CN115967301A - Ultra-low hysteresis switch type piezoelectric ceramic independent driving method integrating feedforward correction - Google Patents
Ultra-low hysteresis switch type piezoelectric ceramic independent driving method integrating feedforward correction Download PDFInfo
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Abstract
The invention discloses an integrated feedforward correction ultra-low hysteresis switch type piezoelectric ceramic independent driving method, which is characterized in that on the basis of switch type independent driving controlled by a single chip microcomputer, a simplest quadratic polynomial is used as a hysteresis model to fit a hysteresis curve under independent driving, and then a linear output response curve can be obtained by using a hysteresis inverse model, namely an inverse function of a quadratic function, as an input to replace a linear input voltage. The invention can greatly reduce the hysteresis to 0.82 percent on the basis of time-sharing independent driving, thereby improving the nonlinearity of a device using the piezoelectric actuator as the driving and improving the driving precision.
Description
Technical Field
The invention relates to the field of precise micro-displacement platforms, in particular to an ultra-low hysteresis switch type piezoelectric ceramic independent driving method integrated with feedforward correction.
Background
The piezoelectric actuator with the nano-scale driving displacement resolution rapidly occupies the market by virtue of the characteristics of high positioning precision, quick response and the like, and occupies a very important position in a precision driving system. But the hysteresis characteristics of the piezo-stack actuator have a severe impact on positioning accuracy.
Many scholars at home and abroad propose a plurality of methods for reducing hysteresis, including a charge driving method, feedforward correction of a complex algorithm, such as a preiach model, ellipse fitting and the like, closed-loop feedback control and the like, but the methods have some defects, such as complex charge driving operation, difficulty in solving feedforward correction inverse parameters of the complex algorithm, large fitting error of a simple algorithm, and the problems of high cost and large space occupation brought by a high-precision sensor although the closed-loop feedback control has high precision.
Although the existing independent time-sharing driving device and method for the multi-stack piezoelectric actuator can reduce the hysteresis under the open-loop condition, the used pure analog circuit method is poor in driving flexibility, and finally, the hysteresis reduction is still in a gap with the high-precision closed-loop feedback control.
Disclosure of Invention
The invention aims to overcome the defects of the existing method and provides an integrated feedforward correction ultra-low hysteresis switch type piezoelectric ceramic independent driving method so as to greatly reduce hysteresis under the condition of open loop and improve driving precision.
In order to achieve the purpose, the invention adopts the technical scheme that:
the invention relates to an integrated feedforward correction ultra-low hysteresis switch type piezoelectric ceramic independent driving method which is characterized in that the method is applied to a control system consisting of a single chip microcomputer MCU, two high-voltage operational amplifiers, a switch group and a piezoelectric actuator, wherein the piezoelectric actuator consists of N layers of piezoelectric ceramic layers, and the switch group consists of N switches; the piezoelectric ceramic driving method comprises the following steps;
step 1: driving in a boosting stage:
step 1.1, before the ith piezoelectric ceramic layer is subjected to rising drive, the single chip microcomputer MCU firstly utilizes a high-voltage amplifier to carry out rising drive on the ith-1 piezoelectric ceramic layer and controls a switch corresponding to the ith piezoelectric ceramic layer to be closed; i belongs to [2,N ];
step 1.2: the MCU sends out a drive signal which is increased linearly and gradually, a part of the drive signal is subjected to boosting treatment through another high-voltage operational amplifier, and then the switch corresponding to the (i-1) th piezoelectric ceramic layer is disconnected, and the boosted drive signal is sent to the (i) th piezoelectric ceramic layer;
step 1.3: boosting the ith laminated piezoelectric ceramic layer according to the boosted driving signal, and closing a switch corresponding to the (i + 1) th laminated piezoelectric ceramic layer before boosting is finished;
step 1.4: the single chip microcomputer MCU resets the output of the high-voltage operational amplifier participating in the driving of the ith-1 th layer piezoelectric ceramic; continuously performing boosting drive on the ith piezoelectric ceramic layer by using another high-voltage driver so as to finish the boosting drive of the ith piezoelectric ceramic layer;
step 1.5: assigning i +1 to i, and then returning to the step 1.1 for sequential execution until i is greater than N, thereby completing the voltage boosting of the N layers of piezoelectric ceramic layers;
step 2: after the single chip microcomputer MCU sends out a linearly increasing driving signal to be changed into a linearly decreasing driving signal, driving the N-layer piezoelectric ceramic layer in a voltage reduction stage according to the process of the step 1;
and step 3: drawing a hysteresis curve of the piezoelectric actuator;
and 4, step 4: according to the symmetry of the piezoelectric actuator, the curvatures of all the piezoelectric ceramic layers are the same, and a hysteresis curve of any layer is fitted by a feedforward correction algorithm to obtain a relational expression of output displacement and input voltage;
and 5: sequentially inputting a group of linearly increased arithmetic series into a relational expression in the range of output displacement and outputting a group of curve increased voltage values;
and 6: sequentially inputting a group of linearly decreasing arithmetic progression into the relational expression within the range of output displacement, and outputting a group of curve decreasing voltage values;
and 7: the single chip microcomputer MCU obtains a drive signal with an increasing curve according to the voltage value of the curve increase, and therefore the N-layer piezoelectric ceramic layer is driven in a boosting stage according to the process of the step 1, and the boosting delay of the piezoelectric actuator is reduced;
and step 8: and the single chip microcomputer MCU obtains a driving signal with a decreasing curve according to the voltage value with the decreasing curve, so that the N-layer piezoelectric ceramic layers are driven in a voltage reduction stage according to the process of the step 1, and the voltage reduction delay of the piezoelectric actuator is reduced.
