KR100973530B1 - Sample travelling stage with flexure mechanism module to absorb the deformation of slide - Google Patents

Abstract

A sample traveling stage with flexure mechanism module is provided to reduce the deformation error of a mirror including a sample table and a sample by not delivering the deformation of a slide to the sample table. In a sample traveling stage with flexure mechanism module, a moving unit mounted on a base frame(10) includes a first slide(20) moving along with a first guide block(21) and a second slide (30) which is mounted on the first slide and moves along with a second guide block(32). A moving unit transfers a sample(41) using the sample table(40) mounted on the second slide and measures a displacement through X,Y bar mirrors (42,43) which are mounted vertically with each other on the sample table. A measuring unit receives an interference signal of the beam reflected with X, Y bar mirror through a receiver and outputs a displacement signal. A flexure mechanism includes a plurality of buffering holes, a loader and the deformation lines.

Description

Sample traveling stage with flexure mechanism module to absorb the deformation of slide}

The present invention relates to a specimen transfer device for use in semiconductor or FPD inspection equipment or precision processing equipment, and in particular, a slide for improving the measurement accuracy by preventing the deformation generated from the slide of the specimen transfer device to be transferred to the specimen table. The present invention relates to a specimen transfer device using a strain absorbing flexible mechanism module.

In general, a specimen transfer device is a device that carries a measurement / processing object (hereinafter, referred to as a specimen) used for semiconductor or FPD inspection equipment or precision processing equipment and transfers it to a desired place. The so-called laser displacement measuring system is used as the specimen transfer device to analyze the displacement signal with a signal measured by the interference between the laser beam incident on the mirror and the laser beam reflected on the mirror.

For example, as shown in FIG. 1, the specimen transfer device 100 is mounted on the XY slides 113 and 114 and the Y slide 114 that are guided in cross directions by the X and Y guides 111 and 112. A main body having a specimen table 116 for conveying 115 and XY mirrors 117 and 118 mounted on the specimen table 116 in a vertical direction;

An interferometer 133 which is mounted on the operation path of the main body and emits the XY beams which are output from the laser head 131 and split through the beam splitter 132 to the XY mirrors 117 and 118, and the XY mirror And a measuring unit having an XY receiver 134 for receiving the interference signal reflected by the reference numerals 117 and 118 and converting the interference signal into a displacement signal.

Therefore, the measurement of the position of the specimen 115 by the specimen transfer device 100 is the interference between the XY mirrors 117 and 118 fixed to the specimen table 116 and the laser beams reflected by the XY mirrors 117 and 118. Since the structure is measured by, in order to measure the exact position of the specimen 115, the problem that the relative displacement between the XY bar mirrors (117, 118) and the specimen 115 is to be kept constant should be determined in advance.

However, the specimen table 116 of the specimen transfer device 100 can be easily deformed due to the following reasons, firstly, the slides 113 and 114 due to machining errors or straightness and flatness errors of the guide parts 111 and 112. The second is due to the difference in the amount of deformation caused by the difference in thermal expansion coefficient between the slide 113, 114 and the specimen table 116 when the ambient temperature changes, in particular the slide 113, 114 and the specimen table 116 When overconstrained through a fastening means such as this, there is a problem that the deformation of the slides 113 and 114 is transmitted to the specimen table 116 as it is.

As a result, as shown in FIG. 2, when deformation of the specimen table 116 occurs due to the above factors, the mirror 117 and the specimen 115 are deformed in the process of using the specimen transfer device 100. Change the relative distance between the two. This is caused by measurement error as it is, making it difficult to accurately position the specimen.

In addition, when the laser beam 135 output from the measuring unit of the specimen transfer device 100 is incident on the mirror 117, the tilt of the laser beam may occur due to the tilt error of the mirror 117 due to the deformation of the specimen table 116. If the alignment is misaligned, there will be no interference between the incident and reflected beams and the displacement measurement signal will be lost. Loss of the measurement signal in the displacement measurement system using the laser beam 135 may be a fatal problem of deteriorating control stability and should be prevented.

