CN115806179A - Handling device of monocrystalline silicon magazine - Google Patents

Abstract

The invention discloses a carrying device for a monocrystalline silicon material box, which comprises a robot transition mounting plate; the back of the robot transition mounting plate is connected with the wrist part of the six-axis robot; the front side of the robot transition mounting plate is provided with a gun plate changing robot side; the gun plate replacing robot side is connected with the gun plate replacing tool side; the gun changing disc tool side is connected with the main frame of the carrying gripper; a clamping telescopic cylinder is arranged on the front side of the main frame of the carrying gripper; the clamping telescopic cylinder is connected with the left end of the telescopic sliding mounting plate; a first carrying gripper clamping jaw is arranged at the left end of the front side of the carrying gripper main frame, and a telescopic sliding linear guide rail pair is arranged at the right end of the front side; the telescopic sliding linear guide rail pair is connected with a telescopic sliding installation plate provided with a second carrying gripper clamping jaw at the front side; the two clamping jaws are used for clamping the monocrystalline silicon material box; the single crystal silicon material box carrying device can conveniently and reliably carry and operate the single crystal silicon material box, avoids potential safety hazards, ensures the health of workers, reduces the labor cost and improves the working efficiency.

Description

Handling device of monocrystalline silicon magazine

Technical Field

The invention relates to the technical field of machinery, in particular to a conveying device for a monocrystalline silicon material box.

Background

At present, the handling work of a cassette (e.g., a single crystal silicon cassette) for placing a semiconductor raw material (e.g., a silicon material) mainly employs manual handling. In many working environments, human operations are not suitable, for example: climbing, trampling, carrying and stacking too high goods, or the working load exceeds man-machine requirements and the like.

When the monocrystalline silicon material box stored at a high place is traditionally transported, the placing position needs to be manually reached by means of the pedal, so that the manpower time is consumed, more risks exist for the personal safety of workers during high-altitude operation, and great potential safety hazards exist.

In addition, in the case of a silicon single crystal magazine for holding a semiconductor raw material (e.g., silicon material), when the silicon single crystal magazine reaches the pick-and-place position, if the material pouring operation is performed again, since large dust is generated at the time of material pouring, there is a great influence on the physical health of workers.

Disclosure of Invention

The invention aims to provide a conveying device for a monocrystalline silicon material box, aiming at the technical defects in the prior art.

Therefore, the invention provides a carrying device for monocrystalline silicon material boxes, which comprises a robot transition mounting plate which is vertically distributed;

the lower part of the back of the robot transition mounting plate is connected with the wrist part of the existing six-axis robot;

the lower part of the front surface of the robot transition mounting plate is provided with a gun plate changing robot side;

the front side of the gun plate replacing robot side is connected with the rear side of the gun plate replacing tool side;

the front side of the gun changing plate tool side is fixedly connected with the rear side of a main frame of a carrying gripper;

clamping telescopic cylinder supports which are transversely distributed are arranged on the front side of the main frame of the carrying gripper;

the clamping telescopic cylinders which are transversely distributed are arranged on the front side of the clamping telescopic cylinder support;

the right output end of the clamping telescopic cylinder is connected with the left end of the transversely distributed telescopic sliding mounting plate;

the left end of the front side of the carrying gripper main frame is vertically provided with first carrying gripper clamping jaws which are longitudinally distributed;

two transversely distributed telescopic sliding linear guide rail pairs are arranged at the right end of the front side of the main frame of the carrying gripper;

the sliding seat is arranged on the front side of the telescopic sliding linear guide rail pair and is connected with the rear side of the telescopic sliding mounting plate;

second carrying gripper clamping jaws which are longitudinally distributed are vertically arranged on the front side of the telescopic sliding mounting plate;

the first carrying gripper clamping jaw and the second carrying gripper clamping jaw are oppositely arranged left and right;

the first carrying gripper clamping jaw and the second carrying gripper clamping jaw are used for clamping a monocrystalline silicon material box to be carried;

the monocrystalline silicon material box comprises a monocrystalline silicon material box body with an opening at the top;

the inner cavity of the monocrystalline silicon material box body is used for placing silicon materials;

the top of the monocrystalline silicon material box body is covered with a monocrystalline silicon material box cover.

Preferably, a camera recognition device is arranged on the upper part of the front surface of the robot transition mounting plate;

the camera recognition device is used for determining the position of the monocrystalline silicon material box and then sending position information to the six-axis robot;

and the six-axis robot is in data communication with the camera recognition device and is used for moving the main frame of the carrying gripper to the position right behind one monocrystalline silicon material box to be carried after receiving the position information of the monocrystalline silicon material box, and enabling the first carrying gripper clamping jaw and the second carrying gripper clamping jaw to be positioned on the left side and the right side of the monocrystalline silicon material box.

Preferably, the right output end of the clamping telescopic cylinder is provided with a telescopic cylinder connector which is connected with the left end of the telescopic sliding mounting plate.

Preferably, the left end of the telescopic sliding installation plate is provided with a telescopic cylinder connector accommodating groove;

the right-hand member of telescopic cylinder connector sets up in telescopic cylinder connector holding tank.

Preferably, the upper side and the lower side of the right end face of the clamping telescopic cylinder support are respectively provided with a vertically distributed telescopic in-place adjusting gasket;

a first telescopic in-place limiting block which is vertically distributed is respectively arranged on the right side of each telescopic in-place adjusting gasket;

and a second telescopic limiting block in place is respectively arranged at the upper side and the lower side of the left end surface of the telescopic sliding mounting plate and at the position corresponding to each first telescopic limiting block in place.

