CN115752297A - Rotation angle degree detection system, method and application thereof - Google Patents
Rotation angle degree detection system, method and application thereof Download PDFInfo
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- CN115752297A CN115752297A CN202211386189.3A CN202211386189A CN115752297A CN 115752297 A CN115752297 A CN 115752297A CN 202211386189 A CN202211386189 A CN 202211386189A CN 115752297 A CN115752297 A CN 115752297A
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Abstract
The invention relates to a system and a method for detecting the degree of a corner and application thereof, wherein the system comprises a light source, a beam splitter, a collimating lens and a CCD receiver; the wedge-shaped wedge also comprises a wedge-shaped wedge and a rotation driving mechanism for driving the wedge-shaped wedge to rotate in the circumferential direction; the device also comprises a reflector and a deflection driving mechanism for driving the reflector to deflect; the device also comprises a detection mechanism for detecting the deflection angle of the reflector; light beams emitted by the light source sequentially pass through the beam splitter, the collimating lens and the wedge and then enter the reflector, the deflection driving mechanism can drive the reflector to deflect and enable the reflector to be perpendicular to the incident light beams, the light beams reflected by the reflector return along an incident path, and whether the reflector is perpendicular to the incident light beams or not is judged according to the positions of light spots on the CCD; the circumferential rotation angle of the wedge-shaped wedge is obtained through the deflection angle of the reflector measured by the detection mechanism. The invention can avoid the defects existing in the precision rotation angle measurement such as angle sensor calibration and the like at present, and has the effects of continuous measurement, smaller error and higher precision.
Description
Technical Field
The invention belongs to the technical field of angle measurement by taking an optical method as a characteristic in physical measurement, and particularly relates to a system and a method for detecting a rotation angle degree and application thereof.
Background
The angular transducer used in industrial production, such as the system for measuring the rotation angle of the circular grating, the time grating angular transducer and the like, hopes that the rotation measurement precision within the range of 360 degrees is high, and the precision which can be achieved at present is 2 'to 3'. In addition, in order to ensure the use accuracy of the angle sensor, the initial calibration and error detection of the angle sensor are also important, and the technical difficulty is higher. At present, the method mostly used is to use a standard multi-surface (such as a dodecahedron) prism as a carrier, fix angle sensors such as a circular grating and a time grating on the prism in a concentric manner, see fig. 1, which shows an octahedron, drive the prism 200 and the angle sensor 100 to rotate synchronously through a turntable (not shown in the figure), detect the surface of the prism after each rotation by using an autocollimator 300, and compare the detected rotation angle with the indication value of the angle sensor 100, thereby calibrating. Has the following disadvantages: 1. the processing of the polygon can cause the angle between the adjacent surfaces to have errors; 2. the processing errors among the surfaces of the multi-surface prisms can be accumulated by rotating for multiple times, so that the errors are increased, although the errors can be eliminated by utilizing the angle self-closing characteristic, the procedure is complicated, the time consumption is long, the requirement on the environment is high after long-time measurement, and additional errors are easily introduced due to factors such as vibration, temperature change and the like; 3. the eccentric problem exists when the angle sensor is fixedly arranged on the prism in a concentric mode, so that the calibrated rotating angle does not accord with the rotating angle indication value sensed by the angle sensor, and an eccentric error is generated; 4. the angle of each surface on a discrete side cannot be measured continuously; 5. the range of the autocollimator is small, the autocollimator is limited by the range of the autocollimator, the number of parts capable of subdividing the angle during detection is small, and the detection precision is difficult to improve by means of re-expansion in the mode. These deficiencies can affect and limit the accuracy of the angle sensor calibration.
The applicant provides an optical application principle of normal tracing in Chinese patents CN110926367B and CN110940298B, an f-theta angle detection system is adopted, a light beam incident to a surface to be detected is adjusted by means of a double-wedge mechanism, the light beam is incident to the surface to be detected in a normal incidence (vertical) mode, a reflection light path reflected from the surface to be detected returns along an original path of an incident path, normal tracing is achieved, a CCD detector detects the light beam, and required detection data of the surface to be detected are obtained through corresponding calculation according to circumferential rotation data of two single wedge-shaped wedges. Whether the principle can be effectively used in application scenes such as angle sensors and the like with precise rotation angle measurement requirements or not is determined, the technical effect is achieved as good as possible, the defects are overcome, and the technical problem considered and solved by the applicant is solved.
