CN115704778A

CN115704778A - Switching device, light source assembly and detection equipment

Info

Publication number: CN115704778A
Application number: CN202110931578.9A
Authority: CN
Inventors: 陈鲁; 范铎; 张鹏斌; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2021-08-13
Filing date: 2021-08-13
Publication date: 2023-02-17

Abstract

The application discloses a switching device. The switching device comprises a first optical part, a second optical part, a first driving part and a second driving part. The first optical portion includes a plurality of sets of first optical elements. The second optical portion includes a plurality of sets of second optical elements. The first optical part is connected with the first driving part, and the first driving part is used for driving the first optical part to move along a straight line so as to selectively switch one group of first optical elements to be positioned in an optical path. The second optical part is connected with a second driving part, and the second driving part is used for driving the second optical part to rotate so as to alternatively switch one group of second optical elements to be positioned in the optical path. The application also discloses a light source subassembly and check out test set. The first driving part can alternatively switch a group of first optical elements into the optical path, and the second driving part can alternatively switch a group of second optical elements into the optical path, and different processing effects on the light can be obtained by different combination modes of the first optical elements and the second optical elements.

Description

Switching device, light source assembly and detection equipment

Technical Field

The present application relates to the field of industrial detection technologies, and in particular, to a switching device, a light source assembly, and a detection apparatus.

Background

When the optical detection equipment detects a sample to be detected, different samples to be detected are often required to be detected under different illumination conditions according to the surface reflection or scattering characteristics of different samples to be detected, for example, semiconductor wafers have great difference in surface characteristics due to different processes and technologies, the reflection characteristics of the surfaces of bare silicon and wafers with few processes are obvious, the scattering characteristics of multi-layer processes and coated wafers are more obvious, and based on the difference of the surface characteristics of the wafers, when the semiconductor wafers are detected and measured, appropriate light source illumination intensity and color need to be found according to the surface characteristics of different wafers, so that the characteristics are clear and easy to see, and subsequent judgment is facilitated. In order to obtain different lighting conditions, the optical detection device often needs to be configured with a plurality of sets of different light source devices, resulting in a complex structure of the optical detection device.

Disclosure of Invention

The embodiment of the application provides a switching device, a light source assembly and detection equipment.

The switching device of the embodiment of the application comprises:

a first optic comprising a plurality of sets of first optical elements;

a second optic comprising a plurality of sets of second optical elements;

the first optical part is connected with the first driving part, and the first driving part is used for driving the first optical part to move along a straight line so as to alternatively switch one group of first optical elements to be positioned in an optical path; and

and the second optical part is connected with the second driving part, and the second driving part is used for driving the second optical part to rotate so as to alternatively switch one group of second optical elements to be positioned in the optical path.

In some embodiments, the switching device further comprises a positioning portion comprising:

the signal generating part is connected with the first optical part and moves synchronously with the first optical part; and

the signal receiving parts correspond to the first optical elements in groups one by one, when one group of the first optical elements is switched into the optical path, the corresponding one of the signal receiving parts is coupled with the signal generating part, and the first driving part stops driving.

In some embodiments, the positioning portion further includes a mounting member, the mounting member defines a plurality of grooves extending along a straight line, and one of the signal receiving members is movably mounted in each of the grooves.

In some embodiments, the signal generating element comprises a magnetic substance and the signal receiving element comprises a magnetic field inductor.

In certain embodiments, the switching device further comprises a fixing portion comprising:

the first fixing piece is connected with the first driving part and abuts against the first side of the second optical part; and

the second fixing piece is detachably connected with the first fixing piece and abuts against a second side of the second optical portion, and the first side and the second side are opposite sides of the second optical portion.

In some embodiments, the second driving part includes a motor, and the first fixing part includes:

the first sleeve is sleeved on a rotating shaft of the motor and fixedly connected with the rotating shaft, and the second optical part is sleeved outside the first sleeve; and

the first abutting edge is arranged on the outer wall of the first sleeve and abuts against the first side.

