CN115852342B - Diamond vapor deposition device - Google Patents
Diamond vapor deposition device Download PDFInfo
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- CN115852342B CN115852342B CN202310187355.5A CN202310187355A CN115852342B CN 115852342 B CN115852342 B CN 115852342B CN 202310187355 A CN202310187355 A CN 202310187355A CN 115852342 B CN115852342 B CN 115852342B
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- 238000007740 vapor deposition Methods 0.000 title claims abstract description 17
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 15
- 239000010432 diamond Substances 0.000 title claims abstract description 15
- 238000007789 sealing Methods 0.000 claims abstract description 97
- 238000005192 partition Methods 0.000 claims abstract description 38
- 230000008021 deposition Effects 0.000 claims abstract description 11
- 230000005540 biological transmission Effects 0.000 claims description 23
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 16
- 229910052742 iron Inorganic materials 0.000 claims description 8
- 238000000034 method Methods 0.000 abstract description 14
- 239000007789 gas Substances 0.000 description 39
- 238000000151 deposition Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000003863 physical function Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Furnace Details (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a diamond vapor deposition device which comprises a furnace body and a guide cylinder rotatably arranged at the top of the furnace body, wherein a bottom plate is fixedly connected in an inner cavity of the furnace body, a partition plate is arranged between the bottom plate and the top wall of the furnace body in a sliding manner, and the guide cylinder penetrates through the partition plate and is in threaded connection with the partition plate; the bottom plate is provided with a first exhaust hole and a second exhaust hole which penetrate through the bottom plate, a flow guide assembly is arranged between the partition plate and the flow guide cylinder, the bottom end of the bottom plate is provided with a sealing assembly matched with the flow guide assembly, and the sealing assembly can alternately seal the first exhaust hole and the second exhaust hole, so that gas passing through the flow guide assembly is alternately led out from the bottom plate; the device is matched with the sealing assembly through the flow guide assembly, so that the mixed gas can be continuously conveyed into the furnace body, and the separator is utilized, so that the gas can be uniformly mixed before being led out downwards, the uniformity of later-stage deposition is improved, and the continuity of the gas in the downwards-led-out process is good.
Description
Technical Field
The invention relates to the technical field of weather deposition, in particular to a diamond vapor deposition device.
Background
Chemical vapor deposition is a chemical technology widely used for purifying substances, developing new crystals, depositing various single crystal, polycrystal or glassy inorganic film materials, wherein the materials can be oxides, sulfides, nitrides, carbides and the like, and the physical functions of the materials can be accurately controlled through a vapor phase doping deposition process.
Chinese patent CN208617977U discloses a chemical vapor deposition device, belong to the nanomaterial manufacturing field, a chemical vapor deposition device, including the reaction tank, reaction tank lower extreme fixedly connected with bed plate, reaction tank left and right sides is equipped with microwave emitter and vacuum pump respectively, fixedly connected with support column between microwave emitter and the bed plate upper end, fixedly connected with waveguide between microwave reflector and the reaction tank left end, and waveguide is linked together with the reaction tank left end, fixedly connected with communicating pipe between vacuum pump and the reaction tank, and vacuum pump and bed plate upper end fixed connection, communicating pipe and reaction tank and vacuum pump homogeneous phase intercommunication, reaction tank inner bottom fixedly connected with reaction table, reaction table upper end fixedly connected with substrate table heater, substrate table heater upper end fixedly connected with substrate, carry out the gas distribution in advance to the reaction gas that leads to the substrate, the reaction gas can react on the substrate after the diffusion is even, effectively improve the film uniformity of substrate surface deposition.
The device mixes gas through the cooperation between gas baffle and the gas distribution board, and the in-process of use needs to constantly draw gas baffle to isolate the transportation of gas, and on the one hand the operation is comparatively loaded down with trivial details, and on the other hand also can lead to gas transportation to have discontinuous problem, therefore, the device has certain limitation when practical application.
Accordingly, there is a need to provide a diamond vapor deposition apparatus that solves the above-mentioned problems.
Disclosure of Invention
The invention aims to provide a diamond vapor deposition device, which is used for solving the problems that the prior device provided in the background art mixes gas through the cooperation between a gas baffle and a gas distribution plate, and the gas baffle is required to be pulled continuously to isolate the gas from being conveyed in the use process, so that the operation is complicated on one hand, and the gas conveying is discontinuous on the other hand.
