CN115901808A - Inspection apparatus, inspection system, and inspection method - Google Patents

Abstract

The inspection device comprises: an imaging unit which is disposed on one side of an inspection object and which images the inspection object; an annular light source which is arranged on one side of the object to be inspected and irradiates the object to be inspected with light; a surface light source which is disposed on the other side of the inspection object and irradiates the inspection object with light; and a suppressing portion that suppresses incidence of light irradiated from the annular light source to the surface light source.

Description

Inspection apparatus, inspection system, and inspection method

Technical Field

The invention relates to an inspection apparatus, an inspection system and an inspection method.

Background

By inspecting the parts with the inspection apparatus, a large number of parts can be efficiently inspected with a certain accuracy. In some inspection apparatuses, a defect of a component is inspected by imaging the component irradiated with light from a light source (see, for example, patent document 1). Patent document 1 describes a defect inspection apparatus capable of inspecting a defect of a transparent inspection object. The defect inspection apparatus of patent document 1 can inspect the beads of the transparent inspection object without visual observation by acquiring image data when the optical filter is irradiated with light from each of the parallel light illumination apparatus and the annular illumination apparatus.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2017-166903

Disclosure of Invention

However, in the defect inspection apparatus of patent document 1, when the reflected light of the optical filter that irradiates light from the annular illumination device is received by the camera, the light irradiated from the annular illumination device may enter the parallel light illumination device. In this case, light is reflected in the parallel light illumination device to cause interference, and defects in the optical filter may not be appropriately inspected.

The present invention has been made in view of the above problems, and an object thereof is to provide an inspection apparatus, an inspection system, and an inspection method capable of suppressing interference of reflected light.

An exemplary inspection apparatus according to an aspect of the present invention includes: an imaging unit which is disposed on one side of an inspection object and which images the inspection object; an annular light source which is disposed on one side of the inspection object and irradiates the inspection object with light; a surface light source which is disposed on the other side of the inspection object and irradiates the inspection object with light; and a suppressing portion that suppresses incidence of light irradiated from the annular light source to the surface light source.

An exemplary inspection system according to another aspect of the present invention includes: a plate having an upper surface, a lower surface, and a through hole for placing the inspection object; an upper inspection device according to the above, wherein the imaging unit is disposed on an upper surface side of the board; and a lower side inspection device according to the above, wherein the imaging unit is disposed on a lower surface side of the board.

An exemplary inspection method according to another aspect of the present invention is an inspection method using the inspection apparatus described above, including: a step of supplying the inspection object; a first inspection step of inspecting the inspection object by irradiating light from the surface light source from one of a front surface and a back surface of the inspection object; and a second inspection step of inspecting the inspection object by irradiating the inspection object with light from the annular light source from the other of the front surface and the back surface of the inspection object.

Effects of the invention

According to an exemplary aspect of the present invention, disturbance of reflected light can be suppressed.

Drawings

Fig. 1 is a schematic view of the inspection apparatus of the present embodiment.

Fig. 2A is a schematic perspective view of the annular light source in the inspection apparatus of the present embodiment.

Fig. 2B is a schematic perspective view of a surface light source in the inspection device of the present embodiment.

Fig. 2C is a schematic perspective view of an inspection object as an inspection object in the inspection apparatus of the present embodiment.

Fig. 3A is a schematic diagram illustrating imaging of an inspection object irradiated with light from a surface light source in the inspection apparatus according to the present embodiment.

Fig. 3B is a schematic diagram illustrating an image obtained by imaging an inspection object irradiated with light from a surface light source in the inspection device of the present embodiment.

Fig. 4A is a schematic diagram illustrating imaging of an inspection object irradiated with light from an annular light source in the inspection apparatus according to the present embodiment.

Fig. 4B is a schematic diagram showing an image obtained by imaging the inspection object irradiated with light from the ring-shaped light source in the inspection apparatus according to the present embodiment.

Fig. 5 is a flowchart of the inspection and mounting method according to the present embodiment.

Fig. 6A is a schematic perspective view of an inspection object to be inspected in the inspection apparatus according to the present embodiment.

Fig. 6B is a schematic cross-sectional view of an inspection object to be inspected in the inspection apparatus according to the present embodiment.

Fig. 7 is a schematic view of the inspection apparatus of the present embodiment.

Fig. 8A is an enlarged schematic view of a part of the inspection apparatus according to the present embodiment.

Fig. 8B is a schematic diagram showing a path of light reflected by an inspection object to be inspected in the inspection apparatus according to the present embodiment.

Fig. 8C is an enlarged schematic view of a part of the inspection apparatus according to the present embodiment.

Fig. 9A is a schematic perspective view of an inspection object to be inspected in the inspection apparatus according to the present embodiment.

Fig. 9B is a schematic cross-sectional view of an inspection object to be inspected in the inspection apparatus according to the present embodiment.

Fig. 9C is a schematic perspective view of a holder that holds the inspection object of fig. 9A and 9B.

Fig. 10 is a schematic view of the inspection apparatus of the present embodiment.

Fig. 11A is a schematic perspective view of a holder that holds an inspection object to be inspected in the inspection apparatus according to the present embodiment.

Fig. 11B is a schematic diagram illustrating an image obtained by imaging an inspection object irradiated with light from a surface light source in the inspection device of the present embodiment.

Fig. 11C is a schematic diagram illustrating a manner in which the center of the outer ring is determined from the image of the coupling hole of the cage.

Fig. 11D is a schematic diagram illustrating a manner in which the center of the inner ring is specified from the image of the inspection object.

Fig. 12 is a flowchart of the inspection and mounting method according to the present embodiment.

Fig. 13 is a schematic diagram of the inspection system of the present embodiment.

Fig. 14 is a schematic perspective view of a holder that holds an inspection target object to be inspected in the inspection system according to the present embodiment.

Fig. 15 is a schematic perspective view of the holder in the inspection system of the present embodiment.

Fig. 16 is a schematic view of the inspection apparatus of the present embodiment.

Fig. 17A is a schematic diagram illustrating imaging of an inspection object irradiated with light from a surface light source in the inspection device of the present embodiment.

Fig. 17B is a schematic diagram illustrating imaging of an inspection object irradiated with light from the annular light source in the inspection apparatus according to the present embodiment.

Detailed Description

Exemplary embodiments of an inspection apparatus, an inspection system, and an inspection method according to the present invention will be described below with reference to the drawings. In the drawings, the same or corresponding portions are denoted by the same reference numerals, and description thereof will not be repeated. In the present specification, for the sake of easy understanding of the invention, X, Y, and Z axes orthogonal to each other are described in some cases. Typically, the Z-axis shows the vertical direction, and the X-axis and Y-axis show the horizontal direction. However, the present embodiment is not limited to this.

In the present specification, the term "parallel" in the positional relationship between any one of the orientation, line and plane and any other one includes not only a state in which the two do not intersect each other at all, but also a state in which the two are substantially parallel regardless of the extent of extension. The terms "perpendicular" and "orthogonal" include not only a state where they intersect each other at 90 degrees, but also a substantially perpendicular state and a substantially orthogonal state, respectively. The "vertical" indicates not only the direction in which the gravity acts but also the direction in which the gravity substantially acts. The "horizontal" indicates not only a direction strictly orthogonal to the direction in which gravity acts, but also a direction substantially orthogonal to the direction in which gravity acts. That is, it goes without saying that the terms "parallel", "vertical", "orthogonal", "vertical" and "horizontal" include a state in which the positional relationship therebetween is angularly offset to the extent that the effect of the present invention is obtained.