In some embodiments, the second fixture includes:

the second sleeve is sleeved outside the first sleeve and is detachably connected with the first sleeve; and

the second abutting edge is arranged on the outer wall of the second sleeve and abuts against the second side.

In some embodiments, the second optical portion includes a rotating disc, and the rotating disc is opened with a plurality of mounting positions distributed along a circle, and each mounting position is used for mounting one group of the second optical elements.

In some embodiments, the number of the second optical elements mounted in at least one of the mounting locations is one; and/or

The number of the second optical elements installed in at least one installation position is multiple, and in the same installation position, a spacing ring is arranged between every two adjacent second optical elements.

In some embodiments, the first optical element is an attenuating plate or filter; and/or

The second optical element is an attenuation sheet or an optical filter.

The light source assembly of the embodiments of the present application includes a light source, a light transmission member, and the switching device of any embodiment of the present application, wherein a light inlet of the light transmission member is aligned with the light source, and a transmission light path exists between the light source and the light inlet; the switching device is used for alternatively switching a group of the first optical elements and a group of the second optical elements into the transmission optical path.

The detection device comprises the light source assembly and the detection assembly, wherein light rays emitted by the light outlet of the light transmission piece are projected to a sample to be detected; the detection assembly is used for receiving light reflected or scattered by the sample.

In the switching device, the light source assembly and the detection equipment of the embodiment of the application, a group of first optical elements can be alternatively switched to the light path through the first driving part, a group of second optical elements can be alternatively switched to the light path through the second driving part, different processing effects on light can be obtained through different combination modes of the first optical elements and the second optical elements, namely, through the cooperation of one switching device and the light source, multiple illumination conditions can be provided for a sample to be detected so as to adapt to the property of the sample to be detected, and the detection equipment is simple in structure.

Additional aspects and advantages of embodiments of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

Drawings

The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic plan view of a detection apparatus according to certain embodiments of the present disclosure;

FIG. 2 is a schematic perspective view of a light source module according to certain embodiments of the present disclosure;

fig. 3 is a perspective assembly view of the first optical portion, the first driving portion and the positioning portion according to some embodiments of the present disclosure;

fig. 4 is an exploded perspective view of a first optic portion, a first driver portion and a positioning portion according to some embodiments of the present disclosure;

fig. 5 is a perspective assembly view of a second optic, a second actuator and a stent according to some embodiments of the present application;

fig. 6 is an exploded perspective view of a second optic, a second actuator and a stent according to some embodiments of the present application;

fig. 7 is an exploded perspective view of a second optic portion, a second drive portion and a stent according to some embodiments of the present application;

FIG. 8 is a schematic cross-sectional view taken along line VIII-VIII of the assembled perspective view of FIG. 5; and

fig. 9 is an enlarged schematic view of part IX in fig. 8.

Description of the main elements and symbols:

the detection device 1000, the sample a, the light source assembly 100, the detection assembly 200, the carrying device 300, the transfer device 400, the switching device 10, the first optical portion 11, the first optical element 111, the second optical portion 12, the second optical element 121, the first side 122, the second side 123, the turntable 124, the mounting position 1241, the spacer ring 125, the locking ring 126, the first driving portion 13, the second driving portion 14, the rotating shaft 141, the positioning portion 15, the signal generating element 151, the signal receiving element 152, the mounting element 153, the groove 1531, the fixing element 16, the first fixture 161, the first sleeve 1611, the first abutting edge 1612, the fixing hole 1613, the second fixture 162, the second sleeve 1621, the second abutting edge 1622, the bracket 17, the light source 20, the light transmission element 30, and the light inlet 31.

Detailed Description

Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below by referring to the drawings are exemplary only for the purpose of explaining the embodiments of the present application, and are not to be construed as limiting the embodiments of the present application.