Based on the thought, the invention provides the following technical scheme: the device comprises a furnace body and a guide cylinder rotationally arranged at the top of the furnace body, wherein a bottom plate is fixedly connected in the inner cavity of the furnace body, a baffle plate is arranged between the bottom plate and the top wall of the furnace body in a sliding manner, and the guide cylinder penetrates through the baffle plate and is in threaded connection with the baffle plate;
the bottom plate is provided with a first exhaust hole and a second exhaust hole which penetrate through the bottom plate, a flow guide assembly is arranged between the partition plate and the flow guide cylinder, the bottom end of the bottom plate is provided with a sealing assembly matched with the flow guide assembly, and the sealing assembly can alternately seal the first exhaust hole and the second exhaust hole, so that gas passing through the flow guide assembly is alternately led out from the bottom plate.
As a further scheme of the invention: the guide assembly comprises a sealing ring and a sealing cylinder which are arranged inside the guide cylinder in a sliding manner, a first through hole is formed in the sealing ring of the guide cylinder wall, a second through hole is formed in the sealing cylinder of the guide cylinder wall, a telescopic sleeve is arranged between the partition plate and the bottom plate, the bottom end of the telescopic sleeve is communicated with the second exhaust hole, the top end of the telescopic sleeve penetrates through the partition plate and is fixedly connected with the partition plate, a connecting plate is fixedly arranged on the bottom surface of the sealing cylinder, and penetrates through the bottom plate and is in sliding connection with the bottom plate, and inclined blocks are fixedly connected to the two side surfaces of the connecting plate.
As a further scheme of the invention: the sealing assembly comprises a sealing block which is arranged at the bottom of a bottom plate in a sliding manner, the top of the sealing block protrudes upwards to form a sealing table, the sealing table is in contact with the bottom plate, a plurality of vertical plates are fixedly connected to the bottom surface of the bottom plate, guide rods are fixedly connected between two adjacent vertical plates and penetrate through the sealing table and are in sliding fit with the sealing table, a first spring is connected between the sealing table and the vertical plates, a transmission rod is arranged below the sealing block, a sliding sleeve is in threaded engagement with the outer side of the transmission rod, a strip-shaped groove is formed in the bottom surface of the sealing block, protrusions which are in sliding fit with the strip-shaped groove are formed in the outer side surface of the sliding sleeve, limiting blocks are slidably arranged at the protrusions on the sliding sleeve, and limiting grooves matched with the limiting blocks are formed in the top wall of the strip-shaped groove.
As a further scheme of the invention: the utility model discloses a motor vehicle is characterized by comprising a furnace body, a driving rod, a coil spring, a reel, a bottom plate, a coil spring, a driving rod, a reel, a bottom plate and a coil spring, wherein the shaft sleeve is sleeved at two ends of the driving rod, the shaft sleeve is fixedly connected with the furnace body, the coil spring is sleeved at the outer side of the driving rod, two free ends of the coil spring are respectively fixedly connected with the outer side wall of the driving rod and the inner side wall of the shaft sleeve, the reel is fixedly sleeved at the outer side of the driving rod, a pull rope is fixedly connected with the bottom plate of the partition plate, the bottom end of the pull rope downwards penetrates through the bottom plate and is fixedly connected with the reel, and the pull rope is wound at the outer side of the reel.
As a further scheme of the invention: the sliding sleeve is characterized in that a blind hole is formed in the top surface of the sliding sleeve, the limiting block is arranged inside the blind hole in a sliding mode, a top block is slidably matched with the bottom end of the limiting block inside the blind hole, a second spring is fixedly connected between the top block and the limiting block, a sliding groove is formed in the inner wall of the blind hole, an iron block is fixedly connected to the outer side surface of the top block, the iron block is arranged inside the sliding groove in a sliding mode, and an electromagnet is arranged at the top end inside the sliding groove.
As a further scheme of the invention: the connecting plate is provided with a notch, and the transmission rod penetrates through the notch and is in sliding fit with the connecting plate.
