CN112129807A - High-vacuum low-temperature metal testing device testing method - Google Patents

High-vacuum low-temperature metal testing device testing method Download PDF

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Publication number
CN112129807A
CN112129807A CN202011036916.4A CN202011036916A CN112129807A CN 112129807 A CN112129807 A CN 112129807A CN 202011036916 A CN202011036916 A CN 202011036916A CN 112129807 A CN112129807 A CN 112129807A
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China
Prior art keywords
vacuum
testing device
temperature
sample
low
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Pending
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CN202011036916.4A
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Chinese (zh)
Inventor
马宇航
董顺
曹崇友
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Shenyang Pengcheng Vacuum Technology Co ltd
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Shenyang Pengcheng Vacuum Technology Co ltd
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Priority to CN202011036916.4A priority Critical patent/CN112129807A/en
Publication of CN112129807A publication Critical patent/CN112129807A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means

Abstract

A high vacuum low temperature metal testing device test method relates to a metal testing device test method, the testing device test method, open the mechanical pump to make it work, then open the side-pumping valve of the vacuum cavity and gate valve connecting CF200 molecular pump, then observe the vacuum degree that the vacuum gauge reveals, watch its change; the stretching cylinder (5) is controlled to push the mounted sample into the high-temperature detection system, so that the sample is completely exposed out of the high-temperature control system, the high-temperature control system is shielded by rotating the shielding baffle assembly through the servo motor, and then the sample table is rotated to a low-temperature control system entering position by controlling the rotating cylinder (4); and the stretching cylinder (5) pushes the sample table to enter a low-temperature control system to perform low-temperature freezing detection on the sample. The invention solves the problems that the prior test device needs a laboratory technician to carry out manual regulation and control, and is inaccurate in control, and the problem of detection unicity. The device is particularly suitable for carrying out the reciprocating experiments with different properties on the same material under the high vacuum environment.