Referring to fig. 1, fig. 1 is a schematic plan view illustrating an inspection apparatus 1000 according to some embodiments of the present disclosure, in which the inspection apparatus 1000 includes a light source assembly 100 and an inspection assembly 200. The light source assembly 100 may be configured to project light to the sample a to be detected, the light reflected or scattered by the sample a to be detected is received by the detection assembly 200, and the detection assembly 200 detects the sample a according to the received light.

Specifically, the inspection apparatus 1000 may be a machine such as a semiconductor inspection apparatus, a semiconductor processing apparatus, a semiconductor manufacturing apparatus, or a part of the machine. The sample a to be detected may be any device or semi-finished product of a device to be detected, for example, the sample a may be any device or semi-finished product of a wafer, a chip, a display panel, glass, a cover plate, a substrate, a housing, a film, and the like, and is not limited herein.

Light source assembly 100 is used to project light toward sample a. The light projected by the light source assembly 100 may be vertically incident to the sample a, or may be obliquely incident to the sample a, which may be selected according to specific use requirements, and in some examples, the incident angle of the light projected by the light source assembly 100 to the sample a may be adjusted.

The detecting element 200 may perform bright field detection or dark field detection on the sample a, specifically, after the light source assembly 100 projects light to the sample a, the light may be reflected or scattered by the sample a, and the detecting element 200 may detect whether there is a defect (e.g., a pit, a protrusion, a scratch, a crack, etc.) on the sample a, measure the size (e.g., a line width, a roundness, a parallelism, a spacing, etc.) of the sample a, and detect the parameter (e.g., a thickness, a reflectivity, a width, etc.) of the sample a according to the received light, which is not limited herein.

With continued reference to fig. 1, in the example shown in fig. 1, the detection apparatus 1000 may further include a carrying device 300 and a transferring device 400. The carrying device 300 can be used for carrying and fixing the sample a to be detected, for example, the carrying device 300 can fix the sample a by absorption, clamping, and the like, in one example, the carrying device 300 can also be used for driving the sample a to move relative to the light source assembly 100 and the detection assembly 200, so that the detection assembly 200 can detect different parts of the sample a. The transfer device 400 can be used to transport the sample a to be detected to the carrier 300 from the outside or take away the sample a that has been detected on the carrier 300.

The specific structure of the light source assembly 100 and the operation thereof will be described in detail below.

Referring to fig. 2, fig. 2 is a schematic perspective view of a light source assembly 100 according to some embodiments of the present disclosure, in which the light source assembly 100 includes a light source 20, a light transmitting member 30 and a switching device 10.

The light source 20 may be any device capable of emitting light, such as an LED lamp, a laser emitter, a halogen lamp, a lamp box, etc., and the light source 20 emitting light with different wavelengths, such as white light, ultraviolet light, infrared light, blue light, red light, etc., may be selected according to different requirements, which is not limited herein.

The light transmitting member 30 may be used for transmitting light, and the light transmitting member 30 may be, for example, an optical fiber, or an optical channel constructed by optical elements, etc. The light inlet 31 of the light transmission member 30 is aligned with the light source 20, and a transmission light path exists between the light source 20 and the light inlet 31, so that after the light emitted from the light source 20 passes through the transmission light path, the light enters the light transmission member 30 from the light inlet 31. Further, the light is transmitted in the light transmitting member 30, and is emitted from the light outlet of the light transmitting member 30 to be projected to the sample a to be detected.

The switching device 10 is at least partially located in the transmission optical path, so that the switching device 10 can process the light in the transmission optical path, for example, perform filtering, attenuation, etc., to achieve the purpose of adjusting the light parameters finally projected to the sample a.