The integrated feedforward correction ultralow-hysteresis switch type piezoelectric ceramic independent driving method is also characterized in that the feedforward correction algorithm is a quadratic polynomial fitting algorithm or a high-order polynomial fitting algorithm.
The electronic device comprises a memory and a processor, and is characterized in that the memory is used for storing programs for supporting the processor to execute the piezoelectric ceramic driving method, and the processor is configured to execute the programs stored in the memory.
The present invention is a computer-readable storage medium having a computer program stored thereon, wherein the computer program is executed by a processor to execute the steps of the piezoelectric ceramic driving method.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention provides an ultra-low hysteresis switch type piezoelectric ceramic independent driving method integrated with feedforward correction, which applies a simple and convenient feedforward control algorithm on the basis of the original independent time-sharing driving of a multi-stack piezoelectric actuator, so that the hysteresis is greatly reduced, and a driven device can obtain better linearity.
2. The simplest quadratic polynomial fitting in the polynomial fitting provided by the invention has the advantages that the inverse parameters are very well solved, and the problem that the conventional complex feedforward algorithm is difficult to solve is solved, so that the system driving efficiency can be improved, and particularly, when the inverse function is automatically calculated by using a single chip microcomputer algorithm, the driving speed is greatly improved.
Drawings
FIG. 1 is a schematic diagram of the overall control method of the present invention;
FIG. 2 shows driving waveforms of the switching type dual operational amplifier driving method;
FIG. 3 is a displacement curve of the switching type independent time-sharing driving piezoelectric actuator under linear voltage driving;
FIG. 4 is a displacement curve of a single-layer piezoelectric ceramic and a polynomial fitting curve thereof;
FIG. 5 is a piezoelectric ceramic hysteresis curve after final correction by an ultra-low hysteresis switch type piezoelectric ceramic independent driving method integrated with feedforward correction;
FIG. 6 is a schematic view of an experimental apparatus.
Detailed Description
The invention is further described with reference to the following figures and detailed description.
In the embodiment, an ultra-low hysteresis switch type independent driving method integrated with feedforward correction is applied to a control system composed of a single chip microcomputer MCU, two high-voltage operational amplifiers, a switch group and a piezoelectric actuator, wherein the piezoelectric actuator is composed of N layers of piezoelectric ceramic layers, the switch group is composed of N switches, as shown in fig. 1, the single chip microcomputer controls the on-off of the switches to further control which layer of the piezoelectric ceramic layers is gated, meanwhile, the single chip microcomputer sends out a driving waveform to control the motion track of the corresponding piezoelectric ceramic layers, and the driving waveform applied to a piezoelectric stack is shown in fig. 2; the piezoelectric ceramic driving method includes;
step 1: driving in a boosting stage:
step 1.1, before the ith piezoelectric ceramic layer is subjected to rising drive, the singlechip MCU firstly utilizes a high-voltage operational amplifier to carry out rising drive on the ith-1 piezoelectric ceramic layer, such as t0-t1 in figure 2, applies the high-voltage operational amplifier to the first layer of the piezoelectric ceramic through a switch S1, and controls the switch corresponding to the ith piezoelectric ceramic layer to be closed; i belongs to [2,N ];
step 1.2: the MCU sends out a linearly increasing driving signal, the driving signal is subjected to boosting treatment on part of the driving signal through another high-voltage operational amplifier, and then a switch corresponding to the (i-1) th piezoelectric ceramic layer is disconnected, the boosted driving signal is sent to the (i) th piezoelectric ceramic layer, as shown in the time t1 in the figure 2, the voltage applied to the first layer reaches the maximum value and keeps the same voltage, so that a sufficient time margin is provided for the disconnection of the switch, meanwhile, the switch S2 is closed, another driving signal US2 is applied to the second layer of the piezoelectric ceramic from t1 to t2, and as two amplifiers are used, the switch S1 has enough time to be disconnected and can be closed at any time between t1 and t2, so that the displacement loss condition caused by longer disconnection time of the switch can be prevented to a great extent;
step 1.3: the ith laminated ceramic layer is boosted according to the boosted driving signal, and a switch corresponding to the (i + 1) th laminated ceramic layer is closed before boosting is finished, as shown in fig. 2, a switch S3 is closed between t1 and t2, and thus rigid impact caused by the use of the switch can be reduced;
step 1.4: the single chip microcomputer MCU clears the output of the high-voltage operational amplifier participating in the ith-1 st layer piezoelectric ceramic driving, and when the figure 2 is at t2, the driving signal of the amplifier 1 returns to 0 to prepare for driving the third layer; continuously performing boost driving on the ith piezoelectric ceramic layer by using another high-voltage driver so as to finish the boost driving of the ith piezoelectric ceramic layer;
