CN115703203A - Method for shaping cutting tool - Google Patents

Method for shaping cutting tool Download PDF

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Publication number
CN115703203A
CN115703203A CN202210944643.6A CN202210944643A CN115703203A CN 115703203 A CN115703203 A CN 115703203A CN 202210944643 A CN202210944643 A CN 202210944643A CN 115703203 A CN115703203 A CN 115703203A
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CN
China
Prior art keywords
cutting tool
cutting
shaping
unit
truing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210944643.6A
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Chinese (zh)
Inventor
马路良吾
楠部浩司
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Disco Corp
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Disco Corp
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Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of CN115703203A publication Critical patent/CN115703203A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/06Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12Dressing tools; Holders therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment

Abstract

The invention provides a shaping method of a cutting tool, which can easily shape the shape of the cutting tool with low cost. The method for shaping a cutting tool comprises the following steps: a shaping preparation step for cutting the tip of a rotating cutting tool (21) into a trimming plate (200) held by a chuck table (10) by a predetermined amount (201); and a shaping step of raising the cutting tool (21) while moving the cutting tool (21) in the axial direction of the spindle after the shaping preparation step is performed, forming an inclined surface (28) on the side of one surface (26)) of the tip of the cutting tool (21), and repeating the shaping preparation step and the shaping step until the inclined surface (28) of the cutting tool (21) has a desired angle or width.

Description

Method for shaping cutting tool
Technical Field
The present invention relates to a method of shaping a cutting tool.
Background
A cutting apparatus (dicing saw) is used to cut various plate-shaped objects to be processed, such as semiconductor device wafers, ceramic substrates, glass substrates, and resin package substrates, into individual chips by a cutting tool. In general dicing, a substrate is divided by full dicing, and in order to suppress chipping of a chip, to form a V-groove, or to form an inclined surface on a chip, dicing or grooving may be performed using a cutting blade having a V-shaped tip (see, for example, patent documents 1, 2, and 3).
Patent document 1: japanese laid-open patent publication No. 2004-039906
Patent document 2: japanese patent laid-open No. 2012-044096
Patent document 3: japanese laid-open patent publication No. 2019-160887
In this case, the tool tip is easily deformed due to wear, and the cost of the cutting tool increases when the cutting tool is replaced with a new one every time the tool tip is deformed. Therefore, a machining device for shaping the shape of the cutting tool is considered, but a new device needs to be introduced, and there is a problem that it cannot be easily implemented. When a trued tool originally having an angle at the tip is purchased from a tool manufacturer and attached to a spindle, the rotation center of the spindle and the center of the cutting tool are offset and slightly eccentric. Further, when dressing is performed to correct the eccentricity, the shape of the cutting edge rapidly changes due to wear of the cutting tool, and thus dressing is not performed, and there is a problem that the eccentricity cannot be corrected.
Disclosure of Invention
The present invention has been made in view of the above problems, and an object thereof is to provide a method for shaping a cutting insert, which can easily shape the shape of the cutting insert at low cost.
In order to solve the above-described problems, a method for truing a cutting tool according to the present invention is a method for truing a cutting tool using a cutting apparatus including a chuck table for holding a workpiece by a holding surface, a cutting unit for cutting the workpiece held by the chuck table by attaching the cutting tool in an annular shape to a spindle having an axis parallel to the holding surface, and a moving unit for relatively moving the chuck table and the cutting unit, the method for truing the cutting tool including the steps of: a shaping preparation step of causing the front end of the rotating cutting tool to cut into the trimming plate held by the chuck worktable by a specified amount; and a shaping step of raising the cutting tool while moving the cutting tool in the axial direction of the spindle after the shaping preparation step is performed, forming an inclined surface on one surface side of the tip of the cutting tool, and repeating the shaping preparation step and the shaping step until the inclined surface of the cutting tool has a desired angle or width.
The shaping step may be performed in both a positive direction and a negative direction of the axial center direction of the spindle, and an inclined surface may be formed at the tip of one surface and the other surface of the cutting tool.
The method for truing a cutting tool may include the following consumption measuring steps: after the truing step is performed and before the truing preparation step is performed again, the consumption of the cutting tool is measured, and even if the cutting tool is consumed, the cutting tool is caused to cut into the workpiece by a predetermined amount in the truing preparation step.
The present invention can easily and inexpensively shape a cutting tool.
Drawings
Fig. 1 is a perspective view showing a configuration example of a cutting apparatus according to a shaping method of a cutting tool according to an embodiment.
Fig. 2 is an exploded perspective view illustrating a cutting unit of the cutting apparatus of fig. 1.
Fig. 3 is a flowchart illustrating an example of a process of the shaping method of the cutting tool according to the embodiment.
Fig. 4 is a cross-sectional view illustrating a shaping method of the cutting insert according to the embodiment.
Fig. 5 is a perspective view illustrating a shaping preparation step of fig. 3.
Fig. 6 is a perspective view illustrating a shaping preparation step of fig. 3.
Fig. 7 is a sectional view illustrating the shaping preparation step of fig. 3.
Fig. 8 is a sectional view illustrating the shaping step of fig. 3.