As a further scheme of the invention: the microwave oven comprises a furnace body, and is characterized in that a microwave emitter is arranged on one side of the furnace body, a waveguide tube is connected between the microwave emitter and the furnace body, a vacuum pump is arranged on the other side of the furnace body, the vacuum pump is communicated with the furnace body through a connecting pipe, and a deposition table is arranged in the furnace body.
As a further scheme of the invention: the inner wall of the furnace body is also provided with a guide groove, and the outer side surface of the partition plate is fixedly connected with a guide block which is in sliding fit with the guide groove.
As a further scheme of the invention: the outer side of the shaft sleeve is fixedly connected with a first stop block, and telescopic rods are fixedly connected to the inner side surfaces of the connecting plate and the first stop block.
As a further scheme of the invention: and the sealing block is provided with a rope groove.
Compared with the prior art, the invention has the beneficial effects that: the first exhaust hole and the second exhaust hole which penetrate are formed in the bottom plate, the flow guide assembly is arranged between the partition plate and the flow guide cylinder, the bottom plate bottom end is provided with the sealing assembly matched with the flow guide assembly, and when the device is in actual use, the first exhaust hole and the second exhaust hole can be alternately sealed through the sealing assembly, so that gas passing through the flow guide assembly is alternately led out of the bottom plate, mixing of the gas is facilitated, the components are uniformly mixed, the deposition effect is improved, the device is matched with the sealing assembly through the flow guide assembly, the mixed gas can be continuously conveyed into the furnace body, the partition plate is utilized, the gas can be uniformly mixed before being led out downwards, the uniformity of later deposition is improved, and the continuity of the gas in the downward guiding process is good.
Drawings
The invention is further illustrated by the following examples in conjunction with the accompanying drawings:
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is an enlarged schematic view of the structure of FIG. 1A according to the present invention;
FIG. 3 is an enlarged schematic view of the structure of FIG. 1 at B in accordance with the present invention;
FIG. 4 is a schematic view of the structure of the partition and the bottom plate of the present invention;
FIG. 5 is a schematic view of the structure of the connecting plate and the inclined block of the present invention;
FIG. 6 is a schematic view of the seal ring and seal cartridge of the present invention;
FIG. 7 is an enlarged schematic view of the structure of FIG. 5 at C in accordance with the present invention;
FIG. 8 is a schematic view of the seal block structure of the present invention;
FIG. 9 is a schematic view showing a structure in which the sealing table seals the first exhaust hole according to the present invention;
FIG. 10 is a schematic view showing a structure in which the sealing table seals the second exhaust hole according to the present invention;
FIG. 11 is a schematic view showing a structure in which a sealing table of the present invention seals a first vent hole and a second vent hole;
fig. 12 is a schematic view of the structure of the sliding sleeve of the present invention.
In the figure: 1. a furnace body; 2. a transmission rod; 3. a guide block; 4. a guide cylinder; 5. a seal ring; 6. a partition plate; 7. a telescoping tube; 8. a pull rope; 9. a deflector; 10. a microwave emitter; 11. a deposition station; 12. a vacuum pump; 13. a shaft sleeve; 14. a coil spring; 15. a telescopic rod; 16. a bottom plate; 17. a sliding sleeve; 18. a notch; 19. a connecting plate; 20. a first exhaust hole; 21. a second exhaust hole; 22. a first spring; 23. a sealing block; 24. a top block; 25. a second spring; 26. iron blocks; 27. an electromagnet; 28. a limiting block; 29. a limit groove; 30. a guide rod; 31. a sloping block; 32. a sealing cylinder; 33. a sealing table; 34. rope grooves; 35. a bar-shaped groove; 36. a first through hole; 37. and a second through hole.
Detailed Description
As shown in fig. 1, a diamond vapor deposition device comprises a furnace body 1 and a guide cylinder 4 arranged at the top of the furnace body 1, wherein the guide cylinder 4 extends into the furnace body 1 and is rotationally connected with the furnace body 1, and the top end of the guide cylinder 4 can be rotationally connected with a joint through a sealed bearing, so that external gas can be conveniently led into the furnace body 1 through the guide cylinder 4.