First, the inspection apparatus 100 according to the present embodiment will be described with reference to fig. 1. Fig. 1 is a schematic view of an inspection apparatus 100 according to the present embodiment.

As shown in fig. 1, the inspection apparatus 100 inspects the inspection object S. The inspection object S is inspected while being placed at a specific position of the inspection apparatus 100.

The inspection apparatus 100 includes an imaging unit 110, an annular light source 120, a surface light source 130, and a suppression unit 140. In the inspection apparatus 100, the imaging unit 110, the annular light source 120, and the surface light source 130 are preferably fixedly disposed. For example, the imaging unit 110, the annular light source 120, and the surface light source 130 are preferably fixedly disposed on the same fixed base. However, the surface light source 130 may be moved relative to the imaging unit 110 and the ring-shaped light source 120.

The imaging unit 110 captures an image of the inspection object S. The imaging unit 110 is disposed on one side (+ Z direction side) of the inspection object S.

The imaging unit 110 captures an image within an imaging range. The imaging unit 110 captures an image of an imaging range extending around the optical axis Pa. The imaging range of the imaging section 110 may be adjustable. The optical axis Pa of the imaging unit 110 extends in the optical axis direction Dp. Here, the optical axis direction Dp is parallel to the vertical direction. The inspection object S is disposed on the optical axis Pa.

The image pickup section 110 includes an image pickup element. For example, the image pickup element is a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor.

The ring-shaped light source 120 has a ring-shaped structure. The ring-shaped light source 120 irradiates the inspection object S with light. Typically, the center of the annular light source 120 coincides with the optical axis Pa of the imaging unit 110. The ring-shaped light source 120 is disposed on one side (+ Z direction side) with respect to the inspection object S.

The ring-shaped light source 120 irradiates the inspection object S with light. The ring-shaped light source 120 irradiates light obliquely toward the center of the ring shape. Typically, the ring-shaped light source 120 irradiates the inspection object S with light of substantially constant intensity from a predetermined region.

The annular light source 120 has an emission surface 120s for emitting light. The exit surface 120s is inclined with respect to the XY plane. The normal direction of the emission surface 120s is directed obliquely downward. The imaging unit 110 images the inspection object S irradiated with light from the ring-shaped light source 120.

The surface light source 130 irradiates light to the inspection object S. The surface light source 130 irradiates light in a planar manner. The surface light source 130 has an emission surface 130s for emitting light. The normal direction of the exit surface 130s extends in the Z direction. Typically, the surface light source 130 irradiates light of substantially constant intensity from a predetermined region.

The surface light source 130 is disposed on the other side (-Z direction side) with respect to the inspection object S. At least when the surface light source 130 irradiates the inspection object S with light, the surface light source 130 is positioned on the optical axis Pa of the imaging unit 110. The imaging unit 110 images the inspection object S irradiated with light from the surface light source 130.

The suppressing unit 140 suppresses light emitted from the annular light source 120 from entering the surface light source 130. As described above, when the surface light source 130 irradiates the inspection object S with light, the imaging unit 110 images the inspection object S irradiated with light from the surface light source 130. In this case, the suppressing unit 140 does not block the light irradiated from the surface light source 130 from entering the inspection object S.

On the other hand, the imaging unit 110 images the inspection object S irradiated with light from the ring-shaped light source 120. In this case, the suppressing unit 140 suppresses the light emitted from the annular light source 120 from being incident on the surface light source 130. Specifically, when the imaging unit 110 images the inspection object S irradiated with light from the annular light source 120, the suppressing unit 140 suppresses the light irradiated from the annular light source 120 from being incident on the surface light source 130.

Here, the suppression unit 140 includes a light shielding plate 140p movable between a light shielding position and a retracted position. The light shielding plate 140p is configured to suppress reflection of light.

Typically, the light shielding plate 140p has a lower reflectance than the components disposed on the emission surface 130s of the surface light source 130. At least the + Z direction side of the light shielding plate 140p exhibits a reflectance lower than that of a member disposed on the emission surface 130s of the surface light source 130. The light shielding plate 140p is surface-treated to have a low reflectance. For example, the light shielding plate 140p may be colored black.

The light shielding plate 140p moves between a light shielding position covering the entire surface of the emission surface 130s of the surface light source 130 and a retracted position located outside the surface light source 130 as viewed from the optical axis direction Dp of the imaging unit 110.

When the surface light source 130 irradiates light, the light shielding plate 140p is located at the retracted position. When the light shielding plate 140p is located at the retracted position, the light shielding plate 140p does not shield the light irradiated from the surface light source 130 to the inspection object S. Typically, when the light shielding plate 140p is located at the retracted position, the light shielding plate 140p is located outside the surface light source 130. In fig. 1, the light shielding plate 140p is located at the retreat position. In this case, the imaging unit 110 images the inspection object S irradiated with light from the surface light source 130 without being blocked by the light blocking plate 140p.

On the other hand, in the case where the light is irradiated from the ring-shaped light source 120, the light shielding plate 140p is moved to the light shielding position. The light shielding position is a position where the light shielding plate 140p is positioned between the inspection object S and the surface light source 130. Typically, when the light shielding plate 140p is located at the light shielding position, the light shielding plate 140p overlaps the optical axis Pa of the imaging unit 110. When the light blocking plate 140p is located at the light blocking position, the light blocking plate 140p suppresses the incidence and reflection of light from the annular light source 120 toward the surface light source 130.

As described above, the suppressing unit 140 includes the light blocking plate 140p movable between the light blocking position covering the entire surface of the emission surface 130s of the surface light source 130 and the retracted position located outside the surface light source 130 as viewed from the optical axis direction Dp of the imaging unit 110. Therefore, the light from the ring-shaped light source 120 can be suppressed from being reflected in the surface light source 130 by the movement of the light shielding plate 140p.

The examination apparatus 100 may further comprise a control apparatus 150. The control device 150 can control the operations of the imaging unit 110, the annular light source 120, the surface light source 130, and the suppressing unit 140 of the inspection apparatus 100. Alternatively, the control device 150 may analyze the captured image captured by the imaging unit 110 to determine the inspection result of the inspection target S. For example, the control device 150 can check whether or not foreign matter is present in the inspection target S by performing image analysis on the captured image.

The control device 150 includes a control unit 152 and a storage unit 154. The control unit 152 includes an arithmetic element. The arithmetic element includes a processor. In one example, the processor includes a Central Processing Unit (CPU).

The storage section 154 stores various data. For example, the storage unit 154 stores a control program. The control unit 152 controls the operation of the control device 150 by executing a control program. Specifically, the processor of the control unit 152 executes a computer program stored in the storage element of the storage unit 154 to control the respective configurations of the control device 150.

For example, the computer program is stored in a non-transitory computer readable storage medium. Non-transitory computer readable storage media include Read Only Memory (ROM), random Access Memory (RAM), CD-ROMs, magnetic tape, magnetic disks, or optical data storage devices.

The inspection apparatus 100 may further include a holder 160 for holding the inspection object S. Typically, the holder 160 is disposed at a predetermined position of the inspection apparatus 100 in a state of holding the inspection object S.

The holder 160 has a positioning portion 160p for determining a position for holding the inspection object S. The positioning unit 160p can position the inspection object S at a predetermined position.

