CN115684273A - High-temperature ultrahigh-precision electric transportation test system and test method thereof - Google Patents
High-temperature ultrahigh-precision electric transportation test system and test method thereof Download PDFInfo
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- CN115684273A CN115684273A CN202211413947.6A CN202211413947A CN115684273A CN 115684273 A CN115684273 A CN 115684273A CN 202211413947 A CN202211413947 A CN 202211413947A CN 115684273 A CN115684273 A CN 115684273A
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- 238000012360 testing method Methods 0.000 title claims abstract description 151
- 238000010998 test method Methods 0.000 title claims abstract description 15
- 238000001179 sorption measurement Methods 0.000 claims abstract description 27
- 238000005086 pumping Methods 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 abstract description 8
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- XZWYZXLIPXDOLR-UHFFFAOYSA-N metformin Chemical compound CN(C)C(=N)NC(N)=N XZWYZXLIPXDOLR-UHFFFAOYSA-N 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
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Abstract
The invention discloses a high-temperature ultra-high precision electric transportation test system and a test method, belonging to the technical field of material electrical property test.A sample to be tested is placed on a sample table in a vacuum cavity, and the sample to be tested is connected into a test circuit; starting a vacuumizing unit of the vacuum system, and vacuumizing the vacuum cavity through the vacuumizing unit; closing a vacuumizing unit in the vacuum system, starting a cold adsorption pump in the vacuum system, and maintaining the vacuum cavity in a high vacuum state through the cold adsorption pump; and starting the test system, setting the test temperature according to the test requirement, and testing the electrical property of the sample to be tested so as to achieve the purposes that the test result reaches the magnitude of 10fA in the high vacuum environment, the data of the test result is stable and reliable, and meanwhile, the electrical property of the high-resistance sample can be tested at different temperature points and under variable temperature conditions.
Description
Technical Field
The invention belongs to the technical field of material electrical property testing, and particularly relates to a high-temperature ultrahigh-precision electric transportation testing system and a testing method thereof.
Background
In electronic systems, silicon oxide (SiO) 2 ) The dielectric film is an important component of CMOS devices and BJT devices, and plays an important role in insulating and isolating external circuits, etc. due to its high resistance characteristics. SiO for use in electronic devices 2 Dielectric films tend to have many defects such as oxygen defects, silicon dangling bonds, and the like. Mixing SiO 2 Is placed in H 2 Medium passivation, which eliminates the Si dangling bonds by forming Si-H bonds, but the extent of Si-H cleavage and SiO 2 The electrical properties of the dielectric film itself can severely affect the performance of the device. Thus, siO is analyzed by an electrotransport test system 2 The internal structure of the high-resistance material, such as Si-H bond breaking time, carrier mobility, drift velocity and other performances, has important significance.
Conventional electrical characteristics include VI curves, charge and discharge properties, hall properties, and the like, which are readily available at low resistance. But in high-resistance materials, e.g. SiO 2 Dielectric film resistivity of 10 14 Omega cm, when 1V voltage is applied to the silicon oxide film with the centimeter scale, the test current can reach 10fA magnitude, and the thermal noise current under the normal temperature or high temperature condition can far exceed the magnitude.
Therefore, an ultrahigh-precision electric transport test system with the noise current less than 10fA and the test current reaching 10fA-1000fA is constructed, and becomes an essential key technology for researching the electrical characteristics of high-resistance materials.
Disclosure of Invention
In view of the above, in order to solve the above problems in the prior art, the present invention provides a high-temperature ultra-high precision electric transportation testing system and a testing method thereof, so as to achieve the purpose that the testing result reaches the 10fA level in the high vacuum environment, the data of the testing result is stable and reliable, and meanwhile, the purpose of testing the electrical properties of the high-resistance sample at different temperature points and under variable temperature conditions can be achieved.
The technical scheme adopted by the invention is as follows: a high temperature ultra-high precision electric transport test system, the test system comprising:
the device comprises a vacuum cavity, a sample to be tested is placed in the vacuum cavity;
the vacuum system is communicated with the vacuum cavity, and the vacuum system is used for vacuumizing the vacuum cavity and maintaining a vacuum state;
and the test system is connected with the sample to be tested to form a test circuit, and the test current of the test circuit reaches the magnitude of 10fA-1000fA.
