CN113790715B - Surface-mounted quartz tuning fork gyroscope and processing method thereof - Google Patents
Surface-mounted quartz tuning fork gyroscope and processing method thereof Download PDFInfo
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- CN113790715B CN113790715B CN202111352167.0A CN202111352167A CN113790715B CN 113790715 B CN113790715 B CN 113790715B CN 202111352167 A CN202111352167 A CN 202111352167A CN 113790715 B CN113790715 B CN 113790715B
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- tuning fork
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5628—Manufacturing; Trimming; Mounting; Housings
Abstract
The invention provides a surface-mounted quartz tuning fork gyroscope structure and a processing method thereof, wherein the surface-mounted quartz tuning fork gyroscope structure comprises: a quartz tuning fork and a base; the quartz tuning fork comprises: the main body part comprises a coupling beam, a driving interdigital and a detection interdigital, wherein the driving interdigital and the detection interdigital are respectively arranged on two opposite sides of the coupling beam, a driving electrode is arranged on the driving interdigital, and a detection electrode is arranged on the detection interdigital; the number of the connecting beams is even, and the connecting beams are symmetrically arranged on two sides of the coupling beam; one end of each connecting beam is connected with the coupling beam, and the other end of each connecting beam is provided with a base anchor point. According to the surface-mounted quartz tuning fork gyroscope structure and the processing method thereof, gold wire bonding is not needed, the base anchor point and the base are fixedly bonded through conductive silver adhesive or eutectic welding to realize electric connection, so that electrostatic coupling errors introduced by the bonding gold wire are eliminated, electrostatic coupling is reduced, and the precision and the structural reliability are improved.
Description
Technical Field
The invention relates to the technical field of inertia devices, in particular to a surface-mounted quartz tuning fork gyroscope and a connecting method thereof.
Background
Gyroscopes, also known as angular velocity meters, can be used to detect angular velocity and angle. As is well known, conventional mechanical gyroscopes, precision fiber optic gyroscopes, laser gyroscopes, and the like have been widely used in the aerospace and other military applications. However, these gyroscopes are not suitable for use in consumer electronics due to their high cost and large size.
The micromechanical gyroscope has the advantages of small volume, light weight, low power consumption, mass production, low cost and the like, and is widely applied to the technical fields of consumer electronics, aerospace and the like. With the continuous improvement of performance, the micro-mechanical gyroscope becomes the core of a micro inertial system and a key device for promoting the microminiaturization development of a navigation system. The reliability is a key factor for evaluating the performance of the micro gyroscope, and the zero bias stability is an important factor for influencing the precision of the micro gyroscope and an inertial system and limiting the application range of the micro gyroscope. With the continuous improvement of application requirements, the zero offset error of the micromechanical gyroscope is reduced, and the improvement of the reliability of the micromechanical gyroscope is the key of the wide application of the micromechanical gyroscope in the high-precision field.
In the prior art, the gyroscope structure of the micromechanical gyroscope and the base are connected electrically by using a gold bonding wire, for example, or in CN111256673B, the disclosed connection structure of the quartz tuning fork and the base includes an island, a boss and a metal connection layer, the metal connection layer fixedly connects the quartz tuning fork and the base at the island, but since the island is located at the middle position of the quartz tuning fork, a gold wire bonding is required to realize the electrical connection. The electrical performance of the micromechanical gyroscope and the use reliability of the product are directly determined by the bonding effect.
The performance of the micromechanical gyroscope is influenced by various factors such as process errors, environment and the like, electrostatic coupling errors are easily introduced due to the existence of bonding gold wires, so that the problems of zero offset, easy offset and the like of output of the micromechanical gyroscope are solved, meanwhile, the bonding strength influences the product reliability of the micromechanical gyroscope, the optimization of the bonding strength cannot be realized by changing a certain process parameter, the processes of a plurality of processes need to be adjusted, the optimal effect can be achieved, and the requirements of process difficulty and process consistency are increased.
In addition, in the prior art CN103245339B and CN1818553A patent documents, a piezoelectric vibrating gyro element is disclosed, but the base portion of the center position is not specially designed, which brings certain difficulties to energy coupling.
Disclosure of Invention
The invention provides a surface-mounted quartz tuning fork gyroscope and a processing method thereof, which are used for solving the defects that a micromechanical gyroscope structure and a base are electrically connected by adopting gold wire bonding and electrostatic coupling errors are easily introduced in the prior art, and improving the precision and the reliability of the micromechanical gyroscope.
