CN104296529B - Can be used for the atmosphere clock hood type furnace of ITO target sintering - Google Patents
Can be used for the atmosphere clock hood type furnace of ITO target sintering Download PDFInfo
- Publication number
- CN104296529B CN104296529B CN201410298798.2A CN201410298798A CN104296529B CN 104296529 B CN104296529 B CN 104296529B CN 201410298798 A CN201410298798 A CN 201410298798A CN 104296529 B CN104296529 B CN 104296529B
- Authority
- CN
- China
- Prior art keywords
- heater
- burner hearth
- kiln car
- temperature
- hood type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Furnace Details (AREA)
Abstract
The invention discloses a kind of atmosphere clock hood type furnace that can be used for ITO target sintering, including body of heater, grate, cooling system, control climate regulates system and temperature control system, body of heater is a hollow structure being installed on grate, internal cavity is set to burner hearth, the bottom of body of heater is provided with the kiln car as movable fire door, and kiln car can be formed with body of heater when cutting out as movable fire door and be tightly connected, the top of burner hearth and the inwall of surrounding are provided with high-temperature refractory layer, the top of body of heater is provided with heating element heater and extends downward in burner hearth, the cooling air pipeline of cooling system passes the sidewall of bottom of furnace body and leads in burner hearth, control climate regulates the sidewall of the vent line traverse bottom of furnace body of system and leads in burner hearth, temperature control system includes the multiple temperature thermocouples being installed on body of heater. the present invention has the advantages such as simple in construction, cost is low, easy to maintenance, sintering effect is good, and is particularly well-suited to the sintering of ITO target.
Description
Technical field
The present invention relates to a kind of industrial sintering furnace, particularly relate to a kind of atmosphere clock hood type furnace.
Background technology
ITO target is Indium sesquioxide. and stannic oxide powder mix by a certain percentage after through a series of production technology machine-shaping, then the black gray expandable ceramic semiconductors that high-temperature atmosphere sintering (more than 1600 DEG C, logical oxygen sintering) is formed. ITO target is a kind of novel indium tin oxide features ceramic material, is the deep processing new high-tech product of scattered metals indium. ITO target is to produce one of extremely important material of transparent conducting film glass, in addition expensive, and production process difficulty is relatively big, is still the material of international market shortage so far, only has minority developed country can produce high performance ITO target at present in the world.
Dividing by current production technology, ITO target mainly has three kinds of preparation methoies: pressure sintering, hot isostatic pressing method and atmosphere sintering process. But first two preparation method is owing to existing some defects intrinsic in technique, product quality is difficult to obtain the lifting of matter. Adopting sintering process technique to prepare ITO target, it is necessary to specific sintering furnace, kiln maximum temperature requires to reach 1600 DEG C, because this equipment technology content is high, and the domestic manufacturing technology not yet grasping this kiln. Further, this high temperature kiln maintenance workload is very big, and prior art is it is difficult to ensure that effective after-sale service. Though the sintering furnace of the paid trial production this type of the external producer of part, textural anomaly is complicated, and equipment price is expensive.
Therefore, the large-scale atmosphere sintering furnace of the nucleus equipment of ITO target is designed and improves so that it is more adapting to the demand of self technique and then the raising of promotion ITO target development & production level, this is the problem of current those skilled in the art solution urgently.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, it is provided that a kind of simple in construction, cost are low, easy to maintenance, sintering effect is good and are particularly well-suited to the atmosphere clock hood type furnace of ITO target sintering.
For solving above-mentioned technical problem, the technical scheme that the present invention proposes is a kind of atmosphere clock hood type furnace that can be used for ITO target sintering, including body of heater, grate, cooling system, control climate regulates system and temperature control system, described body of heater is a hollow structure being installed on grate, internal cavity is set to burner hearth, the bottom of body of heater is provided with the kiln car as movable fire door, and kiln car can be formed with body of heater when cutting out as movable fire door and be tightly connected, the top of described burner hearth and the inwall of surrounding are provided with high-temperature refractory layer, the top of described body of heater is provided with heating element heater and extends downward in burner hearth, the cooling air pipeline of described cooling system passes the sidewall of bottom of furnace body and leads in burner hearth, described control climate regulates the sidewall of the vent line traverse bottom of furnace body of system and leads in burner hearth, described temperature control system includes the multiple temperature thermocouples being installed on body of heater.
