CN115841978A - Leveling and focusing device and movement device - Google Patents

Abstract

The invention provides a leveling and focusing device and a moving device, wherein the leveling and focusing device comprises a first seat body, a second seat body, a third seat body, M first driving motors, a mechanical guide part, N second driving motors and N flexible guide parts, each flexible guide part comprises a flexible reed structure and a flexible decoupling structure, each flexible reed structure is used for guiding the movement of the third seat body along the Z direction, and each flexible decoupling structure is used for decoupling the poses of the second driving motors and the third seat body in the RX and RY directions. According to the scheme, vertical large position movement is achieved through the lower layer, precise small-range pose adjustment is achieved through the upper layer, so that precise adjustment operation of vertical leveling and focusing is achieved, the integral rigidity of the device can be improved, the capability of resisting horizontal upward acceleration force is resisted, and therefore the leveling and focusing device further reduces jitter errors and further improves repeated positioning precision.

Description

Leveling and focusing device and movement device

Technical Field

The invention relates to the technical field of integrated circuit manufacturing equipment, in particular to a leveling and focusing device and a moving device.

Background

The leveling and focusing device is mainly a process manufacturing equipment for aligning patterns or lines, is an indispensable moving device in the field of integrated circuit manufacturing, and the performance of the leveling and focusing device determines the realizability of the process manufacturing. In order to realize higher integrated circuit process, the repeated positioning precision of the leveling and focusing device is further improved, and the positioning error is further reduced. Therefore, how to further greatly improve the external output performance of the leveling and focusing device becomes a key subject of research in the industry.

The existing leveling and focusing device usually adopts a single-layer structural arrangement scheme, an electromagnetic motor is used for driving, a flexible reed is used for guiding, and the flexible reed is used for not only guiding in the vertical direction but also decoupling in the vertical deflection direction. Because the flexible reed has larger stroke which usually reaches several millimeters, the flexible reed has thinner thickness and longer length, so the flexible reed has weaker rigidity in the vertical direction, very low characteristic frequency and easy jitter, the stretching tension action in the horizontal direction is also low, and the flexible reed is easy to be influenced by interference force to cause larger jitter error amplitude in the horizontal direction; this greatly affects the accuracy of the repetitive positioning and the accuracy of the external output.

Disclosure of Invention

The invention provides a leveling and focusing device and a moving device, and aims to solve the problems that a leveling and focusing device in the prior art cannot further reduce jitter errors and cannot further improve repeated positioning accuracy.

In order to solve the above problems, the present invention provides a leveling and focusing apparatus, comprising: the first seat body, the second seat body and the third seat body are sequentially arranged at intervals from bottom to top; m first driving motors, wherein M is an integer greater than or equal to 1, the M first driving motors are arranged on the first seat body, and the first driving motors drive the second seat body to move along the Z direction; the mechanical guide part is respectively connected with the first seat body and the second seat body and guides the second seat body to move along the Z direction; n second driving motors, wherein N is an integer greater than or equal to 3, the N second driving motors are distributed on the second seat body, and the N second driving motors drive the third seat body to move in the directions of Z, RX and RY; the flexible guide parts are arranged in one-to-one correspondence with the N second driving motors and comprise flexible reed structures and flexible decoupling structures, two ends of each flexible decoupling structure are respectively connected with the third seat body and the corresponding second driving motor, the flexible reed structures are horizontally arranged, one ends of the flexible reed structures are connected with the flexible decoupling structures, and the other ends of the flexible reed structures are connected with the second seat body; the flexible reed structure is used for guiding the third seat body to move along the Z direction; the flexible decoupling structure is used for decoupling the poses of the second driving motor and the third seat body in the RX and RY directions.

Furthermore, the flexible reed structure comprises a first mounting block and a flexible reed, the first mounting block and the corresponding second driving motor are arranged at intervals, the first mounting block is fixed on the second base body, and one end of the flexible reed is connected with the first mounting block; the flexible decoupling structure comprises a second mounting block, a first decoupling assembly and a third mounting block which are sequentially connected from bottom to top, the second mounting block is fixedly connected with a corresponding second driving motor, and the third mounting block is fixedly connected with a third seat body; and the other end of the flexible reed is connected with the second mounting block, or the other end of the flexible reed is connected with the third mounting block.

Further, the first decoupling assembly comprises a first flexible hinge, a first decoupling piece and a second flexible hinge, wherein the second mounting block, the first decoupling piece and the third mounting block are sequentially arranged at intervals, the first flexible hinge and the second flexible hinge are arranged at intervals, vertical projections of the first flexible hinge and the second flexible hinge are crossed with each other, the lower side of the first flexible hinge is connected with the second mounting block, the upper side of the first flexible hinge is connected with the lower side of the first decoupling piece, the lower side of the second flexible hinge is connected with the upper side of the first decoupling piece, and the upper side of the second flexible hinge is connected with the third mounting block.

Furthermore, N is equal to 3,3 second driving motors are uniformly distributed in the circumferential direction of the second seat body, and 3 flexible guide parts are uniformly distributed in the circumferential direction of the second seat body; the included angle between the vertical projections of the first flexible hinge and the second flexible hinge in each first decoupling assembly is 120 degrees.

Further, the flexible guide part is of an integrally formed structure.

Further, the first drive motor and/or the second drive motor is a piezoelectric drive motor.

Furthermore, the second driving motor comprises a second stator and a second rotor, the second stator is connected with the second base, and the second rotor is connected with the flexible decoupling structure.

Furthermore, the second driving motor comprises a second rotor, a second stator and a second guide assembly, the second guide assembly comprises a second fixed part and a second sliding part which are matched with each other in a sliding manner, the second stator is connected with the second base body, the second fixed part is connected with the second stator, and the second sliding part is connected with the second rotor; the second mover is connected with the flexible decoupling structure, or the second sliding piece is connected with the flexible decoupling structure.

Further, first driving motor includes first active cell, first stator and first direction subassembly, and first direction subassembly includes first mounting and the first slider of mutual sliding fit, and first stator and first pedestal are connected, and first mounting and first stator are connected, and first slider and first active cell are connected.

