CN115847284A

CN115847284A - Automatic polishing cloth brushing device and method

Info

Publication number: CN115847284A
Application number: CN202211612447.5A
Authority: CN
Inventors: 王思远; 俞辉; 韩五静
Original assignee: Anhui Fulede Changjiang Semiconductor Material Co ltd
Current assignee: Anhui Fulede Changjiang Semiconductor Material Co ltd
Priority date: 2022-12-15
Filing date: 2022-12-15
Publication date: 2023-03-28

Abstract

The invention discloses an automatic polishing cloth brushing device and method, and relates to the technical field of polishing cloth brushing. The automatic scrubbing brush cleaning device realizes the cleaning function of the automatic scrubbing brush, can effectively improve the cleaning effect, does not bring increase of labor cost while increasing the process stability, and is suitable for popularization.

Description

Automatic polishing cloth brushing device and method

Technical Field

The invention belongs to the technical field of polishing cloth brushing, and particularly relates to an automatic polishing cloth brushing device and method.

Background

In the chemical mechanical polishing process, a certain pressure and rotation are applied to a substrate to be polished through a chemical liquid with a fixed flow rate, so that the mechanical grinding and chemical grinding effects are achieved. The polishing cloth is usually attached to the surface of a circular fixed disc, and rotates around a fixed circle center, so that the wafer is pressed and attached to the surface of the polishing cloth to rotate, the purposes of thinning the wafer and removing surface impurities and defects are achieved, and low roughness and high planarization of the surface of the wafer are achieved.

Because the polishing solution main component is nanometer silica sol granule, deposit the crystallization easily in the use, block up the porous structure of polishing cloth for the imbibition holding power of polishing cloth constantly reduces, and the sharp surperficial back of crystallization simultaneously makes polishing cloth surface smooth, loses the roughness on polishing cloth surface gradually, produces great influence to the volume of grinding. Therefore, how to maintain the roughness and stable loose porous structure of the polishing cloth during the polishing process is a factor that must be controlled during the cmp process.

The currently used methods are the following two:

1. after each batch of products are polished, an arm of an automatic cleaning water gun integrated with the device swings back and forth on the disc surface of a polishing fixed disc, the fixed disc rotates at a high rotating speed, the water gun in the arm is flushed by high-pressure pure water with the pressure of 5Mpa to 15Mpa adjustable, and the surface of the polishing cloth is cleaned within the clearance time when each batch of products are finished.

2. The single-side polishing equipment is provided with a hard disk brush with the size consistent with that of a polishing head, the disk brush needs to be manually uploaded, the polishing head descends and compresses the disk brush with higher pressure by setting a corresponding brushing program, the brush is driven to rotate, meanwhile, the fixed disks are mutually matched at higher rotating speed for disk surface cleaning, and the disk brush is manually unloaded after the cleaning is finished.

Due to the design defects of the existing process equipment, the high-pressure water gun is difficult to clean stubborn crystal stains on the deep layer of the polishing cloth, but the crystal substances are easily thrown into the deep layer of the polishing cloth through the high pressure of the water gun, so that the accumulation of crystals is caused. The bristle brush can play a role in cleaning effectively, but needs manual loading and unloading operation, so that the operation amount of personnel is increased, and the labor cost is increased.

In order to solve the problem, the automatic polishing cloth brushing device is designed to realize the cleaning function of an automatic scrubbing brush, so that the cleaning effect can be effectively improved, the process stability is improved, and meanwhile, the increase of the labor cost is avoided.

Disclosure of Invention

The invention aims to provide an automatic polishing cloth brushing device and method, which realize the cleaning function of an automatic scrubbing brush, can effectively improve the cleaning effect, increase the process stability, do not bring the increase of labor cost and are suitable for popularization.

