CN115597504A - Laser coaxiality calibration device and method for machine vision measurement - Google Patents
Laser coaxiality calibration device and method for machine vision measurement Download PDFInfo
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- CN115597504A CN115597504A CN202211609526.0A CN202211609526A CN115597504A CN 115597504 A CN115597504 A CN 115597504A CN 202211609526 A CN202211609526 A CN 202211609526A CN 115597504 A CN115597504 A CN 115597504A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
Abstract
The invention discloses a laser coaxiality calibration device and a laser coaxiality calibration method for machine vision measurement, wherein the laser coaxiality calibration device comprises the following steps: the device comprises a bearing table, a standard block carrier, a height adjusting module and an angle adjusting module; the height adjusting module and the angle adjusting module are both fixed at one end of the bearing table; the standard block carrier comprises a first end and a second end which are arranged along a first direction; the first end is respectively connected with the height adjusting module and the angle adjusting module, and the second end comprises a standard block placing groove; the standard block placing groove is positioned on the bearing surface side of the bearing table; the standard block placing groove is used for placing a standard block; the height adjusting module parallel to the bearing surface of the bearing table in the first direction is used for driving the standard block carrier to move in the second direction; wherein, the second direction is vertical to the bearing surface of the bearing table; the angle adjusting module is used for driving the standard block carrier to rotate by taking the first direction as an axis. The laser coaxiality calibration method can efficiently and accurately realize laser coaxiality calibration and improve the measurement precision of the laser thickness gauge.
Description
Technical Field
The invention relates to the technical field of laser calibration, in particular to a laser coaxiality calibration device and a laser coaxiality calibration method for machine vision measurement.
Background
In the new energy pole piece thickness measurement or similar sheet thickness measurement industry, the correlation type laser thickness measurement system is required to be used for online thickness detection of sheet production. However, the laser sensor has extremely high requirement on the coaxiality of laser installation, and cannot directly observe the coaxiality condition of the correlation laser, so that whether the correlation laser is adjusted in place or not cannot be effectively guaranteed, and the accuracy of a thickness detection result is influenced.
In the prior art, a piece of white paper is usually placed between two laser sensors, whether upper and lower lasers are coaxial is determined by observing light spots on the white paper, and then the relative positions of the upper and lower laser sensors are adjusted to enable the upper and lower lasers to be coaxial. However, the method has a large error, so that the measurement accuracy of the laser side thickness gauge is poor, and the high-accuracy thickness measurement cannot be met.
Disclosure of Invention
The invention provides a laser coaxiality calibration device and a laser coaxiality calibration method for machine vision measurement, and aims to solve the problems that in the prior art, coaxiality calibration errors are large and the measurement accuracy of a laser lateral thickness gauge is poor.
In a first aspect, the present invention provides a calibration apparatus for laser coaxiality for machine vision metrology, comprising: the device comprises a bearing table, a standard block carrier, a height adjusting module and an angle adjusting module;
the height adjusting module and the angle adjusting module are both fixed at one end of the bearing table;
the standard block carrier comprises a first end and a second end which are arranged along a first direction; the first end is respectively connected with the height adjusting module and the angle adjusting module, and the second end comprises a standard block placing groove; the standard block placing groove is positioned on the bearing surface side of the bearing table; the standard block placing groove is used for placing a standard block; the first direction is parallel to the bearing surface of the bearing table;
the height adjusting module is used for driving the standard block carrier to move in a second direction; wherein the second direction is perpendicular to the bearing surface of the bearing table;
the angle adjusting module is used for driving the standard block carrier to rotate by taking the first direction as an axis;
when laser coaxiality calibration is carried out, an upper laser sensor and a lower laser sensor of the correlation laser thickness gauge are respectively positioned on the bearing surface side of the bearing table and the bearing surface side deviating from the bearing table.
Optionally, the standard block carrier further comprises a standard block pressing plate for fixing the standard block placed in the standard block placing groove.
