CN1206751A

CN1206751A - Shower head

Info

Publication number: CN1206751A
Application number: CN 98114864
Authority: CN
Inventors: 斯蒂芬·卡特
Original assignee: Trikon Equipments Ltd
Current assignee: Trikon Equipments Ltd
Priority date: 1997-06-16
Filing date: 1998-06-16
Publication date: 1999-02-03

Abstract

This invention relates to showerheads for delivering gases to reactor chambers. The showerhead 18 comprises a casing 19, which includes a backing plate 20, first and second baffle plates 21, 22 and an outlet plate 23. Baffle plates 21 and 22 divide the volume defined by the casing 19 into plena 24, 25 and 26. A gas supply 27 feeds the plenum 24, a gas supply 28 feeds the plenum 25 and a further gas supply 29 feeds the plenum 26. The outlet plate 23 has an array of openings 30 and each of the baffle plates 21, 22 has a tube for each opening 31. The tubes and outlets together define concentric but separate outlets for the respective plena.

Description

Splash head

The present invention relates to the various splash heads that are used to deliver gas to reactor chamber.

In many technologies,, all wish two or more gases or steam are introduced a reactor chamber and spread all over this chamber more equably as plasma etching, chemical vapour deposition and the vapour deposition of plasma body enhanced etc.This is generally by reaching with a kind of device that is commonly referred to as splash head, and these devices comprise the shell of a defined volume and have an exit plate that limits many openings usually.Yet in some technology, need carry multiple gases or steam by this way,, but before they enter this chamber, not mix so that multiple gases can be transferred.This often reaches by a dividing plate, and this dividing plate passes the volume that is limited by the splash head shell and extends, thereby limits the first and second gas air compartments on its respective sides.This first air compartment is on the outlet side of dividing plate, and is limited at basically between a series of pipes, and these pipes stretch out downwards from dividing plate, so that the open communication in second air compartment (on the opposite side of dividing plate) and the exit plate.The rubber sheet gasket of a perforate is set, to seal the passage that is limited by each pipe from first air compartment between the end of exit plate and each pipe.In the place of pipe engagement rubber sheet gasket, gas can pass aligned opening in opening in this pad and the exit plate.Other opening in the pad is used for making its relevant open communication in this first air chamber and the exit plate.

This design produces many problems.At first, this pad must make progress exactly with exit plate in each hole coupling, and need certain pressure to keep sealing between exit plate and the pad.The most handy aluminium manufacturing of exit plate, because it is applicable to many technologies, but aluminium is softer, and when the size of splash head increases with the size of processed thin slice, its good sealing that more and more is hard to keep that becomes.Attempt to overcome the continuous surface that these problems have been destroyed exit plate, and be that impurity, particulate produce and the not enough potential source of processing uniformity coefficient with fastening piece.Sometimes a kind of in addition plasma physical efficiency is caught fire in the cavity of splash head and is caused pad to damage, and the activity of plasma body can react and pollutes with any iron-based fastening piece in the splash head.

The invention reside in a kind of splash head that is used for a unmixing all gases or delivery of steam to a reactor chamber, this splash head comprises the shell of a defined volume, and has an exit plate and a dividing plate that limits many openings, this dividing plate extends across this volume so that the first and second gas air compartments are limited on its corresponding both sides, this first air compartment is on the outlet side of dividing plate, and this dividing plate have the pipe that respectively stretches out that passes first air compartment with corresponding open communication, it is characterized in that these pipes put in the air compartment to be defined for the outlet around each of first air compartment with corresponding opening.

Preferably this first air compartment directly is communicated with these outlets on every side.

Splash head can also comprise the another one dividing plate, this other dividing plate is positioned on the opposite side with respect to first dividing plate of second air compartment, to limit one the 3rd air compartment with this shell or its extension, this other dividing plate has the other pipeline, they pass each corresponding pipeline extension of first group of pipeline, to form other outlets.

Preferably the area of each pipe outlet and each outlet around equates substantially, and each outlet in each group outlet can be concentric.

Should be appreciated that in fact, can limit many air compartments with many dividing plates in principle, and in each case, their pipe will run through those pipes of each central dividing plate downwards.Obviously, the number of pipe is restricted, and these admissible pipes provide the outlet of acceptable size simultaneously again.But accurate restriction will be depended on the wherein size of exit plate and opening.

Although described the present invention in detail, should be understood that it comprise These characteristics or the following describes in any creationary combination of characteristics.