Furthermore, the leveling and focusing device also comprises M decoupling parts, wherein the M decoupling parts correspond to the M first driving motors one by one; the decoupling part comprises a fourth mounting block, a second decoupling assembly and a fifth mounting block which are sequentially connected from bottom to top, the fourth mounting block is fixedly connected with the corresponding first driving motor, and the fifth mounting block is fixedly connected with the second seat body; the first rotor is connected with the fourth mounting block, or the first sliding piece is connected with the fourth mounting block.

Furthermore, the fifth mounting block comprises a cylinder and a connecting plate, the lower end of the cylinder is connected with the second decoupling assembly, the lower side of the connecting plate is connected with the upper side of the second base body, the second base body is provided with a mounting hole, and the cylinder and the second decoupling assembly penetrate into the mounting hole.

Further, the second decoupling assembly comprises a third flexible hinge, a second decoupling piece and a fourth flexible hinge, wherein the fourth mounting block, the second decoupling piece and the fifth mounting block are sequentially arranged at intervals, the third flexible hinge and the fourth flexible hinge are arranged at intervals, vertical projections of the third flexible hinge and the fourth flexible hinge are crossed, the lower side of the third flexible hinge is connected with the fourth mounting block, the upper side of the third flexible hinge is connected with the lower side of the second decoupling piece, the lower side of the fourth flexible hinge is connected with the upper side of the second decoupling piece, and the upper side of the fourth flexible hinge is connected with the fifth mounting block.

Furthermore, the number of the first driving motors and the number of the decoupling parts are three, the three first driving motors are uniformly distributed in the circumferential direction of the first seat body, and the three decoupling parts and the three first driving motors are arranged in a one-to-one correspondence manner; the included angle between the vertical projections of the third flexible hinge and the fourth flexible hinge in each decoupling part is 120 degrees.

Furthermore, the leveling and focusing device also comprises a plurality of first sensors and a plurality of second sensors, the plurality of first sensors are distributed on the first base body, the lower side of the second base body is provided with a first measuring surface, and the upper end of each first sensor is matched with the first measuring surface; the plurality of second sensors are distributed on the second seat body, the lower side of the third seat body is provided with a second measuring surface, and the upper end of each second sensor is matched with the second measuring surface; the quantity of first sensor and second sensor is the same, and a plurality of first sensors and a plurality of second sensor one-to-one set up, and the vertical central axis coincidence of the first sensor of one-to-one and second sensor.

The present invention also provides a sports apparatus comprising: the leveling and focusing device is arranged on the XY direction driving table, and the XY direction driving table can drive the leveling and focusing device to move in the X or Y direction.

By adopting the technical scheme of the invention, the leveling and focusing device is arranged into an upper layer and a lower layer, wherein a lower layer is arranged between the first seat body and the second seat body, an upper layer is arranged between the second seat body and the third seat body, the lower layer adopts a mechanical guide part for vertical guide, the stroke of the lower layer is in millimeter level and occupies the most part of the vertical stroke of the device, and the upper layer adopts a mode of combining a flexible reed structure and a flexible decoupling structure, and the stroke of the upper layer is in micron level; in the arrangement mode, the mechanical guide part has high lateral rigidity, and can effectively inhibit shaking caused by interference force in the horizontal direction; the flexible decoupling structure mainly plays a role in motion decoupling; the flexible reed structure mainly plays a role in guiding displacement in the vertical direction; compared with the prior art, the technical scheme of the invention is adopted, the stroke requirement of the flexible reed structure in the scheme is reduced, so that the flexible reed structure can be made to be thicker and shorter, the rigidity in the thickness direction and the length direction is obviously improved, the characteristic frequency is also obviously increased, and the technical scheme of the invention has obvious inhibiting effect on the amplitude of the jitter error caused by interference force in the horizontal direction. Therefore, according to the scheme, the vertical large position movement is realized through the lower layer, and the precise small-range pose adjustment is realized through the upper layer, so that the precise adjustment operation of the vertical leveling and focusing is realized, the integral rigidity of the device can be improved, the capability of resisting the horizontal upward acceleration force is improved, the jitter error of the leveling and focusing device is further reduced, and the repeated positioning precision is further improved.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic structural diagram of a leveling and focusing device provided by an embodiment of the invention;

FIG. 2 shows an exploded view of the superstructure of FIG. 1;

FIG. 3 shows a schematic view of the second drive motor of FIG. 2;

FIG. 4 shows a front view of one configuration of the flexible guide of FIG. 2;

FIG. 5 shows a cross-sectional view of the flexible decoupling structure of FIG. 2;

FIG. 6 showsbase:Sub>A cross-sectional view A-A of the flexible decoupling structure of FIG. 5;

FIG. 7 shows a B-B cross-sectional view of the flexible decoupling structure of FIG. 5;

FIG. 8 shows a front view of another configuration of the flexible guide of FIG. 2;

FIG. 9 shows a schematic layout of the flexible guide of FIG. 2;

FIG. 10 shows an exploded view of the lower structure of FIG. 1;

FIG. 11 shows a schematic view of the first drive motor of FIG. 10;

FIG. 12 is a schematic structural diagram of a leveling and focusing device according to a second embodiment of the present invention;

FIG. 13 shows an exploded view of the understructure of FIG. 12;

fig. 14 is a schematic view showing a structure of the first driving motor in fig. 13;

figure 15 shows a perspective view of the decoupling in figure 13;

fig. 16 shows a front view of the decoupling in fig. 13;

FIG. 17 shows a C-C cross-sectional view of the decoupling portion of FIG. 16;

FIG. 18 shows a D-D cross-sectional view of the decoupling portion of FIG. 16;

fig. 19 shows a schematic layout of the decoupling portion of fig. 13;

FIG. 20 is a schematic structural diagram of a leveling and focusing device provided in accordance with a third embodiment of the present invention;

FIG. 21 illustrates a front view of the leveling focus device of FIG. 20;

fig. 22 is a schematic structural diagram of a leveling and focusing device according to a fourth embodiment of the present invention.