Optionally, the calibration apparatus for laser coaxiality used for machine vision measurement is characterized by further comprising: a fixing member; the height adjusting module and the angle adjusting module are fixedly arranged at one end of the bearing table through the fixing piece.
Optionally, the height adjusting module and the angle adjusting module both include a micrometer.
Optionally, the carrier includes an assembly slot; and the assembling slot position is used for being in alignment clamping with a detection carrier roller of the correlation laser thickness gauge.
In a second aspect, the present invention provides a laser coaxiality calibration method based on any one of the calibration apparatuses described above, including:
when an upper laser sensor and a lower laser sensor of the correlation laser thickness gauge respectively irradiate two opposite sides of a standard block placed on the standard block carrier, controlling the height adjusting module to drive the standard block carrier to move in a second direction, and acquiring thickness information fed back by the correlation laser thickness gauge in real time;
when the thickness information fed back by the correlation laser thickness gauge is preset information, controlling the angle adjusting module to drive the standard block carrier to rotate by taking a first direction as an axis, and acquiring the thickness parameter fed back by the correlation laser thickness gauge in real time;
and controlling the relative positions of the upper laser sensor and the lower laser sensor according to the thickness parameter until the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial.
Optionally, controlling the relative positions of the upper laser sensor and the lower laser sensor according to the thickness parameter until the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial, including:
determining a thickness parameter as a first thickness parameter when the angle adjusting module drives the standard block carrier to rotate clockwise by taking the first direction as an axis until an included angle between the standard block carrier and a bearing surface of the bearing table is a first preset angle; the first preset angle is greater than 0 degree;
determining a thickness parameter as a second thickness parameter when the angle adjusting module drives the standard block carrier to rotate counterclockwise by taking the first direction as an axis until an included angle between the standard block carrier and the bearing surface of the bearing table is a first preset angle;
judging whether the difference value between the first thickness parameter and the second thickness parameter is within a preset range;
if not, controlling the relative positions of the upper laser sensor and the lower laser sensor according to the difference between the first thickness parameter and the second thickness parameter, returning to execute the step of controlling the angle adjusting module to drive the standard block carrier to rotate by taking the first direction as an axis, and acquiring the thickness parameter fed back by the correlation laser thickness gauge in real time until the laser emitted by the upper laser sensor is coaxial with the laser emitted by the lower laser sensor.
Optionally, the laser coaxiality calibration method is characterized by further comprising:
if the difference value between the first thickness parameter and the second thickness parameter is within the preset range, determining that the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial in a third direction; the third direction is perpendicular to the current first direction and is parallel to the bearing surface of the bearing table;
and rotating the laser coaxiality calibration device for machine vision measurement by 90 degrees by taking the second direction as an axis, returning to execute the step of controlling the angle adjusting module to drive the standard block carrier to rotate by taking the first direction as an axis, and acquiring the thickness parameter fed back by the correlation laser thickness gauge in real time.
Optionally, after determining that the laser light emitted by the upper laser sensor and the laser light emitted by the lower laser sensor are coaxial in the third direction, the method further includes:
and fixing the relative positions of the upper laser sensor and the lower laser sensor in the third direction.
Optionally, controlling the relative positions of the upper laser sensor and the lower laser sensor according to the difference between the first thickness parameter and the second thickness parameter includes:
if the difference value between the first thickness parameter and the second thickness parameter is larger than the upper limit of the preset range, controlling the upper laser sensor to move for a first step length along the positive direction of a third direction; the positive direction of the third direction is intersected with the rotation direction of the standard block carrier which rotates clockwise by taking the first direction as an axis;
if the difference value between the first thickness parameter and the second thickness parameter is smaller than the lower limit of the preset range, controlling the upper laser sensor to move a second step length along the negative direction of the third direction; the negative direction of the third direction intersects with the rotation direction of the standard block carrier rotating counterclockwise by taking the first direction as an axis.