Furthermore, a sample table is arranged in the vacuum cavity, an oxygen-free copper sheet is arranged on the surface of the sample table, and the oxygen-free copper sheet and the side wall of the vacuum cavity are in an insulation state, so that a sample to be detected is prevented from generating noise current.
Further, the vacuum system includes:
the vacuumizing unit is communicated with the vacuum cavity and is used for vacuumizing the inside of the vacuum cavity;
the cold adsorption pump is communicated with the vacuum cavity and maintains the vacuum state in the vacuum cavity through the cold adsorption pump;
wherein the cold adsorption pump and the vacuum pumping unit are not communicated to the inside of the vacuum cavity simultaneously, one part of the vacuum system is a mechanical pump and the cold adsorption pump, the other part is the cold adsorption pump, after a certain vacuum is pumped by a mechanical pump and a molecular pump, a connecting pipeline between the part and the vacuum cavity is closed, a connecting pipeline between a vacuum system of the cold adsorption pump part and the vacuum cavity is opened, and the high vacuum state of the system is maintained by the cold adsorption pump.
Furthermore, the vacuum pumping unit comprises a mechanical pump and a molecular pump, the mechanical pump and the molecular pump are communicated to the vacuum cavity through a three-branch pipeline, and a manual valve is arranged on the three-branch pipeline and is closed by the manual valve, so that compared with an electric valve, the noise is reduced.
Further, the test system includes:
a host;
the test power supply is electrically connected with the host;
the test instrument is electrically connected with the host;
the test power supply, the sample to be tested and the test instrument are connected in series to form a closed loop circuit.
Furthermore, the anode of the test power supply is connected to a sample to be tested through an aviation plug, the anode of the test instrument is coaxially connected to the sample to be tested through high voltage, and an insulating layer is arranged between the high-end coaxial cable and the side wall of the vacuum cavity;
the negative electrode of the test power supply and the negative electrode of the test instrument are both connected to the side wall of the vacuum cavity, the side wall of the vacuum cavity is grounded, the vacuum cavity and the lower end are grounded, and the influence of charge accumulation on a test result is avoided;
by adopting the connection mode, the noise environment can be optimized, and meanwhile, the ultrahigh noise signal shielding terminal is adopted to connect the high-end coaxial cable and the lead, so that the noise is reduced.
Furthermore, the test power supply is set as a constant voltage power supply, a constant voltage source mode is used in high-resistance measurement, noise can be further reduced, and the voltage source meter and the test instrument of the test power supply both adopt an electrometer to respectively measure voltage and current.
Furthermore, labVIEW software is loaded on the host machine, and a test control program is compiled through the LabVIEW software.
The invention also provides a high-temperature ultra-high precision electric transportation test method, which comprises the following steps:
s1: placing a sample to be tested on a sample table in a vacuum cavity, and connecting the sample to be tested into a test circuit;
s2: starting a vacuumizing unit of the vacuum system, and vacuumizing the vacuum cavity through the vacuumizing unit;
s3: closing a vacuumizing unit in the vacuum system, starting a cold adsorption pump in the vacuum system, and maintaining the vacuum cavity in a high vacuum state through the cold adsorption pump;
s4: starting a test system, setting a test temperature according to test requirements, and testing the electrical property of a sample to be tested;
the test method has the advantages that: the high vacuum of the system can be maintained for a long time, the test result reaches the fA magnitude, and the electrical properties of the high-resistance sample at different temperature points and under the condition of variable temperature can be tested.
Further, the test procedure of S4 includes:
s401: loading test software through a test system;
s402: starting a test circuit by test software, applying test voltage to a sample to be tested according to test requirements, and recording the test current of the sample to be tested;
s403: generating a test result table by test software;
the whole testing process is realized by controlling the testing program through software, and the noise and vibration influence caused by manual testing can be reduced.
The invention has the beneficial effects that:
1. by adopting the high-temperature ultrahigh-precision electric transportation testing system provided by the invention, the testing environment of the sample can be maintained in a high vacuum state for a long time through the improved vacuum system, the thermal noise current under the normal temperature or high temperature condition is avoided, the testing result of the high-resistance material sample can be ensured to reach the fA magnitude, and the data obtained in the testing process is stable and reliable.