Meanwhile, as shown in FIG. 3, according to US Patent (2003 / 00202251A1), three deformation prevention mechanisms 150 having motion freedom in the XY direction are mounted in the space between the slide 114 and the specimen table 116. , A configuration has been proposed to prevent deformation of the slide 114 from being transmitted to the specimen table 116.

In addition, the US patent is a flexible mechanism 160 for restraining the motion in the X, Y direction to prevent the low rigidity in the X, Y direction of the deformation preventing mechanism 150 in the process of configuring the specimen transfer device 100 Configure additionally.

However, even though the US patent uses the flexible mechanism 160 as a reinforcing means of the deformation preventing mechanism 150, it is difficult to compensate for the stiffness degradation in the X and Y directions, as well as the asymmetric characteristic when the ambient temperature changes due to the asymmetric structure. This happens.

In addition, the height difference between the specimen 115 and the slide 114 occurs due to the height of the deformation preventing mechanisms 150 and 160. This not only increases the center of gravity of the driving unit, but also forms a offset between the point where the driving force acts and the actual center of gravity, thereby degrading control stability.

On the other hand, as shown in Figure 4, on the upper side of the slide 114 to configure the three shock absorbing mechanisms 170 fixed to the specimen table 116, the six degrees of freedom restrained by the buffer mechanism 170 A configuration has been proposed in which the deformation of the slide 114 is not transmitted to the specimen table 116 by allowing only a degree of freedom in the radial direction away from the center of the thermal expansion direction.

However, the specimen transport apparatus 100 according to FIG. 4 has a problem that the processing and assembly of the shock absorbing mechanism 170 is difficult, and also the height between the specimen table 116 and the slide 114 due to the height of the shock absorbing mechanism 170. The difference occurs. This not only increases the center of gravity of the drive unit of the specimen transfer device but also forms an offset between the point where the driving force is applied and the actual center of gravity, thereby deteriorating control stability.

On the other hand, in the case of precision equipment that requires ultra-precision as the specimen transfer device 100, in order to solve the above problems, the material of the slides 113 and 114 and the specimen table 116 itself using an invar or zeroer, etc. In some cases, the cost of Invar or Zeroder is at least 10 times higher than that of aluminum, and the processing cost is also increased due to poor workability.

Accordingly, the present invention has been made in order to solve the problems as described above, to configure a flexible mechanism module for preventing the deformation of the lower structure to be transferred to the upper structure, by forming it as a body on the slide of the specimen transfer device It is an object of the present invention to provide a specimen transfer device using a slide mechanism for absorbing the deformation of a slide to prevent the deformation of the slide from being transferred to the specimen table by bolt coupling to the slide section.

The present invention for achieving the above object; A moving part mounted on the base frame and moving in a direction in which a first slide moving along the first guide block and a second slide mounted on the first slide and moving along the second guide block cross each other; A conveying unit for conveying the specimen through a specimen table provided through a flexible mechanism integrally formed in the second slide and measuring displacement through X and Y mirrors mounted in the vertical direction on the specimen table; It consists of a measuring unit for receiving the interference signal of the beam emitted through the laser head, the beam splitter and the interferometer mounted on the operation path of the moving unit reflected by the X.Y bar mirror through the receiver and outputs the displacement signal.

According to the specimen transfer device using the slide deformation absorption flexible mechanism module according to the present invention as described above, by forming a flexible mechanism integrally with the second slide configured in the specimen transfer device or by manufacturing a flexible mechanism module coupled to the slide portion By doing so, the following effects can be obtained.

First, since the deformation caused by the slide is not transmitted to the specimen table, the deformation error of the mirror and the specimen including the specimen table is reduced, the relative distance between the mirror and the specimen is set, and the measurement accuracy is formed. This improves productivity by minimizing defective rates.

Secondly, it is possible to form the slide and the flexible mechanism in one body during the manufacturing process of the specimen transfer device, so that not only the manufacturing cost of the components can be reduced, but also the center of gravity of the slide can be relatively lowered to increase the control stability. It is easy and thereby high productivity is achieved.