The invention provides a laser coaxiality calibrating device for machine vision measurement, which drives a standard block carrier to move in a second direction through a height adjusting module, drives the standard block carrier to rotate by taking a first direction as an axis, so that an upper laser sensor and a lower laser sensor of an opposite laser thickness gauge are respectively placed on the bearing surface side of a bearing table and the bearing surface side deviating from the bearing table when laser coaxiality calibration is carried out, and drives the standard block carrier to rotate by taking the first direction as the axis through an angle adjusting module, so that the opposite laser thickness gauge can acquire the thickness information of a standard block placed on the standard block carrier in different inclination states, and therefore, whether the upper laser sensor and the lower laser sensor of the opposite laser thickness gauge are coaxial can be judged according to the acquired thickness information of the standard block in different inclination states, the relative positions of the upper laser sensor and the lower laser sensor are adjusted according to the acquired thickness information of the standard block in different inclination states, and the high-efficiency laser thickness measurement of the upper laser sensor and the lower laser thickness gauge can be accurately calibrated.
It should be understood that the statements in this section do not necessarily identify key or critical features of the embodiments of the present invention, nor do they necessarily limit the scope of the invention. Other features of the present invention will become apparent from the following description.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic perspective view of a calibration apparatus for laser coaxiality measurement in machine vision according to an embodiment of the present invention;
FIG. 2 is a schematic top view of a laser alignment apparatus for machine vision metrology according to an embodiment of the present invention;
fig. 3 is a schematic front view of a laser coaxiality calibration apparatus for machine vision measurement according to an embodiment of the present invention;
fig. 4 is a flowchart of a laser coaxiality calibration method according to an embodiment of the present invention;
fig. 5 is a variation curve of the thickness parameter of a standard block carrier at different tilt angles during laser coaxiality according to an embodiment of the present invention;
fig. 6 and fig. 7 are variation curves of the thickness parameter of the standard block carrier under different inclination angles when the laser is not coaxial according to the embodiment of the present invention;
FIG. 8 is a flowchart of another laser coaxiality calibration method according to an embodiment of the present invention;
FIG. 9 is a schematic view of a modular block carrier according to an embodiment of the present invention in different tilted states;
FIG. 10 is a schematic view of another modular block carrier of the present invention in a different tilt state;
fig. 11 is a schematic view of another standard block carrier in different inclined states according to an embodiment of the present invention.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in other sequences than those illustrated or described herein. Moreover, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Referring to fig. 1 to 3, the calibration apparatus for laser coaxiality of machine vision measurement includes a bearing table 2, a standard block carrier 3, a height adjustment module 1 and an angle adjustment module 6; the height adjusting module 1 and the angle adjusting module 6 are both fixed at one end of the bearing platform 2; the standard block carrier 3 comprises a first end and a second end which are arranged along a first direction L1; the first end is respectively connected with the height adjusting module 1 and the angle adjusting module 6, and the second end comprises a standard block placing groove 9; the standard block placing groove 9 is positioned on the bearing surface side of the bearing platform 2; the standard block placing groove 9 is used for placing the standard block 5; the first direction L1 is parallel to the bearing surface of the bearing table 2; the height adjusting module 1 is used for driving the standard block carrier 3 to move in a second direction L2; wherein, the second direction L2 is perpendicular to the bearing surface of the bearing table 2; the angle adjusting module 6 is used for driving the standard block carrier 3 to rotate by taking the first direction L1 as an axis; when laser coaxiality calibration is carried out, an upper laser sensor and a lower laser sensor of the correlation laser thickness gauge are respectively positioned on the bearing surface side of the bearing table 2 and the bearing surface side deviating from the bearing table 2.
