CN104296529A - Bell-type atmosphere furnace applicable to sintering of ITO targets - Google Patents
Bell-type atmosphere furnace applicable to sintering of ITO targets Download PDFInfo
- Publication number
- CN104296529A CN104296529A CN201410298798.2A CN201410298798A CN104296529A CN 104296529 A CN104296529 A CN 104296529A CN 201410298798 A CN201410298798 A CN 201410298798A CN 104296529 A CN104296529 A CN 104296529A
- Authority
- CN
- China
- Prior art keywords
- heater
- furnace
- burner hearth
- temperature
- kiln car
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Furnace Details (AREA)
Abstract
The invention discloses a bell-type atmosphere furnace applicable to sintering of ITO targets. The bell-type atmosphere furnace comprises a furnace body, a furnace frame, a cooling system, an atmosphere control and adjustment system and a temperature control system. The furnace body is of a hollow structure mounted on the furnace frame. A cavity in the furnace body is arranged to be a furnace chamber. The bottom of the furnace body is provided with a kiln car serving as a movable furnace door. The kiln car can be connected with the furnace body in a sealed mode when closed as the movable furnace door. The top and the inner walls of the four sides of the furnace chamber are provided with high-temperature refractory layers. The top of the furnace body is provided with heating elements extending downwards into the furnace chamber. A cooling air pipeline of the cooling system penetrates through the sidewall of the bottom of the furnace body and is led into the furnace chamber. A ventilating pipeline of the atmosphere control and adjustment system penetrates through the sidewall of the bottom of the furnace body and is led into the furnace chamber. The temperature control system comprises a plurality of temperature measurement thermocouples mounted on the furnace body. The bell-type atmosphere furnace has the advantages of being simple in structure, low in cost, convenient to maintain, good in sintering effect and particularly applicable to sintering of the ITO targets.
Description
Technical field
The present invention relates to a kind of industrial sintering furnace, particularly relate to a kind of atmosphere clock hood type furnace.
Background technology
ITO target is through a series of production technology machine-shaping after indium oxide and stannic oxide powder mix by a certain percentage, then the black gray expandable ceramic semiconductors that high-temperature atmosphere sintering (more than 1600 DEG C, logical oxygen sintering) is formed.ITO target is a kind of novel indium tin oxide features ceramic material, is the deep processing new high-tech product of scattered metals indium.ITO target produces one of extremely important material of transparent conducting film glass, in addition expensive, and production process difficulty is comparatively large, is still the material of international market shortage so far, only has minority developed country can produce high performance ITO target at present in the world.
Divide by current production technology, ITO target mainly contains three kinds of preparation methods: pressure sintering, hot isostatic pressing method and atmosphere sintering process.But first two preparation method is owing to existing some defects intrinsic in technique, product quality is difficult to the lifting obtaining matter.Adopt sintering process technique to prepare ITO target, need specific sintering furnace, kiln maximum temperature requires to reach 1600 DEG C, because this equipment technology content is high, and the domestic manufacturing technology not yet grasping this kiln.Further, this high temperature kiln maintenance workload is very large, and prior art is difficult to ensure effective after-sale service.Although the sintering furnace of the paid trial production this type of the external producer of part, textural anomaly is complicated, and equipment price is expensive.
Therefore, to the nucleus equipment of ITO target---large-scale atmosphere sintering furnace designs and improves, and makes it more adapt to the demand of self technique, and then promotes the raising of ITO target development & production level, and this is the problem of current those skilled in the art solution urgently.
Summary of the invention
The technical problem to be solved in the present invention overcomes the deficiencies in the prior art, provides that a kind of structure is simple, cost is low, easy to maintenance, sintering effect good and be specially adapted to the atmosphere clock hood type furnace of ITO target sintering.
For solving the problems of the technologies described above, the technical scheme that the present invention proposes is a kind of atmosphere clock hood type furnace that can be used for ITO target sintering, comprise body of heater, grate, cooling system, control climate regulating system and temperature control system, described body of heater is a hollow structure being installed on grate, inner cavity is set to burner hearth, the bottom of body of heater is provided with the kiln car as movable fire door, and kiln car is tightly connected as being formed with body of heater during movable fire door cut out, the top of described burner hearth and the inwall of surrounding are provided with high-temperature refractory layer, the top of described body of heater is provided with heating element heater and extends downward in burner hearth, the cooling air pipeline of described cooling system passes the sidewall of bottom of furnace body and leads in burner hearth, the vent line of described control climate regulating system passes the sidewall of bottom of furnace body and leads in burner hearth, described temperature control system comprises the multiple temperature thermocouples be installed on body of heater.