As described above, the surface light source 130 has the emission surface 130s for emitting light. The positioning portion 160p of the holder 160 falls inside the emission surface 130s as viewed from the optical axis direction Dp of the imaging portion 110. For example, the length of the positioning portion 160p along the XY plane is smaller than the length of the exit surface 130s along the XY plane. Therefore, even if the inspection object S refracts the light from the surface light source 130, the inspection object S can be sufficiently imaged.

The inspection apparatus 100 of the present embodiment includes: an imaging unit 110 that is disposed on one side (+ Z direction side) of the inspection target S and that images the inspection target S; an annular light source 120 that is disposed on one side (+ Z direction side) of the inspection object S and irradiates the inspection object S with light; a surface light source 130 which is disposed on the other side (-Z direction side) of the inspection object S and irradiates the inspection object S with light; and a suppressing portion 140 that suppresses light irradiated from the ring-shaped light source 120 from being incident on the surface light source 130. Thus, the inspection apparatus 100 can suppress the occurrence of light interference in the surface light source 130 when the annular light source 120 irradiates the inspection object S with light.

Next, the annular light source 120, the surface light source 130, and the inspection object S in the inspection apparatus 100 according to the present embodiment will be described with reference to fig. 2A to 2C. Fig. 2A is a schematic perspective view of the ring-shaped light source 120 in the inspection apparatus 100 of the present embodiment, and fig. 2B is a schematic perspective view of the surface light source 130 in the inspection apparatus 100 of the present embodiment. Fig. 2C is a schematic perspective view of the inspection object S to be inspected in the inspection apparatus 100 according to the present embodiment.

As shown in fig. 2A, the ring-shaped light source 120 has a ring-shaped structure. The annular light source 120 is provided with a through hole 120h. The ring-shaped light source 120 irradiates light obliquely toward the center of the ring in the-Z-axis direction. Here, the ring-shaped light source 120 is a circular ring structure. The annular light source 120 is provided with a cylindrical through hole 120h. However, the ring-shaped light source 120 may have a ring-shaped structure other than the ring-shaped structure.

For example, the outer diameter Da of the annular light source 120 is larger than the inner diameter Dha of the annular light source 120 (the outer diameter of the through-hole 120 h).

As shown in fig. 2B, the surface light source 130 has a substantially rectangular parallelepiped shape. The surface light source 130 has an exit surface 130s extending on the XY plane. The exit surface 130s is located on one surface of the surface light source 130. The emission surface 130s emits light of substantially constant intensity from the entire surface.

The length Db1 of the emission surface 130s (e.g., the length in the X-axis direction) is substantially equal to the length Db2 of the emission surface 130s (e.g., the length in the Y-axis direction). However, the length Db1 of the emission surface 130s may be different from the length Db2 of the emission surface 130s.

Typically, the length Db1 and the length Db2 of the surface light source 130 are smaller than the inner diameter Dha of the ring-shaped light source 120. For example, the length Db1 and the length Db2 of the surface light source 130 are 10% to 50% with respect to the inner diameter Dha of the annular light source 120.

As shown in fig. 2C, the inspection object S has a cylindrical structure. For example, the inspection object S is a thin circular plate. The inspection object S has a light-transmitting member. The light-transmitting member transmits light. The light-transmitting member may be transparent. Alternatively, the light-transmitting member may be colored.

Typically, the length Db1 and the length Db2 of the surface light source 130 are larger than the outer diameter Ds of the inspection object S. For example, the length Db1 and the length Db2 of the surface light source 130 are 150% to 1000% with respect to the outer diameter Ds of the inspection object S.

Next, referring to fig. 3A and 3B, imaging of the inspection object S irradiated with light from the surface light source 130 of the inspection apparatus 100 according to the present embodiment will be described. Fig. 3A is a schematic diagram illustrating imaging of the inspection object S irradiated with light from the surface light source 130 in the inspection apparatus 100 of the present embodiment, and fig. 3B is a schematic diagram illustrating a captured image It of the inspection object S irradiated with light from the surface light source 130 in the inspection apparatus 100 of the present embodiment.

As shown in fig. 3A, the surface light source 130 irradiates light to the inspection object S. At this time, the light shielding plate 140p is located at the retreat position. Therefore, the light shielding plate 140p does not shield the light irradiated from the surface light source 130 to the inspection object S.

The light irradiated from the surface light source 130 to the inspection object S reaches the imaging unit 110 through the through-hole 120h of the annular light source 120. The imaging unit 110 images the inspection object S irradiated with light from the surface light source 130. In this case, the imaging unit 110 images the inspection object S through which the light emitted from the surface light source 130 passes. The imaging unit 110 captures an inspection object S irradiated with light from the surface light source 130 to generate an image It.

As shown in fig. 3B, in the image It, the inspection object S basically looks bright (white). This is because the light irradiated from the surface light source 130 mainly passes through the light-transmitting member of the inspection object S and reaches the imaging unit 110.

If foreign matter exists in the light-transmitting member of the inspection object S, light is irregularly scattered by the foreign matter. In this case, a portion other than white or a portion different from the surrounding white is generated in the image It. Therefore, the foreign object of the inspection object S can be found by the image It.

Typically, the imaging unit 110 can inspect whether or not foreign matter is present in the entire inspection object S by imaging the inspection object S through which light emitted from the surface light source 130 passes. However, when the imaging unit 110 images the inspection object S through which the light emitted from the surface light source 130 passes, if the foreign matter is minute, it may be difficult to find the foreign matter in the inspection object S. For example, when the foreign matter is fibrous, it is difficult to find the foreign matter in the inspection object S.

Next, the imaging of the inspection object S irradiated with light from the ring-shaped light source 120 of the inspection apparatus 100 according to the present embodiment will be described with reference to fig. 4A and 4B. Fig. 4A is a schematic diagram showing imaging of the inspection object S irradiated with light from the ring-shaped light source 120 in the inspection apparatus 100 of the present embodiment, and fig. 4B is a schematic diagram showing an image of the inspection object S irradiated with light from the ring-shaped light source 120 in the inspection apparatus 100 of the present embodiment.

As shown in fig. 4A, the ring-shaped light source 120 irradiates light to the inspection object S. The imaging unit 110 images the inspection object S irradiated with light from the ring-shaped light source 120. The imaging unit 110 captures an image of the inspection object S irradiated with light from the ring-shaped light source 120, and generates an image Ir.

As shown in fig. 4B, the inspection object S appears substantially black (dark) in the image Ir. This is because, as shown in fig. 4A, the incident light Ls irradiated from the ring-shaped light source 120 to the inspection object S is mainly regularly reflected in the inspection object S to become the reflected light Ls1, and the reflected light Ls1 does not substantially reach the imaging unit 110.

However, when a foreign object is present in the light-transmitting member of the inspection object S, the incident light Ls is reflected by the foreign object as reflected light Ls2 different from the reflected light Ls1, and a part of the reflected light Ls2 reaches the imaging unit 110. Therefore, in the image Ir, a relatively bright portion (for example, a white portion) is generated in a relatively dark portion. Therefore, the inspection apparatus 100 can detect the foreign matter in the inspection target S.

As is clear from a comparison between fig. 3B and fig. 4B, as shown in fig. 3B, the imaging result (image It) of the inspection object S through which the light irradiated from the surface light source 130 passes is bright as a whole, and therefore, if the foreign matter is small, it is difficult to find the foreign matter. On the other hand, as shown in fig. 4B, since the foreign matter portion becomes bright in the entire dark state as a result of the imaging of the inspection object S (image Ir) irradiated from the ring-shaped light source 120, the foreign matter on the surface of the inspection object S is relatively small and can be easily found. Therefore, the imaging unit 110 preferably images not only the inspection object S irradiated with light from the surface light source 130 but also the inspection object S irradiated with light from the annular light source 120.

