CN115655123A - Device for detecting parallelism of heat shield of single crystal furnace - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及单晶炉技术领域，特别是涉及一种用于单晶炉热屏平行度检测的装置。The invention relates to the technical field of single crystal furnaces, in particular to a device for detecting the parallelism of a single crystal furnace heat shield.
背景技术Background technique
单晶炉是制备单晶硅棒的主要设备，目前单晶炉所采用的石墨热场均是有热屏的封闭热场。热屏是单晶炉热系统的重要组成部分，有着保温隔热稳定炉内热场的重要作用，同时还有着改善炉内气流走向，减少加热器的热量向晶体辐射的作用。The single crystal furnace is the main equipment for preparing single crystal silicon rods. At present, the graphite thermal field used in the single crystal furnace is a closed thermal field with a heat shield. The heat shield is an important part of the thermal system of the single crystal furnace. It plays an important role in heat preservation and insulation to stabilize the thermal field in the furnace. At the same time, it also has the function of improving the airflow direction in the furnace and reducing the heat radiation of the heater to the crystal.
在单晶硅的生产过程中，保证热屏的底端平面与基准面的水平是至关重要的。因为当热屏出现倾斜时，会严重影响坩埚内部的温度排布，从而影响V/G的比值，其中V是拉晶速度，G是固液界面上的轴向温度梯度，而V/G的比值决定了晶体的质量。目前，为保证热屏不出现倾斜，工厂所采用的方法多为目测法，即通过目测判断热屏底端平面与基准面是否平行。该方法误差较大，不同的工作人员的判定标准不同，从而造成产品质量的参差。因此，如何提供一种能够准确检测热屏的底端平面与基准面是否平行的检测装置，是本领域技术人员所要解决的技术问题。In the production process of monocrystalline silicon, it is very important to ensure that the bottom plane of the heat shield is level with the reference plane. Because when the heat shield is tilted, it will seriously affect the temperature distribution inside the crucible, thereby affecting the ratio of V/G, where V is the crystal pulling speed, G is the axial temperature gradient on the solid-liquid interface, and V/G The ratio determines the quality of the crystal. At present, in order to ensure that the heat shield does not tilt, the method adopted by the factory is mostly the visual inspection method, that is, to judge whether the bottom plane of the heat shield is parallel to the reference plane through visual inspection. The error of this method is large, and different staff members have different judgment standards, resulting in uneven product quality. Therefore, how to provide a detection device capable of accurately detecting whether the bottom plane of the heat shield is parallel to the reference plane is a technical problem to be solved by those skilled in the art.
发明内容Contents of the invention
有鉴于此，本发明提供了一种用于单晶炉热屏平行度检测的装置,该用于单晶炉热屏平行度检测的装置是利用多种传感器对热屏底端的平面和设备基准平面的平行度进行检测，以实现准确高效的目的。In view of this, the present invention provides a device for detecting the parallelism of the heat shield of a single crystal furnace. The parallelism of the plane is detected to achieve the purpose of accuracy and efficiency.
为实现上述目的，本发明所提供的技术方案具体为：基于无线高速模拟量采集卡的单晶炉热屏平行度检测的装置。包括：平面倾角仪、激光传感器、球型云台、底座、陀螺转角仪、数据采集装置、电源、上位机和设备平台。该方案的最大特点是可以实现实时、高速、高采集密度的检测。In order to achieve the above purpose, the technical solution provided by the present invention is specifically: a device for detecting the parallelism of the hot screen of a single crystal furnace based on a wireless high-speed analog acquisition card. Including: plane inclinometer, laser sensor, ball head, base, gyroscope, data acquisition device, power supply, host computer and equipment platform. The biggest feature of this solution is that it can realize real-time, high-speed, high-acquisition-density detection.