Further, a microwave emitter 10 is disposed on one side of the furnace body 1, a waveguide is connected between the microwave emitter 10 and the furnace body 1, so that microwaves are introduced into the furnace body 1, a vacuum pump 12 is disposed on the other side of the furnace body 1, the vacuum pump 12 and the furnace body 1 are communicated through a connecting pipe, so that vacuumizing operation is conveniently performed on the interior of the furnace body 1, a deposition table 11 for reaction is disposed in the furnace body 1, of course, the structure is only a part of a vapor deposition device, the specific structure and the rest of parts are mature technical means in the vapor deposition field, and details of the structure are not described herein.
As shown in fig. 1 and 4-5, in the practical use process, for better mixing of gas to improve the effect of deposition, a bottom plate 16 is fixedly connected in an inner cavity of the furnace body 1, a partition plate 6 is arranged between the bottom plate 16 and the top wall of the furnace body 1, the partition plate 6 is in sliding fit with the furnace body 1, specifically, two ends of the guide cylinder 4 are respectively provided with an opening, the bottom end of the guide cylinder 4 is rotationally connected with the bottom plate 16, the guide cylinder 4 passes through the partition plate 6 and is in threaded connection with the partition plate 6, in addition, a guide groove is further formed in the inner wall of the furnace body 1, a guide block 3 which is in sliding fit with the guide groove is fixedly connected on the outer side surface of the partition plate 6, and the guide block 3 is limited by the guide groove, so that the sleeve can drive the partition plate 6 to move up and down relative to the bottom plate 16 in the rotating process.
The bottom plate 16 is provided with a first exhaust hole 20 and a second exhaust hole 21 which penetrate through the bottom plate, a flow guide assembly is arranged between the partition plate 6 and the flow guide cylinder 4, and the bottom end of the bottom plate 16 is provided with a sealing assembly matched with the flow guide assembly, so that the first exhaust hole 20 and the second exhaust hole 21 can be alternately sealed through the arranged sealing assembly in actual use, gas passing through the flow guide assembly is alternately led out from the bottom plate 16, mixing of the gas is facilitated, mixing of components is uniform, and the deposition effect is improved.
As shown in fig. 1-8 and 12, the above-mentioned guide assembly includes a sealing ring 5 and a sealing cylinder 32 slidably disposed in the guide cylinder 4, specifically, the sealing ring 5 is disposed above the sealing cylinder 32, and the sealing ring 5 is fixedly connected with the sealing cylinder 32 through a supporting rod, a first through hole 36 is formed in the position of the wall of the guide cylinder 4 at the sealing ring 5, a second through hole 37 is formed in the position of the wall of the guide cylinder 4 at the sealing cylinder 32, in an initial state, the sealing cylinder 32 is sunk at the bottom end of the guide cylinder 4, so that the sealing cylinder 32 corresponds to the second through hole 37, and the sealing ring 5 is disposed below the first through hole 36 and is staggered with the first through hole 36.
Further, a telescopic tube 7 is arranged between the partition plate 6 and the bottom plate 16, the bottom end of the telescopic tube 7 is fixedly connected with the bottom plate 16 and is communicated with the second exhaust hole 21, the top end of the telescopic tube 7 penetrates through the partition plate 6 and is fixedly connected with the partition plate 6, and when the partition plate 6 moves towards the top of the furnace body 1, gas between the partition plate 6 and the top wall of the furnace body 1 can be compressed and discharged to the lower side of the bottom plate 16 through the telescopic tube 7.
Further, a connecting plate 19 is fixedly arranged on the bottom surface of the sealing cylinder 32, the connecting plate 19 penetrates through the bottom plate 16 and is in sliding connection with the bottom plate 16, inclined blocks 31 are fixedly connected to two side surfaces of the connecting plate 19, the outer side surfaces of the inclined blocks 31 are inclined surfaces, and the inclined blocks 31 are arranged below the bottom plate 16.
The sealing assembly comprises a sealing block 23 which is arranged at the bottom of the bottom plate 16 in a sliding manner, the top of the sealing block 23 protrudes upwards to form a sealing table 33, the sealing table 33 is in contact with the bottom plate 16, the first exhaust hole 20 or the second exhaust hole 21 can be sealed through the sealing table 33, a plurality of vertical plates are fixedly connected to the bottom surface of the bottom plate 16, a guide rod 30 is fixedly connected between two adjacent vertical plates, the guide rod 30 penetrates through the sealing table 33 and is in sliding fit with the sealing table, a first spring 22 is connected between the sealing table 33 and the vertical plates, and the first spring 22 is sleeved on the outer side of the guide rod 30.