Wherein the figures include the following reference numerals:

701. a first seat body; 702. a second seat body; 7021. a first groove; 7022. a second groove; 7023. a third groove; 703. a third seat body; 711. a first drive motor; 712. a first stator; 713. a first mover; 714. a first guide assembly; 715. a mechanical guide part; 716. a guide post; 717. a guide sleeve; 718. a decoupling section; 7181. a fifth mounting block; 7182. a fourth mounting block; 7183. a second decoupling assembly; 7184. a third flexible hinge; 7185. a second decoupling plate; 7186. a fourth flexible hinge; 7187. a cylinder; 7188. a connecting plate; 721. a second drive motor; 722. a second stator; 723. a second mover; 724. a second guide assembly; 725. a flexible guide portion; 7251. a flexible reed; 7252. a first decoupling assembly; 7253. a first flexible hinge; 7254. a first decoupling plate; 7255. a second flexible hinge; 726. a first mounting block; 727. a third mounting block; 728. a second mounting block; 21. a first measuring surface; 22. a second measuring surface; 31. a first sensor; 32. a second sensor.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It should be apparent that the described embodiments are only some embodiments of the present invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

As shown in fig. 1 to 11, a first embodiment of the present invention provides a leveling and focusing apparatus, including: the first seat body 701, the second seat body 702 and the third seat body 703 are sequentially arranged from bottom to top at intervals; the M first driving motors 711, where M is an integer greater than or equal to 1, are disposed on the first seat 701, and the first driving motors 711 drive the second seat 702 to move along the Z direction; the mechanical guide part 715 is respectively connected with the first seat body 701 and the second seat body 702, and the mechanical guide part 715 guides the second seat body 702 to move along the Z direction; the N second driving motors 721, N are integers greater than or equal to 3, the N second driving motors 721 are distributed on the second seat 702, and the N second driving motors 721 drive the third seat 703 to move in the Z, RX, RY directions; the N flexible guide portions 725 and the N second driving motors 721 are arranged in a one-to-one correspondence manner, each flexible guide portion 725 comprises a flexible reed structure and a flexible decoupling structure, two ends of each flexible decoupling structure are respectively connected with the third seat body 703 and the corresponding second driving motor 721, each flexible reed structure is horizontally arranged, one end of each flexible reed structure is connected with the corresponding flexible decoupling structure, and the other end of each flexible reed structure is connected with the second seat body 702; the flexible reed structure is used for guiding the third seat body 703 to move along the Z direction; the flexible decoupling structure is used for decoupling the poses of the second drive motor 721 and the third seat 703 in the RX and RY directions.

In the drawings, XYZ are three directions in a rectangular coordinate system, where X and Y can be understood as two directions of a horizontal plane, Z is a vertical direction (vertical direction), RX is a rotational direction around an X axis, and RY is a rotational direction around a Y axis. The attitude of the third seat 703 in the RX direction refers to the rotation angle of the third seat 703 about the X axis. The attitude of the third seat 703 in the RY direction refers to the rotation angle of the third seat 703 about the Y axis. In this embodiment, the lifting of the third seat 703 in the Z direction or the rotation in the RX and RY directions can be realized by the cooperation of the N second driving motors 721.

By adopting the technical scheme of the invention, the leveling and focusing device is arranged into an upper layer and a lower layer, wherein a lower layer is arranged between the first seat body 701 and the second seat body 702, an upper layer is arranged between the second seat body 702 and the third seat body 703, the lower layer adopts the mechanical guide part 715 for vertical guide, the Z-direction stroke of the lower layer is in millimeter level and occupies the most part of the vertical stroke of the device, and the upper layer adopts a mode of combining the flexible reed structure and the flexible decoupling structure, and the Z-direction stroke of the upper layer is in micron level; in this arrangement, the mechanical guide 715 has high lateral stiffness, and can effectively suppress the jitter caused by the disturbance force in the horizontal XY plane; the flexible decoupling structure mainly plays a role in decoupling the movement of the second driving motor 721 and the third seat 703 in the RX and RY directions (avoiding over-constraint); the flexible reed structure mainly plays a role in guiding the vertical Z displacement of the third seat body 703; compared with the prior art, the technical scheme of the invention is adopted, the stroke requirement of the flexible reed structure in the scheme is reduced, so that the flexible reed structure can be made to be thicker and shorter, the rigidity in the thickness and length directions is obviously improved, the characteristic frequency is also obviously increased, and the technical scheme of the invention has an obvious inhibiting effect on the vibration error amplitude caused by interference force in the horizontal direction. Therefore, according to the scheme, the vertical large position movement is realized through the lower layer, and the precise small-range pose adjustment is realized through the upper layer, so that the precise adjustment operation of the vertical leveling and focusing is realized, the integral rigidity of the device can be improved, the capability of resisting the acceleration force in the horizontal direction is improved, the jitter error of the leveling and focusing device is further reduced, and the repeated positioning precision is further improved.

The flexible decoupling structure is used for decoupling the poses of the second drive motor 721 and the third seat 703 in the RX and RY directions, and can be understood as follows: when the second driving motor 721 drives the third seat 703 to move along the Z direction, the third seat 703 may have a rotation angle along the RX and RY directions thereof, and is not limited by the driving direction of the second driving motor 721, that is, it is avoided that the rigid connection between the second driving motor 721 and the third seat 703 restricts the rotation of the third seat 703 on the RX and RY, wherein the second driving motor 721 moves along a single axis (single degree of freedom), and the third seat 703 moves along three axes (three degrees of freedom).

The flexible reed structure comprises a first mounting block 726 and a flexible reed 7251, the first mounting block 726 and the corresponding second driving motor 721 are arranged at intervals, the first mounting block 726 is fixed on the second base 702, and one end of the flexible reed 7251 is connected with the first mounting block 726; the flexible decoupling structure comprises a second mounting block 728, a first decoupling assembly 7252 and a third mounting block 727 which are sequentially connected from bottom to top, wherein the second mounting block 728 is fixedly connected with the corresponding second driving motor 721, and the third mounting block 727 is fixedly connected with the third seat body 703; wherein the other end of the flexible spring 7251 is connected to the second mounting block 728, as shown in figure 4. Wherein the flexible spring 7251 is arranged horizontally, i.e. in the XY plane.

