JPH08201053A - Method and apparatus for measuring planarity - Google Patents

Abstract

PURPOSE: To obtain an apparatus for measuring the planarity of a casting accurately, efficiently and economically without requiring any large surface plate, manual measuring system or the work for correcting the planarity of a plane to be measured. CONSTITUTION: A plane of a casting 9 to be measured is scanned circularly by means of a distance measuring sensor 2 to obtain a measurement of displacement at a constant angular interval. When the planarity is determined based on the measurements of displacement, an error component due to the shift in the parallelism of the plane to be measured from a circular plane is calculated and then the planarity is determined by correcting the error component.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flatness measuring apparatus and a flatness measuring method, and more particularly to a casting for industrial equipment, such as an insulating spacer used for a power switchgear. The present invention relates to a flatness measuring device and a flatness measuring method.

[0002]

2. Description of the Related Art According to the National Proficiency Test Standards, flatness is the magnitude of displacement of a plane part of an object from an ideal plane, parallel to the ideal plane, and the highest and lowest points of the plane part. It is defined that the two planes passing through are considered and are expressed by the distance between these two planes. In addition, as an example of the measurement method, the measurement target is placed on the surface plate via three legs,
The difference between the maximum value and the minimum value of the measured values when the ideal plane defined by the three points of the plane part is made parallel to the surface plate and a measuring instrument such as a displacement gauge is moved parallel to the surface of the surface plate There is a way to ask. As described above, in order to measure the flatness of the measurement target, it is necessary to correct the parallelism between the reference plane of the measurement system and the ideal plane of the measurement target. Therefore, the flatness is measured by first using the surface plate whose flatness is assured and performing the parallelism correction described above.

A conventional apparatus and a conventional method will be described here. 12 and 13 show a flatness measuring apparatus for medium and small-sized cast products by a conventional general apparatus.
Shows a side view of the conventional device, and FIG. 13 shows a plan view of the conventional device. In FIG. 12, 19 is a surface plate and 17 is a measuring jig for measuring flatness, which is in contact with the surface of the surface plate 19 and can be freely moved. 9 is a cast product to be measured, 2
Is a displacement sensor (hereinafter referred to as a distance measuring sensor) such as a dial gauge that measures a distance (displacement amount) from the measurement surface of the casting 9 and is provided in the measuring jig 17. Reference numeral 18 denotes a jack for supporting the cast product 9, which is an adjusting mechanism for making the locus of the distance measuring sensor 2 and the ideal plane on the measurement surface of the cast product 9 parallel.

For parallelism correction, for example, JISB6201
(1976) "Machine tool test method general rule" Using a method similar to the measuring method described in paragraphs 4 and 3 "parallelism", the distance measuring sensor 2 is used to make the ideal plane (jack) of the casting 9 3 jacks 18 supporting the casting 9 so that all the measured values at 3 points on 18 are the same.
To adjust.

As described above, the ideal plane of the casting 9 and the surface of the surface plate 19 as the measurement reference plane are in parallel. Here, the measuring jig 17 is in contact with the surface of the surface plate 19, and the distance measuring sensor 2 is provided in the measuring jig 17. Therefore, the parallelism correction between the locus of the distance measuring sensor 2 which is the measurement system and the ideal plane on the measurement surface of the casting 9 is completed. While maintaining this state, the flatness can be obtained from the displacement amount measured by the distance measuring sensor 2 provided on the measuring jig 17 for one rotation on the circumference of the measuring surface of the casting 9.

Next, as another conventional device, a flatness measuring device for a large casting (having a diameter of 1 m or more) will be described.
In the case of a large cast product, the use of the above-mentioned method requires a large surface plate to be used, resulting in poor space efficiency and uneconomical. Therefore, as shown in FIGS. 14 and 15, the flatness is obtained by the method using the measuring jig 1.

FIG. 14 is a side view showing another conventional device, and FIG. 15 is a plan view showing the same conventional device. In FIG. 14, the measuring jig 1 includes a distance measuring sensor 2, a slider 3,
It is composed of an arm 4, a bearing 5, a jack bolt 6, a mounting plate 7, and a fixing bolt 8.

