CN115655123A - Device for detecting parallelism of heat shield of single crystal furnace - Google Patents
Device for detecting parallelism of heat shield of single crystal furnace Download PDFInfo
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- CN115655123A CN115655123A CN202211589096.0A CN202211589096A CN115655123A CN 115655123 A CN115655123 A CN 115655123A CN 202211589096 A CN202211589096 A CN 202211589096A CN 115655123 A CN115655123 A CN 115655123A
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- 239000013078 crystal Substances 0.000 title claims abstract description 39
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims abstract description 7
- 238000009826 distribution Methods 0.000 claims abstract description 7
- 229910052744 lithium Inorganic materials 0.000 claims abstract description 7
- 238000006073 displacement reaction Methods 0.000 claims abstract description 5
- 238000001514 detection method Methods 0.000 claims description 21
- 238000003860 storage Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
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- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
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- 239000010703 silicon Substances 0.000 description 1
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- 230000036962 time dependent Effects 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
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Abstract
The invention provides a device for detecting the parallelism of a heat shield of a single crystal furnace, and relates to the technical field of single crystal furnaces. The device for detecting the parallelism of the heat shield of the single crystal furnace comprises: the device comprises a plane inclinometer, a laser sensor, a spherical holder, a base, a gyro angle indicator, a data acquisition device, a power supply, an upper computer and an equipment platform. The plane inclinometer and the laser displacement sensor are both installed on a base supported by the spherical holder, the gyroscope angle meter is used for detecting the real-time angular speed of the rotary table during rotation, the data acquisition device is a wireless high-speed analog quantity data acquisition card, the power supply comprises a high-capacity lithium battery and a power distribution module, and the upper computer comprises a personal computer, a notebook computer and an industrial personal computer.
Description
Technical Field
The invention relates to the technical field of single crystal furnaces, in particular to a device for detecting parallelism of a heat shield of a single crystal furnace.
Background
The single crystal furnace is a main device for preparing the silicon single crystal rod, and the graphite thermal fields adopted by the existing single crystal furnace are all closed thermal fields with thermal shields. The heat shield is an important component of a thermal system of the single crystal furnace, has the important functions of heat preservation, heat insulation and stabilization of a thermal field in the furnace, and also has the functions of improving the trend of air flow in the furnace and reducing the radiation of heat of a heater to crystals.
In the production process of monocrystalline silicon, the level of the bottom end plane of the heat shield and the reference plane is guaranteed to be crucial. Since the temperature profile inside the crucible is severely affected when the heat shield is tilted, and thus the ratio V/G, where V is the pull rate, G is the axial temperature gradient at the solid-liquid interface, and the ratio V/G determines the quality of the crystal. At present, in order to ensure that the heat shield does not incline, most of methods adopted by a factory are visual methods, namely, whether the bottom end plane of the heat shield is parallel to a reference plane is judged by visual inspection. The method has larger error, and different judgment standards of different workers cause the dispersion of product quality. Therefore, how to provide a detection device capable of accurately detecting whether the bottom end plane of the heat shield is parallel to the reference plane is a technical problem to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, the invention provides a device for detecting parallelism of a heat shield of a single crystal furnace, which detects parallelism of a plane at the bottom end of the heat shield and a reference plane of equipment by using various sensors to achieve the purposes of accuracy and high efficiency.
In order to achieve the purpose, the technical scheme provided by the invention specifically comprises the following steps: a single crystal furnace heat shield parallelism detection device based on a wireless high-speed analog quantity acquisition card. The method comprises the following steps: the device comprises a plane inclinometer, a laser sensor, a spherical holder, a base, a gyro angle indicator, a data acquisition device, a power supply, an upper computer and an equipment platform. The scheme has the greatest characteristic of realizing real-time, high-speed and high-acquisition-density detection.
Preferably, in the device for detecting the parallelism of the heat shield of the single crystal furnace, the laser sensor is mounted on a base of the spherical holder for displacement detection, and outputs an analog quantity signal to an input port of the data acquisition card.
Preferably, in the device for detecting the parallelism of the heat shield of the single crystal furnace, the plane inclinometer is movably clamped, and during the first detection, the inclinometer is placed on the reference plane to return to zero and then clamped on the holder base to adjust the parallelism between the equipment mounting surface of the holder base and the reference plane.
Preferably, in the device for detecting the parallelism of the heat shield of the single crystal furnace, the spherical holder is fixed on the equipment platform.
Preferably, in the device for detecting the parallelism of the heat shields of the single crystal furnace, the gyro angle meter is a voltage gyro angle meter.