In the technical scheme of the invention described above, by improving the cloth set direction of heating element heater, make the thermo parameters method of whole atmosphere clock hood type furnace more even, the control of warm area is more prone to, and is more prone to the requirement meeting ITO target high-temperature heating; Additionally by bottom position cooling air pipeline and vent line being laid in body of heater, make the air inlet of atmosphere gas more even, cooling effectiveness is more efficient, more meets sintering characteristic and the requirement of ITO target.
In the atmosphere clock hood type furnace of the invention described above, preferably, described kiln car is installed on track, and kiln car realizes its keying as movable fire door by a connected elevating mechanism.
In the atmosphere clock hood type furnace of the invention described above, preferred, when described kiln car cuts out as movable fire door, kiln car to be formed in conjunction with the double containment pattern of sand seal and body of heater by the sealing of light fibre blanket and is tightly connected.Concrete, light fibre blanket hermetically-sealed construction preferably refers to that the part that described kiln car and the high-temperature refractory layer of bottom of furnace body directly contact is provided with a light fibre blanket.The hermetically-sealed construction of described sand seal preferably includes the sand sealing groove being arranged at kiln car surrounding edge place and the double-deck sand sealing knife being arranged at bottom of furnace body, described sand sealing groove is positioned at the outside of light fibre blanket, described double-deck sand sealing knife is arranged at below the high-temperature refractory layer of bottom of furnace body, and the described sand sealing groove of double-deck sand sealing knife docking insertion realizes sand seal.
In above-mentioned preferred hermetically-sealed construction, the part that first the present invention directly contacts at kiln car and the high-temperature refractory layer of kilneye is provided with the resistant to elevated temperatures light fibre blanket of one deck, and this light fibre blanket is particularly preferably alumina silicate fibre blanket (wherein Al
2o
3content is higher than 95%), it has the features such as unit weight is little, good springiness, high temperature resistant, compressibility is strong, and when kiln car rises, light fibre blanket is compressed into the half height of normality, can play and well tentatively seal insulating effect, prevent the flowing of high temperature gas flow.On this basis, our further a set of sand seal system of decision design again.Traditional sand seal structure generally only uses single sand seal blade, because the sealing sand of sand sealing groove inside is after repeatedly using, sand surface out-of-flatness phenomenon may be there is, local is high or local is low, thus make sand sealing knife local also there will be situation about not inserting completely in sand, high-temperature gas is caused to overflow, above-mentioned preferred technical scheme have employed double-deck sand sealing knife pattern, the measure-alike sand sealing knife of two panels is inserted in sand sealing groove simultaneously, such one side causes the probability of leakage to be a half due to the out-of-flatness of sand face, if double-deck sand sealing knife all contacts fully with sealing sand on the other hand, one air buffer will be formed between double-deck sand sealing knife, because the thermal conductivity factor of air is very low, the surface temperature of kiln car and the outer box hat of kilneye can be effectively reduced, play energy-conservation while also can play safety protection function.
In the atmosphere clock hood type furnace of the invention described above, preferably, described body of heater top is provided with the installing hole through furnace roof steel plate and furnace roof high-temperature refractory layer, and described heating element heater is U-shaped Si-Mo rod, and U-shaped Si-Mo rod stretches in burner hearth straight down through described installing hole; And heating element heater is arranged around burner hearth, the plane at heating element heater place and inboard wall of burner hearth perpendicular quadrature.
In the atmosphere clock hood type furnace of the invention described above, preferably, described high-temperature refractory layer is assembled by multiple refractory material chunk, and between each refractory material chunk, extruding formation one seals entirety mutually; Described refractory material chunk is fixed on the outer box hat of body of heater by outer anchorage style.Because burner hearth is inner without the filler required for interior anchorage style, this just decreases the possibility of fire.
In the atmosphere clock hood type furnace of the invention described above, preferably, described cooling system comprises the centrifugal blower that provides cooling air, centrifugal blower entrance point configuration air cleaner, the port of export is installed Air control valve and is connected on a female pipe by pipeline (preferred stainless steel tube), female pipe evenly offers multiple air inlet tubule, and each air inlet tubule is connected to the cooling air pipeline of bottom of furnace body.
In the atmosphere clock hood type furnace of the invention described above, preferably, described control climate regulating system also comprises the pressure switch be arranged on vent line, pressure-reducing valve, magnetic valve and glass rotameter.The atmosphere gas flow entering furnace interior each point can be controlled by glass rotameter, thus the atmosphere of regulable control furnace interior.
In the atmosphere clock hood type furnace of the invention described above, preferably, the top of described body of heater is provided with steam vent, and described steam vent is provided with lower cover, lower cover offers large aperture through hole; The large aperture through hole of lower cover is provided with upper cover plate, and upper cover plate is provided with small-bore through hole; Upper cover plate drives it to open by a drive unit or closes large aperture through hole.