Preferably, the front ends of the opposite sides of the first carrying gripper clamping jaw and the second carrying gripper clamping jaw are respectively provided with two clamping jaw rubber pads which are longitudinally distributed and spaced up and down.

Preferably, the rear ends of the opposite sides of the first carrying gripper clamping jaw and the second carrying gripper clamping jaw are respectively provided with an in-place detection switch bracket which is transversely distributed;

the two in-place detection switch brackets are symmetrically distributed left and right;

one end of each of the two in-place detection switch brackets, which is opposite to the other end, is provided with an in-place detection switch.

Preferably, the two in-place detection switches are respectively used for detecting the distance between the rear side face of the single crystal silicon material box body and the rear side face of the single crystal silicon material box body, when the distance is smaller than or equal to a preset distance value, a movement stopping signal is sent to the existing six-axis robot, the existing six-axis robot is controlled to stop moving continuously within a preset time, a driving contraction working signal is sent to the clamping telescopic cylinder, the clamping telescopic cylinder is controlled to contract, and therefore the first carrying gripper clamping jaw and the second carrying gripper clamping jaw clamp the single crystal silicon material box body.

Preferably, a telescopic sliding control valve and a telescopic sliding control valve protection cover are arranged at the rear end of the left side face of the main frame of the carrying gripper;

and the telescopic sliding control valve is connected with the clamping telescopic cylinder and is used for controlling the clamping telescopic cylinder to transversely stretch and slide left and right.

Preferably, the left end and the right end of the bottom of the main frame of the carrying gripper are respectively provided with a first gripper storage positioning block and a second gripper storage positioning block;

the first gripper storing and positioning block and the second gripper storing and positioning block are respectively positioned right behind the first carrying gripper clamping jaw and the second carrying gripper clamping jaw.

Compared with the prior art, the monocrystalline silicon material box carrying device has the advantages that the structural design is scientific, the monocrystalline silicon material box can be conveniently and reliably carried, potential safety hazards are effectively avoided, the health of workers is guaranteed, the labor cost is reduced, the working efficiency is improved, and the carrying device has great practical significance.

Drawings

FIG. 1 is a schematic view of a handling device for a silicon single crystal magazine provided by the present invention in an operating state when holding the silicon single crystal magazine;

FIG. 2 is a schematic perspective view of a handling device for a silicon single crystal magazine according to the present invention;

FIG. 3 is a schematic perspective view of a handling apparatus for a silicon single crystal magazine according to the present invention, mounted on a six-axis robot;

FIG. 4 is a schematic front view of a handling device for a silicon single crystal magazine according to the present invention;

FIG. 5 is a schematic left view of a conveying device for a silicon single crystal material box according to the present invention;

FIG. 6 is a schematic top view of a device for handling a silicon single crystal magazine according to the present invention;

FIG. 7 is a rear view schematically illustrating a handling apparatus for a silicon single crystal magazine according to the present invention;

FIG. 8 isbase:Sub>A schematic cross-sectional view taken along line A-A of FIG. 6;

FIG. 9 is an enlarged schematic view of the area (e.g., area B) around the telescoping in-place adjustment pad and the telescoping in-place stop block shown in FIG. 8, at which time the first telescoping in-place stop block and the second telescoping in-place stop block contact each other;

FIG. 10 is a schematic structural view of a single crystal silicon magazine carrying device according to the present invention, when the single crystal silicon magazine is not covered with a lid on the top;

in the figure: 1. the robot hand-held device comprises a camera recognition device, 2, a robot transition mounting plate, 3, a robot side gun changing plate, 4, a tool side gun changing plate, 5 and a carrying gripper main frame;

6. a first carrying gripper clamping jaw 7, a clamping jaw rubber pad 8, a second carrying gripper clamping jaw 9, an in-place detection switch bracket 10 and an in-place detection switch;

11. the device comprises a clamping telescopic cylinder, a clamping telescopic cylinder support 12, a clamping telescopic cylinder support 13, a locking nut, a telescopic in-place adjusting gasket 14, a first telescopic in-place limiting block 151 and a first telescopic in-place limiting block; 152. a second telescopic in-place limiting block;

16. the telescopic sliding type dust-proof device comprises a telescopic cylinder connector 17, a telescopic sliding mounting plate 18, a telescopic sliding linear guide rail pair 19, a telescopic sliding support plate 20 and a telescopic sliding dust-proof cover plate;

21. the telescopic sliding control valve 22, the telescopic sliding control valve shield 23, the telescopic sliding adjusting gasket 24, the first gripper storage positioning block 25 and the second gripper storage positioning block;

26. a monocrystalline silicon material box cover 27, a monocrystalline silicon material box body 28 and a six-axis robot.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments of the present invention, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.

The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.

Referring to fig. 1 to 10, the invention provides a handling device for monocrystalline silicon material boxes, which comprises a robot transition mounting plate 2 which is vertically distributed;

the lower part of the back of the robot transition mounting plate 2 is connected with the wrist part (namely the rotating arm) of the existing six-axis robot; specifically, the six-axis flange can be mounted on a six-axis flange of an existing external power six-axis robot 28;

the front lower part of the robot transition mounting plate 2 is provided with a gun plate changing robot side 3;

the front side of the gun plate changing robot side 3 is connected with the rear side of the gun plate changing tool side 4;

the front side of the gun changing plate tool side 4 is fixedly connected with the rear side of a main frame 5 of a carrying grip;

clamping telescopic cylinder supports 12 which are transversely distributed are arranged on the front side of the main frame 5 of the carrying gripper;

the clamping telescopic cylinders 11 which are transversely distributed are arranged on the front side of the clamping telescopic cylinder support 12;