step 1.5: assigning i +1 to i, and then returning to the step 1.1 for sequential execution until i is greater than N, thereby completing the voltage boosting of the N layers of piezoelectric ceramic layers;
step 2: after the driving signal of linear increasing sent by the MCU is changed into the driving signal of linear decreasing, the N layers of piezoelectric ceramic layers are driven in a voltage reduction stage according to the process of the step 1;
and 3, step 3: drawing a hysteresis curve under the linear driving of the piezoelectric actuator, as shown in fig. 3;
and 4, step 4: according to the symmetry of the piezoelectric actuator, the curvatures of all the piezoelectric ceramic layers are the same, a hysteresis curve of any layer is selected and fitted by using a feedforward correction algorithm, the result is shown in figure 4, a quadratic function relation with independent variable as voltage value and dependent variable as displacement value is solved, and a relation between output displacement and input voltage is obtained; in this embodiment, the feedforward correction algorithm is a quadratic polynomial fitting algorithm or a high-order polynomial fitting algorithm.
And 5: when the voltage is linearly input, the output displacement S is a curve. At present, the output displacement is expected to be a straight line, S is artificially increased linearly, a group of linearly increased arithmetic series is sequentially input into a relational expression within the range of the output displacement, S values of each input displacement are substituted into an obtained quadratic function curve, a corresponding voltage U value is solved, because the quadratic equation solution is very simple and convenient, two groups of real roots still exist, according to the actual condition of the voltage U, the limitation of the value range of the output voltage is taken as the basis, the redundant real root is cut off, only one real root solution is reserved, and a group of curve increased voltage values are output;
step 6: sequentially inputting a group of linearly decreasing arithmetic progression into the relational expression within the range of output displacement, and outputting a group of curve decreasing voltage values;
and 7: the single chip microcomputer MCU obtains a driving signal with an increasing curve according to the voltage value of the curve increase, so that the N-layer piezoelectric ceramic layers are driven in a boosting stage according to the process of the step 1, and the boosting delay of the piezoelectric actuator is reduced;
and 8: the single chip microcomputer MCU obtains a driving signal with a decreasing curve according to the voltage value with the decreasing curve, so as to drive the N-layer piezoelectric ceramic layers in a voltage reduction stage according to the process of step 1, so as to reduce the voltage reduction delay of the piezoelectric actuator, and the final effect is shown in fig. 5.
Example 1: feedforward correction lag measurement under a switch-type independent driving method;
the experimental device is shown in fig. 6, a piezoelectric actuator is adopted as AL1.65 × 5d-4F of NEC corporation of japan, 7 pieces of piezoelectric ceramics are bonded together by using epoxy resin, an STM32 single chip microcomputer is used for directly sending two paths of drive signals with 0.1Hz amplitude of 2V under linear voltage drive, the drive signals are amplified to 82V by a signal amplification module, then a switch group gating layer controlled by the STM32 single chip microcomputer is applied to the piezoelectric actuator to generate displacement, an eddy current sensor is used for collecting displacement and converting the displacement into electric signals to be output to a data collection module, and the collected data are analyzed and processed to obtain a linear drive lower hysteresis curve shown in fig. 3. Then, one layer is selected to carry out quadratic polynomial fitting to obtain a fitting curve shown in fig. 3, and a quadratic function relational expression of which the independent variable is a voltage value U and the dependent variable is a displacement value S is solved:
S＝-0.000000322U 2 +0.00217U+0.0438
U∈[0，2000] S∈[0，3.139]
now, it is expected that the output displacement is a straight line, S is artificially increased linearly, and a group of linearly increased arithmetic progression values are uniformly inserted in the value range of the displacement S, in order to better correspond to the DAC output voltage in the experiment, the number of inserted arithmetic progression terms is 2000, the first term is 0, and the last term is 3.139. And substituting each input displacement S value into a 4.1 formula to solve a corresponding voltage U value, wherein the quadratic equation solution is very simple and convenient, but two groups of real roots still exist, according to the actual condition of the voltage U, the value range is 0-2000, redundant real roots are omitted, only one real number solution is reserved, the two thousand solutions are used as input and output by a single-chip DAC (digital-to-analog converter), and the inverse function of the displacement response curve shown in the figure 4 can be output, so that the linear output is obtained as shown in the figure 5. The calculated lag was reduced from 2.1% without applying the feed forward algorithm to 0.82%.