In the technical scheme of the invention described above, by the cloth set direction of heating element heater is improved so that the thermo parameters method of whole atmosphere clock hood type furnace is more uniform, and the control of warm area is more prone to, and is more prone to meet the requirement of ITO target high-temperature heating; Additionally by the bottom position that cooling air pipeline and vent line are laid in body of heater so that the air inlet of atmosphere gas is more uniform, cooling effectiveness is more efficient, more meets sintering characteristic and the requirement of ITO target.
In the atmosphere clock hood type furnace of the invention described above, it is preferred that described kiln car is installed on track, and kiln car realizes its keying as movable fire door by a connected elevating mechanism.
In the atmosphere clock hood type furnace of the invention described above, it is furthermore preferred that when described kiln car cuts out as movable fire door, double containment pattern and body of heater that kiln car is sealed in conjunction with sand seal by light fibre blanket are formed and are tightly connected. Concrete, light fibre blanket seals structure and preferably refers to that the part that described kiln car directly contacts with the high-temperature refractory layer of bottom of furnace body is provided with a light fibre blanket. The sealing structure of described sand seal preferably includes the sand sealing groove being arranged at kiln car surrounding edge place and the double-deck sand sealing knife being arranged at bottom of furnace body, described sand sealing groove is positioned at the outside of light fibre blanket, described double-deck sand sealing knife is arranged at below the high-temperature refractory layer of bottom of furnace body, and double-deck sand sealing knife docking is inserted described sand sealing groove and realized sand seal.
In above-mentioned preferred sealing structure, the part that first present invention directly contacts with the high-temperature refractory layer of kilneye at kiln car is provided with one layer of resistant to elevated temperatures light fibre blanket, and this light fibre blanket is particularly preferred that alumina silicate fibre blanket (wherein Al2O3Content is higher than 95%), it has the features such as unit weight is little, good springiness, high temperature resistant, compressibility is strong, and when kiln car rises, light fibre blanket is compressed into a half height of normality, can play and well tentatively seal insulating effect, it is therefore prevented that the flowing of high temperature gas flow. on this basis, our further a set of sand seal system of decision design. traditional sand seal structure generally only uses single sand seal blade, sealing sand within sand sealing groove is after repeatedly using, it is possible that sand surface out-of-flatness phenomenon, local is high or local is low, so that sand sealing knife local also there will be the situation being not fully inserted in sand, high-temperature gas is caused to overflow, above-mentioned preferred technical scheme have employed double-deck sand sealing knife pattern, the equivalently-sized sand sealing knife of two panels is inserted simultaneously in sand sealing groove, so on the one hand owing to the out-of-flatness of sand face causes the probability of leakage to be a half, if double-deck sand sealing knife all contacts fully with sealing sand on the other hand, one air buffer will be formed between double-deck sand sealing knife, owing to the heat conductivity of air is very low, kiln car and the surface temperature of the outer box hat of kilneye can be effectively reduced, play energy-conservation while may also function as safety protection function.
In the atmosphere clock hood type furnace of the invention described above, it is preferred that described body of heater top is provided through furnace roof steel plate and the installing hole of furnace roof high-temperature refractory layer, and described heating element heater is U-shaped Si-Mo rod, U-shaped Si-Mo rod stretches in burner hearth straight down through described installing hole; And heating element heater arranges around burner hearth, the plane at heating element heater place and inboard wall of burner hearth perpendicular quadrature.
In the atmosphere clock hood type furnace of the invention described above, it is preferred that described high-temperature refractory layer is assembled by multiple refractory material chunks, between each refractory material chunk, extruding forms a sealing entirety mutually; Described refractory material chunk is fixed on the outer box hat of body of heater by outer anchorage style. Due to inside burner hearth without the implant required for interior anchorage style, this just decreases the probability of fire.
In the atmosphere clock hood type furnace of the invention described above, preferably, described cooling system includes the centrifugal blower of an offer cooling air, centrifugal blower entrance point configuration air filter, the port of export is installed Air control valve and is connected on a female pipe by pipeline (preferred stainless steel tube), uniformly offering multiple air inlet tubule on female pipe, each air inlet tubule is connected to the cooling air pipeline of bottom of furnace body.
In the atmosphere clock hood type furnace of the invention described above, it is preferred that described control climate regulates pressure switch, air relief valve, electromagnetic valve and the glass rotameter that system also includes being arranged on vent line. Can control to enter the atmosphere gas flow of furnace interior each point by glass rotameter, thus the atmosphere of regulable control furnace interior.
