution of the marking points of the preset integral pattern. Wherein reference numeral 7 in fig. 3 corresponds to A4 on the a-th calibration sheet in fig. 2; reference numeral 4 in fig. 3 corresponds to A3 on the a-th calibration sheet and D3 on the D-th calibration sheet in fig. 2; reference numeral 8 in fig. 3 corresponds to A2 on the a-th calibration sheet and B2 on the B-th calibration sheet in fig. 2; FIG. 3 shows a diagram 5 corresponding to A1 on the A-th calibration sheet in FIG. 2, and B1 on the B-th calibration sheet and D1 on the D-th calibration sheet; reference numeral 9 in fig. 3 corresponds to B4 on the B-th calibration sheet in fig. 2; reference numeral 1 in fig. 3 corresponds to D4 on the D-th calibration sheet in fig. 2, and the other areas are analogized.
The method for confirming the 3*3 mark point matrix preset in advance in the industrial personal computer comprises the following steps:
the size of the correction width is known to be the range of the vibration mirror to be corrected in practice, and the fact that the laser can easily process the pattern of the point on the correction sheet is considered, so that the correction width is corresponding to the limited marking points preset in advance in the industrial personal computer, and when each area is 2 x 2, the length and the width of the rectangular frame formed by the preset four marking points of 1, 3, 9 and 7 correspond to the length and the width of the correction width obtained according to the size of the workpiece. And the positions of the 5 mark points which are required to be preset are correspondingly set according to the length and the width of each divided area. This is because the length and width of each area are corrected by two adjacent correction sheets respectively, and the arrangement is more convenient and simpler directly. Other positions of the portions where both of the adjacent correction sheets are corrected may be selected to set the mark points.
The principle of the invention is as follows: and determining the correction width of the galvanometer according to the large-size workpiece, wherein the correction width is larger than the size of the workpiece, so that the correction of the correction width is equivalent to the correction of the galvanometer when the large-size workpiece is processed. When the correction of the breadth is performed, the correction breadth is divided into N small areas, then the existing correction sheets with relatively small sizes can be selected to correct each area respectively, and the vibration mirror correction of the large-size workpiece can be completed only by correcting the positions of the processing point matrixes on the N correction sheets correctly. That is, for the n=4 areas of this embodiment, the correction of the positions of the processing points on the A, B, C, D th correction sheet is correct, that is, the correction of the galvanometer of A, B, C, D four areas corresponding to the large-size workpiece is completed, that is, the whole correction is naturally completed.
Specifically, the correction procedure for the four areas A, B, C, D is as follows:
1. selecting any area to perform correction operation, taking the area A as an example; and (3) engraving correction patterns on the A-th correction sheet by using a laser according to the area corresponding to the A-th correction sheet in the preset overall pattern to form the 2 x 2 processing point matrix, wherein A1, A2, A3 and A4 are respectively processed according to 5, 8, 4 and 7 preset in advance by an industrial personal computer. And measuring the obtained lattice under a secondary element, selecting A1 and A2 to establish a coordinate system, and measuring all lattice coordinates on the A-th calibration sheet (at present, if M and N are larger than 2, all other lattice coordinates are required to be measured, that is, other lattices are required to be preset into an industrial personal computer in advance).
2. And (3) leading the measured coordinates of the processing points into a vibrating mirror correction file, finishing correction of the vibrating mirror by using a self-contained algorithm, engraving a processing point matrix again, finding out that the accuracy requirement (which is set according to specific practical conditions) can be met after measuring the coordinate values of the processing points, verifying that the accuracy of the processing point matrix of the A-th correction sheet is met, finishing the vibrating mirror correction of the A region, taking the A-th correction sheet, and carrying out the correction of the next region.
3. The next area can be selected from the B correction sheet or the D correction sheet, only the clockwise or anticlockwise correction is required to be ensured, if the B area is selected, the B correction sheet is put in, a processing point matrix is carved on the B correction sheet, then the lattice is measured under a secondary element, and the B1 and the B2 on the B correction sheet are used as the basis when a coordinate system is established; if the D area is selected, the D correction sheet is put in, a processing point matrix is carved on the D correction sheet, then the lattice is measured under the secondary element, and a coordinate system is built based on D1 and D3 when the coordinate system is built, so that the coordinate system is built based on the corrected area, no deviation in angle and size exists between the corrected area and the previous area, and the accuracy and the size of the whole graph after the correction of all areas can be ensured.
4. And (3) after verifying that the accuracy of the processing point matrix on the B-th calibration sheet (or the D-th calibration sheet) meets the standard (all lattice coordinates on the B-th or D-th calibration sheet are measured, the measured result is led into a vibrating mirror calibration file, then the processing point matrix is engraved again, and the accuracy requirement can be met after the coordinate values of each point are measured).
5. And after all areas are corrected in sequence, the vibrating mirror correction work is completed.
Further, after the correction of step 5 is completed, the method further includes adjusting the image scaling to make the overall image precision meet the requirement, specifically, when correction is performed, each correction piece may have a slightly fine correction error after correction, so that the overall adjustment can be performed again. Although the lateral and longitudinal pitches between the processing points of each correction sheet are not limited, the pitches of the respective adjacent areas in the lateral and longitudinal directions may be the same, so that errors in the lateral and longitudinal directions can be corrected as a whole. By this fine adjustment, the correction accuracy can be further improved.
Embodiment two:
the method and principle of this embodiment are basically the same as those of the first embodiment, except that: as shown in fig. 4, in this embodiment, the workpiece 2 is a circular sheet material, the correction width 1 is a rectangle with a size larger than that of the workpiece 2, the correction width may still be rectangular, and the processing pattern is unchanged.
Embodiment III:
the method and principle of this embodiment are basically the same as those of the first embodiment, except that: as shown in fig. 5, in this embodiment, the workpiece 2 is a circular sheet material, and the correction width 1 is a circle having a size larger than that of the workpiece 2, and is divided into 4 quarter circles. The shape of the calibration sheet is not limited, and here, a rectangular shape with a size larger than a quarter circle is taken as an example, and the machining pattern is a machining point with the quarter circle as an outer contour (i.e. a section of a quarter circular arc and two radius edges).
The invention can complete all correction work without using alternative materials, avoids laser processing precision difference caused by different characteristics of the alternative materials, thereby avoiding repeated correction work generated when the precision deviation is overlarge and improving correction efficiency and effect. The method adopts the correction sheet which is the same as the workpiece, and meanwhile, the size of the correction sheet is not limited by the size of the workpiece, and the single-piece correction method can also adopt a mature technology, so that the method is convenient and reliable.
It will be understood that modifications and variations will be apparent to those skilled in the art from the foregoing description, and it is intended that all such modifications and variations be included within the scope of the following claims.

Claims (10)

1. A correction method of a vibrating mirror is characterized in that,
acquiring the size of a correction breadth, wherein the size of the correction breadth is larger than the size of a to-be-machined piece;
dividing the correction breadth into N areas, wherein N is a natural number more than or equal to 2;
selecting N correction sheets, wherein the N correction sheets are in one-to-one correspondence with the N areas, and the size of each correction sheet is respectively larger than that of the corresponding area;
acquiring a preset integral pattern and a processing pattern on each correction sheet according to the size of the correction format and the mode of dividing the correction format into areas;
and correcting the corresponding areas by adopting the correction sheets one by one according to the preset integral pattern by the vibrating mirror.
2. The method according to claim 1, wherein the processed pattern of each correction piece includes a portion that is repeated with the processed pattern of the adjacent correction piece, the repeated portion corresponding to the same position in the preset overall pattern, the same position being taken as the overlapping feature portion;
the correction sheets are adopted one by one to correct the corresponding areas, specifically:
firstly, selecting a correction sheet to correct a corresponding area;
then selecting a correction sheet corresponding to the adjacent area of the corrected area, and correcting the adjacent area of the corrected area according to the superposition characteristic part;
until all the areas are corrected.
3. The method of calibrating a galvanometer according to claim 2, wherein the predetermined overall pattern is an array of mark points, and the coincident feature is at least 2 mark points in the array of mark points.
4. A method of calibrating a vibrating mirror according to claim 3, wherein the predetermined overall pattern is obtained by:
firstly, presetting a limited number of mark points and relative positions according to the contour of the corrected breadth, and taking the mark points and the relative positions as the contour of a preset integral pattern;
then, according to the area divided by the correction breadth, the same area division is carried out on the outline of the preset integral pattern;
n areas of the preset integral pattern are in one-to-one correspondence with N correction sheets, and a part of marking points are preset as coincident characteristic parts at the splicing positions of adjacent areas in the N areas of the preset integral pattern;
the finite number of marking points and the marking points of the coincident characteristic part integrally form the preset integral pattern;
and according to all the marking points and the relative positions of the preset integral pattern, the marking points included in each area of the preset integral pattern are corresponding to each correction sheet corresponding to each area, and the processing pattern of each correction sheet is processed and formed.
5. The method for correcting a vibrating mirror according to claim 4, wherein the first selecting a correction sheet corrects the corresponding area, specifically includes:
selecting a first correction piece, and engraving a corresponding processing pattern on the first correction piece under the control of a galvanometer by adopting a laser;
measuring the obtained processing pattern under the secondary element, and measuring the coordinates of all processing points forming the processing pattern on the first correcting sheet;
the coordinates of the measured processing points are led into a galvanometer correction file to finish the correction of the corresponding area of the first correction piece;
the correcting the adjacent area of the corrected area according to the coincident characteristic part specifically comprises the following steps:
selecting a correction sheet corresponding to an adjacent area of the corrected area, and engraving a corresponding processing pattern on the correction sheet under the control of a galvanometer by adopting a laser;
measuring the obtained processing pattern under a secondary element, selecting processing points carved out according to the coincident characteristic parts to establish a coordinate system as the coordinates of the marking points of the coincident characteristic parts in the corrected area are determined, and measuring the coordinates of all the processing points on the corrected sheet;
and (5) introducing the measured coordinates of the processing points into a galvanometer correction file to finish the correction of the corresponding area of the correction piece.
6. The method for correcting a vibrating mirror according to claim 5, wherein after the correction of the corresponding area of the correction sheet is completed, the corresponding processing pattern is engraved again on the correction sheet, the coordinates of each processing point obtained by the second engraving are measured, and the correction sheet is taken away after the requirement is satisfied.
7. The method of calibrating a vibrating mirror according to claim 4, 5 or 6, wherein the workpiece is rectangular, and the calibration width is rectangular with a size larger than the workpiece;
the processing pattern specifically comprises: forming a machining point array with at least 2 machining points in the transverse direction and the longitudinal direction by laser machining on each calibration sheet, wherein the transverse direction and the longitudinal direction are two directions which are perpendicular to each other in the same plane;
from the second correction, each correction establishes a planar coordinate system using at least 2 mark points of the coincident feature portion, and performs correction.
8. The method for correcting a galvanometer according to any one of claims 1 to 6, further comprising:
and after the correction sheets are adopted one by one to correct the corresponding areas, scaling adjustment is carried out on the corrected overall graph, so that the dimensional accuracy of the overall graph meets the requirement.
9. The method of calibrating a galvanometer according to claim 1, wherein the calibration sheet is the same as the workpiece.
10. A correction device for a vibrating mirror, characterized by: comprising a galvanometer control unit for controlling a galvanometer to perform the method of correcting a galvanometer according to any one of claims 1 to 9.
CN202111548994.7A 2021-12-17 2021-12-17 Correction method and device for vibrating mirror Pending CN116265172A (en)

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Application Number Priority Date Filing Date Title
CN202111548994.7A CN116265172A (en) 2021-12-17 2021-12-17 Correction method and device for vibrating mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111548994.7A CN116265172A (en) 2021-12-17 2021-12-17 Correction method and device for vibrating mirror

Publications (1)

Publication Number Publication Date
CN116265172A true CN116265172A (en) 2023-06-20

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111548994.7A Pending CN116265172A (en) 2021-12-17 2021-12-17 Correction method and device for vibrating mirror

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Country Link
CN (1) CN116265172A (en)

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