CN115657342A - Electro-optical modulator - Google Patents
Electro-optical modulator Download PDFInfo
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- CN115657342A CN115657342A CN202211242455.5A CN202211242455A CN115657342A CN 115657342 A CN115657342 A CN 115657342A CN 202211242455 A CN202211242455 A CN 202211242455A CN 115657342 A CN115657342 A CN 115657342A
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Abstract
An electro-optic modulator for preventing a lithium niobate electro-optic modulator from cracking along a cleavage plane of a crystal is disclosed. The electro-optic modulator includes: the optical waveguide structure is arranged on the lithium niobate crystal; the high-frequency modulation electrode is provided with an electrode leading-out structure connected with an external circuit, wherein the electrode leading-out structure is arranged on the outer plane of the lithium niobate crystal; the electrode leading-out structure comprises a plurality of strip electrodes which are arranged in parallel, and the straight lines of the strip electrodes are parallel to the cleavage direction of the lithium niobate crystal. By adopting the electro-optical modulator provided by the application, the stress between the electrode and the lithium niobate crystal can be reduced, and further the risk of splitting the lithium niobate crystal along the cleavage plane is reduced.
Description
Technical Field
The application relates to the technical field of electro-optical modulators, in particular to an electro-optical modulator.
Background
The physical basis of the electro-optical modulation is the electro-optical effect, namely, the optical parameters of the crystal are influenced by an external electric field under the action of the external electric field. When a light wave passes through the crystal and an electric field containing a signal is applied to the crystal, the transmission characteristics of the light wave are changed along with the change of the applied electric field, i.e. the information contained in the electric signal is carried in the light wave. The modulation crystal of the electro-optical modulator is a core component of the electro-optical modulator. Most of the prior electro-optical modulators used in the field of optical fiber communication are modulators using lithium niobate material crystals as modulation crystals. Due to the characteristics of the crystal structure, the lithium niobate electro-optical modulator is often cracked along a cleavage plane during the manufacturing process or the using process, so that the device is failed. Particularly, in the vicinity of the pad of the high-frequency modulation electrode, because of the difference in thermal expansion coefficient between the metal pad and the lithium niobate crystal, a large stress is accumulated therebetween upon temperature change, resulting in the cleavage of the lithium niobate along the cleavage plane.
Disclosure of Invention
The application provides an electro-optic modulator for preventing a lithium niobate electro-optic modulator from cracking along a cleavage plane of a crystal.
The present application provides an electro-optic modulator comprising:
the optical waveguide structure is arranged on the lithium niobate crystal;
the high-frequency modulation electrode is provided with an electrode leading-out structure connected with an external circuit, wherein the electrode leading-out structure is arranged on the outer plane of the lithium niobate crystal; the electrode leading-out structure comprises a plurality of strip electrodes which are arranged in parallel, and straight lines of the strip electrodes are parallel to the cleavage direction of the lithium niobate crystal.
The beneficial effect of this application lies in: the electro-optical modulator provided by the application replaces a metal pad with a plurality of strip electrodes arranged on the outer plane of the lithium niobate crystal, and the direction of the strip electrodes is parallel to the cleavage direction of the lithium niobate crystal, so that when thermal expansion occurs, the stress between the electrodes and the lithium niobate crystal is reduced, and the risk that the lithium niobate crystal cracks along the cleavage plane is reduced.
In one embodiment, between the plurality of strip-shaped electrodes arranged in parallel, a gap or a filling material different from the material of the plurality of strip-shaped electrodes is arranged.
In one embodiment, the thermal expansion coefficient of the filler material is different from the plurality of strip-shaped electrodes.
In one embodiment, the electro-optic modulator further comprises:
and the connecting lead is connected with at least one strip electrode in the strip electrodes and is used for realizing the connection between the strip electrodes and the high-frequency modulation electrode.
In one embodiment, the strip-shaped electrodes, the connecting leads and the high-frequency modulation electrodes are uniform in thickness.
In one embodiment, the optical waveguide structure has a specific optical waveguide direction, and an included angle between the optical waveguide direction and a cleavage direction of the lithium niobate crystal is in a preset included angle interval.