In the atmosphere clock hood type furnace of the invention described above, it is preferred that the top of described body of heater is provided with steam vent, and described steam vent is provided with lower cover, and lower cover offers large aperture through hole; The large aperture through hole of lower cover is provided with upper cover plate, and upper cover plate is provided with small-bore through hole; Upper cover plate is driven it to be turned on and off large aperture through hole by a driving device.
In the atmosphere clock hood type furnace of the invention described above, preferably, described body of heater is rectangular cylindrical, and the sidewall bottom two long limits of described body of heater offers the air inlet of connection cooling air pipeline and vent line, and each air inlet all buries porcelain bushing underground in the part through high-temperature refractory layer; Described temperature thermocouple is installed in the position near four corners, body of heater top, and burner hearth is divided into four heating regions. In order to better control over the distribution of heating-up temperature in body of heater and temperature field, it is possible to by setting up temperature control modules the measured value according to each warm area, the temperature in stove is regulated accordingly.
For the ease of the whole atmosphere clock hood type furnace of more intelligentized control, optimize human-computer interaction interface simultaneously, the atmosphere clock hood type furnace of the invention described above can be equipped with control system, make the drive system of described kiln car, the elevating mechanism of kiln car, cooling system, control climate regulate system and temperature control system etc. to be all connected with control system, and by conventional control module, whole atmosphere clock hood type furnace is carried out Comprehensive Control.
Compared with prior art, it is an advantage of the current invention that:
1, the invention provides a kind of agglomerating plant that can be used for large-size ITO target material, and other sintering furnace existing is difficult to be applicable to the sintering of large-size ITO target material;
2, the atmosphere clock hood type furnace of the present invention devises the sealing device and testing and analysis system with Multiple detection kilneye place air-tightness function; This not only more can guarantee that the sintering quality of ITO target, and energy-saving and cost-reducing and device security are respectively provided with positive effect;
3, owing to ITO target sintering temperature is high, the structure of advantageous embodiment of the present invention refractory fibre chunk and set-up mode (including selecting the preferably measure such as refractory material density), make to reach perfect combination on cost and heat-insulating property, compare other structure of refractory existing, the external skin temperatures of furnace shell of the present invention is lower, more energy-conservation and safety;
4, the present invention can be carried out by track by kiln car the motion of horizontal direction, be conducive to the handling of sintered material, can effectively increase work efficiency and improve the safety of construction;
5, the present invention is by improving the layout of atmosphere clock hood type furnace, heater, cooling system and temperature control system etc. and optimize, the present invention is made to be easier to when heating for ITO target meet high-temperature heating requirement, heating and cooling effectiveness can be improved, make temperature field, air-flowing environment distribution more uniform, better ensure that the sintering quality of ITO target.
Generally speaking, the atmosphere clock hood type furnace simple in construction of the present invention, cost are low, energy-saving safe, work efficiency high, advantageously ensure that the sintering quality of ITO target, and the sintering art in ITO target has broad application prospects.
Accompanying drawing explanation
In order to be illustrated more clearly that the technical scheme in the embodiment of the present invention, the accompanying drawing used required in embodiment will be briefly described below, apparently, for those of ordinary skill in the art, under the premise not paying creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of the atmosphere clock hood type furnace in present pre-ferred embodiments.
Fig. 2 is the body of heater of the atmosphere clock hood type furnace shown in Fig. 1 and kiln car assemble after sectional view.
Fig. 3 is the partial enlarged drawing at A place in Fig. 2 of the present invention.
Marginal data:
1, body of heater; 2, cylinder; 3, high-temperature refractory layer; 4, temperature thermocouple; 5, cooling system; 6, control climate regulates tubing; 7, Air control valve; 8, glass rotameter; 9, grate; 10, elevating mechanism; 11, material; 12, kiln car; 13, track; 14, centrifugal blower; 15, air filter; 16, control climate case; 17, heating element heater; 18, burner hearth; 19, upper cover plate; 20, lower cover; 21, atmosphere gas air inlet; 22, cooling air fresh air inlet; 23, light fibre blanket; 24, double-deck sand sealing knife; 25, sand sealing groove; 26, emergy.
Detailed description of the invention
For the ease of understanding the present invention, below in conjunction with Figure of description and preferred embodiment, the present invention is made more comprehensively, describes meticulously, but protection scope of the present invention is not limited to embodiment in detail below.
It should be noted that, when a certain element is described as on " be fixed on, be fixed in, be connected to or be communicated in " another element, it can be directly fixing, affixed, connect or connection is on another element, it is also possible to be by fixing, affixed, the connection indirectly of other intermediate connectors or connect on another element.