In the atmosphere clock hood type furnace of the invention described above, preferably, described body of heater is rectangular cylindrical, the sidewall bottom two long limits of described body of heater offers the air admission hole being communicated with cooling air pipeline and vent line, and each air admission hole all buries porcelain bushing underground in the part through high-temperature refractory layer; Described temperature thermocouple is installed in the position near four corners, body of heater top, and burner hearth is divided into four heating regions.In order to control the distribution of heating-up temperature in body of heater and temperature field better, can by setting up temperature control modules and regulating accordingly the temperature in stove according to the measured value of each warm area.
For the ease of the whole atmosphere clock hood type furnace of more intelligentized control, optimize human-computer interaction interface simultaneously, control system can be equipped with to the atmosphere clock hood type furnace of the invention described above, the elevating mechanism of the drive system of described kiln car, kiln car, cooling system, control climate regulating system and temperature control system etc. are all connected with control system, and by conventional control module, Comprehensive Control are carried out to whole atmosphere clock hood type furnace.
Compared with prior art, the invention has the advantages that:
1, the invention provides a kind of agglomerating plant that can be used for large-size ITO target material, and other sintering furnace existing is difficult to the sintering being applicable to large-size ITO target material;
2, atmosphere clock hood type furnace of the present invention devises the sealing device and testing and analysis system with Multiple detection kilneye place air-tightness function; This not only more can ensure the sintering quality of ITO target, and all has positive effect to energy-saving and cost-reducing and device security;
3, because ITO target sintering temperature is high, the structure of advantageous embodiment of the present invention refractory fibre chunk and set-up mode (comprise and select the preferably measure such as refractory material density), make to reach perfect combination on cost and heat-insulating property, compare other structure of refractory existing, the external skin temperatures of furnace shell of the present invention is lower, more energy-conservation and safety;
4, the motion of horizontal direction can be carried out in the present invention by kiln car by track, be conducive to the handling of sintered material, effectively can increase operating efficiency and improve the security of constructing;
5, the present invention is improved by the layout to atmosphere clock hood type furnace, heater, cooling system and temperature control system etc. and is optimized, the present invention is made more easily to meet high-temperature heating requirement when heating for ITO target, heating and cooling efficiency can be improved, make temperature field, air-flowing environment distribution more even, ensure the sintering quality of ITO target better.
Generally speaking, atmosphere clock hood type furnace structure of the present invention is simple, cost is low, energy-saving safe, operating efficiency are high, be conducive to the sintering quality ensureing ITO target, has broad application prospects at the sintering art of ITO target.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the embodiment of the present invention, be briefly described to the accompanying drawing used required in embodiment below, apparently, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of the atmosphere clock hood type furnace in present pre-ferred embodiments.
The body of heater that Fig. 2 is the atmosphere clock hood type furnace shown in Fig. 1 and kiln car assembling after sectional view.
Fig. 3 is the partial enlarged drawing at A place in Fig. 2 of the present invention.
Marginal data:
1, body of heater; 2, cylinder; 3, high-temperature refractory layer; 4, temperature thermocouple; 5, cooling system; 6, control climate regulates pipe-line system; 7, Air control valve; 8, glass rotameter; 9, grate; 10, elevating mechanism; 11, material; 12, kiln car; 13, track; 14, centrifugal blower; 15, air cleaner; 16, control climate case; 17, heating element heater; 18, burner hearth; 19, upper cover plate; 20, lower cover; 21, atmosphere gas air admission hole; 22, cooling air fresh air inlet; 23, light fibre blanket; 24, double-deck sand sealing knife; 25, sand sealing groove; 26, emergy.
Detailed description of the invention
For the ease of understanding the present invention, hereafter will do to describe more comprehensively, meticulously to the present invention in conjunction with Figure of description and preferred embodiment, but protection scope of the present invention is not limited to following specific embodiment.
It should be noted that, when a certain element is described on " be fixed on, be fixed in, be connected to or be communicated in " another element, it can be directly fixing, affixed, connect or be communicated with on another element, also can be by other intermediate connectors indirectly fixing, affixed, connection or connection on another element.
Unless otherwise defined, hereinafter used all technical terms are identical with the implication that those skilled in the art understand usually.The object of technical term used herein just in order to describe specific embodiment is not be intended to limit the scope of the invention.
Apart from special instruction, the various reagent used in the present invention, material are can commodity commercially or can by the obtained product of known method.
Embodiment:
The atmosphere clock hood type furnace for ITO target sintering as shown in Figure 1 and Figure 2, comprises body of heater 1, grate 9, cooling pipe 5, control climate regulating system 6 and temperature control system.Grate 9 is installed and is positioned ground, and body of heater 1 is installed on above grate 9, and is bolted, and makes the displacement in grate 9 not occurred level direction.