Wherein, the one end and the height control module 1 and the angle control module 6 of standard block carrier 3 are connected, so that height control module 1 can drive standard block carrier 3 and move on second direction L2, angle control module 6 can drive standard block carrier 3 and use first direction L1 as the rotation of axes, the other end of standard block carrier 3 includes standard block standing groove 9, this standard block standing groove 9 part runs through, be used for placing standard block 5, so that when carrying out laser axiality calibration, the last laser sensor of correlation laser thickness gauge and the laser of lower laser sensor transmission can shine respectively to the relative both sides of standard block 5. The bearing surface side of the bearing table 2 can be the side of the standard block placing groove 9 for placing the standard block 5; the height adjusting module 1 is fixed at one end of the bearing table 2 and used for driving the standard block carrier 3 to move in the second direction L2, so that when laser coaxiality calibration is carried out, the distance between the standard block carrier 3 and an upper laser sensor and a lower laser sensor of the correlation laser thickness gauge is adjusted, and the correlation laser thickness gauge can feed back thickness information of the standard block 5. The angle adjusting module 6 is also fixed at one end of the bearing table 2 and used for driving the standard block carrier 3 to rotate by taking the first direction L1 as an axis so as to enable the correlation laser thickness gauge to acquire the thickness information of the standard block 5 in different inclination states when laser coaxiality calibration is carried out.
Specifically, when laser coaxiality calibration is carried out, an upper laser sensor and a lower laser sensor of the correlation laser thickness gauge are respectively positioned on the bearing surface side of the bearing table 2 and the bearing surface side deviating from the bearing table 2, the standard block 5 is placed in the standard block placing groove 9 of the standard block carrier 3, the relative positions of the upper laser sensor and the lower laser sensor of the correlation laser thickness gauge are adjusted, lasers of the upper laser sensor and the lower laser sensor are enabled to irradiate on the standard block 5, the standard block carrier 3 is driven to move in the second direction L2 through the height adjusting module 1, the distance between the standard block 5 and the upper laser sensor and the distance between the lower laser sensor of the correlation laser thickness gauge are adjusted, the correlation laser thickness gauge can feed back thickness information of the standard block 5, then the standard block carrier 3 is driven to rotate around the first direction L1 as an axis through the angle adjusting module 6, the correlation laser thickness gauge can obtain thickness information of the standard block 5 in different inclined states, and accordingly the obtained thickness information of the upper laser sensor and the lower laser sensor of the correlation laser thickness gauge can be judged whether the correlation laser sensor of the correlation laser thickness gauge and the laser sensor of the correlation laser thickness gauge are in different inclined states, and whether the laser sensors of the correlation laser thickness gauge are obtained according to the obtained thickness information of the upper laser sensor and the laser sensor of the correlation laser sensor of the laser thickness gauge.
In this embodiment, the height adjustment module drives the standard block carrier to move in the second direction, the angle adjustment module drives the standard block carrier to rotate around the first direction, so that when laser coaxiality calibration is performed, the upper laser sensor and the lower laser sensor of the correlation laser thickness gauge are respectively placed on the bearing surface side of the bearing table and the bearing surface side deviating from the bearing table, the angle adjustment module drives the standard block carrier to rotate around the first direction, so that the correlation laser thickness gauge can acquire the thickness information of the standard block placed on the standard block carrier in different inclination states, and therefore, whether the upper laser sensor and the lower laser sensor of the correlation laser thickness gauge are coaxial or not can be judged according to the acquired thickness information of the standard block in different inclination states, and further, when the upper laser sensor and the lower laser sensor of the correlation laser thickness gauge are not coaxial, the relative positions of the upper laser sensor and the lower laser sensor can be adjusted according to the acquired thickness information of the standard block in different inclination states, so that the upper laser sensor and the lower laser sensor of the correlation laser thickness gauge are coaxial, and efficient and accurate laser coaxiality calibration can be achieved, and the laser thickness measurement precision of the correlation laser thickness gauge can be improved.
Optionally, the standard block carrier 3 further comprises a standard block pressing plate 4 for fixing the standard block 5 placed in the standard block placing groove 9, so that the height adjusting module 1 and the angle adjusting module 6 drive the standard block carrier 3 to move, the standard block 5 placed in the standard block placing groove 9 cannot shake or fall, measurement errors caused by shaking of the standard block 5 in the laser coaxiality calibration process are avoided, the accuracy of laser coaxiality calibration is improved, and the measurement accuracy of the laser thickness gauge can be improved.
