CN115798841A - Thin film circuit pattern for high-precision resistance trimming and design method thereof - Google Patents
Thin film circuit pattern for high-precision resistance trimming and design method thereof Download PDFInfo
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- CN115798841A CN115798841A CN202211188335.1A CN202211188335A CN115798841A CN 115798841 A CN115798841 A CN 115798841A CN 202211188335 A CN202211188335 A CN 202211188335A CN 115798841 A CN115798841 A CN 115798841A
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Abstract
The invention relates to the technical field of thin film circuit patterns, in particular to a thin film circuit pattern for high-precision resistance trimming and a design method thereof. Comprises an electrode, a constant value circuit, a grading resistance adjusting circuit and a continuous resistance adjusting circuit. The constant value circuit comprises a plurality of resistance lines which are connected in series and in parallel and is used for providing a certain resistance basic value; the grading resistance trimming circuit comprises a plurality of parallel resistance lines which are connected together in series and used for increasing the resistance value when the resistance trimming is carried out and approaching a target resistance; the continuous resistance adjusting circuit is connected with the constant value circuit and is vertical to a resistance line of the constant value circuit for fine adjustment of resistance. The graded resistance adjusting circuit can realize that the resistance increment changes according to the parabolic rule during resistance adjustment, thereby being capable of rapidly approaching the target resistance value, reducing the heat generated by resistance adjustment and improving the precision of resistance adjustment. The design method for the high-precision resistance trimming thin film pattern comprises the steps of determining parameters before design, designing a constant value circuit, designing a graded resistance trimming circuit, designing a continuous resistance trimming circuit, optimizing circuit layout and the like.
Description
Technical Field
The present invention relates to a thin film circuit pattern, and more particularly, to a thin film circuit pattern for high precision resistance trimming and a method for designing the same.
Background
The film platinum resistance temperature sensor utilizes the resistance-temperature relation of metal platinum to measure the temperature, and the relevant standard specifies the resistance value at 0 ℃ and further specifies the resistance values of other temperature points, so the precision of the resistance value at 0 ℃ directly influences the precision of the measured temperature. In actual production, due to the influence of design errors, preparation process errors and the like, the resistance of the thin film pattern fluctuates within a certain range, and in order to realize the consistency of devices and improve the measurement accuracy, the resistance of the thin film pattern needs to be modified and adjusted with high accuracy. In order to meet the requirement of mass production, a laser resistance trimming mode is mostly adopted at present, namely, the laser rapid cutting trimming thin film circuit is utilized to realize resistance trimming, a large amount of heat which is easily generated in the process causes the change of the resistance value to be trimmed, and then the resistance trimming process is interfered, and the precision of the resistance trimming is influenced, so that a thin film circuit pattern for high-precision resistance trimming needs to be designed.
Patent CN113284688A discloses a pattern of two fine tuning line high temperature film platinum resistance, adds a short fine tuning line on long fine tuning line's basis, utilizes the heat that the secondary fine tuning reduced laser and produced, compensaties the error that the heat produced when cutting long fine tuning line for the first time leads to, improves the precision of transferring the resistance. It does not disclose a specific pattern structure other than the fine adjustment lines, and still requires cutting of long fine adjustment lines and requires two fine adjustments.
Patent CN111609947A discloses a high-precision temperature sensor chip circuit structure, which comprises a main resistor strip, a plurality of resistance adjusting circuits and a plurality of resistance adjusting sheets. The resistance adjusting circuit comprises a plurality of constant value resistance strips and a short circuit resistance strip, the constant value resistance strips are connected in parallel with one section of the main resistance strip after being connected in series, the short circuit resistance strip is connected in parallel with the independent constant value resistance strip and the main resistance strip, and resistance values are sequentially increased by designing different constant value resistance strips and cutting the short circuit resistance strip. However, each level of the resistance trimming circuit needs a plurality of constant value resistance strips, the resistance increment is the same or decreases linearly when the resistance trimming of each level is carried out, the resistance trimming circuits of a plurality of levels need to be cut when the resistance trimming is carried out, and the constant value resistance strips also need to be cut for a plurality of times in each level of the resistance trimming circuit, so that the resistance trimming circuit needs to occupy a large area, and meanwhile, the continuous cutting for a plurality of times is not beneficial to reducing heat. In addition, this patent does not disclose a method of designing the pattern thereof.
Disclosure of Invention
The present invention is directed to solve the above-mentioned drawbacks, and provides a thin film circuit pattern for high precision resistance trimming and a method for designing the same. According to the invention, the constant value circuit and the resistance adjusting circuit are designed in the pattern, and the plurality of parallel resistors are designed in the resistance adjusting circuit, so that the resistance increment is changed according to the parabolic rule during resistance adjustment, the times of cutting a resistor line by laser during resistance adjustment are greatly reduced, only one fine adjusting line is needed, a large amount of heat generated by cutting a long fine adjusting line is avoided, and the precision of resistance adjustment is improved.