the right output end of the clamping telescopic cylinder 11 is connected with the left end of a transversely distributed telescopic sliding mounting plate 17;

a first carrying gripper clamping jaw 6 which is longitudinally distributed is vertically arranged at the left end of the front side of the carrying gripper main frame 5;

two transversely distributed telescopic sliding linear guide rail pairs 18 are arranged at the right end of the front side of the main frame 5 of the carrying gripper;

a sliding seat (namely a sliding seat) arranged at the front side of the telescopic sliding linear guide rail pair 18 is connected with the rear side of the telescopic sliding installation plate 17;

a second carrying gripper clamping jaw 8 which is longitudinally distributed is vertically arranged on the front side of the telescopic sliding mounting plate 17;

the first carrying gripper clamping jaw 6 and the second carrying gripper clamping jaw 8 are arranged oppositely left and right;

the first carrying gripper clamping jaw 6 and the second carrying gripper clamping jaw 8 are used for clamping a monocrystalline silicon material box to be carried;

note that the gap between the first transfer gripper jaw 6 and the second transfer gripper jaw 8 is used to accommodate one single crystal silicon magazine to be transferred.

In the invention, in the concrete implementation, a camera recognition device 1 is arranged on the upper part of the front surface of the robot transition mounting plate 2;

the camera recognition device 1 is used for determining the position of the monocrystalline silicon material box and then sending position information to the six-axis robot;

and the six-axis robot 28 is in data communication with the camera recognition device 1 and is used for moving the main carrying gripper frame 5 to the position right behind one monocrystalline silicon material box to be carried after receiving the position information of the monocrystalline silicon material box, and enabling the first carrying gripper clamping jaw 6 and the second carrying gripper clamping jaw 8 to be positioned at the left side and the right side of the monocrystalline silicon material box.

That is, the six-axis robot moves the first transfer gripper jaw 6 and the second transfer gripper jaw 8 to the left and right sides of the single crystal silicon magazine in the single crystal silicon magazine transfer device.

In the invention, the monocrystalline silicon material box comprises a monocrystalline silicon material box body 27 with an opening at the top;

an inner cavity of the single crystal silicon material box body 27 for placing a semiconductor raw material (such as silicon material);

a lid 26 of the single crystal silicon material box 27 is disposed on the top of the box in a covering manner.

In the invention, in a concrete implementation, the robot transition mounting plate 2 is fixedly mounted on a six-axis flange of an external power robot at the back surface thereof in a mode of positioning through a plurality of pin holes with 180-degree intervals on the circumference and matched counter bore bolts.

In the invention, in a concrete implementation, the camera recognition device 1 is fixedly arranged on the upper part of the front surface of the robot transition mounting plate 2 in a mode of combining a bolt with a pin hole.

In the invention, in a concrete implementation, the gun changing tray robot 3 is fixedly arranged at the lower part of the front surface of the robot transition mounting plate 2 in a mode of positioning through circumferential pin holes at intervals of 120 degrees and matched bolts.

In the invention, in a specific implementation mode, the gun changing plate tool side 4 is fixedly arranged on a rectangular flange mounting surface arranged on the back surface of the main frame 5 of the carrying gripper in a mode of positioning through circumferential pin holes at intervals of 120 degrees and matched bolts.

In the invention, the rectangular flange surface on the clamping telescopic cylinder support 12 is positioned and installed on the long strip-shaped flange plate arranged on the front side of the main frame 5 of the carrying gripper in a mode of combining the pin holes and the threaded holes.

In the present invention, in a concrete implementation, a telescopic sliding support plate 19 is vertically arranged right and left of the telescopic sliding linear guide rail pair 18 at the right end of the front side of the main frame 5 of the carrying gripper.

In the present invention, the telescopic sliding linear guide rail pair 18 and the telescopic sliding support plate 19 may be fixed to the long flange plate on the front side of the main frame 5 of the carrying gripper by means of a countersunk bolt.

In the present invention, in a specific implementation, the telescopic sliding mounting plate 17 can be fixedly mounted on two sliding seats of the telescopic sliding linear guide rail pair 18 through 8 countersunk bolt holes on the telescopic sliding mounting plate 17.

In the present invention, the clamp telescopic cylinder 11 is fixed on the clamp telescopic cylinder support 12 through a through hole reserved at four corners of the clamp telescopic cylinder.

In the present invention, in a concrete implementation, a telescopic cylinder connector 16 is disposed at the right output end of the clamping telescopic cylinder 11, and is connected to the left end of the telescopic sliding mounting plate 17 through the telescopic cylinder connector 16.

In the present invention, the telescopic cylinder connector 16 is a T-shaped telescopic cylinder connector.

Specifically, a telescopic cylinder connector accommodating groove is formed in the left end of the telescopic sliding mounting plate 17;

the right end of telescopic cylinder connector 16 sets up in telescopic cylinder connector holding tank.

In the concrete implementation, the right output end (namely a cylinder rod) of the telescopic cylinder 11 is clamped, is in threaded connection with an internal thread hole reserved on the left side of a telescopic cylinder connector 16, and is locked and fixed through a locking nut 13;

it should be noted that the lock nut 13 is screwed with the external thread of the right output end (i.e., the cylinder rod) of the clamping telescopic cylinder 11. And abuts against the left side of the telescopic cylinder attachment 16.