Unless otherwise defined, the implication that all technical term used hereinafter is generally understood that with those skilled in the art is identical. Technical term used herein is intended merely to the purpose describing specific embodiment, is not intended to limit the scope of the invention.
Except there being special instruction, the various reagent used in the present invention, material are can commodity commercially or can pass through the product that known method prepares.
Embodiment:
A kind of atmosphere clock hood type furnace for ITO target sintering as shown in Figure 1 and Figure 2, regulates system 6 and temperature control system including body of heater 1, grate 9, cooling pipe 5, control climate.Grate 9 is installed and is positioned ground, and body of heater 1 is installed on above grate 9, and is bolted so that the displacement in grate 9 not occurred level direction.
As shown in Figure 1 and Figure 2, body of heater 1 is a rectangular cylindrical hollow structure being installed on grate 9, main employing corrosion resistant plate splicing is welded, internal cavity is set to burner hearth 18, the top of burner hearth 18 and the inwall of surrounding are provided with high-temperature refractory layer 3, the cooling air pipeline of cooling system passes the sidewall of bottom of furnace body and leads in burner hearth 18, control climate regulates the vent line of system 6 and through the sidewall bottom body of heater 1 and leads in burner hearth 18, and temperature control system includes the multiple temperature thermocouples 4 being installed on body of heater 1.
As shown in Figure 1 and Figure 2, the bottom of body of heater 1 is provided with the kiln car 12 as movable fire door, body of heater 1 bottom opening, for taking up the entrance of the kiln car 12 of material 11, and can be tightly connected with body of heater 1 formation when kiln car 12 cuts out as movable fire door. Kiln car 12 is installed on two parallel tracks 13, and track 13 is mounted on ground, and kiln car 12 can horizontal movement thereon. It addition, kiln car 12 realizes its keying as movable fire door by a connected elevating mechanism 10. Equipped with the load-bearing pillar of resistant to elevated temperatures ceramic alumina fiber plate, high temperature brick and support on kiln car 12, after material 11 is positioned on kiln car 12, kiln car 12 is moved along track 13, after kiln car 12 and positioning means contacts, lentamente kiln car 12 is promoted by elevating mechanism 10, be provided with location grating in the appropriate location of grate 9, location Grating examinations is after signal, and kiln car 12 is that is out of service.
As shown in Figure 2 and Figure 3, when kiln car 12 cuts out as movable fire door, double containment pattern and body of heater 1 that kiln car 12 is sealed in conjunction with sand seal by light fibre blanket 23 are formed and are tightly connected. The part that kiln car 12 directly contacts with the high-temperature refractory layer 3 bottom body of heater 1 is provided with a light fibre blanket 23. The sealing structure of sand seal includes the sand sealing groove 25 being arranged at kiln car 12 surrounding edge place and is arranged at the double-deck sand sealing knife 24 bottom body of heater 1, sand sealing groove 25 is positioned at the outside of light fibre blanket 23, double-deck sand sealing knife 24 is arranged at below the high-temperature refractory layer 3 bottom body of heater 1, and double-deck sand sealing knife 24 docking is inserted sand sealing groove 25 and realized sand seal. Concrete sealing principle is: after kiln car 12 enters burner hearth 18 and positions, the heat-resistant light tapetum fibrosum 23 of kiln car 12 edge is compressed, and is tentatively sealed by burner hearth 18, and ensures that the high temperature gas flow in burner hearth 18 will not directly overflow; Then, bottom body of heater 1, outmost turns is additionally provided with a circle metal bilayer sand sealing knife 24, and double-deck sand sealing knife 24 can be further inserted into equipped with, in the sand sealing groove 25 of emergy 26, playing the effect being again sealed off, it is ensured that the air-tightness of burner hearth.
As shown in Figure 1 and Figure 2, body of heater 1 top is provided through furnace roof steel plate and the heating element heater installing hole of furnace roof high-temperature refractory layer 3, thermocouple mounting hole and steam vent, the top of body of heater 1 is provided with heating element heater 17 by heating element heater installing hole, and extends downward in burner hearth 18. Heating element heater 17 in the present embodiment is U-shaped Si-Mo rod, and U-shaped Si-Mo rod stretches in burner hearth 18 straight down through heating element heater installing hole. Heating element heater 17 is arranged evenly around along burner hearth 18 so that burner hearth regional homogeneous heating, for the raising efficiency of heating surface, the plane at heating element heater 17 place and burner hearth 18 inwall (wall of high-temperature refractory layer 3 composition) perpendicular quadrature.
