CN116222437A - Straightness interferometry device with parallel beam polarizing element - Google Patents
Straightness interferometry device with parallel beam polarizing element Download PDFInfo
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- CN116222437A CN116222437A CN202310349143.2A CN202310349143A CN116222437A CN 116222437 A CN116222437 A CN 116222437A CN 202310349143 A CN202310349143 A CN 202310349143A CN 116222437 A CN116222437 A CN 116222437A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
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Abstract
The present disclosure provides a straightness interferometry device having a parallel-beam polarizing element, comprising: the interferometer host system comprises a laser emission optical system and a detection receiving unit, wherein the laser emission optical system emits a measuring beam, and the detection receiving unit analyzes an interference signal; the measuring beam is divided into two beams of light with orthogonal polarization after passing through the double Wollaston prism; a double-sided right-angle ridge reflector, wherein two beams of light with orthogonal polarization are reflected by the double-sided right-angle ridge reflector and then return to the detection receiving unit; and the parallel beam polarizing element is used for dividing the emitted measuring beam into two beams of light with orthogonal polarization after passing through the parallel beam polarizing element and then passing through the double Wollaston prism. According to the method and the device, the measurement accuracy of the straightness interferometry device can be remarkably improved, and the problem that the existing straightness interferometry device has a measurement blind area can be solved.
Description
The present application is a divisional application of patent application with application number 202011564821X, which is a linearity interferometry device insensitive to incident angle, and with application number 2020, 12 and 25.
Technical Field
The present disclosure relates generally to straightness interferometry devices, and more particularly to straightness interferometry devices with parallel beam polarizing elements.
Background
Uk patent 1409339 discloses a straightness interferometry device in which a single wollaston prism is used to split a laser beam in the direction of the optical axis into two beams of laser light with orthogonal directions of vibration. The beam directions of the two laser beams are approximately symmetrical about the main optical axis, and the two laser beams are transmitted to the double-sided mirror to be reflected and returned to the original path, are recombined into one beam at the Wollaston prism, and are returned to the system along the main optical axis. The angle of the double-sided reflecting mirror is matched with the beam splitting angle of the Wollaston prism. The system has obvious defects that firstly, the original path of the light beam returns, the laser frequency stabilization unbalance is easily caused, and the laser stability is reduced; secondly, as the beam splitting angle of the interference mirror is smaller, the light spot has a certain size and a measurement blind area with a certain distance, and the normal measurement function can be realized only by avoiding the distance of the double-sided reflecting mirror; thirdly, the single Wollaston prism is sensitive to the incident angle, the beam splitting angles of the light beams with different incident angles after passing through the Wollaston prism have angle difference, so that the slope error of straightness measurement is larger, and because in practical application, naked eyes judge whether the light beams are always incident normally or not, especially when the straightness interferometer is applied to straightness measurement, the incident angles when the interferometer mirrors are respectively arranged on two vertical axes inevitably have difference, under the condition, the slope error of different incident angles can be obviously reflected on the straightness measurement data, the straightness measurement error is obviously enlarged, and even the measurement data is unreliable; fourth, in the form of a single wollaston prism, since the beam splitting angle is sensitive to the incident angle, the beam alignment becomes difficult, and the full signal measurement can be realized only in a small incident angle range.
Another approach to straightness interferometry has been proposed in one of the patents to rani, uk, using Rochon prisms to achieve a small angle separation of orthogonal beams, where O light propagates axially and e light propagates off-axis at a small angle. The two beams of light are translated for a certain distance through the roof mirror and then returned in parallel, one beam of light is recombined at the Rochon prism, interference fringes are formed by the two beams of returned light, and the relative motion condition of the two beams of light can be obtained by detecting the interference fringe information, so that the straightness information of the guide rail is obtained. The beam splitter used in this solution is easier to manufacture and therefore less costly to manufacture. In addition, because there is a constant beam, only one deflection angle needs to be controlled, which greatly reduces the beam alignment difficulty. However, this solution also has the same problems as the above solution, namely that there is a dead zone of measurement and sensitivity to the angle of the incident beam. The patent also mentions that two kinds of schemes of getting rid of the blind area have all adopted the form of speculum, although have increased the shearing distance of two bundles of light, have solved the blind area and have measured the problem, but the beam splitting angle of this kind of structure is closely related with the regulation of speculum, and is more sensitive to the angle of incident light beam, can lead to slope measuring's unstability equally. Affecting the application in verticality measurement.