It should be noted that, for the present invention, one end of the T-shaped telescopic cylinder connector 16 is placed in a T-shaped groove (i.e. a telescopic cylinder connector receiving groove) reserved at the left end of the telescopic sliding mounting plate 17, and the telescopic sliding mounting plate 17 is horizontally moved to the rightmost end, at this time, the cylinder rod clamping the telescopic cylinder 11 can be pulled out, and is connected to the internal thread of the telescopic cylinder connector 16 through the rod end external thread, and then the position is locked by the anti-loose lock nut 13.

In the invention, in concrete implementation, the upper side and the lower side of the right end face of a clamping telescopic cylinder support 12 are respectively provided with a telescopic in-place adjusting gasket 14 which is vertically distributed;

a first telescopic in-place limiting block 151 which is vertically distributed is respectively arranged on the right side of each telescopic in-place adjusting gasket 14;

a second telescopic in-place stopper 152 is provided at each of upper and lower sides of the left end surface of the telescopic slide mounting plate 17 at a position corresponding to each of the first telescopic in-place stoppers 151.

It should be noted that, for the present invention, two in-place telescopic adjusting spacers 14 and two first in-place telescopic limit blocks 151 may be installed on the upper and lower sides of the right end surface of the clamping telescopic cylinder support 12 in a form of countersunk connection, and two second in-place telescopic limit blocks 152 may be installed on the upper and lower sides of the left end surface of the telescopic sliding installation plate 17 in a form of countersunk connection.

As shown in fig. 9, as the cylinder rod of the clamping telescopic cylinder 11 contracts to the left, the first telescopic in-place limiting block 151 contacts with the second telescopic in-place limiting block 152, so as to limit the position of the telescopic sliding mounting plate 17; as the cylinder rod of the clamping telescopic cylinder 11 extends rightward, the first telescopic in-place limiting block 151 and the second telescopic in-place limiting block 152 are separated from contact, and are pulled apart by a certain distance.

In the present invention, in a concrete implementation, a telescopic sliding adjusting shim 23 is provided between the front side of the telescopic sliding mounting plate 17 and the rear side of the second carrying gripper jaw 8.

In the present invention, the telescopic slide adjusting shim 23 and the second carrying gripper jaw 8 may be attached to the flange surface on the front surface (i.e., the countersunk side) of the telescopic slide attachment plate 17 by a bolt and pin fastening method.

In the present invention, in a concrete implementation, the upper and lower sides of the telescopic sliding support plate 19 are respectively provided with a horizontally distributed telescopic sliding dustproof cover plate 20.

It should be noted that, for the present invention, the telescopic sliding dustproof cover plate 20 can be installed on the upper and lower sides of the clamping telescopic cylinder support 12 and the telescopic sliding support plate 19 by the positioning form of the countersunk tapered hole, to constitute the sliding part of the clamping device.

In the present invention, the first transfer gripper jaw 6 may be fixed to the front left side of the transfer gripper main frame 5 by a bolt and a pin.

In the present invention, two longitudinally distributed and vertically spaced jaw rubber pads 7 are respectively disposed (e.g., bonded) at the front ends of the opposite sides of the first and second carrying grip jaws 6 and 8.

It should be noted that, according to the present invention, four jaw rubber pads 7 may be installed inside the first and second carrying jaw grippers 6 and 8 by the positioning form of the countersunk tapered holes, and one jaw rubber pad 7 may be installed on each of the upper and lower sides of the first and second carrying jaw grippers 6 and 8.

In the invention, in particular, the rear ends of the opposite sides of the first carrying gripper clamping jaw 6 and the second carrying gripper clamping jaw 8 are respectively provided with an in-place detection switch bracket 9 which is transversely distributed;

the two in-place detection switch brackets 9 are distributed symmetrically left and right;

the opposite ends (i.e., the inner ends) of the two in-place detection switch brackets 9 are respectively provided with an in-place detection switch 10.

It should be noted that, for the present invention, two in-place detection switch brackets 9 may be symmetrically installed on the inner sides of the first and second carrying gripper jaws 6 and 8, and on the in-place detection switch brackets 9, a cylindrical in-place detection switch 10 is installed by a conventional fixing manner of double nut locking.

In the invention, in concrete implementation, the rear end of the left side surface of the carrying gripper main frame 5 is provided with a telescopic sliding control valve 21 and a telescopic sliding control valve protective cover 22;

the telescopic sliding control valve 21 is connected to the telescopic clamp cylinder 11 (e.g., via a signal line) and controls the telescopic clamp cylinder 11 to perform lateral telescopic sliding movement in the left-right direction.

In the present invention, the telescoping slide control valve 21 and the telescoping slide control valve guard 22 may be vertically mounted on the side of the main frame 5 by means of bolt fastening.

In the invention, in a concrete implementation, a first gripper storage positioning block 24 and a second gripper storage positioning block 25 are respectively arranged at the left end and the right end of the bottom of the carrying gripper main frame 5;

and a first hand grip storage positioning block 24 and a second hand grip storage positioning block 25 are respectively positioned right behind the first carrying hand grip clamping jaw 6 and the second carrying hand grip clamping jaw 8.

In the present invention, the first hand storage positioning block 24 and the second hand storage positioning block 25 may be fixedly installed directly below the transfer hand main frame 5 by means of bolts and pins.

In the present invention, after the switching signal line of the telescopic slide control valve 21 and the air line of the clamping telescopic cylinder 11 are connected, the robot six shafts are moved so that the three tapered cylindrical pins on the gun changing tray robot side 3 are vertically inserted into the gun changing tray tool side 4 until the electrical locking of the two (i.e. the gun changing tray robot side 3 and the gun changing tray tool side) is effective,

for the invention, the transverse length of the monocrystalline silicon material box body 27 which can be clamped by the device of the invention is correspondingly adjusted by adjusting the thickness of the telescopic in-place adjusting gasket 14.