The invention provides the following technical scheme: an automatic polishing cloth brushing device comprises a base, wherein a first mounting frame is fixedly arranged at the upper end of the base in a bolt connection mode, a control box is fixedly arranged on the outer side of the first mounting frame, a hydraulic lifting rod is installed in the first mounting frame, a telescopic column is fixedly arranged at the output end of the hydraulic lifting rod, a first clamping groove is formed in the position, located at the penetrating position of the telescopic column, of the first mounting frame, and a fixed shaft is fixedly arranged at the top end of the telescopic column; the telescopic column is fixedly provided with a second mounting frame at one side below the extension rod, the second mounting frame is fixedly provided with a first motor, and the output end of the first motor is fixedly provided with a flat gear matched with the arc frame; a rotating groove is fixedly arranged at the front end of the rotating seat, an electric telescopic rod is arranged in the rotating groove through a clamping ring, symmetrical second clamping grooves are fixedly arranged on two sides of the rotating groove of the rotating seat, an mechanical arm is fixedly arranged at the output end of the electric telescopic rod, the clamping grooves of the second clamping grooves are sleeved on the mechanical arm and are connected with the mechanical arm in a sliding manner, a bevel gear ring is fixedly arranged on the outer side wall of the electric telescopic rod, a second motor is fixedly arranged below the rotating groove through a support, and a bevel gear meshed with the bevel gear ring is fixedly arranged at the output end of the second motor; the arm is kept away from electric telescopic handle one end and is fixed to be equipped with the third mounting bracket, the fixed double-shaft motor that is equipped with of third mounting bracket, the fixed disc stereoplasm brush that is equipped with of double-shaft motor one side output shaft, the fixed grinding miller that is equipped with of double-shaft motor opposite side output shaft.

Preferably, the third mounting bracket extends to the top of wafer polishing mechanism, fixed polishing cloth that is equipped with on the wafer polishing mechanism polishing dish, the motion trail of disc stereoplasm brush and grinding miller satisfies and covers polishing cloth department, the fixed fender ring that encircles the grinding miller that is equipped with of wafer polishing mechanism, grinding miller fixedly connected with elevating system.

Preferably, the arc-shaped frame is a section of a circular ring taking the fixed shaft as a central point, the outer side of the arc-shaped frame is fixedly provided with driving insections, and the driving insections are meshed with the flat gear.

Preferably, the output end of the second motor is provided with a locking mechanism, and the locking mechanism is locked when the double-shaft motor is vertical relative to the polishing disk.

Preferably, an automatic control system is arranged in the control box, the automatic control system is controlled by an electric signal to comprise a hydraulic lifting rod, an electric telescopic rod, a first motor, a second motor and a double-shaft motor, and the control box is connected with the processing machine table through a processing digital signal.

In order to further solve the technical problem, the invention also provides an automatic polishing cloth brushing method, which comprises the following steps:

the method comprises the following steps: when the polishing cloth needs to be scrubbed, the control box sends a control signal, the hydraulic lifting rod operates, the mechanical arm is lifted up, and the grinding wheel leaves the polishing disc;

step two: the locking mechanism on the second motor is opened, the second motor runs, the helical gear rotates, the helical gear ring is driven to rotate in a tooth pattern driving mode, the electric telescopic rod, the whole mechanical arm and the third mounting frame rotate, and the locking mechanism is locked after the electric telescopic rod, the whole mechanical arm and the third mounting frame rotate for half a circle;

step three: the hydraulic lifting rod is pressed downwards until the disc hard brush is contacted with the polishing cloth, the double-shaft motor operates, and the disc hard brush rotates to scrub the polishing cloth;

step four: the arm is followed the polishing dish edge, through the operation of first motor, and drive arc frame is rotatory around the fixed axle, and arm length swings the operation for the radius, swings to the central point of polishing dish back, gets back to the polishing dish border position, and at this in-process, electric telescopic handle stretches out and draws back according to the position that the hard brush of disc cleaned to can set up the number of times of brushing back and forth as required.

Step five: after the brushing is finished, the mechanical arm and the hydraulic lifting rod return to the initial position, the third mounting frame rotates for half a circle to enable the grinding wheel to face the polishing disc, and a processing digital signal is given again to enable the processing machine platform to sense the completion of the brushing.