Disclosure of Invention
In view of the above-mentioned deficiencies of the prior art, the present invention provides a system, a method and an application for detecting a rotation angle degree, which can avoid the deficiencies of the current precision rotation angle measurement such as calibration of an angle sensor, and obtain the effects of continuous measurement, smaller error, and contribution to expansion and improvement of detection precision.
In order to solve the technical problems, the invention adopts the following technical scheme:
the corner degree detection system comprises a light source, a beam splitter, a collimating lens and a CCD receiver,
the wedge-shaped wedge mechanism further comprises a wedge-shaped wedge and a rotation driving mechanism for driving the wedge-shaped wedge to rotate circumferentially, so that the direction of a light beam is changed by rotating the wedge-shaped wedge;
the device also comprises a reflector and a deflection driving mechanism for driving the reflector to deflect so as to enable the reflector to be vertical to an incident light beam through deflection;
the deflection angle detection mechanism is used for detecting the deflection angle of the reflector;
the light beam emitted by the light source sequentially passes through the beam splitter, the collimating lens and the wedge, the light beam passing through the wedge is incident to the reflector, the deflection driving mechanism can drive the reflector to deflect and enable the reflector to be vertical to the incident light beam, the light beam reflected by the reflector returns along an incident path, forms a light spot on the CCD receiver after sequentially passing through the wedge, the collimating lens and the beam splitter, and judges whether the reflector is vertical to the incident light beam or not according to the forming position of the light spot; the circumferential rotation angle of the wedge-shaped wedge is obtained through the deflection angle of the reflector measured by the deflection angle detection mechanism. Specifically, the collimating lens and the CCD receiver form an f-theta angle measuring device, the reflecting beam angle of the reflector can be calculated through the forming position of the light spot, and whether the reflector is vertical to the incident beam is judged through whether the reflecting beam angle is zero or not; when the angle of the reflected light beam is close to zero, the reflected light beam returns close to the normal, various errors in the light path system tend to zero, and the circumferential rotation angle of the wedge is obtained through the deflection angle of the reflector measured by the deflection angle detection mechanism and the measurement angle of the f-theta device.
Further perfecting the technical scheme, the deflection angle detection mechanism is a laser interferometer or a deflection table capable of displaying the deflection angle. The vertex angle of the wedge-shaped wedge, the range of the deflection angle detection mechanism and the like are related to the detection precision of the system, and can be set according to the detection precision requirement, preferably, when the refractive index of the optical wedge is 1.5, the vertex angle of the wedge-shaped wedge is 8 degrees, the range of the deflection angle detection mechanism is 8 degrees, and the deflection measurement precision is 0.1 ', and the detection precision of 360 DEG rotation angle is superior to 2'.
The invention also relates to a corner degree detection method, which comprises a light source, a beam splitter, a collimating lens, a CCD receiver, a wedge-shaped wedge and a reflector;
the light beam emitted by the light source sequentially passes through the beam splitter, the collimating lens and the wedge, and the light beam passing through the wedge is incident to the reflector;
the wedge-shaped wedge can rotate circumferentially and change the direction of the light beam passing through the wedge-shaped wedge through rotation, the reflector can deflect and enables the reflector to be vertical to the incident beam through deflection, specifically, after the wedge rotates in the circumferential direction and changes the direction of the beam passing through the wedge, the deflection angle can be calculated by measuring the angle through an f-theta device, the deflection driving mechanism drives the reflector to deflect according to the calculated deflection angle and enables the reflector to be perpendicular to an incident beam, and the process can be repeatedly corrected for many times.
The light beam reflected by the reflector returns along an incident path, forms a light spot on the CCD receiver after sequentially passing through the wedge, the collimating lens and the beam splitter, and can judge whether the reflector is vertical to the incident light beam or not through the forming position (the angle measured by the f-theta device) of the light spot;
and acquiring the deflection angle of the reflector, and calculating to obtain the circumferential rotation angle of the wedge through the deflection angle of the reflector, the vertex angle of the wedge and the angle measured by the f-theta device.
