CN115642117B - Integrated curing oven suitable for thin small-volume semiconductor frame - Google Patents
Integrated curing oven suitable for thin small-volume semiconductor frame Download PDFInfo
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- CN115642117B CN115642117B CN202211380521.5A CN202211380521A CN115642117B CN 115642117 B CN115642117 B CN 115642117B CN 202211380521 A CN202211380521 A CN 202211380521A CN 115642117 B CN115642117 B CN 115642117B
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 184
- 230000007246 mechanism Effects 0.000 claims abstract description 128
- 238000010438 heat treatment Methods 0.000 claims abstract description 17
- 238000007599 discharging Methods 0.000 claims abstract description 16
- 238000003756 stirring Methods 0.000 claims description 59
- 229910000831 Steel Inorganic materials 0.000 claims description 43
- 239000010959 steel Substances 0.000 claims description 43
- 230000000149 penetrating effect Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 238000007711 solidification Methods 0.000 description 8
- 230000008023 solidification Effects 0.000 description 8
- 238000012546 transfer Methods 0.000 description 6
- 238000013459 approach Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005538 encapsulation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000013404 process transfer Methods 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention provides an integrated curing oven suitable for a thin small-volume semiconductor frame, which comprises a feeding mechanism, a curing mechanism, a discharging mechanism and a receiving mechanism, wherein the feeding mechanism, the curing mechanism, the discharging mechanism and the receiving mechanism are arranged behind the discharging mechanism in sequence along the transverse direction; the curing mechanism comprises a curing table and a furnace cover capable of being covered on the curing table, a plurality of heating areas with different temperatures are arranged on the curing table, a plurality of grooves are transversely formed in the heating areas, and a stepping mechanism capable of moving a tablet from a loading table to a discharging mechanism through the curing mechanism is arranged below the curing table; the blanking mechanism shifts and centers the solidified material sheets and longitudinally shifts the solidified material sheets to the receiving mechanism; the receiving mechanism is provided with a material box for receiving the material sheets transferred by the discharging mechanism.
Description
Technical Field
The invention relates to the technical field of semiconductor packaging, in particular to an integrated curing oven suitable for a thin type small-volume semiconductor frame.
Background
In the packaging manufacturing process of the semiconductor, the curing is a process of combining the assembled chip and the assembled sheet frame (for short, the sheet or the frame) together at the temperature of 200-400 ℃ to form metal connection, and the subsequent links such as plastic packaging, testing and the like can be performed after the curing is completed. The curing is to put the semi-finished product after the chip die bonding into a curing furnace for sintering and curing, so that the body to be packaged is changed into a compact and hard sintered body, the existing curing furnace is generally of a split type structure, mainly aims at packaging frame tablets with large volume and high thickness, the curing furnace is also generally of a main structure with a curing furnace body, a larger-diameter carrying rod is generally adopted for carrying in the curing furnace, and the curing furnace is generally heated by adopting a large-spacing heating block to meet the volume requirement of the carrying rod, so that the structural characteristics are not suitable for the curing environment of a thin small-volume frame.
In the existing solidification mode, operations such as blanking, material receiving or stacking and the like in the solidification later are usually performed manually or performed by cooling the material sheet at the rear end of the solidification process by using a cooling device and then assisting an external mechanical arm, a rubber suction nozzle and the like.
Because the takt time of encapsulation solidification is shorter when encapsulating to thinner and small-size tablet frame, be in the state of quick process transfer when encapsulating, consequently, can't set up wait that the material district waits until tablet frame cooling down transfer, must accomplish the operation of online unloading and receipts material, the mode of current manipulator rubber suction nozzle transport can't satisfy the requirement of carrying out the operation to the tablet that shifts out in the curing oven in time, and traditional tablet transfer space is big, the structure is complicated, can cause current solidification furnace volume too big, can't satisfy the demand to small space compact structure in the encapsulation production line, consequently traditional curing equipment can't satisfy the solidification operating mode of current slim, little tablet yet.
Disclosure of Invention
The invention aims to solve the technical problems that an integral curing furnace suitable for a thin type small-volume semiconductor frame is provided, the furnace body structure of the existing curing furnace is not suitable for the thin type small frame, the front and rear processes in the furnace mostly adopt a split type large-space occupation mode, and the problems of discharging and receiving the packaged tablet frame in a real-time manner cannot be solved.