The invention has the beneficial effects that: realize automatic scrubbing brush's clean function, can effectively improve clean effect, when increasing process stability, can not bring the increase of human cost, specifically as follows:

(1) The automatic cleaning machine is provided with a control box, when the polishing cloth is cleaned, the control box controls the hydraulic lifting rod to lift the mechanical arm, the second motor controls the third mounting frame to overturn, the position above the polishing disc is switched into the disc hard brush, the first motor controls the mechanical arm to swing, the electric telescopic rod controls the length of the mechanical arm, the length of the mechanical arm is controlled by the radius of the mechanical arm to swing, the mechanical arm returns to the edge position of the polishing disc after swinging to the central position of the polishing disc, and the number of back-and-forth cleaning can be set according to needs, so that automatic cleaning is realized.

(2) The double-shaft motor is arranged, the grinding wheel for grinding the wafer is driven by the double-shaft motor, when the grinding wheel is used for grinding, one end of the mechanical arm for applying pressure is limited by the rotating groove, the mechanical arm is tightly connected with the first clamping groove through the second clamping groove, the first clamping groove is tightly connected with the telescopic column, the whole structure is kept stable, the grinding wheel is not prone to shaking, the double-shaft motor can drive the disc hard hairbrush and the grinding wheel, the double-shaft motor can be overturned when the disc hard hairbrush and the grinding wheel are cleaned or ground, and therefore the cleaning driving mechanism and the grinding driving mechanism are combined, and the structure is simpler.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

FIG. 1 is an overall schematic of the present invention;

FIG. 2 is a cross-sectional view of the present invention;

FIG. 3 is an enlarged view of the invention at A;

FIG. 4 is an enlarged view of the invention at B;

FIG. 5 is a flow chart of the present invention;

labeled as: 1. a base; 2. a first mounting bracket; 3. a control box; 4. a hydraulic lifting rod; 5. a first clamping groove; 6. a telescopic column; 7. a rotating base; 8. an extension rod; 9. an arc-shaped frame; 10. a second mounting bracket; 11. a first motor; 12. a fixed shaft; 13. an electric telescopic rod; 14. a second clamping groove; 15. a mechanical arm; 16. a second motor; 17. a third mounting bracket; 18. a double-shaft motor; 19. a hard disk brush; 20. a grinding wheel; 21. a wafer polishing mechanism; 22. a polishing pad; 23. polishing cloth; 24. a flat gear; 25. a rotating tank; 26. a connecting frame; 27. a helical gear; 28. driving the insection; 29. a helical gear ring; 30. a baffle ring.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention; it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by those skilled in the art without any inventive work are within the scope of the present invention.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "top/bottom", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "sleeved/connected," "connected," and the like are to be construed broadly, e.g., "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The structural features of the present invention will now be described in detail with reference to the accompanying drawings.

Referring to fig. 1-2, an automatic brushing device of polishing cloth, including base 1, base 1 upper end is with the fixed first mounting bracket 2 that is equipped with of bolted connection's mode, the fixed control box 3 that is equipped with in the 2 outsides of first mounting bracket, install hydraulic lifting rod 4 in the first mounting bracket 2, the fixed flexible post 6 that is equipped with of output of hydraulic lifting rod 4, through the flexible post 6 lift of hydraulic lifting rod 4 control, the department that runs through that first mounting bracket 2 is located flexible post 6 is equipped with first clamp groove 5, closely link to each other with flexible post 6 through first clamp groove 5, make flexible post 6 should not incline, the fixed axle 12 that is equipped with in top of flexible post 6.