In the process that the second driving motor 721 drives the third seat 703 to move along the Z direction, the length of the flexible spring 7251 is limited to a certain extent due to the influence of tensile force of the flexible spring 7251, so that the limit protection effect is exerted on the movement range of the upper layer; in addition, the flexible spring 7251 is easily deformed in the Z direction, and the deformation in the horizontal direction generates a large tensile force, which can be used as a driving force in the horizontal direction of the third housing 703 and the load mass thereof during acceleration and deceleration of the leveling and focusing device in the horizontal direction. As shown in fig. 4 to 7, the first decoupling assembly 7252 includes a first flexure hinge 7253, a first decoupling tab 7254, and a second flexure hinge 7255, wherein the second mounting block 728, the first decoupling tab 7254, and the third mounting block 727 are sequentially disposed at intervals, the first flexure hinge 7253 and the second flexure hinge 7255 are disposed at intervals, and vertical projections thereof intersect each other, a lower side of the first flexure hinge 7253 is connected to the second mounting block 728, an upper side of the first flexure hinge 7253 is connected to a lower side of the first decoupling tab 7254, a lower side of the second flexure hinge 7255 is connected to an upper side of the first decoupling tab 7254, and an upper side of the second flexure hinge 7255 is connected to the third mounting block 727. Due to the arrangement of the first flexible hinge 7253 and the second flexible hinge 7255, the second mounting block 728 and the first decoupling plate 7254 can deflect relatively, the first decoupling plate 7254 and the third mounting block 727 can deflect relatively, and the vertical projections of the first flexible hinge 7253 and the second flexible hinge 7255 cross each other, so that the deflection directions are different, and the decoupling effect can be ensured by the arrangement.

In this embodiment, all the flexible hinges may be in the form of a leaf spring, a double circular arc flexible hinge, a hyperbolic flexible hinge, a parabolic flexible hinge, an inverted parabolic flexible hinge, a secant flexible hinge, or a hyperbolic cosine flexible hinge, and the present invention does not limit the specific form thereof. In the scheme, the flexible reed 7251 is a sheet structure, and the first decoupling assembly 7252 is a pair of crossed hinge structures, wherein the sheet structure mainly plays a role in guiding displacement in the Z direction, and the pair of crossed hinge structures mainly plays a role in motion decoupling; the rigidity of the sheet structure in the length direction (located on an XY plane) is far greater than the rigidity of the sheet structure in the thickness direction (Z direction), so that the sheet structure can be used as a good guide mechanism in the thickness direction, and the sheet structure plays a good role in limiting position drift in the length direction; the rigidity of the hinge structures which are mutually crossed in the vertical direction (Z direction) is far greater than the rigidity of the hinge structures in the two deflection directions, the hinge structures play good supporting and connecting roles in the vertical direction, and are easy to deform in the two deflection directions and play a good decoupling role.

In fig. 4, the flexible spring 7251 and the first decoupling assembly 7252 in the flexible guide 725 are both in a "tandem" arrangement, that is, the arrangement of "second housing 702-first mounting block 726-flexible spring 7251-second mounting block 728-first decoupling assembly 7252-third mounting block 727-third housing 703"; it should be appreciated that second drive motor 721 and flexible reed 7251 form a "parallel" arrangement, i.e., an arrangement of "second housing 702-second drive motor 721-second mounting block 728" and "second housing 702-first mounting block 726-flexible reed 7251-second mounting block 728"; therefore, the flexible spring 7251 directly guides the displacement of the mover of the second driving motor 721, and the flexible guide portion 725 is disposed in a manner that is very important for the movement function of the upper layer.

Or as shown in fig. 8, the other end of the flexible spring 7251 is connected to the third mounting block 727. Namely, two parts of the flexible reed 7251 and the first decoupling assembly 7252 are arranged in series, and the two parts are changed into parallel arrangement, namely the arrangement of the second base body 702-the first mounting block 726-the flexible reed 7251-the third mounting block 727-the third base body 703 "and the arrangement of the second base body 702-the second driving motor 721-the second mounting block 728-the first decoupling assembly 7252-the third mounting block 727-the third base body 703". In comparison with the arrangement in fig. 4, only the arrangement of flexible reeds 7251 in flexible guide 725 is adjusted in fig. 8, so that the direct guiding action of flexible reeds 7251 on the mover of second drive motor 721 is changed to the direct guiding action on third housing 703. The benefits of this are: in the process that the second driving motor 721 drives the third seat 703 to move along the Z direction, the tension generated by stretching the flexible spring 7251 is applied to the third seat 703 more, and the second driving motor 721 is only under the action of a small part of the stretching tension under the protection of the flexible decoupling structure, so that the second driving motor 721 is protected; in addition, under the condition that 3 flexible guide parts 725 are arranged in a 120-degree circumference manner, the tensile tension of the three flexible reeds 7251 almost points to the center of the circumference, so that the force applied to the third seat body 703 can reach a balanced state, and the structural deformation caused by the force applied to the third seat body 703 is extremely small due to the large size and high rigidity of the third seat body 703, so that the movement precision of the device is also ensured.

The number of the second driving motors 721 in this embodiment is set according to actual needs. In one embodiment, N is equal to 3,3 second driving motors 721 uniformly distributed in the circumferential direction of the second housing 702, and 3 flexible guiding portions 725 are uniformly distributed in the circumferential direction of the second housing 702; as shown in fig. 9, the angle between the vertical projections of the first and second compliant hinges 7253, 7255 in each first decoupling assembly 7252 is 120 °. In fig. 9, the intersection of the vertical projections of the first and second flexible hinges 7253 and 7255 is located on the central vertical line of the mover of the corresponding second drive motor 721. For example, the three corresponding intersections of the three flexible guides 725 are a, B, and C, respectively, and A0, B0, and C0, respectively, then the connection line of A0 and B0 is the yaw axis A0B0 of the flexible guide a and the flexible guide B, the connection line of B0 and C0 is the yaw axis B0C0 of B and C, and the connection line of A0 and C0 is the yaw axis A0C0 of a and C. Thus the two flexible hinges of each flexible guide are respectively perpendicular to the two yaw axes passing through them, for example: the two flexible hinges on the flexible guide portion a are perpendicular to A0B0 and A0C0, respectively. By adopting the arrangement, the decoupling function of the flexible decoupling structure is ensured, the deflection of the hinge is directly limited by the adjacent flexible guide part 725 and the second driving motor 721, the integral structural rigidity is improved, the jitter error of the leveling and focusing device can be better reduced, and the repeated positioning precision and the external output performance are improved.