Furthermore, the deflection angle of the reflecting mirror is obtained through two laser interferometers,
taking the light beam direction between the collimating lens and the wedge-shaped wedge as a Z axis, wherein the Z axis is horizontal, and an X axis and a Y axis are arranged to be vertical to the Z axis;
when the reflecting mirror deflects, one laser interferometer detects the swinging amount of the reflecting mirror with the X axis as the rotation center and calculates to obtain a rotation angle alpha, the other laser interferometer detects the swinging amount of the reflecting mirror with the Y axis as the rotation center and calculates to obtain a rotation angle beta,
and calculating the circumferential rotation angle of the wedge by combining the value of alpha or beta or the values of alpha and beta with the vertex angle of the wedge and the measured angle of the f-theta device.
Furthermore, the circumferential rotation angle range of the wedge-shaped wedge is 360 degrees, and the circumferential rotation angle range of the wedge-shaped wedge is equally divided into four regions;
in the same region, when a light beam incident to the reflector is close to an X axis, calculating the circumferential rotation angle of the wedge by combining a beta value with the vertex angle of the wedge and the f-theta device measurement angle;
when the light beam incident to the reflecting mirror is close to the Y axis, the circumferential rotation angle of the wedge is calculated by combining the alpha value with the vertex angle of the wedge and the f-theta device measurement angle.
The invention also relates to the application of the angle degree detection system, the piece to be calibrated, the rotation angle of which needs to be detected, is synchronously and rotatably arranged on the wedge,
the light beam emitted by the light source is incident on the reflector after sequentially passing through the beam splitter, the collimating lens and the wedge;
driving the reflector to deflect through the deflection driving mechanism and enabling the reflector to be perpendicular to the incident light beam, and acquiring the deflection angle of the reflector through the deflection angle detection mechanism;
the wedge-shaped wedge is driven by the rotation driving mechanism to rotate in the circumferential direction for a certain angle and then stop, the direction of a light beam passing through the wedge-shaped wedge is changed, the to-be-calibrated piece synchronously rotates along with the wedge-shaped wedge, the measurement angle of the f-theta device deviates from zero, the light beam reflected by the reflector deviates from the normal direction, and the measurement angle error of the f-theta device is large;
driving the reflector to deflect through the deflection driving mechanism again, enabling the reflector to be perpendicular to the incident light beam, and acquiring the deflection angle of the reflector through the deflection angle detection mechanism; specifically, a deflection angle is calculated according to the measured angle of the f-theta device, a deflection angle of a reflector is set, the reflector is close to be perpendicular to an incident beam, a reflected beam returns close to an original path, errors introduced by each optical element tend to be zero, and a deflection angle detection mechanism obtains the deflection angle of the reflector and the measured angle of the precise f-theta device;
the deflection angle of the reflector obtained twice is combined with the apex angle of the wedge and the f-theta device to measure the angle, the change amount of the wedge in the beam direction before and after rotation can be calculated, the circumferential rotation angle of the wedge is further obtained, and the rotation angle of the to-be-calibrated piece is correspondingly obtained.
Furthermore, the part to be calibrated is an angle sensor, and the angle sensor is synchronously rotated and sleeved on the wedge-shaped wedge;
and comparing the rotation angle indication of the angle sensor with the calculated circumferential rotation angle of the wedge, so that the angle sensor can be calibrated.
Compared with the prior art, the invention has the following beneficial effects:
1. the rotation angle degree detection system reversely uses a normal tracing principle, and calculates the circumferential rotation angle of the wedge through the deflection angle of the reflector; the circumferential rotation angle of the wedge-shaped wedge is not limited, the measurement of any rotation angle within 360 degrees, namely continuous measurement, can be realized, and the circumferential rotation angle value can be obtained by correspondingly calculating the deflection angle of the reflector; the error introduction is less, and the machining error and the accumulated error of the prism working face in the detection of the polygon method do not exist.
2. The corner degree detection system is suitable for calibrating high-precision angle measuring instruments such as circular gratings, time grating angle sensors and the like; the to-be-calibrated piece is synchronously rotated and sleeved on the wedge, eccentric errors do not exist, and when the device is used, the eccentricity only causes azimuth deviation of a light beam, and deviation of angle change cannot be caused.