Optionally, height adjustment module 1 and angle adjustment module 6 all include the micrometer, the first end of standard block carrier 3 is connected with the micrometer of height adjustment module 1 and the micrometer of angle adjustment module 6 respectively, through the micrometer of adjusting height adjustment module 1, drive standard block carrier 3 and move on second direction L2, through the micrometer of adjusting angle adjustment module 6, it uses first direction L1 as the rotation of axes to drive standard block carrier 3.
Optionally, the calibration apparatus for laser coaxiality used for machine vision measurement provided by this embodiment further includes a fixing member 8; the height adjusting module 1 and the angle adjusting module 6 are fixedly arranged at one end of the bearing platform through a fixing piece 8.
The frame of the micrometer screw of the height adjusting module 1 is fixedly mounted at one end of the bearing table through a fixing part 8, and the measuring rod of the micrometer screw of the height adjusting module 1 is fixedly connected with the first end of the standard block carrier 3, so that the standard block carrier 3 can be driven to move in the second direction L2 by adjusting the micrometer screw of the height adjusting module 1; the micrometer frame of the spiral micrometer of the angle adjusting module 6 is fixedly installed at one end of the bearing table through the fixing piece 8, and the measuring rod of the spiral micrometer of the angle adjusting module 6 is fixedly connected with the first end of the standard block carrier 3, so that the standard block carrier 3 can be driven to rotate by taking the first direction L1 as an axis through the spiral micrometer of the angle adjusting module 6. In an exemplary embodiment, the fixing member 8 may include, but is not limited to, a fine adjustment slide, on which a micrometer screw of the height adjustment module and the angle adjustment module is assembled, and finally, the fine adjustment slide is fixedly mounted at one end of the bearing platform.
Optionally, the carrier 2 includes an assembly slot 7; the assembling slot position 7 is used for being in counterpoint clamping with a detection carrier roller of the correlation laser thickness gauge. Before carrying out laser axiality calibration, plummer 2 is through assembling trench 7 and the detection bearing roller counterpoint block of correlation laser thickness gauge, when can preventing laser axiality calibration, and the calibrating device who is used for the laser axiality that machine vision surveyed rocks and the measuring error who arouses improves the accuracy of laser axiality calibration, and then can improve the measurement accuracy of laser thickness gauge.
Based on the same inventive concept, the embodiment of the invention also provides a laser coaxiality calibration method based on the above arbitrary laser coaxiality calibration device for machine vision measurement. Fig. 4 is a flowchart of a laser coaxiality calibration method according to an embodiment of the present invention. Referring to fig. 4, the laser coaxiality calibration method based on any of the above-mentioned laser coaxiality calibration apparatuses for machine vision measurement includes:
s110, when the upper laser sensor and the lower laser sensor of the correlation laser thickness gauge respectively irradiate two opposite sides of a standard block placed on the standard block carrier, controlling the height adjusting module to drive the standard block carrier to move in a second direction, and acquiring thickness information fed back by the correlation laser thickness gauge in real time.
Wherein, the second direction is vertical to the bearing surface of the bearing table. The thickness information fed back by the correlation laser thickness gauge may include, but is not limited to, instantaneous measurements displayed by the correlation laser side thickness gauge and measurements not displayed by the correlation laser side thickness gauge.
Specifically, when laser coaxiality calibration is carried out, an upper laser sensor and a lower laser sensor of the correlation laser thickness gauge are respectively positioned at two opposite sides of a standard block on a standard block carrier, and for example, laser emitted by the upper laser sensor and the lower laser sensor can be irradiated to the standard block on the standard block carrier by adjusting the positions of the upper laser sensor and/or the lower laser sensor of the correlation laser thickness gauge; and then controlling the height adjusting module to drive the standard block carrier to move in the second direction and acquiring thickness information fed back by the correlation laser thickness gauge in real time.
