CN116007367B - High-temperature atmosphere bell jar furnace - Google Patents

High-temperature atmosphere bell jar furnace Download PDF

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Publication number
CN116007367B
CN116007367B CN202211738496.3A CN202211738496A CN116007367B CN 116007367 B CN116007367 B CN 116007367B CN 202211738496 A CN202211738496 A CN 202211738496A CN 116007367 B CN116007367 B CN 116007367B
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air
furnace
air inlet
exhaust
furnace body
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CN116007367A (en
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滕锦华
郑君宇
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Wuxi Camce Intelligent Equipment Co ltd
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Wuxi Camce Intelligent Equipment Co ltd
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Abstract

The invention relates to the technical field of bell-jar furnaces, in particular to a high-temperature atmosphere bell-jar furnace, which comprises a furnace body, a hearth and an air source, wherein the bottom of the furnace body is provided with a furnace mouth, the inner wall of the periphery of the furnace body is provided with a heater, the hearth is propped against the furnace mouth after rising, the furnace body is provided with a circulating air cooling structure, the circulating air cooling structure comprises an air inlet structure and an air outlet structure, the air inlet structure comprises air inlets which are annularly distributed on the periphery of the furnace body, the air outlet structure comprises air outlets arranged on one side of the furnace body, the air outlets are positioned above the air inlets, the air inlets are mutually communicated through an air inlet header pipe, and a cold source and a circulating air exchanging device are connected between the air inlet header pipe and the air outlets.