3. In the corner degree detection system and method, the deflection angle of the reflector can be acquired in a larger range based on the existing detection mode, and the apex angle of the wedge can be selected to be larger correspondingly, so that more subdivided parts of the angle can be obtained in the detection of the deflection angle of the reflector, higher measurement and calculation precision of the circumferential rotation angle of the wedge can be obtained under the same precision, and the system has good expansibility for improving the detection precision of the system on the corner.
Drawings
FIG. 1 is a schematic diagram of a prior art circular grating calibration method;
FIG. 2 is a schematic diagram of a system for detecting a rotation angle according to an embodiment;
FIG. 3 is a schematic structural diagram of the angle degree detection system applied to angle sensor calibration according to the embodiment;
FIG. 4 shows an embodiment of [ - π/4, π/4 [ -]In the range of
An error estimate map;
FIG. 5 shows the results of the examples in [ π/4,3 π/4 ]]Within the range of
An error estimate map;
FIG. 6 shows the values in [3 π/4,5 π/4 ] in the examples]In the range of
An error estimate value view;
FIG. 7 shows examples of the preferred embodiments of the present invention at [5 π/4,7 π/4]Within the range of
An error estimate map;
the device comprises a light source 1, a beam splitter 2, a collimating lens 3, a wedge-shaped wedge 4, a reflector 5, a CCD receiver 6, an angle sensor 100, a prism 200 and an autocollimator 300.
Detailed Description
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
Referring to fig. 2, the system for detecting angular degree according to the embodiment includes a light source 1, a beam splitter 2, a collimating lens 3, and a CCD receiver 6;
the wedge-shaped wedge 4 and a rotation driving mechanism (not shown in the figure) for driving the wedge-shaped wedge 4 to rotate circumferentially are further included, so that the direction of the light beam is changed by rotating the wedge-shaped wedge 4;
a reflector 5 and a deflection driving mechanism (not shown in the figure) for driving the reflector 5 to deflect so as to make the reflector 5 perpendicular to the incident light beam by deflection;
a yaw angle detection mechanism (not shown in the figure) for detecting a yaw angle of the reflecting mirror 5;
the light beam emitted by the light source 1 is reflected by the beam splitter 2 and then sequentially passes through the collimating lens 3 and the wedge-shaped wedge 4, the direction of the light beam passing through the wedge-shaped wedge 4 is changed, the light beam deviates from the optical axis and is incident on the reflector 5, the deflection driving mechanism can drive the reflector 5 to deflect and enable the reflector 5 to be perpendicular to the incident light beam, the light beam reflected by the reflector 5 returns along the original incident path, and forms a light spot on the CCD receiver 6 after sequentially passing through the wedge-shaped wedge 4, the collimating lens 3 and the beam splitter 2, and whether the reflector 5 is perpendicular to the incident light beam is judged according to the forming position of the light spot; specifically, the collimating lens 3 and the CCD receiver 6 form an f-theta angle measuring device for measuring an angle, and whether the reflector 5 is perpendicular to the incident light beam or not is judged by measuring the angle through the f-theta angle measuring device; the circumferential rotation angle of the wedge-shaped wedge 4 can be calculated by measuring the deflection angle of the reflector 5 through the deflection angle detection mechanism and combining the apex angle of the wedge-shaped wedge 4 and the angle measured by the f-theta device.
The rotation angle degree detection system of the embodiment reversely uses the normal tracing principle, calculates the circumferential rotation angle of the wedge-shaped wedge 4 through the deflection angle of the reflector 5, and has good technical effects: (1) the circumferential rotation angle of the wedge-shaped wedge 4 is not limited, the measurement of any rotation angle within 360 degrees, namely continuous measurement, can be realized, and the circumferential rotation angle value can be obtained through calculating the corresponding deflection angle of the reflector 5; (2) the error introduction is less, the processing error and the accumulated error of the working surface of the prism in the detection of a multi-surface prism method do not exist, only the physical value of 4 vertex angle degrees of the wedge is introduced, but the introduced vertex angle degrees are unchanged in the calculation process, so the introduced vertex angle degrees can be ignored; (3) if the piece to be calibrated is synchronously and rotatably arranged on the wedge-shaped wedge 4, the eccentricity error does not exist, in the system, the eccentricity only causes the azimuth deviation of the light beam, but does not cause the deviation of angle change; (4) in the mode of the system, the acquisition of the deflection angle of the reflector 5 can have a larger range based on the existing detection mode, and correspondingly, the apex angle of the wedge-shaped wedge 4 can be selected to be larger, so that in the detection of the deflection angle of the reflector 5, more subdivided parts can be made, under the same precision, higher measurement and calculation precision of the circumferential rotation angle of the wedge-shaped wedge 4 can be obtained, and the detection precision of the system on the rotation angle can be well expanded and improved.