Preferably, in the device for detecting the parallelism of the heat shield of the single crystal furnace, the data acquisition device is a wireless high-speed analog quantity data acquisition card.
Preferably, in the device for detecting the parallelism of the heat shields of the single crystal furnace, the power supply comprises a large-capacity lithium battery and a power distribution module. The high-capacity lithium battery can ensure that power is supplied to all equipment of the system, and the whole set of equipment can work continuously; the power distribution module can distribute and control power to the electric equipment.
Preferably, in the device for detecting the parallelism of the heat shield of the single crystal furnace, the upper computer comprises a personal computer, a notebook computer and an industrial personal computer; the upper computer can run a monitoring program.
Preferably, in the above apparatus for detecting parallelism of heat shields of single crystal furnaces, the monitoring program comprises a controllable button; the controllable button is of a touch screen type, and can realize hardware configuration and control of the detection system, and lookup and storage of the measured data and the measured historical data.
Preferably, in the above apparatus for detecting parallelism of heat shields of a single crystal furnace, the displayed content of the monitoring program includes: reference distance, current distance, rotary table rotation speed, rotary table corner, maximum deviation and maximum deviation position.
The device for detecting the parallelism of the heat shield of the single crystal furnace is different from the prior art in that the device for detecting the parallelism of the heat shield of the single crystal furnace is used for collecting data by using a sensor and a collecting card, and then transmitting the collected data to an upper computer in real time for displaying and analyzing.
The invention is described below with reference to the accompanying drawings: a device for detecting the parallelism of a heat shield of a single crystal furnace is further described.
Drawings
FIG. 1 is a schematic diagram of a testing principle of a technical scheme of the device for detecting the parallelism of the heat shield of the single crystal furnace.
In fig. 1: the system comprises a plane inclinometer 1, a base 2, a spherical holder 3, an equipment platform 4, a turntable 5, an upper computer control box 6, a lithium battery 7, a power distribution module 8, a laser sensor 9, a wireless high-speed analog quantity acquisition card 10 and a voltage gyroscope 11.
Fig. 2 is a schematic diagram of the detection object and the structure size.
Fig. 3 is a schematic view of the installation of the detection device.
FIG. 4 is a schematic diagram of a data display main interface.
Detailed Description
The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
As shown in FIG. 1, the technical scheme of the invention is as follows: the device for detecting the parallelism of the heat shield of the single crystal furnace based on the high-speed analog acquisition card comprises: the device comprises a plane inclinometer, a laser sensor, a spherical holder, a base, a gyro angle indicator, a data acquisition device, a power supply, an upper computer and an equipment platform.
Installing a laser sensor on a base of a spherical holder for displacement detection, and outputting an analog quantity signal to an input port of a data acquisition card; the digital display biaxial plane inclinometer is movably clamped, and during first detection, the inclinometer needs to be placed on a reference plane to return to zero, and then the digital display biaxial plane inclinometer is clamped on the holder base and used for adjusting the parallelism between the equipment mounting surface of the holder base and the reference plane; the voltage type gyroscope angle meter is used for detecting the real-time angular velocity of the rotating platform during rotation, outputting an analog quantity signal to an input port of the data acquisition card, and then estimating the real-time angle quantity of the laser sensor through a digital processing algorithm in an upper computer program; the wireless high-speed analog quantity acquisition card is used for transmitting the test data to an upper computer in real time through a Wi-Fi protocol at a specified sampling frequency for displaying and analyzing; the high-capacity rechargeable lithium battery and the power distribution module are used for supplying power to all equipment of the system, so that the whole set of equipment can work continuously; meanwhile, through reasonable industrial integrated design, the appearance of the whole machine is simple and attractive, and the whole machine has both reliability and high operability. As shown in fig. 3, the integrated post-detection device is mounted on the turntable to realize real-time detection.
Because this scheme adopts high-speed analog quantity detection mode, so can realize high-speed, the detection of high acquisition density. During detection, the influence of noise on a detection result can be reduced through a digital filtering algorithm, so that the detection accuracy is improved.
According to the technical scheme, two physical quantities are mainly collected in real time, namely the real-time distance of a test surface collected by a laser sensor and the real-time rotating speed collected by a gyroscope angle meter. The former has no technical risk, and the latter is mainly used for estimating the real-time rotation angle of the rotary table through a data algorithm of an upper computer. Since the gyro-angle sensor has adverse characteristics such as unavoidable time drift characteristics, the accuracy of the finally calculated real-time rotation angle is affected. Aiming at the problem, the technical scheme can meet the precision requirement of real-time corner calculation in the detection process by strictly controlling the time length required by completing one-time detection, resetting the data buffer area when the test is started and performing numerical compensation by using the zero output value of the sensor.