In summary, the method is applied to devices using piezoelectric actuators as driving devices, such as an atomic force microscope, a scanning tunneling microscope, and a piezoelectric deflection mirror, and can greatly improve nonlinearity, avoid the problem of distortion of images of the atomic force microscope in forward and reverse reciprocating strokes caused by hysteresis, and improve driving accuracy.
In the present embodiment, an electronic device includes a memory for storing a program that supports the processor to execute the above piezoelectric ceramic driving method, and a processor configured to execute the program stored in the memory.
In this embodiment, a computer-readable storage medium stores a computer program, and the computer program is executed by a processor to execute the steps of the piezoelectric ceramic driving method.
Claims (4)
1. An integrated feedforward correction ultra-low hysteresis switch type piezoelectric ceramic independent driving method is characterized in that the method is applied to a control system consisting of a single chip microcomputer MCU, two high-voltage operational amplifiers, a switch group and a piezoelectric actuator, wherein the piezoelectric actuator consists of N layers of piezoelectric ceramic layers, and the switch group consists of N switches; the piezoelectric ceramic driving method comprises the following steps;
step 1: driving in a boosting stage:
step 1.1, before the ith piezoelectric ceramic layer is subjected to lifting driving, the single chip microcomputer MCU firstly utilizes a high-voltage amplifier to perform lifting driving on the ith-1 piezoelectric ceramic layer and controls a switch corresponding to the ith piezoelectric ceramic layer to be closed; i belongs to [2,N ];
step 1.2: the single chip microcomputer MCU sends out a drive signal which is linearly increased in an increasing mode, partial drive signal is boosted through another high-voltage operational amplifier, and the boosted drive signal is sent to the ith piezoelectric ceramic layer after a switch corresponding to the ith-1 piezoelectric ceramic layer is switched off;
step 1.3: boosting the ith laminated piezoelectric ceramic layer according to the boosted driving signal, and closing a switch corresponding to the (i + 1) th laminated piezoelectric ceramic layer before boosting is finished;
step 1.4: the single chip microcomputer MCU clears the output of the high-voltage operational amplifier participating in the ith-1 st piezoelectric ceramic drive; continuously performing boost driving on the ith piezoelectric ceramic layer by using another high-voltage driver so as to finish the boost driving of the ith piezoelectric ceramic layer;
step 1.5: assigning i +1 to i, and returning to the step 1.1 to execute the sequence until i is greater than N, thereby completing the voltage boosting of the N layers of the piezoelectric ceramic layers;
step 2: after the single chip microcomputer MCU sends out a linearly increasing driving signal to be changed into a linearly decreasing driving signal, driving the N-layer piezoelectric ceramic layer in a voltage reduction stage according to the process of the step 1;
and step 3: plotting a hysteresis curve of the piezoelectric actuator;
and 4, step 4: according to the symmetry of the piezoelectric actuator, the curvatures of all the piezoelectric ceramic layers are the same, and a hysteresis curve of any layer is fitted by a feedforward correction algorithm to obtain a relational expression of output displacement and input voltage;
and 5: sequentially inputting a group of linearly increased arithmetic progression into the relational expression in the range of output displacement, and outputting a group of curve increased voltage values;
and 6: sequentially inputting a group of linearly decreasing arithmetic series into the relational expression within the range of output displacement and outputting a group of curve decreasing voltage values;
and 7: the single chip microcomputer MCU obtains a driving signal with an increasing curve according to the voltage value of the curve increase, so that the N-layer piezoelectric ceramic layers are driven in a boosting stage according to the process of the step 1, and the boosting delay of the piezoelectric actuator is reduced;
and step 8: and the MCU obtains a driving signal with a decreasing curve according to the voltage value with the decreasing curve, so that the N layers of piezoelectric ceramic layers are driven in a voltage reduction stage according to the process of the step 1, and the voltage reduction delay of the piezoelectric actuator is reduced.
2. An integrated feedforward correction ultra-low hysteresis switch-type piezoelectric ceramic independent driving method according to claim 1, wherein the feedforward correction algorithm is a quadratic polynomial fitting algorithm or a high-order polynomial fitting algorithm.
3. An electronic device comprising a memory and a processor, wherein the memory is configured to store a program that enables the processor to perform the piezoceramic driving method of claim 1 or 2, and the processor is configured to execute the program stored in the memory.
4. A computer-readable storage medium, on which a computer program is stored, which, when being executed by a processor, performs the steps of the piezoceramic driving method according to claim 1 or 2.
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