Referring to fig. 2, the switching device 10 includes a first optical portion 11, a second optical portion 12, a first driving portion 13 and a second driving portion 14. The first optical portion 11 includes a plurality of sets of first optical elements 111. The second optical portion 12 includes a plurality of sets of second optical elements 121. The first optical portion 11 is connected to a first driving portion 13, and the first driving portion 13 is used for driving the first optical portion 11 to move along a straight line so as to alternatively switch one group of first optical elements 111 to be located in an optical path. The second optical portion 12 is connected to the second driving portion 14, and the second driving portion 14 is used for driving the second optical portion 12 to rotate, so as to alternatively switch one group of the second optical elements 121 to be located in the optical path.

The first driving portion 13 can alternatively switch the group of first optical elements 111 into the optical path, and the second driving portion 14 can alternatively switch the group of second optical elements 121 into the optical path, and different processing effects on the light can be obtained by combining different first optical elements 111 and second optical elements 121, that is, by matching one switching device 10 with the light source 20, various illumination conditions can be provided for the sample a to be detected to adapt to the properties of the sample a to be detected, so that the structure of the detection apparatus 1000 is simple.

Specifically, the first optical portion 11 includes a plurality of sets of first optical elements 111, for example, two sets of first optical elements 111, three sets of first optical elements 111, four sets of first optical elements 111, five sets of first optical elements 111, and the like. Multiple sets of first optical elements 111 may be arranged in a straight line so as to switch different sets of first optical elements 111 into the transmission optical path when the first optical portion 11 moves in a straight line. For each group of the first optical elements 111, one first optical element 111 may be included, or a plurality of first optical elements 111 may be included, and the number of the first optical elements 111 in different groups may be the same or different.

The second optical portion 12 includes a plurality of sets of second optical elements 121, for example, two sets of second optical elements 121, three sets of second optical elements 121, four sets of second optical elements 121, five sets of second optical elements 121, six sets of second optical elements 121, seven sets of second optical elements 121, eight sets of second optical elements 121, and the like. Multiple sets of second optical elements 121 may be arranged along a circle so as to switch different sets of second optical elements 121 into the transmission optical path upon rotational movement of the second optical portion 12. For each group of the second optical elements 121, one second optical element 121 may be included, or a plurality of second optical elements 121 may be included, and the number of the second optical elements 121 in different groups may be the same or different.

The types of the first optical element 111 and the second optical element 121 may be selected according to actual requirements, for example, the first optical element 111 (the second optical element 121) may be any optical element such as an attenuation plate, an optical filter, a wave plate, or a polarizing plate, and the first optical element 111 (the second optical element 121) in the same group may be any combination of any number of the above optical elements, which is not limited herein.

In one example, the second optical portion 12 is closer to the light source 20 than the first optical portion 11, the light emitted from the light source 20 passes through the set of second optical elements 121 before passing through the set of first optical elements 111, in another example, the first optical portion 11 is closer to the light source 20 than the second optical portion 12, and the light emitted from the light source 20 passes through the set of first optical elements 111 before passing through the set of second optical elements 121.

Referring to fig. 2, the first driving portion 13 is connected to the first optical portion 11, and the first driving portion 13 is used for driving the first optical portion 11 to move along a straight line, so as to switch one group of the first optical elements 111 to be located in the optical path alternatively. The first driving unit 13 can automatically drive the first optical unit 11 to move linearly under the action of a control command without manual operation, so as to improve the convenience of the switching device 10 during use, and the first driving unit 13 may be a linear motor, a hydraulic mechanism, a pneumatic mechanism, or the like, without limitation.

Since the plurality of sets of first optical elements 111 are arranged in a straight line, by driving the first optical portion 11 to move in a straight line, the positions of the plurality of sets of first optical elements 111 with respect to the transmission optical path can be switched, for example, one of the sets of first optical elements 111 is switched to be located in the transmission optical path, so that the one set of first optical elements 111 processes the light of the transmission optical path. Therefore, the first optical unit 11 and the first driving unit 13 cooperate to perform at most M processing modes on the light beam, where M is the number of groups of the first optical elements 111.