The technical scheme adopted for solving the technical problems is as follows: the integrated curing oven suitable for the thin type small-volume semiconductor frame comprises a feeding mechanism, a curing mechanism, a discharging mechanism and a receiving mechanism which are sequentially arranged along the transverse direction, wherein the receiving mechanism is longitudinally arranged behind the discharging mechanism, and the feeding mechanism comprises a longitudinally arranged sliding table, a material taking suction nozzle arranged on the sliding table and a loading table arranged on the left side of the curing mechanism; the curing mechanism comprises a curing table and a furnace cover capable of being covered on the curing table, a plurality of heating areas with different temperatures are arranged on the curing table, a plurality of grooves are transversely formed in the heating areas, and a stepping mechanism capable of moving a tablet from a loading table to a discharging mechanism through the curing mechanism is arranged below the curing table; the blanking mechanism shifts and centers the solidified material sheets and longitudinally shifts the solidified material sheets to the receiving mechanism; the receiving mechanism is provided with a material box for receiving the material sheets transferred by the discharging mechanism.
Further: the blanking mechanism comprises a conveying roller for transferring the material sheet to the receiving mechanism and a centering mechanism for clamping and centering the material sheet; the centering mechanism comprises a main centering plate and a secondary centering plate which are arranged in parallel along the transverse interval, and a plurality of centering rods which can extend upwards out of the conveying roller are arranged at the upper ends of the main centering plate and the secondary centering plate; a centering guide mechanism is arranged between the main centering plate and the auxiliary centering plate, a centering driving mechanism is arranged on the main centering plate, and the centering driving mechanism drives the main centering plate to move away from or close to the auxiliary centering plate; the device comprises a main centering plate and a secondary centering plate, wherein two stacked push rods are arranged between the main centering plate and the secondary centering plate, a hinge shaft is arranged in the middle of each push rod, each push rod rotates along the corresponding hinge shaft, bearings are arranged at two ends of each push rod, longitudinal rollaway paths are arranged at the bottom ends of the main centering plate and the secondary centering plate, and the bearings can roll along the rollaway paths.
Further: the blanking mechanism further comprises a stirring device, a vertical driving device for driving the stirring device to vertically move and a longitudinal driving device for driving the vertical driving device to longitudinally move; the material stirring device comprises a stirring rod, a stirring block, a reset spring and a limiting block, wherein the stirring rod is rotatably arranged on a stirring plate of the vertical driving device, the stirring block is arranged at the tail end of the stirring rod, the reset spring is connected to the stirring block, the limiting block is arranged at one side opposite to the reset spring, and the reset spring pushes the stirring block to enable the stirring block to be tightly attached to the limiting block.
Further: the material receiving mechanism comprises a material receiving frame, a material receiving screw rod vertically arranged on the material receiving frame, a bottom supporting plate sleeved on the material receiving screw rod and a material box arranged on the bottom supporting plate; the top of receiving the material lead screw is equipped with the receipts material motor, receive the material motor can drive receive the material lead screw and rotate to drive place the magazine on the backing plate reciprocates.
Further: the stepping mechanism comprises a stepping screw rod which is transversely arranged, a stepping motor which is arranged at one end of the stepping screw rod, a stepping nut which is sleeved on the stepping screw rod, and a stepping frame which is fixedly connected with the stepping nut, wherein a left steel cable seat and a right steel cable seat are respectively arranged at two ends of the stepping frame, and a steel cable which penetrates through the groove is fixedly arranged between the left steel cable seat and the right steel cable seat; the stepping motor can drive the stepping screw rod to rotate, so that the stepping nut is driven to move left and right along the stepping screw rod, and further, steel ropes arranged on the left steel rope seat and the right steel rope seat are driven to move left and right; the lower part of the stepping frame is also provided with an eccentric motor, an output shaft of the eccentric motor is sleeved with an eccentric wheel, and the eccentric motor can drive the eccentric wheel to rotate, so that the stepping frame is lifted or fallen, and the steel cable is lifted or fallen back into the groove.
Further: the material receiving mechanism further comprises a full material box carrying platform positioned at the rear of the curing platform, an empty material box carrying platform positioned below the full material box carrying platform and a connecting plate for connecting the full material box carrying platform and the empty material box carrying platform; the empty material box carrier comprises a carrier motor positioned below the material receiving frame, a carrier screw rod connected with an output shaft of the carrier motor, a carrier sliding block sleeved on the carrier screw rod, and an empty material box carrier fixedly arranged on the carrier sliding block, wherein the carrier motor can drive the carrier screw rod to rotate so as to drive the empty material box carrier to be close to or far away from the bottom supporting plate; bayonets capable of clamping the bottom supporting plates are formed in the full material box carrying platform and the empty material box carrying frame; the two ends of the empty material box carrier are respectively provided with a driving roller and a driven roller, and a belt for placing the material box is sleeved between the driving roller and the driven roller.
