CN115597572A - Quartz tuning fork gyroscope - Google Patents
Quartz tuning fork gyroscope Download PDFInfo
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- CN115597572A CN115597572A CN202211132196.0A CN202211132196A CN115597572A CN 115597572 A CN115597572 A CN 115597572A CN 202211132196 A CN202211132196 A CN 202211132196A CN 115597572 A CN115597572 A CN 115597572A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
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Abstract
The invention provides a quartz tuning fork gyroscope, comprising: a tuning fork structure and a base; the tuning fork structure comprises a coupling beam, a connecting beam, a driving interdigital and a detecting interdigital, wherein the driving interdigital and the detecting interdigital are respectively arranged on two opposite sides of the coupling beam, and the coupling beam is connected with the base through the connecting beam; the driving interdigital is provided with a first opposite surface which is opposite to the first opposite surface, and a first driving electrode is arranged on the first opposite surface; first opposite face includes first surface and second surface, first drive electrode includes first electrode slice and second electrode slice, first surface and second surface are located respectively to first electrode slice and second electrode slice, and the subregion of first electrode slice and the subregion dislocation of second electrode slice are laid, in order to form the correction district, wash the correction district through laser beam, in order to offset the drive power coupling error that first electrode slice and second electrode slice position asymmetry caused that the processing technology error caused, thereby reach and reduce or even eliminate the purpose of drive power coupling error, and then promote the detection precision of quartz tuning fork top.
Description
Technical Field
The invention relates to the technical field of micromechanical gyroscopes, in particular to a quartz tuning fork gyroscope.
Background
The micromechanical gyroscope has the advantages of small volume, light weight, low power consumption, mass production, low cost and the like, and is widely applied to the technical fields of consumer electronics, aerospace and the like. With the continuous improvement of performance, the micro-mechanical gyroscope becomes the core of a micro inertial system and a key device for promoting the microminiaturization development of a navigation system.
The traditional quartz micromechanical gyroscope is manufactured by adopting a wet etching process, the movement track of the mass center cannot be completely overlapped with a driving shaft or a detection shaft due to manufacturing errors and residual stress in the manufacturing process, so that the driving shaft direction and the detection shaft direction are not completely vertical, the driving mode and the detection mode are in cross coupling, in-phase error signals and orthogonal error signals are generated, and the error signals limit the detection precision of the micromechanical gyroscope.
Disclosure of Invention
The invention provides a quartz tuning fork gyroscope, which is used for solving the problem of poor detection precision of the micro-mechanical gyroscope caused by driving force coupling errors asymmetrically introduced by driving electrodes on two opposite surfaces of driving interdigital due to processing process errors of the existing micro-mechanical gyroscope.
The invention provides a quartz tuning fork gyroscope, comprising: a tuning fork structure and a base;
the tuning fork structure comprises a coupling beam, a connecting beam, a driving interdigital and a detecting interdigital, wherein the driving interdigital and the detecting interdigital are respectively arranged on two opposite sides of the coupling beam, and the coupling beam is connected with the base through the connecting beam;
the end part of the driving interdigital is provided with a driving hammer head, the driving interdigital is provided with a first opposite surface, and a first driving electrode is arranged on the first opposite surface; the first opposite surface comprises a first surface and a second surface, the first driving electrode comprises a first electrode sheet and a second electrode sheet, the first electrode sheet and the second electrode sheet are respectively arranged on the first surface and the second surface, and partial areas of the first electrode sheet and partial areas of the second electrode sheet are arranged in a staggered mode to form a correction area.
According to the quartz tuning fork gyroscope provided by the invention, the correction area is arranged on one side of the first driving electrode close to the driving hammer head.
According to the quartz tuning fork gyroscope provided by the invention, one end of the first electrode plate is provided with a first correcting part and a first notch part corresponding to the first correcting part; one end of the second electrode plate is provided with a second correction part and a second notch part corresponding to the second correction part; the first correction portion and the second correction portion are arranged in a staggered manner.