Third, it is possible to manufacture the material of slides in general aluminum or aluminum alloy instead of expensive invars or zeroers in the process of manufacturing the specimen transfer device, which not only saves the material cost of components including slides but also processability of the components. This improves the processing cost can be reduced.

Hereinafter, an embodiment according to the present invention will be described.

5 and 6 are views showing the coupled state and disassembled state of the specimen transport apparatus according to the present invention, Figure 7 is a view showing a flexible mechanism module of the specimen transport apparatus according to the present invention. 8 and 9 are one embodiment and this embodiment showing the installation state and the modified state of the flexible mechanism module, Figure 10 is an enlarged view showing an example of the flexible mechanism module according to the present invention.

As in FIGS. 5-10; A first slide 20 mounted on the base frame 10 and moving along the first guide block 21, and a second mounted on the first slide 20 and moving along the second guide block 32. A moving part mounted in a direction in which the slides 30 cross each other; X, Y bars are transported to the specimen 41 through the specimen table 40 installed through the flexible mechanism 50 formed on the second slide 30, the X, Y bar mounted on the specimen table 40 in a vertical direction A feeder for measuring displacement through mirrors 42 and 43; The interference signal of the beam emitted by the laser head 61, the beam splitter 62, and the interferometer 63 and reflected by the XY mirrors 42 and 43 mounted on the moving path of the moving part is received by the receiver ( It consists of a measuring unit that receives through 64) and outputs as a displacement signal.

First, the specimen conveying apparatus 1 according to the present embodiment includes a moving part reciprocating in the X-axis and Y-axis directions of an installation place, and a measurement / processing object mounted on the moving part (hereinafter referred to as a specimen). And a measuring unit for measuring the position of the specimen 41 conveyed by the conveying unit and a laser beam.

The moving unit is mounted on the base frame 10 to reciprocate in the X-axis and Y-axis directions according to external signals, and includes the first slide 20 and the second slide 30 mounted on the base frame 10. Are mounted in the direction crossing each other.

In addition, the first slide 20 is mounted on a pair of guide rails 11 mounted side by side at a predetermined interval on an upper surface of the base frame 10, preferably, an upper surface center of the base frame 10, In particular, the first guide convex 21 coupled to the guide rail 11 is reciprocated in the X-axis direction on the drawing.

In addition, the second slide 30 is attached to a pair of guide rails 31 mounted side by side at a predetermined interval on an upper side of the base frame 10, preferably on both sides of the upper surface of the first slide 20. It is mounted, and in particular, reciprocating in the Y-axis direction on the basis of the second guide block 32 coupled to the guide rail 31.

In addition, the transfer unit, which is mounted on the second slide 30 to transfer the specimen 41, is mounted on the second slide 30 and the specimen table 40 on which the specimen 41 is placed on the upper surface thereof, and It is composed of a flexible mechanism module 50 interposed between the specimen table 40 and the second slide 30 to absorb the deformation of the second slide (30).

In addition, the specimen table 40 is reciprocated by the first slide 30 and the second slide 30, and the X-mirror 42 and Y-mirror for measuring displacement of the laser beam on the upper surface thereof ( 43 are mounted in the direction perpendicular to each other.

In addition, the respective fastening holes 51 and 45 are formed in the second slide 30 and the specimen table 40 to be used in the bonding process of the specimen table 40.

In addition, the flexible mechanism module 50 is configured on the upper surface of the second slide 30 to block the deformation of the second slide 30 from being transmitted to the specimen table 40, and the flexible mechanism at the time of deformation of the slide. One flexible mechanism configured in the module deforms in the uniaxial direction as shown in [Reference 1] to maintain the shape of the specimen table before deformation of the slide.

[Reference Figure 1]

Therefore, each flexible mechanism portion of the flexible mechanism module 50 is formed to be able to deform in a small range in the short axis direction, in particular, it is possible to manufacture in a variety of types and forms in consideration of the processability, deformation form and the like of the flexible mechanism.

