CN1156006C - 具有至少一只纳米电子元件的电路装置及其制法 - Google Patents
具有至少一只纳米电子元件的电路装置及其制法 Download PDFInfo
- Publication number
- CN1156006C CN1156006C CNB998162507A CN99816250A CN1156006C CN 1156006 C CN1156006 C CN 1156006C CN B998162507 A CNB998162507 A CN B998162507A CN 99816250 A CN99816250 A CN 99816250A CN 1156006 C CN1156006 C CN 1156006C
- Authority
- CN
- China
- Prior art keywords
- circuit
- cmos
- nanometer
- conductive structure
- nanoelectronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000004065 semiconductor Substances 0.000 claims abstract description 15
- 230000004888 barrier function Effects 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 17
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 10
- 239000010936 titanium Substances 0.000 claims description 10
- 229910052719 titanium Inorganic materials 0.000 claims description 10
- 239000004411 aluminium Substances 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000010955 niobium Substances 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 3
- 230000000295 complement effect Effects 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 210000004027 cell Anatomy 0.000 description 9
- 239000002245 particle Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 108010076504 Protein Sorting Signals Proteins 0.000 description 2
- 238000004630 atomic force microscopy Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 238000005442 molecular electronic Methods 0.000 description 2
- 210000002569 neuron Anatomy 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Geometry (AREA)
- Semiconductor Memories (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19858759A DE19858759C1 (de) | 1998-12-18 | 1998-12-18 | Schaltungsanordnung mit mindestens einem nanoelektronischen Bauelement und Verfahren zu deren Herstellung |
DE19858759.7 | 1998-12-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1334964A CN1334964A (zh) | 2002-02-06 |
CN1156006C true CN1156006C (zh) | 2004-06-30 |
Family
ID=7891764
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB998162507A Expired - Fee Related CN1156006C (zh) | 1998-12-18 | 1999-12-01 | 具有至少一只纳米电子元件的电路装置及其制法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US6442042B2 (zh) |
EP (1) | EP1142019B1 (zh) |
JP (1) | JP3802760B2 (zh) |
KR (1) | KR100419541B1 (zh) |
CN (1) | CN1156006C (zh) |
DE (2) | DE19858759C1 (zh) |
TW (1) | TW459372B (zh) |
WO (1) | WO2000038235A1 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW442837B (en) | 1998-12-03 | 2001-06-23 | Infineon Technologies Ag | Integrated circuit-arrangement and its production method |
US6517995B1 (en) * | 1999-09-14 | 2003-02-11 | Massachusetts Institute Of Technology | Fabrication of finely featured devices by liquid embossing |
US7271489B2 (en) * | 2003-10-15 | 2007-09-18 | Megica Corporation | Post passivation interconnection schemes on top of the IC chips |
KR100427640B1 (ko) * | 2001-03-15 | 2004-04-27 | 한국과학기술연구원 | 탄소미세구조를 이용한 rlc 회로 |
US6936181B2 (en) | 2001-10-11 | 2005-08-30 | Kovio, Inc. | Methods for patterning using liquid embossing |
DE20121631U1 (de) * | 2001-11-09 | 2003-06-18 | Friz Biochem Gmbh | Molekulares elektronisches Bauelement zum Aufbau nanoelektronischer Schaltungen, molekulare elektronische Baugruppe und elektronische Schaltung |
US6957608B1 (en) | 2002-08-02 | 2005-10-25 | Kovio, Inc. | Contact print methods |
FR2969592B1 (fr) * | 2010-12-23 | 2013-02-08 | Commissariat Energie Atomique | Dispositif pour connecter des nano-objets a des systèmes électriques externes, et procédé de fabrication du dispositif |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0612799B2 (ja) * | 1986-03-03 | 1994-02-16 | 三菱電機株式会社 | 積層型半導体装置およびその製造方法 |
US5049978A (en) * | 1990-09-10 | 1991-09-17 | General Electric Company | Conductively enclosed hybrid integrated circuit assembly using a silicon substrate |
US5208719A (en) * | 1991-08-20 | 1993-05-04 | Vlsi Technology, Inc. | Output pad electrostatic discharge protection circuit for mos devices |
