CN116192077A - Frequency matching trimming method and system for non-coated micro-shell resonant structure - Google Patents

Frequency matching trimming method and system for non-coated micro-shell resonant structure Download PDF

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Publication number
CN116192077A
CN116192077A CN202310206580.9A CN202310206580A CN116192077A CN 116192077 A CN116192077 A CN 116192077A CN 202310206580 A CN202310206580 A CN 202310206580A CN 116192077 A CN116192077 A CN 116192077A
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electrode
trimming
frequency
shell
excitation
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卢坤
席翔
肖定邦
石岩
孙江坤
张勇猛
吴学忠
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National University of Defense Technology
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National University of Defense Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
    • G01R23/02—Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
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  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

The application belongs to the technical field of manufacturing of micro-electromechanical systems, and relates to a frequency matching trimming method and system for a non-coated micro-shell resonant structure. The method comprises the following steps: traversing all excitation electrodes, and calculating the ratio of the resonance peak amplitude values; the electrode with the maximum value is used as a first trimming electrode, and the first trimming electrode and a resonance structure corresponding to the first trimming electrode in the directions of 90 DEG, 180 DEG and 270 DEG different from the first trimming electrode are used as first trimming positions; the electrode with the next largest value is taken as a second trimming electrode, and the second trimming electrode and a resonance structure corresponding to the second trimming electrode with the phase difference of 90 DEG, 180 DEG and 270 DEG are taken as second trimming positions; and when the second trimming position removing mass is calculated, and the ratio of the resonance peak amplitude values of the first trimming electrode meets a first condition, and when the first trimming position removing mass and the difference of frequency splitting of the working mode meet a second condition, frequency matching trimming is completed. The method can carry out sweep frequency detection and trimming on the working mode frequency.

Description

Frequency matching trimming method and system for non-coated micro-shell resonant structure
Technical Field
The application relates to the technical field of manufacturing of micro-electromechanical systems, in particular to a method and a system for frequency matching and trimming of a non-coated micro-shell resonant structure.
Background
The fused quartz micro-shell resonator gyro is a micro-electromechanical gyro with navigation level precision potential, and the core structure of the fused quartz micro-shell resonator gyro is a fused quartz micro-shell resonator structure. When the gyroscope works, the micro-shell resonant structure is excited to work in an n=2 mode by means of electrostatic driving force and the like, and the micro-shell resonant structure comprises an orthogonal driving mode and a detection mode. When the external angular velocity is input, a detection mode is excited in the direction of the driving mode direction at an interval of 45 degrees, and the amplitude of the detection mode is utilized to demodulate the external input angular velocity.
The fused quartz micro-shell resonant gyroscope is essentially a resonant mechanical gyroscope, and the driving mode and the detection mode must be consistent in frequency to ensure high sensitivity and noise characteristics. However, due to material defects and manufacturing errors, initial frequency cracking of the micro-shell resonant structure is unavoidable. When frequency cracking exists, the gyro sensitivity is obviously degraded, mechanical thermal noise is increased, and the gyro performance improvement is severely limited.
In order to realize the n=2 working mode matching of the micro-shell resonance structure, a trimming method is required to reduce the frequency splitting of the driving mode and the detection mode. The mechanical trimming is an effective method for effectively reducing the frequency splitting of the resonant structure of the micro-shell, and the frequency matching can be realized by etching the quality at the edge of the resonant structure through means such as laser, micro-ultrasonic processing and the like. In the prior art, the micro-shell resonance structure is mechanically repaired and adjusted in two ways. The resonance structure after film plating and the electrode substrate are fixedly assembled through conductive adhesive and the like, a capacitance is formed by the metal layer of the resonance structure and the electrode, and frequency splitting detection and trimming are realized by electrostatic driving and detection. The other method is a non-coated resonance structure, and frequency splitting detection and trimming are realized by using a laser vibrometer through excitation of a piezoelectric sheet.
However, the first method generally damages the electrode substrate, the resonant structure and the electrode cannot be disassembled after curing, and the generated large amount of dust is inconvenient for subsequent cleaning. The second method can repeatedly disassemble and assemble the resonant structure, but requires to configure an expensive laser vibration meter, and the trimming precision of the method is difficult to be better than 0.1Hz due to the harmonic error of the resonant structure and the frequency detection precision influence of the laser vibration meter.
Disclosure of Invention
Accordingly, it is necessary to provide a method and a system for matching and trimming the resonant structure frequency of a non-coated fused quartz micro-shell, which can perform sweep frequency detection and trimming on the operating mode frequency of the non-coated fused quartz micro-shell resonant structure, do not need to use precise equipment such as a laser vibrometer, and support repeated disassembly and assembly of the resonant structure.