The two flexural hinges of the first decoupling assembly 7252 of the particular embodiment described above, each having its yaw axis directed toward the other adjacent flexible guide 725 and each flexible guide 725 being connected to the second drive motor 721 below; the two weakest places of the first decoupling assembly 7252 are in the deflection directions of the two flexible hinges, the two deflection directions are mainly used for decoupling the installation deviation and the vertical displacement difference, and under the free state, under the influence of interference force, the two deflection directions can generate large amplitude jitter errors; therefore, in this embodiment, the second drive motor 721 is disposed on the yaw axis of each flexible hinge, the movement tendency in the yaw direction of the flexible hinge is limited, and the magnitude of the shake error generated by the flexible hinge being affected by the disturbance force in the yaw direction is attenuated by the forcible driving of the second drive motor 721; meanwhile, the second driving motor 721 adopts a piezoelectric driving motor, which has good static holding characteristics and can further weaken the influence of interference force on the jitter error caused in the hinge deflection direction.

In this aspect, the flexible guide 725 may be provided as an integrally formed structure. In order to realize the limiting protection effect of the flexible reed 7251 on the movement range of the upper layer and the traction drive of the third seat body 703 and the load mass thereof in the horizontal acceleration and deceleration process, the flexible guide part 725 is manufactured in an integrated processing and forming mode; the mode of adopting the integral type processing, the main objective is to guarantee the continuity on the material between flexible reed 7251 and two installation pieces, avoid dispersing the function of flexible reed 7251 because of the weak junction that separately processes and reconnects and lead to, avoided reducing the result of use of flexible guide 725. In this way, tension is generated by the flexible spring pieces 7251 stretching in the longitudinal direction thereof, and the three groups of flexible spring pieces 7251 circumferentially arranged at 120 ° in the present embodiment can effectively cancel out the interference force in the horizontal direction, and the jitter amplitude of the interference force is greatly reduced by the influence of the action of the stretching tension in the longitudinal direction of the three groups of flexible spring pieces 7251. The first flexible hinge 7253 and the second flexible hinge 7255 are formed by slotting on raw materials of the flexible decoupling structure, the first flexible hinge 7253 and the second flexible hinge 7255 are distributed on two layers at intervals in the Z direction, and the flexible hinge of each layer is formed by slotting on two sides, so that the integrated processing is realized.

In the present embodiment, the first drive motor 711 and/or the second drive motor 721 are piezoelectric drive motors. Compared with the existing electromagnetic motor, the piezoelectric driving motor can keep a relatively static state after reaching a preset position, is influenced by step pitch characteristics in the executing action process, and cannot shake in a frequent servo control mode, so that the high repeated positioning precision can be achieved, and the output performance of the leveling and focusing device is greatly improved. Besides, the piezoelectric driving motor can generate certain heat in the action executing process, and extra heat can not be generated when the piezoelectric driving motor is kept in a relatively static state, so that special heat dissipation measures are not needed.

The second driving motor 721 may be configured to include a second stator 722 and a second mover 723, where the second stator 722 is connected to the second base 702, and the second mover 723 is connected to the flexible decoupling structure.

Or as shown in fig. 3, the second driving motor 721 may also be configured to include a second mover 723, a second stator 722 and a second guiding assembly 724, where the second guiding assembly 724 includes a second fixed part and a second sliding part that are slidably engaged with each other, the second stator 722 is connected to the second seat 702, the second fixed part is connected to the second stator 722, and the second sliding part is connected to the second mover 723; wherein the second runner 723 is connected with the flexible decoupling structure, or the second slider is connected with the flexible decoupling structure.

In this embodiment, the mechanical guide part 715 is vertically disposed, the mechanical guide part 715 includes a guide post 716 and a guide sleeve 717, which are slidably engaged with each other, the guide post 716 is connected to one of the first seat 701 and the second seat 702, and the guide sleeve 717 is connected to the other of the first seat 701 and the second seat 702. By adopting the arrangement, the mechanical guide part 715 has large rigidity in the horizontal direction and large moving range in the Z direction, so that stable and reliable guide effect can be realized, and the movement precision of the device is ensured.

As shown in fig. 11, in the present embodiment, the first driving motor 711 includes a first stator 712 and a first mover 713, the first stator 712 is coupled to the first housing 701, and the first mover 713 is coupled to the second housing 702.

The first driving motor 711 may be provided in one, the first driving motor 711 is located at the center of the first housing 701, and the mechanical guide 715 is one or more. Or the first driving motor 711 and the mechanical guide 715 are both provided in plurality, and the plurality of first driving motors 711 and the plurality of mechanical guide 715 are distributed on the first seat 701.

The first driving motor 711 may further be configured to include a first rotor 713, a first stator 712, and a first guide assembly 714, where the first guide assembly 714 includes a first fixing part and a first sliding part that are slidably engaged with each other, the first stator 712 is connected to the first base 701, the first fixing part is connected to the first stator 712, and the first sliding part is connected to the first rotor 713. By providing the first guide assembly 714, the efficiency of offline assembly and commissioning of the first drive motor 711 is improved, and subsequent disassembly, replacement, and maintenance operations are facilitated.