In the present embodiment, high-temperature refractory layer 3 is assembled by multiple refractory material chunks, and between each refractory material chunk, extruding forms a sealing entirety mutually; Refractory material chunk is fixed on the outer box hat of body of heater 1 by outer anchorage style. In the present embodiment, the refractory material that high-temperature refractory layer 3 is selected must be able to bear for a long time the high temperature of 1600 DEG C under pure oxygen atmosphere, and has the ability of certain anti-airflow scouring, and for this, we have selected existing Al on market2O3The refractory material chunk that content is high, its density reaches 200kg/m3. For avoiding body of heater 1 outside wall temperature too high, reduce energy loss, have selected the only small light-weight refractory of heat conductivity at the outer box hat place near body of heater 1 cotton.
As shown in Figure 1, in the atmosphere clock hood type furnace of the present embodiment, cooling system 5 includes the quiet centrifugal blower 14 of an offer cooling air, centrifugal blower 14 entrance point configuration air filter 15, the port of export is installed Air control valve 7 and is connected on a female pipe by pipeline, uniformly offering multiple air inlet tubule on female pipe, each air inlet tubule is connected to the cooling air pipeline bottom body of heater 1. All connecting lines that cooling air passes through all adopt stainless steel tube to be formed by connecting. The air quantity of centrifugal blower 14 can be adjusted by control one frequency converter frequency being connected with centrifugal blower of system fading margin, and Air control valve 7 can be controlled it as required by control system and open and close. Including the flow distribution channel of female pipe, air inlet tubule etc. to arrange around body of heater 1 and be the state of joining end to end, this is conducive to cooling air evenly into inside burner hearth 18.
As shown in Figure 1, in the atmosphere clock hood type furnace of the present embodiment, control climate regulates the tubing that system 6 mainly includes being correlated with, also include the pressure switch, explosion-proof pressure-reducing valve, the electromagnetic valve that are arranged within control climate case 16 and be installed on the glass rotameter 8 etc. distributing tolerance on body of heater 1, these elements all can be connected with controlling system, control system can control to enter by opening or closing electromagnetic valve the atmosphere gas kind of burner hearth 18, and sends warning when bleed pressure is too low. By the gas concentration within the maximum fan-out capability scalable burner hearth 18 of adjustment glass rotameter 8 and governing speed. When sintering, it is necessary to constantly add the protective gas of technological requirement in burner hearth 18, to meet the demand of material 11 sintering. For making burner hearth 18 have comparatively uniform air-flowing environment distribution everywhere, the present invention selects the high-temperature refractory layer 3 bottom 1 liang of long limit of body of heater and outer box hat place to offer multiple atmosphere gas air inlet 21. Same, when cooling, in order to improve rate of temperature fall, bottom 18 liang of long limits of burner hearth, also offer cooling air fresh air inlet 22. All of atmosphere gas air inlet 21, cooling air fresh air inlet 22 all bury porcelain bushing underground in the part through high-temperature refractory layer 3, to protect refractory material not to be destroyed.
For coordinating the demand of the various inlet amount of above-mentioned cooling system 5 and atmosphere controlling and regulating system 6, it is provided with two gear steam vents at body of heater 1 top. When the little air quantity cooling of needs, cylinder 2 action, close the upper cover plate 19 at body of heater 1 top, gas is discharged from the small-bore through hole that upper cover plate 19 is offered; When requiring to carry more air quantity, cylinder 2 pulls furnace upper cover plate 19 to open in 90 ° of positions, discharges in the large aperture through hole of the lower cover 20 that gas is arranged from bottom. High-temperature oxydation aluminum fiber chunk and the porcelain bushing for ventilating all it is lined with in upper cover plate 19 and lower cover 20.
In the atmosphere clock hood type furnace of the present embodiment, high-temperature refractory layer 3 is internally formed burner hearth 18, and the cavity space of burner hearth 18 is divided into multiple heating region.Concrete burner hearth 18 is divided into 4 regions in the present embodiment, and respectively by four temperature thermocouple 4 thermometrics, when being equipped with control system, temperature value can be sent to control system by four temperature thermocouples 4.