In the case of this apparatus, first, the mounting plate 7 serving as the base of the measuring jig 1 is temporarily fixed to the casting product 9 to be measured by the fixing bolt 8. The fixing bolt 8 also serves as the positioning of the measuring jig 1. By mounting the fixing bolt 8 in a positioning hole provided in the casting 9 although not shown, the rotation center of the bearing 5 on the mounting plate 7 is It is adapted to coincide with the center of the measurement surface of the cast product 9, and the arm 4 mounted on the bearing 5 can rotate in the circumferential direction of the cast product 9.

The arm 4 is provided with a slider 3, and a distance measuring sensor 2 for measuring the distance of the casting 9 from the measuring surface is attached. The slider 3 is an arm 4
It can be moved to an arbitrary position above and can be set to a predetermined measurement position on the measurement surface of the casting 9. When measuring the flatness, as described above, the measurement jig 1 is temporarily fixed to the casting product 9 with the fixing bolts 8, and then the position of the distance measuring sensor 2 is adjusted with the slider 3 to the measuring surface of the casting product 9. Set to the top flatness measurement position in the radial direction.

Also in such a conventional apparatus, FIG. 12 and FIG.
Similar to the case described in 3, the flatness measurement requires an adjusting mechanism for correcting the parallelism between the measurement system and the measurement surface.
Here, the jack bolts 6 are provided on the mounting plate 7 at three locations. The jack bolts 6 are adjusted until the measured values at all three points on the measuring surface of the casting 9 become the same value. Then, after the adjustment is completed, the fixing bolt 8 is further tightened to maintain this state. Here, the locus in the rotation direction of the distance measuring sensor 2 is parallel to the ideal plane on the measurement surface of the casting 9, and the parallelism correction between the measurement system and the measurement surface is completed. After that, the flatness can be obtained from the measured data for one revolution on the circumference of the measurement surface of the casting 9 by the distance measuring sensor 2.

[0011]

In the conventional caster flatness measuring device, it was necessary to correct the parallelism between the measuring system and the measuring surface as described above. In particular, for a large casting product, a large surface plate is required when measuring on the surface plate, which is uneconomical due to poor space efficiency. Further, even in the device using the measuring jig as shown in FIGS. 14 and 15, parallelism correction work by adjusting the jack bolt is necessary. In this parallelism correction work, the measurement values at all three points on the ideal plane of the measurement surface must match, adjustment is extremely difficult, a skilled worker is required, and a great deal of time is required. There was a problem.

The present invention has been made to solve the above problems, and it is accurate and efficient without requiring a large surface plate or a manual operation for correcting the parallelism between the measuring system and the measuring surface. An object is to obtain a flatness measuring device and a flatness measuring method which are economical and economical.

[0013]

A flatness measuring apparatus according to claim 1 of the present invention is provided so as to face a plane to be measured,
A displacement sensor for measuring the displacement of the measured plane by measuring the distance to the measured plane, a support means for supporting the displacement sensor in a circular scan on the measured plane, and a circular shape. When calculating the flatness based on a plurality of displacement measurement values obtained for each equal angle, the error component due to the deviation of the parallelism of the measured plane with respect to the circular plane is calculated, and the error component is corrected to And a calculating means for obtaining the flatness.

The flatness measuring device according to the second aspect of the present invention is provided so as to face the measured planes on the front and back sides, and measures the distance to the measured planes to measure the displacement of the measured planes. Displacement sensor, supporting means for supporting the displacement sensor in a circular scan on the measured plane, and the measured plane based on a plurality of displacement measurement values obtained at equal angles on the circle. When determining the flatness of
The error component due to the deviation of the parallelism of the measured plane with respect to the circular plane is calculated, the flatness is obtained by correcting the error component, and the deviation of the parallelism from the displacement measurement values of the measured planes on the front and back sides is calculated. And a calculating means for calculating

A flatness measuring apparatus according to a third aspect of the present invention is provided so as to face a plane to be measured having a constant inclination with respect to the bottom surface, and the distance to the plane to be measured is measured to measure the plane to be measured. A displacement sensor for measuring the displacement of the measurement plane, a support means for supporting the displacement sensor in a circular shape on the measured plane so that the circular surface is scannable parallel to the bottom surface, and the circular shape. When determining the flatness based on the plurality of displacement measurement values obtained for each equal angle above, based on the displacement measurement value, calculate the error component due to the deviation of the parallelism of the measured plane to the circular plane. A calculating means for correcting the error component to obtain the flatness, developing the measured value into a Fourier series, and calculating an inclination angle of the measured plane with respect to the bottom surface based on the coefficient of the first order term. It includes those were.