In one embodiment, the electrode lead-out structure is directly or indirectly arranged on the outer plane of the lithium niobate crystal, including that the electrode lead-out structure is directly arranged on the outer plane of the lithium niobate crystal in an electrode metal; and a conductive medium layer is arranged between the electrode metal of the electrode lead-out structure and the outer plane of the lithium niobate crystal.
In one embodiment, the plurality of strip-shaped electrodes are electrically connected through strip-shaped electrode connecting lines.
In one embodiment, the electrode lead-out structure is connected to the drive/signal circuitry by a flexible printed circuit.
In one embodiment, the electrode lead-out structure is connected with the flexible printed circuit through anisotropic conductive adhesive.
Additional features and advantages of the application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the application. The objectives and other advantages of the application may be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
The technical solution of the present application is further described in detail by the accompanying drawings and examples.
Drawings
The accompanying drawings are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiment(s) of the application and together with the description serve to explain the application and not limit the application. In the drawings:
FIG. 1A is a front view of an electro-optic modulator according to an embodiment of the present application;
FIG. 1B is a front view of an electro-optic modulator according to an embodiment of the present application;
FIG. 2 is a top view of an electro-optic modulator according to an embodiment of the present application;
FIG. 3 is a schematic diagram illustrating an arrangement direction of the stripe electrodes in an electro-optic modulator according to an embodiment of the present application.
Detailed Description
The preferred embodiments of the present application will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein only to illustrate and explain the present application and not to limit the present application.
Fig. 1A and 1B are front views of an electro-optical modulator according to an embodiment of the present application, as shown in fig. 1A and 1B, respectively, the electro-optical modulator includes: lithium niobate crystal, and optical waveguide structure and high-frequency modulation electrode arranged on the lithium niobate crystal. It should be noted that the electrode lead-out structure of the high-frequency modulation electrode may be directly or indirectly disposed on the outer plane of the lithium niobate crystal, that is, as shown in fig. 1A, the electrode lead-out structure may be directly disposed on the lithium niobate crystal; or, as shown in fig. 1B, the electrode lead-out structure may be disposed on a dielectric layer on the surface of lithium niobate, where the dielectric layer is a conductive dielectric layer, such as silicon oxide.
FIG. 2 is a top view of an electro-optical modulator according to an embodiment of the present application, and FIG. 3 is a schematic diagram illustrating a direction of disposing a strip electrode in the electro-optical modulator according to an embodiment of the present application, as shown in FIGS. 2 and 3, the high-frequency modulating electrode has an electrode lead-out structure connected to an external circuit, wherein the electrode lead-out structure is disposed on an outer plane of a lithium niobate crystal; the electrode leading-out structure comprises a plurality of strip electrodes which are arranged in parallel, and the straight lines of the strip electrodes are parallel to the cleavage direction of the lithium niobate crystal.
As shown in fig. 2, the electrode lead-out structure includes a plurality of parallel strip electrodes. The formula σ = L x Δ α for thermal stress, where L is the contact length and Δ α is the difference in thermal expansion coefficient of the two materials. Because the length L of each strip-shaped electrode in direct contact with the lithium niobate crystal in the direction vertical to the cleavage plane of the lithium niobate crystal is greatly reduced compared with that of the traditional metal pad, the stress between the strip-shaped electrode and the lithium niobate crystal is reduced under the condition of thermal expansion; in addition, as shown in fig. 3, in the present application, the direction in which the plurality of stripe-shaped electrodes are arranged is parallel to the cleavage direction of the lithium niobate crystal, and in the case where thermal expansion occurs, the thermal stress is mainly in the direction parallel to the cleavage plane, thereby further reducing the stress to which the lithium niobate crystal is subjected in the cleavage direction. Therefore, by arranging the strip-shaped electrode parallel to the cleavage direction of the lithium niobate crystal, the stress between the strip-shaped electrode and the lithium niobate crystal is reduced, and the risk of splitting of the lithium niobate crystal along the cleavage plane is reduced.
The beneficial effect of this application lies in: the electro-optical modulator provided by the application replaces the metal pad through a plurality of strip electrodes that set up at the lithium niobate crystal outer plane, and the orientation of strip electrode is parallel with the cleavage direction of lithium niobate crystal, and then when taking place thermal expansion, has reduced the stress between electrode and the lithium niobate crystal, has reduced the risk that the lithium niobate crystal splits along the cleavage plane.