In order to improve automatic control level, the atmosphere clock hood type furnace of the present embodiment also includes control system, and this control system primary responsibility various sensor readings from equipment also analyze and process, in conjunction with the technological requirement that user sets, do further process, and control corresponding actuator action. Meanwhile, also there is the functions such as historical record preservation, inquiry, printing. Atmosphere clock hood type furnace provided by the invention, than the same class equipment of current domestic import, has the multiple advantages such as purchase cost is low, easy to maintenance, maintenance cycle is short, service efficiency is high, economizing on energy and electricity, for the development important in inhibiting of ITO industry.
Described above to the embodiment of the present invention, makes professional and technical personnel in the field be capable of or uses the present invention. The multiple amendment of these embodiments be will be apparent from for those skilled in the art, and generic principles defined herein can without departing from the spirit or scope of the present invention, realize in other embodiments. Therefore, the present invention is not intended to be limited to embodiment illustrated herein.
Claims (9)
1. the atmosphere clock hood type furnace that can be used for ITO target sintering, including body of heater, grate, cooling system, control climate regulates system and temperature control system, described body of heater is a hollow structure being installed on grate, internal cavity is set to burner hearth, the bottom of body of heater is provided with the kiln car as movable fire door, and kiln car can be formed with body of heater when cutting out as movable fire door and be tightly connected, the top of described burner hearth and the inwall of surrounding are provided with high-temperature refractory layer, it is characterized in that: the top of described body of heater is provided with heating element heater and extends downward in burner hearth, described control climate regulates the sidewall of the vent line traverse bottom of furnace body of system and leads in burner hearth, described temperature control system includes the multiple temperature thermocouples being installed on body of heater, described temperature thermocouple is installed in the position near four corners, body of heater top, and burner hearth is divided into four heating regions,
The cooling air pipeline of described cooling system passes the sidewall of bottom of furnace body and leads in burner hearth, described cooling system includes the centrifugal blower of an offer cooling air, centrifugal blower entrance point configuration air filter, the port of export is installed Air control valve and is connected on a female pipe by pipeline, uniformly offering multiple air inlet tubule on female pipe, each air inlet tubule is connected to the cooling air pipeline of bottom of furnace body.
2. atmosphere clock hood type furnace according to claim 1, it is characterised in that: described kiln car is installed on track, and kiln car realizes its keying as movable fire door by a connected elevating mechanism.
3. atmosphere clock hood type furnace according to claim 2, it is characterised in that: when described kiln car cuts out as movable fire door, double containment pattern and body of heater that kiln car is sealed in conjunction with sand seal by light fibre blanket are formed and are tightly connected.
4. atmosphere clock hood type furnace according to claim 3, it is characterised in that: the part that described kiln car directly contacts with the high-temperature refractory layer of bottom of furnace body is provided with a light fibre blanket.
5. atmosphere clock hood type furnace according to claim 3, it is characterized in that: the sealing structure of described sand seal includes being arranged at the sand sealing groove at kiln car surrounding edge place and being arranged at the double-deck sand sealing knife of bottom of furnace body, described sand sealing groove is positioned at the outside of light fibre blanket, described double-deck sand sealing knife is arranged at below the high-temperature refractory layer of bottom of furnace body, and double-deck sand sealing knife docking is inserted described sand sealing groove and realized sand seal.
6. the atmosphere clock hood type furnace according to any one of Claims 1 to 5, it is characterized in that: described body of heater top is provided through furnace roof steel plate and the installing hole of furnace roof high-temperature refractory layer, described heating element heater is U-shaped Si-Mo rod, and U-shaped Si-Mo rod stretches in burner hearth straight down through described installing hole;And heating element heater arranges around burner hearth, the plane at heating element heater place and inboard wall of burner hearth perpendicular quadrature.
7. the atmosphere clock hood type furnace according to any one of Claims 1 to 5, it is characterised in that: described high-temperature refractory layer is assembled by multiple refractory material chunks, and between each refractory material chunk, extruding forms a sealing entirety mutually; Described refractory material chunk is fixed on the outer box hat of body of heater by outer anchorage style.
8. the atmosphere clock hood type furnace according to any one of Claims 1 to 5, it is characterised in that: described control climate regulates pressure switch, air relief valve, electromagnetic valve and the glass rotameter that system also includes being arranged on vent line; The top of described body of heater is provided with steam vent, and described steam vent is provided with lower cover, and lower cover offers large aperture through hole; The large aperture through hole of lower cover is provided with upper cover plate, and upper cover plate is provided with small-bore through hole; Upper cover plate is driven it to be turned on and off large aperture through hole by a driving device.
