CN113885336A - Piezoelectric driver track tracking control method based on integral high-order sliding mode control - Google Patents

Piezoelectric driver track tracking control method based on integral high-order sliding mode control Download PDF

Info

Publication number
CN113885336A
CN113885336A CN202111353308.0A CN202111353308A CN113885336A CN 113885336 A CN113885336 A CN 113885336A CN 202111353308 A CN202111353308 A CN 202111353308A CN 113885336 A CN113885336 A CN 113885336A
Authority
CN
China
Prior art keywords
sliding mode
follows
extended state
piezoelectric driver
order
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202111353308.0A
Other languages
Chinese (zh)
Other versions
CN113885336B (en
Inventor
李建刚
李奇杰
周明卓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Graduate School Harbin Institute of Technology
Original Assignee
Shenzhen Graduate School Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Graduate School Harbin Institute of Technology filed Critical Shenzhen Graduate School Harbin Institute of Technology
Priority to CN202111353308.0A priority Critical patent/CN113885336B/en
Publication of CN113885336A publication Critical patent/CN113885336A/en
Application granted granted Critical
Publication of CN113885336B publication Critical patent/CN113885336B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/042—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Feedback Control In General (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

The invention belongs to the technical field of piezoelectric driver control, and particularly discloses an integral high-order sliding mode control piezoelectric driver track tracking control method, which comprises the following steps: step 1: collecting signals of the piezoelectric driver, and identifying a mathematical model of the piezoelectric driver by adopting a second-order linearized mathematical model; step 2: estimating the total disturbance of the system by adopting an extended state observer; and step 3: and according to the identified mathematical model and the total disturbance estimated by the extended state observer, realizing high-precision track tracking control of the piezoelectric driver by adopting an integral high-order sliding mode controller. The invention has the following beneficial effects: the problem that disturbance upper bound can not be accurately obtained is solved, the convergence speed is high, the singularity problem is avoided, the continuity of the control quantity is guaranteed, the buffeting phenomenon is effectively improved, and the control precision is improved.