In summary, the prior art has the following drawbacks:
1. the prior straightness interferometry device is sensitive to the incident angle of an interference mirror. The existing interference lens of the straightness lens group is sensitive to the incident angle, the beam splitting angle of the interference lens can be changed greatly due to the small-range change of the incident angle, the straightness gradient measured by different incident angles is large in difference, the straightness measurement repeatability is difficult to ensure, the gradient can be removed during straightness measurement, the difference of the gradient can be directly reflected on the perpendicularity measurement error when the interference lens is applied to perpendicularity measurement, the perpendicularity measurement error is increased, and the data reliability is reduced.
2. The existing straightness interferometry device has the problem of measurement blind areas. Since the beam splitting angle of the interference lens of the straightness lens group is generally within 1.5 degrees, and the light spot of the output laser is generally larger than 5mm, the beam of the previous section of the laser beam is inevitably overlapped in a large part under the small beam splitting angle, the two beams are difficult to be completely distinguished, the laser interference signal in the distance is weaker or the signal is lost, the measuring error is larger or the measuring error can not be measured, and therefore the distance is also defined as a blind area.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a straightness interferometry device insensitive to incident angles.
The invention provides a straightness interferometry device insensitive to an incident angle, which comprises an interferometer host system, a double Wollaston prism, a double-sided right-angle ridge reflector and a detection receiving unit, wherein the interferometer host system comprises a laser emission optical system, the laser emission optical system emits a measuring beam, the measuring beam is divided into two beams of light with orthogonal polarization after passing through the double Wollaston prism, the two beams of light are reflected by the double-sided right-angle ridge reflector and then returned to the detection receiving unit for interference signal analysis, relative distance information is obtained, and the relative distance information of different points on a linear guide rail is obtained by moving the double Wollaston prism, so that the straightness error of the linear guide rail is finally calculated.
As a further development of the invention, the detection receiving unit is built into the interferometer host system.
As a further improvement of the invention, the detection receiving unit adopts a four-channel detection system.
As a further improvement of the invention, the straightness interferometry device also comprises an X-axis guide rail and an optical right angle ruler, wherein the double Wollaston prism is arranged on the X-axis guide rail, a measuring beam is divided into two beams of light with orthogonal polarization after passing through the double Wollaston prism, and the two beams of light are injected into the double-sided right angle ridge reflector through the optical right angle ruler, so that the straightness measurement device is prominently applied to high-precision straightness measurement.
As a further improvement of the invention, the straightness interferometry device also comprises a Y-axis guide rail and an optical right angle ruler, wherein the double Wollaston prism is arranged on the Y-axis guide rail, a measuring beam firstly passes through the optical right angle ruler, then passes through the double Wollaston prism and is divided into two beams of light with orthogonal polarization, and then the two beams of light are reflected by the double-sided right angle roof mirror, so that the straightness interferometry device is prominently applied to high-precision verticality measurement.
As a further improvement of the present invention, the straightness interferometry device further includes a parallel beam polarizing element with adjustable shearing difference, and the measuring beam passes through the parallel beam polarizing element first, and then passes through the double wollaston prism to be split into two beams of light with orthogonal polarization.
As a further improvement of the invention, the parallel beam polarizing element is composed of two standard wollaston prisms with the same structural angle.