优选地，在上述用于单晶炉热屏平行度检测的装置中，所述激光传感器安装在球形云台的底座上进行位移检测，并输出模拟量信号到数据采集卡的输入端口。Preferably, in the above-mentioned device for detecting the parallelism of the heat shield of a single crystal furnace, the laser sensor is installed on the base of the spherical pan-tilt for displacement detection, and outputs an analog signal to the input port of the data acquisition card.
优选地，在上述用于单晶炉热屏平行度检测的装置中，所述平面倾角仪采用活动装夹，首次检测时，将倾角仪放置在基准平面上归零，而后将其装夹在云台底座之上，用于调整云台底座的设备安装面与基准平面间的平行度。Preferably, in the above-mentioned device for detecting the parallelism of the hot shield of a single crystal furnace, the plane inclinometer adopts movable clamping. When the first detection is performed, the inclinometer is placed on the reference plane to return to zero, and then it is clamped on On the pan/tilt base, it is used to adjust the parallelism between the equipment installation surface of the pan/tilt base and the reference plane.
优选地，在上述用于单晶炉热屏平行度检测的装置中，所述球形云台固定于设备平台之上。Preferably, in the above-mentioned device for detecting the parallelism of the heat shield of a single crystal furnace, the spherical platform is fixed on the equipment platform.
优选地，在上述用于单晶炉热屏平行度检测的装置中，所述陀螺转角仪选用电压式陀螺转角仪。Preferably, in the above-mentioned device for detecting the parallelism of the hot screen of a single crystal furnace, the gyro goniometer is a voltage gyro goniometer.
优选地，在上述用于单晶炉热屏平行度检测的装置中，所述数据采集装置为无线高速模拟量数据采集卡。Preferably, in the above-mentioned device for detecting the parallelism of the hot screen of a single crystal furnace, the data acquisition device is a wireless high-speed analog data acquisition card.
优选地，在上述用于单晶炉热屏平行度检测的装置中，所述电源包括大容量锂电池和配电模块。所述大容量锂电池能够保证给系统的各个设备供电，确保整套设备能够连续工作；所述配电模块能够对用电设备进行配电和控制。Preferably, in the above-mentioned device for detecting the parallelism of the heat shield of a single crystal furnace, the power supply includes a large-capacity lithium battery and a power distribution module. The high-capacity lithium battery can guarantee power supply to each device of the system, ensuring that the whole set of equipment can work continuously; the power distribution module can distribute and control the power consumption equipment.
优选的，在上述用于单晶炉热屏平行度检测的装置中，所述上位机包括个人电脑、笔记本电脑及工控机；所述上位机能够运行监控程序。Preferably, in the above-mentioned device for detecting the parallelism of the hot screen of a single crystal furnace, the host computer includes a personal computer, a notebook computer and an industrial computer; the host computer can run a monitoring program.
优选地，在上述用于单晶炉热屏平行度检测的装置中，所述监控程序包括可控制按钮；所述可控制按钮为触屏式，能够实现检测系统的硬件配置及控制、所测数据和所测历史数据的查阅和存储。Preferably, in the above-mentioned device for detecting the parallelism of the hot screen of a single crystal furnace, the monitoring program includes controllable buttons; the controllable buttons are touch-screen type, which can realize hardware configuration and control of the detection system, and Consultation and storage of data and measured historical data.
优选地，在上述用于单晶炉热屏平行度检测的装置中，所述监控程序所显示的内容包括：基准距离、当前距离、转台转速、转台转角、最大偏差和最大偏差位置。Preferably, in the above-mentioned device for detecting the parallelism of the hot screen of a single crystal furnace, the content displayed by the monitoring program includes: reference distance, current distance, turntable rotation speed, turntable rotation angle, maximum deviation and maximum deviation position.
本发明一种用于单晶炉热屏平行度检测的装置与现有技术的不同之处在于，本发明一种用于单晶炉热屏平行度检测的装置是利用传感器和采集卡进行数据采集，进而将采集的数据实时传输至上位机，进行显示和分析。The difference between a device for detecting the parallelism of the hot screen of a single crystal furnace in the present invention and the prior art is that a device for detecting the parallelism of the hot screen of a single crystal furnace in the present invention uses a sensor and an acquisition card to collect data Acquisition, and then transmit the collected data to the host computer in real time for display and analysis.