Further: the centering driving mechanism comprises a centering screw rod penetrating through the main centering plate and a centering motor arranged at one end of the centering screw rod; the centering guide mechanism comprises a guide post transversely fixed on the master centering plate and a guide sleeve arranged on the slave centering plate and sleeved on the guide post.
Further: the longitudinal driving device is a linear cylinder, and the sliding block of the linear cylinder is provided with the vertical driving device; the vertical driving device comprises a vertical plate fixedly arranged on a sliding block of the linear air cylinder, a stirring air cylinder fixedly arranged on the vertical plate, a vertical sliding block arranged on the vertical plate in a sliding manner, and a stirring plate fixedly connected with the vertical sliding block and a piston rod of the stirring air cylinder.
Further: the clamping cylinder is fixed on the bottom supporting plate, and an upper clamping plate penetrating through the material receiving screw rod is fixed on a piston rod of the clamping cylinder.
The invention has the beneficial effects that the invention adopts a plurality of steel ropes which are arranged in parallel to be arranged below the curing mechanism, the steel ropes are driven by the stepping motor to move left and right, the steel ropes are driven by the eccentric motor to move up and down so as to realize the transfer of the material sheets among the loading table, the curing table and the blanking mechanism, and the centering mechanism can lead the material sheets to run on the conveying roller in the direction aligned with the material box; the material shifting device can shift the material sheets into the material boxes to be loaded; the receiving mechanism can automatically discharge and load the empty material box with the material box filled with the material sheets, and the bottom supporting plate for placing the material box can automatically adjust the height under the drive of the receiving motor so that the material sheets can smoothly enter the material box; the whole process completely realizes automatic line production, has compact structure, can realize rapid transfer operation of the material sheets among all stations, and greatly improves the curing efficiency; and the diameter of the steel cable is smaller, so that the width of the needed groove is also smaller, the heating area of each heating area on the curing table is increased, and the curing effect is effectively improved.
Drawings
The invention will be further described with reference to the drawings and examples.
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is another schematic structural view of the present invention;
FIG. 3 is a schematic structural view of a blanking mechanism;
FIG. 4 is a schematic structural view of a centering mechanism;
FIG. 5 is another schematic structural view of the centering mechanism;
FIG. 6 is a front view of a kick-out device;
FIG. 7 is a side view of a kick-out device;
FIG. 8 is a schematic structural view of a receiving mechanism;
FIG. 9 is another schematic structural view of the receiving mechanism;
fig. 10 is a schematic view of the structure of the stepping mechanism.
1, a sliding table, 2, a material taking suction nozzle, 3, a loading table, 4, a curing table, 5, a furnace cover, 6, a groove, 7, a material sheet, 8, a material box, 9, a roller, 10, a main centering plate, 11, a secondary centering plate, 12, a centering rod, 13, a push rod, 14, a hinge shaft, 15, a bearing, 16, a rollaway nest, 17, a material stirring plate, 18, a material stirring rod, 19, a shifting block, 20, a reset spring, 21, a limiting block, 22, a material collecting frame, 23, a material collecting screw rod, 24, a bottom supporting plate, 25, a material collecting motor, 26, a step screw rod, 27, a step motor, 28 and a step nut, 29, step frame, 30, left cable seat, 31, right cable seat, 32, cable, 33, eccentric motor, 34, eccentric wheel, 35, full cartridge carrier, 36, connecting plate, 37, carrier motor, 38, carrier screw, 39, carrier slider, 40, empty cartridge carrier, 41, bayonet, 42, driving roller, 43, driven roller, 44, belt, 46, centering screw, 47, centering motor, 48, guide post, 49, guide sleeve, 50, straight cylinder, 51, vertical plate, 52, kick-out cylinder, 53, clamping cylinder, 54, upper clamping plate.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the invention. On the contrary, the embodiments of the invention include all alternatives, modifications and equivalents as may be included within the spirit and scope of the appended claims.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "connected," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art. Furthermore, in the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and further implementations are included within the scope of the preferred embodiment of the present invention in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present invention.