As shown in Figure 1 and Figure 2, body of heater 1 is a rectangular cylindrical hollow structure being installed on grate 9, main employing corrosion resistant plate splicing is welded, inner cavity is set to burner hearth 18, the top of burner hearth 18 and the inwall of surrounding are provided with high-temperature refractory layer 3, the cooling air pipeline of cooling system passes the sidewall of bottom of furnace body and leads in burner hearth 18, the vent line of control climate regulating system 6 passes the sidewall bottom body of heater 1 and leads in burner hearth 18, and temperature control system comprises the multiple temperature thermocouples 4 be installed on body of heater 1.
As shown in Figure 1 and Figure 2, the bottom of body of heater 1 is provided with the kiln car 12 as movable fire door, body of heater 1 bottom opening, and for taking up entering of the kiln car 12 of material 11, and kiln car 12 is tightly connected as being formed with body of heater 1 during movable fire door cut out.Kiln car 12 is installed on two parallel tracks 13, and track 13 is mounted on ground, and kiln car 12 can horizontal movement thereon.In addition, kiln car 12 realizes its keying as movable fire door by a connected elevating mechanism 10.Load-bearing pillar kiln car 12 being equipped with resistant to elevated temperatures ceramic alumina fiber plate, high temperature brick and supporting, when material 11 is positioned over after on kiln car 12, kiln car 12 is moved along track 13, after kiln car 12 and positioning means contacts, lentamente kiln car 12 is promoted by elevating mechanism 10, be provided with location grating in the appropriate location of grate 9, after the Grating examinations to signal of location, kiln car 12 is that is out of service.
As shown in Figure 2 and Figure 3, when kiln car 12 cuts out as movable fire door, kiln car 12 seals to be formed in conjunction with the double containment pattern of sand seal and body of heater 1 by light fibre blanket 23 and is tightly connected.The part that kiln car 12 and the high-temperature refractory layer 3 bottom body of heater 1 directly contact is provided with a light fibre blanket 23.The hermetically-sealed construction of sand seal comprises the sand sealing groove 25 being arranged at kiln car 12 surrounding edge place and the double-deck sand sealing knife 24 be arranged at bottom body of heater 1, sand sealing groove 25 is positioned at the outside of light fibre blanket 23, double-deck sand sealing knife 24 is arranged at below the high-temperature refractory layer 3 bottom body of heater 1, and double-deck sand sealing knife 24 docking insertion sand sealing groove 25 realizes sand seal.Concrete sealing principle is: after kiln car 12 enters burner hearth 18 and locates, the heat-resistant light tapetum fibrosum 23 of kiln car 12 edge is compressed, and is tentatively sealed by burner hearth 18, and ensures that the high temperature gas flow in burner hearth 18 can not directly overflow; Then, bottom body of heater 1, outmost turns is also provided with the double-deck sand sealing knife 24 of a circle metal, and double-deck sand sealing knife 24 can insert further and be equipped with in the sand sealing groove 25 of emergy 26, plays the effect again sealed, ensure that the air-tightness of burner hearth.
As shown in Figure 1 and Figure 2, body of heater 1 top is provided with through the heating element heater installing hole of furnace roof steel plate and furnace roof high-temperature refractory layer 3, thermocouple mounting hole and steam vent, the top of body of heater 1 is provided with heating element heater 17 by heating element heater installing hole, and extends downward in burner hearth 18.Heating element heater 17 in the present embodiment is U-shaped Si-Mo rod, and U-shaped Si-Mo rod stretches in burner hearth 18 straight down through heating element heater installing hole.Heating element heater 17 is evenly arranged around burner hearth 18, makes burner hearth regional homogeneous heating, for improving the efficiency of heating surface, the plane at heating element heater 17 place and burner hearth 18 inwall (wall that high-temperature refractory layer 3 forms) perpendicular quadrature.
In the present embodiment, high-temperature refractory layer 3 is assembled by multiple refractory material chunk, and between each refractory material chunk, extruding formation one seals entirety mutually; Refractory material chunk is fixed on the outer box hat of body of heater 1 by outer anchorage style.In the present embodiment, the refractory material that high-temperature refractory layer 3 is selected must bear the high temperature of 1600 DEG C for a long time under pure oxygen atmosphere, and has the ability of certain anti-airflow scouring, and for this reason, we have selected existing Al on market
2o
3the refractory material chunk that content is high, its density reaches 200kg/m
3.For avoiding body of heater 1 outside wall temperature too high, reducing energy loss, have selected the very little light-weight refractory of thermal conductivity factor at the outer box hat place near body of heater 1 cotton.
As shown in Figure 1, in the atmosphere clock hood type furnace of the present embodiment, cooling system 5 comprises the quiet centrifugal blower 14 that provides cooling air, centrifugal blower 14 entrance point configuration air cleaner 15, the port of export is installed Air control valve 7 and is connected on a female pipe by pipeline, female pipe evenly offers multiple air inlet tubule, and each air inlet tubule is connected to the cooling air pipeline bottom body of heater 1.All connecting lines that cooling air passes through all adopt stainless steel tube to be formed by connecting.The air quantity of centrifugal blower 14 can regulate a frequency converter frequency be connected with centrifugal blower to regulate by control system, and Air control valve 7 can control it as required by control system and open and close.The flow distribution channel comprising female pipe, air inlet tubule etc. to be arranged and in the state of joining end to end, this is conducive to cooling air and enters burner hearth 18 inside equably around body of heater 1.