Description

High-temperature atmosphere bell jar furnace
Technical Field
The invention relates to the technical field of bell-jar furnaces, in particular to a high-temperature atmosphere bell-jar furnace.
Background
With the wide application of the high-temperature ceramic substrates, the market demand for the produced large-size high-temperature ceramic substrates is increasing, and the manufacturers are required to adjust the process and the production line, so that the qualification rate of the products and the yield of the products are improved.
In the cooling section in the sintering process of the bell jar furnace, protective gas needs to be introduced into a hearth to cool products in the hearth, and the cooling modes of the traditional bell jar furnace have two types: one adopts a water cooling mode, and cooling water is introduced into a heat exchanger (or a heat exchange pipe) in the hearth to realize heat exchange with the inside of the furnace; the other is an air cooling mode, namely, the process gas is injected into the hearth, and the exhaust air is started at the same time, so that the heat exchange with the atmosphere in the hearth is realized. Although both the two modes can realize the cooling effect, the cooling rate is difficult to control, the cooling efficiency is low, for example, an air cooling mode is adopted, and the air consumption is huge, so the invention provides a high-temperature atmosphere bell jar furnace.
Disclosure of Invention
The invention aims to solve the technical problem of providing a high-temperature atmosphere bell jar furnace, which automatically adjusts the cooling capacity according to different temperature sections so as to achieve the effect of rapid cooling.
In order to solve the problems, the following technical scheme is provided:
the utility model provides a high temperature atmosphere bell jar stove, includes furnace body, hearth and air supply, and the bottom of furnace body has the furnace mouth, is equipped with the heater on the inner wall all around of furnace body, and the hearth is lifted the back and is in on the furnace mouth, be equipped with circulation forced air cooling structure on the furnace body, circulation forced air cooling structure includes inlet structure and exhaust structure, inlet structure includes the air intake of ring cloth at furnace body all around, exhaust structure is including establishing the air exit in furnace body one side, the air exit is located the air intake top, the air intake communicates each other through the air inlet house steward, be connected with cold source and circulation ventilation device between air inlet house steward and the air exit, circulation ventilation device is arranged in sending into the air inlet house steward with the air current from the air exit suction through the cold source, still set up evacuating device on the air inlet house steward, evacuating device is used for displacing the gas in the furnace body, furnace body top and side wall cloth have the inlet port, and every inlet port all correspond and are connected with the air inlet flowmeter pipeline, and air flowmeter pipeline one end all is connected with the air supply, the furnace body bottom is equipped with the exhaust hole, the exhaust hole is through the exhaust connection, exhaust department is equipped with exhaust gas filter device and is used for handling the exhaust gas that discharges in the house steward.
The bottom of furnace body is equipped with the frame, be fixed with the angle frame on the outer wall of frame top both sides, the bottom fixed mounting of angle frame has the direction cylinder, the one end that the direction cylinder is close to each other is connected with the supporting shoe, the bottom both sides of hearth are equipped with the cushion, support after the hearth rises on the fire door, the direction cylinder extends the supporting shoe and supports the bottom of cushion avoids the hearth not hard up, the contact surface of supporting shoe and cushion is the inclined plane, extends so that the supporting shoe supports tight cushion towards the cushion when the supporting shoe.
The furnace body comprises side wall bricks and a furnace top brick, furnace mouth bricks are arranged at the furnace mouth of the bottom of the furnace body, the side wall bricks are arranged on the furnace mouth bricks in a stacking mode, the furnace top brick is arranged above the side wall bricks and used for sealing the top of the furnace body, the air inlet and the air outlet are all arranged on the side wall bricks, the air inlets are uniformly distributed on the side wall bricks and the furnace top bricks, and the air exhaust holes are formed in the furnace mouth bricks in a circumferential mode.
Circular hole grooves are formed in the side wall bricks and the furnace roof bricks, the circular hole grooves are used for installing a molybdenum wire fixing tool, the molybdenum wire fixing tool is used for fixing a heater, the heater is a tungsten molybdenum wire heater, the molybdenum wire fixing tool comprises a plurality of hooks, the heads of the hooks hook the body of the heater, and the tails of the hooks are fixedly connected with the furnace body.
One end of the cold source is connected with an air inlet of the circulating air exchanging device, an exhaust pipe is connected between the cold source and the exhaust outlet, an air inlet pipe is connected between the circulating air exchanging device and the air inlet main pipe, a vacuum exhaust port is arranged on the air inlet pipe, the vacuumizing device comprises a vacuum pump, the vacuum pump is connected with the vacuum exhaust port through a vacuum pipe, a circulating exhaust valve is arranged on the vacuum pipe, and the model of the circulating exhaust valve is QD-16.