In the flatness measuring apparatus according to a fourth aspect of the present invention, the supporting means is provided with two or more of the displacement sensors on the circle at equal angles.

A flatness measuring apparatus according to a fifth aspect of the present invention comprises an angle detecting means for detecting a scanning amount as a rotation angle when the displacement sensor is circularly scanned.

In the flatness measuring apparatus according to the sixth aspect of the present invention, the supporting means is provided with a driving means for scanning the displacement sensor based on an output signal of the angle detecting means.

In the flatness measuring apparatus according to the seventh aspect of the present invention, the calculating means calculates the deflection when the plane to be measured is deflected by a load, and corrects the deflection to correct the flatness. Is to seek.

In the flatness measuring method according to claim 8 of the present invention, the displacement sensor for measuring the displacement of the measured plane by measuring the distance to the measured plane is formed into a circular shape on the measured plane. Scanning, measuring the displacement for each equal angle, when calculating the flatness based on the displacement measurement value obtained a plurality of, calculate the error component due to the deviation of the parallelism of the measured plane to the circular plane, The flatness is obtained by correcting the error component.

[0021]

According to the flatness measuring apparatus of the first aspect of the present invention, the flatness in which the deviation of the parallelism between the measuring plane of the measuring system and the measured plane is corrected can be obtained by calculation.

With the flatness measuring apparatus according to the second aspect of the present invention, the flatness in which the deviation of the parallelism between the measurement plane of the measurement system and the measured plane is corrected can be obtained by calculation, and the parallelism The shift can also be calculated.

According to the flatness measuring apparatus of the third aspect of the present invention, the flatness in which the deviation of the parallelism between the measurement plane of the measurement system and the measured plane is corrected can be obtained by calculation, and the inclination with respect to the bottom surface can be obtained. The inclination of the surface can also be calculated.

According to the flatness measuring apparatus of the fourth aspect of the present invention, the measurement data can be obtained in a short time, or the measurement data at the same position on the plane to be measured can be obtained by a plurality of displacement sensors. You can

According to the flatness measuring apparatus of the fifth aspect of the present invention, the rotation center angle at the time of obtaining the measurement data can be obtained at the same time as the measurement data is obtained.

According to the flatness measuring apparatus of the sixth aspect of the present invention, the driving means can automatically obtain the measurement data for each equal angle.

According to the flatness measuring apparatus of the seventh aspect of the present invention, the calculating means can also obtain the flatness by correcting the deflection due to the load.

According to the flatness measuring method of the eighth aspect of the present invention, the flatness in which the deviation of the parallelism between the measurement plane of the measurement system and the measured plane is corrected can be obtained by calculation.

[0029]

【Example】

Example 1. Embodiment 1 of the present invention will be described below with reference to FIGS. FIG. 1 is a block diagram schematically showing a flatness measuring apparatus according to the first embodiment, FIG. 2 is a side view showing a measuring jig for realizing the flatness measuring apparatus according to the first embodiment, and FIG. FIG. 4 is a diagram showing an ideal positional relationship depending on the mold product, and FIG. 4 is a diagram showing a case where they are in non-parallel positions.

In these figures, 1 is a measuring jig, and 20
Is a measuring unit and 21 is a computer. The measurement jig 1 is attached to a cast product whose flatness is to be measured, and a distance measuring sensor (displacement meter or the like) provided in the measurement jig 1 is attached.
2. Measure the distance from the casting product measurement surface according to 2. The output signal from the distance measuring sensor 2 is A / D converted by the measuring unit 20 and output to the computer 21. Computer 21
Mathematically arithmetically processes the measured displacement amount (raw data), obtains the flatness from the raw data, and outputs and displays it as a flatness graph.