In order to overcome the defects in the background art, the technical scheme adopted by the invention for solving the technical problems is as follows: a thin film circuit pattern for high precision resistance trimming comprising: the device comprises electrodes, a fixed value circuit, a stepped resistance regulating circuit and a continuous resistance regulating circuit.
The electrode is used for connecting an external lead and can be used as a bonding pad to be electrically connected with the outside.
The constant value circuit is a combination of a plurality of resistor lines connected in series and in parallel and is used for providing a certain resistor base value smaller than a target resistance value, on the basis, resistance is adjusted to increase the resistance value, and the constant value circuit is connected with the electrodes;
the grading resistance adjusting circuit comprises a plurality of parallel resistance lines which are connected in series and used for realizing the resistance value rise during resistance adjustment so as to approach a target resistance value;
the continuous resistance adjusting circuit is a resistance line perpendicular to the constant value circuit and is connected with the constant value circuit.
The total resistance value of the constant value circuit is 70% -85% of the target resistance value.
The grading resistance adjusting circuit realizes resistance increment of different levels when adjusting resistance.
The single-level maximum resistance increment in the hierarchical resistance adjusting circuit is 13% -14% of the target resistance value.
The graded resistance adjusting circuit realizes that the increment of the resistance value decreases progressively according to the parabolic relation during resistance adjustment.
The grading resistance trimming circuit, the fixed value circuit and the line width are kept consistent.
The laser cutting mode which can be applied to the grading resistance adjusting circuit is linear cutting or laser point cutting.
The continuous resistance trimming circuit is a resistor strip vertical to the constant value circuit and used for fine trimming of the resistors after graded resistance trimming, and finally the target resistance value is achieved.
The continuous resistance trimming circuit is a short resistor strip.
The line width of the continuous resistance adjusting circuit is 5-8 times of the line width of the constant value circuit.
The laser cutting mode which can be applied to the continuous resistance regulating circuit can be linear cutting and L-shaped cutting.
A thin film circuit pattern design method for high-precision resistance trimming comprises the following steps:
s1, determining parameters before design, including:
s101, determining a target resistance value;
s102, determining the resistivity of the film;
s103, determining the line width of the circuit;
s104, determining a resistance error formed by pattern preparation under the current line width;
s2, designing a constant value circuit, comprising:
s201, designing a fixed value circuit total resistance value comprising an upper error limit and a lower error limit to be 70% -85% of a target resistance value;
s202, determining the length of a resistance line of the constant value circuit according to the design value of the resistance of the constant value circuit, the resistivity of the thin film, the thickness of the thin film and the design line width;
s3, designing a resistance adjusting circuit, comprising:
s301, designing a plurality of parallel resistance lines to form a resistance adjusting circuit;
s302, designing the maximum resistance increment including the error upper limit as 13% -14% of the target resistance, and designing a first parallel resistance in the resistance regulating circuit according to the maximum resistance increment;
and S303, designing the rest parallel resistors in the hierarchical resistance regulating circuit according to the rule that the increment of the resistors is decreased in a parabolic manner.
S4, designing a continuous resistance regulating circuit, comprising:
s401, designing the resistance line width of the continuous resistance trimming circuit to be 5-8 times of the line width of the constant value circuit;
s402, designing the length of a resistance line of the continuous resistance trimming circuit to be 10-15 times of the line width of the constant value circuit.
S5, optimizing the circuit layout, comprising:
s501, adjusting the grading resistance trimming circuit to enable the resistance trimming points to be located on the same side;
s502, adjusting the continuous resistance trimming circuit to enable the continuous resistance trimming circuit and the stepped resistance trimming circuit to be positioned on the same side;
and S503, adjusting the fixed value circuit to form a compact structure together with the stepped resistance trimming circuit.
The invention has the beneficial effects that: the thin film circuit pattern for high-precision resistance trimming comprises electrodes, a constant value circuit, a grading resistance trimming circuit and a continuous resistance trimming circuit. The resistance trimming circuit comprises a plurality of parallel resistors, the parallel resistors can be cut by laser when the resistance trimming is carried out, the parallel relation is changed, the resistance rising is realized, the resistance increment of each parallel resistor during the resistance trimming in the resistance trimming circuit is changed in a parabolic rule, the laser cutting times can be greatly reduced, and the occupied area of the resistance trimming circuit is reduced. In addition, the thin film circuit pattern for high-precision resistance trimming only needs to cut one fine trimming line in the continuous resistance trimming part, so that the heat generated by cutting is reduced, and the precision of resistance trimming is improved.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic diagram of a thin film circuit pattern for high precision resistance trimming according to the present invention;
FIG. 2 is a schematic structural diagram of the resistance increment of the stepped resistance trimming circuit in parabolic regular change during resistance trimming;
FIG. 3 is a schematic structural diagram of a thin film circuit pattern design method according to an embodiment of the present invention.