Refer to fig. 1, 3, the cover is equipped with roating seat 7 on the fixed axle 12, the fixed extension rod 8 that is equipped with in rear end of roating seat 7, extension rod 8 top is through the fixed arc frame 9 that is equipped with of link 26, flexible post 6 is located the fixed second mounting bracket 10 that is equipped with in extension rod 8 below one side, the fixed first motor 11 that is equipped with of second mounting bracket 10, the fixed output of first motor 11 be equipped with the flat gear 24 of arc frame 9 assorted, it is rotatory through first motor 11 drive flat gear 24, make flat gear 24 drive arc frame 9, arc frame 9 is for using fixed axle 12 as one section of the ring of centre of circle point, the fixed drive insection 28 that is equipped with in the arc frame 9 outside, drive insection 28 and flat gear 24 mesh mutually, when arc frame 9 is rotatory around fixed axle 12, the arm 15 of the other end can swing.

Referring to fig. 2 and 4, a rotation groove 25 is fixedly arranged at the front end of the rotation base 7, an electric telescopic rod 13 is arranged in the rotation groove 25 through a clamping ring, the length of the mechanical arm 15 is adjusted through the electric telescopic rod 13, symmetrical second clamping grooves 14 are fixedly arranged at two sides of the rotation groove 25 of the rotation base 7, the rotation base is closely attached to the mechanical arm 15 through the second clamping grooves 14 to prevent the mechanical arm 15 from deviating, the mechanical arm 15 is fixedly arranged at the output end of the electric telescopic rod 13, the clamping grooves of the second clamping grooves 14 are sleeved on the mechanical arm 15 and are connected with the mechanical arm 15 in a sliding mode, a bevel gear ring 29 is fixedly arranged on the outer side wall of the electric telescopic rod 13, a second motor 16 is fixedly arranged below the rotation groove 25 through a support, a bevel gear 27 meshed with the bevel gear ring 29 is fixedly arranged at the output end of the second motor 16, the bevel gear ring 29 is driven by the bevel gear 27 to rotate, the bevel gear ring 29 vertically and reversely rotates relative to the bevel gear 27, a locking mechanism is arranged at the output end of the second motor 16, the locking mechanism is locked when the double-shaft motor 18 is vertical to the polishing disc 22, and the mechanical arm 15 is prevented from deviating when polishing and inclining.

Referring to fig. 1-2, a third mounting frame 17 is fixedly arranged at one end, away from an electric telescopic rod 13, of a mechanical arm 15, a double-shaft motor 18 is fixedly arranged on the third mounting frame 17, a disc hard brush 19 is fixedly arranged on an output shaft on one side of the double-shaft motor 18, a grinding wheel 20 is fixedly arranged on an output shaft on the other side of the double-shaft motor 18, the disc hard brush 19 is driven by the double-shaft motor 18, the grinding wheel 20 is extended to the upper side of a wafer polishing mechanism 21, a polishing cloth 23 is fixedly arranged on a polishing disc 22 of the wafer polishing mechanism 21, the movement track of the disc hard brush 19 and the movement track of the grinding wheel 20 meet the requirement of covering the polishing cloth 23, a baffle ring 30 surrounding the grinding wheel 20 is fixedly arranged on the wafer polishing mechanism 21, liquid splashing during cleaning or polishing is prevented, a lifting mechanism is fixedly connected with the grinding wheel 20, and the grinding wheel 20 is lifted up to clean the baffle ring 30.

Referring to fig. 1, an automatic control system is arranged in a control box 3, the automatic control system is controlled by an electric signal to be provided with a hydraulic lifting rod 4, an electric telescopic rod 13, a first motor 11, a second motor 16 and a double-shaft motor 18, and the control box 3 is connected with a processing machine table by a processing digital signal.

Referring to fig. 5, for further explanation, the present invention further provides an automatic polishing cloth brushing method, including the following steps:

the method comprises the following steps: when the polishing cloth needs to be scrubbed, the control box 3 sends a control signal, the hydraulic lifting rod 4 operates, the mechanical arm 15 is lifted up, and the grinding wheel 20 leaves the polishing disk 22;

step two: the locking mechanism on the second motor 16 is opened, the second motor 16 runs, the helical gear 27 rotates, the helical gear ring 29 is driven to rotate in a tooth pattern driving mode, the electric telescopic rod 13, the whole mechanical arm 15 and the third mounting rack 17 are enabled to rotate, and after the rotation is stopped for half a circle, the locking mechanism is locked;