In FIG. 2, a measuring jig 1 is composed of a distance measuring sensor 2, a slider 3, an arm 4, a bearing 5, a mounting plate 7 and a fixing bolt 8 for correcting the parallelism between the measuring system and the measuring surface. It is the same as the measuring jig by the conventional device shown in FIG. 14 except that the jack bolt for use is omitted.

As the operation of the first embodiment, first, a method of measuring raw data of the casting product measurement surface necessary to obtain flatness data of the casting product will be described. In FIG. 2, as in the conventional device of FIG. 14, a mounting plate 7 serving as a base of the measurement jig 1 is used.
Is fixed to the casting product 9 to be measured by the fixing bolt 8. The fixing bolt 8 also functions as the positioning of the measurement jig 1. By mounting the fixing bolt 8 in the positioning hole provided in the casting 9 (not shown), the center of rotation of the bearing 5 on the mounting plate 7 It coincides with the center of the measurement surface of the mold 9.

The arm 4 mounted on the bearing 5 can rotate in the circumferential direction of the measuring surface of the casting 9. The arm 4 is provided with a slider 3, and a distance measuring sensor 2 for measuring the distance of the casting 9 from the measuring surface is attached. The distance measuring sensor 2 includes an arm 4
Since it can be moved to any position above and can be set to a predetermined flatness measurement position on the measurement surface of the casting 9,
In the measurement, after mounting the measuring jig 1 on the casting 9, the distance measuring sensor 2 is set by the slider 3 to the flatness measuring position in the radial direction on the measuring surface of the casting 9.

In the conventional apparatus, the parallelism between the measuring system and the measuring surface was corrected here. However, in the first embodiment, the flatness is calculated by mathematical processing as will be described later. The ideal plane on the measurement surface may be in a non-parallel state. Therefore, the displacement amount measured at equal intervals for one rotation on the circumference of the measuring surface of the casting 9 by the distance measuring sensor 2 becomes the raw data for obtaining the flatness.

Next, a method for obtaining the flatness by mathematically calculating from the displacement amount of several tens points measured at equal intervals on the circumference of the casting surface to be measured will be described. When measuring flatness along the circumference of the casting surface, the casting with an ideal flat surface should be positioned parallel to the probe surface (this corresponds to the reference plane) as shown in Fig. 3 (a). It is ideal to measure after that. At this time, the relationship between the circumferential position and the displacement amount is as shown in FIG.

Further, FIG. 4 (a) shows the case where the casting product and the tracing stylus surface are not parallel, that is, the angle θ exists,
Even if the casting product is an ideal plane, an error as shown in FIG. 4 (b) will occur, and this error component exists for one cycle per rotation. Therefore, the error component caused by the deviation of the parallelism between the measurement system and the measurement surface is the fundamental wave component (one cycle component per rotation), and this fundamental wave component is subtracted from the raw data (value measured in the non-parallel state). Flatness data can be obtained by extracting the amount of displacement.

Now, let us say that the measured value as raw data is Dn, and N points are measured at equal intervals on the circumference of the surface of the cast product to be measured. A Fourier expansion of this measurement value is represented by the equation (1).

[0038]

[Equation 1]

A _{0 in the} equation (1) corresponds to L in FIG. 3 (b). Fundamental component m ₁ corresponds to the amplitude L / 2 of the feeler surface and casting sine wave measurement surface involves the unbalance in FIG 4 (b), m ₂
The above is related to the surface accuracy.

Therefore, as a Fourier series of m (θ),
The value obtained by calculating m ₁ and ψ ₁ and calculating m (ψ) −m ₁ sin (θ + ψ ₁ ) corresponds to the result of measurement in the parallel state between the tracing stylus surface and the casting surface. The specific calculation method is as follows.

[0041]

[Equation 2]

Actually, only a ₁ and b ₂ are calculated, and m ₁ and ψ ₁
Ask for. The correction value D _n ′ for the measured value D _n is given by equation (7).