The invention provides a surface-mounted quartz tuning fork gyroscope, which comprises:
a quartz tuning fork and a base seat,
the quartz tuning fork comprises:
the main body part comprises a coupling beam, a driving interdigital and a detection interdigital, wherein the driving interdigital and the detection interdigital are respectively arranged on two opposite sides of the coupling beam, a driving electrode is arranged on the driving interdigital, and a detection electrode is arranged on the detection interdigital;
the number of the connecting beams is even, and the connecting beams are symmetrically arranged on two sides of the coupling beam; one end of each connecting beam is connected with the coupling beam, and the other end of each connecting beam is provided with the base anchor point;
the base corresponds to the base anchor point one by one and is fixedly bonded through a conductive silver adhesive layer or fixedly welded through eutectic.
According to the surface-mounted quartz tuning fork gyroscope provided by the invention, the coupling beam is in an I-shaped structure or a frame structure with a hollow inner part.
According to the surface-mounted quartz tuning fork gyroscope provided by the invention, the length of the driving interdigital is d1, the length of the detection interdigital is d2, wherein d1 is more than d2 and less than or equal to 2d 2.
According to the surface-mounted quartz tuning fork gyroscope provided by the invention, the width of the connecting beam is smaller than that of the base anchor point.
According to the surface-mounted quartz tuning fork gyroscope provided by the invention, the thickness of the connecting beam is smaller than that of the base anchor point.
According to the surface-mounted quartz tuning fork gyroscope provided by the invention, the quartz tuning fork and the base anchor point are of an integrally formed quartz crystal structure.
According to the surface-mounted quartz tuning fork gyroscope provided by the invention, the thickness of the conductive silver glue layer is 10-20 μm.
The invention also provides a processing method of the surface-mounted quartz tuning fork gyroscope, which can be used for processing the surface-mounted quartz tuning fork gyroscope and comprises the following steps:
setting base anchor points on two sides of the quartz tuning fork;
and fixedly pasting the base anchor point on the base through the conductive silver adhesive layer.
According to the processing method of the surface-mounted quartz tuning fork gyroscope, provided by the invention, the base anchor point is pasted on a base through a conductive silver adhesive layer; the thickness of the conductive silver glue layer is set to be 10-20 μm.
According to the surface-mounted quartz tuning fork gyroscope and the processing method thereof, provided by the invention, the base anchor point and the base are fixedly bonded through the conductive silver adhesive or eutectic welding without using a gold bonding wire, so that the electric connection is realized, the electrostatic coupling error introduced by the gold bonding wire is eliminated, the electrostatic coupling is reduced, and the precision and the structural reliability of the surface-mounted quartz tuning fork gyroscope are improved.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed for the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a first embodiment of a surface-mounted quartz tuning fork gyroscope according to the present invention;
FIG. 2 is a schematic structural diagram of a second embodiment of a surface-mounted quartz tuning fork gyroscope provided by the present invention;
reference numerals:
1-a coupling beam; 2-connecting the beams; 3-driving the interdigital; 4-detecting the interdigital; 5-basal anchor.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the following, one embodiment of the invention is described with reference to fig. 1, and a surface-mounted quartz tuning fork gyroscope is disclosed, which includes a quartz tuning fork and a base, the quartz tuning fork includes a coupling beam 1, a connecting beam 2, a driving interdigital 3 and a detecting interdigital 4, the driving interdigital 3 and the detecting interdigital 4 are respectively disposed on two opposite sides of the coupling beam 1, and the connecting beam 2 has two and is symmetrically disposed on two sides of the coupling beam 1; one end of each connecting beam 2 is connected with the coupling beam 1, and the other end is connected with a base anchor point 5; the base corresponds to the base anchor points 5 one by one and is bonded and fixed through the conductive silver adhesive layer. Driving electrodes are arranged on the upper, lower, left and right surfaces of the driving interdigital 3, and detection electrodes are arranged on the left and right side surfaces of the detection interdigital 4; the signal is led out and is set up the line on tie-beam 2, goes out at base anchor point 5 at last and realizes the electricity through electrically conductive silver glue layer or through eutectic welding layer and base PAD point and connect.
The surface-mounted quartz tuning fork gyroscope disclosed by the embodiment of the invention adopts two ends to be fixed, the electrical connection is realized without bonding gold wire leads, the process is simple, the assembly is easy, the miniaturization is easy, and meanwhile, the base anchor point 5 and the base are fixedly bonded through the conductive silver glue layer or the eutectic welding layer, so that the electrical connection is realized, the electrostatic coupling error introduced by the bonding gold wire is eliminated, the electrostatic coupling is reduced, and the precision and the structural reliability of the micromechanical gyroscope are improved.
Wherein, coupling beam 1 sets up to I shape structure, and the structure symmetry.
In order to further optimize the above solution, the length of the drive finger 3 is d1, the length of the detection finger 4 is d2, and d1 < d2 ≦ 2d 2. By adopting the structures of the driving interdigital 3 and the detection interdigital 4 in the proportion, the mode matching of the driving frequency and the detection frequency of the tuning fork can be realized.