JPH06125208A (ja) * | 1992-10-09 | 1994-05-06 | Mitsubishi Electric Corp | マイクロ波集積回路およびその製造方法 |
JP3613594B2 (ja) * | 1993-08-19 | 2005-01-26 | 株式会社ルネサステクノロジ | 半導体素子およびこれを用いた半導体記憶装置 |
DE4427516A1 (de) * | 1994-08-03 | 1996-02-15 | Siemens Ag | Verfahren zur Herstellung einer dreidimensionalen Schaltungsanordnung |
US5561085A (en) * | 1994-12-19 | 1996-10-01 | Martin Marietta Corporation | Structure for protecting air bridges on semiconductor chips from damage |
JP3393949B2 (ja) * | 1995-03-16 | 2003-04-07 | 株式会社東芝 | 半導体集積回路 |
US5754077A (en) * | 1995-03-16 | 1998-05-19 | Kabushiki Kaisha Toshiba | Semiconductor integrated circuit having plural functional blocks, wherein one of the blocks comprises a small tunnel junction device and another block comprises a FET |
JP3369799B2 (ja) * | 1995-07-21 | 2003-01-20 | 株式会社東芝 | 半導体装置 |
-
1998
- 1998-12-18 DE DE19858759A patent/DE19858759C1/de not_active Expired - Fee Related
-
1999
- 1999-12-01 DE DE59914630T patent/DE59914630D1/de not_active Expired - Lifetime
- 1999-12-01 WO PCT/DE1999/003831 patent/WO2000038235A1/de active IP Right Grant
- 1999-12-01 EP EP99966819A patent/EP1142019B1/de not_active Expired - Lifetime
- 1999-12-01 KR KR10-2001-7007669A patent/KR100419541B1/ko not_active IP Right Cessation
- 1999-12-01 JP JP2000590214A patent/JP3802760B2/ja not_active Expired - Fee Related
- 1999-12-01 CN CNB998162507A patent/CN1156006C/zh not_active Expired - Fee Related
- 1999-12-16 TW TW088122155A patent/TW459372B/zh not_active IP Right Cessation
-
2001
- 2001-06-18 US US09/883,901 patent/US6442042B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR100419541B1 (ko) | 2004-02-21 |
KR20010081081A (ko) | 2001-08-25 |
EP1142019B1 (de) | 2008-01-23 |
DE59914630D1 (de) | 2008-03-13 |
US20010055201A1 (en) | 2001-12-27 |
DE19858759C1 (de) | 2000-03-23 |
US6442042B2 (en) | 2002-08-27 |
JP3802760B2 (ja) | 2006-07-26 |
TW459372B (en) | 2001-10-11 |
EP1142019A1 (de) | 2001-10-10 |
CN1334964A (zh) | 2002-02-06 |
WO2000038235A1 (de) | 2000-06-29 |
JP2002533929A (ja) | 2002-10-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6430511B1 (en) | Molecular computer | |
US20050052894A1 (en) | Uses of nanofabric-based electro-mechanical switches | |
CN1761083A (zh) | 相转移元件及其制造方法与相转移记忆胞 | |
CN1819204A (zh) | 使用介孔材料的非易失性纳米沟道存储器件 | |
CN1184643C (zh) | 具有低写入电流的磁性随机存取内存 | |
CN1921169A (zh) | 一种制造使用硫属元素化物存储器的方法 | |
CN101034708A (zh) | 纳米线存储器件及其制造方法 | |
CN1574360A (zh) | 具有纳米晶体层的sonos存储器件 | |
CN1156006C (zh) | 具有至少一只纳米电子元件的电路装置及其制法 | |
CN1607668A (zh) | Sonos存储器及其制造和操作方法 | |
CN1992349A (zh) | 薄膜晶体管及其制造方法 | |
CN1252819C (zh) | 利用碳纳米管制作的随机存储器及制备方法 | |
CN1588613A (zh) | 一种纳米相变存储器器件单元的制备方法 | |
CN1087495C (zh) | 胶带自动粘结式胶带 | |
CN1870314A (zh) | 减小相变存储器加热电极面积的方法 | |
CN1236496C (zh) | 利用碳纳米管制作的逻辑“非”门器件 | |
CN1607606A (zh) | 磁存储器装置 | |
CN1236492C (zh) | 碳纳米管式集成场效应管及其制备工艺 | |
CN1177372C (zh) | 非易失性存储器单元及其制造方法 | |
CN1262008C (zh) | 具有单壁碳纳米管结构的“与”门逻辑器件及其制作方法 | |
CN1248313C (zh) | 碳纳米管逻辑“或”门器件及其制备方法 | |
CN1240134C (zh) | 单电子多值存储器 | |
CN1248311C (zh) | 碳纳米管半加器及其制备工艺 | |
CN2566462Y (zh) | 单壁碳纳米管“与”门逻辑器件 | |
CN2567779Y (zh) | 碳纳米管“或”门逻辑器件 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
C10 | Entry into substantive examination | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: Munich, Germany Patentee after: Infineon Technologies AG Address before: Munich, Germany Patentee before: INFINEON TECHNOLOGIES AG |
|
TR01 | Transfer of patent right |
Effective date of registration: 20120918 Address after: Munich, Germany Patentee after: QIMONDA AG Address before: Munich, Germany Patentee before: Infineon Technologies AG |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160111 Address after: German Berg, Laura Ibiza Patentee after: Infineon Technologies AG Address before: Munich, Germany Patentee before: QIMONDA AG |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20040630 Termination date: 20171201 |
|
CF01 | Termination of patent right due to non-payment of annual fee |