As shown in Figure 1, in the atmosphere clock hood type furnace of the present embodiment, control climate regulating system 6 mainly comprises relevant pipe-line system, also comprise the pressure switch, explosion-proof pressure-reducing valve, the magnetic valve that are arranged on control climate case 16 inside and to be installed on body of heater 1 glass rotameter 8 etc. of point distribution capacity, these elements all can be connected with control system, control system by opening or closing magnetic valve to control the atmosphere gas kind entering burner hearth 18, and can send warning when bleed pressure is too low.By regulating gas concentration and the governing speed of maximum fan-out capability adjustable burner hearth 18 inside of glass rotameter 8.When sintering, need the protective gas constantly adding technological requirement in burner hearth 18, to meet the demand that material 11 sinters.For making burner hearth 18 have comparatively uniform air-flowing environment distribution everywhere, the present invention selects the high-temperature refractory layer 3 bottom body of heater 1 liang of long limit and outer box hat place to offer multiple atmosphere gas air admission hole 21.Same, when lowering the temperature, in order to improve rate of temperature fall, bottom burner hearth 18 liang of long limits, also offer cooling air fresh air inlet 22.All atmosphere gas air admission holes 21, cooling air fresh air inlet 22 all bury porcelain bushing underground in the part through high-temperature refractory layer 3, are not destroyed to protect refractory material.
For coordinating the demand of the various inlet amount of above-mentioned cooling system 5 and atmosphere controlling and regulating system 6, be provided with two gear steam vents at body of heater 1 top.When the little air quantity cooling of needs, cylinder 2 action, closes the upper cover plate 19 at body of heater 1 top, and gas is discharged from the small-bore through hole that upper cover plate 19 is offered; When requiring to carry more air quantity, cylinder 2 pulls furnace upper cover plate 19 to open in 90 ° of positions, discharges in the large aperture through hole of the lower cover 20 that gas is arranged from bottom.High-temperature oxydation aluminum fiber chunk and the porcelain bushing for ventilating all is lined with in upper cover plate 19 and lower cover 20.
In the atmosphere clock hood type furnace of the present embodiment, high-temperature refractory layer 3 inside forms burner hearth 18, and the cavity space of burner hearth 18 is divided into multiple heating region.Concrete burner hearth 18 is divided into 4 regions in the present embodiment, and respectively by four temperature thermocouple 4 thermometrics, when being equipped with control system, temperature value can be sent to control system by four temperature thermocouples 4.
In order to improve automatic control level, the atmosphere clock hood type furnace of the present embodiment also comprises control system, this control system primary responsibility from the various sensor readings equipment and analyzing and processing, in conjunction with the technological requirement of user's setting, do further process, and control the action of corresponding executing agency.Meanwhile, also there is the functions such as historical record preservation, inquiry, printing.Atmosphere clock hood type furnace provided by the invention, than the same class equipment of current domestic import, has the multiple advantages such as purchase cost is low, easy to maintenance, maintenance cycle is short, service efficiency is high, economizing on energy and electricity, for the development important in inhibiting of ITO industry.
To the above-mentioned explanation of the embodiment of the present invention, professional and technical personnel in the field are realized or uses the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein can without departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention can not be restricted to embodiment illustrated herein.
Claims (10)
1. one kind can be used for the atmosphere clock hood type furnace of ITO target sintering, comprise body of heater, grate, cooling system, control climate regulating system and temperature control system, described body of heater is a hollow structure being installed on grate, inner cavity is set to burner hearth, the bottom of body of heater is provided with the kiln car as movable fire door, and kiln car is tightly connected as being formed with body of heater during movable fire door cut out, the top of described burner hearth and the inwall of surrounding are provided with high-temperature refractory layer, it is characterized in that: the top of described body of heater is provided with heating element heater and extends downward in burner hearth, the cooling air pipeline of described cooling system passes the sidewall of bottom of furnace body and leads in burner hearth, the vent line of described control climate regulating system passes the sidewall of bottom of furnace body and leads in burner hearth, described temperature control system comprises the multiple temperature thermocouples be installed on body of heater.
2. atmosphere clock hood type furnace according to claim 1, is characterized in that: described kiln car is installed on track, and kiln car realizes its keying as movable fire door by a connected elevating mechanism.
3. atmosphere clock hood type furnace according to claim 2, is characterized in that: when described kiln car cuts out as movable fire door, and kiln car to be formed in conjunction with the double containment pattern of sand seal and body of heater by the sealing of light fibre blanket and is tightly connected.
