CN103646739A - Thin film thermistor and resistance adjusting method thereof - Google Patents
Thin film thermistor and resistance adjusting method thereof Download PDFInfo
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- CN103646739A CN103646739A CN201310651609.0A CN201310651609A CN103646739A CN 103646739 A CN103646739 A CN 103646739A CN 201310651609 A CN201310651609 A CN 201310651609A CN 103646739 A CN103646739 A CN 103646739A
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Abstract
The invention discloses a thin film thermistor and a resistance adjusting method thereof. The thin film thermistor comprises an insulating substrate, a pair of electrode couples arranged on the insulating substrate, and metal patterns which extend out of at least one of the pair of electrode couples and are used for adjusting the resistance. With the design of the electrode couples in a special structure, a fine adjustment cutting part for finely adjusting the resistance and a rough adjustment cutting part used for roughly adjusting the resistance are simultaneously designed on the metal patterns used for adjusting the resistance, and the rough adjustment cutting part is respectively inserted into a convex structure of a first electrode in the electrode couples, so that an effect of adjusting the resistance in a wider range can be achieved after the rough adjustment cutting part is cut, and the fine adjustment cutting part can have an effect of finely adjusting the resistance. Therefore, the thin film thermistor can simultaneously realize functions of fine adjustment and rough adjustment of the resistance.
Description
Technical field
The present invention relates to a kind of thin-film thermistor and resistance control method thereof, belong to electron ceramic material technical field.
Background technology
Because having the functions such as temperature-compensating and overcurrent protection, membranaceous thermistor is widely used in complicated integrated circuit.Conventionally adopt the technology such as silk screen printing and magnetron sputtering to prepare thermistor, because the thickness of thermosensitive film in the process in preparation cannot accurately be controlled, thereby the precision of uncontrollable membranaceous thermistor resistance.The membranaceous resistance of preparing like this, its resistance does not reach required precision, also needs the precision of carrying out resistance to regulate.
Industrial normal employing Ear Mucosa Treated by He Ne Laser Irradiation cuts to reach the object of controlling resistance resistance accuracy to thermosensitive film at present.But this method has the following disadvantages: the one, and the membranaceous resistance of temperature-sensitive has larger temperature coefficient of resistance, and the heat that Ear Mucosa Treated by He Ne Laser Irradiation produces can be passed to thermosensitive film, and the electrology characteristic of resistance time will change in cutting, therefore cannot fine adjustment resistance; The 2nd, Ear Mucosa Treated by He Ne Laser Irradiation can cause resistive film heating evaporation, and part will occur electric property changes; The 3rd, the thermal conductivity of membranaceous resistance insulation substrate is generally higher, must improve the power output of laser, and like this, the heat producing due to Ear Mucosa Treated by He Ne Laser Irradiation can cause the aging of resistor performance.In order to address this problem, Japan Patent JP-A-2001-35705 and publication number are that the patent of invention of CN1409329A all discloses a kind of thin-film thermistor and resistance control method thereof, specifically in dielectric substrate, form a pair of comb electrode, with Ear Mucosa Treated by He Ne Laser Irradiation, cut a part for electrode metal pattern, and not be used on thermosensitive film, cut.Although the resistance that this method can fine adjustment thin-film thermistor, only limits to the fine setting to resistance value; In above-mentioned patent documentation, also mention, when thin-film thermistor resistance is carried out to coarse adjustment, need to by secondary or repeatedly the method for plated film solve.And repeatedly plated film can not only can increase production cost, once and when the resistance of sample is in more lower than target resistance, in the time of outside resistor trimming scope, just can only discard sample.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind ofly both can carry out coarse adjustment to resistance, the thin-film thermistor that can finely tune resistance again and resistance control method thereof.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