The second driving part 14 is connected to the second optical part 12, and the second driving part 14 is used for driving the second optical part 12 to rotate so as to alternatively switch one group of the second optical elements 121 to be positioned in the optical path. Since the plurality of sets of second optical elements 121 are arranged along a circle, by driving the second optical portion 12 to rotate, the positions of the plurality of sets of second optical elements 121 with respect to the transmission optical path can be switched, for example, one set of second optical elements 121 is switched to be located in the transmission optical path, so that the one set of second optical elements 121 processes the light in the transmission optical path. Therefore, the second optical unit 12 and the second driving unit 14 cooperate to realize at most N processing methods for the light beam, where N is the number of sets of the second optical elements 121.

Therefore, by the cooperation of the first optical portion 11, the first driving portion 13, the second optical portion 12, and the second driving portion 14, the switching device 10 can implement at most M × N processing modes for light, where M is the number of the first optical elements 111 and N is the number of the second optical elements 121, so that at most M × N illumination conditions can be provided by one light source assembly 100, and the application range of the light source assembly 100 is greatly improved.

Referring to fig. 3 and 4, fig. 3 is a schematic perspective assembly view of the first optical portion 11, the first driving portion 13 and the positioning portion 15 according to some embodiments of the present disclosure, fig. 4 is a schematic perspective exploded view of the first optical portion 11, the first driving portion 13 and the positioning portion 15 according to some embodiments of the present disclosure, in some embodiments, the switching device 10 further includes the positioning portion 15, and the positioning portion 15 includes a signal generating element 151 and a plurality of signal receiving elements 152. The signal generating part 151 is connected to the first optical part 11 and moves in synchronization with the first optical part 11. The plurality of signal receiving parts 152 are in one-to-one correspondence with the plurality of sets of first optical elements 111, and when one set of first optical elements 111 is switched into the optical path, a corresponding one of the signal receiving parts 152 is coupled with the signal generating part 151, and the first driving part 13 suspends the driving.

By arranging the positioning part 15, when the first driving part 13 drives the first optical part 11 to move, when a group of first optical elements 111 to be selected is exactly aligned with the transmission optical path, the first driving part 13 stops driving, and the position of the first optical part 11, which is not the first optical element 111, is prevented from blocking the transmission optical path.

Specifically, the signal generator 151 is connected to the first optical portion 11, for example, detachably connected, or connected to the moving portion of the first driving portion 13, and when the first driving portion 13 drives the first optical portion 11 to move, the signal generator 151 moves synchronously, and the signal generator 151 continues to send out signals. The number of the signal receiving parts 152 may be the same as the number of the sets of the first optical elements 111, the plurality of signal receiving parts 152 correspond to the plurality of sets of the first optical elements 111 one to one, and the plurality of signal receiving parts 152 may be respectively arranged at different positions so that the signal receiving part 152 corresponding to one set of the first optical elements 111 is just coupled with the signal generating part 151 when the one set of the first optical elements 111 is located in the transmission optical path.

When the signal receiving element 152 is coupled to the signal generating element 151, the signal receiving element 152 may send a drive suspension command to the first driving portion 13, and the first driving portion 13 suspends the drive in response to the command, and at this time, the first optical portion 11 stays in a state where a group of the first optical elements 111 is located in the transmission optical path. When the driving needs to be continued, the first driving portion 13 may be turned on again to drive the first optical portion 11 to move until another group of the first optical elements 111 is switched into the transmission optical path.

In one example, the signal receiving part 151 includes a magnetic substance, the signal receiving part 152 includes a magnetic field sensor, and when the signal receiving part 151 is moved close enough to one of the signal receiving parts 152, the signal receiving part 152 is coupled to the one of the signal receiving parts 152, and the signal generating part 151 generates a command to disable the driving. In another example, the signal generating element 151 may be a light generator, and the signal receiving element 152 may be a light receiver, and when the light emitted from the signal generating element 151 is incident on the signal receiving element 152, the signal generating element 151 is considered to be coupled to the signal receiving element 152. Of course, the specific form of the signal generating element 151 and the signal receiving element 152 may be other, and is not limited herein.