As shown in fig. 4A, a part of incident light Ls incident on the inspection object S from the ring-shaped light source 120 may pass through the inspection object S to become transmitted light Ls3. When the transmitted light Ls3 enters the surface light source 130, is reflected by the surface light source 130, and reaches the imaging unit 110, a bright light emitting portion is generated in the captured image, and it may be erroneously detected that a foreign object is present in the inspection target S.

Therefore, in the inspection apparatus 100 of the present embodiment, when the ring-shaped light source 120 irradiates the inspection target S with light, the light blocking plate 140p is located at the light blocking position. At this time, the light shielding plate 140p shields the light irradiated from the annular light source 120 to the inspection object S from entering the surface light source 130. The light blocking plate 140p blocks light emitted from the annular light source 120 toward the inspection object S, and the light is reflected by the surface light source 130 and travels toward the imaging unit 110. Thus, even if a part of the incident light Ls transmits through the inspection object S, the light shielding plate 140p can suppress the transmitted light Ls3 from entering and reflecting the surface light source 130 and reaching the imaging unit 110, and therefore, false detection can be suppressed.

Next, the inspection method according to the present embodiment will be described with reference to fig. 1 to 5. Fig. 5 is a flowchart of the inspection method of the present embodiment.

As shown in fig. 5, the inspection object S is provided in step S102. For example, the inspection object S is carried into the inspection apparatus 100. Then, the inspection object S is set in the inspection apparatus 100. When the front surface and the back surface of the inspection object S are different from each other, the front surface of the inspection object S may be oriented vertically upward. Alternatively, the surface of the inspection object S may be vertically downward.

In step S104, a first inspection is performed on the inspection target S. In the first inspection, the inspection target S is inspected by irradiating the light from the surface light source 130 from one of the front surface and the back surface of the inspection target S. Specifically, while the light from the surface light source 130 is irradiated from one of the front surface and the back surface of the inspection object S, the inspection device 100 inspects the inspection object S by imaging the inspection object S by the imaging unit 110.

In step S106, a second inspection is performed on the inspection target S. In the second inspection, the inspection target S is inspected by irradiating the inspection target S with light from the ring-shaped light source 120 from the other of the front surface and the back surface of the inspection target S. Specifically, while the light from the annular light source 120 is being emitted from the other of the front surface and the back surface of the inspection object S, the inspection device 100 inspects the inspection object S by imaging the inspection object S by the imaging unit 110.

As described above, the inspection object S can be inspected. Typically, after the inspection is completed, the inspection object S is carried out of the inspection apparatus 100. When the inspection result of the inspection object S is normal, the next process is performed on the inspection object S. When the inspection result of the inspection object S is abnormal, other processing is performed on the inspection object S.

For example, when the surface light source 130 irradiates the surface of the inspection object S with light in the first inspection step to inspect the inspection object S, the ring-shaped light source 120 irradiates the back surface of the inspection object S with light in the second inspection step to inspect the inspection object S. Alternatively, when the inspection target S is inspected by irradiating the back surface of the inspection target S with light from the surface light source 130 in the first inspection step, the inspection target S may be inspected by irradiating the back surface of the inspection target S with light from the annular light source 120 in the second inspection step.

Here, the inspection target S is inspected by the surface light source 130 in the first inspection step, and then the inspection target S is inspected by the annular light source 120 in the second inspection step, but the present embodiment is not limited thereto. The inspection object S may be inspected by using the annular light source 120 and then by using the surface light source 130.

In this way, the inspection method of the present embodiment uses the inspection apparatus 100 described above. The inspection method comprises the following steps: providing an inspection object S; a first inspection step of inspecting the inspection object S by irradiating the inspection object S with light from the surface light source 130 from one of the front surface and the back surface of the inspection object S; and a second inspection step of inspecting the inspection object S by irradiating the inspection object S with light from the annular light source 120 from the other of the front surface and the back surface of the inspection object S. This allows the inspection of the inspection object S by irradiating light from the front surface and the back surface of the inspection object S.

The inspection object S shown in fig. 2C has a substantially cylindrical shape, but the present embodiment is not limited thereto. The surface of the inspection object S may be curved.

Next, an inspection target S to be inspected in the inspection apparatus 100 according to the present embodiment will be described with reference to fig. 6A and 6B. Fig. 6A is a schematic perspective view of the inspection object S to be inspected in the inspection apparatus 100 of the present embodiment, and fig. 6B is a schematic cross-sectional view of the inspection object S to be inspected in the inspection apparatus 100 of the present embodiment.

As shown in fig. 6A and 6B, the inspection object S has a cylindrical shape with two flat bottom surfaces. The inspection object S has a light-transmitting member St and a holding member Sh. The holding member Sh holds the light transmitting member St. The light-transmitting member St exhibits light-transmitting properties, while the holding member Sh does not exhibit light-transmitting properties.

Here, the transparent member St has a ring structure. The holding members Sh hold the inside and the outside of the light transmitting member St, respectively. The holding member Sh includes: an inner ring Shp holding the inside of the light transmitting member St; and an outer ring Shq holding the outer side of the light transmitting member St.

For example, the inner ring Shp and the outer ring Shq include metal, and the light transmitting member St includes transparent gel. The entire inspection object S may be vibrated by the inner ring Shp vibrating in the vertical direction.

The inner ring Shp has a cylindrical shape having a hollow through hole along the center axis. The outer ring Shq is circular in shape. The outer ring Shq has an inner diameter greater than the outer diameter of the inner ring Shp.

For example, the light transmitting member St is molded by injecting a resin between the inner ring Shp and the outer ring Shq and then heating and curing the resin. At this time, the first main surface Sta and the second main surface Stb of the transparent member St are bent.

The first main surface Sta of the light transmitting member St is higher (located on the + Z direction side) at the boundary portion with the inner ring Shp and at the boundary portion with the outer ring Shq, and is recessed between the boundary portion with the inner ring Shp and the boundary portion with the outer ring Shq. Therefore, the first main surface Sta of the light transmitting member St is curved. The second main surface Stb of the light transmitting member St is lowered (located on the-Z direction side) at the boundary portion with the inner ring Shp and at the boundary portion with the outer ring Shq, and is recessed between the boundary portion with the inner ring Shp and the boundary portion with the outer ring Shq. Therefore, the second main surface Stb of the light transmitting member St is bent.

As shown in fig. 6B, the curved shape of the transparent member St may be different depending on the orientation. For example, the surface shape of the light transmitting member St on the + Z direction side is different from the surface shape of the light transmitting member St on the-Z direction side. Specifically, the degree of curvature of the first main surface Sta of the light transmitting member St is different from the degree of curvature of the second main surface Stb of the light transmitting member St. This is because the degree of contraction of the light transmitting member St differs depending on the posture when the light transmitting member St is formed. For example, when the light transmitting member St is formed in a state where the first main surface Sta of the light transmitting member St is positioned vertically above and the second main surface Stb is positioned vertically below, the degree of curvature of the second main surface Stb is greater than that of the first main surface Sta (the degree of curvature of the second main surface Stb is greater than that of the first main surface Sta).

In addition, when the surface of the transparent member St is curved in the inspection object S, the image captured by the imaging unit 110 may be changed although there is no foreign matter on the transparent member St. In this case, it is preferable to limit a part of the light directed from the ring-shaped light source 120 to the inside of the inspection object S.