On the other hand, the flexible mechanism 50, a plurality of buffer holes (53) are regularly penetrated at regular intervals along the vertical direction on the upper surface of the second slide (30); It is made of a plurality of deformation lines 54 which are cut along the center of the buffer hole 53 to provide a deformation space of the mounting portion 52 and the leg portion 56 on which the specimen table 40 is mounted.

In addition, it is preferable to form one or more leg portions 56 integrally on both sides of the mounting portion 52 in the process of configuring the flexible mechanism 50.

At this time, the fastening hole 51 formed in the mounting portion 52 is used as a means fixed through the fastening means such as the specimen table 40 and the bolt.

In addition, in the configuration process of the flexible mechanism 50, the buffer hole 53 is precisely processed according to the exact position and size, the deformation line 54 is processed by the wire-EDM in accordance with the position of the buffer hole 53 It is preferable to.

In particular, the flexible mechanism includes a leaf spring-type flexible mechanism that forms a contact surface between the mounting portion 52 and the leg portion 56 in a straight line as in (a) of [Reference Figure 2], and the mounting portion as in (b). Right cirular hinge flexible mechanism for forming the contact surface of the 52 and the leg portion 56 in a semicircular shape, and the contact surface of the mounting portion 52 and the leg portion 56 in the shape of a square as in (c) Corner filleted hinge flexible mechanism, as shown in (d) can be configured in a variety of forms such as elliptical hinge flexible mechanism to form the contact surface of the mounting portion 52 and the leg portion 56 in an ellipse will be.

At this time, the leaf spring flexible mechanism can obtain a large displacement, but the weakness of the rigidity in the direction other than the axis to allow deformation is relatively weak.In the case of the right cirular hinge flexible mechanism, the deformation amount is relatively small but the off-axis rigidity is large. There is this.

In addition, there are elliptical hinge flexible mechanisms and corner reinforcement hinge flexible mechanisms that properly compensate for the advantages and disadvantages of the two types of flexible mechanisms. Using them, various types of flexible devices can be configured as shown in the following figure.

[Reference Figure 2]

[Reference Figure 3]

[Fig. 3] is an example of the shape using the garden hinge flexible mechanism, the deformation in the uniaxial direction through the 4-bar linkage mechanism is acceptable. In addition to the above examples, more complex mechanisms can be implemented, but the four-bar mechanism is the easiest to machine.

In addition, the flexible mechanism 50 may be arranged on the flexible mechanism module to prevent the deformation of the slide is transferred to the specimen table. Basically, at least three flexible mechanisms that allow deformation in the uniaxial direction can be used to constrain three degrees of freedom on a plane, and can be arranged for a greater number.

Therefore, using three flexible mechanisms, it is arranged in one side of the edge portion and the other center of the second slide 30 as shown in Fig. 9 (a) and (b), and in Fig. 8 (b) using four As shown in the four corners of the second slide 30, respectively.

In addition, six, eight, or more flexible mechanisms may be configured as shown in the reference figure [4]. The arrangement of the flexible instrument does not always have to be a symmetrical structure, and even if the arrangement is five or seven asymmetrically, the thermal deformation of the slide portion can be prevented from being transmitted to the specimen table.

[Reference Figure 4]

In addition, the flexible mechanism 50 may be integrally formed on the second slide 30, but may be formed as a separate member to be combined.

In addition, the measurement unit 60 measures the position of the specimen 41 mounted on the specimen table 40 and transported by the laser beam, and is mounted on the movement paths of the first and second slides 20 and 30. The laser head 61 outputs a laser beam, a beam splitter 62 for dividing the laser beam output by the laser head 61 into an X beam and a Y beam, and the beam splitter 62. The interferometer 63 outputs the beams to the X-mirror 42 and the Y-mirror 43, and the interference signals reflected by the XY-mirrors 42 and 43, respectively, are converted into displacement signals. It consists of the XY receiver 64.