A method for frequency matching and trimming of a non-coated micro-shell resonance structure comprises the following steps:
selecting one excitation electrode of the non-coated micro-shell resonance structure, inputting an alternating current excitation signal, receiving an output signal corresponding to the detection electrode, and amplifying to obtain an amplified signal; the azimuth angles of the exciting electrode and the corresponding detecting electrode are different by 180 degrees; calculating a frequency response curve according to the amplified signal; calculating the ratio of the resonant peak amplitude values according to the frequency response curve;
traversing all excitation electrodes, and obtaining the ratio of the amplitude of the resonance peak corresponding to each excitation electrode;
the electrode where the maximum value of the ratio of the amplitude values of all the resonance peaks is located is used as a first trimming electrode, and the first trimming electrode and the edge of the resonance structure corresponding to the direction of 90 DEG, 180 DEG and 270 DEG different from the first trimming electrode are used as first trimming positions; the electrode with the next largest value of the ratio of the amplitude values of all the resonance peaks is taken as a second trimming electrode, and the second trimming electrode and the edge of the resonance structure corresponding to the second trimming electrode in the directions of 90 DEG, 180 DEG and 270 DEG are taken as second trimming positions;
removing the mass at the second trimming position, and calculating the ratio of the resonant peak amplitude corresponding to the first trimming electrode;
when the ratio of the resonance peak amplitude values corresponding to the first trimming electrode meets a preset first condition, removing the mass at the first trimming position, calculating the frequency splitting difference of the working modes, and when the frequency splitting difference meets a preset second condition, completing frequency matching trimming.
In one embodiment, when the ratio of the resonant peak amplitude values corresponding to the first trimming electrode does not meet the preset first condition, the third condition is judged, and when the ratio of the resonant peak amplitude values of the working modes meets the preset third condition, the mass is removed at the second trimming position continuously, and the ratio of the resonant peak amplitude values corresponding to the first trimming electrode is calculated until the ratio of the resonant peak amplitude values meets the preset first condition.
In one embodiment, when the difference between the frequency splitting does not meet a preset second condition, calculating the ratio of the resonant peak amplitude of the working mode, when the ratio of the resonant peak amplitude of the working mode meets a preset third condition, reselecting one excitation electrode to input an alternating current excitation signal until the ratio of the resonant peak amplitude is calculated, traversing all the excitation electrodes again, obtaining a first trimming electrode, a first trimming position, a second trimming electrode and a second trimming position, removing the quality at the second trimming position again, and judging until the difference between the frequency splitting meets the preset second condition.
In one embodiment, the ratio of the peak amplitude of the resonance is the ratio of the peak amplitude of the low frequency resonance to the peak amplitude of the high frequency resonance.
In one embodiment, the difference in frequency splitting refers to the difference in frequency of the low frequency resonance peak and the high frequency resonance peak.
In one embodiment, the first condition is that the ratio of the resonance peak amplitudes is greater than 20, the second condition is that the difference in frequency splitting is less than 0.1Hz, and the third condition is that the ratio of the resonance peak amplitudes is less than 15.
The frequency matching trimming system of the non-coated micro-shell resonance structure adopts the frequency matching trimming method of the non-coated micro-shell resonance structure, and comprises the following steps:
an uncoated fused silica micro-shell resonant structure comprising: a micro-shell curved surface structure, a toothed edge structure and a central boss structure; the toothed edge structure is arranged at an opening of the curved surface structure of the micro-shell, and the central boss structure is arranged in an inner accommodating cavity of the curved surface structure of the micro-shell;
a planar electrode substrate comprising: a substrate, an interdigital electrode, and a base; the interdigital electrodes and the base are arranged on the substrate; the interdigital electrode is connected with direct-current high voltage and ground;
a modal excitation detection circuit;
the substrate covers the opening of the curved surface structure of the micro-shell, the toothed edge structure is arranged on the interdigital electrode, and the central boss structure is matched with the base station; the modal excitation detection circuit is connected with the interdigital electrode.
In one embodiment, the interdigital electrode comprises: the device comprises a plurality of excitation electrodes, a plurality of detection electrodes arranged at intervals with the excitation electrodes, a first common end connected with each excitation electrode and a second common end connected with each detection electrode;
the azimuth angle difference between two adjacent excitation electrodes is 22.5 degrees, the azimuth angle difference between two adjacent detection electrodes is 22.5 degrees, the number of the excitation electrodes and the number of the detection electrodes are in one-to-one correspondence, and the azimuth angle difference between the excitation electrodes and the corresponding detection electrodes is 180 degrees;
the first public end is connected with the ground, the second public end and the excitation electrode are both connected with direct-current high voltage, and the excitation electrode and the detection electrode are both connected with the modal excitation detection circuit.