And S120, when the thickness information fed back by the correlation laser thickness gauge is preset information, controlling the angle adjusting module to drive the standard block carrier to rotate by taking the first direction as an axis, and acquiring the thickness parameter fed back by the correlation laser thickness gauge in real time.
The preset information can be instantaneous measurement values displayed by the correlation laser thickness gauge. The first direction L1 is parallel to the carrying surface of the carrying stage. The thickness parameter fed back by the correlation laser thickness gauge may include a thickness value fed back by the correlation laser thickness gauge when the thickness information fed back by the correlation laser thickness gauge is preset information.
And S130, controlling the relative positions of the upper laser sensor and the lower laser sensor according to the thickness parameter until the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial.
Specifically, the height adjusting module is controlled to drive the standard block carrier to move in the second direction, thickness information fed back by the correlation laser thickness gauge is obtained in real time, and when the thickness information fed back by the correlation laser thickness gauge is preset information, the angle adjusting module is controlled to drive the standard block carrier to rotate by taking the first direction L1 as an axis and obtain thickness parameters fed back by the correlation laser thickness gauge in real time; and controlling the relative positions of the upper laser sensor and the lower laser sensor according to the thickness parameter obtained when the included angle between the standard block carrier and the bearing surface of the bearing table is different until the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial.
Fig. 5 is a variation curve of the thickness parameter of the standard block carrier at different inclination angles when the laser is coaxial according to the embodiment of the present invention, and fig. 6 and 7 are both variation curves of the thickness parameter of the standard block carrier at different inclination angles when the laser is not coaxial according to the embodiment of the present invention. In fig. 5 to 7, an angle at which the angle adjustment module drives the standard block carrier to rotate clockwise with the first direction L1 as an axis is recorded as + θ, an angle at which the angle adjustment module drives the standard block carrier to rotate counterclockwise with the first direction L1 as an axis is recorded as- θ, and an angle at which the standard block carrier is parallel to the bearing surface of the bearing table is recorded as 0.
In an exemplary embodiment, referring to fig. 5, a thickness parameter H obtained when the control angle adjusting module drives the standard block carrier to rotate clockwise around the first direction L1 is denoted as H1, a thickness parameter H obtained when the control angle adjusting module drives the standard block carrier to rotate counterclockwise around the first direction L1 is denoted as H2, and a thickness parameter H obtained when the standard block carrier is parallel to the bearing surface of the bearing table is denoted as H3; when the size relationship of H1, H2 and H3 is: when H1 is approximately equal to H3 and is greater than H2, the laser emitted by the upper laser sensor is coaxial with the laser emitted by the lower laser sensor.
In another exemplary embodiment, referring to fig. 6 and 7, when the size relationship of H1, H2 and H3 is: h1 is less than H2 and less than H3, or when H1 is greater than H2 and is greater than H3, the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor of the correlation laser lateral thickness instrument are not coaxial, and the relative positions of the upper laser sensor and the lower laser sensor need to be controlled and adjusted, so that the thickness parameter obtained in the process that the control angle adjusting module drives the standard block carrier to rotate clockwise by taking the first direction L1 as an axis and the thickness parameter obtained in the process that the control angle adjusting module drives the standard block carrier to rotate anticlockwise by taking the first direction L1 as an axis are both greater than the thickness parameter obtained when the standard block carrier is parallel to the bearing surface of the bearing table, and thus, the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor can be coaxial.
In an alternative embodiment, fig. 8 is a flowchart of another laser coaxiality calibration method according to an embodiment of the present invention. In this embodiment, a specific method of S130 is further added on the basis of the foregoing embodiment, and as shown in fig. 8, the method specifically includes:
s110, when the upper laser sensor and the lower laser sensor of the correlation laser thickness gauge respectively irradiate two opposite sides of a standard block placed on the standard block carrier, controlling the height adjusting module to drive the standard block carrier to move in a second direction, and acquiring thickness information fed back by the correlation laser thickness gauge in real time.