Wherein: 100 is an electrode, 200 is a constant value circuit, 301-310 are graded resistance regulating circuits, and 400 is a continuous resistance regulating circuit.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
A thin film circuit pattern for high-precision resistance trimming comprises electrodes, a constant value circuit, a grading resistance trimming circuit and a continuous resistance trimming circuit.
The electrode is used for connecting an external lead and can be used as a bonding pad to be electrically connected with the outside.
The constant value circuit is a combination of a plurality of resistor lines which are connected in series and in parallel and is used for providing a certain resistor base value which is smaller than a target resistance value, and on the basis, the resistance is adjusted to increase the resistance value, and the constant value circuit is connected with the electrodes;
the grading resistance trimming circuit comprises a plurality of parallel resistance lines which are connected in series and used for realizing resistance value rise during resistance trimming so as to approach a target resistance value;
the continuous resistance adjusting circuit is a resistance line perpendicular to the constant value circuit and is connected with the constant value circuit.
The total resistance value of the constant value circuit is 70% -85% of the target resistance value.
The stepped resistance adjusting circuit realizes resistance increment of different levels during resistance adjustment.
The single-level maximum resistance increment in the grading resistance adjusting circuit is 13% -14% of the target resistance value.
The graded resistance regulating circuit realizes that the increment of the resistance value is decreased progressively according to the parabolic relation during the resistance regulation.
The grading resistance trimming circuit and the fixed value circuit are consistent with the line width.
The laser cutting mode applicable to the stepped resistance trimming circuit is linear cutting or laser spot cutting.
The continuous resistance trimming circuit is a resistor strip vertical to the constant value circuit and used for fine trimming of the resistor after graded resistance trimming, and finally the target resistance value is achieved.
The continuous resistance trimming circuit is a short resistor strip.
The line width of the continuous resistance adjusting circuit is 5-8 times of the line width of the constant value circuit.
The laser cutting method applicable to the continuous resistance trimming circuit can be linear cutting and L-shaped cutting.
A thin film circuit pattern design method for high-precision resistance trimming comprises the following steps:
s1, determining parameters before design, including:
s101, determining a target resistance value;
s102, determining the resistivity of the film;
s103, determining the line width of the circuit;
s104, determining a resistance error formed by pattern preparation under the current line width;
s2, designing a constant value circuit, comprising:
s201, designing a total resistance value of a fixed value circuit comprising an upper error limit and a lower error limit to be 70% -85% of a target resistance value;
s202, determining the length of a resistance line of the constant value circuit according to the design value of the resistance of the constant value circuit, the resistivity of the thin film, the thickness of the thin film and the design line width;
s3, designing a resistance adjusting circuit, comprising:
s301, designing a plurality of parallel resistance lines to form a resistance adjusting circuit;
s302, designing the maximum resistance increment including the error upper limit as 13% -14% of the target resistance, and designing a first parallel resistance in the resistance regulating circuit according to the maximum resistance increment;
s303, designing the rest parallel resistors in the hierarchical resistance regulating circuit according to the rule that the resistor increment is decreased in a parabolic manner;
s4, designing a continuous resistance adjusting circuit, which comprises the following steps:
s401, designing the resistance line width of the continuous resistance trimming circuit to be 5-8 times of the line width of the constant value circuit;
s402, designing the length of a resistance line of the continuous resistance trimming circuit to be 10-15 times of the line width of the constant value circuit;
s5, optimizing the circuit layout, comprising:
s501, adjusting the grading resistance trimming circuit to enable the resistance trimming points to be located on the same side;
s502, adjusting the continuous resistance trimming circuit to enable the continuous resistance trimming circuit and the stepped resistance trimming circuit to be positioned on the same side;
and S503, adjusting the fixed value circuit to form a compact structure together with the stepped resistance trimming circuit.
Example (b):
as shown in FIG. 1, the circuit includes an electrode 100, a constant value circuit 200, a step trimming circuit 301-310, and a continuous trimming circuit 400. The electrode 100 is to be connected to an external lead wire to achieve electrical connection; the constant value circuit 200 is connected to the electrode 100 to provide a certain resistance value. When the resistance adjusting circuit is applied to resistance adjustment, the resistance value is increased on the resistance value of the constant value circuit 200; the grading resistance adjusting circuit is formed by connecting a plurality of parallel resistance lines which are connected in series, is connected with the constant value circuit and is used for adjusting resistance, the resistances in the 301-310 parallel resistance lines are sequentially increased, and the resistance increment is changed according to a parabolic rule when the resistance is adjusted, as shown in fig. 2. The trimming circuit and the setting circuit are consistent in line frame, the reserved laser cutting position of the grading trimming circuit is located on the same side, and the continuous trimming circuit 400 is connected with the setting circuit 200, is perpendicular to the resistance line of the setting circuit and is located on the same side as the reserved laser cutting position of the grading trimming circuit.