Further, be provided with transfer line 2 in the below of sealing block 23, transfer line 2 outside cover is equipped with sliding sleeve 17, and specifically, transfer line 2 outside is located sliding sleeve 17 department and is provided with the external screw thread for transfer line 2 and sliding sleeve 17 screw-thread fit, sealing block 23 bottom surface sets up to the cambered surface, and has seted up bar groove 35 on sealing block 23 bottom surface, outwards protrusion forms the arch on the lateral surface of sliding sleeve 17, protruding slip sets up inside this bar groove 35, can carry out spacingly to sliding sleeve 17 through the cooperation of arch with bar groove 35, avoids its rotation for transfer line 2 pivoted in-process can impel sliding sleeve 17 to remove, in addition, is located the boss department on sliding sleeve 17 and slides and be provided with stopper 28, and offered on the bar groove 35 roof with stopper 28 matched with spacing groove 29.
Still further, all overlap at the both ends of transfer line 2 and be equipped with axle sleeve 13, axle sleeve 13 and furnace body 1 fixed connection, and the outside cover of transfer line 2 is equipped with wind spring 14, two free ends of wind spring 14 respectively with transfer line 2 lateral wall and the inside wall fixed connection of axle sleeve 13, in addition, still fixed cover is equipped with the reel in the transfer line 2 outside, the bottom surface fixedly connected with stay cord 8 of baffle 6, the bottom of stay cord 8 passes bottom plate 16 downwards and with reel fixed connection, stay cord 8 twine in the reel outside and with bottom plate 16 sliding fit.
In the actual use process, the guide cylinder 4 is driven to rotate positively by the external power unit, the guide cylinder 4 can drive the baffle 6 to move upwards, the baffle 6 drives the reel and the transmission rod 2 to rotate by the pull rope 8, the transmission rod 2 is in threaded connection with the sliding sleeve 17, therefore, the sliding sleeve 17 can be driven to move towards the inclined block 31 by the rotating transmission rod 2, the sliding sleeve 17 can drive the sealing block 23 to move towards the inclined block 31 by the mutual clamping of the limiting block 28 and the limiting groove 29, the sealing table 33 and the second exhaust hole 21 are staggered, and the external thread length on the transmission rod 2 is limited, so that when the sliding sleeve 17 slides towards the inclined block 31 to the limit position, the sealing table 33 is just staggered with the second exhaust hole 21, and then the transmission rod 2 continues to rotate, but the sliding sleeve 17 is in a relatively static state, in the process, the inclined block 31 is in contact with the inclined block 31, and the inclined block 31 can drive the sealing cylinder 32 and the sealing ring 5 to move upwards by the mutual clamping of the limiting block 28 and the limiting groove 29, and the sealing table 19 can be staggered with the second exhaust hole 37 and the second exhaust hole 37 can be aligned to the second guide cylinder 4 through the second exhaust hole 37, and the second exhaust hole 37 is aligned to the second exhaust hole 16, as shown in fig. 9;
the gas between the partition plate 6 and the top wall of the furnace body 1 can be extruded along with the upward movement of the partition plate 6, so that the pressure is increased, the gas is mixed, the gas between the partition plate 6 and the top wall of the furnace body 1 is finally extruded below the bottom plate 16 through the telescopic sleeve 7, in the process, the gas in the guide cylinder 4 can be introduced between the partition plate 6 and the bottom plate 16 through the second through holes 37, and the first exhaust holes 20 are sealed by the sealing table 33, so that the gas pressure is gradually increased along with the gradual inflow of the gas between the partition plate 6 and the bottom plate 16, and the gas can be promoted to be mixed between the partition plate 6 and the bottom plate 16;
then, the guide cylinder 4 is driven to reversely rotate to drive the baffle plate 6 to downwardly move, at the moment, the driving rod 2 can be driven to reversely rotate under the action of the coil spring 14, so that the sealing block 23 is driven to move in a direction away from the inclined block 31, when the sealing block 23 moves to a limit position in a direction away from the inclined block 31, the second air outlet 21 is just sealed and is staggered with the first air outlet 20, the inclined block 31 and the connecting plate 19 simultaneously move downwards, so that the sealing cylinder 32 and the sealing ring 5 slide downwards, at the moment, the sealing cylinder 32 corresponds to and seals the second through hole 37, and the sealing ring 5 is staggered with the first through hole 36, as shown in fig. 10, therefore, when the baffle plate 6 moves downwards, gas between the baffle plate 6 and the bottom plate 16 can be discharged through the first air outlet 20, and the gas in the guide cylinder 4 can be guided between the baffle plate 6 and the top wall of the furnace body 1 through the first through hole 36 and uniformly mixed.