When the device is implemented, the rotation driving mechanism, the deflection driving mechanism and the deflection angle detection mechanism can all adopt the prior art. For example, the rotary driving mechanism can be a simple plane rotary supporting frame which is rotatably connected with the wedge-shaped wedge 4, the rotary driving source can be manually or electrically controlled and can be used for experimental development and testing, manual rotation can be realized, and automatic control is mostly adopted when the rotary driving mechanism is used as engineering. For example, the yaw driving mechanism may be a simple spherical hinge bracket connected to the back of the reflector 5 as a test development test, and the yaw driving source may be manually operated, and more conveniently selected from an existing XYZ-direction multidimensional yaw table connected to the back of the reflector 5, that is, a mechanical structure and power for the yaw movement of the reflector 5 may be provided, and meanwhile, the existing yaw table may also display a required yaw angle in XYZ-direction, and simultaneously has a function of a yaw angle detection mechanism.
The use of a laser interferometer as the yaw angle detection mechanism will be described in detail. The deflection angle of the reflecting mirror 5 is obtained through two laser interferometers, when the laser wedge is used, the beam direction between the collimating lens 3 and the wedge-shaped wedge 4 is taken as a Z axis, the Z axis is horizontal, an X axis and a Y axis are arranged to be perpendicular to the Z axis, the X axis is vertical, and the Y axis is horizontal; when the reflecting mirror 5 deflects, one laser interferometer detects the swinging amount of the reflecting mirror 5 by taking the X axis as a rotation center and calculates to obtain a rotation angle alpha, the other laser interferometer detects the swinging amount of the reflecting mirror 5 by taking the Y axis as the rotation center and calculates to obtain a rotation angle beta, and the circumferential rotation angle of the wedge-shaped wedge 4 is calculated by combining the value of alpha or beta or the value of alpha and beta, the vertex angle of the wedge-shaped wedge 4 and the angle measured by the f-theta device. Specifically, since the circumferential rotation angle range of the wedge 4 is 360 °, it is preferable to equally divide the circumferential rotation angle range of the wedge 4 into four regions;
in the same region, when a light beam incident to the reflector 5 is close to an X axis, calculating the circumferential rotation angle of the wedge-shaped wedge 4 by combining a beta value with the vertex angle of the wedge-shaped wedge 4 and the f-theta device measurement angle;
when the light beam incident to the reflecting mirror 5 is close to the Y axis, the circumferential rotation angle of the wedge-shaped wedge 4 is calculated by combining the alpha value with the vertex angle of the wedge-shaped wedge 4 and the f-theta device measurement angle.
When the beam passes through the wedge (wedge 4), it will deviate from the beam by an angle theta, which is determined by the wedge apex angle and the refractive index of the wedge material, e.g., when the wedge apex angle is 100 ", the wedge material refractive index is 1.5, and the beam angle is 50" from the optical axis. When the optical wedge rotates
After an angle, the outgoing light vector can be expressed as:
when the deflection angle of the reflector is zero, the vector of the direction of the reflected light is as follows:
at this time, the f-theta device measures the angle (eta) AC ,ζ AC ) Satisfies the following conditions:
Δη AC ，Δζ AC and angle measurement errors are introduced for aberration, processing errors and the like in the optical path system. Setting the deflection angle alpha of the reflector at this time = -eta AC ，β＝-ζ AC The light beam is close to the optical axis and returns, and the f-theta device measures the angle eta due to the normal tracking angle measurement characteristic AC1 →0，ζ AC1 →0，Δη AC1 →0，Δζ AC1 →0。
At the moment, each component of the emergent light vector of the optical wedge meets the following conditions:
by precise (alpha, beta) and (eta) AC ,ζ AC ) The value can be calculated to obtain the accurate rotation angle
The value is obtained. Because of the normal trace measuring mode, the f-theta device can realize extremely high angle measuring precision, so the system measuring error is mainly contributed by the (alpha, beta) angle measured by the deflection system. When the theta angle is constant after the optical wedge is selected, it is easy to understand that
The alpha variation insensitive measurement precision is low when the value approaches 0 DEG or 180 DEG, and when the value approaches