As shown in fig. 1 and 2, the invention provides an integrated curing oven suitable for a thin small-volume semiconductor frame, which comprises a feeding mechanism, a curing mechanism, a discharging mechanism and a receiving mechanism which are sequentially arranged along the transverse direction, wherein the receiving mechanism is longitudinally arranged behind the discharging mechanism, and the feeding mechanism comprises a sliding table 1 which is longitudinally arranged, a material taking suction nozzle 2 which is arranged on the sliding table 1, and a loading table 3 which is arranged on the left side of the curing mechanism; the curing mechanism comprises a curing table 4 and a furnace cover 5 which can be covered on the curing table 4, the curing table 4 is provided with a plurality of heating areas with different temperatures, the heating areas are transversely provided with a plurality of grooves 6, and a stepping mechanism which can move a tablet 7 from a loading table 3 to a discharging mechanism through the curing mechanism is arranged below the curing table 4; the blanking mechanism shifts and centers the solidified material sheet 7 and longitudinally shifts to the receiving mechanism; the receiving mechanism is provided with a magazine 8 for receiving the material sheets 7 transferred by the discharging mechanism.
During operation, get material suction nozzle 2 and inhale material piece 7, transfer to loading table 3 through the effect of slip table 1, through the effect of step mechanism, with the material piece 7 on the loading table 3 through the different temperature's on the curing table 4 zone of heating in proper order, make material piece 7 heating solidification, after the solidification, step mechanism continues to drive cured material piece 7 and shifts to unloading mechanism, unloading mechanism carries material piece 7 to receiving mechanism, and neatly collect material box 8 with cured material piece 7, be equipped with air inlet and gas vent etc. and be used for filling nitrogen gas or evacuation operation in curing mechanism on the bell 5, this small-size integral type curing oven can shift material piece 7 between feeding mechanism, curing mechanism, unloading mechanism, receiving mechanism, realize the circulation operation fast, and compact structure.
The blanking mechanism as described in fig. 3 to 5 includes a conveying roller 9 that transfers the web 7 to the collecting mechanism and a centering mechanism for pinching centering the web 7; the centering mechanism comprises a main centering plate 10 and a secondary centering plate 11 which are arranged in parallel at intervals along the transverse direction, and a plurality of centering rods 12 which can extend upwards from the conveying roller 9 are arranged at the upper ends of the main centering plate 10 and the secondary centering plate 11; a centering guide mechanism is arranged between the main centering plate 10 and the auxiliary centering plate 11, and a centering driving mechanism is arranged on the main centering plate 10 and drives the main centering plate 10 to move away from or close to the auxiliary centering plate 11; two stacked push rods 13 are arranged between the master centering plate 10 and the slave centering plate 11, a hinge shaft 14 is arranged in the middle of each push rod 13, each push rod 13 rotates along each hinge shaft 14, bearings 15 are arranged at two ends of each push rod 13, longitudinal rollaway paths 16 are arranged at the bottom ends of the master centering plate 10 and the slave centering plate 11, and the bearings 15 can roll along the rollaway paths 16.
When the material sheet 7 is conveyed onto the conveying roller 9, the main centering plate 10 approaches the auxiliary centering plate 11 under the drive of the centering driving mechanism, as two stacked push rods 13 are arranged between the main centering plate 10 and the auxiliary centering plate 11, the auxiliary centering plate 11 simultaneously approaches the main centering plate 10 under the action of the two push rods 13, the centering rods 12 positioned at two sides of the material sheet 7 clamp the material sheet 7 until the conveying roller 9 conveys the material sheet 7 to the material receiving mechanism, after conveying is completed, the centering driving mechanism drives the main centering plate 10 to be far away from the auxiliary centering plate 11, the auxiliary centering plate 11 simultaneously moves away from the main centering plate 10 under the action of the two push rods 13, and the next material sheet 7 is moved to the conveying roller 9, and the centering driving mechanism continues to drive the centering rods 12 to clamp centering.
The blanking mechanism as shown in fig. 6 and 7 further comprises a material stirring device, a vertical driving device for driving the material stirring device to vertically move and a longitudinal driving device for driving the vertical driving device to longitudinally move; the material stirring device comprises a stirring rod 18 which is rotatably arranged on a stirring plate 17 of the vertical driving device, a stirring block 19 which is arranged at the tail end of the stirring rod 18, a reset spring 20 which is connected to the stirring block 19, and a limiting block 21 which is arranged at one side opposite to the reset spring 20, wherein the reset spring 20 pushes the stirring block 19 to enable the stirring block 19 to be tightly attached to the limiting block 21.