Hereinafter, the operation according to the present invention will be described.

First, in the operation of the specimen transfer device 1, the displacement in the X direction of the specimen table 40 is measured by the X bar mirror 42 while the Y direction displacement is measured by the Y bar mirror 43, so that the measuring unit The position of the specimen 41 is measured by.

That is, the beam output from the laser head 61 passes through the beam splitter 62 and is divided into two beams X and Y, and then through the interferometer 63, the X and Y mirrors 42 and 43. And reflected to cause interference in the interferometer (63).

Subsequently, the interference signal of the interferometer 63 is measured by the receiver 64 of the measurement unit, and the signal is processed and converted into a displacement signal.

If the first and second slides 20 and 30 are deformed due to overconstrainment or thermal expansion, the test piece is first absorbed by the flexible mechanism 50 when the second slide 30 is deformed. It is passed to the table 40.

That is, even if the second slide 30 is deformed, as shown in FIGS. 8B and 9B, the buffer hole 53 or the deformation line 54 of the flexible device 50 corresponds to the deformation amount of the second slide 30. As much as it is deformed to absorb the deformation of the slide (30).

Therefore, since the deformation of the second slide 30 is not directly transmitted to the specimen table 40 or the X and Y mirrors 42 and 43, the specimen 41 and the mirror 42 mounted on the specimen table 40 43, the relative distance is accurately measured.

Hereinafter, a design method of the flexible mechanism according to the present invention will be described.

First, a guideline for designing a flexible mechanism hinge part for preventing thermal expansion of a slide part when there is a temperature change is proposed.

[Reference Figure 5]

[Reference Figure 6]

In FIG. 5, the shape of the slide part which generally fixes the specimen table through bolt fastening is shown in simplified form. If the temperature changes as shown in [Reference Figure 6], the slide portion is deformed. The portion indicated by the solid line indicates the shape of the slide portion before deformation, and the portion indicated by the dotted line indicates the shape of the slide portion that has been thermally expanded.

The slide unit expands in the radial direction with respect to the center of the slide unit. Assuming that the slide section is bolted to the specimen table and the four sections, the thermal expansion causes the force of F (hereinafter referred to as thermal expansion force) to act on each joint. The thermal expansion force F is given by

[Equation 1]

Where α is the coefficient of thermal expansion of the material, E is the elastic modulas of the material, A is the cross-section of the fastening part, d is the diameter of the bolt used for fastening, b is the thickness of the slide part, and L is the slide The distance from the center of the part to the fastening part, ΔL, represents the amount of deformation in which the fastening part is expanded by thermal deformation.

Therefore, in order to prevent the thermal deformation of the slide portion from being transmitted to the specimen table by using the flexible instrument mount, the allowable amount of deformation of the single flexible instrument portion under thermal expansion force must be greater than ΔL.

Second, even if the allowable deformation amount of the flexible mechanism is greater than ΔL, the yield phenomenon does not occur. Therefore, the maximum stress applied to the hinge of the flexible mechanism should be less than the yield strength.

Third, even if the above two conditions are met, the deflection in the gravity direction is caused by the total mass of the specimen table, specimen, and mirror, which is fixed on the upper part of the flexible instrument mount.

Therefore, it can be seen that a flexible mechanism structure that satisfies all three conditions.

First, let's look at the first requirement. In order to calculate the degree of deformation of one flexible mechanism part by thermal expansion force F, the rigidity of a single flexible mechanism part must be determined.

[Reference Figure 7]

For the sake of understanding, the shape of the single flexible mechanism part will be expressed as shown in [Reference 8]. Although there is a difference in the shape of the mechanism of [Reference Figure 7] and the mechanism of [Reference Figure 8], the structure and mechanism are the same.

The single flexible mechanism part is constructed as follows. 60 is a slide part or a part fixed to the slide, 62 is a fixing part for fixing the specimen table, 61 is a link part connecting the slide part and the fixing part, and 64 to 70 are eight pieces having rotational degrees of freedom. Represents a hinge. The shape in which the single flexible mechanism part is deformed when the thermal expansion force F is applied is shown below in [Reference 9].