Furthermore, the width of the connection beam 2 is smaller than that of the base anchor point 5, that is, as shown in fig. 1, the length of the connection beam 2 in the Z direction is called as the width, and the width of the connection beam 2 is narrowed, so that the energy coupling efficiency of the connection beam 2 is increased. Moreover, the position of the connection beam 2 is set to be symmetrical with respect to the center of gravity of the surface-mounted quartz tuning fork gyro, and stable vibration of the detection interdigital 4 can be ensured.
It should be noted that the angle setting of the connecting beam 2 and the coupling beam 1 is not limited to 90 °, and the number is not limited to two, and may be multiple, as long as the connecting beams 2 on both sides of the quartz tuning fork are symmetric with respect to the gravity center of the surface-mounted quartz tuning fork gyroscope.
The coupling beam 1, the connecting beam 2, the driving interdigital 3, the detection interdigital 4 and the base anchor point 5 are of an integrally formed quartz crystal structure, namely a quartz tuning fork and the base anchor point 5 are integrated.
Wherein, the thickness of the conductive silver glue layer is 10-20 μm, and the value range is selected to realize effective electric connection and ensure stable structure.
The working principle of one embodiment of the invention is as follows: as shown in fig. 1, according to the inverse piezoelectric effect of quartz, when a driving electrode of the driving interdigital 3 is energized, the driving interdigital 3 can vibrate along the X direction, when an angular velocity is input in the Y direction, a coriolis force along the Z direction can be generated according to the principle of the coriolis effect, the driving interdigital 3 vibrates along the Z direction under the action of the coriolis force, the detection interdigital 4 can vibrate along the Z direction under the action of the coupling beam 1, and the magnitude of the input angular velocity can be obtained by collecting charges of the detection interdigital 4.
In the following, another embodiment of the invention is described with reference to fig. 2, and a surface-mounted quartz tuning fork gyroscope is disclosed, which includes a quartz tuning fork and a base, the quartz tuning fork includes a coupling beam 1, a connecting beam 2, a driving interdigital 3 and a detecting interdigital 4, the driving interdigital 3 and the detecting interdigital 4 are respectively disposed on two opposite sides of the coupling beam 1, and the connecting beam 2 has two and is symmetrically disposed on two sides of the coupling beam 1; one end of each connecting beam 2 is connected with the coupling beam 1, and the other end is connected with a base anchor point 5; the base corresponds to the base anchor point 5 one by one and is bonded and fixed through a conductive silver glue layer or an eutectic welding layer. Driving electrodes are arranged on the upper, lower, left and right surfaces of the driving interdigital 3, and detection electrodes are arranged on the left and right side surfaces of the detection interdigital 4; the signal is led out and is set up the line on tie-beam 2, goes out at the base anchor point 5 at last and realizes the electricity through electrically conductive silver glue layer and base PAD point and connect.
According to the surface-mounted quartz tuning fork gyroscope provided by the embodiment of the invention, the base anchor point 5 and the base are bonded through the conductive silver glue layer or the eutectic welding layer without introducing a gold wire, so that the electrostatic coupling is reduced, the precision is improved, and the structural reliability is improved.
The coupling beam 1 is a hollow frame body, and has a symmetrical structure.
In order to further optimize the above solution, the length of the drive finger 3 is d1, the length of the detection finger 4 is d2, and d1 < d2 ≦ 2d 2. By adopting the structures of the driving interdigital 3 and the detection interdigital 4 in the proportion, the mode matching of the driving frequency and the detection frequency of the tuning fork can be realized.
Further, the thickness of the connection beam 2 is smaller than that of the base anchor point 5, that is, as shown in fig. 2, the value of the connection beam 2 in the Y direction is called the thickness, and the thickness of the connection beam 2 is made thin, which increases the energy coupling efficiency of the connection beam 2. Moreover, the positions of the connecting beams 2 are set to be symmetrical about the gravity center of the surface-mounted quartz tuning fork gyroscope, so that stable vibration of the detection interdigital 3 can be ensured, and the sensitivity of the quartz tuning fork gyroscope is ensured.
It should be noted that the angle setting of the connecting beam 2 and the coupling beam 1 is not limited to 90 °, and the number is not limited to two, and may be multiple, as long as the connecting beams 2 on both sides are symmetric about the center of the surface-mounted quartz tuning fork gyroscope.
The coupling beam 1, the driving interdigital 3, the detection interdigital 4, the connecting beam 2 and the base anchor point 5 are of an integrally formed quartz crystal structure, namely a quartz tuning fork and the base anchor point 5 are integrated.