Fig. 9 is a sectional view illustrating the shaping step of fig. 3.
Fig. 10 is a cross-sectional view illustrating an example of the inclined surface determining step of fig. 3.
Fig. 11 is a plan view illustrating an example of the inclined surface determining step of fig. 3.
Fig. 12 is a plan view illustrating an example of the consumption amount measuring step in fig. 3.
Fig. 13 is a cross-sectional view illustrating a method of shaping a cutting insert according to modification 1.
Fig. 14 is a cross-sectional view illustrating a method of shaping a cutting insert according to modification 2.
Description of the reference symbols
1: a cutting device; 10: a chuck table; 20: a cutting unit; 21: a cutting tool; 22: a main shaft; 26. 27: kneading; 28. 29: an inclined surface; 30: a mobile unit; 100: a workpiece; 200: and (6) trimming the plate.
Detailed Description
A mode (embodiment) for carrying out the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. The components described below include those that can be easily conceived by those skilled in the art, and substantially the same ones. The following structures may be combined as appropriate. Various omissions, substitutions, and changes in the structure may be made without departing from the spirit of the invention.
[ embodiment ]
A method of shaping a cutting insert according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of a cutting apparatus 1 according to the shaping method of the cutting tool of the embodiment. Fig. 2 is an exploded perspective view illustrating the cutting unit 20 of the cutting apparatus 1 of fig. 1. As shown in fig. 1, the cutting apparatus 1 has a chuck table 10, a cutting unit 20, a moving unit 30, a photographing unit 40, and a control unit 50.
In the present embodiment, the workpiece 100 to be cut by the cutting device 1 is, for example, a disc-shaped semiconductor device wafer or optical device wafer that is a base material such as silicon, sapphire, silicon carbide (SiC), or gallium arsenide. As shown in fig. 1, a workpiece 100 has devices 103 formed in regions defined by a plurality of lines to divide 102 formed in a lattice shape on a flat front surface 101. In the present embodiment, the adhesive tape 105 is attached to the rear surface 104 on the rear surface side of the front surface 101 of the workpiece 100, and the annular frame 106 is attached to the outer edge portion of the adhesive tape 105. In the present invention, the workpiece 100 may be a rectangular package substrate having a plurality of resin-sealed devices, a ceramic plate, a glass plate, or the like.
The chuck table 10 includes: a disk-shaped frame body formed with a concave part; and a disk-shaped suction portion fitted into the recess. The suction portion of the chuck table 10 is formed of porous ceramics or the like, and is connected to a vacuum suction source, not shown, via a vacuum suction path, not shown. The upper surface of the suction portion of the chuck table 10 is a holding surface 11 on which the workpiece 100 is placed and which sucks and holds the placed workpiece 100. In the present embodiment, the holding surface 11 places the workpiece 100 with the front surface 101 facing upward, and sucks and holds the placed workpiece 100 from the rear surface 104 side through the adhesive tape 105. The holding surface 11 and the upper surface of the frame of the chuck table 10 are arranged on the same plane and formed in parallel on an XY plane as a horizontal plane. The chuck table 10 is provided to be movable in an X-axis direction, which is one direction of a horizontal direction, by an X-axis moving unit 31 of the moving unit 30, and rotatable about an axis parallel to a Z-axis direction, which is a vertical direction and is perpendicular to the holding surface 11, by a rotation driving source, not shown.
As shown in fig. 2, the cutting unit 20 has: a spindle 22 having a cutting tool 21 attached to a tip thereof; and a mount flange 24. The cutting insert 21 is a grinding cutter having an annular cutting edge 21-1, and the cutting edge 21-1 is formed by fixing abrasive grains such as diamond and CBN (Cubic Boron Nitride) with a bonding material such as metal or resin to have a predetermined thickness. As the cutting tool 21 cuts, the cutting edge 21-1 is worn and self-sharpened, and the sharpness is always maintained at a certain level or more. In the example shown in fig. 2, the cutting tool 21 is a hubless tool, but the present invention is not limited to this, and may be a hubless tool in which an annular cutting edge 21-1 is fixed to the outer periphery of an annular base.
The main shaft 22 has an axis parallel to the holding surface 11, which is an axis parallel to the Y-axis direction perpendicular to the X-axis direction and another direction horizontal to the Y-axis direction. The mount flange 24 is fixed to the tip of the spindle 22 while sandwiching the cutting tool 21. The cutting tool 21 attached to the tip of the spindle 22 is rotated about an axis parallel to the Y-axis direction by the rotation of the spindle 22, and performs cutting on the workpiece 100 held by the chuck table 10. As shown in fig. 1, the cutting unit 20 is provided to be movable in the Y-axis direction by a Y-axis moving unit 32 of a moving unit 30 and movable in the Z-axis direction (up-down direction) by a Z-axis moving unit 33 of the moving unit 30 with respect to the workpiece 100 held by the chuck table 10.