And S120, when the thickness information fed back by the correlation laser thickness gauge is preset information, controlling the angle adjusting module to drive the standard block carrier to rotate by taking the first direction as an axis, and acquiring the thickness parameter fed back by the correlation laser thickness gauge in real time.
S131, determining a thickness parameter as a first thickness parameter when the angle adjusting module drives the standard block carrier to rotate clockwise around the first direction as an axis until an included angle between the standard block carrier and the bearing surface of the bearing table is a first preset angle.
Wherein the first preset angle is greater than 0 °.
Specifically, for example, the angle adjusting module includes a micrometer screw, and the micrometer screw is adjusted to drive the measuring rod of the micrometer screw to rotate the standard block carrier clockwise around the first direction L1, and when the standard block carrier rotates to an included angle with the bearing surface of the bearing table, the included angle is determined as a first preset angle, and the angle parameter obtained at this time is determined as a first thickness parameter.
And S132, taking the thickness parameter as a second thickness parameter when the angle adjusting module drives the standard block carrier to rotate anticlockwise by taking the first direction as an axis until an included angle between the standard block carrier and the bearing surface of the bearing table is a first preset angle.
Specifically, for example, the angle adjusting module includes a micrometer screw, and by adjusting the micrometer screw, the measuring rod of the micrometer screw drives the standard block carrier to rotate counterclockwise around the first direction L1, and when the included angle between the standard block carrier and the bearing surface of the bearing table is a first preset angle, the angle parameter obtained at this time is determined as a second thickness parameter.
133. Judging whether the difference value between the first thickness parameter and the second thickness parameter is within a preset range; if yes, executing S134; if not, go to S135.
The preset range may be an error range of the thickness parameter due to a difference between a first preset angle formed when the standard block carrier rotates clockwise with the first direction L1 as an axis and a first preset angle formed when the standard block carrier rotates counterclockwise with the first direction L1 as an axis within an acceptable range during actual debugging.
And S134, determining that the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial in the third direction.
The third direction L3 is perpendicular to the current first direction L1 and parallel to the bearing surface of the bearing table.
In an alternative embodiment, fig. 9 is a schematic diagram of a standard block carrier in different inclination states according to an embodiment of the present invention, and referring to fig. 9, if an upper laser sensor and a lower laser sensor are coaxial, a first thickness parameter H11 determined when the standard block carrier rotates clockwise around a first direction L1 as an axis to form a first preset angle is equal to a second thickness parameter H21 determined when the standard block carrier rotates counterclockwise around the first direction L1 as an axis to form the first preset angle, so that it is determined that laser emitted by the upper laser sensor and laser emitted by the lower laser sensor are coaxial in a third direction L3.
Optionally, after determining that the laser light emitted by the upper laser sensor and the laser light emitted by the lower laser sensor are coaxial in the third direction L3, fixing the relative positions of the upper laser sensor and the lower laser sensor in the third direction L3 is further included. In an exemplary embodiment, after determining that the laser light emitted by the upper laser sensor and the laser light emitted by the lower laser sensor are coaxial in the third direction L3, the fine adjustment knob of the upper laser sensor and the lower laser sensor in the third direction L3 may be locked to fix the relative positions of the upper laser sensor and the lower laser sensor in the third direction L3.
And S135, controlling the relative positions of the upper laser sensor and the lower laser sensor according to the difference value between the first thickness parameter and the second thickness parameter, and returning to execute S120 until the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial.
In an alternative embodiment, controlling the relative positions of the upper laser sensor and the lower laser sensor according to the difference between the first thickness parameter and the second thickness parameter specifically includes:
if the difference value between the first thickness parameter and the second thickness parameter is larger than the upper limit of the preset range, controlling the upper laser sensor to move for a first step length along the positive direction of the third direction L3; the positive direction of the third direction L3 intersects with the rotation direction of the standard block carrier rotating clockwise with the first direction L1 as the axis.