According to the quartz tuning fork gyroscope provided by the invention, the width of the first correcting part is the same as that of the first notched part, the width of the second correcting part is the same as that of the second notched part, and the width of the first correcting part is the same as that of the second correcting part.
According to the quartz tuning fork gyroscope provided by the invention, the correction area is arranged on one side of the first driving electrode, which is far away from the driving hammer head.
According to the quartz tuning fork gyroscope provided by the invention, a third correcting part and a third notch part corresponding to the third correcting part are constructed at the other end of the first electrode plate; the other end of the second electrode plate is provided with a fourth correction part and a fourth notch part corresponding to the fourth correction part; the third correction portion and the fourth correction portion are arranged in a staggered manner.
According to the quartz tuning fork gyroscope provided by the invention, the width of the third correcting portion is the same as the width of the third notch portion, the width of the fourth correcting portion is the same as the width of the fourth notch portion, and the width of the third correcting portion is the same as the width of the fourth correcting portion.
According to the quartz tuning fork gyroscope provided by the invention, the driving interdigital is provided with a second opposite surface, the second opposite surface comprises a first side surface and a second side surface, and the second opposite surface is provided with a second driving electrode.
According to the quartz tuning fork gyroscope provided by the invention, the two connecting beams are symmetrically arranged on two opposite sides of the coupling beam.
According to the quartz tuning fork gyroscope provided by the invention, the two driving interdigital fingers are symmetrical about the central axis of the quartz tuning fork gyroscope.
According to the quartz tuning fork gyroscope provided by the invention, the driving interdigital is provided with the first surface and the second surface which are opposite, the first driving electrode comprises the first electrode plate and the second electrode plate, the first electrode plate and the second electrode plate are respectively arranged on the first surface and the second surface, a partial area of the first electrode plate and a partial area of the second electrode plate are arranged in a staggered mode to form a correction area of an electrode area, the correction area on the driving interdigital is cleaned through laser beams, and the electrode area is adjusted to counteract driving force coupling errors caused by asymmetry of the positions of the first electrode plate and the second electrode plate on the two opposite surfaces of the driving interdigital due to processing process errors, so that the purpose of reducing or even eliminating the driving force coupling errors is achieved, and the detection precision of the quartz tuning fork gyroscope is improved.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of one side of a quartz tuning fork gyroscope according to a first embodiment of the present invention (a base is not shown);
FIG. 2 is a schematic structural diagram of the other side of the quartz tuning fork gyroscope according to the first embodiment of the present invention (the base is not shown);
FIG. 3 is a schematic structural diagram of one side of a quartz tuning fork gyroscope according to a second embodiment of the present invention (the base is not shown);
FIG. 4 is a schematic structural diagram of the other side of the quartz tuning fork gyroscope according to the second embodiment of the present invention (the base is not shown);
reference numerals: 1: a coupling beam; 2: driving the interdigital; 201: a first drive finger; 202: a second drive finger; 3: a first electrode sheet; 301: a first correction unit; 302: a first notch portion; 303: a third correction unit; 304: a third notch portion; 4: a second electrode sheet; 401: a second correction unit; 402: a second notch portion; 403: a fourth correcting section; 404: a fourth notch portion; 5: detecting an interdigital; 6: and connecting the beams.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without inventive step based on the embodiments of the present invention, are within the scope of protection of the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
A quartz tuning fork gyro according to an embodiment of the present invention will be described with reference to fig. 1 to 4.