[Reference Figure 8]

[Reference Figure 9]

Here, the position of the fixed portion is changed by Δx by the rotation of the eight hinges 64 to 70. At this time, in order to find the deformation amount Δx, it is necessary to first calculate the potential energy stored through the deformation of each hinge. The shape of the single hinge is shown in [reference 10].

[Reference Figure 10]

Potential energy stored through the deformation of a single hinge is expressed as in Equation (1).

[Equation 2]

Where k _θ represents the rotational rigidity of the hinge and is given by equation (2).

[Equation 3]

And Δx / l represents the rotation angle of the hinge. Considering that the deformation of the hinge is quite small, the angle of rotation can be approximated by Δx / l. Since eight hinges are used, the potential stored in the entire hinge is given by Eq. (4).

[Equation 4]

In order to calculate the stiffness K of a single flexible mechanism part, if the potential energy "V" is differentiated by "x", the restoring force F can be calculated and is expressed as Equation (5).

[Equation 5]

By differentiating the restoring force F with respect to x, the stiffness of a single flexible mechanism part can be calculated and is expressed as shown in equation (6).

[Equation 6]

The deformation amount Δx of the single flexible mechanism portion calculated using the formulas (2) to (6) is expressed as in the formula (7).

[Equation 7]

In order for the thermal deformation amount ΔL of the slide portion not to be transmitted to the specimen table, the deformation amount Δx of the single flexible mechanism portion should be ΔL or more (Δx ≧ ΔL). Therefore, the condition of equation (8) must be satisfied.

[Equation 8]

Secondly, the stress on the hinge should be below yield strength, so we will consider the conditions for this. Considering the safety factor, set σ max = (0.1 to 0.3) σ y when the maximum stress applied to the hinge is σ max. The magnitude of the moment (Mmax) for applying a stress of sigma max to the hinge is given by equation (9).

[Equation 9]

Where Kt is the stress concentration factor expressed as Eq. (10).

[Equation 10]

When thermal expansion force F acts equally on four links when acting on a single flexible mechanism part, the force applied to one link becomes F / 4 . Since the length of the link is l , the moment applied to each of the two hinges constituting the link is Fl / 4 . Therefore, in order to prevent the yield of the hinge (yield), the amount of moment ( = Fl / 4 ) acting on each hinge by the thermal expansion force must be smaller than the size of Mmax , which is expressed in equation (11).

[Equation 11]

The third condition is that when the specimen table is fixed on top of the flexible instrument mount, the load and the link deflect in the direction of gravity due to the load. Therefore, we want to calculate the deflection of the fixed part.

In the case of the beam having a constant cross-sectional area, the deflection amount can be easily calculated using the deflection formula. However, in the case of the flexible mechanism part proposed in the present invention, the deflection amount is not easy because the cross-sectional area is not constant due to the structural features of the hinge.

Therefore, the deflection is calculated based on the worst case condition. The worst condition here refers to the case of using a flexible mechanism using a beam whose cross section is the same as the hinge and the concave section as shown in Fig. 7.

[Reference Figure 11]

Let M be the sum of the mass of the fixed part of the flexible instrument mount, the mass of the specimen table fixed to the upper part, and the mass of the mirror and the specimen. If the load uniformly distributed on the four flexible mechanisms acts, it can be said that the force of Mg / 4 acts in the direction of gravity on the fixed portion of the single flexible mechanism. At this time, the deflection shape of the flexible mechanism is shown in Fig. 8.

[Reference Figure 12]

At this time, the deflection amount δ of the flexible mechanism portion is expressed as in Equation (12) from the deflection formula of the beam.

[Equation 12]

Looking at the cross-sectional shape of the beam (see Fig. 7,8), since the width is t and the height is b, the rectangular moment of inertia is given by Eq. (13).

[Formula 13]

Therefore, the amount of deflection δ is finally calculated as in Equation (14).