Description

Piezoelectric driver track tracking control method based on integral high-order sliding mode control
Technical Field
The invention relates to the technical field of piezoelectric driver control, in particular to a piezoelectric driver track tracking control method based on integral high-order sliding mode control.
Background
With the continuous development and progress of micro-nano technology, the application requirements of high-precision systems are continuously increased, and meanwhile, higher requirements on motion precision, resolution and the like are provided. Compared with the traditional rigid mechanism, the flexible mechanism has the advantages of low cost, small volume, no friction, no clearance, high resolution, easiness in production and the like, and is widely applied to high-precision motion systems such as micro-nano technology and the like. Because the traditional alternating current/direct current motor is difficult to meet the requirement of high-precision driving force, the piezoelectric driver has the advantages of small volume, high precision, large driving force, high response speed, low noise and the like, is particularly suitable for high-precision motion in a small motion range, and is widely applied to precision displacement positioning systems of nano operation, ultra-precision machining, scanning probe microscopes, active optical elements, biomedical engineering and the like. A high-precision positioning system formed by a piezoelectric driver as a driving device and a flexible mechanism as a transmission device is a common high-precision positioning scheme.
Due to the characteristics of complex nonlinearity, difficult analysis of stability and the like of the flexible mechanism, the analysis and control of the flexible mechanism have certain difficulty. Therefore, semi-closed loop control schemes are often employed for flexible mechanisms based on piezoelectric actuator actuation. The piezoelectric actuator is used as a controlled object, and the track tracking control of the flexible transmission mechanism is realized by controlling the movement of the piezoelectric actuator. The piezoelectric driver has asymmetric hysteresis characteristics related to the frequency of an input signal, namely, a multivalued mapping phenomenon related to the frequency of the input signal is presented between the input voltage and the output displacement. This frequency dependent hysteresis can severely affect the control accuracy of the system and at the same time reduce the robust stability of the system. Therefore, the hysteresis nonlinearity of the piezoelectric driver is analyzed, modeled and compensated to realize the rapid and high-precision track tracking control of the piezoelectric driver, and the method is very important for the stable and efficient operation of a high-precision positioning system.
In order to realize high-precision trajectory tracking control of the piezoelectric actuator, most of the control schemes adopted by the current scholars are robust and stable control schemes, and a targeted improvement method is provided according to the problems in the control law so as to improve the control precision of the controller. Sliding Mode Control (SMC) has the advantages of fast response speed and simple design, has strong robustness to external interference and model uncertainty, achieves a control target by guiding and maintaining a system state on a preset sliding mode surface, and has been increasingly applied to the field of trajectory tracking control of systems. However, the sliding mode control has the disadvantages of gradual convergence, inaccurate estimation of the disturbance upper bound, discontinuity of the control quantity and the like, and limits the control precision of the control method.
Disclosure of Invention
In order to solve the above technical problem, an object of the present invention is to provide a piezoelectric driver trajectory tracking control method based on integral high-order sliding mode control, which includes steps 1: collecting signals of the piezoelectric driver, and identifying a mathematical model of the piezoelectric driver by adopting a second-order linearized mathematical model; step 2: estimating the total disturbance of the system by adopting an extended state observer; and step 3: according to the identified mathematical model and the total disturbance estimated by the extended state observer, the integral high-order sliding mode controller is adopted to realize the high-precision track tracking control of the piezoelectric driver, and the piezoelectric driver track tracking control method based on the integral high-order sliding mode control has the advantages of solving the problem that the disturbance upper bound cannot be accurately obtained, being high in convergence speed, avoiding the singularity problem, ensuring the continuity of the control quantity, effectively improving the buffeting phenomenon and improving the control precision.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the piezoelectric driver track tracking control method based on integral high-order sliding mode control comprises the following steps:
step 1: acquiring input signals and output signals of the piezoelectric driver, and identifying a mathematical model of the piezoelectric driver by adopting a second-order linearized mathematical model according to the acquired data;
step 2: estimating total disturbance in a system dynamic process by adopting an extended state observer;
and step 3: and (3) estimating the total disturbance of the system according to the identified mathematical model of the piezoelectric actuator and the extended state observer, and realizing high-precision track tracking control of the piezoelectric actuator by adopting an integral high-order sliding mode controller.
Preferably, in step 1, the piezoelectric actuator model is described by using a second-order linearized mathematical model, the expression of which is as follows:
Figure BDA0003356679700000021
wherein ,
Figure BDA0003356679700000022
q2＝2ξ/(kωn)，q3＝1/k；
in the above formula, ξ is the damping ratio; k is the gain of the piezoelectric actuator; omeganIs the natural frequency; u (t) is the input voltage of the piezoelectric driver; x (t) is the output displacement of the piezoelectric actuator; f. ofd(t) is the total disturbance of the hysteresis nonlinearity and external interference; h (t) is a hysteresis state variable; d (t) is external interference.