As shown in fig. 1, fig. 2, fig. 3 and fig. 4, a quartz tuning fork gyroscope according to an embodiment of the present invention includes: a tuning fork structure and a base; the tuning fork structure comprises a coupling beam 1, a connecting beam 6, a driving interdigital 2 and a detecting interdigital 5, wherein the driving interdigital 2 and the detecting interdigital 5 are respectively arranged on two opposite sides of the coupling beam 1, and the coupling beam 1 is connected with the base through the connecting beam 6; the driving interdigital 2 is provided with a first opposite surface which is opposite to the first opposite surface, and a first driving electrode is arranged on the first opposite surface; the first opposite surface comprises a first surface and a second surface, the first driving electrode comprises a first electrode plate 3 and a second electrode plate 4, the first electrode plate 3 and the second electrode plate 4 are respectively arranged on the first surface and the second surface, and partial regions of the first electrode plate 3 and partial regions of the second electrode plate 4 are arranged in a staggered mode to form a correction area.
Specifically, the tuning fork structure includes a coupling beam 1, a connecting beam 6, a driving finger and a detecting finger 5, the coupling beam 1 having a first side and a second side opposite to each other. The driving interdigital is arranged on the first side of the coupling beam 1, the number of the driving interdigital is two, and the two driving interdigital are symmetrically arranged around the central axis of the tuning fork structure. The number of the detection fingers 5 is two, and the two detection fingers 5 are symmetrically arranged around the central axis of the tuning fork structure. Two drive fingers are arranged on a first side of the coupling beam 1 along a first direction, and two detection fingers 5 are arranged on a second side of the coupling beam 1 along the first direction. The structure of tie-beam 6 does not do specific restriction, for example two tie-beams 6 are located the relative both sides of coupling roof beam 1 along the second direction, second direction and first direction mutually perpendicular, and the one end and the coupling roof beam 1 of tie-beam 6 are connected, and the other end of tie-beam 6 is equipped with the anchor point, and tie-beam 6 passes through anchor point and base fixed connection.
The drive finger 2 is in the shape of an elongated strip, and the drive finger 2 has opposite first opposite faces including a first surface and a second surface, which are opposite to each other. The drive fingers also have opposing second opposing faces including a first side face and a second side face. The first opposite surface is provided with a first driving electrode, the first driving electrode comprises a first electrode plate 3 and a second electrode plate 4, the first electrode plate 3 is arranged on the first surface, the second electrode plate 4 is arranged on the second surface, and the first electrode plate 3 and the second electrode plate 4 can be prepared on the first opposite surface through a sputtering coating process. The second opposite surface is provided with a second driving electrode, and the polarities of the first driving electrode and the second driving electrode are opposite, for example, the first driving electrode is a positive electrode, and the second driving electrode is a negative electrode. The end part of the driving interdigital finger 2 departing from the coupling beam 1 is constructed with a driving hammer head which is square.
The polarities of the first electrode sheet 3 and the second electrode sheet 4 are the same, and the end region of the first electrode sheet 3 and the end region of the second electrode sheet 4 are arranged in a staggered manner to form a correction region for laser cleaning. The two ends of the first electrode plate 3 are defined as the first end of the first electrode plate 3 and the second end of the first electrode plate 3, the two ends of the second electrode plate 4 are defined as the first end of the second electrode plate 4 and the second end of the second electrode plate 4, the first end of the first electrode plate 3 corresponds to the first end of the second electrode plate 4, and the second end of the first electrode plate 3 corresponds to the second end of the second electrode plate 4.
A partial region of the first end of the first electrode sheet 3 and a partial region of the first end of the second electrode sheet 4 are arranged offset with respect to the first opposing face. The two driving interdigital are symmetrically arranged, the two driving interdigital are defined as a first driving interdigital 201 and a second driving interdigital 202 respectively, and a correction area capable of adjusting the electrode area is formed in a staggered arrangement area of a first driving electrode on the first driving interdigital 201 and a staggered arrangement area of the first driving electrode on the second driving interdigital 202. Modifying the modified region by a laser beam, for example, cleaning off a partial region of the first end of the first electrode sheet 3 on the first drive finger 201 and a partial region of the first end of the first electrode sheet 3 on the second drive finger 202 by the laser beam to adjust the electrode area; or a partial region of the first end of the second electrode sheet 4 on the first drive finger 201 and a partial region of the first end of the second electrode sheet 4 on the second drive finger 202 are cleaned off by the laser beam to adjust the electrode areas. The driving force coupling error caused by the asymmetry of the electrode positions of the first electrode plate 3 and the second electrode plate 4 relative to the first opposite surface is offset by cleaning the correction area with the laser in a staggered arrangement structure, so that the aim of reducing or even eliminating the driving force coupling error is fulfilled.