Next, the inspection apparatus 100 according to the present embodiment will be described with reference to fig. 7. Fig. 7 is a schematic diagram of the inspection apparatus 100 according to the present embodiment. The inspection apparatus 100 of fig. 7 has the same configuration as the inspection apparatus 100 described with reference to fig. 1 except that it further includes a light shielding cylinder 170, and redundant description is omitted to avoid redundancy.

As shown in fig. 7, the inspection apparatus 100 further includes a light shielding cylinder 170. The light shielding cylinder 170 is positioned between the inspection object S and the imaging unit 110. The light shielding cylinder 170 has a cylindrical shape. The light shielding cylinder 170 is located in the through hole 120h of the annular light source 120.

The center axis of the light shielding cylinder 170 overlaps the optical axis Pa of the imaging unit 110. The light shielding cylinder 170 is preferably configured to be movable in the vertical direction between the inspection object S and the imaging unit 110. In this case, the light shielding cylinder 170 can move so as to enter the through hole 120h of the ring-shaped light source 120.

The light shielding cylinder 170 partially shields light incident on the inspection object S from the ring-shaped light source 120. The light shielding cylinder 170 preferably shields light incident on the inspection object S from the annular light source 120 on the outer surface.

Next, the light shielding cylinder 170 in the inspection apparatus 100 according to the present embodiment will be described with reference to fig. 7 to 8C. Fig. 8A is an enlarged schematic view of a part of the inspection apparatus 100 according to the present embodiment.

As shown in fig. 8A, when the light shielding cylinder 170 is located at a relatively high position with respect to the annular light source 120, the light emitted from the annular light source 120 does not irradiate the light shielding cylinder 170, and the light shielding cylinder 170 does not shield the light emitted from the annular light source 120. In this case, when the light emitted from the ring-shaped light source 120 enters a curved portion of the inspection object S, the reflected light from the curved portion may be directed to the imaging unit 110.

Here, the light reflected by the boundary portion with the inner ring Shp in the first main surface Sta of the transparent member St in the inspection object S is examined. Specifically, the incident light component La emitted from the outside of the emission surface 120s of the annular light source 120 and the incident light component Lb emitted from the inside of the emission surface 120s of the annular light source 120 are considered.

Fig. 8B is a schematic diagram illustrating a path of light emitted from the ring-shaped light source 120 with respect to light reflected by the inspection object S to be inspected in the inspection apparatus 100 according to the present embodiment.

As shown in fig. 8B, the incident light component La shown by a solid line is incident at a large incident angle with respect to the XY plane at the boundary portion Std. In this case, even if the boundary portion Std is curved, the incident light component La is reflected at the boundary portion Std at a comparatively large reflection angle with respect to the XY plane.

In contrast, the incident light component Lb shown by a broken line is incident at a relatively small incident angle with respect to the XY plane at the boundary portion Std. Since the boundary portion Std is curved, the incident light component Lb may be reflected in the + Z direction at the boundary portion Std.

In this case, even if there is no foreign matter in the boundary portion Std, a part of the reflected light at the boundary portion Std reaches the image pickup section 110, and a relatively bright portion (for example, a white portion) is generated in a relatively dark portion in the image Ir. Therefore, if the intensity of the incident light component Lb is high and the degree of curvature of the boundary portion Std is large, a foreign object in the inspection object S may be erroneously detected.

In this case, by limiting a part of the incident light component Lb, erroneous detection can be suppressed.

Fig. 8C is an enlarged schematic view of a part of the inspection apparatus 100 according to the present embodiment. As shown in fig. 8C, the light shielding cylinder 170 shields a part of the light emitted from the ring-shaped light source 120.

As shown in fig. 8C, when the light shielding cylinder 170 is located at a relatively low position with respect to the ring-shaped light source 120, a part of the light emitted from the ring-shaped light source 120 is shielded by the light shielding cylinder 170. In this case, the incident light component Lb emitted from the inside of the emission surface 120s of the annular light source 120 is blocked by the light blocking cylinder 170. On the other hand, the incident light component La emitted from the outside of the emission surface 120s of the annular light source 120 is not blocked by the light blocking cylinder 170. This can secure an incident light component necessary for the inspection of the inspection object S, and can block the incident light component Lb reflected by the imaging unit 110 at the boundary portion Std of the transparent member St of the inspection object S, which is bent to a large extent.

In this way, the inspection apparatus 100 may further include a light shielding cylinder 170 that shields a part of light directed from the ring-shaped light source 120 to the inspection object S. The light shielding cylinder 170 can shield a part of the light directed from the ring-shaped light source 120 to the inspection object S.

The inspection object S shown in fig. 6A and 6B has a cylindrical shape, but the present embodiment is not limited thereto. The inspection object S may have a protruding portion.

Next, an inspection object S to be inspected in the inspection apparatus 100 according to the present embodiment and a holder 160 for appropriately holding the inspection object S will be described with reference to fig. 9A to 9C. Fig. 9A is a schematic perspective view of the inspection object S to be inspected in the inspection apparatus 100 of the present embodiment. Fig. 9B is a schematic cross-sectional view of the inspection object S to be inspected in the inspection apparatus 100 of the present embodiment. Fig. 9C is a schematic perspective view of the holder 160 holding the inspection object S of fig. 9A and 9B.

As shown in fig. 9A and 9B, the inspection object S includes an inner ring Shp, an outer ring Shq, and a transparent member St located between the inner ring Shp and the outer ring Shq. The inner ring Shp has a protrusion Sp protruding in the + Z direction from the light transmitting member St and the outer ring Shq.

As shown in fig. 9C, the holder 160 has a positioning portion 160p for holding the inspection object S. The holder 160 has a thin plate shape. A through hole 160h is provided as the positioning portion 160p in the holder 160. The through-hole 160h has a shape matching the outer shape of the inspection object S. For example, the inspection object S is inserted into the through hole 160h with the protrusion Sp oriented vertically downward (-Z direction), and is held by the holding portion 160.

In this way, the inspection apparatus 100 further includes a holder 160 provided with a positioning portion 160p for specifying the position of the inspection target S. The inspection object S can be stably positioned by the holder 160.

As described above, in the inspection apparatus 100, the imaging unit 110, the annular light source 120, the surface light source 130, and the suppressing unit 140 are preferably fixedly disposed. For example, the imaging unit 110, the annular light source 120, the surface light source 130, and the suppressing unit 140 are preferably fixedly disposed on the same fixed base.

Next, the inspection apparatus 100 according to the present embodiment will be described with reference to fig. 10. Fig. 10 is a schematic view of the inspection apparatus 100 of the present embodiment.

As shown in fig. 10, the inspection apparatus 100 includes a fixing base 180 in addition to the imaging unit 110, the annular light source 120, the surface light source 130, the suppressing unit 140, the holder 160, and the light shielding cylinder 170. The fixing base 180 fixes and arranges the imaging unit 110, the annular light source 120, the surface light source 130, the suppressing unit 140, and the holder 160.

Here, typically, the imaging section 110 includes a camera 112 and a lens 114. The camera 112 includes an image pickup element. For example, the image pickup element is a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor. The lens 114 forms a magnified or reduced image on the sensor of the camera 112.

As described above, the suppression portion 140 includes the light shielding plate 140p. The light shielding plate 140p moves in the horizontal direction between the retreat position and the light shielding position with respect to the fixed stage 180. For example, a slide mechanism having a rail along which the light shielding plate 140p can slide is provided on the fixed table 180.