Preferably, step 2 comprises the steps of:
step 2.1: let x1＝x，
Figure BDA0003356679700000023
The state space expression corresponding to the piezoelectric actuator model is obtained as follows:
Figure BDA0003356679700000024
step 2.2: will f isd/q1As an extended state x3I.e. order x3＝fd/q1Obtaining an expansion state space expression corresponding to the piezoelectric driver model as follows:
Figure BDA0003356679700000031
in the above-mentioned formula, the first and second groups,
Figure BDA0003356679700000032
is fd/q1Differentiation of (1);
step 2.3: the expression of the extended state observer of the piezo actuator is designed as follows:
Figure BDA0003356679700000033
in the above formula, z1，z2 and z3Respectively extended state observer in state x1，x2 and x3The lower observed value is also the state of the extended state observer;
Figure BDA0003356679700000037
the output displacement observed value of the piezoelectric driver is also the output of the extended state observer; theta1，θ2 and θ3Is the gain of the extended state observer;
step 2.4: the extended state observer estimates the total disturbance of the system, and the estimated value of the total disturbance of the system is recorded as
Figure BDA0003356679700000034
In this embodiment, the integral high-order sliding mode controller is an integral three-order sliding mode controller, and a calculation formula of the tracking error and each order derivative thereof adopted by the integral high-order sliding mode controller is as follows:
e(t)＝xr(t)-x(t)；
Figure BDA0003356679700000035
Figure BDA0003356679700000036
in the above formula, e (t) is the tracking error of the system, xr(t) is the desired input trajectory of the system, and x (t) is the actual output trajectory of the system.
Preferably, the integral high-order sliding mode surface adopted by the integral high-order sliding mode controller and the calculation formula of each order derivative thereof are as follows:
Figure BDA0003356679700000041
Figure BDA0003356679700000042
Figure BDA0003356679700000043
in the above formula, the parameter satisfies beta1＞0，β2＞0，β3＞0，1＜α1＜2，α1＜α2The conditions of (a); and (e)α＝|e|αsgn (e), sgn (e) is a sign function, and the expression of sgn (e) is as follows:
Figure BDA0003356679700000044
preferably, the calculation formula of the sliding mode control rate adopted by the integral high-order sliding mode controller is as follows:
u(t)＝ueq(t)+un(t)
in the above formula, the equivalent control ueqThe expression of (t) is as follows:
Figure BDA0003356679700000045
non-linear control unThe expression of (t) is as follows:
Figure BDA0003356679700000046
Figure BDA0003356679700000047
Figure BDA0003356679700000048
in the above formula, the parameter satisfies k1＞0，k2＞0，k3Condition > 0.
Compared with the prior art, the invention has the beneficial technical effects that:
1. the extended state observer designed by the invention can accurately estimate the total disturbance in the dynamic process of the system, and solves the problem that the upper limit of the disturbance cannot be accurately obtained.
2. The integral high-order sliding mode surface designed by the invention can ensure that the tracking error of the system is converged to zero in limited time, solves the problem of gradual convergence in infinite time, has high convergence speed and can avoid the occurrence of a singular problem.
3. The high-order sliding mode control law designed by the invention ensures the continuity of the control quantity, can effectively improve the influence of buffeting and simultaneously improves the control precision.
Drawings
FIG. 1 is a schematic diagram of an experimental system according to an embodiment of the present invention;
figure 2 is a schematic diagram of the piezoelectric actuator control system of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments, but the scope of the present invention is not limited to the following embodiments.
Referring to fig. 1-2, the present embodiment discloses a piezoelectric driver trajectory tracking control method based on integral high-order sliding mode control, an experiment is performed on a platform of a single-degree-of-freedom flexible mechanism driven by a piezoelectric driver, as shown in fig. 1 below, an experimental system mainly includes the piezoelectric driver, a servo controller, a real-time simulation controller, a displacement sensor, a computer, a flexible reducing mechanism and an industrial camera, the computer, the real-time simulation controller, the servo controller, the piezoelectric driver and the flexible reducing mechanism are electrically connected in sequence, the piezoelectric driver is electrically connected with the real-time simulation controller, the piezoelectric driver feeds displacement data back to the real-time simulation controller, and a control algorithm of the piezoelectric driver is implemented in the computer by using programmable software; secondly, compiling corresponding codes and modules into an executable target file of the embedded system, downloading the target file into a real-time simulation controller, and sending a voltage digital signal to a servo controller by the real-time simulation controller according to given reference input; then, an input voltage digital signal is converted into an input voltage analog signal through a digital-to-analog converter (DAC), the voltage is amplified through a voltage amplifier and directly applied to a piezoelectric driver, so that the piezoelectric driver generates corresponding displacement, a displacement signal generated by the piezoelectric driver is obtained through measurement of a built-in displacement sensor, an output displacement analog signal is converted into an output displacement digital signal through an analog-to-digital converter (ADC), the output displacement digital signal is stored in a computer, the displacement data is used as real-time output displacement feedback of a system, and an industrial camera detects actual displacement of the flexible reducing mechanism.
The piezoelectric driver track tracking control method based on integral high-order sliding mode control comprises the following steps:
step 1: acquiring input signals and output signals of the piezoelectric driver, and identifying a mathematical model of the piezoelectric driver by adopting a second-order linearized mathematical model according to the acquired data;