2. By adopting the high-temperature ultra-high precision electric transportation testing method provided by the invention, the whole testing process is to obtain a control program through LabVIEW software programming, the electric properties of high-resistance material samples at different temperature points and under variable temperature conditions can be tested, and meanwhile, the software control of the testing program reduces the noise and vibration influence caused by artificial testing.
Drawings
FIG. 1 is a schematic diagram of the overall structural arrangement of a high-temperature ultra-high precision electric transportation test system provided by the present invention;
FIG. 2 is a schematic diagram of a test circuit in the high temperature ultra-high precision electric transportation test system provided by the present invention;
FIG. 3 is a table of test results generated in the high temperature ultra-high precision electrical transport test method provided by the present invention;
the figures are labeled as follows:
1-vacuum cavity, 2-sample stage, 3-sample to be measured, 4-high-end coaxial, 5-insulating layer, 6-aviation plug, 7-grounding end, 8-vacuum system and 9-shielding iron cabinet.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar modules or modules having the same or similar functionality throughout. The embodiments described below with reference to the accompanying drawings are illustrative and are only for the purpose of explaining the present application and are not to be construed as limiting the present application. On the contrary, the embodiments of the application include all changes, modifications and equivalents coming within the spirit and terms of the claims appended hereto.
Example 1
The embodiment provides a high-temperature ultrahigh-precision electric transport test system, and aims to avoid thermal noise current under normal temperature or high temperature conditions to the maximum extent through the test system, so that the test current of a high-resistance material can reach 10fA-1000fA.
Specifically, as shown in fig. 1, the test system includes the following components: the device comprises a vacuum cavity 1, a vacuum system 8 and a test system, wherein a sample 3 to be tested is placed in the vacuum cavity 1, the vacuum cavity 1 can be made of a stainless steel tank, a sample table 2 is arranged in the vacuum cavity 1, and preferably, the sample table 2 is positioned in the center of the vacuum cavity 1. An oxygen-free copper sheet is arranged on the surface of the sample table 2, and the oxygen-free copper sheet and the side wall of the vacuum cavity 1 are in an insulation state, so that noise current is prevented from being generated between the sample 3 to be detected and the side wall of the vacuum cavity 1.
The vacuum system 8 is communicated with the vacuum cavity 1, the vacuum system 8 is used for vacuumizing the vacuum cavity 1 and maintaining a vacuum state, and the vacuum system 8 comprises a vacuumizing unit and a cold adsorption pump, so that on one hand, the vacuumizing unit is communicated with the vacuum cavity 1, and the inside of the vacuum cavity 1 is vacuumized through the vacuumizing unit, so that high vacuum is formed in the vacuum cavity 1; on the other hand, the cold adsorption pump is communicated with the vacuum cavity 1, and the vacuum state is maintained in the vacuum cavity 1 through the cold adsorption pump, so that the noise requirement of the subsequent sample 3 to be detected is met.
In order to meet the above functional requirements, it is necessary to ensure that the cold adsorption pump and the vacuum pumping unit are not communicated with the inside of the vacuum chamber 1 at the same time, specifically, the vacuum pumping unit includes a mechanical pump and a molecular pump, the mechanical pump and the molecular pump are communicated with the vacuum chamber 1 through a three-branch pipeline, the three-branch pipeline is provided with a first manual valve, and a "molecular pump-mechanical pump" two-stage pump vacuum system 8 is formed by the mechanical pump and the molecular pump. In practical application, a KYKY type molecular pump is adopted as the molecular pump, and a dry pump is adopted as the mechanical pump.
The cold adsorption pump vacuum-maintaining unit is used for maintaining a high vacuum state in the vacuum cavity 1, and a second manual valve is arranged on a communication pipeline between the cold adsorption pump and the vacuum cavity 1. During vacuum pumping, the first manual valve is opened and the second manual valve is closed; after the vacuum pumping is finished, the first manual valve is closed, the second manual valve is opened, and the cold adsorption pump is started to maintain the high vacuum state of the vacuum cavity 1. The cold adsorption pump is a device for maintaining high vacuum by adsorbing gas molecules through an active substance (molecular sieve), and the cold adsorption pump controls a switch through a manual valve and is a part of a vacuum system 8. Compared with a mechanical pump and a molecular pump, the device has no noise, and can greatly reduce the influence of external vibration on the test.