In one embodiment, a modal excitation detection circuit includes: the device comprises an excitation electrode selection switch, a detection electrode selection switch, a charge amplification module and a frequency response analysis module; the detection electrode selection switch, the charge amplification module, the frequency response analysis module and the excitation electrode selection switch are sequentially connected;
the excitation electrode selection switch is connected with the excitation electrode, and the detection electrode selection switch is connected with the detection electrode.
In one embodiment, the central boss structure is mated with the abutment by a temporary bonding agent;
the temporary bonding agent is softened at high temperature, and is solidified and bonded with the planar electrode substrate and the resonance structure of the non-coated fused quartz micro-shell after natural cooling, and the temporary bonding agent is dissolved in an organic solvent.
According to the frequency matching trimming method and system for the resonance structure of the non-coated fused quartz micro-shell, the frequency of the working mode of the resonance structure of the non-coated fused quartz micro-shell can be subjected to sweep frequency detection and trimming, high-precision frequency matching trimming is achieved, precise equipment such as a laser vibration meter is not needed, damage to a metal layer of an electrode substrate caused by trimming after the coating of the resonance structure is assembled is avoided, and miniaturization integration is facilitated.
Drawings
FIG. 1 is a diagram of an exemplary embodiment of a frequency matching trimming method for a non-coated micro-shell resonant structure;
FIG. 2 is a flow chart of a method for frequency matching trimming of a non-coated micro-shell resonant structure according to one embodiment;
FIG. 3 is a schematic diagram of a flow chart of a frequency matching trimming method for a resonance structure of a non-coated micro-shell according to another embodiment;
FIG. 4 is a block diagram of a frequency matching trimming system for a non-coated micro-shell resonant structure in one embodiment;
FIG. 5 is a perspective view of an uncoated fused silica micro-shell resonant structure in one embodiment;
FIG. 6 is a perspective view of a planar electrode substrate in one embodiment;
FIG. 7 is a top view of a planar electrode substrate in one embodiment;
FIG. 8 is a schematic diagram of an assembly of an uncoated fused silica micro-shell resonant structure with a planar electrode substrate in one embodiment;
FIG. 9 is a diagram showing the assembly of an uncoated fused silica micro-shell resonant structure with a planar electrode substrate in one embodiment;
FIG. 10 is a schematic diagram of a mode excitation detection circuit in one embodiment;
FIG. 11 is a schematic diagram illustrating a method for identifying a first trimming electrode and a second trimming electrode according to an embodiment;
FIG. 12 is a schematic diagram of a mass etch trimming in one embodiment;
FIG. 13 is a plot of frequency response of different electrode directions during a trimming process, wherein (a) is a plot of frequency response of a first pair of electrodes, (b) is a plot of frequency response of a second adjacent pair of electrodes, (c) is a plot of frequency response of a third adjacent pair of electrodes, and (d) is a plot of frequency response of a fourth adjacent pair of electrodes;
FIG. 14 is a schematic diagram of a modal test result in one embodiment, wherein (a) is a schematic diagram of a modal test result before trimming, and (b) is a schematic diagram of a modal test result after trimming.
Description of the drawings:
1-a fused quartz micro-shell resonance structure without a coating film; 11-a micro-shell curved surface structure; 12-a toothed edge structure;
2-a planar electrode substrate; 21-base station; 22-interdigital electrodes; 221-excitation electrodes; 222-a detection electrode; 223-a first common terminal; 224-a second common terminal;
3-temporary bonding agent;
a 4-modal excitation detection circuit; 41-a charge amplification module; 42-direct current high voltage; 43-activating an electrode selection switch; 44-a detection electrode selection switch; 45-a frequency response analysis module;
5-a first trimming electrode; 6-a second trimming electrode; 7-a first trimming position; 8-a second trimming position.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.
It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present application are merely used to explain the relative positional relationship, movement, etc. between the components in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is correspondingly changed.
In addition, descriptions such as those related to "first," "second," and the like, are provided for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated in this application. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, "plurality of sets" means at least two sets, e.g., two sets, three sets, etc., unless specifically defined otherwise.
In the present application, unless explicitly specified and limited otherwise, the terms "coupled," "secured," and the like are to be construed broadly, and for example, "secured" may be either permanently attached or removably attached, or integrally formed; the device can be mechanically connected, electrically connected, physically connected or wirelessly connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
In addition, the technical solutions of the embodiments of the present application may be combined with each other, but it is necessary to be based on the fact that those skilled in the art can implement the technical solutions, and when the technical solutions are contradictory or cannot be implemented, the combination of the technical solutions should be considered to be absent, and is not within the scope of protection claimed in the present application.