The ring-shaped light source 120 is fixed to the fixing table 180. On the other hand, the light shielding cylinder 170 moves in the vertical direction with respect to the fixed base 180. Therefore, the light shielding cylinder 170 can move relative to the ring-shaped light source 120.

Here, the light shielding cylinder 170 is moved in the vertical direction with respect to the annular light source 120, but the annular light source 120 may be moved in the vertical direction with respect to the light shielding cylinder 170. Alternatively, the inspection object S may be moved in the vertical direction with respect to the ring-shaped light source 120.

In addition, although the holder 160 shown in fig. 9C is provided with the through-hole 160h matching the outer shape of the inspection object S, the present embodiment is not limited thereto. The holder 160 may be provided with a through-hole 160h matching the outer shape of the inspection object S and a coupling hole connected to the through-hole 160h.

Next, the inspection apparatus 100 according to the present embodiment will be described with reference to fig. 11A to 11D. Fig. 11A is a schematic perspective view of a holder 160 that holds an inspection object S to be inspected in the inspection apparatus 100 according to the present embodiment.

As shown in fig. 11A, the holder 160 is provided with a positioning portion 160p for positioning the inspection object S. Here, the holder 160 is provided with a through hole 160h matching the outer shape of the inspection object S and a coupling hole 160c connected to the through hole 160h. The through-hole 160h matches the outer shape of the inspection object S, and thereby the inspection object S is positioned in the through-hole 160h.

The through hole 160h has a shape matching the cylindrical inspection object S. The coupling hole 160c is connected to the through hole 160h. The coupling holes 160c are positioned in four directions with respect to the cylindrical through-holes 160h. The coupling hole 160c is formed in a semi-cylindrical shape having a smaller radius than that of the through hole 160h.

Fig. 11B is a schematic diagram illustrating an image It obtained by imaging the inspection object S irradiated with light from the surface light source 130 in the inspection apparatus 100 of the present embodiment. Here, the inspection object S is held by a holder 160 shown in fig. 11A.

As shown in fig. 11B, in the image It, the inspection object S is inserted into the through hole 160h, and the transparent member St of the inspection object S looks substantially bright (white). This is because the light irradiated from the surface light source 130 mainly passes through the light transmitting member St of the inspection object S and reaches the imaging unit 110. On the other hand, the inner ring Stp and the outer ring Stq of the test object S are non-translucent and substantially appear dark (black). With the image It, foreign matter inside the light transmitting member St can be inspected.

In addition, in this image It, the link hole 160c appears bright (white). This is because the inspection object S is not inserted into the through-hole 160h. Therefore, the external shape of the inspection object S can be easily imaged by the connection hole 160c.

As described above, the holder 160 has the through-hole 160h for placing the inspection object S and the coupling hole 160c connected to the through-hole 160h. The appearance of the inspection object S positioned by the holder 160 can be photographed.

In addition, the shapes of the inner ring Shp and the outer ring Shq may be compared by the image It. For example, the concentricity of the inner ring Shp and the outer ring Shq can be measured by the image It.

Fig. 11C is a schematic diagram illustrating a manner in which the center of the outer ring Shq is determined from the image of the coupling hole 160C of the holder 160 in the image It. As shown in fig. 11C, the outer ring Shq can specify not only the boundary (inner boundary) with the light transmitting member St but also the boundary (outer boundary) with the coupling hole 160C according to the image It. Thus, the center Cq of the outer ring Shq can be determined.

Fig. 11D is a schematic diagram illustrating a manner in which the center of the inner ring is determined from the image of the inspection object. As shown in fig. 11D, the inner ring Shp can specify not only the boundary (outer boundary) with the transparent member St but also the boundary (inner boundary) with the hollow through-hole in accordance with the image It. Thus, the center Cp of the inner ring Shp can be determined.

When the inner ring Shp and the outer ring Shq are disposed at the same center, the center Cp of the inner ring Shp and the center Cq of the outer ring Shq are located at the same point. Therefore, by identifying the center Cp of the inner ring Shp and the center Cq of the outer ring Shq, the concentricity of the inner ring Shp and the outer ring Shq can be measured.

Next, the inspection method according to the present embodiment will be described with reference to fig. 11A to 12. Fig. 12 is a flowchart of the inspection method according to the present embodiment. The flowchart of fig. 12 is the same as the flowchart of fig. 5 except that the concentricity of the inner ring Shp and the outer ring Shq is measured after step S104, and redundant description is omitted for the sake of avoiding redundancy.

As shown in fig. 12, in step S102, an inspection object S is provided. The inspection object S includes an inner ring Shp, an outer ring Shq, and a light transmission member St positioned between the inner ring Shp and the outer ring Shq. For example, the inspection object S is carried into the inspection apparatus 100. Then, the inspection object S is set in the inspection apparatus 100.

In step S104, a first inspection is performed on the inspection target S. In the first inspection, the inspection target S is inspected by irradiating the light from the surface light source 130 from one of the front surface and the back surface of the inspection target S. Specifically, while the light from the surface light source 130 is irradiated from one of the front surface and the back surface of the inspection object S, the inspection device 100 inspects the inspection object S by imaging the inspection object S by the imaging unit 110.

In step S104a, the concentricity of the inspection object S is measured from the imaging results of the outer ring Shq and the inner ring Shp in step S104. The measurement of the concentricity is preferably performed by image processing of the image It. For example, concentricity may be measured by machine learning. However, the concentricity may be measured by visual observation of the operator.

In step S106, a second inspection is performed on the inspection target S. In the second inspection, the inspection target S is inspected by irradiating the inspection target S with light from the ring-shaped light source 120 from the other of the front surface and the back surface of the inspection target S. Specifically, while the light from the annular light source 120 is being emitted from the other of the front surface and the back surface of the inspection object S, the inspection device 100 inspects the inspection object S by imaging the inspection object S by the imaging unit 110.

As described above, the inspection object S can be inspected. According to the present embodiment, it is possible to inspect foreign matter inside the light transmitting member St, and also to inspect the arrangement and shape of the inner ring Shp and the outer ring Shq.

In this way, in the step of preparing the inspection target S, the inspection target S includes the inner ring Shp, the outer ring Shq, and the transparent member St positioned between the inner ring Shp and the outer ring Shq. The inspection method further includes a step of measuring the concentricity of the inspection target S from the imaging results of the outer ring Shq and the inner ring Shp in the first inspection step. This makes it possible to measure the concentricity of the inner ring Shp and the outer ring Shq of the test object S.

In the description with reference to fig. 1 to 12, the foreign matter on the first main surface Sta of the transparent member St of the inspection target S is mainly inspected by the annular light source 120 located vertically above the inspection target S, but the foreign matter on the second main surface Stb of the transparent member St of the inspection target S may be inspected by the annular light source 120 located vertically below the inspection target S. Further, the annular light source 120 of the inspection apparatus 100 may inspect both the first main surface Sta and the second main surface Stb of the transparent member St of the inspection target S for foreign matter.

Next, the inspection system 10 of the present embodiment will be described with reference to fig. 13. Fig. 13 is a schematic diagram of the inspection system 10 of the present embodiment. In fig. 13, the inspection system 10 includes a plurality of inspection apparatuses 100. The inspection system 10 of fig. 13 has the same configuration as the inspection apparatus 100 described above with reference to fig. 1 except that a plurality of inspection apparatuses 100 having the imaging unit 110, the ring-shaped light source 120, the surface light source 130, and the suppression unit 140 are provided and the positional relationships of the imaging unit 110, the ring-shaped light source 120, the surface light source 130, and the suppression unit 140 are different from each other, and redundant description is omitted to avoid redundancy.