Or a partial region of the second end of the first electrode sheet 3 and a partial region of the second end of the second electrode sheet 4 are arranged offset with respect to the first opposing face. Cleaning off a partial region of the second end of the first electrode sheet 3 on the first drive finger 201 and a partial region of the second end of the first electrode sheet 3 on the second drive finger 202 by a laser beam to adjust the electrode areas; or a laser beam is used for cleaning a partial area of the second end of the second electrode plate 4 on the first driving interdigital 201 and a partial area of the second end of the second electrode plate 4 on the second driving interdigital 202 so as to adjust the electrode area, thereby achieving the purpose of reducing or even eliminating the driving force coupling error and improving the detection precision of the quartz tuning fork gyroscope.
In the embodiment of the invention, the driving interdigital 2 is provided with a first surface and a second surface which are opposite, the first driving electrode comprises a first electrode plate 3 and a second electrode plate 4, the first electrode plate 3 and the second electrode plate 4 are respectively arranged on the first surface and the second surface, a partial area of the first electrode plate 3 and a partial area of the second electrode plate 4 are arranged in a staggered mode to form a correction area of an electrode area, the correction area on the driving interdigital 2 is cleaned through laser beams, and the electrode area is adjusted to counteract driving force coupling errors caused by asymmetry of the positions of the first electrode plate 3 and the second electrode plate 4 on the two opposite surfaces of the driving interdigital 2 due to processing process errors, so that the purpose of reducing or even eliminating the driving force coupling errors is achieved, and the detection accuracy of the quartz gyroscope is improved.
In an alternative embodiment, the correction area is arranged on one side of the first driving electrode close to the driving hammer head.
Specifically, the correction area can be arranged at one end, close to the driving hammer head, of the driving interdigital part 2, during laser cleaning, the laser beam irradiates the correction area to clean the area to be cleaned of the correction area, operation is convenient, cleaning efficiency is high, and damage to a non-cleaning area is not easily caused in the cleaning process.
In an alternative embodiment, one end of the first electrode sheet 3 is configured with a first correction portion 301 and a first notch portion 302 corresponding to the first correction portion 301; one end of the second electrode sheet 4 is provided with a second correction portion 401 and a second notch 402 corresponding to the second correction portion 401; the first correction unit 301 and the second correction unit 401 are arranged offset from each other.
In the following description, a tuning fork structure has two opposite sides, fig. 1 is a schematic structural diagram of one side of a quartz tuning fork gyroscope implemented in one embodiment, and fig. 2 is a schematic structural diagram of the other side of the quartz tuning fork gyroscope implemented in one embodiment.
Specifically, as shown in fig. 1 and 2, a first end of the first electrode sheet 3 has a first correction portion 301 and a first cutout portion 302 corresponding to the first correction portion 301, a first end of the second electrode sheet 4 has a second correction portion 401 and a second cutout portion 402 corresponding to the second correction portion 401, the first correction portion 301 of the first surface is arranged to face the second cutout portion 402 of the second surface, and the first cutout portion 302 of the first surface is arranged to face the second correction portion 401 of the second surface.