Thin-film thermistor of the present invention, comprises dielectric substrate, is arranged on the pair of electrodes pair in dielectric substrate, and at least one from pair of electrodes stretched out the metallicity pattern regulating for resistance; Wherein: described in the electrode pair that is arranged in dielectric substrate comprise the first electrode and the second electrode, the first described electrode comprises the first branch and second branch all with repetition concave-convex structure, the recess of described the first branch is right against the recess of the second branch, and the protuberance of the first branch is right against the protuberance of the second branch; The second described electrode comprises the I-shaped branch with overlapping " work " character form structure feature, and the recess that the two ends of the horizontal end of described I-shaped branch are interspersed in respectively the first branch on the first electrode neutralizes in the recess of the second branch; The geometric center lines of described the first electrode and the second electrode coincides, and is symmetrical structure with this geometric center lines; Described metallicity pattern has the cutting part for cutting, described cutting part comprises that at least one is for finely tuning the fine setting cutting part of resistance and at least one coarse adjustment cutting part for coarse adjustment resistance, and described coarse adjustment cutting part is interspersed in the protuberance of the first branch on the first electrode and/or in the protuberance of the second branch.By the electrode pair of design special construction, for regulating, on the metallicity pattern of resistance, be designed with for finely tuning the fine setting cutting part of resistance and for the coarse adjustment cutting part of coarse adjustment resistance simultaneously simultaneously, and described coarse adjustment cutting part is interspersed in respectively in the protuberance structure of the first electrode in electrode pair, make after described coarse adjustment cutting part cutting, can play the effect of adjustment resistance in a big way; Fine setting cutting part can play the effect of fine setting resistance, and therefore, thin-film thermistor of the present invention can be realized coarse adjustment and the fine adjustment function of resistance simultaneously.
In technique scheme, the number of fine setting cutting part and coarse adjustment cutting part can be determined as required.In the application, the setting position of fine setting cutting part is not required, so long as be arranged on metallicity pattern, and on the interval between electrode pair and be convenient to the formation that thermosensitive film is also convenient in cutting.
In technique scheme, also comprise that one deck covers the thermosensitive film on a part for cutting part on described electrode pair and for cutting.The thickness of this thermosensitive film is according to experiment statistics value again through calculating, and when forming this thermosensitive film, the resistance of controlling the thermosensitive film forming is slightly lower than the target resistance (design load) of thermosensitive film.
In technique scheme, also comprise the diaphragm being arranged on thermosensitive film.
In technique scheme, can also comprise that one is arranged on the insulating coating on dielectric substrate primary flat, now described electrode pair is arranged on this insulating coating.
Thin-film thermistor of the present invention is made by existing conventional method.
The present invention also comprises the method for the resistance that regulates above-mentioned thin-film thermistor, comprises the following steps:
First, in dielectric substrate, form pair of electrodes to and the metallicity pattern that regulates for resistance, on electrode pair and on the part of cutting with cutting part, form certain thickness thermosensitive film, the thickness of described thermosensitive film is according to experiment statistics value and through calculating; When forming this thermosensitive film, the resistance of controlling the thermosensitive film forming is slightly lower than the target resistance of thermosensitive film;
Secondly, measure the above-mentioned resistance that has formed the sample of thermosensitive film, according to the resistance recording, relatively, with the deviation of target resistance, if deviation is larger, the coarse adjustment cutting part by cutting metal pattern carries out roughly adjusted rheostat; If deviation is less, the fine setting cutting part by cutting metal pattern carries out semifixed resistor, thereby resistance is adjusted to required value;
Finally, on the sample through resistance adjustment, form diaphragm.
In above-mentioned control method, before thin-film thermistor is made in batch production, need to carry out lab scales test that some make thin-film thermistors, according to the experiment statistics value in lab scale test, then when calculating batch production thin-film thermistor the thickness of thermosensitive film wherein.And these make lab scales test of thin-film thermistors, the thickness that calculates thermosensitive film according to the experiment statistics value in lab scale test is all those skilled in the art's common practise, be not described in detail in this.
Compared with prior art, feature of the present invention is:
1, by the electrode pair of design special construction, simultaneously for regulate the metallicity pattern of resistance to be designed with for finely tuning the fine setting cutting part of resistance and for the coarse adjustment cutting part of coarse adjustment resistance simultaneously, and described coarse adjustment cutting part is interspersed in the protuberance of the first branch of the first electrode and/or in the protuberance of the second branch, make can play the effect of adjustment resistance in a big way after coarse adjustment cutting part cutting that will be described; Fine setting cutting part can play the effect of fine setting resistance, and therefore, thin-film thermistor of the present invention can be realized coarse adjustment and the fine adjustment function of resistance simultaneously.