As shown in fig. 1, the moving unit 30 has an X-axis moving unit 31, a Y-axis moving unit 32, and a Z-axis moving unit 33. The X-axis moving unit 31 relatively moves the chuck table 10 with respect to the cutting unit 20 in the X-axis direction (machining feed direction). The Y-axis moving unit 32 relatively moves the cutting unit 20 with respect to the chuck table 10 in the Y-axis direction (indexing direction). The Z-axis moving unit 33 moves the cutting unit 20 relative to the chuck table 10 in the Z-axis direction (cutting feed direction). Thus, the moving unit 30 relatively moves the chuck table 10 and the cutting unit 20.
The X-axis moving unit 31, the Y-axis moving unit 32, and the Z-axis moving unit 33 have: a well-known ball screw provided to be rotatable about an axis; a known pulse motor that rotates a ball screw around an axis; and a known guide rail that supports the chuck table 10 or the cutting unit 20 to be movable in the X-axis direction, the Y-axis direction, or the Z-axis direction. The X-axis moving unit 31, the Y-axis moving unit 32, and the Z-axis moving unit 33 have well-known position detectors for detecting positions of the chuck table 10 or the cutting unit 20 in the X-axis direction, the Y-axis direction, or the Z-axis direction, and output the positions detected by the position detectors to the control unit 50.
The cutting apparatus 1 sets the cutting tool 21 attached to the tip of the spindle 22 at a predetermined position with respect to the workpiece 100 held by the chuck table 10 by the moving means 30, and performs cutting processing on the workpiece 100 along the line to divide 102 by the cutting tool 21 by relatively moving the cutting tool 21 along the line to divide 102 with respect to the workpiece 100 held by the chuck table 10 while rotating.
In the present embodiment, the imaging unit 40 is attached to the cutting unit 20 and moves integrally with the cutting unit 20. The imaging unit 40 includes an imaging element for imaging the workpiece 100 before and after machining held by the chuck table 10. The imaging Device is, for example, a CCD (Charge-Coupled Device) imaging Device or a CMOS (Complementary metal oxide semiconductor) imaging Device. The imaging unit 40 images the workpiece 100 held by the chuck table 10 to obtain an image for performing alignment, that is, alignment between the workpiece 100 and the cutting tool 21, and outputs the obtained image to the control unit 50. The imaging unit 40 images the workpiece 100 held by the chuck table 10 to obtain an image for performing a notch inspection (that is, to confirm the quality of the cut groove formed in the workpiece 100), and outputs the obtained image to the control unit 50.
The control unit 50 controls the operations of the various components of the cutting apparatus 1 to cause the cutting apparatus 1 to perform a cutting process on the workpiece 100 and a shaping method of the cutting tool according to the embodiment. In the present embodiment, the control unit 50 includes a computer system. The control unit 50 includes a computer system having: an arithmetic Processing Unit having a microprocessor such as a Central Processing Unit (CPU); a storage device having a Memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory); and an input/output interface device. The arithmetic processing device of the control unit 50 performs arithmetic processing in accordance with a computer program stored in the storage device of the control unit 50, and outputs a control signal for controlling the cutting apparatus 1 to each component of the cutting apparatus 1 via the input/output interface device of the control unit 50.
Next, the operation of the processing in the method for shaping a cutting insert according to the embodiment will be described with reference to the drawings. Fig. 3 is a flowchart illustrating an example of a procedure of a process of the shaping method of the cutting tool according to the embodiment. Fig. 4 is a cross-sectional view illustrating a shaping method of the cutting insert according to the embodiment. Fig. 5 and 6 are perspective views illustrating the shaping preparation step 1001 of fig. 3. Fig. 7 is a cross-sectional view illustrating the shaping preparation step 1001 of fig. 3. Fig. 8 and 9 are cross-sectional views illustrating the shaping step 1002 of fig. 3. Fig. 10 and 11 are a cross-sectional view and a plan view, respectively, illustrating an example of the inclined surface determination step 1003 in fig. 3. Fig. 12 is a plan view for explaining an example of the consumption measuring step 1004 of fig. 3.
The method of shaping a cutting tool according to the embodiment is an example of the operation processing performed by the cutting apparatus 1, and as shown in fig. 3, the method of shaping a cutting tool includes a shaping preparation step 1001, a shaping step 1002, an inclined surface determination step 1003, and a consumption amount measurement step 1004. The method of shaping the cutting tool according to the embodiment is performed on the cutting tool 21 before the cutting tool 21 is attached to the spindle 22 and the workpiece 100 is cut by the cutting tool 21, for example.
In the present embodiment, a method of shaping a cutting insert will be described, for example, as follows: as shown in fig. 4, a cutting tool 21, which is a ceramic Bond cutter (Vitrified Diamond, SD) having a kind of abrasive grains, a grain size of #800, a concentration of 100, an outer diameter of 58mm, and a thickness of 0.2mm, is shaped from a rectangular shape in a cross section along the radial direction into a shape in which an inclined surface 28 having a predetermined angle θ 1 and a predetermined width W1 with respect to the radial direction is formed on one surface 26 side of the tip (outer peripheral surface) of the cutting edge 21-1, and an inclined surface 29 having a predetermined angle θ 2 and a predetermined width W2 with respect to the radial direction is formed on the other surface 27 side. Here, as shown in fig. 4, the widths W1, W2 of the inclined surfaces 28, 29 are lengths of the inclined surfaces 28, 29 along the thickness direction of the cutting edge 21-1. The method of shaping the cutting insert is not limited to this, and the shaping can be performed in any case where the cutting insert 21 having any abrasive grain, grain size, concentration, outer diameter, and thickness is shaped into the shape of the inclined surfaces 28 and 29 having the desired angles θ 1 and θ 2 on any surfaces 26 and 27.