Referring to fig. 3 and 4, in some embodiments, the positioning portion 15 further includes a mounting member 153, the mounting member 153 defines a plurality of grooves 1531 extending along a straight line, and each of the grooves 1531 is movably mounted with a signal receiving element 152.

The mounting members 153 may be stationary with respect to the first optical portion 11, for example, the mounting members 153 may be mounted on the fixing portions of the first driving portion 13, so that when the first optical portion 11 moves, the signal generating element 151 moves with respect to the mounting members 153 and the signal receiving elements 152. The groove 1531 of the mounting member 153 is used for mounting the signal receiving element 152, and in addition, the signal receiving element 152 can slide in the groove 1531 to adjust the position of the signal receiving element 152 in the groove 1531, so as to adjust the position of the first driving part 13 for stopping driving, that is, the position of the first optical part 11 for stopping movement, and make the first optical element 111 stay at the position aligned with the transmission light path.

Specifically, the groove 1531 may extend through the mounting member 153 in the extending direction of the straight line, so that the signal receiving member 152 is inserted into the groove 1531 from the side of the mounting member 153, and the wires connected to the signal receiving member 152 may be at least partially received in the groove 1531. The sectional shape of the groove 1531 may be a shape with a larger bottom and a smaller upper portion (e.g., an inverted pyramid), and when the signal receiving member 152 is installed in the groove 1531, the signal receiving member 152 does not come out of the top of the groove 1531, and can only move along the linear extension direction of the groove 1531 by an external force.

Referring to fig. 5 to 7, fig. 5 is a schematic perspective assembly view of second optical portion 12, second driving portion 14 and bracket 17 according to some embodiments of the present disclosure, fig. 6 and 7 are schematic perspective exploded views of second optical portion 12, second driving portion 14 and bracket 17 according to some embodiments of the present disclosure, and in some embodiments, switching device 10 further includes fixing portion 16, and fixing portion 16 includes first fixing element 161 and second fixing element 162. The first fastener 161 is connected to the first driving portion 13, and the first fastener 161 abuts against the first side 122 of the second optical portion 12. The second fastener 162 is detachably connected to the first fastener 161, the second fastener 162 abuts against the second side 123 of the second optical portion 12, and the first side 122 and the second side 123 are opposite sides of the second optical portion 12.

The first fastener 161 and the second fastener 162 respectively hold both sides (the first side 122 and the second side 123) of the second optical portion 12, and the first fastener 161 is connected to the first driving portion 13, so that when the movable portion of the first driving portion 13 rotates, the fixed portion 16 and the second optical portion 12 rotate synchronously. In addition, second fastener 162 is detachably connected to first fastener 161, so that second fastener 162 can be easily separated from first fastener 161 to disassemble second optical portion 12.

Referring to fig. 6 to 9, in which fig. 8 is a cross-sectional view of the three-dimensional assembly diagram shown in fig. 5 along a line VIII-VIII, fig. 9 is an enlarged view of a portion IX in fig. 8, in some embodiments, the second driving portion 14 includes a motor, and the first fixing member 161 includes a first sleeve 1611 and a first abutting edge 1612. The first sleeve 1611 is sleeved on the rotating shaft 141 of the motor and is fixedly connected to the rotating shaft 141. The second optic 12 is sleeved outside the first sleeve 1611. The first abutting edge 1612 is disposed on an outer wall of the first sleeve 1611, and the first abutting edge 1612 abuts against the first side 122.