Dn ′ = D _n −m ₁ sin ((2π × n / N) + ψ ₁ ) (7)

When measuring the flatness of a cast product, the outer peripheral position is used as the reference plane. When the deviation from the reference plane is subtracted from the fundamental wave component, strictly speaking, the distance difference in the radial direction of the cast product is corrected. More needed. When the amplitude of the fundamental wave component is A (mm), the radial position is outer circumference → R1, middle circumference → R2, and inner circumference → R3,

Tilt angle from the reference plane θ = tan ⁻¹ (A / R1) Amplitude value of correction at the middle circumference position A1 = R2 tan θ = (R2 / R1) A (8) Amplitude of correction at the inner circumference position Value A2 = R3 tan θ = (R3 / R1) A

Assuming that R1, R2 and R3 are 700 and 60,
If 0,500 mm and A is 1 mm,

A1 = 0.857 and A2 = 0.714.

If the above A is 0.05 mm,

A1 = 0.043 and A2 = 0.036.

Based on the above concept, the measured raw data is arithmetically processed by a computer to obtain flatness data, which is output and displayed as a flatness graph.

As described above, the measurement jig 1 is attached to the casting product 9, and the displacement (raw data) measured for one rotation in the circumferential direction of the measuring surface of the casting product 9 is measured to obtain the fundamental wave component (one The flatness data of the casting 9 can be obtained by extracting the displacement amount obtained by subtracting the component of one cycle by rotation. Therefore, even if the measurement surfaces of the measurement jig 1 and the casting 9 are not parallel, accurate flatness measurement can be performed. For this reason, it is possible to eliminate the parallelism correction work that was conventionally performed manually.

Example 2. Next, a second embodiment of the present invention will be described. FIG. 5 is a plan view showing a second embodiment of the present invention, and the second embodiment shows a case where a plurality of (three) distance measuring sensors described in the first embodiment are provided.

In FIG. 5, 4a, 4b and 4c are arms, and 2a, 2b and 2c are distance measuring sensors, one for each of the arms 4a, 4b and 4c, and attached at an equal angle on a concentric circle with respect to the center of rotation. Has been.

By averaging the measurement values obtained by the three distance measuring sensors 2a, 2b, 2c, the measurement error due to the blurring of the bearings and the error of the distance measuring sensors 2a, 2b, 2c itself is reduced and the accuracy is high. The measured value is obtained. Further, when there is little variation in the distance measuring sensor, the measurement value for the entire circumference is obtained by rotating 120 degrees, and the measurement time is shortened.

Example 3. Next, a third embodiment of the present invention will be described. FIG. 6 is a partial sectional view showing a third embodiment of the present invention. In FIG. 6, 11 is an encoder or an angle detector such as a potentiometer, which is attached to the center of rotation of the arm 4 in the bearing housing.

With such a configuration, the measurement position (angle) can be automatically measured at the same time as the measurement value of the distance measuring sensor, and by displaying this to the operator, the measurement position of the arm 4 can be determined. The accuracy of the flatness can be improved and the accuracy of flatness measurement can be improved.

Example 4. Next, a fourth embodiment of the present invention will be described. In the fourth embodiment, the angle information from the angle detector provided in the third embodiment is used as a feedback signal for automatic measurement.

FIG. 7 is a side view showing the fourth embodiment, in which 12 is a belt and 13 is a motor. The arm 4 is rotated by the motor 13 via the belt 12.

FIG. 8 is a block diagram showing a control system used in the fourth embodiment. An angle signal 14 for positioning the arm 4 is obtained from the angle detector 11. The angle signal 14 is input to the controller 15, and the controller 15 gives a rotation command 16 to the motor so as to eliminate the deviation from the positioning angle of the arm 4. If the positioning position is updated in sequence and the output of the distance measuring sensor is measured when positioning is completed, automatic measurement is possible and the working time can be greatly reduced. Here, the motor 13 and the belt 12 constitute the driving means of claim 6.

Example 5. Next, a fifth embodiment of the present invention will be described. FIG. 9 is a side view showing a fifth embodiment of the present invention.

In FIG. 9, 2d and 2e are distance measuring sensors, 3d and 3e are sliders, and the distance measuring sensors 2d and 2e are fixed to the arm 4d. Distance measuring sensors 2d, 2e
Is provided so as to face the casting product 9 and enables simultaneous measurement of the front and back surfaces of the casting product 9 at the same angle.