The cold source is a heat exchanger, and the circulating ventilation device is a cooling circulating fan.
The air inlet of the waste gas filtering device is connected with the exhaust manifold, the exhaust port of the waste gas filtering device is connected with an exhaust chimney, and the diameter of the exhaust chimney is 10cm.
By adopting the scheme, the method has the following advantages:
the high-temperature atmosphere bell jar furnace comprises a furnace body, a hearth and an air source, wherein the bottom of the furnace body is provided with the furnace opening, the inner wall around the furnace body is provided with a heater, the hearth is propped against the furnace opening after rising, the furnace body is provided with a circulating air cooling structure, the circulating air cooling structure comprises an air inlet structure and an air outlet structure, the air inlet structure comprises air inlets annularly distributed around the furnace body, the air outlet structure comprises an air outlet arranged on one side of the furnace body, the air outlet is positioned above the air inlet, the air inlets are mutually communicated through an air inlet main pipe, a cold source and a circulating air exchanging device are connected between the air inlet main pipe and the air outlet, the circulating air exchanging device is used for sucking air from the air outlet through the cold source into the air inlet main pipe, the air inlet main pipe is further provided with a vacuumizing device, the top and the side wall of the furnace body are respectively and correspondingly connected with an air inlet flowmeter pipeline, one end of each air inlet flowmeter pipeline is connected with the air source, the bottom of the furnace body is provided with an air outlet, the air outlet is connected through the air outlet main pipe, and the air outlet is provided with a filtering device for treating waste gas discharged from the waste gas. The bell jar furnace automatically adjusts the cooling capacity according to different temperature sections, thereby achieving the effect of rapid cooling, and in addition, the furnace body is vacuumized, thereby accelerating the replacement of the atmosphere in the furnace and saving the loss of process gas.
Drawings
FIG. 1 is a schematic diagram showing a front view of a high-temperature atmosphere bell jar furnace according to the present invention;
FIG. 2 is a schematic side view of a high temperature atmosphere bell jar furnace according to the present invention;
FIG. 3 is a schematic top view of a high temperature atmosphere bell jar furnace according to the present invention;
FIG. 4 is a schematic view showing the structure of the inside of a furnace body in a high-temperature atmosphere bell jar furnace according to the present invention;
FIG. 5 is a schematic view showing a looseness-preventing structure of a hearth according to the present invention;
FIG. 6 is a schematic diagram of the structure of sintering intake and exhaust in the present invention;
FIG. 7 is a schematic structural view of embodiment 1 of the present invention;
fig. 8 is a schematic structural view of embodiment 2 of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments.
Example 1:
the high-temperature atmosphere bell jar furnace as shown in figures 1-3, 6 and 7 comprises a furnace body 1, a hearth 2 and an air source, wherein the periphery of the furnace body 1 is built by a special-shaped corundum furnace chamber, the bottom of the furnace body 1 is provided with a furnace mouth 3, the inner walls of the periphery of the furnace body 1 are provided with heaters 4, and the hearth 2 is propped against the furnace mouth 3 after being lifted, namely, the bottom edge of the hearth 2 is propped against a furnace mouth brick 103 at the moment; the furnace body 1 is provided with a circulating air cooling structure, and the circulating air cooling structure can automatically adjust the cooling capacity according to different temperature sections in a hearth, so that the effect of rapid cooling is achieved; the circulating air cooling structure comprises an air inlet structure and an air outlet structure, wherein the air inlet structure comprises air inlets which are annularly distributed around the furnace body 1, the air outlet structure comprises air outlets which are formed in one side of the furnace body 1, the air outlets are located above the air inlets, the air inlets are mutually communicated through the air inlets, a cold source 7 and a circulating ventilation device 8 are connected between the air inlets and the air outlets, the circulating ventilation device 8 is used for sucking air flow from the air outlets into the air inlets through the cold source 7, 10 groups of air inlets are arranged in the embodiment, 1 group of air outlets are arranged in the embodiment, the air inlets are in the structure shown in fig. 1, the air inlets are in a closed-loop pipe shape, air inlet branch pipes 20 are connected to the air inlets, each air inlet is connected to the air inlets through a respective air inlet branch pipe 20, in the embodiment, the air inlets are connected with each air inlet, in the embodiment, a vacuum pumping device 15 is further arranged on the air inlets 5, the furnace body vacuum pumping device 15 is used for atmosphere replacement, the air inlets 1 are arranged in the embodiment, the top and the side wall of the furnace body are distributed with 18, each air inlet is connected with an exhaust hole 26 through a flow meter, and each exhaust hole 19 is connected with one end of the air outlet 1 through a flow meter and an exhaust outlet 26, and an exhaust hole 19 is arranged in the air outlet 1, and an exhaust hole is connected with the exhaust duct 1, and an exhaust outlet 19.
