CN115910751A

CN115910751A - Novel treatment process for F PAD corrosion

Info

Publication number: CN115910751A
Application number: CN202211316791.XA
Authority: CN
Inventors: 邵铭; 朱毅
Original assignee: Zhejiang Meidikai Optical Semiconductor Co ltd
Current assignee: Zhejiang Meidikai Optical Semiconductor Co ltd
Priority date: 2022-10-26
Filing date: 2022-10-26
Publication date: 2023-04-04

Abstract

The invention discloses a novel treatment process for F PAD corrosion. The invention only treats the convex corrosion foreign matter on the PAD surface, can not cause the PAD surface damage, can not reduce the PAD thickness, and the effective area is effectively protected. In contrast, the popular EKC cleaning method for removing the F PAD is to remove the F PAD by continuously cutting the thickness of the PAD. The process can be repeated for multiple times until the EKC is completely removed, but the EKC can only be cleaned for 1-2 times and then cannot be cleaned again due to the PAD thickness problem. The process of the invention recovers and reuses the unusable products after the corrosion is confirmed by the original process, reduces the product scrap and greatly saves the cost.

Description

Novel treatment process for F PAD corrosion

Technical Field

The invention relates to the field of wafer surface treatment, in particular to PAD regeneration treatment, and particularly relates to a novel treatment process for F PAD corrosion.

Background

In the conventional Pad manufacturing process, pad open is usually performed by using carbon tetrafluoride or carbon octafluoride, and then fluorine residues on the Pad are removed by using EKC. Even after the EKC cleaning, a little or little fluorine element remains on the wafer, and the fluorine element can be combined with elements such as water molecules in a storage environment after long-time storage, so that fluorine compounds are generated on the surface of the pad, the pad is corroded, the subsequent test packaging is influenced, and the wafer is scrapped.

Disclosure of Invention

In order to solve the technical problem, the invention designs a novel treatment process for F PAD corrosion, which aims to repair and reuse unusable products after corrosion is confirmed by customers.

The invention adopts the following technical scheme:

a novel treatment process for F PAD corrosion comprises the following process steps:

s1, wrapping F PAD corrosion protrusions on the corrosion surface of the PAD with special glue, and standing and drying;

s2, patterning the PAD after the negative adhesive is subjected to a coating exposure process, so that the effective area is in a protection state;

s3, etching the corrosion bulge above the PAD together with the special glue in a dry etching mode;

s4, cleaning residual particles on the surfaces of the negative photoresist protective layer and the PAD in a wet etching mode, and removing water vapor through baking;

s5, etching away the residual special glue together by using a dry etching mode, and stripping by using a wet etching mode again;

s6, after cleaning, baking to remove water vapor, and finally performing appearance inspection to complete the whole novel treatment process of the F PAD corrosion after the appearance inspection is passed.

Preferably, the standing and drying time in the step S1 is 30-90 min, and the standing and drying temperature is 200-250 ℃.

Preferably, the special glue in the step S1 is a glue which has no photosensitivity and can resist high-temperature baking at 250 ℃.

Preferably, in step S2, the negative photoresist is subjected to a coating and exposure process including:

a1, coating negative glue on a corresponding pad open photomask;

a2, adopting a photoetching process to expose the negative photoresist, wherein the photoetching pattern is determined according to Mask design; during photoetching, the negative photoresist of the pattern area irradiated by UV forms a substance which is not easy to dissolve in a developing solution, and the negative photoresist of the pattern area not irradiated by UV is easy to dissolve in the developing solution;

and A3, developing after photoetching, removing the photoresist in the graphic area which is easily dissolved in the developing solution through the developing solution, and patterning the PAD to ensure that the effective area is in a protection state.

Preferably, in the step S4, the baking time is 15min-60min, and the baking temperature is 100 ℃ to 150 ℃.

Preferably, in the step S6, the baking time is 15min-60min, and the baking temperature is 100-150 ℃.