Description

High-vacuum low-temperature metal testing device testing method
Technical Field
The invention relates to a testing method of a metal testing device, in particular to a testing method of a high-vacuum low-temperature metal testing device.
Background
According to the demand of scientific research testing technology at present, the pure problem of most metal testing equipment in the market can only be solved the performance of detecting metal under an environment, if want to carry out contrast nature test to metal material when testing, then need purchase test equipment and detect the product, can only detect a sample at every turn, and the sample drops or installs incorrectly in the experimentation and then need follow new installation debugging and lead to the experimental time overlength. Often most test equipment has semi-automatic control, needs the measurement personnel to carry out manual regulation operation and wastes time and energy. Under the vacuum environment, when the duration of high temperature is too long, the equipment can not maintain the vacuum degree in the experimental process, or can not be accurately controlled at low temperature, which is a difficult problem troubling experimenters all the time and is a common phenomenon existing in most equipment on the market.
Disclosure of Invention
The invention aims to provide a testing method of a high-vacuum low-temperature metal testing device, which is a testing method of a testing device for performing reciprocating experiments on a detection sample in a cold and hot environment in a high-vacuum environment. The device is particularly suitable for carrying out the reciprocating experiments with different properties on the same material under the high vacuum environment.
The purpose of the invention is realized by the following technical scheme:
a testing method of a high-vacuum low-temperature metal testing device comprises the following steps:
firstly, opening a mechanical pump to work, then opening a side pumping valve of a vacuum cavity and a gate valve connected with a CF200 molecular pump, observing the vacuum degree displayed by a vacuum gauge, observing the change of the vacuum degree, opening a front-stage valve of the CF200 molecular pump when the vacuum degree in the vacuum cavity reaches 0-50Pa, and reaching the vacuum degree 1X10 required by the experiment-5 Carrying out experiments; controlling a stretching cylinder 5 to push the mounted sample into a high-temperature detection system, staying for 30min when the temperature of a heating system reaches 1000 ℃, observing the change in a cavity through an observation window, controlling the stretching cylinder to be pulled out by 20mm when the experiment is finished, enabling the sample to be completely exposed out of the high-temperature control system, at the moment, rotating a shielding baffle plate assembly through a servo motor to shield the high-temperature control system, and then controlling a rotary cylinder to rotate a sample table to a low-temperature control system entrance position;and (3) pushing the sample table into the low-temperature control system by the stretching cylinder to perform low-temperature freezing detection on the sample, and repeating the experiment of the sample in the high-low temperature control system according to the above mode until the experiment is completed when the low-temperature detection is completed for 30 min.
The testing method of the high-vacuum low-temperature metal testing device comprises the steps of protecting a CF200 molecular pump, closing a front-stage valve and a gate valve of the molecular pump, closing the molecular pump when the rotating speed is reduced to 1500rpm, opening a vent valve on a cavity, opening an upper cover of the cavity, taking out a sample, and finishing the experiment, wherein 15 groups of samples to be tested can be installed in each experiment.
The testing method of the high-vacuum low-temperature metal testing device comprises a high-vacuum cavity, a cylinder driving device, a CF200 molecular pump, a mechanical pump, a high-temperature control system, a low-temperature control system, an observation window, an electrode, a gate valve, a cavity upper cover, a sample dragging assembly, a shielding baffle assembly, a magnetic fluid and a PLC unit.
According to the testing method of the high-vacuum low-temperature metal testing device, the sample table rotating assembly of the testing device is tightly connected with the connecting shaft and moves along with the rotating shaft in the same way.
According to the testing method of the high-vacuum low-temperature metal testing device, the corrugated pipe assembly of the testing device is connected with the sample table rotating assembly in a sliding mode and does stretching movement along with the stretching cylinder.
According to the testing method of the high-vacuum low-temperature metal testing device, the upper cover of the cavity of the testing device and the hinge are connected to the vacuum cavity together with the gas spring through the pin to achieve the opening and closing effect.
According to the testing method of the high-vacuum low-temperature metal testing device, a sample of the testing device is arranged on the sample support and connected with the sample table rotating assembly on the transmission shaft to move along with the transmission shaft in the same manner.
According to the testing method of the high-vacuum low-temperature metal testing device, the water cooling system of the testing device is arranged on the high-temperature control system to protect the normal operation of the system.
According to the testing method of the high-vacuum low-temperature metal testing device, the heat shield of the testing device is arranged in the high-temperature control system to maintain the stable value of the temperature in the cavity.
According to the testing method of the high-vacuum low-temperature metal testing device, the electrode of the testing device is connected with the reserved opening of the vacuum cavity in a copper ring sealing mode to introduce working voltage, and the observation window is arranged on the vacuum cavity to observe the interior of the cavity.
The invention has the advantages and effects that:
