CN116222975A - Digital auto-collimation detection system and method for conjugate position of single-light-path or multi-light-path optical system - Google Patents

Digital auto-collimation detection system and method for conjugate position of single-light-path or multi-light-path optical system Download PDF

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Publication number
CN116222975A
CN116222975A CN202310108621.0A CN202310108621A CN116222975A CN 116222975 A CN116222975 A CN 116222975A CN 202310108621 A CN202310108621 A CN 202310108621A CN 116222975 A CN116222975 A CN 116222975A
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China
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optical system
path
detection system
collimation
focusing
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张翌
马国顺
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Danyang Danyao Optical Co ltd
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Danyang Danyao Optical Co ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention provides an auto-collimation detection system and method for the conjugate position of a digital single-light-path or multi-light-path optical system. The specific embodiment flexibly sets the optical path layout of the optical system according to different applications under the condition of unchanged basic principle, has strong universality and is suitable for high-precision batch detection of the conjugate position of the optical system.

Description

Digital auto-collimation detection system and method for conjugate position of single-light-path or multi-light-path optical system
Technical Field
The invention belongs to the technical field of optical system detection, and particularly relates to an auto-collimation detection system and method for a conjugate position of a digital single-light-path or multi-light-path optical system.
Background
The optical system can be divided into an infinite conjugate distance optical system and a finite conjugate distance optical system according to different conjugate distances, and can be divided into an afocal optical system and a focal optical system according to whether a focal point exists, and for the focal finite or infinite conjugate distance optical system or a part of optical systems in the middle of some optical systems, the distance from the conjugate position to a mounting surface is an important index, whether object image positions of a front optical system and a rear optical system are accurately connected or not is related, and finally whether the imaging relation of the whole optical system meets the design requirement or not is related, and the imaging relation of the whole optical system can only be assembled into the whole optical system for inspection without a conventional high-precision detection method at present, so that the conjugate position deviation of the optical system can not be found in time.
Disclosure of Invention
In order to solve the problems, the invention discloses an auto-collimation detection system and an auto-collimation detection method for the conjugate position of a digital single-optical-path or multi-optical-path optical system, which have strong universality, can be used for setting matched interfaces and applicable embodiments according to different types of optical systems, can be used for detecting the conjugate position of the single-optical-path to single-optical-path or multi-optical-path optical systems, and have the advantages of various embodiments, wide application range, good detection repeatability and correspondingly improved precision along with the improvement of the precision of related components.
The technical idea of the technical scheme of the invention is as follows: the method comprises the steps that a reflector is arranged at the conjugate theoretical position of an optical system to be measured, an auto-collimation assembly is arranged at one side of the optical system to be measured, a collimation objective lens assembly provides a limited or infinite target to enter the optical system to be measured, if the conjugate position of the optical system to be measured coincides with a reflecting surface, light enters the optical system to be measured, the light is converged on the reflector after passing through the optical system to be measured, is received by the collimation objective lens assembly after being reflected by the reflector and collimated by the optical system to be measured, the light is finally converged on the target surface of an imaging receiving device of the auto-collimation assembly, a clear reticle image is displayed by a display, if the conjugate image position of the optical system deviates from the reflecting mirror surface, a blurred reticle image appears on a display screen of the auto-collimation assembly, the reticle image on the display screen can be clearly adjusted by adjusting the position of a focusing component in a detection system, in the adjusting process, the displacement change of the focusing component is detected by arranging a displacement detection device, and finally the distance from the unbiased position can be obtained.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
in a first aspect, the invention provides an auto-collimation detection system base component for a conjugate position of a digital single-optical-path or multi-optical-path optical system, which comprises an auto-collimation assembly, a collimation objective lens assembly, a displacement detection device, a reflector and a focusing mechanism; wherein, the liquid crystal display device comprises a liquid crystal display device,
the auto-collimation assembly comprises:
a beam splitter;
the reticle is arranged on one side of the spectroscope;
a light source arranged at one side of the dividing plate;
the imaging receiving device is electrically connected with the display and is arranged on one side of the spectroscope, and the target surface of the imaging receiving device and the dividing surface of the dividing plate are symmetrical relative to the light splitting surface of the spectroscope;
a collimator objective assembly:
the device is arranged between the optical system to be tested and the spectroscope, and the collimating objective lens component, the optical system to be tested, the spectroscope, the imaging receiving device and the reticle optical axis are aligned;
a reflector, the reflecting surface of which is positioned at the conjugate position of a limited-distance or infinite-distance target of the optical system to be measured;
and the focusing mechanism is connected with the focusing component and is matched with the displacement detection device for use, and the displacement change of the focusing component is detected in real time.