As shown in fig. 12 to 19, in the second embodiment of the present invention, on the basis of the above embodiments, the leveling and focusing device further includes M decoupling portions 718, where the M decoupling portions 718 correspond to the M first driving motors 711 one by one; the decoupling part 718 includes a fourth mounting block 7182, a second decoupling assembly 7183 and a fifth mounting block 7181 which are connected in sequence from bottom to top, the fourth mounting block 7182 is fixedly connected with a corresponding first driving motor 711, and the fifth mounting block 7181 is fixedly connected with the second seat 702; wherein the first mover 713 is coupled to the fourth mounting block 7182 or the first slider is coupled to the fourth mounting block 7182. By providing the decoupling portion 718, overconstraint of the first guide assembly 714 and the mechanical guide portion 715 can be decoupled, avoiding affecting device motion due to overconstraint. The M decoupling portions 718 are distributed in the lower layer of the device and mainly function to decouple the over-constraint problem generated between the first guide assembly 714 and the mechanical guide portion 715 in the first driving motor 711.

In this embodiment, the provision of the first guide assembly 714 improves the convenience of use of the first drive motor 711; however, in the case that the plurality of first driving motors 711 and the plurality of mechanical guide portions 715 are arranged simultaneously, for example, the first guide assemblies 714 of the three first driving motors 711 and the three mechanical guide portions 715 are directly connected to the first seat 701 and the second seat 702 simultaneously, that is, six guides are simultaneously arranged between the second seat 702 and the first seat 701 in the Z direction, so that an over-constraint problem is caused, and the first driving motors 711 are locked during movement; therefore, the three decoupling portions 718 are arranged correspondingly to achieve a good decoupling effect, so that the high rigidity of the mechanical guide portion 715 is utilized, and the working performance of the first driving motor 711 is guaranteed.

Compared with the first embodiment, the first guide assembly 714 and the decoupling portion 718 are arranged in the first embodiment, and the first driving motor 711 can be integrated into the device after being installed and adjusted, so that the overall size of the leveling and focusing device in the first embodiment can be small, and the clamping operation space of the first driving motor 711, which needs to be reserved in the first embodiment, is omitted. In addition, when the decoupling portion 718 of the present embodiment is subjected to a vertical impact force, it may slightly deform itself, so as to perform a vertical buffering function, thereby protecting the normal operation safety of the first driving motor 711 to a certain extent.

The fifth mounting block 7181 includes a cylinder 7187 and a connecting plate 7188, the lower end of the cylinder 7187 is connected to the second decoupling assembly 7183, the lower side of the connecting plate 7188 is connected to the upper side of the second housing 702, the second housing 702 has a mounting hole, and the cylinder 7187 and the second decoupling assembly 7183 penetrate into the mounting hole. As can be seen from fig. 13, the second housing 702 is provided with a mounting hole along the Z direction, the fourth mounting block 7182 and the second decoupling assembly 7183 of the decoupling portion 718 are partially perforated, the lower surface of the fifth mounting block 7181 is attached to and connected with the upper surface of the second housing 702, and the lower surface of the fourth mounting block 7182 is attached to and connected with the upper surface of the first mover 713; the second decoupling assembly 7183 is located between the two mounting block positions and decouples mounting and kinematic misalignment. And by adopting the arrangement, the leveling and focusing device has a compact structure.

As shown in fig. 15 to 18, the second decoupling assembly 7183 includes a third flexible hinge 7184, a second decoupling sheet 7185 and a fourth flexible hinge 7186, wherein the fourth mounting block 7182, the second decoupling sheet 7185 and the fifth mounting block 7181 are sequentially arranged at intervals, the third flexible hinge 7184 and the fourth flexible hinge 7186 are arranged at intervals, vertical projections of the third flexible hinge 7184 and the fourth flexible hinge 7186 are mutually crossed, a lower side of the third flexible hinge 7184 is connected with the fourth mounting block 7182, an upper side of the third flexible hinge 7184 is connected with a lower side of the second decoupling sheet 7185, a lower side of the fourth flexible hinge 7186 is connected with an upper side of the second decoupling sheet 7185, and an upper side of the fourth flexible hinge 7186 is connected with the fifth mounting block 7181.

Due to the arrangement of the third flexible hinge 7184 and the fourth flexible hinge 7186, the second decoupling sheet 7185 and the fifth mounting block 7181 can deflect relatively, the second decoupling sheet 7185 and the fourth mounting block 7182 can deflect relatively, vertical projections of the third flexible hinge 7184 and the fourth flexible hinge 7186 are intersected with each other, deflection directions are different, and a decoupling effect can be guaranteed through the arrangement.

As shown in fig. 15 to 19, a counter bore is provided in the decoupling portion 718, and the counter bore is used for penetrating a screw so as to fixedly connect the decoupling portion 718 and the corresponding first driving motor 711 by the screw. A counterbore extends through the decoupling portion 718 in the Z-direction, the counterbore including a large hole and a small hole arranged in a step. In fig. 17 and 18, two concentric circles in the middle region are respectively large holes and small holes, and the large holes are shown in the middle region in fig. 19, and the small holes are omitted.

As shown in fig. 19, in a specific embodiment, there are three first driving motors 711 and three decoupling portions 718, the three first driving motors 711 are uniformly distributed in the circumferential direction of the first seat 701, and the three decoupling portions 718 and the three first driving motors 711 are arranged in a one-to-one correspondence; the angle between the vertical projections of the third flexible hinge 7184 and the fourth flexible hinge 7186 in each decoupling portion 718 is 120 °. In fig. 19, the intersection of the vertical projections of the third flexible hinge 7184 and the fourth flexible hinge 7186 is located on the central vertical line of the mover of the corresponding first driving motor 711. For example, the three corresponding intersections of the three decoupling portions 718 are D0, E0, and F0, and the connecting line of D0 and E0 is the yaw axis D0E0 of the decoupling portion D and the decoupling portion E, the connecting line of E0 and F0 is the yaw axis E0F0 of E and F, and the connecting line of D0 and F0 is the yaw axis D0F0 of D and F. Thus the two flexible hinges of each decoupling portion are respectively perpendicular to the two yaw axes passing through them, for example: the two flexible hinges on the decoupling portion D are perpendicular to D0E0 and D0F0, respectively. By adopting the arrangement, the decoupling function of the second decoupling assembly 7183 is ensured, the deflection of the flexible hinge is directly limited by the adjacent decoupling part 718 and the first driving motor 711, the integral structural rigidity of the device is improved, and the problem of over-constraint of the first guide assembly 714 and the mechanical guide part 715 can be better solved.