In one embodiment, between the plurality of strip-shaped electrodes arranged in parallel, a gap or a filling material different from the material of the plurality of strip-shaped electrodes is arranged. Further, the thermal expansion coefficient of the filling material is different from that of the plurality of strip-shaped electrodes.
In this embodiment, since the gaps or the filling material different from the material of the plurality of strip-shaped electrodes are disposed between the strip-shaped electrodes:
when gaps are formed among the strip electrodes, when thermal expansion occurs, the strip electrodes with a certain height can release partial thermal stress by using self strain, and the stress generated between the contact parts of the strip electrodes and the lithium niobate crystal is further reduced.
When a filling material is disposed between the strip electrodes, the filling material may be a conductive material, such as a conductive adhesive; but may also be a semiconductor or an insulator such as silicon oxide, silicon nitride, polysilicon, etc. The filling material enables the thermal expansion coefficient of the lithium niobate crystal to be between that of the strip electrode and the filling material, and further when thermal expansion occurs, the expansion rate of the filling material relative to the lithium niobate crystal is opposite to that of the metal electrode relative to the lithium niobate crystal, so that the overall expansion rate of the electrode layer containing the filling material is close to that of the lithium niobate crystal, and the stress between the strip electrode and the lithium niobate can also be counteracted to a certain degree. For example, when the thermal expansion rate of the metal electrode is larger than that of the lithium niobate crystal, a filling material having a thermal expansion rate smaller than that of the lithium niobate crystal may be provided between the strip-shaped electrodes; when the thermal expansion rate of the metal electrodes is smaller than that of the lithium niobate crystal, a filling material having a thermal expansion rate larger than that of the lithium niobate crystal may be provided between the strip-shaped electrodes.
The beneficial effect of this embodiment lies in: because gaps or filling materials different from the materials of the strip electrodes are arranged between the strip electrodes, the thermal stress of the strip electrodes is further released, the stress between the strip electrodes and the lithium niobate crystal is reduced, and in addition, the stress between the strip electrodes and the lithium niobate crystal is further counteracted through the filling materials, so that the risk that the lithium niobate crystal cracks along a cleavage plane is reduced.
In one embodiment, the electro-optic modulator further comprises:
and the connecting lead is connected with at least one strip electrode in the strip electrodes and is used for realizing the connection between the strip electrodes and the high-frequency modulation electrode.
Further, in this embodiment, the thicknesses of the strip-shaped electrode, the connecting lead, and the high-frequency modulation electrode are the same, and the strip-shaped electrode, the connecting lead, and the high-frequency modulation electrode are simultaneously manufactured in the same process step. The uniform thickness means that the deviation is less than 15%, that is, the uniform thickness between the connection lead and the high-frequency modulation electrode can be considered as long as the deviation in thickness between the connection lead and the high-frequency modulation electrode is less than 15%.
In one embodiment, the optical waveguide structure has a specific optical waveguide direction, and an included angle between the optical waveguide direction and a cleavage direction of the lithium niobate crystal is in a preset included angle interval.
In this embodiment, in order to avoid the cleavage of lithium niobate, an included angle between the optical waveguide direction and the cleavage direction of the lithium niobate crystal is 25 ° to 45 ° in a preset included angle interval, specifically, the included angle is set to be 35 °.
In one embodiment, the electrode leading-out structure is connected to the driving/signal circuit through a flexible printed circuit, and the electrode leading-out structure and the flexible printed circuit are connected through anisotropic conductive adhesive.
As shown in fig. 1A and 1B, in the present embodiment, the electrode lead structure of lithium niobate is connected to the driving/signal Circuit through a Flexible Printed Circuit (FPC), and the connection between the electrode lead structure of lithium niobate and the FPC is realized through an Anisotropic Conductive Film (ACF).
As will be appreciated by one skilled in the art, embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.
Claims (10)
1. An electro-optic modulator, comprising:
the optical waveguide structure is arranged on the lithium niobate crystal;
the high-frequency modulation electrode is provided with an electrode leading-out structure connected with an external circuit, wherein the electrode leading-out structure is arranged on the outer plane of the lithium niobate crystal; the electrode leading-out structure comprises a plurality of strip electrodes which are arranged in parallel, and the straight lines of the strip electrodes are parallel to the cleavage direction of the lithium niobate crystal.
