CN220516500U - Automatic brushing device and brushing equipment for double-sided grinding polishing pad - Google Patents
Automatic brushing device and brushing equipment for double-sided grinding polishing pad Download PDFInfo
- Publication number
- CN220516500U CN220516500U CN202322034648.8U CN202322034648U CN220516500U CN 220516500 U CN220516500 U CN 220516500U CN 202322034648 U CN202322034648 U CN 202322034648U CN 220516500 U CN220516500 U CN 220516500U
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- China
- Prior art keywords
- brushing
- double
- polishing pad
- automatic
- rotating
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- 230000001680 brushing effect Effects 0.000 title claims abstract description 94
- 238000005498 polishing Methods 0.000 title claims abstract description 51
- 238000011010 flushing procedure Methods 0.000 claims abstract description 9
- 230000001276 controlling effect Effects 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 9
- 238000005086 pumping Methods 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 230000033001 locomotion Effects 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 abstract description 18
- 230000000694 effects Effects 0.000 abstract description 10
- 238000005201 scrubbing Methods 0.000 description 13
- 239000004744 fabric Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000012876 carrier material Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model discloses an automatic brushing device and brushing equipment for a double-sided grinding polishing pad, comprising a brushing positioning frame, wherein a brushing assembly is arranged on the surface of the brushing positioning frame, a double-head rotating shaft is arranged at the tail end of the brushing positioning frame, the double-head rotating shaft comprises a rotating main body and two rotating tail ends which are in sliding connection with the rotating main body, elastic elements are arranged between the rotating main body and the rotating tail ends, the two rotating tail ends penetrate through the brushing positioning frame and are respectively fixed with the brushing assembly, a driving device is arranged on the surface of the brushing positioning frame and used for controlling the double-head rotating shaft to rotate, and flushing holes are formed at the tail ends of the brushing assembly. The utility model can clean the deep part of the polishing pad in a telescopic brushing mode, improves the cleaning effect on the deep part of the polishing pad, can realize double-sided cleaning, and improves the cleaning efficiency.
Description
Technical Field
The utility model relates to the technical field of brushing equipment, in particular to an automatic brushing device and brushing equipment for a double-sided grinding and polishing pad.
Background
The chemical mechanical polishing process is to grind the silicon wafer substrate by giving a fixed flow of chemical liquid and applying a certain pressure and a certain rotation speed at the same time, so as to achieve the result of combined action of machinery and chemistry; wherein the polishing pad is used as a carrier material of chemical liquid medicine, and is one of main influencing factors for determining polishing quality.
For the polishing pad of non-woven fabrics, the scratch sensitivity of the surface of the polishing cloth is low, the polishing cloth is easy to precipitate and crystallize in the use process, the porous structure of the polishing cloth is blocked, the liquid absorbing and containing capacity of the polishing cloth is continuously reduced, meanwhile, after the surface is crystallized and aggregated, the surface of the polishing cloth is smooth, the roughness of the surface of the polishing cloth is gradually lost, and the grinding amount is greatly influenced; dirt particles are easy to adhere to the surface of the polishing cloth, the surface dirt cannot be completely cleaned completely through the verification of the flushing effect, intractable crystal stains in the deep layer of the polishing cloth are difficult to clean through the high-pressure water gun, and on the contrary, crystal substances are easy to be pumped into the deep layer of the polishing cloth through the high pressure of the water gun, so that crystals are accumulated, and the overall cleaning effect of the polishing pad is affected.
Disclosure of Invention
The utility model aims to solve the defects in the prior art, and provides an automatic brushing device and brushing equipment for a double-sided grinding polishing pad, which can clean the deep part of the polishing pad in a telescopic brushing mode, improve the cleaning effect on the deep part of the polishing pad, realize double-sided cleaning and improve the cleaning efficiency.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
the utility model provides an automatic brushing device of two-sided lapping polishing pad, includes the scrubbing locating rack, scrubbing locating rack surface mounting has the subassembly of scrubbing, the double-end rotation axle is installed to the scrubbing locating rack end, the double-end rotation axle includes rotating body and two rotatory ends with rotating body sliding connection, be provided with elastic element between rotating body and the rotatory end, two rotatory end all runs through the scrubbing locating rack and is fixed with the subassembly of scrubbing respectively, scrubbing locating rack surface mounting has drive arrangement to be used for controlling the double-end rotation axle and rotates, the subassembly end of scrubbing is provided with the flushing hole, the double-end rotation axle is hollow structure and with flushing hole intercommunication, the scrubbing locating rack surface is provided with position accuse device and is used for controlling rotatory end and stretches out and draws back.
Preferably, the position control device comprises a rotary sealing piece sleeved on the outer side of the double-head rotary shaft, the rotary sealing piece is communicated with liquid pumping equipment through a pumping pipeline, and a flow regulating valve is arranged in the pumping pipeline.