The embodiment of the invention also discloses a processing method of the surface-mounted quartz tuning fork gyroscope, which can process the surface-mounted quartz tuning fork gyroscope and comprises the following steps:
base anchor points 5 are arranged on two sides of the quartz tuning fork;
and fixedly adhering the base anchor points 5 to the base through a conductive silver glue layer or an eutectic welding layer.
Wherein, in the step of fixedly pasting the basal anchor points 5 on the base through the conductive silver glue layer, the thickness of the conductive silver glue layer is 10-20 microns.
It should be noted that, in the step of arranging the base anchor points 5 on the two sides of the quartz tuning fork, specifically, the quartz white piece is cleaned, the base film is prepared, the tuning fork is subjected to photoetching, the metal mask is subjected to etching, the electrode is subjected to photoetching, the connection beam is subjected to photoetching, the through corrosion, the electrode mask is subjected to etching, the thinning corrosion, the electrode is subjected to etching, and the three-dimensional electrode is prepared, so that the integrally connected coupling beam, the driving tuning fork, the detection tuning fork, the connection beam and the base anchor points are obtained; the processing is prior art and will not be described herein.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (4)
1. A surface-mounted quartz tuning fork gyroscope is characterized by comprising:
a quartz tuning fork and a base; the quartz tuning fork comprises:
the main body part comprises a coupling beam, a driving interdigital and a detection interdigital, wherein the driving interdigital and the detection interdigital are respectively arranged on two opposite sides of the coupling beam, a driving electrode is arranged on the driving interdigital, and a detection electrode is arranged on the detection interdigital; the coupling beam is in an I-shaped structure or a frame structure with a hollow interior;
the number of the connecting beams is even, and the connecting beams are symmetrically arranged on two sides of the coupling beam; one end of each connecting beam is connected with the coupling beam, and the other end of each connecting beam is provided with a base anchor point; the thickness of the connecting beam is smaller than that of the base anchor point, or the width of the connecting beam is smaller than that of the base anchor point; the signal is led out to be provided with a wiring on the connecting beam, and the wiring is electrically connected with the base anchor point through a conductive silver adhesive layer or a base PID point; the positions of the connecting beams are symmetrical about the center of the surface-mounted quartz tuning fork gyroscope;
the base corresponds to the base anchor point one by one and is fixedly bonded or fixed through eutectic welding through a conductive silver adhesive layer.
2. The surface-mounted quartz tuning fork gyroscope of claim 1, wherein the length of the driving finger is d1, the length of the detection finger is d2, and d1 < d2 ≦ 2d 2.
3. The surface-mounted quartz tuning fork gyroscope of claim 1, wherein the quartz tuning fork and the base anchor point are of an integrally formed quartz crystal structure.
4. The surface-mounted quartz tuning fork gyroscope of any of claims 1-3, wherein the thickness of the conductive silver glue layer is 10-20 μm.
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| CN211855356U (en) * | 2020-05-28 | 2020-11-03 | 黄晓 | Quartz tuning fork micro gyroscope |
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| JP3646258B2 (en) * | 2001-10-31 | 2005-05-11 | 有限会社ピエデック技術研究所 | Crystal unit and manufacturing method thereof |
| JP2005043306A (en) * | 2003-07-25 | 2005-02-17 | Toyo Commun Equip Co Ltd | Oscillating gyro sensor |
| CN102009945B (en) * | 2010-11-11 | 2012-07-04 | 北京自动化控制设备研究所 | Method for machining micro-mechanical quartz tuning fork gyro sensitive structure |
| CN103138710B (en) * | 2011-11-23 | 2016-01-20 | 北京晨晶电子有限公司 | The method of attachment of wafer and pedestal and gained crystal resonator |
| CN103245339B (en) * | 2012-02-14 | 2017-05-24 | 精工爱普生株式会社 | Vibrator element, sensor unit, and electronic device |
| US9061886B1 (en) * | 2013-03-15 | 2015-06-23 | Hrl Laboratories, Llc | Doubly-clamped bean quartz micro-resonator |
| CN104819711B (en) * | 2015-03-27 | 2018-09-28 | 北京晨晶电子有限公司 | A method of processing three-dimensional quartz micromechanical gyro tuning fork lateral electrode |
| CN105206541B (en) * | 2015-08-21 | 2018-02-13 | 中国电子科技集团公司第二十四研究所 | Integrated chip method |
| CN105698780B (en) * | 2016-01-22 | 2018-06-22 | 中国人民解放军国防科学技术大学 | Micro- hull vibration gyro and preparation method thereof |
| CN111256673B (en) * | 2020-01-19 | 2021-09-10 | 北京晨晶电子有限公司 | Connecting structure and connecting method of quartz tuning fork and base and application of connecting structure and connecting method |
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