4. atmosphere clock hood type furnace according to claim 3, is characterized in that: the part that described kiln car and the high-temperature refractory layer of bottom of furnace body directly contact is provided with a light fibre blanket.
5. atmosphere clock hood type furnace according to claim 3, it is characterized in that: the hermetically-sealed construction of described sand seal comprises the sand sealing groove being arranged at kiln car surrounding edge place and the double-deck sand sealing knife being arranged at bottom of furnace body, described sand sealing groove is positioned at the outside of light fibre blanket, described double-deck sand sealing knife is arranged at below the high-temperature refractory layer of bottom of furnace body, and the described sand sealing groove of double-deck sand sealing knife docking insertion realizes sand seal.
6. the atmosphere clock hood type furnace according to any one of Claims 1 to 5, it is characterized in that: described body of heater top is provided with the installing hole through furnace roof steel plate and furnace roof high-temperature refractory layer, described heating element heater is U-shaped Si-Mo rod, and U-shaped Si-Mo rod stretches in burner hearth straight down through described installing hole; And heating element heater is arranged around burner hearth, the plane at heating element heater place and inboard wall of burner hearth perpendicular quadrature.
7. the atmosphere clock hood type furnace according to any one of Claims 1 to 5, is characterized in that: described high-temperature refractory layer is assembled by multiple refractory material chunk, and between each refractory material chunk, extruding formation one seals entirety mutually; Described refractory material chunk is fixed on the outer box hat of body of heater by outer anchorage style.
8. the atmosphere clock hood type furnace according to any one of Claims 1 to 5, it is characterized in that: described cooling system comprises the centrifugal blower that provides cooling air, centrifugal blower entrance point configuration air cleaner, the port of export is installed Air control valve and is connected on a female pipe by pipeline, female pipe evenly offers multiple air inlet tubule, and each air inlet tubule is connected to the cooling air pipeline of bottom of furnace body.
9. the atmosphere clock hood type furnace according to any one of Claims 1 to 5, is characterized in that: described control climate regulating system also comprises the pressure switch be arranged on vent line, pressure-reducing valve, magnetic valve and glass rotameter; The top of described body of heater is provided with steam vent, and described steam vent is provided with lower cover, lower cover offers large aperture through hole; The large aperture through hole of lower cover is provided with upper cover plate, and upper cover plate is provided with small-bore through hole; Upper cover plate drives it to open by a drive unit or closes large aperture through hole.
10. the atmosphere clock hood type furnace according to any one of Claims 1 to 5, it is characterized in that: described body of heater is rectangular cylindrical, the sidewall of the bottom of described body of heater offers the air admission hole being communicated with cooling air pipeline and vent line, each air admission hole all buries porcelain bushing underground in the part through high-temperature refractory layer; Described temperature thermocouple is installed in the position near four corners, body of heater top, and burner hearth is divided into four heating regions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410298798.2A CN104296529B (en) | 2014-06-27 | 2014-06-27 | Can be used for the atmosphere clock hood type furnace of ITO target sintering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410298798.2A CN104296529B (en) | 2014-06-27 | 2014-06-27 | Can be used for the atmosphere clock hood type furnace of ITO target sintering |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104296529A true CN104296529A (en) | 2015-01-21 |
| CN104296529B CN104296529B (en) | 2016-06-15 |
Family
ID=52316366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410298798.2A Active CN104296529B (en) | 2014-06-27 | 2014-06-27 | Can be used for the atmosphere clock hood type furnace of ITO target sintering |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104296529B (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106197012A (en) * | 2016-07-12 | 2016-12-07 | 淄博科浩热能工程有限公司 | Brand-new muffle burn batch-type kiln furnace structure |