By providing the first sleeve 1611 and the first abutting edge 1612, the power of the second driving portion 14 can be transmitted to the second optical portion 12. Specifically, the second driving part 14 includes a motor, and the second driving part 14 may be mounted on the bracket 17 to support the second driving part 14 and the second optical part 12 with the bracket 17. The first sleeve 1611 is fixedly connected to the rotating shaft 141, for example, a fixing hole 1613 may be formed in an outer wall of the first sleeve 1611, when the first sleeve 1611 is sleeved outside the rotating shaft 141, the first sleeve 1611 may be fixedly connected to the rotating shaft 141 through a screw (not shown), and when the rotating shaft 141 rotates, the first fixing member 161 and the rotating shaft 141 rotate synchronously.

The first abutting edge 1612 is provided on an outer wall of the first sleeve 1611, for example, the first abutting edge 1612 may be provided at one end portion of the first sleeve 1611 and protrude outward in a radial direction of the first sleeve 1611. The second optical portion 12 is sleeved outside the first sleeve 1611, and the first side 122 abuts against the first abutting edge 1612 to limit the stroke of the second optical portion 12 moving along one direction of the axial direction of the first sleeve 1611.

Referring to fig. 6 to 9, in some embodiments, the second fixing member 162 includes a second sleeve 1621 and a second supporting edge 1622, and the second sleeve 1621 is disposed around the first sleeve 1611 and detachably connected to the first sleeve 1611. The second abutting edge 1622 is disposed on an outer wall of the second sleeve 1621, and the second abutting edge 1622 abuts against the second side 123.

By providing the second sleeve 1621 and the second abutting edge 1622, the power transmitted to the first sleeve 1611 can be transmitted to the second optical portion 12 through the second sleeve 1621 and the second abutting edge 1622. Specifically, the second sleeve 1621 is detachably connected to the first sleeve 1611, for example, an inner wall of the second sleeve 1621 is formed with an internal thread, an outer wall of the first sleeve 1611 is formed with an external thread, and the first sleeve 1611 and the second sleeve 1621 may be detachably connected by a thread.

The second abutting edge 1622 is arranged on the outer wall of the second sleeve 1621, when the second sleeve 1621 and the first sleeve 1611 are connected to each other, the second abutting edge 1622 abuts against the second side 123 of the second optical portion 12, so that the first side 122 of the second optical portion 12 abuts against the first abutting edge 1612, the second side 123 abuts against the second abutting edge 1622, the second optical portion 12 is clamped by the first abutting edge 1612 and the second abutting edge 1622, and when the first abutting edge 1612 and the second abutting edge 1622 rotate, the second optical portion 12 rotates synchronously.

When the second optical portion 12 is mounted, the second optical portion 12 may be firstly sleeved outside the first sleeve 1611, and the first side 122 abuts against the first abutting edge 1612, then the second sleeve 1621 is sleeved outside the first sleeve 1611, and the depth of the first sleeve 1611 sleeved inside the second sleeve 1621 is gradually increased until the second abutting edge 1622 abuts against the second side 123, and the mounting of the second optical portion 12 is completed. When the second optical portion 12 needs to be detached, first, the second sleeve 1621 is separated from the first sleeve 1611, and then, the second optical portion 12 is taken down.

Referring to fig. 6 and 7, in some embodiments, the second optical portion 12 includes a rotating disc 124, the rotating disc 124 defines a plurality of mounting locations 1241 distributed along a circle, and each mounting location 1241 is used for mounting a set of second optical elements 121.

The second driving portion 14 is connected to the center of the turntable 124, when the second driving portion 14 drives the turntable 124 to rotate, the plurality of mounting positions 1241 are alternately located in the transmission optical path in sequence, by controlling the rotation angle of the turntable 124, a specific one of the mounting positions 1241 can be rotated to a position aligned with the transmission optical path, and a group of second optical elements 121 mounted on the mounting position 1241 processes the light.