As a preferred embodiment of the invention, the reticle's reticle face and the imaging receiving device's target face are located at the focal plane of a collimator objective assembly.
As a preferred embodiment of the invention, the collimator objective assembly provides a finite or infinite target for the optical system to be tested.
As a preferred embodiment of the invention, any structure of the collimating objective lens component, the optical system to be detected, the reflecting mirror and the auto-collimation component can be used as a focusing component and is connected with the focusing mechanism.
As a preferred embodiment of the present invention, the display displays an image of the reticle imaged by the reticle passing through the optical system to be measured, and the image of the reticle on the display is the sharpest when the reflecting surface of the reflecting mirror is located at the conjugate position of the limited-distance or infinite-distance target of the optical system to be measured.
In a second aspect, the present invention provides a detection method of an auto-collimation detection system for a conjugate position of a digital single-optical-path or multi-optical-path optical system, which is characterized by comprising the following steps:
step S: establishing a reference detection system
Designing a reference cylinder according to the characteristics of the optical system to be tested, arranging the reflecting surface of the reflecting mirror at the theoretical conjugate position of the optical system to be tested, and calibrating the optical system to be tested through a standard autocollimator to serve as a reference detection system;
step S: calibration detection system
The reference detection system is arranged on the detection system, the focusing mechanism is used for carrying out system focusing on the focusing component until clear reticle images appear on the display screen, the displacement detection device is reset to zero, and the reference detection system is dismounted;
step S: detecting conjugate position deviation
And installing the optical system to be tested on the detection system, and carrying out systematic focusing on the focusing component through the focusing mechanism until a clear reticle image appears on the display screen, wherein the reading of the displacement detection device is the conjugate position deviation with the standard value.
Compared with the prior art, the invention has the beneficial effects that:
the precision of the detection system is related to the focusing precision of the focusing mechanism and the detection precision of the displacement detection device, and the higher the focusing precision of the focusing mechanism is, the higher the detection precision of the displacement detection device is, and the precision of the detection system is correspondingly improved.
According to the invention, through the combination of the reticle, the spectroscope, the collimating objective lens, the imaging receiving device, the reflector, the displacement detecting device, the light source and the focusing mechanism, the position of one of the relevant components in the detecting system is adjustable according to the characteristics of the optical system to be detected, the displacement change of the adjustable component is detected, the deviation of the conjugated position of the optical system to be detected relative to the conjugated position of the calibrated optical system is compared, the accurate measurement from a single light path to the conjugated position of the optical system with a single light path or multiple light paths can be realized, the measuring precision can be gradually improved according to the quality of key components, the universality is strong, and the method is suitable for high-precision batch detection of the conjugated position of the optical system.
Drawings
FIG. 1 is a schematic diagram of embodiment 1 of the present invention;
FIG. 2 is a schematic diagram of embodiment 2 of the present invention;
FIG. 3 is a schematic view of a reference cylinder 2 of the present invention;
FIG. 4 is a schematic view of the inventive zithrone mirror;
FIG. 5 is a schematic diagram of a focus-locked host according to the present invention;
FIG. 6 is a schematic diagram of the overall structure of the detection system of the present invention.
In the figure:
1-a focus-locked host; 2-a reference cylinder 2; 301-a collimator objective lens I; 302-a second collimating objective lens; 4-dial gauge; 5-focusing mechanism; 51-focusing handwheels; 52-focusing bracket; 6-a light source; 7-a reticle; 8-spectroscope; 9-a reflector; 10-a display; 11-CCD; 13-autocollimator.
Detailed Description
For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application.