A design method of a thin film circuit pattern for high-precision resistance trimming comprises the steps of determining parameters before design, designing a constant value circuit 200, designing hierarchical resistance trimming circuits 301-310, designing a continuous resistance trimming circuit 400 and the like, and is shown in figure 3.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (8)
1. A thin film circuit pattern for high-precision resistance trimming is characterized by comprising electrodes, a fixed value circuit, a graded resistance trimming circuit and a continuous resistance trimming circuit;
the electrode is used for connecting an external lead and can be used as a bonding pad to realize electric connection;
the constant value circuit is a combination of a plurality of resistance lines connected in series and in parallel, and is connected with the electrodes;
the grading resistance regulating circuit comprises a plurality of parallel resistance lines which are connected together in series;
the continuous resistance adjusting circuit is a resistance line perpendicular to the constant value circuit and is connected with the constant value circuit.
2. The thin film circuit pattern for high precision resistance trimming of claim 1, wherein the constant circuit resistance value is 70% to 85% of the target resistance value.
3. A thin film circuit pattern for high precision resistance trimming as claimed in claim 1, wherein said stepped resistance trimming circuit realizes different levels of resistance increment in the resistance trimming.
4. The thin film circuit pattern for high precision resistance trimming of claim 1, wherein the maximum resistance increment of a single level in the stepped resistance trimming circuit is 13% to 14% of the target resistance value.
5. A thin film circuit pattern for high precision resistance trimming as claimed in claim 1, wherein in said stepped resistance trimming circuit, the resistance increments of different levels are changed in a parabolic rule.
6. The thin film circuit pattern for high precision trimming as claimed in claim 1, wherein the constant value circuit and the stepped trimming circuit have a uniform line width.
7. The thin film circuit pattern for high precision trimming as claimed in claim 1, wherein the continuous trimming circuit resistor line width is 5 to 8 times the constant circuit line width, and the continuous trimming circuit resistor line length is 10 to 15 times the constant circuit line width.
8. The method of designing a thin film circuit pattern for high precision resistance trimming as claimed in claim 1, wherein the designing method comprises the steps of:
s1, determining parameters before design, including:
s101, determining a target resistance value;
s102, determining the resistivity of the film;
s103, determining the line width of the circuit;
s104, determining a resistance error formed by pattern preparation under the current line width;
s2, designing a constant value circuit, comprising:
s201, designing a fixed value circuit total resistance value comprising an upper error limit and a lower error limit to be 70% -85% of a target resistance value;
s202, determining the length of a resistance line of the constant value circuit according to the design value of the resistance of the constant value circuit, the resistivity of the thin film, the thickness of the thin film and the design line width;
s3, designing a resistance adjusting circuit, comprising:
s301, designing a plurality of parallel resistance lines to form a resistance adjusting circuit;
s302, designing the maximum resistance increment including the upper error limit as 13% -14% of the target resistance, and designing a first parallel resistance in the resistance regulating circuit according to the maximum resistance increment;
s303, designing the rest parallel resistors in the grading resistance regulating circuit according to the rule that the resistor increment is gradually decreased by a parabola;
s4, designing a continuous resistance adjusting circuit, which comprises the following steps:
s401, designing the line width of the resistance of the continuous resistance trimming circuit to be 5-8 times of the line width of the constant value circuit;
s402, designing the length of a resistance line of the continuous resistance trimming circuit to be 10-15 times of the line width of the constant value circuit;
s5, optimizing the circuit layout, comprising:
s501, adjusting the grading resistance trimming circuit to enable the resistance trimming points to be located on the same side;
s502, adjusting the continuous resistance trimming circuit to enable the continuous resistance trimming circuit and the stepped resistance trimming circuit to be positioned on the same side;
and S503, adjusting the fixed value circuit to form a compact structure together with the stepped resistance trimming circuit.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211188335.1A CN115798841A (en) | 2022-09-28 | 2022-09-28 | Thin film circuit pattern for high-precision resistance trimming and design method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211188335.1A CN115798841A (en) | 2022-09-28 | 2022-09-28 | Thin film circuit pattern for high-precision resistance trimming and design method thereof |
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| Publication Number | Publication Date |
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| CN115798841A true CN115798841A (en) | 2023-03-14 |
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| CN202211188335.1A Pending CN115798841A (en) | 2022-09-28 | 2022-09-28 | Thin film circuit pattern for high-precision resistance trimming and design method thereof |
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- 2022-09-28 CN CN202211188335.1A patent/CN115798841A/en active Pending
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