Example 2:
in this embodiment, the rest parts are the same as those in the embodiment, as shown in fig. 1-5 and fig. 8, the bottom of the furnace body 1 is provided with a frame 9, the bottom of the frame 9 is provided with a lifting device 22, in this embodiment, the lifting device 22 adopts a hydraulic lifting machine, the hearth 2 is arranged above the lifting device 22, the outer walls of the two sides of the top of the frame 9 are fixedly provided with corner brackets 10, the bottoms of the corner brackets 10 are fixedly provided with guide cylinders 11, one ends of the guide cylinders 11, which are close to each other, are connected with supporting blocks 12, two sides of the bottom of the hearth 2 are provided with cushion blocks 13, when the hearth 2 is lifted and is propped against the furnace mouth 3, the guide cylinders 11 stretch the supporting blocks 12 to prop against the bottom of the cushion blocks 13 to avoid loosening of the hearth 2, the contact surfaces of the supporting blocks 12 and the cushion blocks 13 are inclined surfaces, and when the supporting blocks 12 stretch towards the cushion blocks 13 so that the supporting blocks 12 prop against the cushion blocks 13. When the hearth 2 is lifted and is propped against the furnace mouth 3, the shaft extension end of the guide cylinder 11 is stretched and then pushes the supporting block 12 to prop against the bottom of the cushion block 13 so as to be used for locking the hearth 2 in the sintering process, thereby ensuring the sealing of a hearth; further, the contact surfaces of the supporting blocks 12 and the cushion blocks 13 are matched by inclined planes, when the supporting blocks 12 feed towards the cushion blocks 13, the supporting blocks 12 are abutted against the cushion blocks 13, and as the inclined planes provide lifting force for the cushion blocks 13, the cushion blocks 13 can be tightly attached to the furnace mouth 3 upwards, so that the tightness of the hearth is ensured.
Further, the furnace body 1 comprises a side wall brick 101 and a furnace top brick 102, a furnace mouth 3 at the bottom of the furnace body 1 is provided with a furnace mouth brick 103, the side wall brick 101 is arranged on the furnace mouth brick 103 in a stacking mode, the furnace top brick 102 is arranged above the side wall brick 101 and is used for closing the top of the furnace body 1, an air inlet and an air outlet are formed in the side wall brick 101, air inlets 18 are uniformly distributed in the side wall brick 101 and the furnace top brick 102, the air outlets 19 are formed in the furnace mouth brick 103 in a circumferential direction, gate valves are used for controlling air inlet and air outlet, and all the air inlet branch pipes 20, the air outlet branch pipes 21 and the air inlet flowmeter pipeline 26 are controlled by the gate valves, so that circulation of cold air is ensured.
Specifically, as shown in fig. 4, the molybdenum wire fixing tool includes a plurality of hooks 17 made of molybdenum wires, the heat resistance of the molybdenum wires is excellent, the heads of the hooks 17 hook the body of the heater 4, and the tails of the hooks 17 are fixed on the furnace roof bricks 102 and the side wall bricks 101, so that the molybdenum wire fixing tool can be approximately regarded as binding the tungsten-molybdenum wire heater body on the furnace roof bricks 102 or the side wall bricks 101, thereby improving the stability of the tungsten-molybdenum wire heater after installation. Circular hole grooves are formed in the side wall bricks 101 and the furnace roof bricks 102, the circular hole grooves are used for installing a molybdenum wire fixing tool, and the molybdenum wire fixing tool is used for fixing the heater 4, wherein the heater 4 is a tungsten-molybdenum wire heater.
In the invention, as shown in fig. 3 or fig. 8, one end of the cold source 7 is connected with an air inlet of the circulating ventilation device 8, an exhaust pipe 14 is connected between the cold source 7 and the air outlet, an air inlet pipe 24 is connected between the circulating ventilation device 8 and the air inlet main pipe 5, a vacuum exhaust opening 25 is arranged on the air inlet pipe 24, the vacuum pumping device 15 comprises a vacuum pump, the vacuum pump is connected with the vacuum exhaust opening 25 through a vacuum pipe, a circulating exhaust valve 16 is arranged on the vacuum pipe, and the model of the circulating exhaust valve 16 is QD-16. Wherein, cold source 7 is the heat exchanger, and circulation ventilation device 8 is cooling circulation fan.
In the present invention, the air inlet of the exhaust gas filtering device 28 is connected to the exhaust manifold 6, and the exhaust port is connected to an exhaust chimney 27, and the diameter of the exhaust chimney 27 is 10cm.
The bell jar furnaces of the above embodiment 1 and embodiment 2 are provided with a normal sintering intake and exhaust structure for intake and exhaust requirements for sintering the product 23 and a circulating air cooling structure for cooling the product 23.