Preferably, the rotating tail end is fixedly connected with a positioning disc, and the brushing assembly is detachably and fixedly connected with the positioning disc.
Preferably, the brushing assembly comprises a brushing plate and a plurality of raised brushing tips, the brushing apertures being disposed on the brushing tip surface.
Preferably, the brushing assembly is arranged eccentrically to the double-ended rotary shaft.
An automatic brushing device for a double-sided grinding polishing pad comprises the brushing device, a rotary joint for controlling the rotation of the brushing device and a telescopic joint for controlling the telescopic movement of the brushing device.
Compared with the prior art, the utility model has the beneficial effects that:
through setting up two-sided scrubbing subassembly can carry out synchronous cleaning to the two-sided lapping polishing pad of both sides simultaneously, can control its orderly flexible at its rotatory in-process of scrubbing simultaneously, can change the interval of scrubbing subassembly and corresponding polishing pad between, realize the high-efficient cleanness to polishing pad depths position, satisfy the clear effect of degree of depth, strengthen the clean effect to polishing pad different levels, especially depths.
Drawings
FIG. 1 is a schematic perspective view of an automatic brushing device for a double-sided polishing pad according to the present utility model;
FIG. 2 is a schematic top view of an automatic brushing device for a double-sided polishing pad according to the present utility model;
FIG. 3 is a schematic diagram showing a front view of an automatic brushing device for a double-sided polishing pad according to the present utility model;
fig. 4 is a schematic perspective view of an automatic brushing device for a double-sided polishing pad according to the present utility model.
In the figure: 100. a positioning plate; 200. a brushing assembly; 210. a brushing plate; 220. brushing the tail end; 221. flushing the hole; 300. brushing a positioning frame; 400. a driving device; 410. a first drive wheel; 420. a drive belt; 430. a second drive wheel; 500. connecting the workpieces; 600. a double-ended rotary shaft; 610. a rotating body; 620. rotating the tip; 700. a position control device; 800. a rotary joint; 900. and (5) telescoping the joint.
Detailed Description
In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit or scope of the utility model, which is therefore not limited to the specific embodiments disclosed below.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
Referring to fig. 1-3, an automatic brushing device for a double-sided lapping and polishing pad comprises a brushing positioning frame 300, wherein a brushing assembly 200 is installed on the surface of the brushing positioning frame 300, a double-sided rotating shaft 600 is installed at the tail end of the brushing positioning frame 300, the double-sided rotating shaft 600 comprises a rotating main body 610 and two rotating tail ends 620 which are in sliding connection with the rotating main body 610, elastic elements are arranged between the rotating main body 610 and the rotating tail ends 620, the elastic elements can be selected as springs, the two rotating tail ends 620 penetrate through the brushing positioning frame 300 and are respectively fixed with the brushing assembly 200, a driving device 400 is installed on the surface of the brushing positioning frame 300 and is used for controlling the rotation of the double-sided rotating shaft 600, the rotation of the brushing assemblies 200 at two sides can be simultaneously controlled through the driving device 400, the synchronous brushing of the lapping and polishing pads at two sides is realized, and an efficient cleaning process is realized.
The above-mentioned driving device 400 can select the combination of the first driving wheel 410, the second driving wheel 430 and the driving belt 420, and can realize efficient power transmission in a belt conveying manner, so as to reduce the volume occupied by the terminal arrangement and reduce the sealing requirement of the sealing performance of the terminal equipment.
Meanwhile, a flushing hole 221 is formed in the tail end of the brushing assembly 200, the double-end rotating shaft 600 is of a hollow structure and is communicated with the flushing hole 221, a position control device 700 is arranged on the surface of the brushing positioning frame 300 and used for controlling the extension and retraction of the rotating tail end 620, high-pressure cleaning liquid can be continuously pumped out through the flushing hole 221, and the cleaning liquid is directly pumped into the deep part of the cleaning pad, so that the deep cleaning of the polishing pad can be realized; meanwhile, the rotary tail end 620 can be controlled to stretch and retract through the position control device 700, the brush assembly 200 can be controlled to move towards the direction corresponding to the polishing pad in the rotary process, at the moment, the positions of different depths of the polishing pad can be cleaned, the overall cleaning effect of the polishing pad can be enhanced, and particularly the cleaning effect of the depth of the polishing pad is better, so that the cleaning effect of the polishing pad is ensured.
Referring specifically to fig. 3, the position control device 700 includes a rotary seal member sleeved on the outer side of the double-end rotary shaft 600, the rotary seal member is communicated with a liquid pumping device through a pumping pipeline, a flow regulating valve is arranged in the pumping pipeline, when the rotary end 620 needs to be controlled and the brushing assembly 200 stretches out, the opening degree of the flow regulating valve is increased at this time, the flow rate of pumped liquid can be increased, the increased pressure can overcome the elastic force of an elastic element at this time, the extrusion of the rotary main body 610 can be realized, the stretching of the rotary main body is controlled, and otherwise, the shrinkage of the rotary main body is controlled by reducing the flow rate.