In order to avoid external noise and vibration caused by human factors, the test system is realized by adopting test software when executing a test process. The test system comprises: the device comprises a host, a test power supply and a test instrument, wherein the test power supply, a sample 3 to be tested and the test instrument are connected in series to form a closed loop circuit, and when the device is in practical application, a lead in the closed loop circuit is wrapped by tinfoil paper so as to optimize and achieve a state almost without noise.
Specifically, labVIEW software is loaded on the host machine, and a test control program is programmed and written through the LabVIEW software. As shown in fig. 2, a constant voltage power supply is used as a test power supply, the anode of the test power supply is connected to a sample 3 to be tested through an aviation plug 6, the cathode of the test power supply is connected to the side wall of the vacuum cavity 1, and the side wall of the vacuum cavity 1 is grounded; meanwhile, voltage source meters are connected to two ends of the test power supply, the voltage source meters are electrically connected with the host, the voltage value of the test power supply is measured through the voltage source meters, and the electrometer is used as the voltage source meters. The electrometer is used as a test instrument, the anode of the test instrument is coaxially connected to a sample 3 to be tested through high voltage, an insulating layer 5 is arranged between a high-end shaft 4 and the side wall of the vacuum cavity 1, the cathode of the test instrument is connected to the side wall of the vacuum cavity 1, and the side wall of the vacuum cavity 1 is grounded. In practical application, a 6517B electrometer is adopted, and meanwhile, the electrometer is placed in a fully-closed shielding iron cabinet 9 to shield electromagnetic signals.
The test power supply, the test instrument and the sample 3 to be tested are connected into a test circuit, and the test current of the sample 3 to be tested can reach 10fA-1000fA magnitude under the control of a test control program.
Example 2
On the basis of the high-temperature ultrahigh-precision electric transportation test system provided in embodiment 1, a high-temperature ultrahigh-precision electric transportation test method is specifically provided in this embodiment, and the test method includes:
s1: the sample 3 to be measured is placed on the sample stage 2 in the vacuum chamber 1, so that the sample 3 to be measured is in the environment of high vacuum state, in this embodiment, the sample 3 to be measured is made of ultra-high resistance sample (film, block), for example: a SiO2 film. Then the sample 3 to be tested is connected into the test circuit, one end of the sample 3 to be tested is connected with the anode of the test power supply, and the other end of the sample 3 to be tested is connected with the cathode of the test instrument, so that voltage can be applied to two ends of the sample 3 to be tested;
s2: starting a vacuumizing unit of the vacuum system 8, and vacuumizing the vacuum cavity 1 through a double-stage vacuum system 8 consisting of a mechanical pump and a molecular pump in the vacuumizing unit until the vacuum requirement required by the test is met;
s3: closing the vacuumizing unit in the vacuum system 8 and closing the first manual valve at the same time, opening the cold adsorption pump in the vacuum system 8 and opening the second manual valve at the same time, and maintaining the vacuum cavity 1 in a high vacuum state through the cold adsorption pump;
s4: and starting a test system, setting a test temperature according to test requirements, standing and reducing the noise for more than 8 hours, and testing the electrical property of the sample 3 to be tested when the noise of the system is reduced to be lower than 10fA magnitude.
The step S4 of testing the electrical properties of the sample 3 to be tested specifically comprises the following steps:
s401: test software is loaded through a test system, and the running logic of the test software is compiled through LabVIEW software;
s402: starting a test circuit by test software, applying test voltage to the sample 3 to be tested according to test requirements, and recording the test current of the sample 3 to be tested; the logic of the test process is:
(1) according to the test requirement of the sample 3 to be tested, starting a constant voltage power supply to apply 1V voltage to the sample 3 to be tested, and simultaneously feeding back a voltage measurement value to a host by an electrometer connected to the constant voltage power supply; in practical application, voltages of 5V, 10V, 50V and 100V can be applied to the sample 3 to be tested according to practical requirements;
(2) and another electrometer is used as a test instrument and is used for measuring the current of the sample 3 to be measured, and on the basis of the test method, the noise of the test environment can be reduced to be lower than 10fA magnitude, so that the current of the sample 3 to be measured is measured to be 10fA magnitude.