The beneficial effects of the invention are as follows: the double Wollaston prism is adopted as the straightness interference mirror, so that insensitivity of the incident light angle can be realized, particularly, the measurement accuracy can be remarkably improved in the perpendicularity measurement application, meanwhile, the beam alignment difficulty is reduced, and the dimming efficiency is improved; the parallel light beam polarizing element with adjustable shearing difference is designed to realize parallel output of two beams of orthogonal polarized light beams and the shearing distance of the two beams of light is adjustable, so that the problem that the traditional straightness interferometry device has a measurement blind area is solved.
Drawings
FIG. 1 is a schematic diagram of a straightness interferometry apparatus insensitive to angle of incidence of the present invention.
FIG. 2 is a three-dimensional beam path diagram of a straightness measurement mirror set of a straightness interferometry device insensitive to angle of incidence of the present invention.
Fig. 3 is a simplified schematic diagram of a detection receiving unit of a straightness interferometry device insensitive to incident angle of the present invention.
Fig. 4 is a graph of the change in beam incidence angle for a double wollaston prism and a standard wollaston prism.
FIG. 5 is an embodiment of the perpendicularity measurement of a straightness interferometry device insensitive to angle of incidence of the present invention.
FIG. 6 is another embodiment of the perpendicularity measurement of a straightness interferometry device insensitive to angle of incidence of the present invention.
FIG. 7 is a schematic diagram of one embodiment of a dead zone removal system for a linear interferometry device insensitive to angle of incidence.
Detailed Description
The invention is further described with reference to the following description of the drawings and detailed description.
As shown in fig. 1 to 7, a linearity interferometry device insensitive to incident angle mainly includes an interferometer host system 1, a double wollaston prism 2, and a double-sided right angle roof mirror 3. The interferometer host system 1 emits measuring light beams, the measuring light beams are divided into two beams of light beams with orthogonal polarization after passing through the double Wollaston prism 2, the two beams of light beams are reflected by the double-sided right-angle ridge reflector 3 and then return to the detection receiving unit 4 in the interferometer host system 1 for interference signal analysis, and relative distance information is obtained. And (3) obtaining the relative distance information of different points on the linear guide rail by moving the double Wollaston prisms, and finally calculating the straightness error of the linear guide rail.
The detection receiving unit 4 is built in the interferometer host system 1, and is composed of a depolarization beam splitter prism (NPBS), two Polarization Beam Splitters (PBS) and a 1/4 wave plate. The retroreflected light passes through the NPBS and is split by the two PBSs into four channels of the detector, respectively.
Fig. 2 shows a three-dimensional beam path diagram of the straightness measuring mirror set, the beam is divided into two beams of light with small angles and orthogonal polarization after passing through the double Wollaston prism 2, the two beams of light are reversely propagated according to the direction of the original incident beam after downwards translating a certain distance through the double-sided right-angle roof mirror 3, and the beams of light are recombined into one beam of light at the double Wollaston prism 2 and return to the detection system. The return beam and the emergent beam are sheared, so that the influence on the frequency stability of the laser after the beam returns in the original path is avoided.
Fig. 3 shows a simple illustration of the detection unit 4 inside the optical system, and the laser beam moves down a distance after passing through the straightness lens group and returns to the detection unit 4 inside the optical system, and the detection unit adopts a four-channel detection system, so that the anti-interference capability of the measurement system can be improved, and the measurement accuracy of the system can be ensured.
Fig. 4 shows the curves of the double wollaston prism and standard wollaston prism for the angle of incidence of the light beam. The standard Wollaston prism is very sensitive to the incident angle of the light beam, the beam splitting angle can be changed sharply along with the change of the incident angle, while the beam splitting angle of the double Wollaston prism is obviously less sensitive to the incident angle, for example, the double Wollaston prism with the beam splitting angle of 1.5 degrees, and the fractional angle is only changed within 0.035 degrees under the change of the incident angle of +/-10 degrees. In practical use, we also verify that the beam splitting angle and the incident angle of the standard wollaston prism are very sensitive, and basically when the incident angle deviates by a fraction of degrees, the interference signal received by the detection system is very weak, and the requirement on beam alignment is very high. The beam splitting angle of the double Wollaston prism is insensitive to the incident angle, and when the incident angle exceeds 7 degrees, the detection system can still receive full signals. Meanwhile, the straightness slopes of different incidence angles are compared, the measurement straightness slopes of different incidence angles (0-7 degrees) are basically consistent when the double Wollaston prism is adopted, and the measurement straightness slopes of different incidence angles (0-1 degrees, 1 degree) are adopted when the standard Wollaston prism is adopted because the standard Wollaston prism is sensitive to the angles, and the beam angles deviate from the design values too much when exceeding 1 degree, so that the double-sided right angle roof mirror cannot be matched, the return light cannot be combined into one beam, and the interference signals are lost), so that the measurement straightness slopes are obviously different. This phenomenon is particularly significant when measuring perpendicularity.