Based on the device disclosed by the invention, through inspection, the first carrying gripper clamping jaw 6 is matched with the second carrying gripper clamping jaw 8, so that the two carrying gripper clamping jaws can easily position and clamp a monocrystalline silicon material box body 27 fully loaded with about 25 kilograms of monocrystalline silicon materials.

In order to more clearly understand the technical solution of the present invention, the following description is provided for the arrangement and the operational features of the components of the present invention:

in the invention, the camera recognition device 1 is a commercially available product, is an existing camera recognition device with a Leemann brand, is a mature device in the prior art, is in a square box shape, is internally provided with a 2D camera, is provided with simple programming software, can communicate with the robot, can compare with data of a site reference, and then outputs deviation data to guide the robot to reach a precise grabbing position.

In the invention, a robot transition mounting plate 2 is processed by a stainless steel material machine and is in a long circular shape, the upper part of the robot transition mounting plate is connected with a camera recognition device 1, and the front side and the rear side of the lower part of the robot transition mounting plate are respectively connected with a gun changing plate robot side 3 and a six-shaft flange of an external power robot;

in the invention, the gun plate replacing robot side 3 is an existing standard commercial product, the brand model is Qiandao QT1991275, and is a mature part in the prior art, mainly used as the main side of a quick-replacing device (namely an existing industrial robot tool quick-replacing plate) of a tool, and can transmit water, electricity, gas and other energy sources at the robot side to corresponding tools, and the gun plate replacing robot side 4 is matched for use, so that the robot transition mounting plate 2 is connected with a six-axis flange of the robot.

In the invention, the tool side 4 of the gun changing disc is an existing standard commercial product, the brand model is Qiaogtian QT1991276, is a mature part in the prior art, mainly serves as a quick changing device secondary side of a tool, can transmit energy sources such as water, electricity, gas and the like at the robot side to corresponding tools, is matched with the robot side gun changing disc 3 for use, and is connected with the robot transition mounting plate 2 and the main frame 5 of the carrying gripper.

The carrying gripper main frame 5 is made of stainless steel materials through welding and machining, is rectangular, is a main frame of the carrying device provided by the invention, and is provided with a gun plate replacing tool side 4, a first carrying gripper clamping jaw 6, a second carrying gripper clamping jaw 8, corresponding sliding components, gripper positioning components and the like;

the first carrying gripper clamping jaw 6 is made of stainless steel materials through welding and machining, and is connected to the carrying gripper main frame 5 in a mode that pin holes are matched with bolts.

The clamping jaw rubber pad 7 is made of general rubber materials, is in a strip shape, is provided with two conical counter bores, and is arranged on the first carrying gripper clamping jaw 6 and the second carrying gripper clamping jaw 8, one above the other.

And the second carrying gripper clamping jaw 8 is made of stainless steel materials by welding and machining, has a shape similar to that of the first carrying gripper clamping jaw 6, and is fixed on the telescopic sliding mounting plate 17 in a bolt and pin combination mode.

The in-place detection switch bracket 9 is made of stainless steel and is a bent piece which is matched with the in-place detection switch 10 for use, and the two in-place detection switch brackets 9 are respectively arranged on the first carrying gripper clamping jaw 6 and the second carrying gripper clamping jaw 8.

The in-place detection switch 10 is a standard ohm dragon product sold in the market, and is E2A-M18KS08-M1-D1 in model. The in-place detection switch bracket is cylindrical, the detection distance is 3-5mm, and the in-place detection switch bracket is matched with double nuts and fixed on the in-place detection switch bracket 9 for use, so that the in-place condition of the grippers (namely the first carrying gripper clamping jaw 6 and the second carrying gripper clamping jaw 8) can be detected.

In the present invention, in a specific implementation, the two in-place detection switches 10 (i.e., proximity switches) are respectively used for detecting a distance between the two in-place detection switches and the rear side surface of the single crystal silicon material box body 27, and when the distance is smaller than or equal to a preset distance value (e.g., 2 cm, i.e., an action distance), send a stop movement signal to the existing six-axis robot, control the existing six-axis robot to stop moving continuously within a preset time period (e.g., equal to the contraction time of the clamping telescopic cylinder 11), send a drive contraction working signal to the clamping telescopic cylinder 11, and control the clamping telescopic cylinder 11 to contract, so that the first carrying gripper clamping jaw 6 and the second carrying gripper clamping jaw 8 clamp the single crystal silicon material box body 27;

the single crystal silicon material box body 27 is an object to be clamped by the first carrying gripper jaw 6 and the second carrying gripper jaw 8.

The clamping telescopic cylinder 11 is a standard SMC commercial product, and the model is CDLQB63-40DM-F. A magnetic ring is arranged in the cylinder, and the motion position of a piston rod of the cylinder can be induced through a magnetic switch to be used as an input power source for sliding clamping;

the clamping telescopic cylinder support 12 is made of stainless steel materials through welding and machining, is an L-shaped flange seat, and is installed on elongated flange plates arranged in the middle of the front side and at the right end of the main frame 5 of the carrying gripper in a mode of combining pin holes and threaded holes.

The lock nut 13: the nut is a standard commercial product, is a thin round nut with the model number of M18 x 1.5, is matched with the clamping telescopic cylinder 11 for use, and prevents the sliding position from changing due to the loosening of the thread of the connector of the telescopic cylinder.

The telescopic in-place adjusting gaskets 14 are two in total, are specifically made of a 60Si2Mn material machine and are E-shaped, and are placed at positions between the clamping telescopic cylinder support 12 and the first telescopic in-place limiting block 151 through a circular open slot.