The first electrode sheet 3 includes a first electrode main body and a first correction portion 301 connected to the first electrode main body, the first correction portion 301 extends from an end portion of the first electrode main body toward an end portion of the drive finger, and a width of the first correction portion 301 is smaller than a width of the first electrode main body. The second electrode sheet 4 includes a second electrode main body and a second correction portion 401 connected to the second electrode main body, the second correction portion 401 extends from an end portion of the second electrode main body toward an end portion of the drive finger, and a width of the second correction portion 401 is smaller than a width of the second electrode main body. The first electrode main body and the second electrode main body are correspondingly arranged, and the area of the first electrode main body is the same as that of the second electrode main body.
The first electrode pads 3 on the first driving finger 201 and the first electrode pads 3 on the second driving finger 202 are symmetrically arranged about the central axis of the tuning fork structure, and the second electrode pads 4 on the first driving finger 201 and the second electrode pads 4 on the second driving finger 202 are symmetrically arranged about the central axis of the tuning fork structure. Thereby, first correction portion 301 of first drive finger 201, second correction portion 401 of first drive finger 201, first correction portion 301 of second drive finger 202, and second correction portion 401 of second drive finger 202 form a correction region of the electrode area.
After the tuning fork structure body is manufactured through micro-processing technologies such as sputtering coating, photoetching and etching, the first electrode plate 3 on the first surface and the second electrode plate 4 on the second surface of the driving interdigital may have relative deviation due to factors such as processing errors.
For example, the first electrode piece 3 on the first drive finger 201 and the first electrode piece 3 on the second drive finger 202 are offset to the left side of the center axis as a whole with respect to the second electrode piece 4 on the first drive finger 201 and the second electrode piece 4 on the second drive finger 202. At this time, the second correction portion 401 of the first driving finger 201 and the second correction portion 401 of the second driving finger 202 can be cleaned by the laser beam, so as to adjust the electrode area of the correction region, thereby achieving the purpose of reducing or even eliminating the driving force coupling error.
For example, the first electrode pad 3 on the first drive finger 201 and the first electrode pad 3 on the second drive finger 202 are offset to the right of the central axis with respect to the second electrode pad 4 on the first drive finger 201 and the second electrode pad 4 on the second drive finger 202 as a whole. At this time, the first correction portion 301 of the first driving finger 201 and the first correction portion 301 of the second driving finger 202 can be cleaned by the laser beam, so as to adjust the electrode area, thereby achieving the purpose of reducing or even eliminating the driving force coupling error.
As shown in fig. 1 and 2, in an alternative embodiment, the width of the first correction portion 301 is the same as the width of the first notch portion 302, the width of the second correction portion 401 is the same as the width of the second notch portion 402, and the width of the first correction portion 301 is the same as the width of the second correction portion 401.
Specifically, the first electrode sheet 3 includes a first electrode body and a first correction portion 301 connected to the first electrode body, and the second electrode sheet 4 includes a second electrode body and a second correction portion 401 connected to the second electrode body, the first electrode body and the second electrode body are arranged oppositely, and the areas of the first electrode body and the second electrode body are the same.
The first correction portion 301 and the second correction portion 401 have the same length, the first correction portion 301 and the first cutout portion 302 have the same width, the second correction portion 401 and the second cutout portion 402 have the same width, and the first correction portion 301 and the second correction portion 401 have the same width, so that the area of the first correction portion 301 and the area of the second correction portion 401 are the same, and the area of the first cutout portion 302 and the area of the second cutout portion 402 are the same.
When the first electrode pad 3 of the first drive finger 201 and the first electrode pad 3 of the second drive finger 202 are shifted to the left or right of the central axis with respect to the second electrode pad 4 of the first drive finger 201 and the second electrode pad 4 of the second drive finger 202 as a whole, the electrode area of the first drive electrode can be corrected to the maximum extent by cleaning the second correction portion 401 on the first drive finger 201 and the second correction portion 401 on the second drive finger 202 with a laser beam or cleaning the first correction portion 301 on the first drive finger 201 and the first correction portion 301 on the second drive finger 202 with a laser beam, so as to ensure the detection accuracy of the quartz tuning fork gyroscope.