Referring to fig. 1-6, the invention provides an auto-collimation detection system for the conjugate position of a digital single-optical-path or multi-optical-path optical system, which comprises an auto-collimation assembly, a collimation objective lens assembly, a CCD, a reflector and a focusing mechanism; wherein, the liquid crystal display device comprises a liquid crystal display device,
the auto-collimation assembly comprises:
a spectroscope 8;
a reticle 7 provided on one side of the spectroscope 8;
a light source 6 provided on one side of the reticle;
a CCD11 electrically connected to the display 10 and provided on one side of the beam splitter 8, wherein a target surface 11a and a dividing surface 7a of the reticle are symmetrical with respect to the dividing surface 8a of the beam splitter 8;
a collimator objective assembly: the system comprises at least one collimating objective, generally divided into a first collimating objective 301 and a second collimating objective 302, wherein 1 collimating objective or 2 collimating objectives are selected in the example, the collimating objectives are arranged between an optical system to be tested and a spectroscope 8, and the collimating objective component, the optical system to be tested, the spectroscope, an imaging receiving device and a reticle are aligned in optical axes;
a reflecting mirror 9, the reflecting surface 9a of which is positioned at the conjugate position of a limited-distance or infinite-distance target of the optical system to be measured;
and the focusing mechanism 5 is connected with the focusing component and is matched with the CCD4 for use, and displacement change of the focusing component is detected in real time.
As an example, the reticle facet and the CCD target facet are located at the focal plane of a collimator objective assembly.
It should be noted that the collimator objective assembly provides a finite or infinite target for the optical system to be measured.
As a further optimization scheme of the invention, any structure of the collimating objective lens component, the optical system to be detected, the reflecting mirror and the auto-collimation component can be used as a focusing adjustable component to be connected with a focusing mechanism.
Specifically, the display displays an image formed by the reticle passing through the optical system to be measured, and the reticle image on the display is the clearest when the reflecting surface of the reflecting mirror is positioned at the conjugate position of the limited-distance or infinite-distance target of the optical system to be measured.
Based on the detection system, the invention provides a detection method of an auto-collimation detection system of a conjugate position of a digital single-optical-path or multi-optical-path optical system, which is characterized by comprising the following steps:
step S: establishing a reference detection system
Designing a special lens barrel of a reflector according to the characteristics of the optical system to be tested, arranging a reflecting surface of the reflector at a theoretical conjugate position of the optical system to be tested, and calibrating the optical system to be tested through a standard autocollimator to serve as a reference detection system;
step S: calibration detection system
The reference detection system is arranged on the detection system, the focusing mechanism is used for carrying out system focusing on the focusing component until clear reticle images appear on the display screen, the displacement detection device is reset to zero, and the reference detection system is dismounted;
step S: detecting conjugate position deviation
And installing the optical system to be tested on the detection system, and carrying out systematic focusing on the focusing component through the focusing mechanism until a clear reticle image appears on the display screen, wherein the reading of the displacement detection device is the conjugate position deviation with the standard value.
The specific structural relation of the structure is as follows:
the dividing plane 7a of the dividing plate 7 and the target plane 11a of the CCD11 are symmetrical relative to the light splitting plane 8a of the spectroscope 8, the light source 6 irradiates the dividing plate on one side of the dividing plate 7, the CCD is connected with the display 10 through wires, the collimating object lens is aligned to the spectroscope, the dividing plane of the dividing plate and the target plane of the CCD are positioned at the focal plane of the collimating object lens, whether the collimating object lens II is arranged or not depends on the conjugate distance of an optical system to be detected, if the conjugate distance of the optical system to be detected is limited, the collimating object lens II is arranged on one side of the collimating object lens I, the optical system to be detected is aligned to the optical axis of the collimating object lens II, the rear focal plane of the collimating object lens II coincides with the object side conjugate position or the image side conjugate position of the optical system to be detected, and the reflecting plane of the reflecting mirror is positioned at the image side conjugate position or the image side conjugate position of the object side of the optical system to be detected; if the conjugate distance of the optical system to be measured is infinitely far and the conjugate position is limited far, the second collimating objective lens is not arranged, the optical system to be measured is positioned on one side of the first collimating objective lens, the optical axes of the two optical systems are aligned, the infinity object side or the infinity image side of the optical system to be measured faces the first collimating objective lens, and the reflecting surface of the reflecting mirror is positioned at the limited far conjugate position of the optical system to be measured. One of the first collimating objective, the second collimating objective, the optical system to be measured and the reflective mirror can be provided with an adjustable position, the focusing mechanism 5 is an adjustable component comprising a focusing hand wheel 51 and a focusing bracket 52, and the dial indicator 4 detects displacement changes of the focusing mechanism in real time, so that the displacement changes of the adjustable component are detected in real time.