The method provided by the application can be applied to an application environment shown in fig. 1. The terminal 102 communicates with the server 104 through a network, where the terminal 102 may include, but is not limited to, various personal computers, notebook computers, smartphones, tablet computers, and portable wearable devices, and the server 104 may be various portal sites, servers corresponding to a background of a working system, and the like.
The application provides a frequency matching trimming method for a non-coated micro-shell resonance structure, as shown in fig. 2, in an embodiment, the method is applied to a terminal in fig. 1 for illustration, and includes:
step 202, selecting one excitation electrode of the non-coated micro-shell resonance structure, inputting an alternating current excitation signal, receiving an output signal of a corresponding detection electrode, and amplifying the output signal to obtain an amplified signal; the azimuth angles of the excitation electrode and the corresponding detection electrode are 180 degrees different; calculating a frequency response curve according to the amplified signal; and calculating the ratio of the resonant peak amplitude values according to the frequency response curve.
In this step, the frequency response curve (i.e. sweep frequency curve) can be displayed by connecting with a computer, and the ratio of the low-frequency resonance peak amplitude to the high-frequency resonance peak amplitude is defined as the low-frequency resonance peak amplitude A 1 Amplitude A of resonance peak with high frequency 2 Ratio of (A), i.e. A 1 /A 2 。
And 204, traversing all excitation electrodes, and obtaining the ratio of the amplitude of the resonance peak corresponding to each excitation electrode.
In this step, the A1/A2 values of the frequency response curves of the different excitation electrode directions are calculated.
Step 206, taking the electrode where the maximum value of the ratio of all the resonance peak amplitudes is located as a first trimming electrode, and taking the first trimming electrode and the edge of the resonance structure corresponding to the direction of 90 DEG, 180 DEG and 270 DEG different from the first trimming electrode as a first trimming position; and taking the electrode with the next largest value of the ratio of the amplitude values of all the resonance peaks as a second trimming electrode, and taking the second trimming electrode and the edge of the resonance structure corresponding to the second trimming electrode in the directions of 90 DEG, 180 DEG and 270 DEG as a second trimming position.
In this step, all the ratios of the resonance peak amplitudes are sorted from large to small, and the ratio of the second largest resonance peak amplitude is the next largest value.
The first trimming electrode, the first trimming position, the second trimming electrode and the second trimming position are all relative to the resonant structure.
And step 208, removing the mass at the second trimming position, and calculating the ratio of the resonant peak amplitude corresponding to the first trimming electrode.
In this step, the mass is removed, i.e. a frequency trimming is performed.
And 210, removing the mass at the first trimming position when the ratio of the resonance peak amplitude corresponding to the first trimming electrode meets a preset first condition, calculating the frequency splitting difference of the working mode, and completing the frequency matching trimming when the frequency splitting difference meets a preset second condition.
When the ratio of the resonance peak amplitude corresponding to the first trimming electrode meets a preset first condition, but the difference of frequency splitting does not meet a preset second condition, calculating the ratio of the resonance peak amplitude of the working mode, when the ratio of the resonance peak amplitude of the working mode meets a preset third condition, reselecting one exciting electrode to input an alternating current exciting signal until the ratio of the resonance peak amplitude is calculated, traversing all exciting electrodes again, obtaining the first trimming electrode, the first trimming position, the second trimming electrode and the second trimming position, removing the quality at the second trimming position again, and judging until the difference of frequency splitting meets the preset second condition.
When the ratio of the resonance peak amplitude values corresponding to the first trimming electrode meets a preset first condition and the difference of frequency splitting does not meet a preset second condition, but the ratio of the resonance peak amplitude values of the working modes does not meet a preset third condition, continuing to remove the mass at the first trimming position, continuously reducing the frequency splitting, and calculating the difference of the frequency splitting of the working modes until the preset second condition is met and trimming is completed or the preset third condition is met and trimming is completed.
And when the ratio of the resonance peak amplitude values corresponding to the first trimming electrode does not meet the preset first condition, judging a third condition, and when the ratio of the resonance peak amplitude values of the working modes meets the preset third condition, removing the mass at the second trimming position, and calculating the ratio of the resonance peak amplitude values corresponding to the first trimming electrode until the preset first condition is met.
When the ratio of the resonance peak amplitude values corresponding to the first trimming electrode does not meet the preset first condition, judging a third condition, when the ratio of the resonance peak amplitude values of the working modes does not meet the preset third condition, continuing to remove the mass at the first trimming position, calculating the frequency splitting difference of the working modes, and judging whether the preset second condition is met.