step 2: estimating total disturbance in a system dynamic process by adopting an extended state observer;
and step 3: according to the identified mathematical model of the piezoelectric actuator and the total disturbance estimated to the system by the extended state observer, the high-precision trajectory tracking control of the piezoelectric actuator is realized by adopting an integral high-order sliding mode controller, as shown in the following figure 2, a reference input is acted on the integral high-order sliding mode controller, wherein an extended state observer is used to observe the total disturbance of the system, thereby generating a control signal and acting on the piezoelectric actuator, whereby the piezoelectric actuator generates a corresponding output signal, the signal is compared with a reference input signal to generate an error signal, the error signal is applied to an integral high-order sliding mode controller to generate a corresponding control signal to reduce the error, therefore, the feedback mechanism and the design of the integral high-order sliding mode controller can enable the system to achieve the purpose of outputting a signal with no difference to track a parameter input signal, namely the high-precision track tracking control of the piezoelectric driver.
The extended state observer designed by the invention can accurately estimate the total disturbance in the dynamic process of the system, and solves the problem that the upper disturbance bound can not be accurately obtained;
the integral high-order sliding mode surface designed by the invention can ensure that the tracking error of the system is converged to zero in limited time, solves the problem of gradual convergence in infinite time, has high convergence speed and can avoid the occurrence of a singular problem;
the high-order sliding mode control law designed by the invention ensures the continuity of the control quantity, can effectively improve the influence of buffeting and simultaneously improves the control precision.
Further, in step 1, the piezoelectric actuator model is described by using a second-order linearized mathematical model, and an expression of the second-order linearized mathematical model is as follows:
Figure BDA0003356679700000061
wherein ,
Figure BDA0003356679700000062
q2＝2ξ/(kωn)，q3＝1/k；
in the above formula, ξ is the damping ratio; k is the gain of the piezoelectric actuator; omeganIs the natural frequency, xi, k and ωnAre all fixed values, related to the structure of the piezoelectric actuator itself; u (t) is the input voltage of the piezoelectric driver and also represents the output voltage of the closed-loop control controller; x (t) is the output displacement of the piezoelectric actuator; f. ofd(t) is the total disturbance of the hysteresis nonlinearity and external interference; h (t) is a hysteresis state variable; and d (t) is external interference, and a mathematical model of the piezoelectric actuator is identified according to the collected experimental data.
Further, step 2 comprises the following steps:
step 2.1: let x1＝x，
Figure BDA0003356679700000063
The state space expression corresponding to the piezoelectric actuator model is obtained as follows:
Figure BDA0003356679700000064
step 2.2: will f isd/q1As an extended state x3I.e. order x3＝fd/q1Obtaining an expansion state space expression corresponding to the piezoelectric driver model as follows:
Figure BDA0003356679700000071
in the above-mentioned formula, the first and second groups,
Figure BDA0003356679700000072
is fd/q1Differentiation of (1);
step 2.3: the expression of the extended state observer of the piezo actuator is designed as follows:
Figure BDA0003356679700000073
in the above formula, z1，z2 and z3Respectively extended state observer in state x1，x2 and x3The lower observed value is also the state of the extended state observer;
Figure BDA0003356679700000074
the output displacement observed value of the piezoelectric driver is also the output of the extended state observer; theta1，θ2 and θ3Is the gain of the extended state observer, theta1，θ2And theta3All the values are fixed values and are related to the structure of the extended state observer;
step 2.4: the extended state observer estimates the total disturbance of the system, and the estimated value of the total disturbance of the system is recorded as
Figure BDA0003356679700000075
Further, the calculation formula of the tracking error and each order derivative thereof adopted by the integral high-order sliding mode controller is as follows:
e(t)＝xr(t)-x(t)；
Figure BDA0003356679700000076
Figure BDA0003356679700000077
in the above formula, e (t) is the tracking error of the system, xr(t) is the desired input trajectory of the system, and x (t) is the actual output trajectory of the system.
Further, a calculation formula of an integral high-order sliding mode surface and each order derivative thereof adopted by the integral high-order sliding mode controller is as follows:
Figure BDA0003356679700000078
Figure BDA0003356679700000081
Figure BDA0003356679700000082
in the above formula, the parameter satisfies beta1＞0，β2＞0，β3＞0，1＜α1＜2，α1＜α2The conditions of (a); and (e)α＝|e|αsgn (e), sgn (e) is a sign function, and the expression of sgn (e) is as follows:
Figure BDA0003356679700000083
further, a calculation formula of the sliding mode control rate adopted by the integral high-order sliding mode controller is as follows:
u(t)＝ueq(t)+un(t)
in the above formula, the equivalent control ueqThe expression of (t) is as follows:
Figure BDA0003356679700000084
non-linear control unThe expression of (t) is as follows:
Figure BDA0003356679700000085
Figure BDA0003356679700000086
Figure BDA0003356679700000087
in the above formula, the parameter satisfies k1＞0，k2＞0，k3Condition > 0.
Variations and modifications to the above-described embodiments may occur to those skilled in the art, which fall within the scope and spirit of the above description. Therefore, the present invention is not limited to the specific embodiments disclosed and described above, and some modifications and variations of the present invention should fall within the scope of the claims of the present invention. Furthermore, although specific terms are employed herein, they are used in a generic and descriptive sense only and not for purposes of limitation.