When the raw data measured by the distance measuring sensors 2d and 2e are represented by the Fourier series as in the equation (1),
Expressions (9) and (10) below are given, and the meanings of these expressions are the same as those described for expression (1).

[0063]

(Equation 3)

Therefore, if the difference between the maximum value of the equation (9) and the minimum value of the equation (10) is obtained, the parallelism of the casting 9 can be measured.

Example 6. Next, a sixth embodiment of the present invention will be described. In the sixth embodiment, in the case where the casting is a circular plate whose inner circumference is fixed and whose outer circumference is free, the deflection due to its own weight can be taken into consideration in the flatness measurement.

In the sixth embodiment, the casting 9 is modeled as one that receives a uniformly distributed load. The model of the cast product according to the sixth embodiment is shown in FIG. At this time, the deflection at the radius r is expressed by the following equation.

[0067]

[Equation 4]

Here, p is the load per unit area, b is the radius of the holding portion of the cast product 9, a is the outer radius of the cast product 9 and E
Is the longitudinal elastic modulus, h is the thickness of the casting 9, ν is the Poisson's ratio,
In is a natural logarithm.

When the value of the equation (11) is calculated and the calculated value of the sixth embodiment is subtracted from the calculated value of the first embodiment, the displacement due to the deflection due to its own weight is corrected and the measurement accuracy of the flatness measurement is improved. You can

Example 7. Next, a seventh embodiment of the present invention will be described. In the seventh embodiment, in the flatness measurement of a casting having a measuring surface inclined with respect to the bottom surface, the inclination angle of the plane is calculated in parallel with the flatness measurement. 11 is an overall perspective view showing Embodiment 7 of the present invention. In FIG. 11, 9 is a casting product having a measuring surface inclined with respect to the bottom surface. Also, let r be the measurement radius of rotation of the distance measuring sensor 2, and φ be the angle between the bottom surface of the casting 9 and the measurement surface.
The measurement rotation plane of the measurement sensor is adjusted in parallel with the bottom surface of the casting 9.

Also for the cast product 9 shown in FIG. 11, the following equation for expanding the flatness measurement value with respect to the angle into the Fourier series is obtained as shown in the first embodiment.

[0072]

(Equation 5)

Since the coefficient m ₁ of the first-order sine of θ is the tangent to the radius of gyration, the inclination of this plane can be calculated by the following equation.

Φ = tan ^-1 (m ₁ / r)

Further, ψ _{1 at} this time represents an offset of the angle from the measurement start point, and from ψ ₁ and θ,
By obtaining the maximum m ₁ , the inclination angle of the plane can be calculated in parallel with the flatness measurement.

Although the embodiments of the present invention have been described with respect to the flatness measurement of cast products, it goes without saying that the present invention can also be applied to the measurement of articles other than cast products.

[0077]

The flatness measuring device according to the first aspect of the present invention is provided so as to face the plane to be measured, and measures the distance to the plane to be measured to measure the displacement of the plane to be measured. Displacement sensor, supporting means for supporting the displacement sensor in a circular scannable manner on the plane to be measured, and determining flatness based on a plurality of displacement measurement values obtained at equal angles on the circle. , A calculation system for calculating an error component due to the deviation of the parallelism of the measured plane with respect to the circular plane, and correcting the error component to obtain the flatness, a measurement system that is conventionally performed manually. It is possible to eliminate the work of correcting the parallelism of the measurement surface. Also, since the adjustment mechanism for parallelism correction is not required, the manufacturing cost of the measuring jig can be reduced, and a large flat plate is not required, and an accurate, efficient, and economical flatness measuring device can be obtained. It is effective.