In this step, the difference between the low frequency resonance peak frequency and the high frequency resonance peak frequency, frequency splitting, is the low frequency resonance peak frequency f 1 With high frequency resonance peak frequency f 2 The difference of (f), i.e 2 -f 1 。
In this embodiment, the quality removal method such as femto-second laser may be used for removing the quality at the second trimming position and the first trimming position, and the specific method is the prior art and will not be described herein.
Gradually removing the mass at the second trimming position of the resonant structure, and calculating the ratio A of the resonance peak amplitude of the frequency response curve at the first trimming electrode after each mass removal 1 /A 2 The method comprises the steps of carrying out a first treatment on the surface of the When A is 1 /A 2 >K 1 When the mass is removed gradually at the first trimming position of the resonant structure, calculating the difference f of frequency splitting of the working mode after each mass removal 2 -f 1 Amplitude ratio A1/A2 to resonance peak; when f 2 -f 1 <Stopping mass etching at 0.1Hz to finish frequency matching trimming; when f 2 -f 1 >0.1Hz and A 1 /A 2 <K 2 Then the excitation electrode is selected again, the excitation electrode is traversed again, and the difference of frequency splitting of the working mode is calculated again until f 2 -f 1 <Frequency offset trimming was completed at 0.1Hz as shown in fig. 3.
The first condition may be A 1 /A 2 >20, the second condition may be f 2 -f 1 <0.1Hz, the third condition may be A 1 /A 2 <15。
According to the frequency matching trimming method for the resonance structure of the non-coated fused quartz micro-shell, the frequency of the working mode of the resonance structure of the non-coated fused quartz micro-shell can be subjected to frequency sweep detection and trimming, high-precision frequency matching trimming is realized, precise equipment such as a laser vibration meter is not needed, damage to a metal layer of an electrode substrate caused by trimming after the coating of the resonance structure is assembled is avoided, and the trimming system is more convenient to integrate in a miniaturized manner. Meanwhile, based on the system, the modal characteristics of the non-coated micro-shell resonant structure can be tested, and the micro-shell resonant structure for subsequent assembly can be screened.
It should be understood that, although the steps in the flowchart of fig. 2 are shown in sequence as indicated by the arrows, the steps are not necessarily performed in sequence as indicated by the arrows. The steps are not strictly limited to the order of execution unless explicitly recited herein, and the steps may be executed in other orders. Moreover, at least some of the steps in fig. 2 may include multiple sub-steps or stages that are not necessarily performed at the same time, but may be performed at different times, nor do the order in which the sub-steps or stages are performed necessarily performed in sequence, but may be performed alternately or alternately with at least a portion of the sub-steps or stages of other steps or other steps.
The application also provides a frequency matching trimming system for the resonance structure of the non-coated micro-shell, which adopts the frequency matching trimming method for the resonance structure of the non-coated micro-shell, as shown in fig. 4 to 13, in one embodiment, the frequency matching trimming system comprises: the device comprises a non-coated fused quartz micro-shell resonant structure 1, a planar electrode substrate 2 and a modal excitation detection circuit 4.
The uncoated fused quartz micro-shell resonant structure 1 comprises: a micro-shell curved surface structure 11, a toothed edge structure 12 and a central boss structure. The curved surface structure 11 of the micro-shell is a preferably hemispherical curved surface shell structure, a curved hollow accommodating cavity is arranged in the micro-shell, and an opening is formed in the top of the accommodating cavity. The toothed edge structure 12 is composed of a plurality of teeth arranged at the opening of the curved surface structure of the micro-shell in an array manner, and all the teeth are arranged on the same plane with the opening of the curved surface structure of the micro-shell. The central boss structure is vertically arranged in the accommodating cavity, one end of the central boss is arranged at the top of the curved surface of the hollow accommodating cavity, and the other end of the central boss is arranged at the center of the opening of the curved surface structure of the micro-shell.
The planar electrode substrate 2 includes: the substrate, the interdigital electrode 22, and the base 21, and the interdigital electrode 22 and the base 21 are provided on the substrate. The substrate is a planar structure, can cover the opening of the curved surface structure of the micro-shell, is not limited to a specific shape, size and material, and is preferably a glass wafer. The interdigital electrode 22 includes: a plurality of sequentially connected pumping electrodes 221, a plurality of sequentially connected detecting electrodes 222 spaced apart from the pumping electrodes 221, a first common terminal 223 connected to each pumping electrode 221, and a second common terminal 224 connected to each detecting electrode 222; the azimuth angle between two adjacent excitation electrodes 221 differs by 22.5 degrees, the azimuth angle between two adjacent detection electrodes 222 differs by 22.5 degrees, the excitation electrodes 221 are in one-to-one correspondence with the number of the detection electrodes 222, and the azimuth angles of the excitation electrodes 221 and the corresponding detection electrodes 222 differ by 180 degrees; the excitation electrode 221 is connected to the dc high voltage 42 and the modal excitation detection circuit, the detection electrode 222 is connected to the modal excitation detection circuit, the first common terminal 223 is connected to ground, and the second common terminal 224 is connected to the dc high voltage 42. The base 21 is arranged in the middle of the planar electrode substrate 2 to match with the central boss structure of the uncoated fused quartz micro-shell resonance structure 1.