When the value is close to 90 degrees or 270 degrees, the beta change insensitivity measurement precision is low, and the beta change insensitivity measurement precision can be calculated through the formulas (5) and (6)
The system error is then estimated by the expression of (c):
wherein
Is calculated according to alpha
The angle of the first and second side walls is,
calculated according to beta
And the angle delta is a deflection angle measurement error. Taking a laser interferometer as an example, when the optical wedge deflection angle theta =4 degrees, the laser interferometer range is 10 degrees, the measurement error is +/-0.1', and then [0,2 pi ]]Divided into 4 regions [ - π/4, π/4],[π/4,3π/4],[3π/4,5π/4],[5π/4,7π/4]Estimated by alpha, beta, respectively
See fig. 4-7 for error;
it can be seen that, for the optical wedge deflection angle θ =4 °, when the measurement accuracy is ± 0.1 second, the measurement error of the rotation angle is not more than 2 ″ in the 360 ° range, and when a larger deflection angle θ is adopted, the deflection angle α, β is larger in range and higher in accuracy, then the rotation angle is larger
The measurement precision is higher. When the alpha and beta measuring ranges are smaller, the higher the measuring precision is, the
The higher the measurement accuracy.
The system can be used for detecting the rotation angle of a to-be-detected piece, and is certainly used for calibrating the full-range of angle sensors such as circular gratings and time gratings based on the use effect. Referring to fig. 3, the angle sensor 100 is synchronously rotated and sleeved on the wedge-shaped wedge 4;
the light beam emitted by the light source 1 is made to enter a reflecting mirror 5 after sequentially passing through a beam splitter 2, a collimating lens 3 and a wedge-shaped wedge 4;
driving the reflector 5 to deflect through a deflection driving mechanism, enabling the reflector 5 to be perpendicular to an incident beam, and acquiring a deflection angle of the reflector 5 through a deflection angle detection mechanism;
the wedge-shaped wedge 4 is driven by the rotation driving mechanism to rotate in the circumferential direction for a certain angle and then stops, the direction of a light beam passing through the wedge-shaped wedge 4 is changed, and the angle sensor 100 synchronously rotates along with the wedge-shaped wedge 4;
driving the reflector 5 to deflect through the deflection driving mechanism again, enabling the reflector 5 to be perpendicular to the incident light beam, and obtaining the deflection angle of the reflector 5 through the deflection angle detection mechanism;
through the deflection angle of the reflector 5 obtained twice, the apex angle of the wedge-shaped wedge 4 and the f-theta device measurement angle are combined, the change amount of the beam direction before and after the rotation of the wedge-shaped wedge 4 can be calculated, the circumferential rotation angle of the wedge-shaped wedge 4 can be further obtained, the rotation angle indication of the angle sensor 100 is compared with the calculated circumferential rotation angle of the wedge-shaped wedge 4, and therefore the angle sensor 100 can be calibrated.
Finally, although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that various changes and modifications may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (7)
1. Corner number of degrees detecting system, including light source, beam splitter, collimating lens and CCD receiver, its characterized in that:
the wedge-shaped wedge mechanism further comprises a wedge-shaped wedge and a rotation driving mechanism for driving the wedge-shaped wedge to rotate circumferentially, so that the direction of a light beam is changed by rotating the wedge-shaped wedge;
the device also comprises a reflector and a deflection driving mechanism for driving the reflector to deflect so as to enable the reflector to be vertical to an incident beam through deflection;
the device also comprises a deflection angle detection mechanism for detecting the deflection angle of the reflector;
the light beam emitted by the light source sequentially passes through the beam splitter, the collimating lens and the wedge-shaped wedge, the light beam passing through the wedge-shaped wedge is incident on the reflector, the deflection driving mechanism can drive the reflector to deflect and enable the reflector to be perpendicular to the incident light beam, the light beam reflected by the reflector returns along an incident path, forms a light spot on the CCD receiver after sequentially passing through the wedge-shaped wedge, the collimating lens and the beam splitter, and whether the reflector is perpendicular to the incident light beam is judged according to the forming position of the light spot; the circumferential rotation angle of the wedge is obtained through the deflection angle of the reflector measured by the deflection angle detection mechanism.