In an alternative embodiment, the correction area is arranged on the side of the first driving electrode far away from the driving hammer head.
Specifically, the correction region can also be arranged at one end of the driving interdigital 2 far away from the driving hammer head, namely the correction region is close to the coupling beam 1, so that the sensitivity is higher, and when the correction region is cleaned by laser beams, the coupling of the driving force which can be counteracted by the unit trimming area is higher.
In an alternative embodiment, the other end of the first electrode sheet 3 is configured with a third correction portion 303 and a third notch portion 304 corresponding to the third correction portion 303; the other end of the second electrode sheet 4 is formed with a fourth correction portion 403 and a fourth notch portion 404 corresponding to the fourth correction portion 403; the third correction unit 303 and the fourth correction unit 403 are arranged offset from each other.
The following description will be made of example two. The tuning fork structure has two opposite sides, fig. 3 is a schematic structural diagram of one side of the quartz tuning fork gyroscope implementing the second implementation, and fig. 4 is a schematic structural diagram of the other side of the quartz tuning fork gyroscope implementing the second implementation.
Specifically, as shown in fig. 3 and 4, the third correction portion 303 and the third cutout portion 304 corresponding to the third correction portion 303 are formed at the second end of the first electrode sheet 3, the fourth correction portion 403 and the fourth cutout portion 404 corresponding to the fourth correction portion 403 are formed at the second end of the second electrode sheet 4, the third correction portion 303 of the first surface is arranged to face the fourth cutout portion 404 of the second surface, and the third cutout portion 304 of the first surface is arranged to face the fourth correction portion 403 of the second surface.
The first electrode sheet 3 includes a first electrode body and a third correction portion 303 connected to the first electrode body, the third correction portion 303 extends from an end portion of the first electrode body toward the coupling beam 1 side, and a width of the third correction portion 303 is smaller than a width of the first electrode body. The second electrode sheet 4 includes a second electrode main body and a fourth correction portion 403 connected to the second electrode main body, the fourth correction portion 403 extends from an end portion of the second electrode main body toward the coupling beam 1, and a width of the fourth correction portion 403 is smaller than a width of the second electrode main body. The first electrode main body and the second electrode main body are oppositely arranged, and the areas of the first electrode main body and the second electrode main body are the same.
The first electrode pads 3 on the first driving finger 201 and the first electrode pads 3 on the second driving finger 202 are symmetrically arranged about the central axis of the tuning fork structure, and the second electrode pads 4 on the first driving finger 201 and the second electrode pads 4 on the second driving finger 202 are symmetrically arranged about the central axis of the tuning fork structure. Thus, the third correction portion 303 of the first drive finger 201, the fourth correction portion 403 of the first drive finger 201, the third correction portion 303 of the second drive finger 202, and the fourth correction portion 403 of the second drive finger 202 form a correction region of the electrode area.
After the tuning fork structure body is manufactured through micro-processing technologies such as sputtering coating, photoetching and etching, the first electrode plate 3 on the first surface and the second electrode plate 4 on the second surface of the driving interdigital may have relative deviation due to factors such as processing errors.
For example, the first electrode pad 3 on the first drive finger 201 and the first electrode pad 3 on the second drive finger 202 are offset to the left side of the central axis with respect to the second electrode pad 4 on the first drive finger 201 and the second electrode pad 4 on the second drive finger 202 as a whole. At this time, the third correcting portion 303 on the first driving finger 201 and the third correcting portion 303 on the second driving finger 202 can be cleaned by the laser beam, so as to adjust the electrode area, thereby achieving the purpose of reducing or even eliminating the driving force coupling error.