The detection principle of the detection system is mainly as follows:
the light source 6 is powered on to irradiate the reticle 7, emits divergent light from a reticle 7a of the reticle 7, reflects the light after passing through a beam splitting surface 8a of the beam splitter 8, emits parallel light after being collimated by the first collimating objective lens 301, if the second collimating objective lens 302 is arranged, the parallel light enters the second collimating objective lens 302 and then is converged at an object space conjugate position or an image space conjugate position of the optical system to be detected, the optical system to be detected receives the light and then converges the light on a reflecting surface of the reflecting mirror 9 placed at the object space conjugate position or the image space conjugate position of the optical system to be detected, the light enters the optical system to be detected after being reflected by the reflecting surface 9a, and enters the second collimating objective lens 302 after being converged by the optical system to be detected, the light exits the parallel light after passing through the second collimating objective lens 302, and the parallel light enters the first collimating objective lens 301 and then is converged on a target surface 11a of the CCD11 through the beam splitter 8, and the image of the reticle 7 is seen on the display 10; if the second collimator lens 302 is not provided, the parallel light emitted from the first collimator lens 301 enters the optical system to be measured, the light is collimated and converged on the reflecting surface of the reflector 9 by the optical system to be measured, the parallel light is emitted after being reflected by the reflecting surface and collimated by the optical system to be measured, the parallel light enters the first collimator lens 301 and is converged on the target surface of the CCD11 through the spectroscope 8, and the image of the reticle 7 is seen on the display 10.
According to the detection system and the detection method, the following four embodiments of the present invention may be preferably implemented:
example 1
Referring to fig. 1, the optical system to be measured is used as a focusing component, and a collimator objective lens is installed, and the detection method of the optical system to be measured corresponding to an infinity object in this example is as follows:
the detection system is matched with the installation surface of the optical system to be detected, and the distance between the reflector reflecting surface 21 of the parfocal reflector and the installation surface 18 is the nominal value from the conjugate image surface of the infinity target of the optical system to be detected to the installation surface, which is accurately measured.
Example 1 detection method:
the first step: according to the above arrangement, the standard self-aligning front mirror is used for aligning the reference cylinder 2 provided with the focusing mirror and the optical system to be tested with the system, the light path principle is that a beam of light emitted from the reticle of the self-aligning front mirror is reflected by the spectroscope and collimated by the front mirror objective lens, then the parallel light enters the system to be tested, is projected on the reflecting mirror surface 21 after being collimated by the system to be tested, the light enters the eyepiece or the imaging receiving device after being reflected by the reflecting surface, collimated by the system to be tested and collimated by the front mirror objective lens, if the reticle image observed from the eyepiece or on the display is not clear, the axial position of the lens in the system to be tested is regulated, and then the lens position is fixed as the reference detection system after being regulated to the clearest.
And a second step of: the reference detection system is arranged in the detection system, the light path principle is that the light source 6 irradiates the reticle 7, a beam of light emitted by the reticle 7 enters the reference detection system after being reflected by the light splitting surface 8a of the spectroscope 8 and collimated by the collimating objective lens 301, the beam of light is projected on the reflecting mirror 9 after being collimated by the reference detection system, the beam of light enters the CCD11 after being reflected by the reflecting surface 9a of the reflecting mirror 9, collimated by the reference detection system and collimated by the collimating objective lens 301, if the image of the reticle 7 seen from the display 10 is not clear, the focusing of the reference detection system is controlled by the focusing mechanism 5 until the image of the reticle 7 is clear, at the moment, the micrometer gauge 4 is zeroed, and the reference detection system is removed.