The flatness measuring device according to claim 2 of the present invention is provided so as to face the measured planes on the front and back sides, and measures the distance to the measured planes to measure the displacement of the measured planes. Displacement sensor, supporting means for supporting the displacement sensor in a circular scan on the measured plane, and the measured plane based on a plurality of displacement measurement values obtained at equal angles on the circle. When determining the flatness of
The error component due to the deviation of the parallelism of the measured plane with respect to the circular plane is calculated, the flatness is obtained by correcting the error component, and the deviation of the parallelism from the displacement measurement values of the measured planes on the front and back sides is calculated. Since the calculation means for calculating is used, it is possible to abolish the parallelism correction work of the measurement system and the measurement surface, which is conventionally performed manually. Also, since the adjustment mechanism for parallelism correction is not required, the manufacturing cost of the measurement jig can be reduced, and the large flat plate is not required, and the flatness of the cast product can be measured accurately, efficiently and economically. There is an effect that the device can be obtained. Further, there is an effect that the flatness in which the deviation of the parallelism between the measurement plane of the measurement system and the measured plane is corrected can be obtained by the calculation, and the deviation of the parallelism can also be calculated.

A flatness measuring apparatus according to a third aspect of the present invention is provided so as to face a plane to be measured having a constant inclination with respect to the bottom surface, and the distance to the plane to be measured is measured to measure the plane to be measured. A displacement sensor for measuring the displacement of the measurement plane, a support means for supporting the displacement sensor in a circular shape on the measured plane so that the circular surface is scannable parallel to the bottom surface, and the circular shape. When determining the flatness based on the plurality of displacement measurement values obtained for each equal angle above, based on the displacement measurement value, calculate the error component due to the deviation of the parallelism of the measured plane to the circular plane. A calculating means for correcting the error component to obtain the flatness, developing the measured value into a Fourier series, and calculating an inclination angle of the measured plane with respect to the bottom surface based on the coefficient of the first order term. Because with, it is possible to eliminate the parallelism correction of conventional work manual measuring system which has been performed by the measurement surface. Also, since the adjustment mechanism for parallelism correction is not required, the manufacturing cost of the measuring jig can be reduced, and a large flat plate is not required, and an accurate, efficient, and economical flatness measuring device can be obtained. It is effective. Furthermore, there is an effect that the tilt angle of the measurement plane with respect to the bottom surface of the measurement plane (measurement object) of the measurement system can be calculated.

In the flatness measuring apparatus according to the fourth aspect of the present invention, since the supporting means is provided with two or more of the displacement sensors at equal angles on the circle, it is possible to obtain measurement data in a short time. Alternatively, there is an effect that the measurement data at the same position on the plane to be measured can be obtained with a plurality of displacement sensors.

Since the flatness measuring apparatus according to claim 5 of the present invention is provided with the angle detecting means for detecting the scanning amount as a rotation angle when the displacement sensor is scanned in a circle, the rotation at the time of obtaining the measurement data. There is an effect that the central angle can be obtained at the same time as the measurement data is obtained.

In the flatness measuring apparatus according to the sixth aspect of the present invention, since the supporting means includes the driving means for scanning the displacement sensor based on the output signal of the angle detecting means, the driving means is automatically operated. Moreover, there is an effect that the measurement data can be obtained for each equal angle.

In the flatness measuring apparatus according to claim 7 of the present invention, the calculating means calculates the deflection when the plane to be measured is deflected by a load, corrects the deflection and corrects the flatness. Therefore, the calculation means has an effect that the flatness can be obtained by correcting the deflection due to the load.

In the flatness measuring method according to the eighth aspect of the present invention, a displacement sensor for measuring the displacement of the measured plane by measuring the distance to the measured plane is formed into a circular shape on the measured plane. Scanning, measuring the displacement for each equal angle, when calculating the flatness based on the displacement measurement value obtained a plurality of, calculate the error component due to the deviation of the parallelism of the measured plane to the circular plane, Since the flatness is obtained by correcting the error component, it is possible to eliminate the work of manually correcting the parallelism between the measurement system and the measurement surface, which is conventionally performed manually. In addition, since the adjustment mechanism for parallelism correction is not required, the manufacturing cost of the measurement jig can be reduced and
There is an effect that an accurate, efficient and economical flatness measuring method can be obtained without the need for a large surface plate.

[Brief description of drawings]

FIG. 1 is a block diagram showing an outline of a first embodiment of the present invention.

FIG. 2 is a side view showing a second embodiment of the present invention.

FIG. 3 is a diagram showing an ideal positional relationship by an ideal casting product.

FIG. 4 is a diagram showing a positional relationship in a non-parallel position.