2. The rotation angle degree detection system according to claim 1, characterized in that: the deflection angle detection mechanism is a laser interferometer or a deflection table capable of displaying a deflection angle.
3. The corner degree detection method comprises a light source, a beam splitter, a collimating lens and a CCD receiver, and is characterized in that: the wedge-shaped wedge and the reflecting mirror are also included;
the light beam emitted by the light source sequentially passes through the beam splitter, the collimating lens and the wedge, and the light beam passing through the wedge enters the reflector;
the wedge-shaped wedge can rotate in the circumferential direction and change the direction of the light beam passing through the wedge-shaped wedge through rotation, the reflector can deflect and enable the reflector to be perpendicular to the incident light beam through deflection,
the light beam reflected by the reflector returns along an incident path, forms a light spot on the CCD receiver after sequentially passing through the wedge, the collimating lens and the beam splitter, and can judge whether the reflector is vertical to the incident light beam or not through the forming position of the light spot;
and acquiring the deflection angle of the reflector, and calculating the circumferential rotation angle of the wedge through the deflection angle of the reflector and the vertex angle of the wedge.
4. The rotation angle degree detection method according to claim 3, characterized in that: the deflection angle of the reflecting mirror is obtained through two laser interferometers,
taking the light beam direction between the collimating lens and the wedge-shaped wedge as a Z axis, wherein the Z axis is horizontal, and an X axis and a Y axis are arranged to be vertical to the Z axis;
when the reflector deflects, a laser interferometer detects the swinging amount of the reflector with the X axis as the rotation center and calculates to obtain the rotation angleαThe other laser interferometer detects the swinging amount of the reflecting mirror with the Y axis as the rotation center and calculates to obtain the rotation angleβ，
By passingαOrβOrαAndβand calculating to obtain the circumferential rotation angle of the wedge by combining the angle of the top angle of the wedge.
5. The rotation angle degree detection method according to claim 4, characterized in that: the circumferential rotation angle range of the wedge-shaped wedge is 360 degrees, and the circumferential rotation angle range of the wedge-shaped wedge is equally divided into four regions;
in the same region, when the beam incident on the mirror is close to the X-axisβCalculating the circumferential rotation angle of the wedge-shaped wedge by combining the value with the angle of the top angle of the wedge-shaped wedge;
when the light beam incident on the mirror approaches the Y-axisαAnd calculating the circumferential rotation angle of the wedge-shaped wedge by combining the value with the angle of the top angle of the wedge-shaped wedge.
6. Use of a rotation angle number detection system as claimed in claim 1, characterized in that: a piece to be calibrated, the rotation angle of which needs to be detected, is synchronously rotated and arranged on the wedge-shaped wedge,
the light beam emitted by the light source is incident on the reflector after sequentially passing through the beam splitter, the collimating lens and the wedge;
driving the reflector to deflect through the deflection driving mechanism and enabling the reflector to be perpendicular to the incident light beam, and acquiring the deflection angle of the reflector through the deflection angle detection mechanism;
the wedge-shaped wedge is driven by the rotation driving mechanism to rotate in the circumferential direction for a certain angle and then stop, the direction of a light beam penetrating through the wedge-shaped wedge is changed, and the to-be-calibrated piece synchronously rotates along with the wedge-shaped wedge;
driving the reflector to deflect through the deflection driving mechanism again, enabling the reflector to be perpendicular to the incident light beam, and obtaining a deflection angle of the reflector through the deflection angle detection mechanism;
through the deflection angle of the reflector obtained twice and the angle of the top angle of the wedge, the change amount of the wedge in the beam direction before and after the wedge rotates can be calculated, the circumferential rotation angle of the wedge is further obtained, and the rotation angle of the to-be-calibrated piece is correspondingly obtained.
7. Use of the rotation angle degree detection system according to claim 6, characterized in that: the to-be-calibrated member is an angle sensor, and the angle sensor is synchronously sleeved on the wedge-shaped wedge in a rotating manner;
and comparing the rotation angle indication of the angle sensor with the calculated circumferential rotation angle of the wedge, so that the angle sensor can be calibrated.
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| CN202211386189.3A CN115752297A (en) | 2022-11-07 | 2022-11-07 | Rotation angle degree detection system, method and application thereof |
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