It is necessary to explain that: the electrode (excitation electrode 221 or detection electrode 222) includes a comb-shaped first portion and a second portion; the first part comprises five comb-shaped structures, one corresponding end faces the direction of the base station, and the other corresponding ends are connected with each other and form a third part; the second part comprises four comb-shaped structures, one corresponding end faces away from the base station, and the other corresponding ends are connected with each other and form a fourth part; the comb-shaped structures of the first part and the second part are arranged in opposite and staggered mode. The third portion of the excitation electrode 221 is disposed at a side remote from the first common terminal 223, and the fourth portion is connected to the first common terminal 223 by an arc. The third portion of the detection electrode 222 is disposed near the second common terminal 224, and the fourth portion is connected to the second common terminal 224 by an arc.
The modal excitation detection circuit 4 includes: an excitation electrode selection switch 43, a detection electrode selection switch 44, a charge amplification module 41, and a frequency response analysis module 45. The detection electrode selection switch 44, the charge amplification module 41, the frequency response analysis module 45, and the excitation electrode selection switch 43 are sequentially connected, and the excitation electrode selection switch 43 is further connected to the excitation electrode 221, and the detection electrode selection switch 44 is further connected to the detection electrode 222. The excitation electrode selection switch 43 is used to select the excitation electrode 221, and input an ac excitation signal (this signal is a sinusoidal sweep signal). The detection electrode selection switch 44 is used for selecting the detection electrode 222 for signal output and outputting a capacitance signal to the charge amplification module 41. The charge amplifying module 41 is configured to receive the capacitance signal, amplify the capacitance signal into a voltage signal, and output the voltage signal to the frequency response analyzing module 45. The frequency response analysis module 45 is configured to receive the voltage signal, calculate a frequency response curve of each excitation electrode direction, and output an ac excitation signal (the signal is a sinusoidal sweep signal) to the excitation electrode selection switch 43.
In this embodiment, the substrate covers the opening of the curved surface structure of the micro-shell, the toothed edge structure 12 is disposed on the interdigital electrode 22, and the central boss structure is matched with the base 21.
The non-coated fused quartz micro-shell resonance structure 1 is matched with the planar electrode substrate 2, namely the center boss structure is matched with the base station through the temporary bonding agent 3; the temporary bonding agent 3 is softened at high temperature, and is solidified and bonded with the non-coated fused quartz micro-shell resonance structure 1 and the planar electrode substrate 2 after natural cooling, and the temporary bonding agent 3 is dissolved in an organic solvent; specifically, the temporary bonding agent 3 may be crystal glue 509, and the organic solvent may be acetone.
According to the frequency matching trimming system for the non-coated fused quartz micro-shell resonance structure, the planar electrode substrate and the modal excitation detection circuit are arranged, the trimming electrode and the position are judged by combining the frequency matching trimming method, iteration is continued, the frequency of the working mode of the non-coated fused quartz micro-shell resonance structure can be subjected to sweep frequency detection and trimming, high-precision frequency matching trimming is achieved, precise equipment such as a laser vibration meter is not needed, damage to a metal layer of the electrode substrate after the coating of the resonance structure is avoided, miniaturization integration is facilitated, the micro-shell resonance structure can be conveniently detached and cleaned after trimming, and the damage to the electrode of the subsequent gyro assembly is avoided.
For specific limitations of a non-coated micro-shell resonant structure frequency matching trimming system, reference may be made to the above description of a non-coated micro-shell resonant structure frequency matching trimming method, which is not repeated herein. Each of the modules in the above-described apparatus may be implemented in whole or in part by software, hardware, and combinations thereof. The above modules may be embedded in hardware or may be independent of a processor in the computer device, or may be stored in software in a memory in the computer device, so that the processor may call and execute operations corresponding to the above modules.