In operation, as the tablet 7 is very thin, the lower limit height of the stirring rod 18 is lower than that of the tablet 7 and is in contact with the conveying roller 9, when the stirring rod 18 is in contact with the conveying roller 9, the stirring rod 18 rotates, in order to enable the stirring rod 18 to quickly reset and play a role in stirring, the reset spring 20 pushes the stirring block 19 to enable the stirring block 19 to be tightly attached to the limiting block 21, and therefore the stirring rod 18 can continuously push the tablet 7 to the direction of the material box 8 after avoiding the conveying roller 9.
As shown in fig. 8 and 9, the material receiving mechanism comprises a material receiving frame 22, a material receiving screw rod 23 vertically installed on the material receiving frame 22, a bottom supporting plate 24 sleeved on the material receiving screw rod 23, and a material box 8 placed on the bottom supporting plate 24; the top of the material receiving screw rod 23 is provided with a material receiving motor 25, and the material receiving motor 25 can drive the material receiving screw rod 23 to rotate, so as to drive the material box 8 placed on the bottom supporting plate 24 to move up and down.
In the process of collecting the material sheets 7, the material sheets 7 are stacked in the material boxes 8, so that the height of the material boxes 8 is flexibly adjusted, the material sheets 7 transmitted on the conveying rollers 9 can be automatically and neatly stacked, the material collecting motor 25 drives the material collecting screw 23 to rotate in operation, the bottom supporting plate 24 sleeved on the material collecting screw 23 is enabled to be at a proper height, and the material boxes 8 are enabled to be at a proper height, so that the material sheets 7 can be collected.
The stepping mechanism shown in fig. 10 comprises a stepping screw rod 26 transversely arranged, a stepping motor 27 arranged at one end of the stepping screw rod 26, a stepping nut 28 sleeved on the stepping screw rod 26, and a stepping frame 29 fixedly connected with the stepping nut 28, wherein a left steel cable seat 30 and a right steel cable seat 31 are respectively arranged at two ends of the stepping frame 29, and a steel cable 32 penetrating through the groove 6 is fixedly arranged between the left steel cable seat 30 and the right steel cable seat 31; the stepper motor 27 can drive the stepper screw 26 to rotate, so as to drive the stepper nut 28 to move left and right along the stepper screw 26, and further drive the steel cables 32 arranged on the left steel cable seat 30 and the right steel cable seat 31 to move left and right; an eccentric motor 33 is further arranged below the stepping frame 29, an output shaft of the eccentric motor 33 is sleeved with an eccentric wheel 34, and the eccentric motor 33 can drive the eccentric wheel 34 to rotate, so that the stepping frame 29 is lifted or lowered, and the steel cable 32 is lifted or fallen back into the groove 6.
The stepping motor 27 drives the stepping screw rod 26 to rotate, so that the stepping nut 28 sleeved on the stepping screw rod 26 is driven to move along the stepping screw rod 26, and the steel cable 32 on the stepping frame 29 is driven to move left and right along the transverse direction; the eccentric motor 33 can lift the stepping frame 29 upwards through the eccentric wheel 34 so that the steel cable 32 is lifted out of the groove 6; when the device works, the steel cable 32 is firstly positioned below the loading table 3, a plurality of groups of U-shaped through holes are formed in the loading table 3 and used for lifting the steel cable 32 out of the loading table 3 and lifting the material sheet 7, the eccentric motor 33 drives the eccentric wheel 34 to lift the stepping frame 29 so as to lift the steel cable 32 out of the groove 6, then the stepping motor 27 drives the screw rod to rotate so as to enable the stepping nut 28 to move rightwards, the steel cable 32 arranged on the stepping frame 29 moves the material sheet 7 from the loading table 3 to the curing table 4, then the eccentric motor 33 continues to drive the eccentric wheel 34 to rotate so as to enable the steel cable 32 to fall back into the groove 6, the stepping motor 27 drives the stepping screw rod 26 to reversely rotate so as to enable the steel cable 32 on the stepping frame 29 to return to the initial position, and the upper limit height of lifting of the steel cable 32 in the whole process is always lower than that of the furnace cover 5, so that the steel cable 32 can move the material sheet 7 between heating areas with different temperatures and cannot be in friction contact with the furnace cover 5; the stepping motor 27 and the eccentric motor 33 work in a circulating and reciprocating mode, so that the material sheets 7 sequentially pass through heating areas with different temperatures until the material sheets 7 are transferred onto the conveying roller 9 of the blanking mechanism, and a plurality of material sheets 7 can be transferred simultaneously in the whole process, and the working efficiency is improved in a running water type operation mode; and the diameter of the steel cable 32 is smaller, so that the width of the needed groove 6 is also smaller, thereby improving the heating area of each heating area on the curing table 4 and effectively improving the curing effect.