For example, the first electrode piece 3 on the first drive finger 201 and the first electrode piece 3 on the second drive finger 202 are offset to the right of the center axis as a whole with respect to the second electrode piece 4 on the first drive finger 201 and the second electrode piece 4 on the second drive finger 202. At this time, the fourth correction portion 403 on the first driving finger 201 and the fourth correction portion 403 on the second driving finger 202 can be cleaned by the laser beam, so as to adjust the electrode area, thereby achieving the purpose of reducing or even eliminating the driving force coupling error.
As shown in fig. 3 and 4, in an alternative embodiment, the width of the third correction portion 303 is the same as the width of the third notch portion 304, the width of the fourth correction portion 403 is the same as the width of the fourth notch portion 404, and the width of the third correction portion 303 is the same as the width of the fourth correction portion 403.
Specifically, the first electrode sheet 3 includes a first electrode main body and a third correction portion 303 connected to the first electrode main body, and the second electrode sheet 4 includes a second electrode main body and a fourth correction portion 403 connected to the second electrode main body, the first electrode main body and the second electrode main body are arranged oppositely, and the areas of the first electrode main body and the second electrode main body are the same.
The third correction portion 303 and the fourth correction portion 403 have the same length, the third correction portion 303 and the third cutout 304 have the same width, the fourth correction portion 403 and the fourth cutout 404 have the same width, and the third correction portion 303 and the fourth correction portion 403 have the same width, so that the area of the third correction portion 303 and the area of the fourth correction portion 403 are the same, and the area of the third cutout 304 and the area of the fourth cutout 404 are the same.
When the first electrode pad 3 of the first drive finger 201 and the first electrode pad 3 of the second drive finger 202 are shifted to the left or right of the central axis with respect to the second electrode pad 4 of the first drive finger 201 and the second electrode pad 4 of the second drive finger 202 as a whole, the electrode area of the first drive electrode can be corrected to the maximum extent by cleaning the third correction portion 303 on the first drive finger 201 and the third correction portion 303 on the second drive finger 202 with the laser beam or cleaning the fourth correction portion 403 on the first drive finger 201 and the fourth correction portion 403 on the second drive finger 202 with the laser beam, so as to ensure the detection accuracy of the quartz tuning fork gyroscope.
In an alternative embodiment, the drive finger has a second opposing face, the second opposing face comprising a first side and a second side, the second opposing face being provided with a second drive electrode.
Specifically, the driving finger has a first opposing face and a second opposing face, the first opposing face including opposing first and second surfaces, the first opposing face having the first driving electrode disposed thereon; the second opposing face includes opposing first and second sides, and a second drive electrode is disposed on the second opposing face. The first driving electrode and the second driving electrode have opposite polarities, for example, the first driving electrode is a positive electrode, and the second driving electrode is a negative electrode. And the opposite side surfaces of the detection interdigital 5 are provided with detection electrodes. The tuning fork structure is simple in overall structure and convenient to process and manufacture.
As shown in fig. 1, 2, 3 and 4, in an alternative embodiment, two connecting beams 6 are symmetrically arranged on opposite sides of the coupling beam 1.
Specifically, two driving fingers are arranged on a first side of the coupling beam 1 along the first direction, and two detecting fingers 5 are arranged on a second side of the coupling beam 1 along the first direction. Two tie-beams 6 are located the both sides that coupling beam 1 is relative along the second direction symmetry, second direction and first direction mutually perpendicular, and the one end and the coupling beam 1 of tie-beam 6 are connected, and the other end and the base of tie-beam 6 are connected.
The other end of the connecting beam 6 is provided with a base anchor point, and the base anchor point is fixedly bonded with the base through a conductive silver adhesive layer. The signal is led out to be provided with a wiring on the connecting beam 6, and finally, the electric connection is realized at the anchor point of the base part through a conductive silver glue layer or a eutectic welding layer and a base wiring point. The base anchor point through 6 tip of tie-beam realizes being connected of tuning fork structure and base, and simple process easily assembles, easily realizes the miniaturization of quartz tuning fork top, realizes being connected of base anchor point and base through conductive silver glue film or eutectic welding layer simultaneously, realizes the electricity and connects, eliminates the electrostatic coupling error that the gold wire of bonding introduced, reduces electrostatic coupling, is favorable to further promoting the precision and the reliability of quartz tuning fork top.