In the present embodiment, the side of one surface 26 of the tip of the cutting edge 21-1 of the cutting tool 21 is the positive direction (the-Y direction in fig. 4) of the axial direction of the spindle 22, and the side of the other surface 27 of the tip of the cutting edge 21-1 of the cutting tool 21 is the negative direction (the + Y direction in fig. 4) of the axial direction of the spindle 22. In the present embodiment, the method of shaping the cutting tool is performed for both the positive direction and the negative direction of the axial direction of the spindle 22. That is, in the present embodiment, the shaping step 1002 is performed for both the positive direction and the negative direction of the axial center direction of the spindle 22, the inclined surfaces 28 and 29 are formed at the tips of both the one surface 26 and the other surface 27 of the cutting edge 21-1 of the cutting tool 21, respectively, and the shaping preparation step 1001 is performed before the shaping step 1002 is performed according to the shaping step 1002 performed for each of these.
The shaping preparation step 1001 is a step of cutting the tip of the cutting edge 21-1 of the rotating cutting tool 21 into the trimming plate 200 held by the chuck table 10 by a predetermined amount 201 (see fig. 7). In the shaping preparation step 1001, first, in the present embodiment, as shown in fig. 5, for example, one surface of a plate-like trimming plate 200 is attached to an adhesive surface of an adhesive tape 105 attached so as to cover an opening on the back surface side of the ring-shaped frame 106, whereby the trimming plate 200 is accommodated in the opening of the ring-shaped frame 106 on the adhesive tape 105. In the shaping preparation step 1001, the trimming plate 200 accommodated in the opening of the annular frame 106 on the adhesive tape 105 is placed such that the exposed surface side on the opposite side of one surface of the trimming plate 200 faces upward and the adhesive tape 105 side faces the holding surface 11 of the chuck table 10, and the trimming plate 200 is sucked and held by the holding surface 11 of the chuck table 10 through the adhesive tape 105.
Here, the dressing plate 200 used in the method of dressing the cutting tool is a plate-shaped plate in which abrasive grains are fixed by a bonding material used for dressing (rounding or dressing) of the cutting tool 21, and the dressing plate 200 is cut by the cutting tool 21, whereby the cutting edge 21-1 of the cutting tool 21 is worn away, and the dressing plate 200 itself is also cut and removed by the cutting edge 21-1 of the cutting tool 21 to form a cut mark. Here, the term "rounding" means that the rotation center of the spindle 22 is aligned with the center of the outer edge of the cutting edge 21-1 of the cutting tool 21, and the term "sharpening" means that the cutting tool 21 is worn to perform self-sharpening in which abrasive grains are protruded, thereby restoring the sharpness. In the present embodiment, according to the example of the cutting tool 21, the dressing plate 200 is, for example, a dressing plate 200 in which a grinding wheel is White corundum (WA), the grain size is #800, the concentration is 50, and the plate shape is fixed by a resin bonding agent is used. In addition, the finishing plate 200 is not limited thereto in the present invention, and the finishing plate 200 of an arbitrary grinding tool, grain size, concentration, and bonding agent may be used according to the cutting tool 21.
In the shaping preparation step 1001, after the trimming plate 200 is sucked and held by the holding surface 11 of the chuck table 10 via the adhesive tape 105, the control unit 50 aligns the cutting tool 21 attached to the tip of the spindle 22 with a predetermined position (for example, a position where no cutting mark is formed near the center of the trimming plate 200) with respect to the trimming plate 200 held by the chuck table 10 by the moving unit 30. In the shaping preparation step 1001, the control unit 50 moves the cutting tool 21 relative to the trimming plate 200 in a direction in which the cutting tool 21 approaches each other in the cutting feed direction by the Z-axis moving unit 33 while rotating the cutting tool 21 subjected to the positioning at a predetermined rotation speed (for example, 10000rpm in the present embodiment), and cuts the trimming plate 200 by a predetermined amount 201 with the cutting edge 21-1 of the cutting tool 21 as shown in fig. 6 and 7.
Here, the predetermined amount 201 is appropriately set in accordance with the length in the radial direction of the desired inclined surface 28 to be formed on the side of the one surface 26 of the cutting edge 21-1 of the cutting tool 21 when the shaping step 1002 is performed in the positive direction of the axial center direction of the spindle 22, and the predetermined amount 201 is set to be larger as the length in the radial direction of the inclined surface 28 increases. Further, the predetermined amount 201 is appropriately set according to the desired length in the radial direction of the inclined surface 29 to be formed on the other surface 27 side of the cutting edge 21-1 of the cutting tool 21, similarly to the positive direction, when the shaping step 1002 is performed in the negative direction of the axial center direction of the spindle 22. In the present embodiment, the predetermined amount 201 is set to, for example, 0.7mm.