The invention adopts the double Wollaston prism as the straightness interference mirror, can realize insensitive incident light angle, particularly can obviously improve measurement accuracy in verticality measurement application, reduces beam alignment difficulty and improves dimming efficiency.
Fig. 5 and 6 show an embodiment of the measurement of the verticality of a two-axis guide rail, wherein the measurement of the verticality is realized by adopting an optical square 5 and a two-dimensional guide rail in combination with a straightness interferometer system.
Fig. 5 shows the straightness measurement of the straightness reference axis, in which the optical system 1, the optical square 5 and the double-sided right-angle ridge mirror 3 are adjusted according to the positions shown in the drawing, the double wollaston prism 2 is placed on the X-direction guide rail 6 and moves along the X-direction, the optical path is continuously adjusted, so that the double wollaston prism 2 can keep the interference signal full grid at any position on the X-direction guide rail 6, and the straightness slope of the X-axis is obtained by stepping measurement (the optical path is adjusted as much as possible so that the output beam is parallel to the X-axis, and the straightness measurement slope of the X-axis is reduced), thereby being used as the straightness slope reference of the Y-axis.
Fig. 6 shows a straightness measuring system for a Y-direction rail 7 perpendicular to the X-direction. On the basis of fig. 5, the positions of the optical system 1, the optical square 5 and the double-sided right angle ridge reflecting mirror 3 are kept unchanged, no adjustment is needed, the double-Wollaston prism 2 is only placed on the Y-direction guide rail 7, the light beam normal incidence double-Wollaston prism 2 is judged by naked eyes, then the straightness slope error of the Y axis is obtained through stepping measurement, and the straightness error of the XY double-axis guide rail can be obtained through comparison of the straightness error of the Y axis and the straightness deviation of the optical square. When the straightness measurement is carried out, the straightness interference mirrors are required to be respectively placed on the two orthogonal guide rails to carry out the straightness measurement of the two axes, when the straightness interference mirrors are placed on the two axes, the angles of incident light entering the interference mirrors for two times are difficult to be consistent, the straightness interference mirrors are required to have certain tolerance or to be less sensitive (at least less sensitive in a small angle range (1 DEG)), otherwise, the results of unreliable straightness of the reference axes and even unreliable final straightness measurement can be generated. For example, when the standard single wollaston prism is used as the straightness interference mirror, as the standard single wollaston prism is very sensitive to the incident angle, the deviation of the straightness slopes measured by different angles incident in a small angle range (within 1 °), when the standard single wollaston prism is used for measuring verticality, the slope measured by the reference axis is almost inevitably inconsistent with the slope measured by the axis to be measured (under the condition that the verticality of the optical square and the verticality of the guide rail are completely ideal), and the slope of the reference axis cannot be directly used as the reference of the axis to be measured in actual measurement, otherwise, larger errors are caused. Correspondingly, as the double Wollaston prism is less sensitive to the incident angle, the straightness gradient measured by different angles of incidence in a small angle range (within 1 degree or even larger range) is almost consistent, the measurement defect of adopting the standard single Wollaston prism can be completely avoided, and the perpendicularity deviation of the guide rail can be accurately measured.