As shown in fig. 13, the inspection system 10 includes an upper inspection device 100a, a lower inspection device 100b, and a plate 12. The plate 12 has an upper surface 12a, a lower surface 12b, and a through-hole 12h. The upper surface 12a is located vertically above (+ Z direction). The normal direction of the upper surface 12a extends in the + Z direction. The lower surface 12b is located vertically below (in the-Z direction). The normal direction of the lower surface 12b extends in the-Z direction. The through-hole 12h connects the upper surface 12a and the lower surface 12b. The inspection object S and the holder 160 are placed in the through-hole 12h. Here, the holder 160a and the holder 160b for holding the inspection object S are placed in the two through holes 12h of the plate 12.

The upper inspection apparatus 100a includes an imaging unit 110a, an annular light source 120a, a surface light source 130a, and a suppression unit 140a. The imaging unit 110a, the annular light source 120a, the surface light source 130a, and the suppressing unit 140a are integrally configured. The upper inspection apparatus 100a is mainly disposed on the upper surface 12a side of the board 12. Specifically, the imaging unit 110a and the ring-shaped light source 120a of the upper inspection apparatus 100a are disposed on the upper surface 12a side of the plate 12. The upper inspection apparatus 100a inspects the inspection object S held by the holder 160 a.

The lower inspection apparatus 100b includes an imaging unit 110b, an annular light source 120b, a surface light source 130b, and a suppressing unit 140b. The imaging unit 110b, the annular light source 120b, the surface light source 130b, and the suppressing unit 140b are integrally configured. The lower inspection apparatus 100b is mainly disposed on the lower surface 12b side of the board 12. Specifically, the imaging unit 110b and the ring-shaped light source 120b of the lower inspection apparatus 100b are disposed on the lower surface 12b side of the plate 12. The lower inspection device 100b inspects the inspection object S held by the holder 160b.

Preferably, the plate 12 is rotatable about a rotation axis. After the inspection object S is inspected in the upper inspection apparatus 100a by the rotation of the plate 12, the inspection object S can be inspected in the lower inspection apparatus 100b by rotating the plate 12. Alternatively, after the inspection of the inspection object S in the lower inspection device 100b, the inspection of the inspection object S in the upper inspection device 100a may be performed by rotating the plate 12.

In this way, the inspection system 10 includes: a plate 12 having an upper surface 12a, a lower surface 12b, and a through hole 12h for placing the inspection object S; an upper inspection apparatus 100a in which an imaging unit 110a is disposed on the upper surface 12a side of the board 12; and a lower inspection apparatus 100b in which an imaging unit 110b is disposed on the lower surface 12b side of the board 12. This enables the inspection of the inspection object S from different directions.

In the above description with reference to fig. 1 to 13, the holder 160 mainly holds one inspection object S, but the present embodiment is not limited to this. A plurality of inspection objects S may be held by the holder 160.

Next, the inspection system 10 according to the present embodiment will be described with reference to fig. 14. Fig. 14 is a schematic diagram of the inspection system 10 of the present embodiment.

As shown in fig. 14, the inspection system 10 includes a carry-in table 11a, a carry-out table 11b, a board 12, a first upper inspection device 100a1, a second upper inspection device 100a2, a first lower inspection device 100b1, and a second lower inspection device 100b2.

The plate 12 is rotatable clockwise about a rotation axis extending in the vertical direction. A holder 160 capable of holding the inspection object S is disposed on the plate 12. Here, six holders 160 are arranged on the plate 12.

Here, the holder 160 can hold two inspection objects S on the plate 12. The holder 160 is provided with a positioning portion 160p1 for positioning one of the two inspection objects S radially inward and a positioning portion 160p2 for positioning the other inspection object S radially outward.

The carry-in table 11a is positioned in the-X direction and the + Y direction with respect to the plate 12. A plurality of inspection objects S are placed on the loading table 11 a. The inspection object S placed on the carry-in table 11a is carried into the holder 160 of the board 12. For example, the inspection object S is carried from the carrying-in table 11a onto the holder 160 of the board 12 by a robot.

The carry-out table 11b is positioned in the-X direction and the-Y direction with respect to the plate 12. A plurality of test objects S are placed on the carry-out table 11b. The inspection object S placed on the holder 160 of the board 12 is carried out to the carrying-out table 11b. For example, the inspection object S is carried out from the holder 160 of the plate 12 to the carrying-out table 11b by the robot arm.

The plate 12 may be rotated. By the rotation of the plate 12, the holder 160 rotates in the circumferential direction while holding the two inspection objects S.

The first upper inspection apparatus 100a1 and the second upper inspection apparatus 100a2 are disposed on the upper surface 12a side of the board 12. The first upper inspection apparatus 100a1 inspects the inspection object S arranged radially inward of the holder 160. The second upper inspection apparatus 100a2 inspects the inspection object S arranged radially outward of the holder 160.

The first lower inspection apparatus 100b1 and the second lower inspection apparatus 100b2 are disposed on the lower surface 12b side of the board 12. The first lower inspection apparatus 100b1 inspects the inspection object S arranged radially inward of the holder 160. The second lower inspection apparatus 100b2 inspects the inspection object S arranged radially outward of the holder 160.

The first upper inspection device 100a1, the second upper inspection device 100a2, the first lower inspection device 100b1, and the second lower inspection device 100b2 are arranged in this order in the circumferential direction. Here, the second lower inspecting device 100b2 is located on the + Y direction side, the first upper inspecting device 100a1 is located on the + X direction side and the + Y direction side, the first lower inspecting device 100b1 is located on the + X direction side and the-Y direction side, and the second upper inspecting device 100a2 is located on the-Y direction side.

The plate 12 rotates with a holder 160 holding two inspection objects S placed thereon. Here, focusing on a specific holder 160, the holder 160 is moved in the order of the position near the carry-in table 11a, the position above the second lower inspection device 100b2, the position below the first upper inspection device 100a1, the position above the first lower inspection device 100b1, the position below the second upper inspection device 100a2, and the position near the carry-out table 11b by the rotation of the plate 12. Therefore, the inspection object S placed radially inward of the specific holder 160 is inspected by the first upper inspection apparatus 100a1, and thereafter, inspected by the first lower inspection apparatus 100b 1. On the other hand, the inspection object S placed radially outward of the specific holder 160 is inspected by the second lower inspection apparatus 100b2, and thereafter, is inspected by the second upper inspection apparatus 100a 2.

Next, the holder 160 in the inspection system 10 according to the present embodiment will be described with reference to fig. 15. Fig. 15 is a schematic perspective view of the holder 160 that holds the inspection target S to be inspected in the inspection system 10 according to the present embodiment.

As shown in fig. 15, the holder 160 has positioning portions 160p1 and 160p2. For example, the positioning portion 160p1 has a through-hole through which the inspection object S can be inserted, and the positioning portion 160p2 has a through-hole through which the inspection object S can be inserted. Here, the positioning portions 160p1 and 160p2 position the inspection object S having the same shape. However, the positioning portions 160p1 and 160p2 may position the inspection object S having another shape.