The shaping step 1002 is a step of raising the cutting tool 21 while moving the cutting tool 21 in the axial direction of the spindle 22 after the shaping preparation step 1001 is performed, and forming the inclined surfaces 28 and 29 on one surface (arbitrary surfaces 26 and 27) side of the tip of the cutting edge 21-1 of the cutting tool 21. In the shaping step 1002, when the inclined surface 28 is to be formed on the one surface 26 side of the tip of the cutting edge 21-1 of the cutting tool 21, the control unit 50 rotates the cutting tool 21 at a predetermined rotation speed (for example, 10000rpm in the present embodiment) and moves the cutting tool 21 in the direction of the one surface 26 side (positive direction of the axial direction of the spindle 22) from the position located in the shaping preparation step 1001 by the Y-axis moving unit 32 and raises the cutting tool by the Z-axis moving unit 33, as shown in fig. 8. That is, in the truing step 1002, the control unit 50 raises the cutting tool 21 in the oblique direction while pressing the surface 26 side of the rotating cutting tool 21 against the truing plate 200 in the positive direction of the axial direction of the spindle 22. Thus, in the truing step 1002, as shown in fig. 8, the one face 26 side of the tip of the cutting edge 21-1 of the cutting tool 21 is obliquely worn away by the truing plate 200 to form the inclined face 28, and the truing plate 200 is cut and removed by the cutting edge 21-1 of the cutting tool 21 to form the cut mark 202 in the truing plate 200.
In the shaping step 1002, when the inclined surface 29 is to be formed on the other surface 27 side of the tip of the cutting edge 21-1 of the cutting tool 21, the control unit 50 rotates the cutting tool 21 at a predetermined rotation speed (for example, 10000rpm in the present embodiment) and moves the cutting tool 21 in the direction toward the other surface 27 side (the negative direction of the axial center direction of the spindle 22) from the position located in the shaping preparation step 1001 by the Y-axis moving unit 32 and raises the cutting tool by the Z-axis moving unit 33 as shown in fig. 9. That is, in the truing step 1002, the control unit 50 raises the cutting tool 21 in the oblique direction while pressing the surface 27 side of the rotating cutting tool 21 against the truing plate 200 in the negative direction of the axial center direction of the spindle 22. Thus, in the truing step 1002, as shown in fig. 9, the other surface 27 side of the tip of the cutting edge 21-1 of the cutting tool 21 is obliquely worn away by the truing plate 200 to form the inclined surface 29, and the truing plate 200 is cut and removed by the cutting edge 21-1 of the cutting tool 21 to form the cut mark 203 in the truing plate 200.
Here, the relationship between the moving speed of the spindle 22 of the cutting tool 21 in the axial direction and the moving speed of the cutting tool 21 in the ascending direction in the truing step 1002 is appropriately set in consideration of the rigidity of the cutting edge 21-1 of the cutting tool 21, in accordance with the angles θ 1 and θ 2 of the desired inclined surfaces 28 and 29 to be formed. For example, the ratio of the moving speed in the axial direction to the moving speed in the rising direction is set according to the tangents (tan) of the angles θ 1 and θ 2. In the present embodiment, for example, both the angles θ 1 and θ 2 are 45 °, and both the moving speed of the spindle 22 of the cutting tool 21 in the axial direction and the moving speed of the cutting tool 21 in the ascending direction in the truing step 1002 are set to 0.1mm/s.
In the truing step 1002, the control unit 50 may move the cutting tool 21 up while moving the cutting tool 21 in the axial direction of the spindle 22, and may move the chuck table 10 holding the truing plate 200 relative to the cutting tool 21 in the X-axis direction by the X-axis moving unit 31. Thus, in the shaping step 1002, the cutting edge 21-1 of the cutting tool 21 can be rounded while forming the inclined surfaces 28 and 29 on the side of the arbitrary surfaces 26 and 27 at the tip of the cutting edge 21-1 of the cutting tool 21. Here, in the present embodiment, the moving speed of the chuck table 10 with respect to the cutting tool 21 is set to, for example, 0.3mm/s.
The inclined surface determination step 1003 is a step of determining whether or not the shape of the inclined surfaces 28 and 29 formed on the arbitrary surfaces 26 and 27 side of the cutting edge 21-1 of the cutting insert 21 by the shaping step 1002 immediately before the shaping step 1002 is a desired shape after the shaping step 1002 is performed. In the inclined surface determination step 1003, in the present embodiment, as shown in fig. 10, cutting is performed to cut through a predetermined plate 300 held by the chuck table 10 in the X axis direction by the cutting tool 21 after the shaping step 1002 is performed, the cut plate 300 is carried out from the cutting device 1, and as shown in fig. 11, the cut plate 300 is observed from the side surface in the X axis direction by a microscope or the like, and the inclined surfaces 302 and 303 of the groove 301 formed in the plate 300 and cut through in the X axis direction are observed, thereby determining whether the shapes of the inclined surfaces 28 and 29 are the desired shapes, respectively.