The material receiving mechanism further comprises a full material box carrying platform 35 positioned behind the curing platform 4, an empty material box carrying platform positioned below the full material box carrying platform 35, and a connecting plate 36 for connecting the full material box carrying platform 35 and the empty material box carrying platform; the empty material box carrier comprises a carrier motor 37 positioned below the material receiving frame 22, a carrier screw rod 38 connected with an output shaft of the carrier motor 37, a carrier sliding block 39 sleeved on the carrier screw rod 38, and an empty material box carrier 40 fixedly arranged on the carrier sliding block 39, wherein the carrier motor 37 can drive the carrier screw rod 38 to rotate so as to drive the empty material box carrier 40 to be close to or far away from the bottom supporting plate 24; the full cartridge carrier 35 and the empty cartridge carrier 40 are provided with bayonets 41 for clamping the bottom plate 24; the two ends of the empty material box carrier 40 are respectively provided with a driving roller 42 and a driven roller 43, and a belt 44 for placing the material box 8 is sleeved between the driving roller 42 and the driven roller 43.
When the empty box carrier 40 is in a flush position, the carrier motor 37 drives the carrier screw 38 to rotate, so that the carrier slider 39 sleeved on the carrier screw 38 drives the empty box carrier 40 to move towards the bottom carrier 24, meanwhile, the driving roller 42 drives the empty box 8 placed on the belt 44 to move towards the bottom carrier 24 until the bottom carrier 24 can finish receiving the box 8 from which the empty box carrier is moved, then the carrier screw 38 reversely rotates under the action of the motor to enable the empty box carrier to be far away from the bottom carrier 24, after the box 8 is filled with the material piece 7, the material receiving motor 25 drives the bottom carrier 24 to move to a flush position with the full box carrier 35, the carrier screw 38 drives the empty box carrier and the full box carrier 35 to move towards the material receiving frame 22 simultaneously until the full box carrier 35 can receive the box 8 of the material piece 7 on the bottom carrier 24, then the motor 37 drives the box carrier 40 and the full box carrier 40 to move away from the bottom carrier 24 until the empty box carrier 24 is continuously moved away from the empty carrier 24, and the empty box carrier 25 is continuously moved to the flush position until the empty box carrier 22 is kept away from the empty carrier 24.
The centering driving mechanism comprises a centering screw rod 46 penetrating through the main centering plate 10 and a centering motor 47 arranged at one end of the centering screw rod 46; the centering guide mechanism comprises a guide post 48 transversely fixed on the master centering plate 10, and a guide sleeve 49 arranged on the slave centering plate 11 and sleeved on the guide post 48.
When the centering motor 47 works, the centering screw rod 46 is driven to rotate, so that the main centering plate 10 is far away from the centering motor 47 and gradually approaches the auxiliary centering plate 11, the auxiliary centering plate 11 is simultaneously driven by the two push rods 13 to approach the main centering plate 10, the centering rods 12 positioned on two sides of the material sheet 7 clamp the material sheet 7, after centering is finished, the centering motor 47 drives the centering screw rod 46 to rotate, so that the right centering plate is gradually approaches the centering motor 47, the main centering plate 10 is far away from the auxiliary centering plate 11, and the auxiliary centering plate 11 is simultaneously far away from the main centering plate 10 under the driving of the two push rods 13; the guide posts 48, 49 guide the main centering plate 10 and the auxiliary centering plate 11 toward and away from each other.
The longitudinal driving device is a linear air cylinder 50, and the vertical driving device is arranged on a sliding block of the linear air cylinder 50; the vertical driving device comprises a vertical plate 51 fixedly arranged on a sliding block of the linear air cylinder 50, a stirring air cylinder 52 fixedly arranged on the vertical plate 51, a vertical sliding block arranged on the vertical plate 51 in a sliding manner, and a stirring plate 17 fixedly connected with the vertical sliding block and a piston rod of the stirring air cylinder 52.
During operation, the material stirring rod 18 is positioned at the rear of the running track of the material sheet 7, the vertical cylinder is retracted to enable the height of the material stirring rod 18 to push the material sheet 7, then the linear cylinder 50 drives the vertical driving device to enable the material stirring rod 18 to push the material sheet 7 towards the material box 8 until the material sheet 7 completely falls into the material box 8, the rear material stirring cylinder 52 pushes the material stirring plate 17 to enable the material stirring rod 18 to be lifted to avoid friction contact with the conveying roller 9 and the material sheet 7, and after the linear cylinder 50 drives the vertical driving device to reversely move to enable the material stirring rod 18 to return to the initial position, the material stirring work of the next material sheet 7 is continuously completed.