step three: the hydraulic lifting rod 4 is pressed down until the disk hard brush 19 is contacted with the polishing cloth 23, the double-shaft motor 18 operates, and the disk hard brush 19 rotates to scrub the polishing cloth 23;

step four: the mechanical arm 15 drives the arc-shaped frame 9 to rotate around the fixed shaft 12 from the edge of the polishing disc 22 through the operation of the first motor 11, the arm length of the mechanical arm 15 is the radius to swing, the mechanical arm swings to the central position of the polishing disc 22 and then returns to the edge position of the polishing disc 22, and in the process, the electric telescopic rod 13 stretches according to the position cleaned by the disc hard brush 19 and can set the number of back-and-forth brushing times according to needs.

Step five: after the brushing is finished, the mechanical arm 15 and the hydraulic lifting rod 4 return to the initial position, the third mounting frame 17 rotates for half a circle to enable the grinding wheel 20 to face the polishing disk 22, and a processing digital signal is given again to enable the processing machine platform to sense that the brushing is finished.

The automatic polishing cloth brushing device and the automatic polishing cloth brushing method realize the cleaning function of the automatic scrubbing brush, can effectively improve the cleaning effect, increase the process stability, do not bring the increase of labor cost, and are suitable for popularization.

Specifically, referring to fig. 1-4, when polishing is performed by the polishing wheel 20, one end of the mechanical arm 15 applying pressure is limited by the rotating groove 25, and is closely connected with the mechanical arm 15 through the second clamping groove 14, the first clamping groove 5 is closely connected with the telescopic column 6, so that the whole structure is stable, the polishing wheel 20 should not shake, the double-shaft motor 18 can drive the disk hard brush 19 and the polishing wheel 20, so that the double-shaft motor 18 can be turned over when cleaning or polishing, when cleaning the polishing cloth 23, the control box 3 controls the hydraulic lifting rod 4 to lift the mechanical arm 15, the second motor 16 controls the third mounting frame 17 to turn over, so that the upper part of the polishing disk 22 is switched to the disk hard brush 19, the first motor 11 controls the swing of the mechanical arm 15, the electric telescopic rod 13 controls the length of the mechanical arm 15, the mechanical arm 15 is in a radius to swing, and after swinging to the central position of the polishing disk 22, the edge position of the polishing disk 22 is returned to the edge position of the polishing disk, and the number of back-and forth scrubbing times can be set as required to perform automatic cleaning.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The automatic polishing cloth brushing device comprises a base (1) and is characterized in that a first mounting frame (2) is fixedly arranged at the upper end of the base (1) in a bolt connection mode, a control box (3) is fixedly arranged on the outer side of the first mounting frame (2), a hydraulic lifting rod (4) is installed in the first mounting frame (2), a telescopic column (6) is fixedly arranged at the output end of the hydraulic lifting rod (4), a first clamping groove (5) is formed in the penetrating position, located on the telescopic column (6), of the first mounting frame (2), and a fixed shaft (12) is fixedly arranged at the top end of the telescopic column (6);

the rotary seat (7) is sleeved on the fixed shaft (12), an extension rod (8) is fixedly arranged at the rear end of the rotary seat (7), an arc-shaped frame (9) is fixedly arranged at the top end of the extension rod (8) through a connecting frame (26), a second mounting frame (10) is fixedly arranged on one side of the telescopic column (6) below the extension rod (8), a first motor (11) is fixedly arranged on the second mounting frame (10), and a flat gear (24) matched with the arc-shaped frame (9) is fixedly arranged at the output end of the first motor (11);