The rotating tail end 620 is fixedly connected with the positioning disk 100, the brushing assembly 200 is detachably and fixedly connected with the positioning disk 100, the two are detachably and fixedly connected, the brushing assembly 200 can be conveniently replaced subsequently, meanwhile, the adaptation adjustment can be carried out according to polishing pads of different models, and different brushing requirements are met.
The brushing assembly 200 comprises a brushing plate 210 and a plurality of raised brushing tail ends 220, wherein brushing holes 221 are formed in the surfaces of the brushing tail ends 220, the brushing tail ends 220 extend out and can extend into the polishing pad, so that an efficient brushing process is ensured, and meanwhile, the brushing tail ends 220 can be arranged by selecting hollow pipelines with bent tail ends, so that the resistance in the rotating process is reduced; and brushing assembly 200 and double-end rotation axis 600 eccentric arrangement, brushing assembly 200 pivoted in-process, brushing end 220 simultaneously can install curved orbit and remove, can clean the different positions on the polishing pad horizontal direction, satisfies the cleaning performance on the different directions, further strengthens the scrubbing effect of the device.
Referring to fig. 4, an automatic brushing device for a double-sided lapping and polishing pad comprises the brushing device, a rotary joint 800 for controlling the rotation of the brushing device, and a telescopic joint 900 for controlling the telescopic motion of the brushing device, wherein the rotating end of the rotary joint 800 is detachably and fixedly connected with the brushing device through a connecting workpiece 500, and can be detached and installed according to the requirement; during brushing, the brushing device is controlled to be positioned at a preset horizontal height through the telescopic joint 900, and the brushing device is controlled to rotate between the two polishing pads through the rotary joint 800, so that continuous deep cleaning is completed.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.
Claims (6)
1. The utility model provides an automatic brushing device of two-sided lapping polishing pad, includes brushing locating rack (300), brushing locating rack (300) surface mounting has brushing subassembly (200), its characterized in that:
the utility model provides a brush locating rack (300) end-mounting has double-end rotation axis (600), double-end rotation axis (600) include rotating body (610) and two rotatory end (620) with rotating body (610) sliding connection, be provided with elastic element between rotating body (610) and rotatory end (620), two rotatory end (620) all run through brush locating rack (300) and are fixed with respectively and brush subassembly (200), brush locating rack (300) surface mounting has drive arrangement (400) to be used for controlling double-end rotation axis (600) and rotate, brush subassembly (200) end-mounting is provided with washes out hole (221), double-end rotation axis (600) be hollow structure and with wash out hole (221) intercommunication, brush locating rack (300) surface is provided with position accuse device (700) and is used for controlling rotatory end (620) and stretches out and draws back.
2. The automatic brushing device for double-sided lapping and polishing pads according to claim 1, wherein the position control device (700) comprises a rotary sealing member sleeved outside the double-sided rotating shaft (600), the rotary sealing member is communicated with a liquid pumping device through a pumping pipeline, and a flow regulating valve is arranged in the pumping pipeline.
3. The automatic brushing device for double-sided lapping and polishing pads according to claim 1, wherein the rotating end (620) is fixedly connected with a positioning disk (100), and the brushing assembly (200) is detachably and fixedly connected with the positioning disk (100).
4. The automatic double-sided lapping and polishing pad brushing apparatus of claim 1, wherein the brushing assembly (200) comprises a brushing plate (210) and a plurality of raised brushing tips (220), and the flushing holes (221) are provided on the surface of the brushing tips (220).
5. The automatic double-sided lapping and polishing pad brushing apparatus according to claim 4, wherein the brushing assembly (200) is disposed eccentrically to the double-ended rotary shaft (600).
6. An automatic brushing device for double-sided lapping and polishing pads, comprising the brushing device as claimed in any one of claims 1 to 5, and further comprising a rotary joint (800) for controlling the rotation of the brushing device and a telescopic joint (900) for controlling the telescopic movement of the brushing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322034648.8U CN220516500U (en) | 2023-07-31 | 2023-07-31 | Automatic brushing device and brushing equipment for double-sided grinding polishing pad |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322034648.8U CN220516500U (en) | 2023-07-31 | 2023-07-31 | Automatic brushing device and brushing equipment for double-sided grinding polishing pad |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220516500U true CN220516500U (en) | 2024-02-23 |
Family
ID=89922828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322034648.8U Active CN220516500U (en) | 2023-07-31 | 2023-07-31 | Automatic brushing device and brushing equipment for double-sided grinding polishing pad |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220516500U (en) |
-
2023
- 2023-07-31 CN CN202322034648.8U patent/CN220516500U/en active Active
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