2, do not need by secondary or repeatedly plate the thin resistance coarse adjustment that realizes, not only having simplified operation, and saved production cost, percent defective also decreases.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of execution mode of thin-film thermistor of the present invention;
Fig. 2 is that Fig. 1 illustrated embodiment is along the profile of F-F line;
Fig. 3 is metallic electrode pattern and the structural representation to electrode in Fig. 1 illustrated embodiment.
Number in the figure is:
1 is dielectric substrate; 2 is the first electrode; 2a is the first branch; 2b is the second branch; 3 is the second electrode; 3a is I-shaped branch; 4 is coarse adjustment cutting part; 5 is fine setting cutting part; 6 is thermosensitive film; 7 is diaphragm.
Embodiment
In the execution mode shown in Fig. 1, thin-film thermistor of the present invention comprises dielectric substrate 1, be formed at pair of electrodes in dielectric substrate 1 to i.e. the first electrode 2 and the second electrode 3, and the metallicity pattern for resistance adjusting being electrically connected to the second electrode 3; The first described electrode 2 comprises the first 2a of branch and second 2b of branch with same structure, described the first 2a of branch and the second 2b of branch are the branch with repetition concave-convex structure, the recess of described the first 2a of branch is right against the recess of the second 2b of branch, and the protuberance of the first 2a of branch is also right against the protuberance of the second 2b of branch; The second described electrode 3 comprises the I-shaped 3a of branch with overlapping " work " character form structure feature, and the recess that the two ends of the horizontal end of the described I-shaped 3a of branch are interspersed in respectively the first 2a of branch on the first electrode 2 neutralizes in the recess of the second 2b of branch; The geometric center lines of described the first electrode 2 and the second electrode 3 coincides, and is symmetrical structure with this geometric center lines; Described metallicity pattern has the cutting part for cutting, described cutting part comprises that several are for finely tuning fine setting cutting part 5 and several coarse adjustment cutting parts 4 for coarse adjustment resistance of resistance, described fine setting cutting part 5 is arranged at arbitrarily on the interval between electrode pair, described coarse adjustment cutting part 4 can be interspersed in the protuberance of the first 2a of branch on the first electrode 2, also can be interspersed in the protuberance of the second 2b of branch, the protuberance that can also simultaneously be interspersed in the first 2a of branch neutralizes in the protuberance of the second 2b of branch.On described electrode pair and cutting with being also coated with one deck thermosensitive film 6 on a part for cutting part, the thickness of this thermosensitive film 6 passes through and calculates again according to experiment statistics value, when forming this thermosensitive film 6, the resistance of controlling the thermosensitive film 6 forming is slightly lower than the target resistance (design load) of thermosensitive film 6.On thermosensitive film 6, be also formed with layer protecting film 7.
The method that regulates the resistance of above-mentioned thin-film thermistor, comprises the following steps:
First, in dielectric substrate 1, form pair of electrodes to and the metallicity pattern that regulates for resistance, on electrode pair and on the part of cutting with cutting part, form certain thickness thermosensitive film 6, the thickness of described thermosensitive film 6 is according to experiment statistics value and through calculating; When forming this thermosensitive film 6, the resistance of controlling the thermosensitive film 6 forming is slightly lower than the target resistance of thermosensitive film 6;
Secondly, measure the above-mentioned resistance that has formed the sample of thermosensitive film 6, according to the resistance recording, relatively, with the deviation of target resistance, if deviation is larger, the coarse adjustment cutting part 4 by cutting metal pattern carries out roughly adjusted rheostat; If deviation is less, the fine setting cutting part 5 by cutting metal pattern carries out semifixed resistor, thereby resistance is adjusted to required value;
Finally, on the sample through resistance adjustment, form diaphragm 7.