[Equation 14]

What is necessary is just to design a hinge so that this value may become below an appropriate deflection limit ( delta limit ).

Therefore, in order to design a preferred flexible mechanism part, all three conditions mentioned above must be satisfied, which are expressed in equations (8), (11) and (14).

1 is a view showing a specimen transport apparatus according to the prior art,

2 is a view showing a deformation state of a slide configured in the specimen transport apparatus according to the prior art,

Figure 3 is an embodiment showing a deformation preventing mechanism of the slide according to the prior art,

Figure 4 shows an embodiment of the buffer mechanism of the slide according to the prior art,

5 is a view showing a coupled state of the specimen transport apparatus according to the present invention,

6 is a view showing an exploded state of the specimen transport apparatus according to the present invention,

7 is a view showing a flexible mechanism module of a specimen transfer device according to the present invention.

8 (a), (b) is an embodiment showing an installation state and a deformation state of the flexible mechanism module according to the present invention,

Figure 9 (a), (b) is an embodiment showing the installation state and the deformation state of the flexible mechanism module according to the present invention,

10 is an enlarged view showing an example of the flexible mechanism module according to the present invention.

Explanation of symbols on the main parts of the drawings

1: Specimen Transfer Device 10: Base Frame

11,31: guide rail 20: first slide

30: second slide 40: specimen table

41: Psalm 42,43: X, Y mirror

50: flexible mechanism 52: mounting portion

53: buffer hole 54: deformation line

63: interferometer 64: receiver

Claims (9)

delete A first slide 20 mounted on the base frame 10 and moving along the first guide block 21 and mounted on the first slide 20 and moving along the second guide block 32. A moving part mounted in a direction in which the second slide 30 crosses each other; X is transferred to the specimen 41 by using the specimen table 40 mounted on the upper surface of the second slide 30 through the flexible mechanism 50, and mounted on the specimen table 40 in the vertical direction. A conveying unit for measuring displacement through the Y bar mirrors 42 and 43; The interference signal of the beam emitted by the laser head 61, the beam splitter 62, and the interferometer 63 and reflected by the XY mirrors 42 and 43 mounted on the moving path of the moving part is received by the receiver ( A measurement unit which receives the input through the output signal 64 and outputs the displacement signal; It includes; The flexible mechanism 50, A plurality of buffer holes 53 regularly penetrated at regular intervals along the upper and lower directions on the upper surface of the second slide 30; A plurality of deformation lines 54 cut along the center of the buffer hole 53 to provide deformation spaces of the mounting portion 52 and the leg portion 56 on which the specimen table 40 is mounted; Specimen transfer device using a flexible mechanism module for absorbing the slide deformation, characterized in that formed. delete delete delete The method of claim 2, wherein the mounting portion 52, Specimen transfer device using a slide deformation absorption flexible mechanism module, characterized in that the upper surface is fixed to the buffer member 55 in contact with the specimen table 40. 3. The flexible device for absorbing slide deformations according to claim 2, wherein the contact surface between the mounting portion 52 and the leg portion 56 is formed by any one or a combination of linear, semi-circular, elliptical, or angular shapes. Specimen transfer device using module. delete The method of claim 2, wherein the flexible mechanism 50, Slide deformation absorbing, characterized in that the mounting portion 52 and the leg portion 56 is configured by adjusting the buffer hole 53 and the deformation line 54 by the following equation (1) to (3) Specimen transfer device using flexible instrument module. [Equation 1] -. Δx≥ΔL Where Δx is the deformation amount of the flexible mechanism part, ΔL is the thermal deformation amount of the slide part, [Equation 2] -. Fl / 4 ≤ Mmax Where: Fl / 4: moment size, Mmax : moment size to apply the maximum stress to the hinge when considering the safety factor, F: thermal expansion force, l: length of the link, [Equation 3] -. σ = δlimit Where σ = deflection amount of the flexible mechanism portion, δ limit : deflection limit value of the flexible mechanism portion,

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