Claims (6)

1. The piezoelectric driver track tracking control method based on integral high-order sliding mode control is characterized by comprising the following steps of:
step 1: acquiring input signals and output signals of the piezoelectric driver, and identifying a mathematical model of the piezoelectric driver by adopting a second-order linearized mathematical model according to the acquired data;
step 2: estimating total disturbance in a system dynamic process by adopting an extended state observer;
and step 3: and (3) estimating the total disturbance of the system according to the identified mathematical model of the piezoelectric actuator and the extended state observer, and realizing high-precision track tracking control of the piezoelectric actuator by adopting an integral high-order sliding mode controller.
2. The piezoelectric actuator trajectory tracking control method according to claim 1, wherein in step 1, the piezoelectric actuator model is described using a second-order linearized mathematical model, an expression of which is as follows:
Figure FDA0003356679690000011
wherein ,
Figure FDA0003356679690000012
q2＝2ξ/(kωn)，q3＝1/k；
in the above formula, ξ is the damping ratio; k is the gain of the piezoelectric actuator; omeganIs the natural frequency; u (t) is the input voltage of the piezoelectric driver; x (t) is the output displacement of the piezoelectric actuator; f. ofd(t) is the total disturbance of the hysteresis nonlinearity and external interference; h (t) is a hysteresis state variable; d (t) is external interference.
3. The piezoelectric actuator trajectory tracking control method according to claim 2, wherein step 2 includes the steps of:
step 2.1: let x1＝x，
Figure FDA0003356679690000013
The state space expression corresponding to the piezoelectric actuator model is obtained as follows:
Figure FDA0003356679690000014
step 2.2: will f isd/q1As an extended state x3I.e. order x3＝fd/q1Obtaining an expansion state space expression corresponding to the piezoelectric driver model as follows:
Figure FDA0003356679690000015
in the above-mentioned formula, the first and second groups,
Figure FDA0003356679690000021
is fd/q1Differentiation of (1);
step 2.3: the expression of the extended state observer of the piezo actuator is designed as follows:
Figure FDA0003356679690000022
in the above formula, z1，z2 and z3Respectively extended state observer in state x1，x2 and x3The lower observed value is also the state of the extended state observer;
Figure FDA0003356679690000023
the output displacement observed value of the piezoelectric driver is also the output of the extended state observer; theta1，θ2 and θ3Is the gain of the extended state observer;
step 2.4: the extended state observer estimates the total disturbance of the system, and the estimated value of the total disturbance of the system is recorded as
Figure FDA0003356679690000024
4. The piezoelectric actuator trajectory tracking control method according to claim 1, wherein the calculation formula of the tracking error and its derivatives of each order adopted by the integral high-order sliding mode controller is as follows:
e(t)＝xr(t)-x(t)；
Figure FDA0003356679690000025
Figure FDA0003356679690000026
in the above formula, e (t) is the tracking error of the system, xr(t) is the desired input trajectory of the system, and x (t) is the actual output trajectory of the system.
5. The piezoelectric actuator trajectory tracking control method according to claim 4, wherein the integral high-order sliding mode controller adopts a calculation formula of an integral high-order sliding mode surface and each order derivative thereof as follows:
Figure FDA0003356679690000027
Figure FDA0003356679690000028
Figure FDA0003356679690000029
in the above formula, the parameter satisfies beta1＞0，β2＞0，β3＞0，1＜α1＜2，α1＜α2The conditions of (a); and (e)α＝|e|αsgn (e), sgn (e) is a sign function, and the expression of sgn (e) is as follows:
Figure FDA0003356679690000031
6. the piezoelectric actuator trajectory tracking control method according to claim 5, wherein a calculation formula of the sliding mode control rate adopted by the integral high-order sliding mode controller is as follows:
u(t)＝ueq(t)+un(t)
in the above formula, the equivalent control ueqThe expression of (t) is as follows:
Figure FDA0003356679690000032
non-linear control unThe expression of (t) is as follows:
Figure FDA0003356679690000033
Figure FDA0003356679690000034
Figure FDA0003356679690000035
in the above formula, the parameter satisfies k1＞0，k2＞0，k3Condition > 0.
CN202111353308.0A 2021-11-16 2021-11-16 Piezoelectric driver track tracking control method based on integral high-order sliding mode control Active CN113885336B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111353308.0A CN113885336B (en) 2021-11-16 2021-11-16 Piezoelectric driver track tracking control method based on integral high-order sliding mode control

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111353308.0A CN113885336B (en) 2021-11-16 2021-11-16 Piezoelectric driver track tracking control method based on integral high-order sliding mode control

Publications (2)

Publication Number Publication Date
CN113885336A true CN113885336A (en) 2022-01-04
CN113885336B CN113885336B (en) 2023-06-06

Family

ID=79017591

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111353308.0A Active CN113885336B (en) 2021-11-16 2021-11-16 Piezoelectric driver track tracking control method based on integral high-order sliding mode control