Referring to the reference cylinder 2 and the reflector 9 of fig. 3 and 4, the reference cylinder 2 comprises an imaging component 14 of an optical system to be tested, a dovetail interface 15 and a main cylinder 16, wherein the imaging component 14 of the optical system to be tested is screwed into the main cylinder 16, and the dovetail interface 15 is fixed on the main cylinder 16 through screws. The distance between the reflecting mirror surface 21 and the connecting and positioning surface of the focusing reflecting mirror 9 is a standard value of the conjugate distance of the optical system to be measured; the connecting and positioning surface 18 is contacted with the end surface 17 of the main cylinder, a rectangular groove 19 and a rubber ring 20 are arranged at the contact position of the end surface 17, the contact compactness is increased, and the key point of the reference cylinder 2 is to adjust the focal plane of the imaging component of the optical system to be measured to coincide with the reflecting surface a of the reflecting mirror 9. Taking the reference cylinder 2 as a reference; during detection, the reference cylinder 2 is arranged on the focusing host 1, the focusing reflector 9 is inserted on the reference cylinder 2, the image on the display 10 is adjusted to be the clearest through the focusing mechanism 5, the focusing mechanism 5 comprises a focusing hand wheel 51 and an adjusting bracket 52, the focusing hand wheel 51 on the focusing bracket 52 controls the reference detection system to move up and down to enable the clear image of the reticle 7 to appear on the display, at the moment, the dial indicator 4 is zeroed, the reference cylinder 2 is dismounted, the optical system to be detected is arranged on the focusing host 1, the image of the display 10 is adjusted to be the clearest through the focusing mechanism 5, and then the reading on the dial indicator 4 is checked, wherein the reading is the deviation from a theoretical value.
Example 2
Referring to fig. 2, the optical system to be measured is taken as a focusing component, two collimating objectives are set, and the setting and detecting method of the system to be measured corresponding to the limited far target in this example is as follows:
example 2 set up: the first collimating objective 301 is fixed relative to the beam splitter 8 along the optical axis direction, the dividing plane 7a of the dividing plate 7 and the target plane 11a of the imaging receiving device 11 are positioned on the focal plane of the first collimating objective 301, that is, parallel light is emitted from the first collimating objective 301, the optical system to be measured is positioned at one side of the first collimating objective 301 and aligned with the optical axis of the first collimating objective 301, the second collimating objective 302 is positioned between the first collimating objective 301 and the optical system to be measured, and the back focal plane of the second collimating objective coincides with the object space or image space object of the optical system to be measured; the focusing mechanism 5 is connected with the optical system to be measured, the dial indicator 4 detects the displacement change of the focusing mechanism 5 or the extending mechanism thereof, and further detects the displacement change of the optical system to be measured, and the reflector 9 is fixed near the focal plane of the optical system to be measured and is separated from the optical system to be measured.
Example 2 detection method:
the first step: according to the second embodiment, the reference cylinder sets a limited far target interface according to the theoretical value of the optical system to be measured, the second collimating objective 302 is installed on the interface, the focal plane of the second collimating objective 302 coincides with the theoretical limited far target of the optical system to be measured, and the reflector is placed at the conjugate position of the theoretical limited far target of the optical system to be measured; the combination is calibrated under a standard auto-collimation front lens by adjusting the axial position of a lens in an optical system to be measured, so that the lens position is fixed as a reference detection system after imaging is clearest.
And a second step of: according to the second embodiment, the reference detection system with the second collimating objective 302 is installed in the detection system, the schematic diagram is shown in fig. 2, the light path principle is that the light source 6 irradiates the reticle 7, a beam of light emitted by the reticle 7 enters the reference detection system after being reflected by the spectroscope 8 and collimated by the first collimating objective 301, the beam of light enters the reference detection system after being collimated by the collimating objective 302 in the reference detection system and then converged on the reflecting mirror 9 after passing through the corrected optical system, the light enters the CCD11 after being reflected by the reflecting surface 9a of the reflecting mirror 9, collimated by the first collimating objective 301, and if the image of the reticle 7 seen from the display 10 is unclear, the focusing mechanism 5 controls the reference detection system to focus until the image of the reticle 7 is clearest, at this time, the displacement detection device 4 is zeroed, and the reference detection system is removed.
And a third step of: the combination of the optical system to be tested and the corrected collimating objective lens two 302 is installed in the detection system, the optical path principle is the same as that of the second step, if the image of the reticle 7 seen in the display 10 is unclear, the focusing mechanism 5 is used for controlling the optical system to be tested to focus until the image of the reticle 7 is the clearest, and the reading of the dial indicator 4 is read at this time, namely the deviation of the position of the conjugate image of the limited far target of the optical system to be tested and the nominal position.
Example 3
The setting and detecting method for using the reflector as the adjustable component comprises the following steps:
example 3 set up: unlike in embodiment 1, the focus mechanism 5 is connected to the mirror 9, and the dial gauge 4 detects a change in displacement of the focus mechanism 5 or an extension mechanism thereof, and further detects a change in displacement of the mirror 9.