| CN106322985A (en) * | 2015-07-10 | 2017-01-11 | 四川中豪科技有限公司 | Inverted high-efficiency automatic electric heating furnace |
| CN106766919A (en) * | 2016-12-14 | 2017-05-31 | 上海电气钠硫储能技术有限公司 | A kind of sodium-sulphur battery solid electrolyte tube sintering equipment |
| CN106949734A (en) * | 2017-05-03 | 2017-07-14 | 苏州科尔珀恩机械科技有限公司 | A kind of atmosphere clock hood type furnace |
| CN107589148A (en) * | 2017-11-01 | 2018-01-16 | 中钢集团洛阳耐火材料研究院有限公司 | A kind of controlled atmosphere unstable state heat-pole method heat conduction coefficient tester |
| CN109237940A (en) * | 2018-10-30 | 2019-01-18 | 湖南金炉科技股份有限公司 | A kind of bell-type furnace |
| CN110411207A (en) * | 2019-09-02 | 2019-11-05 | 南京派赛菲克炉业科技有限公司 | A kind of fully-automatic intelligent bell-type furnace |
| CN110723889A (en) * | 2019-10-21 | 2020-01-24 | 扬州市丰泽特种电缆材料有限公司 | Kiln equipment convenient to clean and overhaul based on borosilicate glass is effective |
| CN111043859A (en) * | 2019-12-17 | 2020-04-21 | 湖南金炉科技股份有限公司 | Atmosphere bell-jar furnace for microwave ferrite sintering |
| CN112179130A (en) * | 2020-09-30 | 2021-01-05 | 上海宝钢磁业有限公司 | Bell jar furnace with high-temperature uniformity |
| CN114608334A (en) * | 2022-03-10 | 2022-06-10 | 江苏乾鹏科技有限公司 | Stepless temperature-changing rapid sintering device, method, terminal and readable storage medium |
| CN115893989A (en) * | 2022-12-29 | 2023-04-04 | 芜湖映日科技股份有限公司 | Process method for refining ITO target material micro grain structure and enhancing mechanical strength |
| CN116007367A (en) * | 2022-12-31 | 2023-04-25 | 无锡中工智能装备有限公司 | High-temperature atmosphere bell jar furnace |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000203945A (en) * | 1998-12-28 | 2000-07-25 | Mitsui Mining & Smelting Co Ltd | Sintering furnace for sputtering target and production of ito sputtering target using the same |
| CN101429649A (en) * | 2003-09-19 | 2009-05-13 | 株式会社日立国际电气 | Producing method of semiconductor device and substrate processing apparatus |
| CN201476537U (en) * | 2009-06-17 | 2010-05-19 | 长沙矿冶研究院 | Artificial intelligent controllable atmosphere bell-type resistance furnace for sintering soft magnetic ferrite |
| CN101806538A (en) * | 2009-02-17 | 2010-08-18 | 扬州冶金机械有限公司 | High temperature trolley type heating furnace |
| CN103542715A (en) * | 2013-09-27 | 2014-01-29 | 合肥高歌热处理应用技术有限公司 | Composite sintering furnace for target material |
| CN103868350A (en) * | 2014-03-25 | 2014-06-18 | 宁夏日晶新能源装备股份有限公司 | Semiconductor target sintering device and method |
| CN204268872U (en) * | 2014-06-27 | 2015-04-15 | 长沙矿冶研究院有限责任公司 | Can be used for the atmosphere clock hood type furnace of ITO target sintering |
-
2014
- 2014-06-27 CN CN201410298798.2A patent/CN104296529B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000203945A (en) * | 1998-12-28 | 2000-07-25 | Mitsui Mining & Smelting Co Ltd | Sintering furnace for sputtering target and production of ito sputtering target using the same |
| CN101429649A (en) * | 2003-09-19 | 2009-05-13 | 株式会社日立国际电气 | Producing method of semiconductor device and substrate processing apparatus |
| CN101806538A (en) * | 2009-02-17 | 2010-08-18 | 扬州冶金机械有限公司 | High temperature trolley type heating furnace |
| CN201476537U (en) * | 2009-06-17 | 2010-05-19 | 长沙矿冶研究院 | Artificial intelligent controllable atmosphere bell-type resistance furnace for sintering soft magnetic ferrite |
| CN103542715A (en) * | 2013-09-27 | 2014-01-29 | 合肥高歌热处理应用技术有限公司 | Composite sintering furnace for target material |
| CN103868350A (en) * | 2014-03-25 | 2014-06-18 | 宁夏日晶新能源装备股份有限公司 | Semiconductor target sintering device and method |
| CN204268872U (en) * | 2014-06-27 | 2015-04-15 | 长沙矿冶研究院有限责任公司 | Can be used for the atmosphere clock hood type furnace of ITO target sintering |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106322985A (en) * | 2015-07-10 | 2017-01-11 | 四川中豪科技有限公司 | Inverted high-efficiency automatic electric heating furnace |
| CN106197012A (en) * | 2016-07-12 | 2016-12-07 | 淄博科浩热能工程有限公司 | Brand-new muffle burn batch-type kiln furnace structure |
| CN106766919A (en) * | 2016-12-14 | 2017-05-31 | 上海电气钠硫储能技术有限公司 | A kind of sodium-sulphur battery solid electrolyte tube sintering equipment |
| CN106766919B (en) * | 2016-12-14 | 2019-03-19 | 上海电气钠硫储能技术有限公司 | A kind of sodium-sulphur battery solid electrolyte tube sintering equipment |
| CN106949734A (en) * | 2017-05-03 | 2017-07-14 | 苏州科尔珀恩机械科技有限公司 | A kind of atmosphere clock hood type furnace |