Claims (6)

1. The utility model provides a high temperature atmosphere bell jar stove, includes furnace body (1), hearth (2) and air supply, and furnace body (1) bottom has fire door (3), is equipped with heater (4) on furnace body (1) inner wall all around, and hearth (2) are lifted the back and are in on fire door (3), a serial communication port, be equipped with circulation wind cooling structure on furnace body (1), circulation wind cooling structure includes air inlet structure and exhaust structure, air inlet structure includes the air intake of ring cloth at furnace body (1) all around, exhaust structure includes the air exit of establishing in furnace body (1) one side, the air exit is located the air intake top, the air intake is through air inlet header pipe (5) intercommunication each other, be connected with cold source (7) and circulation ventilation device (8) between air inlet header pipe (5) and the air exit, circulation ventilation device (8) are arranged in sending the air current from air inlet suction cold source (7) into air inlet header pipe (5), still set up vacuum device (15) on air inlet header pipe (5), vacuum device (15) are used for displacing gas (1) in, cloth (26) and air inlet pipeline (18) are connected with air inlet hole (18) and air inlet flow meter (18) are all corresponding to each other in top portion (1), the exhaust hole (19) is connected through an exhaust main pipe (6), and an exhaust gas filtering device (28) is arranged at the exhaust main pipe (6) and is used for treating exhaust gas exhausted from the furnace body (1);
the bottom of furnace body (1) is equipped with frame (9), be fixed with angle frame (10) on the outer wall of frame (9) top both sides, the bottom fixed mounting of angle frame (10) has direction cylinder (11), the one end that direction cylinder (11) are close to each other is connected with supporting shoe (12), the bottom both sides of hearth (2) are equipped with cushion (13), support after the rise of hearth (2) on fire mouth (3), direction cylinder (11) are elongated supporting shoe (12) support the bottom of cushion (13) and are avoided hearth (2) not hard up, the contact surface of supporting shoe (12) and cushion (13) is the inclined plane, extends so that supporting shoe (12) support cushion (13) towards cushion (13) when supporting shoe (12).
2. The high-temperature atmosphere bell jar furnace according to claim 1, wherein the furnace body (1) comprises side wall bricks (101) and a furnace top brick (102), a furnace mouth (103) is arranged at a furnace mouth (3) at the bottom of the furnace body (1), the side wall bricks (101) are arranged on the furnace mouth bricks (103) in a stacking mode, the furnace top brick (102) is arranged above the side wall bricks (101) and used for sealing the top of the furnace body (1), the air inlet and the air outlet are both arranged on the side wall bricks (101), the air inlet holes (18) are uniformly distributed on the side wall bricks (101) and the furnace top bricks (102), and the air outlet holes (19) are formed in the furnace mouth bricks (103) in a circumferential mode.
3. The high-temperature atmosphere bell jar furnace according to claim 2, wherein the side wall bricks (101) and the furnace top bricks (102) are provided with circular hole grooves, the circular hole grooves are used for installing molybdenum wire fixing tools, the molybdenum wire fixing tools are used for fixing the heater (4), the heater (4) is a tungsten molybdenum wire heater, the molybdenum wire fixing tools comprise a plurality of hooks (17), the heads of the hooks (17) hook the body of the heater (4), and the tail parts of the hooks (17) are fixedly connected with the furnace body (1).
4. The high-temperature atmosphere bell jar furnace according to claim 2, wherein one end of the cold source (7) is connected with an air inlet of the circulating ventilation device (8), an exhaust pipe (14) is connected between the cold source (7) and the exhaust outlet, an air inlet pipe (24) is connected between the circulating ventilation device (8) and the air inlet main pipe (5), a vacuum exhaust opening (25) is arranged on the air inlet pipe (24), the vacuumizing device (15) comprises a vacuum pump, and the vacuum pump is connected with the vacuum exhaust opening (25) through a vacuum pipe and is provided with a circulating exhaust valve (16) on the vacuum pipe.
5. The high-temperature atmosphere bell jar furnace according to claim 4, wherein the cold source (7) is a heat exchanger, and the circulating ventilation device (8) is a cooling circulating fan.
6. A high-temperature atmosphere bell jar furnace according to claim 1, characterized in that the gas inlet of the exhaust gas filtering device (28) is connected with the exhaust manifold (6), the gas outlet is connected with an exhaust chimney (27), and the diameter of the exhaust chimney (27) is 10cm.
CN202211738496.3A 2022-12-31 2022-12-31 High-temperature atmosphere bell jar furnace Active CN116007367B (en)