S403: a test result table is generated by the test software as shown in fig. 3. The test method is suitable for samples below 10^15 omega magnitude, can effectively test the electrical property, and can ensure that the test current can reach 10fA magnitude.
It should be noted that any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and that the scope of the preferred embodiments of the present application includes additional implementations in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the embodiments of the present application.
It should be understood that portions of the present application may be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, the various steps or methods may be implemented in software or firmware stored in memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, any one or combination of the following technologies, which are well known in the art, may be used: a discrete logic circuit having a logic gate circuit for implementing a logic function on a data signal, an application specific integrated circuit having an appropriate combinational logic gate circuit, a Programmable Gate Array (PGA), a Field Programmable Gate Array (FPGA), or the like.
It will be understood by those skilled in the art that all or part of the steps carried by the method for implementing the above embodiments may be implemented by hardware related to instructions of a program, which may be stored in a computer readable storage medium, and when the program is executed, the program includes one or a combination of the steps of the method embodiments.
In addition, functional units in the embodiments of the present application may be integrated into one processing module, or each unit may exist alone physically, or two or more units are integrated into one module. The integrated module can be realized in a hardware mode, and can also be realized in a software functional module mode. The integrated module, if implemented in the form of a software functional module and sold or used as a separate product, may also be stored in a computer-readable storage medium.
The storage medium mentioned above may be a read-only memory, a magnetic or optical disk, etc.
Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations may be made to the above embodiments by those of ordinary skill in the art within the scope of the present application.
Claims (10)
1. A high-temperature ultra-high precision electric transportation test system is characterized by comprising:
the device comprises a vacuum cavity, a sample to be tested is placed in the vacuum cavity;
the vacuum system is communicated with the vacuum cavity, and the vacuum system is used for vacuumizing the vacuum cavity and maintaining a vacuum state;
and the test system is connected with the sample to be tested to form a test circuit, and the test current of the test circuit reaches the magnitude of 10fA-1000fA.
2. The system for testing high-temperature ultra-high precision electric transportation according to claim 1, wherein a sample stage is arranged in the vacuum chamber, the surface of the sample stage is provided with an oxygen-free copper sheet, and the oxygen-free copper sheet is insulated from the side wall of the vacuum chamber.
3. The high temperature ultra-high precision electric transport testing system of claim 1, wherein the vacuum system comprises:
the vacuumizing unit is communicated with the vacuum cavity and is used for vacuumizing the inside of the vacuum cavity;
the cold adsorption pump is communicated with the vacuum cavity and maintains the vacuum state in the vacuum cavity through the cold adsorption pump;
the cold adsorption pump and the vacuumizing unit are not communicated with the inside of the vacuum cavity at the same time.
4. The system according to claim 3, wherein the vacuum pumping unit comprises a mechanical pump and a molecular pump, the mechanical pump and the molecular pump are communicated to the vacuum chamber through a three-branch pipeline, and a manual valve is arranged on the three-branch pipeline.
5. The high temperature ultra-high precision electric transportation test system of claim 1, wherein the test system comprises:
a host;
the test power supply is electrically connected with the host;
the test instrument is electrically connected with the host;
the test power supply, the sample to be tested and the test instrument are connected in series to form a closed loop circuit.
6. The high-temperature ultrahigh-precision electric transportation test system according to claim 5, characterized in that the anode of the test power supply is connected to the sample to be tested through an aviation plug, the anode of the test instrument is coaxially connected to the sample to be tested through high voltage, and an insulating layer is arranged between the high-end coaxial cable and the side wall of the vacuum cavity;
the negative pole of the test power supply and the negative pole of the test instrument are both connected to the side wall of the vacuum cavity, and the side wall of the vacuum cavity is grounded.
7. The system according to claim 5, wherein the test power supply is a constant voltage power supply, and both the voltage source meter and the test instrument of the test power supply are electrometers.
8. The high temperature ultra-high precision electric transportation test system of claim 5, wherein the mainframe is loaded with LabVIEW software.