| CN107589148A (en) * | 2017-11-01 | 2018-01-16 | 中钢集团洛阳耐火材料研究院有限公司 | A kind of controlled atmosphere unstable state heat-pole method heat conduction coefficient tester |
| CN109237940A (en) * | 2018-10-30 | 2019-01-18 | 湖南金炉科技股份有限公司 | A kind of bell-type furnace |
| CN110411207A (en) * | 2019-09-02 | 2019-11-05 | 南京派赛菲克炉业科技有限公司 | A kind of fully-automatic intelligent bell-type furnace |
| CN110723889A (en) * | 2019-10-21 | 2020-01-24 | 扬州市丰泽特种电缆材料有限公司 | Kiln equipment convenient to clean and overhaul based on borosilicate glass is effective |
| CN111043859A (en) * | 2019-12-17 | 2020-04-21 | 湖南金炉科技股份有限公司 | Atmosphere bell-jar furnace for microwave ferrite sintering |
| CN112179130A (en) * | 2020-09-30 | 2021-01-05 | 上海宝钢磁业有限公司 | Bell jar furnace with high-temperature uniformity |
| CN112179130B (en) * | 2020-09-30 | 2022-07-15 | 上海宝钢磁业有限公司 | Bell jar furnace with high-temperature uniformity |
| CN114608334A (en) * | 2022-03-10 | 2022-06-10 | 江苏乾鹏科技有限公司 | Stepless temperature-changing rapid sintering device, method, terminal and readable storage medium |
| CN115893989A (en) * | 2022-12-29 | 2023-04-04 | 芜湖映日科技股份有限公司 | Process method for refining ITO target material micro grain structure and enhancing mechanical strength |
| CN116007367A (en) * | 2022-12-31 | 2023-04-25 | 无锡中工智能装备有限公司 | High-temperature atmosphere bell jar furnace |
| CN116007367B (en) * | 2022-12-31 | 2023-11-14 | 无锡中工智能装备有限公司 | High-temperature atmosphere bell jar furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104296529B (en) | 2016-06-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104296529B (en) | Can be used for the atmosphere clock hood type furnace of ITO target sintering | |
| CN204268872U (en) | Can be used for the atmosphere clock hood type furnace of ITO target sintering | |
| CN201187942Y (en) | Cold top protection controllable atmosphere high temperature elevating furnace | |
| CN103307894A (en) | Waste heat recovery device and waste heat recovery method during condensation of molten calcium carbide | |
| CN105444566A (en) | Furnace body of atmosphere protection three-pushed-slab kiln | |
| CN207074008U (en) | High temperature elevator furnace | |
| US7748237B2 (en) | Convection glass heating furnace | |
| CN202676893U (en) | Air-exchange aging test box | |
| CN104891486A (en) | Graphitization furnace with high heat insulation performance | |
| CN210796343U (en) | Device for monitoring and adjusting temperature of annular air duct on line | |
| CN201269689Y (en) | Atmosphere sintering furnace | |
| CN205537094U (en) | Fill water cooling formula hydrogen sintering stove | |
| CN205482318U (en) | Hydrogen sintering stove heat energy cyclic utilization device | |
| CN205175109U (en) | Atmosphere protection heating furnace | |
| CN205403481U (en) | High -power microwave high temperature smelting device | |
| CN202955963U (en) | Industrial microwave sintered hard alloy device | |
| CN204329589U (en) | A kind of continuous-type microwave electricity Hybrid Heating household china calcining kiln | |
| CN113154421A (en) | Built-in flue blind plate | |
| CN202254892U (en) | Waste gas afterheat utilization device | |
| CN202582188U (en) | Fast-cooling testing heating furnace | |
| CN206847389U (en) | A kind of panel protector on lithium electric material sintering batch-type furnace | |
| CN204154099U (en) | A kind of energy-conservation Muffle furnace | |
| CN206956086U (en) | A kind of vacuum gas quenches furnace body temperature control system | |
| CN205165833U (en) | Be used for cast iron refrigerated bi -pass fan | |
| CN107906948A (en) | A kind of horizontal-type high temperature hydrogen resistance furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20160905 Address after: Workshop of 410000 Hunan province Changsha hi tech Development Zone, Lu Tin Road No. 18 Hunan long-term lithium Branch Co. Ltd. 203-205 room Patentee after: HUNAN JINLU TECHNOLOGY CO., LTD. Address before: Yuelu District City, Hunan province 410000 Changsha Lushan Road No. 966 Patentee before: Changsha Research Institute of Mining and Metallurgy Co., Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Room 203-205, Hunan Changyuan Lithium Co., Ltd., No. 18 Lutian Road, Changsha High-tech Development Zone, Hunan Province Patentee after: Hunan golden furnace Polytron Technologies Inc Address before: Room 203-205, Hunan Changyuan Lithium Co., Ltd., No. 18 Lutian Road, Changsha High-tech Development Zone, Hunan Province Patentee before: HUNAN JINLU TECHNOLOGY CO., LTD. |