Here, the predetermined plate 300 used in the inclined surface determination step 1003 is a plate-shaped plate made of a material having a hardness sufficiently lower than the cutting edge 21-1 of the cutting tool 21, and the cutting tool 21 cuts the plate 300 itself to form the cutting mark 302 by cutting and removing the cutting edge 21-1 of the cutting tool 21 without abrading the cutting edge 21-1 of the cutting tool 21. In the present embodiment, a carbon plate or a silicon plate is used as the predetermined plate 300 according to the example of the cutting tool 21. The predetermined plate 300 is not limited to this in the present invention, and any plate 300 of a material having a hardness sufficiently lower than the cutting edge 21-1 of the cutting tool 21 may be used for the cutting tool 21.
In the inclined surface determining step 1003, the determination of the shape of the inclined surfaces 28 and 29 is performed by the operator of the cutting apparatus 1 in the present embodiment, but the present invention is not limited to this, and the measurement results of the angles θ 1 and θ 2 and the widths W1 and W2 of the inclined surfaces 28 and 29 observed by the operator may be input to the cutting apparatus 1 from an input unit (not shown), and the control unit 50 of the cutting apparatus 1 receiving the input may determine whether or not the measurement results are the desired angles θ 1 and θ 2 and the widths W1 and W2. When the slope determining step 1003 is executed by the control unit 50 in this way, the control unit 50 continues to automatically execute the consumption measuring step 1004, the next shaping preparation step 1001, and the shaping step 1002, which follow, based on the determination result, as will be described later.
In the present invention, the inclined surface determination step 1003 is not limited to the mode of observing the inclined surfaces 302 and 303 of the groove 301 formed in the plate 300 and cut through in the X-axis direction, and the inclined surfaces 28 and 29 may be determined by the end portions of the groove formed by so-called chopping cut in which the same predetermined plate 300 is cut to a certain depth by the cutting blade 21. The inclined surface determining step 1003 may determine the inclined surfaces 28 and 29 by observing the tip of the cutting edge 21-1 of the cutting tool 21 after the shaping step 1002 has been performed up to that point in the circumferential direction using a contour microscope, not shown, of the cutting device 1, or may determine the inclined surfaces 28 and 29 by observing the groove 301 formed in the plate 300 from the side surface of the plate 300.
In the method of shaping a cutting insert according to the embodiment, as shown in fig. 3, when it is determined in the inclined surface determining step 1003 that the shape of the inclined surfaces 28 and 29 on the side shaped in the shaping step 1002 immediately before (yes in the inclined surface determining step 1003 in fig. 3), the series of processes for forming the inclined surfaces 28 and 29 on the sides of the surfaces 26 and 27 determined to be matched are ended. On the other hand, in the method for shaping a cutting insert according to the embodiment, as shown in fig. 3, when it is determined in the inclined surface determining step 1003 that the shape of the inclined surfaces 28 and 29 on the side shaped in the shaping step 1002 immediately before (no in the inclined surface determining step 1003 in fig. 3), after the consumption measuring step 1004 described later is performed, a series of processes for forming the inclined surfaces 28 and 29 on the sides of the surfaces 26 and 27 determined not to have the desired shape are repeated (shaping preparation step 1001 and shaping step 1002). In this way, the shaping method of the cutting insert according to the embodiment repeats the shaping preparation step 1001 and the shaping step 1002 for the respective surfaces 26 and 27 at the tip end of the cutting edge 21-1 of the cutting insert 21 until the inclined surfaces 28 and 29 have the desired shapes (the angles θ 1 and θ 2 and the widths W1 and W2).
The consumption amount measuring step 1004 is a step of measuring the consumption amount of the cutting edge 21-1 of the cutting tool 21 after the shaping step 1002 is performed and before the shaping preparation step 1001 is performed again. In the present embodiment, the consumption measuring step 1004 is performed when the shaping preparation step 1001 and the shaping step 1002 are performed again based on the result of the inclined surface determining step 1003 performed after the shaping step 1002 is performed.
In the present embodiment, the consumption measuring step 1004 is performed using the cutting tool detecting unit 60 (shown in fig. 12) provided below the cutting unit 20 in the cutting apparatus 1. As shown in fig. 12, the cutting tool detection unit 60 includes a groove member 61, a light emitting portion 62, a light receiving portion 63, a light source 64, a photoelectric conversion portion 65, a reference voltage setting portion 66, a voltage comparison portion 67, an end position detection portion 68, a calculation portion 69, and a position correction portion 70.
The groove member 61 is formed with a groove 61-1 into which the cutting edge 21-1 of the cutting tool 21 can enter along the X-axis direction, and a light emitting portion 62 and a light receiving portion 63 having optical axes along the Y-axis direction are arranged facing each other on both side portions of the groove 61-1. The light emitting section 62 is optically connected to a light source 64 via an optical fiber or the like, and emits light from the light source 64 toward a light receiving section 63. The light receiving unit 63 is optically connected to a light receiving element via an optical fiber or the like, and the light emitted from the light emitting unit 62 and reaching the light receiving unit 63 is detected by the light receiving element. The light receiving unit 63 is optically connected to a photoelectric conversion unit 65 via an optical fiber or the like, and transmits light received from the light emitting unit 62 to the photoelectric conversion unit 65.