Claims (4)
1. a thin-film thermistor, comprises dielectric substrate (1), is arranged on the pair of electrodes pair in dielectric substrate (1), and at least one from pair of electrodes stretched out the metallicity pattern regulating for resistance; It is characterized in that:
The described electrode pair being arranged in dielectric substrate (1) comprises the first electrode (2) and the second electrode (3), described the first electrode (2) comprises the first branch (2a) and second branch (2b) all with repetition concave-convex structure, the recess of described the first branch (2a) is right against the recess of the second branch (2b), and the protuberance of the first branch (2a) is right against the protuberance of the second branch (2b); Described the second electrode (3) comprises the I-shaped branch (3a) with overlapping " work " character form structure feature, and the recess that the two ends of the horizontal end of described I-shaped branch (3a) are interspersed in respectively upper the first branch of the first electrode (2) (2a) neutralizes in the recess of the second branch (2b); The geometric center lines of described the first electrode (2) and the second electrode (3) coincides, and is symmetrical structure with this geometric center lines;
Described metallicity pattern has the cutting part for cutting, described cutting part comprises that at least one is for finely tuning fine setting cutting part (5) and at least one coarse adjustment cutting part (4) for coarse adjustment resistance of resistance, and described coarse adjustment cutting part (4) is interspersed in the protuberance of upper the first branch of the first electrode (2) (2a) and/or in the protuberance of the second branch (2b).
2. thin-film thermistor according to claim 1, is characterized in that: also comprise that one deck covers the thermosensitive film (6) on a part for cutting part on described electrode pair and for cutting.
3. thin-film thermistor according to claim 2, is characterized in that: also comprise the diaphragm (7) being arranged on thermosensitive film (6).
4. regulate in claim 1～3 method of the resistance of thin-film thermistor described in any one, comprise the following steps:
Dielectric substrate (1) upper form pair of electrodes to and the metallicity pattern that regulates for resistance, on electrode pair and on the part of cutting with cutting part, form certain thickness thermosensitive film (6), the thickness of described thermosensitive film (6) is according to experiment statistics value and through calculating; When forming this thermosensitive film (6), the resistance of controlling the thermosensitive film (6) forming is slightly lower than the target resistance of thermosensitive film (6);
Secondly, measure the above-mentioned resistance that has formed the sample of thermosensitive film (6), according to the resistance recording, relatively, with the deviation of target resistance, if deviation is larger, the coarse adjustment cutting part (4) by cutting metal pattern carries out roughly adjusted rheostat; If deviation is less, the fine setting cutting part (5) by cutting metal pattern carries out semifixed resistor, thereby resistance is adjusted to required value;
Finally, on the sample through resistance adjustment, form diaphragm (7).
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| CN201310651609.0A CN103646739A (en) | 2013-12-06 | 2013-12-06 | Thin film thermistor and resistance adjusting method thereof |
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| CN201310651609.0A CN103646739A (en) | 2013-12-06 | 2013-12-06 | Thin film thermistor and resistance adjusting method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107134331A (en) * | 2017-04-27 | 2017-09-05 | 广东风华高新科技股份有限公司 | Thermistor resistance trimming method |
| CN111863365A (en) * | 2019-04-28 | 2020-10-30 | 深圳市杰普特光电股份有限公司 | Resistance trimming machine and resistance trimming method thereof |
| CN112201424A (en) * | 2020-10-22 | 2021-01-08 | 深圳市海纳特自动化科技有限公司 | Process for correcting resistance value by removing material |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1409329A (en) * | 2001-09-28 | 2003-04-09 | 石塚电子株式会社 | Thin film thermosensitive resistor and tis resistance valve regulating method |
-
2013
- 2013-12-06 CN CN201310651609.0A patent/CN103646739A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1409329A (en) * | 2001-09-28 | 2003-04-09 | 石塚电子株式会社 | Thin film thermosensitive resistor and tis resistance valve regulating method |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107134331A (en) * | 2017-04-27 | 2017-09-05 | 广东风华高新科技股份有限公司 | Thermistor resistance trimming method |
| CN107134331B (en) * | 2017-04-27 | 2019-08-16 | 广东风华高新科技股份有限公司 | Thermistor resistance trimming method |
| CN111863365A (en) * | 2019-04-28 | 2020-10-30 | 深圳市杰普特光电股份有限公司 | Resistance trimming machine and resistance trimming method thereof |
| CN112201424A (en) * | 2020-10-22 | 2021-01-08 | 深圳市海纳特自动化科技有限公司 | Process for correcting resistance value by removing material |
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Application publication date: 20140319 |