a rotating groove (25) is fixedly arranged at the front end of the rotating seat (7), an electric telescopic rod (13) is arranged in the rotating groove (25) through a clamping ring, symmetrical second clamping grooves (14) are fixedly arranged on two sides of the rotating groove (25) of the rotating seat (7), a mechanical arm (15) is fixedly arranged at the output end of the electric telescopic rod (13), the clamping grooves of the second clamping grooves (14) are sleeved on the mechanical arm (15) and are connected with the mechanical arm in a sliding manner, a bevel gear ring (29) is fixedly arranged on the outer side wall of the electric telescopic rod (13), a second motor (16) is fixedly arranged below the rotating groove (25) through a support, and a bevel gear (27) meshed with the bevel gear ring (29) is fixedly arranged at the output end of the second motor (16);

arm (15) are kept away from electric telescopic handle (13) one end and are fixed to be equipped with third mounting bracket (17), third mounting bracket (17) are fixed to be equipped with double-shaft motor (18), the fixed disc stereoplasm brush (19) that are equipped with of output shaft on one side of double-shaft motor (18), double-shaft motor (18) opposite side output shaft is fixed and is equipped with grinding miller (20).

2. The automatic scrubbing device for polishing cloth according to claim 1, wherein the third mounting rack (17) extends to above a wafer polishing mechanism (21), a polishing cloth (23) is fixedly arranged on a polishing disk (22) of the wafer polishing mechanism (21), the movement track of the disk hard brush (19) and the grinding wheel (20) satisfies the requirement of covering the polishing cloth (23), the wafer polishing mechanism (21) is fixedly provided with a retaining ring (30) surrounding the grinding wheel (20), and the grinding wheel (20) is fixedly connected with a lifting mechanism.

3. The automatic brushing device for polishing cloth according to claim 1, characterized in that the arc-shaped frame (9) is a segment of a circular ring with a fixed shaft (12) as a center point, a driving insection (28) is fixedly arranged on the outer side of the arc-shaped frame (9), and the driving insection (28) is meshed with the flat gear (24).

4. The automatic brushing device for polishing cloth according to claim 1, wherein the output end of the second motor (16) is provided with a locking mechanism, and the locking mechanism is locked when the double-shaft motor (18) is vertical relative to the polishing disk (22).

5. The automatic brushing device for the polishing cloth according to claim 1, wherein an automatic control system is arranged in the control box (3), the automatic control system is controlled by an electric signal to comprise a hydraulic lifting rod (4), an electric telescopic rod (13), a first motor (11), a second motor (16) and a double-shaft motor (18), and the control box (3) is connected with a processing machine table through a processing digital signal.

6. The automatic brushing method for polishing cloth according to claims 1 to 5, comprising the steps of:

the method comprises the following steps: when the polishing cloth needs to be brushed, the control box (3) sends a control signal, the hydraulic lifting rod (4) operates, the mechanical arm (15) is lifted up, and the grinding wheel (20) leaves the polishing disc (22);

step two: the locking mechanism on the second motor (16) is opened, the second motor (16) runs, the helical gear (27) rotates, the helical gear ring (29) is driven to rotate in a tooth pattern driving mode, the electric telescopic rod (13), the whole mechanical arm (15) and the third mounting rack (17) rotate, and the locking mechanism is locked after the rotation is stopped after half a circle;

step three: the hydraulic lifting rod (4) is pressed downwards until the disc hard brush (19) is contacted with the polishing cloth (23), the double-shaft motor (18) runs, and the disc hard brush (19) rotates to scrub the polishing cloth (23);

step four: the mechanical arm (15) drives the arc-shaped frame (9) to rotate around the fixed shaft (12) from the edge of the polishing disc (22) through the operation of the first motor (11), the arm length of the mechanical arm (15) is the radius to swing, the mechanical arm swings to the central position of the polishing disc (22) and then returns to the edge position of the polishing disc (22), and in the process, the electric telescopic rod (13) stretches according to the position cleaned by the disc hard brush (19) and can set the number of back-and-forth brushing times according to needs; 7. step five: after the brushing is finished, the mechanical arm (15) and the hydraulic lifting rod (4) return to the initial position, the third mounting frame (17) rotates for half a circle to enable the grinding wheel (20) to face the polishing disc (22), and a processing digital signal is given again to enable the processing machine platform to sense the completion of the brushing.