The first telescopic in-place limiting blocks 151 are two in total, can be machined from 45# materials, are rectangular, are provided with two countersunk holes, and are connected with the telescopic in-place adjusting gasket 14 through the countersunk holes and the countersunk bolts to be mounted on the upper side and the lower side of the clamping telescopic cylinder support 12.

The second telescopic in-place limiting blocks 152 are two in total, can be machined from 45# material, are rectangular, are provided with two countersunk holes, and are mounted on the upper and lower side end faces of the telescopic sliding mounting plate 17 in a manner of connecting the countersunk holes and countersunk bolts.

The telescopic cylinder connector 16 is made of stainless steel materials and is T-shaped, a threaded hole is formed in the telescopic cylinder connector, and the outer thread of a cylinder rod of the telescopic cylinder 11 is connected with the inner thread of the telescopic cylinder connector 16 through clamping.

The telescopic sliding mounting plate 17 is made of a stainless steel material machine and is rectangular, a T-shaped groove is dug in one side of the telescopic sliding mounting plate and used for mounting a telescopic cylinder connector 16, a countersunk threaded hole is formed in the plate and used for connecting a telescopic sliding linear guide rail pair 18, and a telescopic sliding adjusting gasket 23 and a second carrying gripper clamping jaw 8 are mounted on a flange face of the countersunk hole side (namely the right end of the front side) of the telescopic sliding mounting plate 17 in a mode of combining and fixing the threaded hole and a pin hole.

The telescopic sliding linear guide rail pair 18 is a standard commercial product, the brand is silver, the model is LGS30HANP21X200F, G =20, each guide rail is provided with a sliding flange seat, the sliding flange seat is connected with the telescopic sliding mounting plate 17 through a threaded hole in the flange seat, and the main function of the telescopic sliding linear guide rail pair is horizontal sliding guide;

the telescopic sliding support plate 19 is made of a stainless steel material machine, is rectangular, is provided with a groove in the middle, and is arranged on a rectangular flange plate on the front side of the main frame 5 of the carrying gripper in a countersunk head bolt mode.

The telescopic sliding dustproof cover plate 20 is a stainless steel sheet metal part and is in a concave shape, and is mounted on the upper side and the lower side of the telescopic sliding support plate 19 and the clamping telescopic cylinder support 12 in a form of countersunk bolts at two ends.

The telescopic sliding control valve 21 is a standard SMC product sold on the market, and is of a model SY7220-5DZ-02, and is arranged on a telescopic sliding control valve shield 22 and used for controlling the telescopic sliding of the clamping telescopic cylinder 11.

The telescopic sliding control valve protecting cover 22 is made of stainless steel materials in a bending mode, is used together with the telescopic sliding control valve 21, and is installed on the main frame 5 of the carrying gripper.

The telescopic sliding adjusting gasket 23 is made of stainless steel material. The clamping jaw is long-strip-shaped and is provided with three threaded holes for connecting the telescopic sliding mounting plate 17 with the second carrying clamping jaw 8, and the clamping jaw is mainly used for ensuring that the left clamping jaw and the right clamping jaw are symmetrical and consistent and eliminating flatness errors caused by machining.

The first hand grip storage positioning block 24 is machined from 45# material. Is in a square shape, is provided with a positioning pin hole in the middle and is arranged at the left lower part of the main frame 5 of the carrying gripper.

The second gripper storage positioning block 25 is machined from a 45# material and is square, a long-strip-shaped groove is machined in the middle to limit swinging, and the second gripper storage positioning block is installed on the lower right side of the main carrying gripper frame 5.

The monocrystalline silicon material box cover 26 is a batch standard part and is formed by injection molding of resin materials, and all the material covers are basically consistent in appearance and specification and are matched with the monocrystalline silicon material box body 27 for use.

The monocrystalline silicon material box body 27 is a batch standard component, is made of stainless steel materials by welding and machining, has basically consistent appearance specifications, and is used for placing monocrystalline silicon processing raw materials with fixed weight therein and matching with the monocrystalline silicon material box cover 26.

In order to more clearly understand the technical solution of the present invention, the following describes the working principle of the present invention.

For the invention, the clamping telescopic cylinder 11 drives the telescopic sliding linear guide rail pair 18 and the telescopic sliding mounting plate 17 to do linear motion, so as to drive the second carrying gripper clamping jaw 8 to do opening and closing actions, when the cylinder rod of the clamping telescopic cylinder 11 is horizontally pushed out rightwards, the second carrying gripper clamping jaw 8 is opened, the magnetic detection switch (namely the self-contained magnetic detection switch) arranged on the clamping telescopic cylinder 11 can detect the state of the cylinder, and when the cylinder rod of the clamping telescopic cylinder 11 is horizontally retracted leftwards, the second carrying gripper clamping jaw 8 is closed; wherein. The telescopic in-place limiting block controls the closing state of the clamping telescopic cylinder 11.

According to the invention, the position of the monocrystalline silicon material box is determined by arranging the existing camera recognition device, and then the position information is returned to the control cabinet matched with the robot (such as a six-axis robot), and the control cabinet sends a signal to drive the robot to move, so that the monocrystalline silicon material box positioning device is suitable for carrying the monocrystalline silicon material box with uncertain placing position;

according to the invention, the in-place condition of the gripper clamping jaws (namely the first carrying gripper clamping jaw 6 and the second carrying gripper clamping jaw 8) is detected by arranging the in-place detection switch 10, so that the carrying gripper clamping jaws are ensured to reach the designated positions; the rubber pad is arranged on the carrying gripper clamping jaw of the device, so that the monocrystalline silicon material box is protected, and the monocrystalline silicon material is prevented from being scratched.