The beneficial effects of the invention are: the method only treats the convex corrosion foreign matters on the PAD surface, cannot cause the PAD surface damage, cannot reduce the PAD thickness, and effectively protects the effective area. In contrast, the popular EKC cleaning method for removing the F PAD is to remove the F PAD by continuously cutting the thickness of the PAD. The process can be repeated for multiple times until the EKC is completely removed, but the EKC can only be cleaned for 1-2 times and then cannot be cleaned again due to the PAD thickness problem. The process of the invention restores and reuses the unusable products after the corrosion is confirmed by the original process, thereby reducing the scrappage of the products and greatly saving the cost.

Drawings

FIG. 1 is a schematic illustration of the present invention directed to a PAD etch process;

FIG. 2 is a schematic of another PAD etching process according to the present invention.

Detailed Description

The technical scheme of the invention is further described in detail by the following specific embodiments in combination with the attached drawings:

example (b): a novel treatment process for F PAD corrosion comprises the following process steps:

s2, patterning the PAD by using negative adhesive through a coating exposure process to enable the effective area to be in a protection state;

s4, cleaning the residual particles on the surfaces of the negative photoresist protective layer and the PAD in a wet etching mode, and removing water vapor through baking;

s6, baking to remove water vapor after cleaning, and finally performing appearance inspection to complete the whole novel treatment process for the F PAD corrosion after the appearance inspection is passed.

The standing and drying process in the step S1 lasts for 30-90 min, and the standing and drying temperature is 200-250 ℃.

The special glue in the step S1 is glue which has no photosensitivity and can resist high-temperature baking at 250 ℃.

In the step S2, the negative glue is subjected to a coating and exposure process which comprises the following steps:

a1, coating negative glue on a corresponding pad open photomask;

In the step S4, the time of the baking process is 15min-60min, and the baking temperature is 100 ℃ to 150 ℃.

In step S6, the baking time is 15min-60min, and the baking temperature is 100 ℃ to 150 ℃.

The method only treats the convex corrosion foreign matters on the PAD surface, cannot cause the PAD surface damage, cannot reduce the PAD thickness, and effectively protects the effective area. In contrast, the popular EKC cleaning method for removing the F PAD is to remove the F PAD by continuously cutting the thickness of the PAD. The process can be repeated for multiple times until the cleaning is completely finished, and the EKC cleaning can be carried out only 1-2 times and cannot be carried out again due to the PAD thickness problem.

As shown in FIG. 1 and FIG. 2, by comparing the process of the present invention before and after the PAD corrosion treatment, it can be seen that the process of the present invention can completely remove the raised substance of the PAD corrosion product F PAD corrosion, and the product which is determined to be unusable by the original process is repaired and reused, thereby reducing the product scrap and greatly saving the cost.

The above-described embodiment is a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and other variations and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.

Claims

1. A novel treatment process for F PAD corrosion is characterized by comprising the following process steps:

s5, etching off the residual special glue together by using a dry etching mode, and stripping by using a wet etching mode again;

2. The novel treatment process of FPAD corrosion as claimed in claim 1, wherein the time of the standing drying process in step S1 is 30min-90min, and the temperature of the standing drying process is 200 ℃ -250 ℃.

3. The novel fpad etching treatment process as claimed in claim 1, wherein the special glue in step S1 is a glue without photosensitivity and resistant to high temperature baking at 250 ℃.

4. The novel treatment process for F PAD corrosion as claimed in claim 1, wherein in step S2, the negative photoresist is subjected to a coating and exposure process comprising:

a1, coating negative glue on a corresponding pad open photomask;

a2, adopting a photoetching process to expose the negative photoresist, wherein the photoetching pattern is determined according to Mask design; during photoetching, the negative photoresist of the pattern area irradiated by UV can form a substance which is not easy to dissolve in a developing solution, and the negative photoresist of the pattern area not irradiated by UV is easy to dissolve in the developing solution;

and A3, developing after photoetching, removing the photoresist in the pattern area which is easy to dissolve in the developing solution through the developing solution, patterning the PAD, and enabling the effective area to be in a protection state.

5. The novel FPAD corrosion treatment process as claimed in claim 1, wherein in step S4, the baking time is 15min-60min, and the baking temperature is 100 ℃ to 150 ℃.

6. The novel fpad corrosion treatment process of claim 1, wherein in step S6, the baking time is 15min-60min, and the baking temperature is 100 ℃ to 150 ℃.