Although the above-mentioned straightness interferometry device improves its application in straightness measurement, it still has unavoidable blind area measurement problem because the light spot has a certain diameter, and a certain distance is required to propagate after the straightness interferometry mirror splits the beam to achieve complete separation of two beams of light, and in this distance range, when the overlapping of the beams is less than 60%, there will be insufficient interference or almost no interference signal, and straightness measurement cannot be achieved, i.e. there is a certain measurement blind area. Fig. 7 illustrates one embodiment of blind zone elimination based on the straightness interferometry apparatus described above. The parallel light beam polarizing element 8 with adjustable shearing difference is designed and is attached to the front of the double Wollaston prism 2, so that two light beams can be completely distinguished or mostly distinguished after the laser beams pass through the double Wollaston prism, and a stronger interference signal can be obtained when the distance between the straightness interference mirror and the reflecting mirror is 0 or close to 0, and the measurement blind area is eliminated. The parallel beam polarization element 8 with adjustable shearing difference is composed of two standard Wollaston prisms with the same structural angle and is arranged in the direction shown in fig. 7, the two orthogonal polarized parallel beams can be output after the beams pass, meanwhile, the change of the shearing difference of the two parallel beams can be realized by adjusting the axial distance of the two Wollaston prisms, and the axial distance of the two Wollaston prisms can be fixed according to the output light spot size, so that the structure is further simplified.
The invention designs a parallel light beam polarizing element with adjustable shearing difference, which realizes parallel output of two beams of orthogonal polarized light beams and has adjustable shearing distance of the two beams of light, thereby solving the problem of measurement blind areas existing in the traditional straightness interferometry device.
Compared with the existing straightness interferometer measuring technology, the straightness interferometry device insensitive to the incident angle has the following advantages:
(1) The double Wollaston prism is adopted as the straightness interference mirror, so that the problem that the beam splitting angle of the standard single Wollaston prism is sensitive to the incident angle is avoided, the measurement accuracy of the straightness interference measurement device in the perpendicularity measurement application is improved, and the beam adjustment difficulty is reduced.
(2) The design of the parallel beam polarizing element with adjustable shearing difference solves the problem of measurement blind areas in the prior art, and expands the measurement range of the straightness interferometry device.
The straightness interference measuring device insensitive to the incidence angle is used for measuring the transverse deviation, namely straightness, between a machine tool guide rail or other linear motion components and a standard linear path, and measuring other expansion applications based on straightness (such as multi-axis platform straightness, perpendicularity and the like).
The foregoing is a further detailed description of the invention in connection with the preferred embodiments, and it is not intended that the invention be limited to the specific embodiments described. It will be apparent to those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the invention, and these should be considered to be within the scope of the invention.
Claims (10)
1. A straightness interferometry device having a parallel beam polarizing element, characterized by: comprising the following steps:
the interferometer host system comprises a laser emission optical system and a detection receiving unit, wherein the laser emission optical system emits a measuring beam, and the detection receiving unit analyzes an interference signal;
the measuring beam is divided into two beams of light with orthogonal polarization after passing through the double Wollaston prism;
the two beams of light with orthogonal polarization are reflected by the double-sided right-angle ridge reflecting mirror and then return to the detection receiving unit; and
a parallel beam polarizing element capable of adjusting shearing difference, wherein the measuring beam emitted by the laser emission optical system passes through the parallel beam polarizing element and then passes through the double Wollaston prism to be divided into two beams of light with orthogonal polarization,
the detection receiving unit analyzes the interference signals to obtain relative distance information, and the relative distance information of different points on the linear guide rail is obtained by moving the double Wollaston prism, so that the straightness error of the linear guide rail is finally calculated.
2. The straightness interferometry device of claim 1, wherein:
the detection receiving unit is composed of a depolarization beam splitter prism, two polarization beam splitters and a 1/4 wave plate.
3. The straightness interferometry device of claim 2, wherein:
the detection receiving unit adopts a four-channel detection system, and light entering the detection receiving unit passes through the depolarization beam splitter prism and then is split by the two polarization beam splitter prisms to enter four channels of the detection receiving unit.
4. The straightness interferometry device of claim 1, wherein:
the parallel beam polarizing element consists of two standard Wollaston prisms with the same structural angle.
5. The straightness interferometry device of claim 4, wherein:
the axial distance between the two Wollaston prisms of the parallel beam polarizing element is adjustable.
6. The straightness interferometry device of claim 4, wherein:
and fixing the axial distance between the two Wollaston prisms of the parallel beam polarizing element according to the light spot size output by the parallel beam polarizing element.
7. The straightness interferometry device of claim 1, wherein:
the double Wollaston prism is mounted on the X-axis guide rail, and the measuring beam sequentially passes through the double Wollaston prism and the optical square and then enters the double-sided right-angle ridge reflecting mirror.
8. The straightness interferometry apparatus as recited in claim 7 wherein:
the double Wollaston prism moves along the X direction, the light path is continuously adjusted, so that the double Wollaston prism keeps interference signals full lattice at any position on the X-axis guide rail, and the straightness slope of the X-axis guide rail is obtained through stepping measurement.
9. The straightness interferometry apparatus as recited in claim 8 wherein:
the double Wollaston prism is mounted on the Y-axis guide rail, and the measuring beam sequentially passes through the optical right angle ruler and the double Wollaston prism and then enters the double-sided right angle ridge reflecting mirror.
10. The straightness interferometry device of claim 9, wherein:
and obtaining the straightness gradient error of the Y-axis guide rail through stepping measurement, and obtaining the straightness error of the X-axis guide rail and the Y-axis guide rail through comparing the straightness gradient of the X-axis guide rail and the straightness deviation of the optical right angle ruler.
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| CN114894122B (en) * | 2022-04-26 | 2023-05-16 | 深圳市深视智能科技有限公司 | Perpendicularity measuring probe and measuring device |
| CN116086360B (en) * | 2023-04-11 | 2023-07-04 | 季华实验室 | Straightness error separation device and straightness error separation method for large-stroke OLED (organic light emitting diode) ink-jet printer |
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| CN100570276C (en) * | 2006-12-27 | 2009-12-16 | 北京市普锐科创科技有限责任公司 | The two-dimensional transversal zeeman double-frequency laser linearity/coaxiality measurement mechanism |
| CN101650166B (en) * | 2008-08-15 | 2012-04-11 | 上海理工大学 | Laser interference system used for measuring micro roll angle |
| CN101915560B (en) * | 2010-06-25 | 2012-09-05 | 北京市普锐科创科技有限责任公司 | Device for measuring straightness/coaxiality by applying laser |
| CN102981268B (en) * | 2012-11-23 | 2014-11-05 | 西安交通大学 | Birefringent crystal beam splitter with adjustable lateral shearing quantity |
| CN104535019B (en) * | 2015-01-12 | 2017-09-08 | 中国科学院高能物理研究所 | A kind of rolling angle measurement device and method of double diffraction grating difference interference |
| CN104897273A (en) * | 2015-06-12 | 2015-09-09 | 哈尔滨工业大学 | Quadrature error-free single-path circular polarization interference and double-Wollaston prism light-splitting type homodyne laser vibration meter |
| CN105841638B (en) * | 2016-05-13 | 2019-02-12 | 深圳市中图仪器股份有限公司 | A kind of optical system for laser interferometer measurement guide rail linearity |
| CN205879112U (en) * | 2016-09-06 | 2017-01-11 | 深圳市中图仪器科技有限公司 | A device for correction of laser survey signal |
| CN106885535B (en) * | 2017-02-10 | 2019-02-01 | 浙江理工大学 | Single-frequency interferes the device and method of straightness error and its position measurement and compensation |
| CN109631805B (en) * | 2018-12-21 | 2020-08-04 | 浙江理工大学 | Wollaston prism movable laser interference straightness and displacement simultaneous measurement device |
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| CN111735391B (en) * | 2020-06-17 | 2021-08-31 | 浙江理工大学 | Double-phase measurement type laser interference straightness and displacement simultaneous measurement device and method |
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