The technical scheme supports two data acquisition modes, namely a manual acquisition mode and an automatic acquisition mode, manually selects the modes before acquisition starts, and completes related analog quantity acquisition parameter configuration.
When a manual acquisition mode is selected, when a 'start acquisition' key is pressed down, the upper computer sends an acquisition starting instruction, the acquisition card works according to parameters such as set acquisition frequency and the like after receiving the instruction, and data are transmitted to the upper computer in real time through WIFI; when the collection ending button is pressed down, the upper computer sends a collection ending instruction, and the collection card immediately stops data collection after receiving the instruction.
When the automatic acquisition mode is selected, the acquisition card takes the trigger signal of the photoelectric proximity switch as an external trigger signal. When the "start gather" button is pressed, the device rotates with the turntable. When the photoelectric proximity switch passes the identification position for the first time, the collection is triggered. When the equipment rotates for a week and passes the identification position again, the acquisition is stopped. The marking position is a column placed at a designated position. After collection is stopped, the collection starting button is enabled, and the collection ending button is forbidden. And then the acquisition card does not respond to the external trigger signal until the 'start acquisition' key is pressed again. In this mode, the "end acquisition" button is used to immediately stop acquisition.
Fig. 4 is a schematic diagram of a data display main interface, where the left diagram interface of fig. 4 is a polar coordinate system, coordinates of each data point include (r, θ), where r is a value of a current distance, and θ is a value corresponding to a current rotation angle. The radius of the middle solid line circle is the set reference distance, the radius of the outer circle is (reference distance + 15), and the radius of the inner circle is (reference distance-15). The value of r should be limited to (base distance-15) < r < (base distance + 15). When θ is greater than 360 °, the left image data is not updated any more, but the mouse should be moved to the corresponding data point to highlight the polar coordinates of the point. The right graph of fig. 4 is a time-dependent curve of the laser displacement sensor and the rotation angle sensor. The contents of the light gray text box in the upper portion of fig. 4 are entered by the user.
Before the acquisition is started for the first time, whether the parameters of the rotating speed of the rotary table and the reference distance are assigned or not is checked. If not, the data acquisition mode, the acquisition starting mode, the acquisition ending mode and the related functions cannot be selected. The contents of the middle gray text box do not allow user input, and the r and theta values are read by the software and the data is updated in real time. When acquisition is not started or θ is not assigned, the current rotation angle is displayed as 0. The content of the dark gray text box also does not allow the user to input, and the content is cleared when the 'start acquisition' key is pressed, and is updated to the absolute value of the first maximum (r-reference distance) and the rotation angle data thereof after the 'end acquisition' key is pressed.
Although the invention has been described in detail hereinabove by way of general illustration, it will be apparent to those skilled in the art that modifications and improvements can be made thereto. Accordingly, such modifications and improvements are intended to be within the scope of the invention as claimed.
Claims (10)
1. The utility model provides a device that is used for single crystal growing furnace heat shield depth of parallelism to detect which characterized in that: the device comprises a plane inclinometer, a laser sensor, a spherical holder, a base, a gyro angle indicator, a data acquisition device, a power supply, an upper computer and an equipment platform.
2. The device for detecting the parallelism of the heat shields of the single crystal furnace as claimed in claim 1, wherein: the laser sensor is arranged on a base of the spherical holder to carry out displacement detection, and outputs an analog quantity signal to an input port of the data acquisition card.
3. The device for detecting the parallelism of the heat shields of the single crystal furnace according to claim 1, wherein: the plane inclinometer is movably clamped, and during first detection, the inclinometer needs to be placed on a reference plane to return to zero and then clamped on the holder base.
4. The device for detecting the parallelism of the heat shields of the single crystal furnace as claimed in claim 1, wherein: the spherical cradle head is fixed on the equipment platform.
5. The device for detecting the parallelism of the heat shields of the single crystal furnace as claimed in claim 1, wherein: the data acquisition device is a wireless high-speed analog quantity data acquisition card.
6. The device for detecting the parallelism of the heat shields of the single crystal furnace as claimed in claim 1, wherein: the power supply comprises a high-capacity lithium battery and a power distribution module.
7. The device for detecting the parallelism of the heat shields of the single crystal furnace according to claim 6, wherein: the high-capacity lithium battery can ensure that power is supplied to all equipment of the system, and the whole set of equipment can work continuously; the power distribution module can distribute and control power to electric equipment.