FIG. 5 is a plan view showing a second embodiment of the present invention.

FIG. 6 is a sectional view of a bearing portion showing an attached state of an angle detector according to a third embodiment of the present invention.

FIG. 7 is a side view showing a fourth embodiment of the present invention.

FIG. 8 is a block diagram showing a schematic control system according to a fourth embodiment of the present invention.

FIG. 9 is a side view showing a fifth embodiment of the present invention.

FIG. 10 is a model diagram showing Embodiment 6 of the present invention.

FIG. 11 is an overall perspective view showing Embodiment 7 of the present invention.

FIG. 12 is a side view of a conventional device.

FIG. 13 is a plan view of a conventional device.

FIG. 14 is a side view of another conventional device.

FIG. 15 is a plan view of another conventional device.

[Explanation of symbols]

1 measuring jig, 2 distance measuring sensors, 2a, 2b, 2c
Distance measuring sensor, 3 sliders, 4, 4a, 4b, 4c
Arm, 5 bearings, 8 fixing bolts, 9 cast products, 10
Frame, 11 angle detector, 12 belt, 13 motor, 14 angle signal, 15 controller, 20 measuring unit, 21 computer.

Continued Front Page (72) Inventor Shinichiro Okamoto 8-1-1 Tsukaguchihonmachi, Amagasaki City Mitsubishi Electric Corporation Itami Works

Claims (8)

[Claims] 1. A displacement sensor which is provided so as to face a surface to be measured and which measures displacement of the surface to be measured by measuring a distance to the surface to be measured, and the displacement sensor on the surface to be measured. A supporting means for supporting a circular scannable position and a deviation of parallelism of the measured plane with respect to the circular plane when determining the flatness based on a plurality of displacement measurement values obtained at equal angles on the circle. A flatness measuring apparatus, comprising: a calculating unit that calculates an error component due to, and calculates the flatness by correcting the error component. 2. A displacement sensor, which is provided so as to face the measured planes on the front and back sides, and measures the displacement of the measured plane by measuring the distance to the measured plane, and the displacement sensor is the measured sensor. When a flatness of the measured plane is obtained based on a plurality of displacement measurement values obtained at equal angles on the circle, supporting means for supporting the circularly scannably on the plane. Calculation means for calculating an error component due to the deviation of the parallelism with respect to the circular plane, correcting the error component to obtain the flatness, and calculating the deviation of the parallelism from the displacement measurement values of the measured planes on the front and back sides. And a flatness measuring device. 3. A displacement sensor, which is provided so as to face a plane to be measured having a constant inclination with respect to the bottom surface, and which measures a displacement to the plane to be measured by measuring a distance to the plane to be measured. A support means for supporting the displacement sensor in a circular shape on the plane to be measured so that the circular surface is parallel to the bottom surface, and a plurality of displacements obtained on the circle at equal angles. When determining the flatness based on the measurement value, based on the displacement measurement value, an error component due to the deviation of the parallelism of the measured plane with respect to the circular plane is calculated, and the flatness is corrected by correcting the error component. A flatness measuring apparatus, comprising: . 4. The flatness measuring device according to claim 1, wherein the supporting means is provided with two or more of the displacement sensors on the circle at equal angles. 5. The flatness measuring device according to claim 1, further comprising an angle detecting means for detecting a scanning amount of the displacement sensor as a rotation angle when the displacement sensor is circularly scanned. . 6. The flatness measuring apparatus according to claim 5, wherein the supporting means includes driving means for scanning the displacement sensor based on an output signal of the angle detecting means. 7. The method according to claim 1, wherein when the plane to be measured receives a deflection due to a load, the calculating means calculates the deflection and corrects the deflection to obtain the flatness. Item 6. The flatness measuring device according to any one of items 5. 8. A displacement sensor for measuring the displacement of the measured plane by measuring the distance to the measured plane is circularly scanned on the measured plane to measure the displacement at equal angles. When calculating the flatness based on a plurality of displacement measurement values obtained, calculate an error component due to deviation of parallelism of the measured plane with respect to the circular plane, and correct the error component to obtain the flatness. A flatness measuring method characterized by.