Example 3 detection method:
the first step: the same as in example 1;
and a second step of: according to the third embodiment, the reference detection system is installed in the detection system, the light path principle is that the light source 6 irradiates the reticle 7, a beam of light emitted by the reticle 7 enters the reference detection system after being reflected by the spectroscope 8 and collimated by the collimating objective lens 301, and is converged on the reflecting mirror 9 after being collimated by the reference detection system, the light enters the CCD11 after being reflected by the reflecting surface 9a of the reflecting mirror 9, collimated by the reference detection system and collimated by the collimating objective lens 301, and if the image of the reticle 7 seen from the display 10 is not clear, the reflecting mirror 9 is controlled to focus by the focusing mechanism 5 until the image of the reticle 7 is clear, and at the moment, the dial indicator 4 is zeroed, and the reference detection system is removed.
And a third step of: and (3) installing the optical system to be tested in a detection system, wherein the optical path principle is the same as that of the second step, if the image of the reticle 7 seen in the display 10 is unclear, controlling the reflector 9 to focus through the focusing mechanism 5 until the image of the reticle 7 is the clearest, and reading the reading of the dial indicator 4 at the moment to obtain the deviation between the position of the conjugate image of the infinity target of the optical system to be tested and the nominal position.
Example 4
The setting and detecting method for taking the auto-collimation component as the adjustable component comprises the following steps:
example 4 set up: the light source 6, the reticle 7, the spectroscope 8 and the CCD11 form an auto-collimation combination, the first collimating objective 301 is aligned with the spectroscope 8, the reticle 7a of the reticle 7 and the target surface 11a of the CCD11 are located near the focal plane of the first collimating objective 301, the focusing mechanism 5 is connected with the auto-collimation combination, the dial indicator 4 detects displacement changes of the focusing mechanism 5 or an extending mechanism thereof, further detects displacement changes of the auto-collimation combination, the optical system to be detected is located on one side of the first collimating objective 301 and aligned with the optical axis of the first collimating objective 301, focal lengths of the first collimating objective and the second collimating objective are identical, optical magnification of 1 time is formed, and the reflecting mirror 9 is fixed at a nominal conjugation position of the optical system to be detected through the reference cylinder 2, namely, the displacement changes of the auto-collimation combination detected by the dial indicator 4 are equivalent to displacement changes of the same conjugation position of the optical system to be detected.
Example 4 detection method:
the first step: according to the fourth embodiment, the reference cylinder 2 provided with the reflector 9 is installed on the installation surface of an optical system to be tested, a standard self-alignment front mirror is used for aligning the optical system to be tested, the light path principle is that a beam of light emitted from the self-alignment front mirror reticle is reflected by the spectroscope and collimated by the front mirror objective lens, then the parallel light enters the optical system to be tested, the light is converged on the reflector after being collimated by the optical system to be tested, the light is reflected by the reflecting surface, collimated by the optical system to be tested and collimated by the front mirror objective lens and then enters the eyepiece or the imaging receiving device, if the reticle image on the eyepiece or the display is not clear, the axial position of a lens in the optical system to be tested is regulated, and then the lens position point glue is fixed as the reference detection system after the lens position point glue is regulated to be the clearest.
And a second step of: according to the fourth embodiment, the reference detection system is installed in the detection system, the light path principle is that the light source 6 irradiates the reticle 7, a beam of light emitted by the reticle 7 enters the reference detection system after being reflected by the beam splitter 8 and collimated by the collimating objective lens 301, the beam of light is converged on the reflecting mirror 9 after being collimated by the reference detection system, the beam of light enters the imaging receiving device 11 after being reflected by the reflecting surface 9a of the reflecting mirror 9, collimated by the reference detection system and collimated by the collimating objective lens 301, and if an image of the reticle 7 seen from the display 10 is unclear, the auto-collimation combination is controlled by the focusing mechanism 5 until the image of the reticle 7 is the clearest, at this time, the displacement detection device 4 is zeroed, and the reference detection system is removed.
And a third step of: the optical system to be measured is installed in the detection system, the optical path principle is the same as that of the second step, if the image of the reticle 7 seen in the display 10 is unclear, the auto-collimation combined focusing is controlled by the focusing mechanism 5 until the image of the reticle 7 is the clearest, and at this time, the reading of the displacement detection device 4 is read, namely, the deviation of the position of the conjugate image of the infinity target of the optical system to be measured and the nominal position is obtained.
The detection system comprises the second collimator lens 302, and the basic setting method is according to claim one, wherein the auto-collimation combination, the first collimator lens 301, the second collimator lens 302, the optical system to be detected and the reflective mirror 9 can select one of them as an adjustable component according to the characteristics of the optical system to be detected, the focusing mechanism 5 is connected with the adjustable component, the displacement detection device 4 detects the displacement change of the focusing mechanism 5 or the extension mechanism thereof, and further detects the displacement change of the adjustable component, and the detection method is the same as that when the second collimator lens 302 is not used.
While embodiments of the invention have been shown and described, it will be apparent that many modifications and variations are possible in light of the above teachings. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best understand and utilize the invention. The invention is limited only by the claims and the full scope and equivalents thereof.

Claims (6)

1. An auto-collimation detection system for the conjugate position of a digital single-optical-path or multi-optical-path optical system is characterized in that: the detection system comprises an auto-collimation assembly, a collimation objective lens assembly, a displacement detection device, a reflector and a focusing mechanism; wherein, the liquid crystal display device comprises a liquid crystal display device,
the auto-collimation assembly comprises:
a beam splitter;
the reticle is arranged on one side of the spectroscope;
a light source arranged at one side of the dividing plate;
the imaging receiving device is electrically connected with the display and is arranged on one side of the spectroscope, and the target surface of the imaging receiving device and the dividing surface of the dividing plate are symmetrical relative to the light splitting surface of the spectroscope;
a collimator objective assembly:
the device is arranged between the optical system to be tested and the spectroscope, and the collimating objective lens component, the optical system to be tested, the spectroscope, the imaging receiving device and the reticle optical axis are aligned;
a reflector, the reflecting surface of which is positioned at the conjugate position of a limited-distance or infinite-distance target of the optical system to be measured;
and the focusing mechanism is connected with the focusing component and is matched with the displacement detection device for use, and the displacement change of the focusing component is detected in real time.
2. The digital single-light-path or multi-light-path system conjugate position auto-collimation detection system according to claim 1, wherein: the reticle facet and the imaging receiver target facet are located at the focal plane of the collimator objective assembly.
3. The digital single-path or multi-path system conjugate position auto-collimation detection system of claim 2, wherein: the collimating objective lens component provides a limited or infinite target for an optical system to be measured.
4. A digital single-path or multi-path system conjugate position auto-collimation detection system as claimed in claim 3, wherein: any structure of the collimating objective lens component, the optical system to be detected, the reflecting mirror and the auto-collimation component can be arranged as a focusing component and is connected with the focusing mechanism.
5. The system for auto-collimation detection of conjugate position of digital single-path or multi-path optical system according to claim 4, wherein: the display displays an image formed by the reticle passing through the optical system to be detected, and the reticle image on the display is the clearest when the reflecting surface of the reflecting mirror is positioned at the conjugate position of the limited-distance or infinite-distance target of the optical system to be detected.
6. A method of detecting an auto-collimation detection system for a conjugate position of a digital single-path or multi-path optical system as claimed in claim 1, comprising the steps of:
step S: establishing a reference detection system
Designing a reference cylinder according to the characteristics of the optical system to be tested, arranging the reflecting surface of the reflector at the theoretical conjugate position of the optical system to be tested, and calibrating the optical system to be tested through a standard autocollimator to serve as a reference detection system;
step S: calibration detection system
The reference detection system is arranged on the detection system, the focusing mechanism is used for carrying out system focusing on the focusing component until clear reticle images appear on the display screen, the displacement detection device is reset to zero, and the reference detection system is dismounted;
step S: detecting conjugate position deviation
And installing the optical system to be tested on the detection system, and carrying out systematic focusing on the focusing component through the focusing mechanism until a clear reticle image appears on the display screen, wherein the reading of the displacement detection device is the conjugate position deviation with the standard value.
CN202310108621.0A 2023-02-14 2023-02-14 Digital auto-collimation detection system and method for conjugate position of single-light-path or multi-light-path optical system Pending CN116222975A (en)

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CN202310108621.0A CN116222975A (en) 2023-02-14 2023-02-14 Digital auto-collimation detection system and method for conjugate position of single-light-path or multi-light-path optical system

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