下面结合附图对本发明：一种用于单晶炉热屏平行度检测的装置作进一步说明。The present invention: a device for detecting the parallelism of the hot screen of a single crystal furnace will be further described below in conjunction with the accompanying drawings.
附图说明Description of drawings
图1为本发明一种用于单晶炉热屏平行度检测的装置技术方案的测试原理示意图。Fig. 1 is a schematic diagram of the test principle of a device technical solution for detecting the parallelism of the hot screen of a single crystal furnace according to the present invention.
图1中：1-平面倾角仪，2-底座，3-球型云台，4-设备平台，5-转台，6-上位机控制盒，7-锂电池，8-配电模块，9-激光传感器，10-无线高速模拟量采集卡，11-电压式陀螺转角仪。In Figure 1: 1-plane inclinometer, 2-base, 3-ball head, 4-equipment platform, 5-turntable, 6-host computer control box, 7-lithium battery, 8-power distribution module, 9- Laser sensor, 10-wireless high-speed analog acquisition card, 11-voltage gyroscope.
图2为检测对象和结构尺寸示意图。Figure 2 is a schematic diagram of the detection object and structure size.
图3为检测装置的安装示意图。Figure 3 is a schematic diagram of the installation of the detection device.
图4为数据显示主界面示意图。Figure 4 is a schematic diagram of the data display main interface.
具体实施方式Detailed ways
以下实施例用于说明本发明，但不用来限制本发明的范围。The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
如图1所示，本发明的技术方案：基于高速模拟量采集卡的单晶炉热屏平行度检测的装置，包括：平面倾角仪、激光传感器、球型云台、底座、陀螺转角仪、数据采集装置、电源、上位机和设备平台。As shown in Figure 1, the technical solution of the present invention: a device for detecting the parallelism of the hot screen of a single crystal furnace based on a high-speed analog quantity acquisition card, including: a plane inclinometer, a laser sensor, a ball platform, a base, a gyro angle meter, Data acquisition device, power supply, upper computer and equipment platform.
将激光传感器安装在球形云台的底座上进行位移检测，并输出模拟量信号到数据采集卡的输入端口；数显双轴平面倾角仪采用活动装夹，首次检测时，需要将倾角仪放置在基准平面上归零，而后将其装夹在云台底座上，用于调整云台底座的设备安装面与基准平面间的平行度；电压式陀螺转角仪用于检测转台转动时的实时角速度，并输出模拟量信号到数据采集卡的输入端口，而后通过在上位机程序内的数字处理算法估计激光传感器的实时转角量；无线高速模拟量采集卡用于以指定的采样频率将测试数据通过Wi-Fi协议实时传输至上位机，进行显示与分析；使用大容量充电锂电池和配电模块给系统的各个设备供电，确保整套设备能够连续工作；同时，通过合理的工业集成设计，使得整机的外观简洁美观，兼具可靠性和高可操作性。如图3所示，将集成后检测装置安装在转台上，实现实时检测。Install the laser sensor on the base of the ball head for displacement detection, and output the analog signal to the input port of the data acquisition card; the digital display dual-axis plane inclinometer adopts movable clamping, and the inclinometer needs to be placed on the Return to zero on the reference plane, and then clamp it on the pan-tilt base to adjust the parallelism between the equipment installation surface of the pan-tilt base and the reference plane; the voltage-type gyro angle meter is used to detect the real-time angular velocity when the turntable rotates, And output the analog signal to the input port of the data acquisition card, and then estimate the real-time rotation angle of the laser sensor through the digital processing algorithm in the host computer program; the wireless high-speed analog acquisition card is used to pass the test data through Wi-Fi at a specified sampling frequency The -Fi protocol is transmitted to the host computer in real time for display and analysis; a large-capacity rechargeable lithium battery and a power distribution module are used to supply power to each device in the system to ensure that the entire set of equipment can work continuously; at the same time, through a reasonable industrial integration design, the whole machine The appearance is simple and beautiful, with reliability and high operability. As shown in Figure 3, the integrated detection device is installed on the turntable to realize real-time detection.