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CN116007367B true CN116007367B (en) 2023-11-14

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118224866B (en) * 2024-05-23 2024-09-10 莱芜成威电子材料有限公司 Filtering device and method for bell jar furnace

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0688682A (en) * 1992-07-20 1994-03-29 Tokai Konetsu Kogyo Co Ltd Batch baking furnace
CN202928343U (en) * 2012-11-05 2013-05-08 四川省眉山市力达电子有限责任公司 Negative pressure sintering device of bell-type furnace
CN104296529A (en) * 2014-06-27 2015-01-21 长沙矿冶研究院有限责任公司 Bell-type atmosphere furnace applicable to sintering of ITO targets
CN205352080U (en) * 2016-01-27 2016-06-29 新疆新铝铝业有限公司 Pneumatic valve locking sealed furnace door structure
CN205425802U (en) * 2016-03-14 2016-08-03 宁夏昇力恒真空设备有限公司 Set up support piece's bell jar formula high temperature sintering furnace
CN205747950U (en) * 2016-06-29 2016-11-30 南京太平洋炉业科技有限公司 A kind of negative pressure bell-jar atmosphere sintering furnace
CN209116746U (en) * 2018-10-30 2019-07-16 湖南金炉科技股份有限公司 Circulating cooling system for atmosphere bell-type furnace
CN211626082U (en) * 2019-12-17 2020-10-02 厦门市桐辉磁业有限公司 Novel bell jar sintering furnace for sintering magnetic materials
CN214308150U (en) * 2020-12-25 2021-09-28 湖南金炉科技股份有限公司 Bell jar furnace

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0688682A (en) * 1992-07-20 1994-03-29 Tokai Konetsu Kogyo Co Ltd Batch baking furnace
CN202928343U (en) * 2012-11-05 2013-05-08 四川省眉山市力达电子有限责任公司 Negative pressure sintering device of bell-type furnace
CN104296529A (en) * 2014-06-27 2015-01-21 长沙矿冶研究院有限责任公司 Bell-type atmosphere furnace applicable to sintering of ITO targets
CN205352080U (en) * 2016-01-27 2016-06-29 新疆新铝铝业有限公司 Pneumatic valve locking sealed furnace door structure
CN205425802U (en) * 2016-03-14 2016-08-03 宁夏昇力恒真空设备有限公司 Set up support piece's bell jar formula high temperature sintering furnace
CN205747950U (en) * 2016-06-29 2016-11-30 南京太平洋炉业科技有限公司 A kind of negative pressure bell-jar atmosphere sintering furnace
CN209116746U (en) * 2018-10-30 2019-07-16 湖南金炉科技股份有限公司 Circulating cooling system for atmosphere bell-type furnace
CN211626082U (en) * 2019-12-17 2020-10-02 厦门市桐辉磁业有限公司 Novel bell jar sintering furnace for sintering magnetic materials
CN214308150U (en) * 2020-12-25 2021-09-28 湖南金炉科技股份有限公司 Bell jar furnace

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