The bottom support plate 24 is fixedly provided with a clamping air cylinder 53, and a piston rod of the clamping air cylinder 53 is fixedly provided with an upper clamping plate 54 penetrating through the material receiving screw rod 23.
In order to prevent the displacement of the material box 8 during the process of collecting the material sheets 7, a clamping cylinder 53 is fixed on the bottom supporting plate 24, an upper clamping plate 54 for clamping the upper end of the material box 8 is fixed on a piston rod of the clamping cylinder 53, and the material box 8 is prevented from being displaced by the action of the bottom supporting plate 24 and the upper clamping plate 54, so that the material collecting work is influenced.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
With the above-described preferred embodiments according to the present invention as an illustration, the above-described descriptions can be used by persons skilled in the relevant art to make various changes and modifications without departing from the scope of the technical idea of the present invention. The technical scope of the present invention is not limited to the description, but must be determined according to the scope of claims.
Claims (7)
1. The utility model provides an be suitable for slim small-size semiconductor frame's integral type curing oven, includes feeding mechanism, curing mechanism, unloading mechanism and the vertical receipts material mechanism that sets gradually in the unloading mechanism rear, its characterized in that: the feeding mechanism comprises a sliding table (1) which is longitudinally arranged, a material taking suction nozzle (2) which is arranged on the sliding table (1), and a loading table (3) which is arranged on the left side of the curing mechanism;
the curing mechanism comprises a curing table (4) and a furnace cover (5) which can be covered on the curing table (4), a plurality of heating areas with different temperatures are arranged on the curing table (4), a plurality of grooves (6) are transversely formed in the heating areas, a stepping mechanism which can move a tablet (7) from a loading table (3) to a discharging mechanism through the curing mechanism is arranged below the curing table (4), and the stepping mechanism comprises a stepping frame (29), a steel cable (32) which is arranged on the stepping frame (29) and penetrates through the grooves (6), a stepping motor (27) which drives the stepping frame (29) to move left and right, and an eccentric motor (33) which drives the stepping frame (29) to move up and down;
the blanking mechanism shifts and centers the solidified material sheet (7) and longitudinally shifts to the receiving mechanism;
the receiving mechanism is provided with a material box (8) for receiving the material sheets (7) transferred by the discharging mechanism;
the blanking mechanism comprises a conveying roller (9) for transferring the material sheet (7) to the receiving mechanism and a centering mechanism for clamping and centering the material sheet (7);
the centering mechanism comprises a main centering plate (10) and a secondary centering plate (11) which are arranged in parallel at intervals along the transverse direction, and a plurality of centering rods (12) which can extend upwards out of the conveying roller (9) are arranged at the upper ends of the main centering plate (10) and the secondary centering plate (11);
a centering guide mechanism is arranged between the main centering plate (10) and the auxiliary centering plate (11), a centering driving mechanism is arranged on the main centering plate (10), and the centering driving mechanism drives the main centering plate (10) to move away from or close to the auxiliary centering plate (11);
two stacked push rods (13) are arranged between the main centering plate (10) and the auxiliary centering plate (11), a hinge shaft (14) is arranged in the middle of each push rod (13), each push rod (13) rotates along each hinge shaft (14), bearings (15) are arranged at two ends of each push rod (13), longitudinal rollaway paths (16) are arranged at the bottom ends of the main centering plate (10) and the auxiliary centering plate (11), and the bearings (15) can roll along the rollaway paths (16);
the blanking mechanism further comprises a stirring device, a vertical driving device for driving the stirring device to vertically move and a longitudinal driving device for driving the vertical driving device to longitudinally move;
the material stirring device comprises a stirring rod (18) which is rotatably arranged on a stirring plate (17) of the vertical driving device, a stirring block (19) which is arranged at the tail end of the stirring rod (18), a reset spring (20) which is connected to the stirring block (19), and a limiting block (21) which is arranged at one side opposite to the reset spring (20), wherein the reset spring (20) pushes the stirring block (19) to enable the stirring block (19) to be tightly attached to the limiting block (21).
2. The integrated curing oven for a thin, low-volume semiconductor frame as claimed in claim 1, wherein: the material receiving mechanism comprises a material receiving frame (22), a material receiving screw rod (23) vertically arranged on the material receiving frame (22), a bottom supporting plate (24) sleeved on the material receiving screw rod (23) and a material box (8) placed on the bottom supporting plate (24);
the top of receiving feed screw (23) is equipped with receipts material motor (25), receive material motor (25) can drive receive feed screw (23) rotation to drive place magazine (8) on backing plate (24) reciprocates.