由于本方案采用高速模拟量检测模式，所以能够实现高速、高采集密度的检测。检测时可以通过数字滤波算法降低噪声对检测结果的影响，从而提高检测精确度。Because this scheme adopts the high-speed analog quantity detection mode, it can realize high-speed, high-acquisition-density detection. During detection, digital filtering algorithm can be used to reduce the influence of noise on detection results, thereby improving detection accuracy.
本技术方案主要实时采集两个物理量，分别为激光传感器采集的测试面的实时距离和陀螺转角仪采集的实时转速。前者不存在技术风险，后者主要用于通过上位机的数据算法来估计转台的实时转角。由于陀螺转角仪存在不可避免的时间漂移特性等不利特性，将影响最终解算出的实时转角的精度。针对这个问题，本技术方案通过严格控制完成一次检测所需的时长，在测试开始时清零数据缓冲区并利用传感器的零位输出值进行数值补偿，即可满足检测过程中的实时转角解算的精度要求。This technical solution mainly collects two physical quantities in real time, which are the real-time distance of the test surface collected by the laser sensor and the real-time rotational speed collected by the gyroscope. The former has no technical risk, and the latter is mainly used to estimate the real-time rotation angle of the turntable through the data algorithm of the host computer. Due to unfavorable characteristics such as unavoidable time drift characteristics of the gyro goniometer, it will affect the accuracy of the real-time rotation angle calculated by the final solution. To solve this problem, this technical solution strictly controls the time required to complete a detection, clears the data buffer at the beginning of the test and uses the zero output value of the sensor to perform numerical compensation, which can meet the real-time corner calculation during the detection process accuracy requirements.
本技术方案支持两种数据采集模式，人工采集模式和自动采集模式，在采集开始前手动选择模式，并完成相关的模拟量采集参数配置。This technical solution supports two data acquisition modes, manual acquisition mode and automatic acquisition mode, and the mode is manually selected before the acquisition starts, and the relevant analog acquisition parameter configuration is completed.
当选择人工采集模式时，“开始采集”按键按下时，上位机发送启动采集指令，采集卡接收到该指令后，按设定的采集频率等参数工作，并将数据通过WIFI实时传送到上位机；当“结束采集”按键按下时，上位机发送终止采集指令，采集卡接收到该指令后立即停止数据采集。When the manual collection mode is selected, when the "start collection" button is pressed, the upper computer sends a command to start collection. After receiving the command, the acquisition card works according to the set collection frequency and other parameters, and transmits the data to the upper position in real time through WIFI. computer; when the "End Collection" button is pressed, the upper computer sends an instruction to terminate the collection, and the acquisition card immediately stops data collection after receiving the instruction.
当选择自动采集模式时，采集卡将光电接近开关的触发信号作为外部触发信号。当“开始采集”按键按下时，设备随转台一起转动。当光电接近开关第一次经过到标识位置时，触发采集。当设备转过一周，再次经过标识位置时，停止采集。上述的标识位置为放置在指定位置一个立柱。停止采集后，使能“开始采集”按键，禁用“结束采集”按键。此后，采集卡不再响应外部触发信号，直到再次按下“开始采集”按键。在此模式下，“结束采集”按键用于立即停止采集。When the automatic acquisition mode is selected, the acquisition card uses the trigger signal of the photoelectric proximity switch as the external trigger signal. When the "start collecting" button is pressed, the device rotates with the turntable. When the photoelectric proximity switch passes to the marked position for the first time, the acquisition is triggered. When the device turns around and passes the marked position again, the collection stops. The above-mentioned marked position is a column placed at the specified position. After stopping the collection, enable the "Start Collection" button and disable the "End Collection" button. After that, the acquisition card will no longer respond to external trigger signals until the "Start Acquisition" button is pressed again. In this mode, the "End Acquisition" button is used to stop the acquisition immediately.