In conclusion, the device changes the traditional carrying working mode, so that the carrying work becomes faster, safer and more stable, and the efficiency of the carrying work is effectively improved; the device has reasonable structure, reliable safety performance and higher precision, and can be widely applied to carrying work.

Through inspection, the device designed by the invention has the following load of the workpieces (such as monocrystalline silicon material boxes) capable of being conveyed: less than or equal to 25 kilograms; function through transport tongs: the large box and the small box can be carried, and other tools can be switched.

In order to more clearly understand the technical solution of the present invention, the following describes the operation process of the present invention.

Firstly, the device is connected to the wrist end of the existing six-axis robot through a robot transition mounting plate 2, when the six-axis robot receives a transportable command sent by a main controller PLC, a gripper state is initially defined, and at the moment, after a transportable command sent by the main controller PLC is received by a clamping telescopic cylinder 11, a cylinder telescopic rod of the clamping telescopic cylinder 11 extends out, so that a second transporting gripper clamping jaw 8 is opened, and all signals are in a transportable state;

then, the six-axis robot moves two grippers (namely a first carrying gripper clamping jaw 6 and a second carrying gripper clamping jaw 8) to the position right above the monocrystalline silicon material box, the position of the material box is confirmed through an existing camera recognition device, the camera recognition device calculates a deviation value of an output position through self internal software and feeds the deviation value back to a main controller PLC, and then after receiving the deviation value converted by the PLC, the robot accurately moves the grippers to the position right behind the monocrystalline silicon material box and controls the two carrying gripper clamping jaws to move to the left side and the right side of the monocrystalline silicon material box;

then, signals are output through the six-axis robot, a cylinder rod of the clamping telescopic cylinder 11 retracts, the two carrying gripper clamping jaws clamp two sides of the monocrystalline silicon material box through the limitation of the telescopic in-place limiting block, and the carrying taking and placing functions are achieved.

According to the invention, the device is provided with the in-place detection switch, so that the situation that the grippers do not reach the designated gripping position and damage the material box and equipment is avoided;

according to the invention, the in-place detection switches are arranged on the two carrying gripper clamping jaws, so that the condition that the grippers are in place can be confirmed, and for carrying work with uncertain material box positions, the switch can avoid the condition that the grippers impact the material box when the gripping positions are deviated.

For the device, the magnetic detection switch of the air cylinder is arranged, so that the condition that the air cylinder cannot stretch out or retract to a position is avoided; the rubber pads are arranged on the carrying gripper clamping jaws of the device, so that the material box is protected.

According to the invention, the camera recognition device can detect the specific position of the material box, so that the robot can adjust the in-place grabbing path, accurately grab the material box and carry and freely take and place the stacked material boxes stored on the conveying belt in different positions.

According to the invention, the magnetic detection switch and the telescopic in-place limiting block are arranged on the clamping telescopic cylinder 11, so that whether the cylinder is telescopic in place or not can be detected, and the condition that a material box is not clamped and falls off or a clamping jaw is not opened and other equipment is collided in the telescopic process of the cylinder is avoided.

Compared with the prior art, the carrying device for the monocrystalline silicon material box has the following beneficial effects:

1. according to the invention, the camera recognition device is used as an auxiliary guide, and through the intelligent movement of an external robot, the stacked material boxes stored on the conveying belt at different positions can be conveyed and freely taken and placed, so that dangerous operations such as manual treading on a stepping table for conveying, manual holding of the boxes for material pouring and the like are replaced, the labor cost is reduced, the safety of manual operation is improved, and the method becomes an effective scheme for realizing automatic transformation.

2. According to the invention, whether the grabbing of the gripper is in place can be confirmed through the in-place detection switch, so that the situation that the gripper mistakenly grabs and impacts the material box is avoided; the material box can be prevented from being damaged by the hand grip when the hand grip is used for gripping or the material box and other equipment can be prevented from being hit by mistake when the hand grip is not completely opened by clamping the magnetic detection switch and the telescopic in-place limiting block which are arranged on the telescopic cylinder 11; the 2D position of the material box body can be obtained through the existing camera recognition device, so that the six-axis robot is guided to reach the correct grabbing position, and the correct taking and placing of stacked material boxes with different positions are achieved.

3. The robot vision identification system utilizes the existing mature robot vision identification function (namely the function of the existing camera identification device), and the robot flexibly and intelligently replaces the original manual work to complete the corresponding work through the mutual feedback of the signals of the corresponding sensors among the PLC, the equipment and the robot, thereby not only reducing the labor cost and improving the production efficiency, but also avoiding the harm of the long-term work to the body health of operators under the condition of relatively poor working environment.

Compared with the prior art, the carrying device for the monocrystalline silicon material boxes, which is provided by the invention, is scientific in structural design, can conveniently and reliably carry and operate the monocrystalline silicon material boxes, effectively avoids potential safety hazards, ensures the health of workers, reduces the labor cost, improves the working efficiency and has great practical significance.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (10)