2. The electro-optic modulator of claim 1, wherein between the plurality of strip-shaped electrodes arranged in parallel, a gap or a filling material different from a material of the plurality of strip-shaped electrodes is provided.
3. The electro-optic modulator of claim 2, wherein the fill material has a different coefficient of thermal expansion than the plurality of strip electrodes.
4. The electro-optic modulator of claim 1, further comprising:
and the connecting lead is connected with at least one strip electrode in the strip electrodes and is used for realizing the connection between the strip electrodes and the high-frequency modulation electrode.
5. The electro-optical modulator according to claim 4, wherein the strip-like electrodes, the connection leads, and the high-frequency modulation electrodes are uniform in thickness.
6. The electro-optic modulator of claim 1 wherein the optical waveguide structure has a particular optical waveguide direction, the angle between the optical waveguide direction and the cleaving direction of the lithium niobate crystal being in a predetermined angular interval.
7. The electro-optic modulator of claim 1 wherein the electrode-extracting structure is disposed directly or indirectly on the outer planar surface of the lithium niobate crystal, including the electrode-extracting structure being disposed directly on the outer planar surface of the lithium niobate crystal as an electrode metal; and a conductive medium layer is arranged between the electrode metal of the electrode leading-out structure and the outer plane of the lithium niobate crystal.
8. The electro-optic modulator of claim 1 wherein the plurality of strip electrodes are electrically connected by strip electrode connecting lines.
9. The electro-optic modulator of claim 1 wherein the electrode lead-out structure is connected to the drive/signal circuitry by a flexible printed circuit.
10. The electro-optic modulator of claim 9 wherein the connection between the electrode lead-out structure and the flexible printed circuit is made by an anisotropic conductive adhesive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211242455.5A CN115657342A (en) | 2022-10-11 | 2022-10-11 | Electro-optical modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211242455.5A CN115657342A (en) | 2022-10-11 | 2022-10-11 | Electro-optical modulator |
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| Publication Number | Publication Date |
|---|---|
| CN115657342A true CN115657342A (en) | 2023-01-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202211242455.5A Pending CN115657342A (en) | 2022-10-11 | 2022-10-11 | Electro-optical modulator |
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Citations (7)
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| US4198115A (en) * | 1978-08-16 | 1980-04-15 | Bell Telephone Laboratories, Incorporated | Fabry-Perot resonator using a birefringent crystal |
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| US20180095339A1 (en) * | 2016-09-30 | 2018-04-05 | Fujitsu Optical Components Limited | Optical module and optical modulator |
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| CN112835215A (en) * | 2020-04-15 | 2021-05-25 | 天津领芯科技发展有限公司 | Lithium niobate thin film electro-optical modulator chip and modulator |
| CN113267912A (en) * | 2021-05-17 | 2021-08-17 | 北京世维通科技股份有限公司 | Preparation method of metal electrode |
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2022
- 2022-10-11 CN CN202211242455.5A patent/CN115657342A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US4198115A (en) * | 1978-08-16 | 1980-04-15 | Bell Telephone Laboratories, Incorporated | Fabry-Perot resonator using a birefringent crystal |
| JP2009047720A (en) * | 2007-08-13 | 2009-03-05 | Nippon Telegr & Teleph Corp <Ntt> | Electro-optical element, and method for manufacturing electro-optical element |
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| US20180095339A1 (en) * | 2016-09-30 | 2018-04-05 | Fujitsu Optical Components Limited | Optical module and optical modulator |
| CN110161625A (en) * | 2019-05-17 | 2019-08-23 | 上海交通大学 | The integrated method of silicon substrate LiNbO_3 film electrooptic modulator array |
| CN112835215A (en) * | 2020-04-15 | 2021-05-25 | 天津领芯科技发展有限公司 | Lithium niobate thin film electro-optical modulator chip and modulator |
| CN113267912A (en) * | 2021-05-17 | 2021-08-17 | 北京世维通科技股份有限公司 | Preparation method of metal electrode |
Non-Patent Citations (6)
| Title |
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| A. V. SOSUNOV等: "Effect of the Structure of the Lithium Niobate Surface Layer on the Characteristics of Optical Waveguides", 《 CRYSTALLOGRAPHY REPORTS》 * |
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