9. the atmosphere clock hood type furnace according to any one of Claims 1 to 5, it is characterized in that: described body of heater is rectangular cylindrical, offering the air inlet of connection cooling air pipeline and vent line on the sidewall of the bottom of described body of heater, each air inlet all buries porcelain bushing underground in the part through high-temperature refractory layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410298798.2A CN104296529B (en) | 2014-06-27 | 2014-06-27 | Can be used for the atmosphere clock hood type furnace of ITO target sintering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410298798.2A CN104296529B (en) | 2014-06-27 | 2014-06-27 | Can be used for the atmosphere clock hood type furnace of ITO target sintering |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104296529A CN104296529A (en) | 2015-01-21 |
| CN104296529B true CN104296529B (en) | 2016-06-15 |
Family
ID=52316366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410298798.2A Active CN104296529B (en) | 2014-06-27 | 2014-06-27 | Can be used for the atmosphere clock hood type furnace of ITO target sintering |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104296529B (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106322985A (en) * | 2015-07-10 | 2017-01-11 | 四川中豪科技有限公司 | Inverted high-efficiency automatic electric heating furnace |
| CN106197012A (en) * | 2016-07-12 | 2016-12-07 | 淄博科浩热能工程有限公司 | Brand-new muffle burn batch-type kiln furnace structure |
| CN106766919B (en) * | 2016-12-14 | 2019-03-19 | 上海电气钠硫储能技术有限公司 | A kind of sodium-sulphur battery solid electrolyte tube sintering equipment |
| CN106949734A (en) * | 2017-05-03 | 2017-07-14 | 苏州科尔珀恩机械科技有限公司 | A kind of atmosphere clock hood type furnace |
| CN107589148A (en) * | 2017-11-01 | 2018-01-16 | 中钢集团洛阳耐火材料研究院有限公司 | A kind of controlled atmosphere unstable state heat-pole method heat conduction coefficient tester |
| CN109237940A (en) * | 2018-10-30 | 2019-01-18 | 湖南金炉科技股份有限公司 | A kind of bell-type furnace |
| CN110411207A (en) * | 2019-09-02 | 2019-11-05 | 南京派赛菲克炉业科技有限公司 | A kind of fully-automatic intelligent bell-type furnace |
| CN110723889A (en) * | 2019-10-21 | 2020-01-24 | 扬州市丰泽特种电缆材料有限公司 | Kiln equipment convenient to clean and overhaul based on borosilicate glass is effective |
| CN111043859A (en) * | 2019-12-17 | 2020-04-21 | 湖南金炉科技股份有限公司 | Atmosphere bell-jar furnace for microwave ferrite sintering |
| CN112179130B (en) * | 2020-09-30 | 2022-07-15 | 上海宝钢磁业有限公司 | Bell jar furnace with high-temperature uniformity |
| CN114608334B (en) * | 2022-03-10 | 2023-06-27 | 江苏乾鹏科技有限公司 | Stepless variable-temperature rapid sintering device, method, terminal and readable storage medium |
| CN115893989A (en) * | 2022-12-29 | 2023-04-04 | 芜湖映日科技股份有限公司 | Process method for refining ITO target material micro grain structure and enhancing mechanical strength |
| CN116007367B (en) * | 2022-12-31 | 2023-11-14 | 无锡中工智能装备有限公司 | High-temperature atmosphere bell jar furnace |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000203945A (en) * | 1998-12-28 | 2000-07-25 | Mitsui Mining & Smelting Co Ltd | Sintering furnace for sputtering target and production of ito sputtering target using the same |
| CN101429649A (en) * | 2003-09-19 | 2009-05-13 | 株式会社日立国际电气 | Producing method of semiconductor device and substrate processing apparatus |
| CN201476537U (en) * | 2009-06-17 | 2010-05-19 | 长沙矿冶研究院 | Artificial intelligent controllable atmosphere bell-type resistance furnace for sintering soft magnetic ferrite |
| CN101806538A (en) * | 2009-02-17 | 2010-08-18 | 扬州冶金机械有限公司 | High temperature trolley type heating furnace |
| CN103542715A (en) * | 2013-09-27 | 2014-01-29 | 合肥高歌热处理应用技术有限公司 | Composite sintering furnace for target material |
| CN103868350A (en) * | 2014-03-25 | 2014-06-18 | 宁夏日晶新能源装备股份有限公司 | Semiconductor target sintering device and method |
| CN204268872U (en) * | 2014-06-27 | 2015-04-15 | 长沙矿冶研究院有限责任公司 | Can be used for the atmosphere clock hood type furnace of ITO target sintering |
-
2014