In a specific embodiment, four excitation electrodes and four detection electrodes are provided, and four excitation electrodes 221 and four detection electrodes 222 are provided on both sides of the base 21, respectively. The non-coated fused quartz micro-shell resonance structure 1 and the planar electrode substrate 2 are assembled through the temporary bonding agent 3, in the assembling process, the non-coated fused quartz micro-shell resonance structure 1 is aligned with the central position of the planar electrode substrate 2, the toothed edge structure 12 is arranged right above the interdigital electrode 22, the interdigital electrode of the assembled planar electrode substrate is connected and conducted with the modal excitation detection circuit, and then the frequency matching trimming method of the non-coated micro-shell resonance structure is adopted for frequency matching trimming.
The specific frequency matching trimming process comprises the following steps: the adjacent 4 excitation electrodes 221 are sequentially selected by the excitation electrode selection switch 43, the adjacent 4 detection electrodes 222 are sequentially selected in the 180-degree direction of the corresponding electrodes to be connected with the charge amplification module 41, an alternating-current sweep excitation signal is output by the frequency response module 45, and the signal of the detection electrodes 221 passing through the charge amplification module 41 is input to calculate the frequency response curve corresponding to the 4 electrode directions. And identifying the low-frequency resonance peak frequency f1, the low-frequency resonance peak amplitude A1, the high-frequency resonance peak frequency f2 and the high-frequency resonance peak amplitude A2 of the frequency response curve. From the frequency response curves of four electrodes that are continuously adjacent, the resonance peak amplitude ratio A1/A2 is calculated, and the first trimming electrode 5, the first trimming position 7, the second trimming electrode 6, and the second trimming position 8 are determined (in fig. 11, (a) (b) (c) (d) among the four pairs of electrodes, the (a) is the second trimming electrode, and the (b) is the first trimming electrode). Fig. 13 (a) shows that the electrode corresponding to the sweep response curve is a second trimming electrode 6, and the second trimming electrode 6 and the edge position of the resonant structure corresponding to the direction separated from the electrode by 90 °, 180 ° and 270 ° are taken as a second trimming position 8; fig. 13 (b) shows that the electrode corresponding to the sweep response curve is the first trimming electrode 5, and the first trimming electrode 5 and the edge position of the resonant structure corresponding to the directions separated from the electrode by 90 °, 180 ° and 270 ° are used as the first trimming position 7.
FIG. 14 is a graph showing the results of a one-time tuning experiment of the frequency of the resonant structure of the micro-shell based on the above system, wherein the frequency splitting of the resonant structure of the micro-shell is reduced from an initial frequency of more than 6Hz to within 0.1Hz.
And after trimming, placing the non-coated fused quartz micro-shell resonant structure and the planar electrode substrate on a hot plate for high-temperature heating, taking down the micro-shell resonant structure after the temporary bonding agent is softened, placing the micro-shell resonant structure in acetone for cleaning, removing the residual temporary bonding agent on the surface, and releasing the fused quartz micro-shell resonant structure without damage. And coating the released micro-shell resonance structure, and assembling the micro-shell resonance structure with a gyro electrode to obtain the gyro structure with the frequency adjusted, wherein the frequency adjusted gyro structure does not need to be adjusted and cleaned again.
The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples only represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the present application. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application is to be determined by the claims appended hereto.

Claims (10)

1. The method for frequency matching trimming of the non-coated micro-shell resonant structure is characterized by comprising the following steps of:
selecting one excitation electrode of the non-coated micro-shell resonance structure, inputting an alternating current excitation signal, receiving an output signal corresponding to the detection electrode, and amplifying to obtain an amplified signal; the azimuth angles of the exciting electrode and the corresponding detecting electrode are different by 180 degrees; calculating a frequency response curve according to the amplified signal; calculating the ratio of the resonant peak amplitude values according to the frequency response curve;
traversing all excitation electrodes, and obtaining the ratio of the amplitude of the resonance peak corresponding to each excitation electrode;
the electrode where the maximum value of the ratio of the amplitude values of all the resonance peaks is located is used as a first trimming electrode, and the first trimming electrode and the edge of the resonance structure corresponding to the direction of 90 DEG, 180 DEG and 270 DEG different from the first trimming electrode are used as first trimming positions; the electrode with the next largest value of the ratio of the amplitude values of all the resonance peaks is taken as a second trimming electrode, and the second trimming electrode and the edge of the resonance structure corresponding to the second trimming electrode in the directions of 90 DEG, 180 DEG and 270 DEG are taken as second trimming positions;
removing the mass at the second trimming position, and calculating the ratio of the resonant peak amplitude corresponding to the first trimming electrode;
when the ratio of the resonance peak amplitude values corresponding to the first trimming electrode meets a preset first condition, removing the mass at the first trimming position, calculating the frequency splitting difference of the working modes, and when the frequency splitting difference meets a preset second condition, completing frequency matching trimming.