The decoupling portion 718 in this embodiment may also be provided as an integrally formed structure with reference to the flexible guide portion 725.

As shown in fig. 20 and 21, in the third embodiment of the present invention, the leveling and focusing device further includes a plurality of first sensors 31 and a plurality of second sensors 32, the plurality of first sensors 31 are distributed on the first base 701, the lower side of the second base 702 has a first measuring surface 21, and the upper end of each first sensor 31 is matched with the first measuring surface 21; the plurality of second sensors 32 are distributed on the second seat 702, the lower side of the third seat 703 is provided with a second measuring surface 22, and the upper end of each second sensor 32 is matched with the second measuring surface 22; the plurality of first sensors 31 mainly measure the distance between the second holder 702 and the first holder 701, and the three second sensors 32 mainly measure the distance and the attitude between the third holder 703 and the second holder 702. And the data measured by the sensor is transmitted to the control system, and the distance and the posture of the seat body are calculated by the control system.

The number of the first sensors 31 and the number of the second sensors 32 are the same, the plurality of first sensors 31 and the plurality of second sensors 32 are arranged in a one-to-one correspondence manner, and the vertical central axes of the one-to-one correspondence first sensors 31 and the one-to-one correspondence second sensors 32 are overlapped. The advantage of this kind of arrangement is that the position and attitude operation matrix of control system is based on the measurement data of same point and calculates, and the computational process becomes simple, and the precision that the structure atress flexural deformation probably brought is eliminated by the way and is disturbed the problem.

A plurality of components in the leveling and focusing device are arranged as required. For example, as shown in fig. 22, in the fourth embodiment, the first driving motor 711 and the mechanical guide 715 are both multiple, and the multiple first driving motors 711, the multiple mechanical guide 715, the N second driving motors 721 and the multiple first sensors 31 are distributed along the circumferential direction of the second seat 702; a mechanical guide 715 or a first sensor 31 is disposed between the adjacent first driving motor 711 and second driving motor 721.

Moreover, the first seat 701, the second seat 702, and the third seat 703 are all plate-shaped structures, the lower side of the second seat 702 has a first groove 7021 and a second groove 7022, a portion of the first driving motor 711 is located in the first groove 7021, a portion of the mechanical guide 715 is located in the second groove 7022, the upper side of the second seat 702 has a third groove 7023, and a portion of the second driving motor 721 is located in the third groove 7023.

In this embodiment, the mechanical guides 715 are disposed at positions outside the second housing 702, and each mechanical guide 715 is located between the positions of the adjacent first and second driving motors 711 and 721, so as to free the inner space of the leveling focus device, thereby forming a separate cavity area in the inner middle portion of the leveling focus device, which can be used for installing other required structures. In this embodiment, on the second seat 702, when viewed from the Z direction, the plurality of first driving motors 711, the plurality of mechanical guide portions 715, the N second driving motors 721 and the plurality of first sensors 31 are substantially distributed along the circumference, and an included angle of 30 ° is formed between two adjacent driving motors; the arrangement mode is compact, and is suitable for occasions with more structural space size limiting factors, especially the occasions with limited external space expansion size and internal space requiring the use working condition of the prepared cavity.

An embodiment of the invention, which is not shown in the figures, provides a moving device, which comprises the leveling and focusing device and an XY direction driving table, wherein the leveling and focusing device is arranged on the XY direction driving table, and the XY direction driving table can drive the leveling and focusing device to move in the X or Y direction. The XY-direction driving stage may use a driving device commonly used in the art, for example, a combination of a mechanical guide rail and an X-direction motor, a combination of an air-floating guide rail or a magnetic-floating guide rail and an X-direction motor, a Y-direction motor, an electromagnetic motor or a piezoelectric motor, and the like.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (15)

1. A leveling and focusing apparatus, comprising:

the first seat body (701), the second seat body (702) and the third seat body (703) are arranged at intervals from bottom to top in sequence;

m first driving motors (711), wherein M is an integer greater than or equal to 1, the M first driving motors (711) are arranged on the first seat body (701), and the first driving motors (711) drive the second seat body (702) to move along the Z direction;

the mechanical guide parts (715) are respectively connected with the first seat body (701) and the second seat body (702), and the mechanical guide parts (715) guide the second seat body (702) to move along the Z direction;

the N second driving motors (721), N is an integer greater than or equal to 3, the N second driving motors (721) are distributed on the second seat body (702), and the N second driving motors (721) drive the third seat body (703) to move in the directions of Z, RX and RY;

the N flexible guide parts (725) and the N second driving motors (721) are arranged in a one-to-one correspondence mode, each flexible guide part (725) comprises a flexible reed structure and a flexible decoupling structure, two ends of each flexible decoupling structure are respectively connected with the third seat body (703) and the corresponding second driving motor (721), each flexible reed structure is horizontally arranged, one end of each flexible reed structure is connected with the corresponding flexible decoupling structure, and the other end of each flexible reed structure is connected with the corresponding second seat body (702); the flexible reed structure is used for guiding the third seat body (703) to move along the Z direction; the flexible decoupling structure is used for decoupling the poses of the second driving motor (721) and the third seat body (703) in the RX and RY directions.

2. The leveling focusing device of claim 1,

the flexible reed structure comprises a first mounting block (726) and a flexible reed (7251), the first mounting block (726) and the corresponding second driving motor (721) are arranged at intervals, the first mounting block (726) is fixed on the second base (702), and one end of the flexible reed (7251) is connected with the first mounting block (726);

the flexible decoupling structure comprises a second mounting block (728), a first decoupling assembly (7252) and a third mounting block (727) which are sequentially connected from bottom to top, wherein the second mounting block (728) is fixedly connected with the corresponding second driving motor (721), and the third mounting block (727) is fixedly connected with the third base body (703);

wherein the other end of the flexible reed (7251) is connected with the second mounting block (728), or the other end of the flexible reed (7251) is connected with the third mounting block (727).