数据显示主界面示意图如图4，图4的左图界面为极坐标系，每一数据点的坐标包括(r，θ)，r为当前距离的数值，θ为对应当前转角的数值。中间实线圆圈的半径为设置的基准距离，外侧圆圈的半径为(基准距离+15)，内侧圆圈的半径为(基准距离-15)。r的数值应限制为(基准距离-15)< r< (基准距离+15)。当θ >360°后，左图数据不再更新，但鼠标移动到相应的数据点时，应能着重显示出该点的极坐标。图4的右图为激光位移传感器和转角传感器随时间的变化曲线。图4上部浅灰色文本框内容由用户输入。The schematic diagram of the main data display interface is shown in Figure 4. The left interface of Figure 4 is a polar coordinate system. The coordinates of each data point include (r, θ), where r is the value of the current distance, and θ is the value corresponding to the current rotation angle. The radius of the circle with the solid line in the middle is the set reference distance, the radius of the outer circle is (reference distance+15), and the radius of the inner circle is (reference distance-15). The value of r should be limited to (reference distance-15)< r< (reference distance+15). When θ > 360°, the data in the left image will not be updated, but when the mouse moves to the corresponding data point, the polar coordinates of the point should be displayed emphatically. The right graph of Fig. 4 is the change curve of the laser displacement sensor and the rotation angle sensor with time. The content of the light gray text box in the upper part of Figure 4 is input by the user.
首次启动采集前，应检查是否已将“转台转速”和“基准距离”参数赋值。若否，则“数据采集模式”、“开始采集”、“结束采集”及相关功能应无法选中。中灰色文本框内容不允许用户输入，由软件读取r和θ数值并实时更新数据。当采集未开始或θ未赋值时，当前转角显示为0。深灰色文本框内容也不允许用户输入，在按下“开始采集”按键时清零，在按下“结束采集”按键后更新为第一个最大的(r-基准距离)的绝对值及其转角数据。Before starting the collection for the first time, check whether the parameters of "Turntable Speed" and "Reference Distance" have been assigned. If not, the "Data Collection Mode", "Start Collection", "End Collection" and related functions should not be selected. The content of the middle gray text box does not allow user input, and the software reads the values of r and θ and updates the data in real time. When the acquisition is not started or θ is not assigned, the current rotation angle is displayed as 0. The content of the dark gray text box does not allow user input, it is cleared when the "Start Collection" button is pressed, and it is updated to the absolute value of the first maximum (r-reference distance) and its value after the "End Collection" button is pressed. corner data.
虽然，上文中已经用一般性说明对本发明作了详尽的描述,但在本发明基础上，可以对之作一些修改或改进，这对本领域技术人员而言是显而易见的。因此，在不偏离本发明精神的基础上所做的这些修改或改进，均属于本发明要求保护的范围。Although the present invention has been described in detail with general description above, it will be obvious to those skilled in the art that some modifications or improvements can be made on the basis of the present invention. Therefore, the modifications or improvements made on the basis of not departing from the spirit of the present invention all belong to the protection scope of the present invention.
