CN115966454A - 一种空间质谱计测量及校准装置 - Google Patents
一种空间质谱计测量及校准装置 Download PDFInfo
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- CN115966454A CN115966454A CN202211671588.4A CN202211671588A CN115966454A CN 115966454 A CN115966454 A CN 115966454A CN 202211671588 A CN202211671588 A CN 202211671588A CN 115966454 A CN115966454 A CN 115966454A
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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DE10050786A1 (de) * | 2000-10-13 | 2002-05-02 | Schwerionenforsch Gmbh | Verfahren zur Partialdruck-Kalibrierung und Kalibriereinrichtung zur Durchführung des Verfahrens |
CN101470037A (zh) * | 2007-12-28 | 2009-07-01 | 中国航天科技集团公司第五研究院第五一〇研究所 | 用磁悬浮转子规测量多种气体分压力的方法 |
CN103308250A (zh) * | 2013-04-24 | 2013-09-18 | 兰州空间技术物理研究所 | 一种用于低温绝热压力容器真空性能检测的装置 |
CN104345087A (zh) * | 2014-09-05 | 2015-02-11 | 兰州空间技术物理研究所 | 一种磁偏转质谱计的校准装置及校准方法 |
CN105004479A (zh) * | 2015-07-10 | 2015-10-28 | 兰州空间技术物理研究所 | 基于标准压力测量的电离真空计和质谱计校准装置及方法 |
WO2019104450A1 (zh) * | 2017-11-29 | 2019-06-06 | 兰州空间技术物理研究所 | 一种新型分压力质谱计校准装置及方法 |
WO2021128668A1 (zh) * | 2020-02-04 | 2021-07-01 | 中国计量科学研究院 | 气体定量检测设备及方法 |
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- 2022-12-25 CN CN202211671588.4A patent/CN115966454B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10050786A1 (de) * | 2000-10-13 | 2002-05-02 | Schwerionenforsch Gmbh | Verfahren zur Partialdruck-Kalibrierung und Kalibriereinrichtung zur Durchführung des Verfahrens |
CN101470037A (zh) * | 2007-12-28 | 2009-07-01 | 中国航天科技集团公司第五研究院第五一〇研究所 | 用磁悬浮转子规测量多种气体分压力的方法 |
CN103308250A (zh) * | 2013-04-24 | 2013-09-18 | 兰州空间技术物理研究所 | 一种用于低温绝热压力容器真空性能检测的装置 |
CN104345087A (zh) * | 2014-09-05 | 2015-02-11 | 兰州空间技术物理研究所 | 一种磁偏转质谱计的校准装置及校准方法 |
CN105004479A (zh) * | 2015-07-10 | 2015-10-28 | 兰州空间技术物理研究所 | 基于标准压力测量的电离真空计和质谱计校准装置及方法 |
WO2019104450A1 (zh) * | 2017-11-29 | 2019-06-06 | 兰州空间技术物理研究所 | 一种新型分压力质谱计校准装置及方法 |
WO2021128668A1 (zh) * | 2020-02-04 | 2021-07-01 | 中国计量科学研究院 | 气体定量检测设备及方法 |
Non-Patent Citations (2)
Title |
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习振华等: "动态真空校准装置的设计", 宇航计测技术, vol. 39, no. 1 * |
习振华等: "快速动态真空校准装置的研制", 仪器仪表学报, vol. 40, no. 4 * |
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Inventor after: Ge Jinguo Inventor after: Zhang Huzhong Inventor after: Yao Peng Inventor after: Ma Zhuoya Inventor after: Chen Huiying Inventor before: Ge Jinguo Inventor before: Zhang Huzhong Inventor before: Yao Peng Inventor before: Ma Zhuoya Inventor before: Cheng Yongjun Inventor before: Sun Wenjun Inventor before: Chen Huiying |
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