2. The method for tuning the resonance structure frequency without coating according to claim 1, wherein when the ratio of the resonance peak amplitude corresponding to the first tuning electrode does not satisfy a preset first condition, a third condition is determined, and when the ratio of the resonance peak amplitude of the working mode satisfies the preset third condition, the mass is continuously removed at the second tuning position, and the ratio of the resonance peak amplitude corresponding to the first tuning electrode is calculated until the ratio of the resonance peak amplitude satisfies the preset first condition.
3. The method for frequency matching trimming of a non-coated micro-shell resonant structure according to claim 2, wherein when the difference of frequency splitting does not meet a preset second condition, calculating the ratio of the resonant peak amplitude of the working mode, when the ratio of the resonant peak amplitude of the working mode meets a preset third condition, reselecting one excitation electrode to input an alternating current excitation signal until the ratio of the resonant peak amplitude is calculated, traversing all the excitation electrodes again, obtaining a first trimming electrode, a first trimming position, a second trimming electrode and a second trimming position, removing the mass at the second trimming position again, judging, and until the difference of frequency splitting meets the preset second condition.
4. A method of frequency matching tuning a non-coated micro-shell resonant structure according to any one of claims 1 to 3, wherein the ratio of the peak amplitude of resonance is the ratio of the peak amplitude of low frequency resonance to the peak amplitude of high frequency resonance.
5. A method of frequency matching tuning a non-coated micro-shell resonant structure according to any one of claims 1 to 3, wherein the difference in frequency splitting is the difference between the low frequency resonant peak frequency and the high frequency resonant peak frequency.
6. A method of tuning the frequency matching of a non-coated micro-shell resonant structure according to claim 2 or 3, wherein the first condition is that the ratio of the resonant peak amplitudes is greater than 20, the second condition is that the difference in frequency splitting is less than 0.1Hz, and the third condition is that the ratio of the resonant peak amplitudes is less than 15.
7. A non-coated micro-shell resonant structure frequency matching trimming system, characterized in that the non-coated micro-shell resonant structure frequency matching trimming method according to any one of claims 1 to 6 is adopted, comprising:
an uncoated fused silica micro-shell resonant structure comprising: a micro-shell curved surface structure, a toothed edge structure and a central boss structure; the toothed edge structure is arranged at an opening of the curved surface structure of the micro-shell, and the central boss structure is arranged in an inner accommodating cavity of the curved surface structure of the micro-shell;
a planar electrode substrate comprising: a substrate, an interdigital electrode, and a base; the interdigital electrodes and the base are arranged on the substrate; the interdigital electrode is connected with direct-current high voltage and ground;
a modal excitation detection circuit;
the substrate covers the opening of the curved surface structure of the micro-shell, the toothed edge structure is arranged on the interdigital electrode, and the central boss structure is matched with the base station; the modal excitation detection circuit is connected with the interdigital electrode.
8. The non-coated micro-shell resonant structure frequency matching trimming system of claim 7, wherein the interdigital electrode comprises: the device comprises a plurality of excitation electrodes, a plurality of detection electrodes arranged at intervals with the excitation electrodes, a first common end connected with each excitation electrode and a second common end connected with each detection electrode;
the azimuth angle difference between two adjacent excitation electrodes is 22.5 degrees, the azimuth angle difference between two adjacent detection electrodes is 22.5 degrees, the number of the excitation electrodes and the number of the detection electrodes are in one-to-one correspondence, and the azimuth angle difference between the excitation electrodes and the corresponding detection electrodes is 180 degrees;
the first public end is connected with the ground, the second public end and the excitation electrode are both connected with direct-current high voltage, and the excitation electrode and the detection electrode are both connected with the modal excitation detection circuit.
9. The non-coated micro-shell resonant structure frequency matching trimming system of claim 8, wherein the modal excitation detection circuit comprises: the device comprises an excitation electrode selection switch, a detection electrode selection switch, a charge amplification module and a frequency response analysis module; the detection electrode selection switch, the charge amplification module, the frequency response analysis module and the excitation electrode selection switch are sequentially connected;
the excitation electrode selection switch is connected with the excitation electrode, and the detection electrode selection switch is connected with the detection electrode.
10. The non-coated micro-shell resonant structure frequency matching trimming system according to any one of claims 7 to 9, wherein the central boss structure is matched with the base station by a temporary bonding agent;
the temporary bonding agent is softened at high temperature, and is solidified and bonded with the planar electrode substrate and the resonance structure of the non-coated fused quartz micro-shell after natural cooling, and the temporary bonding agent is dissolved in an organic solvent.
CN202310206580.9A 2023-03-06 2023-03-06 Frequency matching trimming method and system for non-coated micro-shell resonant structure Pending CN116192077A (en)

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