The photoelectric conversion portion 65 outputs a voltage corresponding to the light amount of the light transmitted from the light receiving portion 63 to the voltage comparison portion 67. When the amount of the cutting edge 21-1 of the cutting tool 21 shielding between the light emitting portion 62 and the light receiving portion 63 increases as the tip of the cutting edge 21-1 of the cutting tool 21 enters the groove 61-1, the output voltage from the photoelectric conversion portion 65 gradually decreases. In the present embodiment, the photoelectric conversion portion 65 outputs a voltage of 5V (maximum voltage) when the light receiving rate, which is the ratio of the amount of light received by the light receiving portion 63 to the amount of light emitted by the light emitting portion 62, is 100%, and outputs a voltage of 0V (minimum voltage) when the light receiving rate is 0%. The photoelectric conversion unit 65 is set so that the output voltage becomes a predetermined reference voltage (3V in the present embodiment) when the amount of light received by the light receiving unit 63 becomes a predetermined amount of light, that is, when the tip of the cutting edge 21-1 of the cutting tool 21 reaches a predetermined position between the light emitting unit 62 and the light receiving unit 63. The reference voltage setting unit 66 outputs the set predetermined reference voltage to the voltage comparison unit 67. In the present embodiment, the predetermined reference voltage is 3V as described above.
The voltage comparing unit 67 compares the output from the photoelectric conversion unit 65 with the reference voltage set by the reference voltage setting unit 66, and outputs a signal indicating that the output from the photoelectric conversion unit 65 has reached the reference voltage to the end position detecting unit 68. The end position detecting unit 68 outputs the position of the tip of the cutting edge 21-1 of the cutting tool 21 in the Z-axis direction at the time output from the voltage comparing unit 67 to the calculating unit 69. The calculation unit 69 outputs a difference value between the Z-axis reference position of the tip of the cutting edge 21-1 of the cutting tool 21, which is stored in advance, and the position output from the end position detection unit 68 to the position correction unit 70. The position correction unit 70 corrects the position of the tip of the cutting edge 21-1 of the cutting tool 21 in the Z-axis direction based on the value output from the calculation unit 69.
In the present embodiment, the functions of the photoelectric conversion unit 65, the reference voltage setting unit 66, the voltage comparison unit 67, the calculation unit 69, and the position correction unit 70 are realized in the control unit 50 by the arithmetic processing device of the control unit 50 executing a computer program stored in the storage device of the control unit 50.
In the consumption measuring step 1004, the calculating unit 69 acquires the position of the tip of the cutting edge 21-1 of the cutting tool 21 in the Z-axis direction by the end position detecting unit 68. In the consumption amount measuring step 1004, the subsequent calculating unit 69 calculates the difference between the position of the tip of the cutting edge 21-1 of the cutting tool 21 in the Z-axis direction acquired after the shaping step 1002 has been performed and the position of the tip of the cutting edge 21-1 of the cutting tool 21 in the Z-axis direction acquired before the shaping step 1002 has been performed, detects the calculated difference as the consumption amount (wear amount) in the radial direction of the tip of the cutting edge 21-1 of the cutting tool 21 during the shaping preparation step 1001 and the shaping step 1002 have been performed, and outputs the detected consumption amount to the control unit 50.
In the consumption amount measuring step 1004, the consumption amount of the cutting edge 21-1 of the cutting blade 21 can be measured by using the length of the groove formed in the predetermined plate 300 by the cutting blade 21 by the chopping-type cutting, without being limited to the mode using the cutting blade detection means 60.
In the method of truing a cutting tool according to the embodiment, in the truing preparation step 1001 of the 2 nd and subsequent times, the control unit 50 moves the cutting tool 21 in the direction approaching each other along the cutting feed direction with respect to the truing plate 200 so as to increase the consumption of the cutting edge 21-1 of the cutting tool 21 acquired in the previous consumption measurement step 1004, and cuts into the truing plate 200 with the cutting edge 21-1 of the cutting tool 21. Thus, in the shaping preparation step 1001 of the 2 nd and subsequent times, even if the cutting edge 21-1 of the cutting tool 21 is consumed by the shaping preparation step 1001 and the shaping step 1002 up to this point, the cutting edge 21-1 of the cutting tool 21 can be cut into the trimming plate 200 by the predetermined amount 201 in consideration of the amount of consumption.
In the shaping method of the cutting tool according to the embodiment, after the series of processes of the shaping method of the cutting tool shown in fig. 3 is performed as described above on the side of the one surface 26 of the tip of the cutting edge 21-1 of the cutting tool 21 (the positive direction in the axial direction of the spindle 22) to form the desired inclined surface 28, the series of processes of the shaping method of the cutting tool shown in fig. 3 is further performed on the side of the other surface 27 of the tip of the cutting edge 21-1 of the cutting tool 21 (the negative direction in the axial direction of the spindle 22) to form the desired inclined surface 29, independently of the series of processes, to form the desired inclined surface 28, 29 on the two surfaces 26, 27 of the cutting edge 21-1 of the cutting tool 21 shown in fig. 4.