8. The device for detecting the parallelism of the heat shields of the single crystal furnace as claimed in claim 1, wherein: the upper computer comprises a personal computer, a notebook computer and an industrial personal computer.
9. The device for detecting the parallelism of the heat shields of the single crystal furnace as claimed in claim 1, wherein: the upper computer can run a monitoring program.
10. The device for detecting the parallelism of the heat shields of the single crystal furnace according to claim 9, wherein: the monitoring program comprises a controllable button which is in a touch screen type and can realize hardware configuration and control of the detection system and look up and storage of the measured data and the measured historical data; the content displayed by the monitoring program comprises: reference distance, current distance, rotary table rotation speed, rotary table corner, maximum deviation and maximum deviation position.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211589096.0A CN115655123A (en) | 2022-12-12 | 2022-12-12 | Device for detecting parallelism of heat shield of single crystal furnace |
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| CN202211589096.0A CN115655123A (en) | 2022-12-12 | 2022-12-12 | Device for detecting parallelism of heat shield of single crystal furnace |
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Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08201053A (en) * | 1995-01-23 | 1996-08-09 | Mitsubishi Electric Corp | Method and apparatus for measuring planarity |
| JP2000337867A (en) * | 1999-05-26 | 2000-12-08 | Mitsubishi Electric Corp | Method and apparatus for measurement of flatness |
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| CN204309800U (en) * | 2014-12-12 | 2015-05-06 | 陕西正信铁路器材有限公司 | Based on the railway clearance measurement mechanism of laser displacement sensor and obliquity sensor |
| CN106556358A (en) * | 2016-11-23 | 2017-04-05 | 西安航天计量测试研究所 | A kind of barrel swivel part installs concentricity high-speed adjustment device and measuring method |
| CN107782278A (en) * | 2017-12-08 | 2018-03-09 | 重庆大学 | Depth of parallelism test device at a kind of clutch case supporting rib |
| JP2018169266A (en) * | 2017-03-29 | 2018-11-01 | 株式会社東京精密 | Angle correction method of surface shape measuring device, and angle correction device |
| US20200132140A1 (en) * | 2017-06-28 | 2020-04-30 | Ferquest Gmbh | Method and Device for Ascertaining a Positional Deviation of a Rotational Body |
| CN212390985U (en) * | 2020-05-13 | 2021-01-22 | 丽水市食品药品与质量技术检验检测院 | Two measuring surface parallelism detection and correction device |
| CN112710334A (en) * | 2020-12-30 | 2021-04-27 | 浙江工业大学 | Zero adjustment device and method for driving mechanism based on photoelectric displacement sensor |
| CN114136239A (en) * | 2021-11-29 | 2022-03-04 | 上海电器科学研究所（集团）有限公司 | Online non-contact measurement method for butt joint of cabin sections |
-
2022
- 2022-12-12 CN CN202211589096.0A patent/CN115655123A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08201053A (en) * | 1995-01-23 | 1996-08-09 | Mitsubishi Electric Corp | Method and apparatus for measuring planarity |
| JP2000337867A (en) * | 1999-05-26 | 2000-12-08 | Mitsubishi Electric Corp | Method and apparatus for measurement of flatness |
| CN1530629A (en) * | 2003-03-12 | 2004-09-22 | 中国科学院沈阳自动化研究所 | Measuring method for precision parallelism |
| CN204309800U (en) * | 2014-12-12 | 2015-05-06 | 陕西正信铁路器材有限公司 | Based on the railway clearance measurement mechanism of laser displacement sensor and obliquity sensor |
| CN106556358A (en) * | 2016-11-23 | 2017-04-05 | 西安航天计量测试研究所 | A kind of barrel swivel part installs concentricity high-speed adjustment device and measuring method |
| JP2018169266A (en) * | 2017-03-29 | 2018-11-01 | 株式会社東京精密 | Angle correction method of surface shape measuring device, and angle correction device |
| US20200132140A1 (en) * | 2017-06-28 | 2020-04-30 | Ferquest Gmbh | Method and Device for Ascertaining a Positional Deviation of a Rotational Body |
| CN107782278A (en) * | 2017-12-08 | 2018-03-09 | 重庆大学 | Depth of parallelism test device at a kind of clutch case supporting rib |
| CN212390985U (en) * | 2020-05-13 | 2021-01-22 | 丽水市食品药品与质量技术检验检测院 | Two measuring surface parallelism detection and correction device |
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| CN114136239A (en) * | 2021-11-29 | 2022-03-04 | 上海电器科学研究所（集团）有限公司 | Online non-contact measurement method for butt joint of cabin sections |
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