1. The carrying device for the monocrystalline silicon material boxes is characterized by comprising a robot transition mounting plate (2) which is vertically distributed;

the lower part of the back of the robot transition mounting plate (2) is connected with the wrist part of the existing six-axis robot (28);

the lower part of the front surface of the robot transition mounting plate (2) is provided with a gun plate replacing robot side (3);

the front side of the gun plate replacing robot side (3) is connected with the rear side of the gun plate replacing tool side (4);

the front side of the gun changing plate tool side (4) is fixedly connected with the rear side of a carrying hand grip main frame (5);

clamping telescopic cylinder supports (12) which are transversely distributed are arranged on the front side of the carrying gripper main frame (5);

the clamping telescopic cylinders (11) which are transversely distributed are arranged on the front side of the clamping telescopic cylinder support (12);

the right output end of the clamping telescopic cylinder (11) is connected with the left end of a transversely distributed telescopic sliding mounting plate (17);

a first carrying gripper clamping jaw (6) which is longitudinally distributed is vertically arranged at the left end of the front side of the carrying gripper main frame (5);

two transversely distributed telescopic sliding linear guide rail pairs (18) are arranged at the right end of the front side of the main frame (5) of the carrying gripper;

a sliding seat arranged at the front side of the telescopic sliding linear guide rail pair (18) is connected with the rear side of the telescopic sliding installation plate (17);

a second carrying gripper clamping jaw (8) which is longitudinally distributed is vertically arranged on the front side of the telescopic sliding mounting plate (17);

the first carrying gripper clamping jaw (6) and the second carrying gripper clamping jaw (8) are arranged oppositely left and right;

the first carrying gripper clamping jaw (6) and the second carrying gripper clamping jaw (8) are used for clamping a monocrystalline silicon material box to be carried;

the monocrystalline silicon material box comprises a monocrystalline silicon material box body (27) with an opening at the top;

the inner cavity of the monocrystalline silicon material box body (27) is used for placing silicon materials;

the top of the monocrystalline silicon material box body (27) is covered with a monocrystalline silicon material box cover (26).

2. The device for handling the monocrystalline silicon material boxes according to claim 1, wherein a camera recognition device (1) is arranged at the upper part of the front surface of the robot transition mounting plate (2);

the camera recognition device (1) is used for determining the position of the monocrystalline silicon material box and then sending position information to the six-axis robot;

and the six-axis robot (28) is in data communication with the camera recognition device (1) and is used for moving the carrying hand grip main frame (5) to the position right behind a monocrystalline silicon material box to be carried after receiving the position information of the monocrystalline silicon material box, and enabling the first carrying hand grip clamping jaw (6) and the second carrying hand grip clamping jaw (8) to be located on the left side and the right side of the monocrystalline silicon material box.

3. The device for handling the silicon single crystal material boxes according to claim 1, wherein a telescopic cylinder connector (16) is arranged at the right output end of the clamping telescopic cylinder (11) and is connected with the left end of the telescopic sliding mounting plate (17) through the telescopic cylinder connector (16).

4. The conveying device for the monocrystalline silicon material boxes according to claim 3, wherein the telescopic cylinder connector receiving groove is formed in the left end of the telescopic sliding mounting plate (17);

the right end of telescopic cylinder connector (16) is arranged in the telescopic cylinder connector accommodating groove.

5. The device for handling the silicon single crystal material boxes according to claim 1, wherein the upper and lower sides of the right end surface of the clamping telescopic cylinder support (12) are respectively provided with a telescopic in-place adjusting gasket (14) which is vertically distributed;

a first telescopic in-place limiting block (151) which is vertically distributed is respectively arranged on the right side of each telescopic in-place adjusting gasket (14);

the upper side and the lower side of the left end face of the telescopic sliding mounting plate (17) are respectively provided with a second telescopic in-place limiting block (152) at the position corresponding to each first telescopic in-place limiting block (151).

6. The device for handling single crystal silicon cassettes as claimed in claim 1, wherein the front ends of the opposite sides of the first handling gripper jaw (6) and the second handling gripper jaw (8) are respectively provided with two longitudinally distributed and vertically spaced gripper rubber pads (7).

7. The device for conveying the monocrystalline silicon material boxes according to claim 1, wherein the rear ends of the opposite sides of the first conveying gripper clamping jaw (6) and the second conveying gripper clamping jaw (8) are respectively provided with an in-place detection switch bracket (9) which is transversely distributed;

the two in-place detection switch brackets (9) are distributed in bilateral symmetry;

one end of each of the two in-place detection switch brackets (9) is provided with an in-place detection switch (10) respectively.

8. The device for conveying the monocrystalline silicon material box according to claim 7, wherein the two in-place detection switches (10) are respectively used for detecting the distance between the two in-place detection switches and the back side surface of the monocrystalline silicon material box body (27), when the distance is smaller than or equal to a preset distance value, a stop movement signal is sent to the existing six-axis robot, the existing six-axis robot is controlled to stop moving continuously within a preset time length, a driving contraction working signal is sent to the clamping telescopic cylinder (11), and the clamping telescopic cylinder (11) is controlled to contract, so that the first conveying gripper clamping jaw (6) and the second conveying gripper clamping jaw (8) clamp the monocrystalline silicon material box body (27).

9. The device for conveying silicon single crystal material boxes according to any one of claims 1 to 8, wherein a telescopic sliding control valve (21) and a telescopic sliding control valve protective cover (22) are arranged at the rear end of the left side surface of the main frame (5) of the conveying hand;

and the telescopic sliding control valve (21) is connected with the clamping telescopic cylinder (11) and is used for controlling the clamping telescopic cylinder (11) to transversely stretch and slide left and right.

10. The device for conveying the silicon single crystal material boxes according to any one of claims 1 to 8, wherein a first hand storage positioning block (24) and a second hand storage positioning block (25) are respectively arranged at the left end and the right end of the bottom of the main frame (5) for conveying the hand grips;

and the first gripper storing and positioning block (24) and the second gripper storing and positioning block (25) are respectively positioned right behind the first carrying gripper clamping jaw (6) and the second carrying gripper clamping jaw (8).

Images