the testing method of the high-vacuum low-temperature metal testing device provided by the invention researches and develops the operation of experimental equipment with high automation degree and simple and convenient operation, solves the problems in the experimental process, improves the experimental efficiency and saves the time. According to the invention, the experiment process is controlled by adopting the PLC system and the pneumatic control system, so that the problems of inaccurate manual adjustment control of an experimenter and experiment unicity are solved. The device is particularly suitable for carrying out the reciprocating experiments with different properties on the same material under the high vacuum environment. The invention has the advantages that the molecular pump can reach 5x10-3 Pa when reaching the full rotation state within 10 minutes and the system vacuum degree can reach 5x10-3 Pa when reaching 20 minutes, and the limit vacuum: 9.0x10-5Pa, the vacuum degree is less than or equal to 30Pa after the pump is stopped for 12 hours, the leakage rate of the system is less than 5.0x10-8Pa.l/S, the temperature of the high-temperature control system can be heated from 0-1700 ℃, and the temperature of the low-temperature control system can be reduced to-30 ℃.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of a high temperature control system;
FIG. 3 is a schematic diagram of a cryogenic control system;
fig. 4 is a top view of fig. 1.
The components in the figure: the device comprises a CF200 molecular pump 1, a gate valve 2, a vacuum cavity 3, a rotary cylinder 4, a stretching cylinder 5, a corrugated pipe sealing assembly 6, a magnetic fluid 7, a transmission shaft 8, a sample table rotating assembly 9, a high-temperature control system 10, a low-temperature control system 11, a shielding baffle assembly 12, a cavity upper cover 13, a gas spring 14, a hinge 15, an observation window 16, an electrode 17, a resistance gauge 18, a sample holder 19, a sample 20, a heating plate 21, a heat insulation cover 22, a water cooling system 23, a gas release valve 24, a base 25, a side pumping valve 26, a mechanical pump 27 and a differential pressure valve 27.
Detailed Description
The present invention will be described in detail with reference to the embodiments shown in the drawings.
When the experiment is carried out, firstly, the mechanical pump is started to work, then, a side pumping valve of the vacuum cavity and a gate valve connected with the CF200 molecular pump are opened, then, the vacuum degree displayed by the vacuum gauge is observed, the change of the vacuum degree is observed, when the vacuum degree in the vacuum cavity reaches 0-50Pa, a front-stage valve of the CF200 molecular pump is opened, because the vacuum degree is a safe environment for starting the molecular pump, the vacuum degree reaching the experiment requirement is 1X10-5 Experiments can be performed. The mounted sample is pushed into a high-temperature detection system by controlling a stretching cylinder 5, the temperature of a heating system is kept for 30min when reaching 1000 ℃, the change in a cavity is observed through an observation window, the sample is completely exposed out of a high-temperature control system by controlling the stretching cylinder 5 to be pulled out by 20mm when an experiment is finished, the high-temperature control system is shielded by rotating a shielding baffle plate assembly through a servo motor, and then a sample table is rotated to a low-temperature control system entering position by controlling a rotary cylinder 4 to pass through; and the stretching cylinder 5 pushes the sample table to enter the low-temperature control system to perform low-temperature freezing detection on the sample, and when the low-temperature detection is completed for 30min, the sample is repeatedly tested in the high-temperature and low-temperature control system in the manner described above. And (3) closing a molecular pump front-stage valve and a gate valve for protecting the CF200 molecular pump until the experiment is finished, closing the molecular pump when the rotating speed is reduced to 1500rpm, opening a vent valve on the cavity, then opening the upper cover of the cavity to take out the sample, and finishing the experiment, wherein 15 groups of samples to be detected can be installed in each experiment.
The device comprises a CF200 molecular pump 1, a gate valve 2, a vacuum cavity 3, a rotary cylinder 4, a stretching cylinder 5, a bellows seal assembly 6, a magnetic fluid 7, a transmission shaft 8, a sample table rotating assembly 9, a high-temperature control system 10, a low-temperature control system 11, a shielding baffle assembly 12, a cavity upper cover 13, a gas spring 14, a hinge 15, an observation window 16, an electrode 17, a resistance gauge 18, a sample holder 19, a sample 20, a heating plate 21, a heat insulation cover 22, a water cooling system 23, a vent valve 24, a base 25, a side suction valve 26, a mechanical pump 27 and a differential pressure valve 27. The CF200 molecular pump 1 is connected with a gate valve 2 and a vacuum cavity 3. The rotary cylinder 4 is connected on the magnetic fluid 7 and is connected with the transmission shaft 8 through the magnetic fluid, and the sample table rotating assembly 9 is tightly connected with the connection shaft 8 and moves along with the rotation shaft in the same way; the stretching cylinder 5 is connected with the vacuum cavity 3 through a corrugated pipe sealing assembly 6, and the corrugated pipe assembly 6 is connected with the sample table rotating assembly 9 in a sliding manner and does stretching motion along with the stretching cylinder 5; the cavity upper cover 13 and the hinge 15 are connected with the gas spring 14 through pins and are connected with the vacuum cavity 3 together to realize the opening and closing function; the sample 20 is arranged on the sample holder 19 and connected with the sample table rotating assembly 9 on the transmission shaft 8 to move along with the transmission shaft; the high-temperature control system 10 and the low-temperature control system 11 are connected inside the vacuum cavity 3. The water cooling system 13 is arranged on the high-temperature control system 10 to protect the normal operation of the system. The heat shield 22 is installed inside the high temperature control system 10 to maintain a stable temperature inside the chamber. Working voltage is introduced into the electrode 17 through connection with a reserved opening of the vacuum cavity 3 in a copper ring sealing mode, and the observation window 15 is arranged on the vacuum cavity 3 to observe the internal condition of the cavity. The resistance gauge 18 and the vacuum cavity 3 are connected to the cavity in a copper ring sealing mode to monitor the working pressure inside the cavity. The cavity upper cover 13, the vacuum cavity 3, the CF200 molecular pump 1 and the gate valve 2 form a high vacuum sealed cavity connected on the base 25.