The present invention can finish in various manners, and now with reference to certain embodiments of description of drawings as an example, wherein:

Fig. 1 is the synoptic diagram with plasma reactor chamber of a conventional spray head that illustrates;

Fig. 2 runs through the part sectioned view of a splash head part made in accordance with the present invention.This figure does not draw in proportion; With

Fig. 3 is for a view that dividing plate is seen from below that uses in a splash head " two gas " pattern;

Fig. 4 is the cross-sectional view that runs through plate among Fig. 3; And

Fig. 5 is the detail view of the amplification of A among Fig. 4.

The total usefulness 10 of plasma reactor chamber is represented, it comprises a chamber 11, workpiece support 12, vacuum pump outlet 13, a splash head 14, first and second

air supply sources

15 and 16 and radio frequencies (RF) power supply 17, this RF power supply is connected on the splash head 14, and this splash head 14 plays an electrode effect and is used to trigger plasma body.

Splash head 14 is basically described in the preamble of this specification sheets, and it will be transported in the chamber 11 with a kind of unmixing state by 15 and 16 gas supplied.Trigger a kind of plasma body, and on a thin slice that is bearing on the supporting member 12, carry out desirable operation.

Referring now to Fig. 2,, patent applicant's splash head is totally by 18 expressions and comprise that a shell 19, this shell 19 comprise a backboard 20, first and second dividing

plates

21 and 22 and exit plate 23.Dividing

plate

21 and 22 will be divided into

air chamber

24,25 and 26 by the volume that shell 19 is limited.An air supply source 27 injects air chamber 24; An air supply source 28 injects air chamber 25 and another air supply source 29 injection air chambers 26.

Exit plate 23 has the perforate that a row passes its panel 30, and with 31 one of them is shown.

Each all has a pipe and is used for each opening 31 in the dividing plate 21 and 22.Pass each pipe 33 from plate 22 to the whereabouts from each pipe 32 of plate 21, and each pipe all puts in opening 31 or puts in the zone of this opening 31 in these pipes, so as outer tube 33 limit one have this opening 31 around outlet 34.

The result of this configuration is corresponding

outlet

34,35 and 36 with one heart by correspondingly and be connected respectively on

air chamber

26,25 and 24.Therefore supplying to

inlet

27,28 passes panel 30 and became unmixing state to be transported in this chamber 11 before they do not introduce in the chamber 11 with 29 all gases.

Just as can be seen, dividing

plate

21 and 22 is clipped between backboard 20 and the exit plate 23 simply with O type circle 37-39.

This new design has many significant advantages.At first, it has been got rid of the needs of rubber sheet gasket and has made the difficulty of assembling, and the difficulty during described the use.Secondly, because it no longer needs to provide a kind of sealing with the sort of pad, so the flexible of this open plate 30 just no longer becomes a major issue.This design can mix two or more gases in addition, and owing to have a certain amount of dividing plate, so can form various configurations soon.So for example might change the relative dimension of

outlet

34,35 and 36 by the different dividing plates of selecting to have different pipe sizings, and if therefore pressure equate then define the flow velocity of each gas.Use various concentric pipes convenient especially, if but suitable sealing can make these pipes pass middle each dividing plate and not allow gas mix, and it will be very suitable then utilizing pipe side by side.

Fig. 3-5 illustrates a kind of actual configuration that is adapted at the dividing plate that uses in the two gas patterns of splash head.Illustrate the structure of each pipe 32 especially.

Claims

1. splash head that is used for a unmixing gas or delivery of steam to a reactor chamber, it comprises the shell of a defined volume, and has an exit plate that limits many openings, with a dividing plate, this dividing plate runs through this volume to limit the first and second gas air compartments in its respective sides, first air compartment is positioned on the outlet side of dividing plate, and this dividing plate has the pipe that stretches out and runs through first air compartment, with with corresponding open communication, this splash head is characterized in that, each pipe puts in first air compartment, with corresponding opening be defined for together first air compartment around outlet.

2. a splash head as claimed in claim 1 is characterized in that, this first air compartment and outlet on every side directly are communicated with.

3. splash head as claimed in claim 1 or 2, it is characterized in that, also comprise another dividing plate, this another dividing plate is positioned on the opposite side with respect to first dividing plate of second air compartment, to limit one the 3rd air compartment together with a shell or an one extension, this another dividing plate has other pipes, and they run through the respective tubes of first group of pipe to form other outlets.

4. any described splash head in the claim as described above is characterized in that wherein the area of each pipe outlet and outlet around is equal basically.

5. any described splash head in the claim as described above is characterized in that, each outlet in every group of outlet is concentric.