Further, the coupling beam 1 can be in an i-shaped structure or a hollow frame structure inside, which is beneficial to light tuning fork structure.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A quartz tuning fork gyroscope, comprising: a tuning fork structure and a base;
the tuning fork structure comprises a coupling beam, a connecting beam, a driving interdigital and a detecting interdigital, wherein the driving interdigital and the detecting interdigital are respectively arranged on two opposite sides of the coupling beam, and the coupling beam is connected with the base through the connecting beam;
the end part of the driving interdigital is provided with a driving hammer head, the driving interdigital is provided with a first opposite surface, and a first driving electrode is arranged on the first opposite surface; the first opposite surface comprises a first surface and a second surface, the first driving electrode comprises a first electrode sheet and a second electrode sheet, the first electrode sheet and the second electrode sheet are respectively arranged on the first surface and the second surface, and partial areas of the first electrode sheet and partial areas of the second electrode sheet are arranged in a staggered mode to form a correction area.
2. The quartz tuning fork gyroscope of claim 1, wherein the modification region is disposed on a side of the first driving electrode adjacent to the driving hammer.
3. The quartz tuning fork gyroscope of claim 2, wherein one end of the first electrode sheet is configured with a first correcting portion and a first notch portion corresponding to the first correcting portion; one end of the second electrode plate is provided with a second correction part and a second notch part corresponding to the second correction part; the first correction portion and the second correction portion are arranged in a staggered manner.
4. The quartz tuning fork gyroscope of claim 3, wherein the width of the first correcting portion is the same as the width of the first notch portion, the width of the second correcting portion is the same as the width of the second notch portion, and the width of the first correcting portion is the same as the width of the second correcting portion.
5. The quartz tuning fork gyroscope of claim 1, wherein the correction region is disposed on a side of the first driving electrode away from the driving hammer.
6. The quartz tuning fork gyroscope of claim 5, wherein the other end of the first electrode sheet is configured with a third correcting part and a third notch part corresponding to the third correcting part; the other end of the second electrode plate is provided with a fourth correction part and a fourth notch part corresponding to the fourth correction part; the third correcting portion and the fourth correcting portion are arranged in a staggered manner.
7. The quartz tuning fork gyroscope of claim 6, wherein the width of the third correction portion is the same as the width of the third notch portion, the width of the fourth correction portion is the same as the width of the fourth notch portion, and the width of the third correction portion is the same as the width of the fourth correction portion.
8. The quartz tuning fork gyroscope of claim 1, wherein the drive fingers have opposing second opposing faces comprising a first side and a second side, the second opposing faces being provided with a second drive electrode.
9. The quartz tuning fork gyroscope of claim 1, wherein the two connecting beams are symmetrically disposed on opposite sides of the coupling beam.
10. The quartz tuning fork gyroscope of any of claims 1-9, wherein the two driving fingers are symmetric about a central axis of the quartz tuning fork gyroscope.
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| CN202211132196.0A CN115597572A (en) | 2022-09-16 | 2022-09-16 | Quartz tuning fork gyroscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117146791A (en) * | 2023-10-30 | 2023-12-01 | 北京晨晶电子有限公司 | Micromechanical quartz tuning fork gyroscope and electronic equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117146791A (en) * | 2023-10-30 | 2023-12-01 | 北京晨晶电子有限公司 | Micromechanical quartz tuning fork gyroscope and electronic equipment |
| CN117146791B (en) * | 2023-10-30 | 2024-02-23 | 北京晨晶电子有限公司 | Micromechanical quartz tuning fork gyroscope and electronic equipment |
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