Country Status (1)

Country Link
CN (1) CN113885336B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107132759A (en) * 2017-02-24 2017-09-05 沈阳工业大学 A kind of linear electric motors driving FTS is based on ESO sliding formworks and improves repetitive control
CN107359837A (en) * 2017-09-06 2017-11-17 湖南工业大学 Torsion control system of synchronization generator with everlasting magnetic and method based on sliding mode observer and Active Disturbance Rejection Control
WO2019165801A1 (en) * 2018-03-02 2019-09-06 曾喆昭 Disturbance perception control method
CN110716506A (en) * 2019-11-08 2020-01-21 电子科技大学 Servo system position tracking control method based on mixed sliding mode control
CN111431404A (en) * 2020-02-21 2020-07-17 浙江工业大学 Direct-current buck converter system control method based on extended state observer and continuous nonsingular terminal sliding mode control technology

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107132759A (en) * 2017-02-24 2017-09-05 沈阳工业大学 A kind of linear electric motors driving FTS is based on ESO sliding formworks and improves repetitive control
CN107359837A (en) * 2017-09-06 2017-11-17 湖南工业大学 Torsion control system of synchronization generator with everlasting magnetic and method based on sliding mode observer and Active Disturbance Rejection Control
WO2019165801A1 (en) * 2018-03-02 2019-09-06 曾喆昭 Disturbance perception control method
CN110716506A (en) * 2019-11-08 2020-01-21 电子科技大学 Servo system position tracking control method based on mixed sliding mode control
CN111431404A (en) * 2020-02-21 2020-07-17 浙江工业大学 Direct-current buck converter system control method based on extended state observer and continuous nonsingular terminal sliding mode control technology

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SHUYOU YU等: "Extended state observer–based fractional order sliding-mode control of piezoelectric actuators", 《PROC IMECHE PART I: J SYSTEMS AND CONTROL ENGINEERING》 *

Also Published As

Publication number Publication date
CN113885336B (en) 2023-06-06

Similar Documents

Publication Publication Date Title
Changhai et al. Hysteresis and creep compensation for piezoelectric actuator in open-loop operation
Ru et al. A hysteresis compensation method of piezoelectric actuator: Model, identification and control
Li et al. Compensation of hysteresis in piezoelectric actuators without dynamics modeling
Xie et al. High-Speed AFM Imaging of Nanopositioning Stages Using H $ _ {\infty} $ and Iterative Learning Control
Al‐Ghanimi et al. Robust and fast non‐singular terminal sliding mode control for piezoelectric actuators
CN111930008B (en) Piezoelectric micro-positioning platform trajectory tracking control method based on data driving control
CN104122798A (en) High-speed nano precision movement control method and system for piezoelectric ceramic driver
CN102707577B (en) Servo-controlling system of macro-micro mechanism and control method thereof
Xiao et al. A model reference adaptive PID control for electromagnetic actuated micro-positioning stage
CN110543097B (en) Piezoelectric ceramic driver control method based on model reference self-adaptation
Yu et al. A collaborative excitation method for piezoelectric stick-slip actuator to eliminate rollback and generate precise smooth motion
Li et al. Friction identification and compensation design for precision positioning
Cai et al. Hybrid controller of a linear piezoelectric walking stage relying on stack/shear piezoelectric actuators
Lu et al. Improved direct inverse tracking control of a piezoelectric tube scanner for high-speed AFM imaging
Li et al. Finite-time terminal sliding mode tracking control for piezoelectric actuators
CN114077196B (en) Piezoelectric driver compound control method based on improved Prandtl-Ishlinskii model
CN113885336A (en) Piezoelectric driver track tracking control method based on integral high-order sliding mode control
Bazaei et al. A novel state transformation approach to tracking of piecewise linear trajectories
CN112859703A (en) FPGA-based three-point piezoelectric drive fast-swing mirror hysteresis compensation control system
Xu et al. A robust fractional-order sliding mode control technique for piezoelectric nanopositioning stages in trajectory-tracking applications
CN113114128B (en) Piezoelectric feedforward compensation method based on generalized Bouc-Wen inverse model
CN114296349B (en) Hysteresis control method and device for nanometer positioning platform
CN113009830A (en) Nonlinear modeling and control method of piezoelectric actuator
CN113146641A (en) Single-connecting-rod flexible arm control method based on singular perturbation and data-driven backstepping method
Wang et al. Robust fractional‐order fast terminal sliding mode control with fixed‐time reaching law for high‐performance nanopositioning

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant