JP4122469B2 - Multiband drawing machine - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a multiband drawing machine in which an entire drawing pattern drawn by beam irradiation on a photosensitive material is obtained as a combination of partial drawing regions based on a plurality of bands, and a drawing method thereof.
[0002]
[Prior art]
Conventionally, a beam irradiation head configured to be movable in a predetermined direction (X-axis direction) in order to perform drawing at a high resolution on a photosensitive material of a larger size, and orthogonal to the moving direction of the beam irradiation head The entire drawing pattern is divided into a plurality of regions in the X-axis direction and extends in a band shape in the Y-axis direction. A multi-band drawing machine obtained as a combination of partial drawing areas based on a band is known.
[0003]
In such a multi-band drawing machine, a light irradiation head that irradiates light onto the exposure surface irradiates the exposure surface with a beam, moves the table on the Y axis, and draws an image of one band on the photosensitive material, Further, the light irradiation head is moved in the X-axis direction by a mechanical mechanism to perform drawing on the next band. By repeating this operation, drawing on the entire photosensitive material is performed.
[0004]
[Problems to be solved by the invention]
When the light irradiation head is moved by a mechanical mechanism as described above, the drawing start position for each band where drawing is started may be shifted in the sub-scanning direction due to an attachment error. The drawing position shift caused by such an attachment error is adjusted at the time of manufacturing the apparatus, but it is general that a small amount of shift remains within a range difficult to mechanical adjustment.
[0005]
The present invention provides a multiband drawing machine and a drawing method thereof that can correct an error in a range that cannot be corrected by mechanical adjustment at the time of manufacture, and can perform drawing with improved drawing accuracy. The purpose is to do.
[0006]
[Means for Solving the Problems]
The multi-band drawing machine according to claim 1 of the present invention is a multi-band drawing machine in which an entire drawing pattern drawn by beam irradiation on a photosensitive material is obtained as a combination of partial drawing regions based on a plurality of bands. Drawing start position information storage means for a predetermined band; and drawing start position calculation means for obtaining drawing start position information of an arbitrary band based on the drawing start position information of the predetermined band stored in the storage means; And a drawing control means for drawing each band according to the drawing start position obtained by the drawing start position calculating means.
[0007]
Here, the drawing start position information for the predetermined band may be drawing start position information for measurement points smaller than the number of bands.
[0008]
In this case, the calculation means obtains the drawing start position of the band not corresponding to the measurement point by interpolation calculation based on the drawing start position information of the band corresponding to the measurement point.
[0009]
Here, the interpolation calculation may be an interpolation calculation based on linear approximation.
[0010]
When drawing is performed, the drawing control means may adjust the position of a beam irradiation head for irradiating the photosensitive material with a beam or a table on which the photosensitive material is placed based on the drawing start position information. It is possible (Claim 5).
[0011]
The drawing method according to claim 6 of the present invention is a drawing applied to a multiband drawing machine in which the entire drawing pattern drawn by beam irradiation on the photosensitive material is obtained as a combination of partial drawing regions based on a plurality of bands. In this method, drawing start position information of each band is obtained based on drawing start position information of a predetermined band, and drawing is performed.
[0012]
In this case, the drawing start position of each band can be obtained based on the drawing start positions at the number of measurement points equal to or less than the number of bands.
[0013]
Further, the drawing start position of each band can be obtained by interpolation calculation based on the drawing start position information for the measurement points smaller than the number of bands.
[0014]
A drawing method according to a ninth aspect of the present invention includes a beam irradiation head configured to be movable in a predetermined direction (X-axis direction), and a direction (Y-axis direction) orthogonal to the movement direction of the beam irradiation head. The entire drawing pattern is divided into a plurality of areas in the X-axis direction and is composed of a band extending in a band shape in the Y-axis direction. Is a drawing method applied to a multi-band drawing machine, and a correction data file including the drawing start position coordinates of the band measured at a number of measurement points smaller than the number of bands based on the drawing result When drawing the band corresponding to the measurement point, the polarity of the Y coordinate value at the measurement point in the correction data file is changed by moving the table on the Y axis. When the rolling value, the Y coordinate value of the drawing start position of the band, for drawing the band located between two adjacent measuring points,
C _Y = A _Y + ((B _Y −A _Y ) / (B _X −A _X )) · C _X
(However, the coordinates of the measurement points A and B on both sides of the band are (A _X , A _Y ) and (B _X , B _Y ), respectively)
It obtains the value of C _Y by calculation, by moving the table on the Y-axis, inverted value of the polarity of the C _Y, as the Y-coordinate value of the drawing start position of the band, performs drawing.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a perspective view showing an appearance of a multiband drawing machine 100 of the present invention. For example, the multiband drawing machine 100 draws a circuit pattern on a photomask film for exposure printing for creating a printed circuit board. In addition, a table 2 for placing a photosensitive film 3 on which a circuit pattern is drawn is provided on the apparatus main body base 1. The table 2 can be reciprocated in the Y direction in the figure by rotating the ball screw 2B by a table driving motor (not shown) with its lower surface guided along a pair of rails 2R extending in the Y direction. ing.
[0016]
The light irradiation head 4 for emitting a beam to the photosensitive material is fixed to the optical base 5 mounted on the optical system mounting stage 5S. The optical system mounting stage 5S is guided by a pair of guide rails 5R extending in the X direction and is movable in the X direction. By rotating the ball screw 5B by the optical system driving motor 5M, the light irradiation head 4 is , Movable in the X direction.
[0017]
Drawing on the photosensitive film 3 is performed as follows. First, the table 2 and the light irradiation head 4 are moved to the drawing start position. Next, the table 2 is moved in the Y direction while irradiating with the light irradiation head 4, and a belt-like image extending in the Y direction is formed on the surface of the photosensitive film 3. When image formation is performed up to the end of the photosensitive film 3, the optical system mounting stage 5S is moved in the X direction. Along with the movement of the optical system mounting stage 5S, the table 2 is moved to the drawing start position of the next band, irradiation by the light irradiation head 4 is started, and a strip-like image extending in the Y direction is formed again on the photosensitive film 3. Such a drawing operation is performed for all the bands, and drawing is performed on the entire photosensitive material 3.
[0018]
FIG. 2 is a block diagram showing a control system for performing the drawing process of the multiband drawing machine 100. In FIG. 2, reference numeral 10 denotes a CPU, reference numeral 13 denotes a memory, reference numeral 41 denotes an LED array as a light source for irradiating the photosensitive material with a beam, and reference numeral 12 denotes an LED driving circuit for driving the LED array 41. Reference numeral 5M represents an optical system drive motor, and reference numeral 2M represents a table drive motor. Drawing data is stored in the memory 13, and the CPU 10 reads data corresponding to the arrangement of the LED array 41 from the memory 13, outputs data to the LED drive circuit 12 based on the data, and causes the LEDs to emit light. The CPU 10 also controls the movement of the table 2 and the optical base 5.
[0019]
FIG. 3 shows the state of each band when the entire photosensitive material is drawn as described above. In the drawing, a band-like region extending in the Y direction indicates one band. In addition, the Y direction in FIG. 3 represents the direction in which the table 2 moves, and the X direction represents the direction in which the light irradiation head 4 moves. As described above, since the light irradiation head 4 moves in the X direction by a mechanical mechanism, the drawing start position of each band is displaced in the Y direction with the movement. FIG. 3 shows a state in which the drawing start position in the Y direction of each band is drawn with a deviation from the original position (X axis in the figure). The drawing result of FIG. 3 represents the nature of the positional deviation when the light irradiation head 4 is moved in the X-axis direction. Therefore, the drawing start position at the time of drawing for each band is corrected according to the amount of the deviation. Thus, it is possible to perform drawing after eliminating such a positional shift.
[0020]
When performing the portrayal by the correction, as data for correction, the drawing start position coordinates of each band of the photosensitive material which has been drawn in a state as shown in FIG. 3, is measured by a dedicated instrument, workstation Or the like as a correction data file. Also, when performing the portrayal by the correction, multi-band drawing machine 100 inside the CPU10 is, so it is possible to read the correction data file from the workstation or the like, a multi-band drawing machine 100, the network, etc. Connect to the workstation where the correction data file is stored.
[0021]
FIG. 4 shows the relationship between the drawing result and the measurement points. A line (X axis) with a Y value of 0 in FIG. 4 represents the original drawing start position of the band. In FIG. 4, points A and B are measurement points, and the number of measurement points is smaller than the number of bands. If the coordinates of point A and point B are (A _X , A _Y ) and (B _X , B _Y ), these coordinate values are stored in the correction data file. When drawing with correction, the CPU 10 reads a correction data file in advance and stores the data in the memory 13. Here, the band corresponding to the point A, the value obtained by inverting the polarity of the A _Y is a Y coordinate of the drawing start position, the band corresponding to the point B, the value obtained by inverting the polarity of B _Y is the start of drawing The Y coordinate of the position is determined. The CPU 10 moves the table 2 by drivingly controlling the table drive motor 2M so that band drawing is started from the determined drawing start position.
[0022]
When performing correction drawing for a band located between two adjacent measurement points, such as the band corresponding to point C in FIG. 4, the CPU 10 calculates the point A from the correction data file. reads the coordinate value of the point B, the _{C Y,}
C _Y = A _Y + ((B _Y −A _Y ) / (B _X −A _X )) · C _X
As is, in terms of determined by linear interpolation, inverted value of the polarity of the C _Y, determines the Y coordinate value of the drawing start position coordinate of the band. The CPU 10 moves the table 2 by drivingly controlling the table drive motor 2M so that band drawing is started from the determined drawing start position. As for the X coordinate value C _X of the point C, since the width of the band in the X direction is determined in advance as a value specific to the drawing machine, it depends on the number of the band from the X axis origin. It is determined. By performing the drawing as described above, the drawing start position of each band is aligned with the X-axis position of FIG. 4 which is the original drawing start position. In FIG. 4, the measurement points A and B are present on the plus side of the Y-axis coordinates. However, even when these are located on the minus side of the Y-axis coordinates, the above linear interpolation calculation is performed similarly. Applicable.
[0023]
FIG. 5 is a flowchart showing the drawing position correction method of the present invention described above. When drawing is started, first, the positions of the table 2 and the light irradiation head 4 are initialized (S1). Next, the CPU 10 reads data from the correction data file containing the drawing start position coordinates of the band into the memory 13 (S2). Next, when the band to be processed is the band of the measurement point portion, the value obtained by inverting the polarity of the Y coordinate value of the measurement point in the read data is set as the Y coordinate value as the drawing start position coordinate. If the band to be processed is a band located between two adjacent measurement points, start drawing the value obtained by inverting the polarity of the value obtained by the linear interpolation calculation as described above The Y coordinate value as the position coordinate is determined (S4). When the drawing start position coordinates are obtained, the CPU 10 controls the optical system drive motor 5M so as to start drawing from the start position coordinates, thereby moving the light irradiation head 4 to the drawing target band position. Then, the table 2 is moved by controlling the driving of the table drive motor 2M (S5), and drawing for the band is started (S6). When the above operation is completed for all bands (S2: YES), drawing on one photosensitive material is completed. Since the minimum moving resolution of the table 2 that is moved and controlled by driving the motor is usually about 0.1 μm, the drawing position of each band is corrected with a resolution of 0.1 μm. Since this value is sufficiently small compared with the size of a general drawing pattern, the correction by this method enables accurate drawing with virtually no deviation.
[0024]
【The invention's effect】
As described above, according to the present invention, in the multi-band drawing machine, by measuring the drawing start position coordinates of the band at the number of measurement points smaller than the number of bands, the measurement result is used for all bands. The correction amount of the drawing start position is determined, and it becomes possible to perform accurate drawing by eliminating the deviation of the drawing start position in the Y-axis direction for each band.
[Brief description of the drawings]
FIG. 1 is an overview of a multiband drawing machine that performs drawing start position correction according to the present invention.
FIG. 2 is a block diagram showing a control system of the multiband drawing machine of FIG. 1;
FIG. 3 is a diagram illustrating a state where a drawing start position shift occurs for each band.
FIG. 4 is a diagram for explaining a case of obtaining a drawing start position of a band between measurement points.
FIG. 5 is a flowchart showing a drawing position correction method of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Drawing machine main body 2 Table 2B Ball screw 2R Guide rail 2M Table drive motor 3 Photosensitive film 4 Light irradiation head 5 Optical base 5S Optical system mounting stage 5B Ball screw 5R Guide rail 5M Optical system drive motor 10 CPU
12 LED array drive circuit 13 Memory 41 LED array 100 Multiband drawing machine

Claims (8)

The entire drawing pattern drawn by beam irradiation on the photosensitive material is a multiband drawing machine obtained as a combination of partial drawing regions based on a plurality of bands,
A light source for emitting the beam;
A base on which the photosensitive material is placed;
First driving means for moving the base in a first direction from a reference position;
Second driving means for moving the light source in a second direction intersecting the first direction;
The base is moved in the first direction from the reference position while irradiating the photosensitive material with the beam, and band drawing control for drawing a single band is executed. A drawing control means for causing the movement of the stage to the reference position along the first direction and the movement of the light source in the second direction, and executing the band drawing control again;
First and second measurement start position information in which the relative positions of the light sources along the first direction with respect to the reference position are measured in advance at the time of starting the band drawing control for the first and second bands. Storage means for storing as,
Based on the first and second measurement start position information stored in the storage means, the light source along the first direction with respect to the reference position at the time of starting the band drawing control with respect to an arbitrary band. Start position calculating means for obtaining estimated start position information which is a relative position;
Starting position correction means for correcting the drawing start position of the band in the band drawing control for each band based on the measurement start position information and the estimated start position information;
Multi-band drawing machine characterized by   The multiband drawing machine according to claim 1, wherein the measurement start position information is based on measurement points measured for some of the bands.   3. The start position calculating means obtains a drawing start position of the band in the band drawing control for a band not corresponding to the measurement point by interpolation calculation based on the measurement start position information. Multiband drawing machine as described in.   The multiband drawing machine according to claim 3, wherein the interpolation calculation is an interpolation calculation by linear approximation. Band drawing by moving the entire drawing pattern drawn by irradiation of the beam to the photosensitive material from the reference position in the first direction with respect to the light source that irradiates the beam, During the continuous band drawing, the movement of the base along the first direction to the reference position and the movement of the light source in the second direction intersecting with the first direction are performed a plurality of times. Is a drawing method applied to a multiband drawing machine obtained as a composition of partial drawing areas,
When the band drawing control for the first and second bands starts, the relative position of the light source along the first direction with respect to the reference position is stored as first and second measurement start position information measured in advance. And
Based on the stored first and second measurement start position information, estimation start that is a relative position of the light source along the first direction with respect to the reference position at the time of starting the band drawing control with respect to an arbitrary band Seeking location information,
A drawing method of a multiband drawing machine, wherein the drawing start position of the band in the band drawing control for each band is corrected based on the measurement start position information and the estimated start position information.   6. The drawing method of a multiband drawing machine according to claim 5, wherein the measurement start position information is based on measurement points for some of the bands.   The multiband drawing machine according to claim 6, wherein the drawing start position of the band at the time of drawing the band not corresponding to the measurement point is obtained by interpolation calculation based on the measurement measurement start position information. Drawing method. A beam irradiation head configured to be movable in a predetermined direction (X-axis direction) and configured to be movable from a reference position in a direction (Y-axis direction) orthogonal to the movement direction of the beam irradiation head. Applied to a multi-band drawing machine that is obtained as a result of combining partial drawing areas based on a band that is divided into a plurality of areas in the X-axis direction and extending in a band shape in the Y-axis direction. A drawing method,
A correction data file including the drawing start position coordinates of the band measured at a number of measurement points smaller than the number of bands based on the drawing result on the measurement photosensitive material drawn by the multiband drawing machine for correction. Read
When drawing a band corresponding to the measurement point, a value obtained by inverting the polarity of the Y coordinate value from the reference position at the measurement point in the correction data file by moving the table on the Y axis. , The Y coordinate value of the drawing start position of the band,
When drawing a band located between two adjacent measurement points,
C _Y = A _Y + ((B _Y −A _Y ) / (B _X −A _X )) · C _X
(However, each measurement point A of both sides of the band, B coordinates respectively _{(A X,} A _{Y), (B} X, and _{B Y))} calculated values of _{C Y} by calculation of a table by moving on the Y-axis, inverted value of the polarity of the C _Y, as the Y-coordinate value of the drawing start position of the band, carrying out the drawing,
A drawing method of a multi-band drawing machine characterized by the above.

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