3. The integrated curing oven for a thin, low-volume semiconductor frame as claimed in claim 1, wherein: the stepping mechanism further comprises a stepping screw rod (26) and a stepping nut (28), wherein the stepping screw rod (26) is transversely arranged, the stepping nut (28) is sleeved on the stepping screw rod (26), one end of the stepping screw rod (26) is provided with the stepping motor (27), the stepping nut (28) is fixedly connected with the stepping frame (29), two ends of the stepping frame (29) are respectively provided with a left steel cable seat (30) and a right steel cable seat (31), and a steel cable (32) is fixed between the left steel cable seat (30) and the right steel cable seat (31);
the stepping motor (27) can drive the stepping screw rod (26) to rotate, so that the stepping nut (28) is driven to move left and right along the stepping screw rod (26), and further the steel ropes (32) arranged on the left steel rope seat (30) and the right steel rope seat (31) are driven to move left and right;
the lower part of the stepping frame (29) is provided with an eccentric motor (33), an output shaft of the eccentric motor (33) is sleeved with an eccentric wheel (34), and the eccentric motor (33) can drive the eccentric wheel (34) to rotate, so that the stepping frame (29) is lifted or fallen, and the steel cable (32) is lifted or fallen back into the groove (6).
4. The integrated curing oven for a thin, low-volume semiconductor frame as claimed in claim 2, wherein: the material receiving mechanism further comprises a full material box carrying platform (35) positioned behind the curing platform (4), an empty material box carrying platform positioned below the full material box carrying platform (35) and a connecting plate (36) for connecting the full material box carrying platform (35) and the empty material box carrying platform;
the empty material box carrier comprises a carrier motor (37) positioned below the material receiving frame (22), a carrier screw rod (38) connected with an output shaft of the carrier motor (37), a carrier sliding block (39) sleeved on the carrier screw rod (38) and an empty material box carrier (40) fixedly installed on the carrier sliding block (39), wherein the carrier motor (37) can drive the carrier screw rod (38) to rotate so as to drive the empty material box carrier (40) to be close to or far away from the bottom supporting plate (24);
bayonets (41) capable of clamping the bottom supporting plate (24) are formed in the full material box carrying table (35) and the empty material box carrying table (40);
the two ends of the empty material box carrier (40) are respectively provided with a driving roller (42) and a driven roller (43), and a belt (44) for placing the material box (8) is sleeved between the driving roller (42) and the driven roller (43).
5. The integrated curing oven for a thin, low-volume semiconductor frame as claimed in claim 1, wherein: the centering driving mechanism comprises a centering screw rod (46) penetrating through the main centering plate (10) and a centering motor (47) arranged at one end of the centering screw rod (46);
the centering and guiding mechanism comprises a guide post (48) transversely fixed on the main centering plate (10), and a guide sleeve (49) which is arranged on the auxiliary centering plate (11) and can be sleeved on the guide post (48).
6. The integrated curing oven for a thin, low-volume semiconductor frame as claimed in claim 1, wherein: the longitudinal driving device is a linear air cylinder (50), and the vertical driving device is arranged on a sliding block of the linear air cylinder (50);
the vertical driving device comprises a vertical plate (51) fixedly arranged on a sliding block of the linear air cylinder (50), a stirring air cylinder (52) fixedly arranged on the vertical plate (51), a vertical sliding block arranged on the vertical plate (51) in a sliding manner, and a stirring plate (17) fixedly connected with the vertical sliding block and a piston rod of the stirring air cylinder (52).
7. The integrated curing oven for a thin, low-volume semiconductor frame as claimed in claim 2, wherein: the bottom support plate (24) is fixedly provided with a clamping air cylinder (53), and a piston rod of the clamping air cylinder (53) is fixedly provided with an upper clamping plate (54) penetrating through the material receiving screw rod (23).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211380521.5A CN115642117B (en) | 2022-11-04 | 2022-11-04 | Integrated curing oven suitable for thin small-volume semiconductor frame |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211380521.5A CN115642117B (en) | 2022-11-04 | 2022-11-04 | Integrated curing oven suitable for thin small-volume semiconductor frame |
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| CN115642117B true CN115642117B (en) | 2024-01-23 |
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|---|---|
| CN115642117A (en) | 2023-01-24 |
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