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Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08201053A (en) * | 1995-01-23 | 1996-08-09 | Mitsubishi Electric Corp | Method and apparatus for measuring planarity |
| JP2000337867A (en) * | 1999-05-26 | 2000-12-08 | Mitsubishi Electric Corp | Method and apparatus for measurement of flatness |
| CN1530629A (en) * | 2003-03-12 | 2004-09-22 | 中国科学院沈阳自动化研究所 | Measuring method for precision parallelism |
| CN204309800U (en) * | 2014-12-12 | 2015-05-06 | 陕西正信铁路器材有限公司 | Based on the railway clearance measurement mechanism of laser displacement sensor and obliquity sensor |
| CN106556358A (en) * | 2016-11-23 | 2017-04-05 | 西安航天计量测试研究所 | A kind of barrel swivel part installs concentricity high-speed adjustment device and measuring method |
| CN107782278A (en) * | 2017-12-08 | 2018-03-09 | 重庆大学 | Depth of parallelism test device at a kind of clutch case supporting rib |
| JP2018169266A (en) * | 2017-03-29 | 2018-11-01 | 株式会社東京精密 | Angle correction method of surface shape measuring device, and angle correction device |
| US20200132140A1 (en) * | 2017-06-28 | 2020-04-30 | Ferquest Gmbh | Method and Device for Ascertaining a Positional Deviation of a Rotational Body |
| CN212390985U (en) * | 2020-05-13 | 2021-01-22 | 丽水市食品药品与质量技术检验检测院 | Two measuring surface parallelism detection and correction device |
| CN112325809A (en) * | 2021-01-06 | 2021-02-05 | 广东技术师范大学 | Method for detecting flatness of flange |
| CN112710334A (en) * | 2020-12-30 | 2021-04-27 | 浙江工业大学 | Zero adjustment device and method for driving mechanism based on photoelectric displacement sensor |
| CN114136239A (en) * | 2021-11-29 | 2022-03-04 | 上海电器科学研究所（集团）有限公司 | Online non-contact measurement method for butt joint of cabin sections |
| CN217543871U (en) * | 2022-04-01 | 2022-10-04 | 中国铁路武汉局集团有限公司科学技术研究所 | Wheel set tread polygon detection system |
-
2022
- 2022-12-12 CN CN202211589096.0A patent/CN115655123A/en active Pending
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08201053A (en) * | 1995-01-23 | 1996-08-09 | Mitsubishi Electric Corp | Method and apparatus for measuring planarity |
| JP2000337867A (en) * | 1999-05-26 | 2000-12-08 | Mitsubishi Electric Corp | Method and apparatus for measurement of flatness |
| CN1530629A (en) * | 2003-03-12 | 2004-09-22 | 中国科学院沈阳自动化研究所 | Measuring method for precision parallelism |
| CN204309800U (en) * | 2014-12-12 | 2015-05-06 | 陕西正信铁路器材有限公司 | Based on the railway clearance measurement mechanism of laser displacement sensor and obliquity sensor |
| CN106556358A (en) * | 2016-11-23 | 2017-04-05 | 西安航天计量测试研究所 | A kind of barrel swivel part installs concentricity high-speed adjustment device and measuring method |
| JP2018169266A (en) * | 2017-03-29 | 2018-11-01 | 株式会社東京精密 | Angle correction method of surface shape measuring device, and angle correction device |
| US20200132140A1 (en) * | 2017-06-28 | 2020-04-30 | Ferquest Gmbh | Method and Device for Ascertaining a Positional Deviation of a Rotational Body |
| CN107782278A (en) * | 2017-12-08 | 2018-03-09 | 重庆大学 | Depth of parallelism test device at a kind of clutch case supporting rib |
| CN212390985U (en) * | 2020-05-13 | 2021-01-22 | 丽水市食品药品与质量技术检验检测院 | Two measuring surface parallelism detection and correction device |
| CN112710334A (en) * | 2020-12-30 | 2021-04-27 | 浙江工业大学 | Zero adjustment device and method for driving mechanism based on photoelectric displacement sensor |
| CN112325809A (en) * | 2021-01-06 | 2021-02-05 | 广东技术师范大学 | Method for detecting flatness of flange |
| CN114136239A (en) * | 2021-11-29 | 2022-03-04 | 上海电器科学研究所（集团）有限公司 | Online non-contact measurement method for butt joint of cabin sections |
| CN217543871U (en) * | 2022-04-01 | 2022-10-04 | 中国铁路武汉局集团有限公司科学技术研究所 | Wheel set tread polygon detection system |
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