3. The leveling and focusing device according to claim 2, wherein the first decoupling assembly (7252) comprises a first flexure hinge (7253), a first decoupling sheet (7254) and a second flexure hinge (7255), wherein the second mounting block (728), the first decoupling sheet (7254) and the third mounting block (727) are sequentially arranged at intervals, the first flexure hinge (7253) and the second flexure hinge (7255) are arranged at intervals, and vertical projections of the first flexure hinge (7253) and the second flexure hinge (7255) cross each other, a lower side of the first flexure hinge (7253) is connected with the second mounting block (728), an upper side of the first flexure hinge (7253) is connected with a lower side of the first decoupling sheet (7254), a lower side of the second flexure hinge (7255) is connected with an upper side of the first decoupling sheet (7254), and an upper side of the second flexure hinge (7255) is connected with the third mounting block (727).

4. The leveling and focusing device according to claim 3, wherein N is equal to 3,3 of the second driving motors (721) uniformly distributed in the circumferential direction of the second base (702), and 3 of the flexible guides (725) are uniformly distributed in the circumferential direction of the second base (702); the angle between the vertical projections of the first flexible hinge (7253) and the second flexible hinge (7255) in each first decoupling assembly (7252) is 120 deg..

5. The apparatus of claim 3, wherein the flexible guide (725) is of unitary construction.

6. The leveling focusing device according to claim 1, wherein the first drive motor (711) and/or the second drive motor (721) is a piezoelectric drive motor.

7. The leveling and focusing device according to claim 1, wherein the second driving motor (721) comprises a second stator (722) and a second runner (723), the second stator (722) is connected with the second base (702), and the second runner (723) is connected with the flexible decoupling structure.

8. The leveling and focusing device according to claim 1, wherein the second driving motor (721) comprises a second mover (723), a second stator (722) and a second guiding assembly (724), the second guiding assembly (724) comprises a second fixed part and a second sliding part which are slidably engaged with each other, the second stator (722) is connected with the second base (702), the second fixed part is connected with the second stator (722), and the second sliding part is connected with the second mover (723); wherein the second runner (723) is connected with the flexible decoupling structure or the second slider is connected with the flexible decoupling structure.

9. The leveling and focusing device according to claim 1, wherein the first driving motor (711) comprises a first rotor (713), a first stator (712) and a first guiding assembly (714), the first guiding assembly (714) comprises a first fixing part and a first sliding part which are slidably engaged with each other, the first stator (712) is connected with the first base body (701), the first fixing part is connected with the first stator (712), and the first sliding part is connected with the first rotor (713).

10. The apparatus of claim 9, further comprising M decoupling portions (718), wherein M decoupling portions (718) correspond one-to-one to M first driving motors (711); the decoupling portion (718) comprises a fourth mounting block (7182), a second decoupling assembly (7183) and a fifth mounting block (7181) which are sequentially connected from bottom to top, the fourth mounting block (7182) is fixedly connected with the corresponding first driving motor (711), and the fifth mounting block (7181) is fixedly connected with the second seat body (702); wherein the first mover (713) and the fourth mounting block (7182) are connected, or the first slider and the fourth mounting block (7182) are connected.

11. The leveling and focusing device according to claim 10, wherein the fifth mounting block (7181) comprises a cylinder (7187) and a connecting plate (7188), the lower end of the cylinder (7187) is connected with the second decoupling assembly (7183), the lower side of the connecting plate (7188) is connected with the upper side of the second housing (702), the second housing (702) has a mounting hole, and the cylinder (7187) and the second decoupling assembly (7183) penetrate into the mounting hole.

12. The leveling and focusing device according to claim 10, wherein the second decoupling assembly (7183) comprises a third flexible hinge (7184), a second decoupling sheet (7185) and a fourth flexible hinge (7186), wherein the fourth mounting block (7182), the second decoupling sheet (7185) and the fifth mounting block (7181) are sequentially arranged at intervals, the third flexible hinge (7184) and the fourth flexible hinge (7186) are arranged at intervals, vertical projections of the third flexible hinge and the fourth flexible hinge cross each other, a lower side of the third flexible hinge (7184) is connected with the fourth mounting block (7182), an upper side of the third flexible hinge (7184) is connected with a lower side of the second decoupling sheet (7185), a lower side of the fourth flexible hinge (7186) is connected with an upper side of the second decoupling sheet (7185), and an upper side of the fourth flexible hinge (7186) is connected with the fifth mounting block (7181).

13. The leveling and focusing device according to claim 12, wherein the number of the first driving motors (711) and the number of the decoupling portions (718) are three, the three first driving motors (711) are uniformly distributed in the circumferential direction of the first base body (701), and the three decoupling portions (718) and the three first driving motors (711) are arranged in a one-to-one correspondence; the included angle between the vertical projections of the third flexible hinge (7184) and the fourth flexible hinge (7186) in each decoupling portion (718) is 120 degrees.

14. The device according to claim 1, further comprising a plurality of first sensors (31) and a plurality of second sensors (32), wherein the plurality of first sensors (31) are distributed on the first base body (701), the lower side of the second base body (702) is provided with a first measuring surface (21), and the upper end of each first sensor (31) is matched with the first measuring surface (21); the second sensors (32) are distributed on the second seat body (702), the lower side of the third seat body (703) is provided with a second measuring surface (22), and the upper end of each second sensor (32) is matched with the second measuring surface (22); the number of the first sensors (31) is the same as that of the second sensors (32), the first sensors (31) and the second sensors (32) are arranged in a one-to-one correspondence mode, and the vertical central axes of the first sensors (31) and the second sensors (32) in the one-to-one correspondence mode are overlapped.

15. An exercise device, comprising: the leveling and focusing device of any one of claims 1 to 14, and an XY direction driving stage, the leveling and focusing device being provided to the XY direction driving stage, the XY direction driving stage driving the leveling and focusing device to move in an X or Y direction.

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