The plurality of mounting locations 1241 may be uniformly distributed at equal angles, each mounting location 1241 mounts a group of second optical elements 121, and the number of each group of second optical elements 121 may be single or multiple, which is not limited herein. In one example, the number of the second optical elements 121 mounted in at least one of the mounting locations 1241 is one, and in another example, referring to fig. 9, the number of the second optical elements 121 mounted in at least one of the mounting locations 1241 is plural, and in the same mounting location 1241, a spacing ring 125 is disposed between two adjacent second optical elements 121 to prevent the two adjacent second optical elements 121 from being scratched.

In addition, referring to fig. 9, a locking ring 126 is further mounted on each mounting location 1241, and the locking ring 126 is used for abutting against one of the outermost second optical elements 121 to prevent the second optical elements 121 in the mounting locations 1241 from falling off. The locking ring 126 may be removably mounted in the mounting location 1241, such as by being threadably mounted in the mounting location 1241.

In summary, in the switching device 10, the light source assembly 100 and the detecting apparatus 1000 of the embodiment of the present application, the first driving portion 13 can alternatively switch the set of first optical elements 111 to the light path, and the second driving portion 14 can alternatively switch the set of second optical elements 121 to the light path, different processing effects on the light can be obtained by different combinations of the first optical elements 111 and the second optical elements 121, that is, by matching one switching device 10 with the light source 20, a plurality of illumination conditions can be provided for the sample a to be detected to adapt to the properties of the sample a to be detected, so that the structure of the detecting apparatus 1000 is simple.

Of course, the switching device 10 and the light source module 100 according to any of the embodiments of the present application may be applied to any other devices except the detection device 1000, and are not limited to the detection device 1000.

In the description herein, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example" or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Moreover, various embodiments or examples and features of various embodiments or examples described in this specification can be combined and combined by one skilled in the art without being mutually inconsistent.

Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and the scope of the preferred embodiments of the present application includes other implementations in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present application.

Although embodiments of the present application have been shown and described above, it is to be understood that the above embodiments are exemplary and not to be construed as limiting the present application, and that changes, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present application.

Claims

1. A switching device, characterized in that the switching device comprises:

a first optic comprising a plurality of sets of first optical elements;

a second optic comprising a plurality of sets of second optical elements;

2. The switching device according to claim 1, further comprising a positioning portion, the positioning portion comprising:

the signal generating piece is connected with the first optical part and moves synchronously with the first optical part; and

3. The switching device as claimed in claim 2, wherein the positioning portion further comprises a mounting member defining a plurality of linearly extending grooves, and one of the signal receiving members is movably mounted in each of the grooves.

4. The switching device of claim 2, wherein the signal generating element comprises a magnetic substance and the signal receiving element comprises a magnetic field inductor.

5. The switching device of any one of claims 1 to 4, further comprising a fixing portion, the fixing portion comprising:

6. The switching device according to claim 5, wherein the second driving portion includes a motor, and the first fixing member includes:

7. The switching device of claim 6, wherein the second fixture comprises:

8. The switching device according to any one of claims 1 to 4, wherein the second optical portion comprises a rotating disc, the rotating disc is provided with a plurality of mounting positions distributed along a circle, and each mounting position is used for mounting a group of the second optical elements.

9. The switching device of claim 8, wherein the number of the second optical elements mounted in at least one of the mounting locations is one; and/or

10. The switching device according to any one of claims 1 to 4, wherein the first optical element is an attenuation sheet or a filter; and/or

The second optical element is an attenuation sheet or an optical filter.

11. A light source assembly, characterized in that it comprises:

a light source;

the light transmission piece is aligned to the light source at a light inlet of the light transmission piece, and a transmission light path exists between the light source and the light inlet; and

the switching device of any one of claims 1 to 10, for alternatively switching a set of the first optical elements and a set of the second optical elements into the transmission optical path.

12. A detection device, characterized in that the detection device comprises:

the light source module of claim 11, wherein the light emitted from the light outlet of the light-transmitting member is projected to a sample to be detected; and

a detection assembly for receiving light reflected or scattered by the sample.