Furthermore, a baffle 9 may be disposed in the inner cavity of the furnace body 1 below the bottom plate 16 to allow the gas to flow downward uniformly.
In summary, this device cooperatees with seal assembly through the water conservancy diversion subassembly that sets up for the mixed gas can be continuously carried to furnace body 1 inside, and utilizes baffle 6, makes gas can mix evenly before leading out downwards, thereby improves later stage deposit's homogeneity, and the in-process continuity of gas leading out downwards is good.
As shown in fig. 3, a blind hole is formed on the top surface of the sliding sleeve 17, the limiting block 28 is slidably disposed inside the blind hole, in addition, a top block 24 is slidably fitted at the bottom end of the limiting block 28 inside the blind hole, and a second spring 25 is fixedly connected between the top block 24 and the limiting block 28.
Further, a chute is formed in the inner wall of the blind hole, an iron block 26 is fixedly connected to the outer side face of the top block 24, the iron block 26 is slidably arranged in the chute, and an electromagnet 27 is arranged at the top end of the inside of the chute.
In the actual use process, when the transmission rod 2 rotates to drive the sliding sleeve 17 to move left and right through mutual limitation of the protrusions and the strip-shaped grooves 35, thereby driving the sealing table 33 to move to carry out staggered sealing on the first air exhaust holes 20 and the second air exhaust holes 21 through cooperation between the limiting block 28 and the limiting groove 29, when gas delivery is finished and equipment is powered off, the electromagnet 27 is powered off, the limiting block 28 can be driven to slide downwards to the inside of the blind hole and be separated from the limiting groove 29 under the acting force of the second spring 25, at the moment, the sealing table 33 can be driven to reset and be arranged at the bottoms of the first air exhaust holes 20 and the second air exhaust holes 21 under the acting force of the first spring 22, and the sealing table is used for sealing the first air exhaust holes 20 and the second air exhaust holes 21, and particularly as shown in fig. 11, and gas between the bottom plate 16 and the top wall of the furnace body 1 can not overflow, so that in the process of opening the furnace body 1 is avoided, when the next time of use, the electromagnet 27 is electrified, the iron block 26 and the top block 24 are driven to move upwards, so that the limiting block 28 moves upwards, and the rotating transmission rod 2 drives the sliding sleeve 17 to move relative to the sealing block 23 and the sealing block 23, and the sealing block 23 are connected again.
As shown in fig. 1-4, a notch 18 is formed on a connecting plate 19, so that a transmission rod 2 can pass through the notch 18 and is in sliding fit with the connecting plate 19, when a sealing cylinder 32 is sunk at the bottom end of a guide cylinder 4, the transmission rod 2 is arranged at the top end position of the notch 18, a first stop block is fixedly connected to the outer side of a shaft sleeve 13, a second stop block is fixedly connected to the outer side surface of a sliding sleeve 17, telescopic rods 15 are fixedly connected to the inner side surfaces of the connecting plate 19 and the first stop block, the specific structure of the telescopic rods 15 comprises an inner sliding rod and an outer sliding rod which is arranged on the outer side of the inner sliding rod in a sliding manner, a spring is arranged in the inner cavity of the outer sliding rod, the telescopic rods 15 are common components in the mechanical field, and through the structure, when the sliding sleeve 17 moves leftwards or rightwards to a limit position to be disengaged from an external thread on the transmission rod 2, the sliding sleeve 17 can always contact with the external thread on the transmission rod 2, so that when the transmission rod 2 rotates reversely, the sliding sleeve 17 can be engaged with the transmission rod 2 again.