9. A high-temperature ultra-high precision electric transportation test method is characterized by comprising the following steps:
s1: placing a sample to be tested on a sample table in a vacuum cavity, and connecting the sample to be tested into a test circuit;
s2: starting a vacuumizing unit of the vacuum system, and vacuumizing the vacuum cavity through the vacuumizing unit;
s3: closing a vacuumizing unit in the vacuum system, starting a cold adsorption pump in the vacuum system, and maintaining a high vacuum state of the vacuum cavity through the cold adsorption pump;
s4: starting a test system, setting a test temperature according to test requirements, and testing the electrical property of a sample to be tested;
the test method has the advantages that: the high vacuum of the system can be maintained for a long time, the test result reaches the fA magnitude, and the electrical properties of the high-resistance sample at different temperature points and under the condition of variable temperature can be tested.
10. The high-temperature ultra-high precision electrical transportation test method of claim 9, wherein the test procedure of S4 comprises:
s401: loading test software through a test system;
s402: starting a test circuit by test software, applying test voltage to a sample to be tested according to test requirements, and recording the test current of the sample to be tested;
s403: and generating a test result table by test software.
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101846635A (en) * | 2010-05-07 | 2010-09-29 | 中国科学院半导体研究所 | Ultra-high vacuum multifunctional integrated test system |
| CN102707204A (en) * | 2012-05-24 | 2012-10-03 | 中国科学院等离子体物理研究所 | Testing experimental platform for performing disruptive discharge on insulation sample under low-temperature vacuum environment |
| CN102928718A (en) * | 2012-11-06 | 2013-02-13 | 华北电力大学 | Superconductivity insulation material electrical characteristic test device |
| CN103226167A (en) * | 2013-04-24 | 2013-07-31 | 兰州空间技术物理研究所 | Conductivity measurement device and method of dielectric material |
| CN103900869A (en) * | 2014-03-03 | 2014-07-02 | 复旦大学 | Low-temperature molecular sieve adsorption pump device |
| CN108107260A (en) * | 2017-11-20 | 2018-06-01 | 北京雪迪龙科技股份有限公司 | Wide-range high-precision micro current system and method |
| CN109738701A (en) * | 2019-01-11 | 2019-05-10 | 华北电力大学 | A kind of conductivity measuring device and method |
| CN112129807A (en) * | 2020-09-28 | 2020-12-25 | 沈阳鹏程真空技术有限责任公司 | High-vacuum low-temperature metal testing device testing method |
| CN113504268A (en) * | 2021-06-10 | 2021-10-15 | 上海大学 | System-level electrical performance testing device for perovskite device |
| CN114859127A (en) * | 2022-06-13 | 2022-08-05 | 广东电网有限责任公司广州供电局 | Sample high-voltage resistivity testing device |
-
2022
- 2022-11-11 CN CN202211413947.6A patent/CN115684273A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101846635A (en) * | 2010-05-07 | 2010-09-29 | 中国科学院半导体研究所 | Ultra-high vacuum multifunctional integrated test system |
| CN102707204A (en) * | 2012-05-24 | 2012-10-03 | 中国科学院等离子体物理研究所 | Testing experimental platform for performing disruptive discharge on insulation sample under low-temperature vacuum environment |
| CN102928718A (en) * | 2012-11-06 | 2013-02-13 | 华北电力大学 | Superconductivity insulation material electrical characteristic test device |
| CN103226167A (en) * | 2013-04-24 | 2013-07-31 | 兰州空间技术物理研究所 | Conductivity measurement device and method of dielectric material |
| CN103900869A (en) * | 2014-03-03 | 2014-07-02 | 复旦大学 | Low-temperature molecular sieve adsorption pump device |
| CN108107260A (en) * | 2017-11-20 | 2018-06-01 | 北京雪迪龙科技股份有限公司 | Wide-range high-precision micro current system and method |
| CN109738701A (en) * | 2019-01-11 | 2019-05-10 | 华北电力大学 | A kind of conductivity measuring device and method |
| CN112129807A (en) * | 2020-09-28 | 2020-12-25 | 沈阳鹏程真空技术有限责任公司 | High-vacuum low-temperature metal testing device testing method |
| CN113504268A (en) * | 2021-06-10 | 2021-10-15 | 上海大学 | System-level electrical performance testing device for perovskite device |
| CN114859127A (en) * | 2022-06-13 | 2022-08-05 | 广东电网有限责任公司广州供电局 | Sample high-voltage resistivity testing device |
Non-Patent Citations (1)
| Title |
|---|
| 王广才等: "激活能真空自动测试系统的研发", 《真空与低温》, vol. 23, no. 6, pages 1 - 4 * |
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