In the above description with reference to fig. 1 to 15, the suppression unit 140 mainly includes the light shielding plate 140p movable between the irradiation position and the retracted position, but the present embodiment is not limited to this. The suppressing unit 140 may not have the light shielding plate 140p, or may move the surface light source 130 in addition to the light shielding plate 140p.

Next, the inspection apparatus 100 according to the present embodiment will be described with reference to fig. 16. Fig. 16 is a schematic diagram of the inspection apparatus 100 according to the present embodiment. The inspection apparatus 100 shown in fig. 16 has the same configuration as the inspection apparatus 100 described above with reference to fig. 1, 3A, and 4A except that the suppression unit 140 includes the moving mechanism 140q instead of the light shielding plate 140p, and redundant description is omitted to avoid redundancy.

As shown in fig. 16, the inspection apparatus 100 includes an imaging unit 110, an annular light source 120, a surface light source 130, a suppressing unit 140, and a control device 150. Here, the suppression unit 140 includes a movement mechanism 140q capable of moving the surface light source 130.

The movement mechanism 140q is configured to be able to move the surface light source 130. For example, the moving mechanism 140q is provided with a sliding mechanism having a rail along which the surface light source 130 can slide.

The moving mechanism 140q is movable between an irradiation position at which the surface light source 130 irradiates the inspection object S and a retracted position located outside the surface light source 130 as viewed from the optical axis direction Dp of the imaging unit 110.

When the surface light source 130 irradiates light, the moving mechanism 140q moves the surface light source 130 to the irradiation position. When the surface light source 130 is located at the irradiation position, the surface light source 130 overlaps the optical axis Pa of the imaging unit 110. The surface light source 130 irradiates light to the inspection object S. In fig. 16, the surface light source 130 is located at the irradiation position. In this case, the imaging unit 110 captures an image of the inspection object S irradiated with light from the surface light source 130.

On the other hand, when the light is irradiated from the ring-shaped light source 120, the movement mechanism 140q moves the surface light source 130 to the retracted position. The retracted position is located outside the inspection object S as viewed from the optical axis direction Dp of the imaging unit 110. When the surface light source 130 is moved to the shielding position by the moving mechanism 140q, the light from the ring-shaped light source 120 can be suppressed from being incident on the surface light source 130 and reflected from the surface light source 130.

Next, the inspection apparatus 100 according to the present embodiment will be described with reference to fig. 17A and 17B. Fig. 17A is a schematic diagram of the inspection apparatus 100 according to the present embodiment. Fig. 17B is a schematic diagram of the inspection apparatus 100 according to the present embodiment.

As shown in fig. 17A, the surface light source 130 irradiates light to the inspection object S. At this time, the moving mechanism 140q moves the surface light source 130 to the irradiation position. Therefore, the surface light source 130 is located on the optical axis Pa of the imaging section 110.

The light irradiated from the surface light source 130 to the inspection object S reaches the imaging unit 110 through the through-hole 120h of the annular light source 120. The imaging unit 110 images the inspection object S irradiated with the light irradiated from the surface light source 130. In this case, the imaging unit 110 images the inspection object S through which the light emitted from the surface light source 130 passes.

As shown in fig. 17B, the ring-shaped light source 120 irradiates light to the inspection object S. The imaging unit 110 images the inspection object S irradiated with light from the ring-shaped light source 120. In this case, at this time, the movement mechanism 140q moves the surface light source 130 to the retreat position. Therefore, the surface light source 130 is located outside the inspection object S as viewed from the optical axis direction Dp of the imaging unit 110.

In the inspection apparatus 100 of the present embodiment, when the annular light source 120 irradiates the inspection object S with light, the movement mechanism 140q moves the surface light source 130 to the retracted position. Therefore, the light emitted from the ring-shaped light source 120 toward the inspection object S is suppressed from being incident on the surface light source 130 by the moving mechanism 140q.

As described above, in the inspection apparatus 100 of the present embodiment, the suppression unit 140 includes the moving mechanism 140q that moves the surface light source 140 between the irradiation position where light is irradiated to the inspection target S and the retracted position located outside the inspection target S as viewed from the optical axis direction Dp of the imaging unit 110. In this way, the light from the ring-shaped light source 120 can be suppressed from being reflected by the surface light source 130 by the movement of the surface light source 130.

The embodiments of the present invention have been described above with reference to the drawings. However, the present invention is not limited to the above embodiments, and can be implemented in various forms without departing from the scope of the invention. In addition, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above embodiments. For example, some of the components may be deleted from all the components shown in the embodiments. Moreover, the constituent elements in the different embodiments may be appropriately combined. The drawings are schematically illustrated mainly for the sake of easy understanding, and the thickness, length, number, interval, and the like of each illustrated component may be different from the actual ones in some cases. The materials, shapes, dimensions, and the like of the respective constituent elements shown in the above embodiments are examples, and are not particularly limited, and various modifications can be made within a range that does not substantially depart from the effects of the present invention.

Description of the symbols

100. Inspection apparatus

110. Image pickup unit

120. Annular light source

130. Area light source

140. A suppression section.

Claims (10)

1. An inspection device is provided with:

an imaging unit that is disposed on one side of an inspection object and that images the inspection object;

an annular light source that is disposed on one side of the inspection object and irradiates the inspection object with light;

a surface light source which is disposed on the other side of the inspection object and irradiates the inspection object with light; and

a suppressing portion that suppresses incidence of light irradiated from the annular light source to the surface light source.

2. The inspection apparatus according to claim 1,

the suppressing unit includes a light shielding plate movable between a light shielding position covering the entire emission surface of the surface light source and a retracted position located outside the surface light source as viewed in the optical axis direction of the imaging unit.

3. The inspection apparatus according to claim 1,

the suppressing unit includes a moving mechanism that moves the surface light source between an irradiation position at which the surface light source irradiates the inspection object with light and a retracted position located outside the inspection object as viewed from the optical axis direction of the imaging unit.

4. The inspection apparatus according to any one of claims 1 to 3,

the inspection device further comprises a holder provided with a positioning portion for determining the position of the inspection object.

5. The inspection apparatus according to claim 4,

the holder has a through hole for placing the inspection object and a connection hole connected to the through hole.

6. The inspection apparatus according to claim 4 or 5,

the surface light source has an exit surface from which light exits,

the positioning portion is located inside the emission surface when viewed from the optical axis direction of the imaging portion.

7. The inspection apparatus according to any one of claims 1 to 6,

the inspection apparatus further includes a light shielding cylinder that shields a part of light emitted from the annular light source toward the inspection object.

8. An inspection system is provided with:

a plate having an upper surface, a lower surface, and a through hole for placing the inspection object;

an upper inspection apparatus according to any one of claims 1 to 7, wherein the imaging unit is disposed on an upper surface side of the board; and

the inspection apparatus according to any one of claims 1 to 7, wherein the imaging unit is disposed on a lower surface side of the board.

9. An inspection method using the inspection apparatus of any one of claims 1 to 7, comprising:

providing the inspection object;

a first inspection step of inspecting the inspection object by irradiating the inspection object with light from the surface light source from one of a front surface and a back surface of the inspection object; and

and a second inspection step of irradiating the other of the front surface and the back surface of the inspection object with light from the annular light source to inspect the inspection object.

10. The inspection method according to claim 9,

in the step of preparing the inspection object, the inspection object has an inner ring, an outer ring, and a light transmitting member positioned between the inner ring and the outer ring,

the inspection method further includes a step of measuring the concentricity of the inspection target based on the imaging results of the outer ring and the inner ring in the first inspection step.

Images