- 2014-06-27 CN CN201410298798.2A patent/CN104296529B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000203945A (en) * | 1998-12-28 | 2000-07-25 | Mitsui Mining & Smelting Co Ltd | Sintering furnace for sputtering target and production of ito sputtering target using the same |
| CN101429649A (en) * | 2003-09-19 | 2009-05-13 | 株式会社日立国际电气 | Producing method of semiconductor device and substrate processing apparatus |
| CN101806538A (en) * | 2009-02-17 | 2010-08-18 | 扬州冶金机械有限公司 | High temperature trolley type heating furnace |
| CN201476537U (en) * | 2009-06-17 | 2010-05-19 | 长沙矿冶研究院 | Artificial intelligent controllable atmosphere bell-type resistance furnace for sintering soft magnetic ferrite |
| CN103542715A (en) * | 2013-09-27 | 2014-01-29 | 合肥高歌热处理应用技术有限公司 | Composite sintering furnace for target material |
| CN103868350A (en) * | 2014-03-25 | 2014-06-18 | 宁夏日晶新能源装备股份有限公司 | Semiconductor target sintering device and method |
| CN204268872U (en) * | 2014-06-27 | 2015-04-15 | 长沙矿冶研究院有限责任公司 | Can be used for the atmosphere clock hood type furnace of ITO target sintering |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104296529A (en) | 2015-01-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104296529B (en) | Can be used for the atmosphere clock hood type furnace of ITO target sintering | |
| CN204268872U (en) | Can be used for the atmosphere clock hood type furnace of ITO target sintering | |
| CN202676893U (en) | Air-exchange aging test box | |
| CN202830081U (en) | Box-type protective atmosphere annealing furnace | |
| CN203565857U (en) | Off-line drying device for submersed nozzles of tundishes | |
| CN210569930U (en) | Energy-saving electric furnace for smelting scrap iron | |
| CN202712288U (en) | Battery inner box and temperature control cabinet using battery inner box | |
| CN102901343A (en) | Industrial microwave sintering hard alloy equipment | |
| CN205045830U (en) | Blow and prepare device of active carbon in bottom | |
| CN210922186U (en) | Large-size ITO target sintering furnace | |
| CN205175109U (en) | Atmosphere protection heating furnace | |
| CN205482318U (en) | Hydrogen sintering stove heat energy cyclic utilization device | |
| CN205066427U (en) | Multipurpose microwave high temperature propelling movement kiln | |
| CN205537094U (en) | Fill water cooling formula hydrogen sintering stove | |
| CN204329589U (en) | A kind of continuous-type microwave electricity Hybrid Heating household china calcining kiln | |
| CN202955963U (en) | Industrial microwave sintered hard alloy device | |
| CN204085163U (en) | Outer hot oxygen-complementing type roller kilns | |
| CN210150946U (en) | Cooling device for discharge opening of molten glass platinum channel | |
| CN202204281U (en) | Microwave roller kiln | |
| CN206847389U (en) | A kind of panel protector on lithium electric material sintering batch-type furnace | |
| CN206298814U (en) | The heater of control valve and guiding oil groove for road gap-grouting vehicle | |
| CN204474712U (en) | For the body of heater of fast cooling | |
| CN104949511A (en) | Taper double control automatic vacuum lead smelting furnace | |
| CN201092582Y (en) | Slag discharging device for metal vacuum smelting reduction still | |
| CN102914145A (en) | Industrial microwave sintering device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20160905 Address after: Workshop of 410000 Hunan province Changsha hi tech Development Zone, Lu Tin Road No. 18 Hunan long-term lithium Branch Co. Ltd. 203-205 room Patentee after: HUNAN JINLU TECHNOLOGY CO., LTD. Address before: Yuelu District City, Hunan province 410000 Changsha Lushan Road No. 966 Patentee before: Changsha Research Institute of Mining and Metallurgy Co., Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Room 203-205, Hunan Changyuan Lithium Co., Ltd., No. 18 Lutian Road, Changsha High-tech Development Zone, Hunan Province Patentee after: Hunan golden furnace Polytron Technologies Inc Address before: Room 203-205, Hunan Changyuan Lithium Co., Ltd., No. 18 Lutian Road, Changsha High-tech Development Zone, Hunan Province Patentee before: HUNAN JINLU TECHNOLOGY CO., LTD. |