As shown in fig. 1, in order to drive the guide cylinder 4 to rotate, in actual use, a driven gear can be fixedly sleeved on the outer side of the guide cylinder 4, a motor is arranged at the top of the furnace body 1, a driving shaft is connected on an output shaft of the motor in a transmission manner, a driving gear meshed with the driven gear is fixedly sleeved on the outer side of the driving shaft, the guide cylinder 4 is driven to rotate through the gear transmission structure, and of course, the guide cylinder 4 can be driven to rotate through a belt transmission manner and the like.
As shown in fig. 7, a rope groove 34 is further formed on the sealing block 23 to avoid interference with the pull rope 8 during the movement process.
Claims (8)
1. The utility model provides a diamond vapor deposition device, includes furnace body and rotates the draft tube that sets up in the furnace body top, its characterized in that: a bottom plate is fixedly connected in the inner cavity of the furnace body, a baffle plate is arranged between the bottom plate and the top wall of the furnace body in a sliding manner, and the guide cylinder penetrates through the baffle plate and is in threaded connection with the baffle plate;
the bottom plate is provided with a first exhaust hole and a second exhaust hole which penetrate through the bottom plate, a flow guide assembly is arranged between the partition plate and the flow guide cylinder, the bottom end of the bottom plate is provided with a sealing assembly matched with the flow guide assembly, and the sealing assembly can alternately seal the first exhaust hole and the second exhaust hole, so that gas passing through the flow guide assembly is alternately led out from the bottom plate;
the guide assembly comprises a sealing ring and a sealing cylinder which are arranged in the guide cylinder in a sliding manner, a first through hole is formed in the position, located at the sealing ring, of the guide cylinder wall, a second through hole is formed in the position, located at the sealing cylinder, of the guide cylinder wall, a telescopic sleeve is arranged between the partition plate and the bottom plate, the bottom end of the telescopic sleeve is communicated with the second exhaust hole, the top end of the telescopic sleeve penetrates through the partition plate and is fixedly connected with the partition plate, a connecting plate is fixedly arranged on the bottom surface of the sealing cylinder, penetrates through the bottom plate and is in sliding connection with the bottom plate, and inclined blocks are fixedly connected to two side surfaces of the connecting plate;
the sealing assembly comprises a sealing block which is arranged at the bottom of a bottom plate in a sliding manner, the top of the sealing block protrudes upwards to form a sealing table, the sealing table is in contact with the bottom plate, a plurality of vertical plates are fixedly connected to the bottom surface of the bottom plate, guide rods are fixedly connected between two adjacent vertical plates and penetrate through the sealing table and are in sliding fit with the sealing table, a first spring is connected between the sealing table and the vertical plates, a transmission rod is arranged below the sealing block, a sliding sleeve is in threaded engagement with the outer side of the transmission rod, a strip-shaped groove is formed in the bottom surface of the sealing block, protrusions which are in sliding fit with the strip-shaped groove are formed in an outward protruding manner on the outer side surface of the sliding sleeve, limiting blocks are slidably arranged at the positions of the protrusions, and limiting grooves matched with the limiting blocks are formed in the top wall of the strip-shaped groove.
2. A diamond vapor deposition apparatus according to claim 1, wherein: the utility model discloses a motor vehicle is characterized by comprising a furnace body, a driving rod, a coil spring, a reel, a bottom plate, a coil spring, a driving rod, a reel, a bottom plate and a coil spring, wherein the shaft sleeve is sleeved at two ends of the driving rod, the shaft sleeve is fixedly connected with the furnace body, the coil spring is sleeved at the outer side of the driving rod, two free ends of the coil spring are respectively fixedly connected with the outer side wall of the driving rod and the inner side wall of the shaft sleeve, the reel is fixedly sleeved at the outer side of the driving rod, a pull rope is fixedly connected with the bottom plate of the partition plate, the bottom end of the pull rope downwards penetrates through the bottom plate and is fixedly connected with the reel, and the pull rope is wound at the outer side of the reel.
3. A diamond vapor deposition apparatus according to claim 2, wherein: the sliding sleeve is characterized in that a blind hole is formed in the top surface of the sliding sleeve, the limiting block is arranged inside the blind hole in a sliding mode, a top block is slidably matched with the bottom end of the limiting block inside the blind hole, a second spring is fixedly connected between the top block and the limiting block, a sliding groove is formed in the inner wall of the blind hole, an iron block is fixedly connected to the outer side surface of the top block, the iron block is arranged inside the sliding groove in a sliding mode, and an electromagnet is arranged at the top end inside the sliding groove.