In the shaping method of the cutting insert of the embodiment having the above-described configuration, the inclined surfaces 28 and 29 can be easily formed at the distal end of the cutting insert 21 only by obliquely raising the cutting insert 21 while cutting into the trimming plate 200, which is routinely used for trimming (rounding or sharpening) the cutting insert 21, and therefore, the following operational effects are exhibited: the inclined shape of the cutting tool 21 can be easily shaped at low cost without introducing new equipment or parts.
In addition, in the case of purchasing a shaped cutting tool having an inclination formed at the tip end from a manufacturer, the center position of the outer edge of the cutting tool is slightly offset from the rotation center of the spindle and becomes eccentric when attached to the spindle, but the shaping method of the cutting tool according to the embodiment has an effect of shaping the shape of the cutting tool 21 in a state without eccentricity since the shape of the cutting tool 21 is shaped after being attached to the spindle 22. In addition, the method for shaping a cutting insert according to the embodiment also has the following operational effects: even if the cutting insert 21 is deformed, the shape of the cutting insert 21 can be easily reshaped again with ease.
[ modified examples ]
A method of shaping a cutting insert according to modifications 1 and 2 of the present invention will be described with reference to the drawings. Fig. 13 and 14 are cross-sectional views for explaining the shaping method of the cutting insert according to modifications 1 and 2, respectively. In fig. 13 and 14, the same portions as those in the embodiment are denoted by the same reference numerals, and the description thereof is omitted.
As shown in fig. 4 and 13, the shaping method of the cutting insert of modification 1 is different in shape of the cutting insert 21 before shaping as compared with the shaping method of the cutting insert of the embodiment, and the other configurations are the same as the embodiment. In modification 1, although the cutting tool 21 before truing has the inclined surfaces 28 and 29 formed on the surfaces 26 and 27 at the distal end of the cutting edge 21-1, the shape is deformed by the cutting process of the workpiece 100. The method for truing a cutting insert of modification 1 can be used to tru the cutting insert 21 having such a shape before truing into a shape having the desired inclined surfaces 28 and 29 by exactly the same method as the method for truing a cutting insert of the embodiment.
As shown in fig. 4 and 14, the shaping method of the cutting insert of modification 2 is different in shape between the cutting insert 21 before and after shaping as compared with the shaping method of the cutting insert of the embodiment, and the other configuration is the same as the embodiment. In modification 2, the cutting tool 21 before truing does not have the inclined surface 29 formed on the surface 27 at the tip of the cutting edge 21-1, and the inclined surface 28 having the same width W1 as the thickness of the cutting edge 21-1 and larger than that of the embodiment is formed on the surface 26 at the tip of the cutting edge 21-1, but the shape is deformed by the cutting process of the workpiece 100 or the like. In modification 2, the shaped cutting insert 21 does not have the inclined surface 29 formed on the surface 27 at the tip of the cutting edge 21-1, and the desired inclined surface 28 having a width W1 larger than that of the embodiment is formed on the surface 26 at the tip of the cutting edge 21-1. The shaping method of the cutting insert of modification 2 can shape the cutting insert 21 before shaping in such a shape into a shape in which the desired inclined surface 28 is formed, by performing the same method as the shaping method of the cutting insert of the embodiment only on the surface 26 side of the tip of the cutting edge 21-1 of the cutting insert 21.
The present invention is not limited to the above embodiments. That is, various modifications can be made and implemented without departing from the scope of the present invention.

Claims (3)

1. A method of truing a cutting tool by using a cutting device having a chuck table for holding a workpiece by a holding surface, a cutting unit for cutting the workpiece held by the chuck table by attaching the cutting tool in an annular shape to a spindle having an axis parallel to the holding surface, and a moving unit for relatively moving the chuck table and the cutting unit, wherein,
the shaping method of the cutting tool comprises the following steps:
a shaping preparation step of cutting the front end of the rotating cutting tool into the trimming plate held by the chuck table by a predetermined amount; and
a shaping step of raising the cutting tool while moving the cutting tool in the axial direction of the spindle after the shaping preparation step is performed, to form an inclined surface on one surface side of the tip of the cutting tool,
the truing preparation step and the truing step are repeated until the inclined surface of the cutting insert has a desired angle or width.
2. The method of shaping a cutting tool according to claim 1,
the truing step is performed in both the positive direction and the negative direction of the axial center direction of the spindle, and an inclined surface is formed at the tip of both one surface and the other surface of the cutting tool.
3. The method of shaping a cutting tool according to claim 1 or 2,
the method for reshaping the cutting tool comprises the following consumption measuring steps: after the shaping step has been carried out and before the shaping preparation step is carried out again, the consumption of the cutting tool is measured,
even if the cutting tool is consumed, the cutting tool is caused to cut into the workpiece by a predetermined amount in the truing preparation step.
CN202210944643.6A 2021-08-11 2022-08-08 Method for shaping cutting tool Pending CN115703203A (en)

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JP2021131320A JP2023025889A (en) 2021-08-11 2021-08-11 Cutting blade shaping method
JP2021-131320 2021-08-11

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JP3999584B2 (en) 2002-07-04 2007-10-31 株式会社ディスコ Method for dividing ceramic chip capacitor sheet
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