Claims (10)

1. A test method of a high-vacuum low-temperature metal test device is characterized by comprising the following steps:
firstly, opening a mechanical pump to work, then opening a side pumping valve of a vacuum cavity and a gate valve connected with a CF200 molecular pump, observing the vacuum degree displayed by a vacuum gauge, observing the change of the vacuum degree, opening a front-stage valve of the CF200 molecular pump when the vacuum degree in the vacuum cavity reaches 0-50Pa, and reaching the vacuum degree 1X10 required by the experiment-5 Carrying out experiments; controlling a stretching cylinder (5) to push the mounted sample into a high-temperature detection system, staying for 30min when the temperature of a heating system reaches 1000 ℃, observing the change in the cavity through an observation window, controlling the stretching cylinder (5) to be pulled out by 20mm when the experiment is finished, and enabling the sample to be completely exposed out of the high-temperature control system,at the moment, the high-temperature control system is shielded by rotating the shielding baffle plate assembly through the servo motor, and then the sample table is rotated to the entering position of the low-temperature control system through controlling the rotary cylinder (4); and the stretching cylinder (5) pushes the sample table to enter the low-temperature control system to perform low-temperature freezing detection on the sample, and when the low-temperature detection is completed for 30min, the sample is repeatedly tested in the high-temperature and low-temperature control system in the above mode until the test is completed.
2. The method for testing the high-vacuum low-temperature metal testing device according to claim 1, wherein the method comprises the steps of protecting the CF200 molecular pump, closing a front-stage valve and a gate valve of the molecular pump, closing the molecular pump when the rotating speed is reduced to 1500rpm, opening an air release valve on the cavity, opening an upper cover of the cavity, taking out a sample, and finishing the experiment, wherein 15 groups of samples to be tested can be installed in each experiment.
3. The testing method of the high-vacuum low-temperature metal testing device according to claim 1, wherein the testing device comprises a high-vacuum cavity, a cylinder driving device, a CF200 molecular pump, a mechanical pump, a high-temperature control system, a low-temperature control system, an observation window, an electrode, a gate valve, a cavity upper cover, a sample dragging assembly, a shielding baffle assembly, a magnetic fluid and a PLC (programmable logic controller) unit.
4. The testing method of the high vacuum low temperature metal testing device according to claim 1 or 3, characterized in that the testing device sample table rotating component (9) is tightly connected with the connecting shaft (8) and moves along with the rotating shaft.
5. The testing method of the high vacuum low temperature metal testing device according to claim 1 or 3, wherein the bellows assembly (6) of the testing device is slidably connected with the sample stage rotating assembly (9) and performs stretching movement along with the stretching cylinder (5).
6. The testing method of the high-vacuum low-temperature metal testing device is characterized in that the upper cover (13) and the hinge (15) of the testing device cavity are connected to the vacuum cavity (3) together with the gas spring (14) through pins to realize opening and closing functions.
7. The testing method of the high vacuum low temperature metal testing device according to claim 1 or 3, characterized in that the testing device sample (20) is mounted on the sample holder (19) and connected with the sample stage rotating assembly (9) on the transmission shaft (8) to move along with the transmission shaft.
8. The testing method of the high-vacuum low-temperature metal testing device according to claim 1 or 3, characterized in that the water cooling system (13) of the testing device is installed on the high-temperature control system (10) to protect the system from normal operation.
9. The testing method of the high vacuum low temperature metal testing device according to claim 1 or 3, characterized in that the testing device heat shield (22) is installed inside the high temperature control system (10) to maintain a stable temperature value inside the chamber.
10. The testing method of the high-vacuum low-temperature metal testing device according to claim 1 or 3, characterized in that the testing device electrode (17) is connected with a reserved opening of the vacuum cavity (3) in a copper ring sealing mode to introduce working voltage, and the observation window (15) is arranged on the vacuum cavity (3) to observe the inside of the cavity.
CN202011036916.4A 2020-09-28 2020-09-28 High-vacuum low-temperature metal testing device testing method Pending CN112129807A (en)

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Application Number Priority Date Filing Date Title
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CN112129807A true CN112129807A (en) 2020-12-25

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022177780A1 (en) * 2021-02-22 2022-08-25 Kla Corporation A vertical convolute metal bellows for rotary motion, vacuum sealing, and pressure sealing
CN115684273A (en) * 2022-11-11 2023-02-03 中国工程物理研究院激光聚变研究中心 High-temperature ultrahigh-precision electric transportation test system and test method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022177780A1 (en) * 2021-02-22 2022-08-25 Kla Corporation A vertical convolute metal bellows for rotary motion, vacuum sealing, and pressure sealing
CN115684273A (en) * 2022-11-11 2023-02-03 中国工程物理研究院激光聚变研究中心 High-temperature ultrahigh-precision electric transportation test system and test method thereof

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