4. A diamond vapor deposition apparatus according to claim 1, wherein: the connecting plate is provided with a notch, and the transmission rod penetrates through the notch and is in sliding fit with the connecting plate.
5. A diamond vapor deposition apparatus according to claim 1, wherein: the microwave oven comprises a furnace body, and is characterized in that a microwave emitter is arranged on one side of the furnace body, a waveguide tube is connected between the microwave emitter and the furnace body, a vacuum pump is arranged on the other side of the furnace body, the vacuum pump is communicated with the furnace body through a connecting pipe, and a deposition table is arranged in the furnace body.
6. A diamond vapor deposition apparatus according to claim 1, wherein: the inner wall of the furnace body is provided with a guide groove, and the outer side surface of the partition plate is fixedly connected with a guide block which is in sliding fit with the guide groove.
7. A diamond vapor deposition apparatus according to claim 2, wherein: the outer side of the shaft sleeve is fixedly connected with a first stop block, and telescopic rods are fixedly connected to the inner side surfaces of the connecting plate and the first stop block.
8. A diamond vapor deposition apparatus according to claim 1, wherein: and the sealing block is provided with a rope groove.
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| CN202310187355.5A CN115852342B (en) | 2023-03-02 | 2023-03-02 | Diamond vapor deposition device |
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| CN202310187355.5A CN115852342B (en) | 2023-03-02 | 2023-03-02 | Diamond vapor deposition device |
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| CN115852342B true CN115852342B (en) | 2023-05-02 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1206751A (en) * | 1997-06-16 | 1999-02-03 | 特利康设备有限公司 | Shower head |
| KR20150101236A (en) * | 2014-02-26 | 2015-09-03 | 전북대학교산학협력단 | Modular Chemical Vapor Deposition individually controlling supply gas |
| CN206089801U (en) * | 2016-07-26 | 2017-04-12 | 北京中科优唯科技有限公司 | Rotatory MOCVD who mixes gas in advance goes up even gas subassembly of lower wall |
| US20190309419A1 (en) * | 2018-04-06 | 2019-10-10 | Applied Materials, Inc. | High temperature gas distribution assembly |
| CN208617977U (en) * | 2018-07-20 | 2019-03-19 | 南通盛州电子科技有限公司 | A kind of chemical vapor deposition unit |
| CN111101117B (en) * | 2018-10-29 | 2022-07-22 | 北京北方华创微电子装备有限公司 | Gas homogenizing device and semiconductor processing equipment |
| CN209144261U (en) * | 2018-10-31 | 2019-07-23 | 德淮半导体有限公司 | Even device of air and semiconductor manufacturing equipment |
| CN209148620U (en) * | 2018-11-28 | 2019-07-23 | 天津维智精细化工有限公司 | A kind of air cooling equipment for gas chromatograph |
| CN112071736A (en) * | 2020-09-30 | 2020-12-11 | 无锡展硕科技有限公司 | Gas distribution device in process chamber for integrated circuit |
| CN216947188U (en) * | 2022-02-11 | 2022-07-12 | 广州市鸿浩光电半导体有限公司 | Chemical vapor deposition furnace inlet gas distribution device |
| CN115161622B (en) * | 2022-07-05 | 2023-09-05 | 徐州景澜新材料科技有限公司 | Environment-friendly plasma chemical vapor deposition equipment for diamond production |
| CN115558903A (en) * | 2022-12-05 | 2023-01-03 | 山西方维晟智能科技有限公司 | Microwave plasma diamond deposition equipment |
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Effective date of registration: 20231225 Address after: 030024 room 0518, floor 5, block C, building 1, No. 168, xikuang street, Wanbailin District, Taiyuan City, Shanxi Province Patentee after: Shanxi fangweisheng Intelligent Technology Co.,Ltd. Patentee after: Carbon equation new materials (Shanxi) Co.,Ltd. Address before: 030024 room 0518, floor 5, block C, building 1, No. 168, xikuang street, Wanbailin District, Taiyuan City, Shanxi Province Patentee before: Shanxi fangweisheng Intelligent Technology Co.,Ltd. |