If the difference value between the first thickness parameter and the second thickness parameter is smaller than the lower limit of the preset range, controlling the upper laser sensor to move a second step length along the negative direction of the third direction L3; the negative direction of the third direction L3 intersects with the rotation direction of the standard block carrier rotating counterclockwise about the first direction L1 as the axis.
The first step length is not equal to the second step length, and the first step length may be greater than the second step length or smaller than the second step length.
Specifically, fig. 10 is a schematic view of another standard block carrier provided in the embodiment of the present invention in different tilt states; fig. 11 is a schematic view of another standard block carrier in different inclined states according to an embodiment of the present invention. Referring to fig. 10, if the upper laser sensor deviates toward the negative direction side of the third direction L3 with respect to the position of the lower sensor, the first thickness parameter H12 determined when the standard block carrier rotates clockwise around the first direction L1 as an axis to form a first preset angle is greater than the second thickness parameter H22 determined when the standard block carrier rotates counterclockwise around the first direction L1 as an axis to form the first preset angle, so that the upper laser sensor can be controlled to move a first step length along the positive direction of the third direction L3 to reduce the relative distance between the upper laser sensor and the lower laser sensor in the third direction L3, and then the angle adjustment module is controlled again to drive the standard block carrier to rotate around the first direction L1 as an axis and to obtain the thickness parameter fed back by the opposite laser thickness gauge in real time until the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial in the third direction L3. In another optional embodiment, referring to fig. 11, if the upper laser sensor deviates toward the positive direction side of the third direction L3 with respect to the position of the lower sensor, the first thickness parameter H13 determined when the standard block carrier rotates clockwise with the first direction L1 as an axis to form the first preset angle is greater than the second thickness parameter H23 determined when the standard block carrier rotates counterclockwise with the first direction L1 as an axis to form the first preset angle, so that the upper laser sensor can be controlled to move in the negative direction of the third direction L3 by the second step length to reduce the relative distance between the upper laser sensor and the lower laser sensor in the third direction L3, and then the angle adjustment module is controlled again to drive the standard block carrier to rotate with the first direction L1 as an axis and to obtain the thickness parameter fed back by the correlation laser thickness gauge in real time until the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial in the third direction L3.
In an optional embodiment, after it is determined that the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial in the third direction L3, the method further includes rotating the calibration device for laser coaxiality for machine vision measurement by 90 ° around the second direction as an axis, and returning to perform S120, so that the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial in a direction perpendicular to the third direction L3, so that the coaxiality of the upper laser emitter and the lower laser sensor is achieved efficiently and accurately, and the measurement accuracy of the laser thickness gauge is improved.
It should be noted that, after the calibration device for laser coaxiality for machine vision measurement is rotated by 90 ° with the second direction as an axis, the first direction L1 is also rotated by 90 ° with the second direction as an axis, and therefore, the third direction L3 is also rotated by 90 ° with the second direction as an axis, so that the redetermined third direction L3 is perpendicular to the third direction L3 before rotation, and thus, the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial in two directions parallel to and perpendicular to the bearing surface of the bearing table, that is, the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial.
It should be understood that various forms of the flows shown above may be used, with steps reordered, added, or deleted. For example, the steps described in the present invention may be executed in parallel, sequentially, or in different orders, and are not limited herein as long as the desired results of the technical solution of the present invention can be achieved.
The above-described embodiments should not be construed as limiting the scope of the invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions may be made in accordance with design requirements and other factors. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A calibration device for laser coaxiality for machine vision metrology, comprising: the device comprises a bearing table, a standard block carrier, a height adjusting module and an angle adjusting module;
the height adjusting module and the angle adjusting module are both fixed at one end of the bearing table;
the standard block carrier comprises a first end and a second end which are arranged along a first direction; the first end is respectively connected with the height adjusting module and the angle adjusting module, and the second end comprises a standard block placing groove; the standard block placing groove is positioned on the bearing surface side of the bearing platform; the standard block placing groove is used for placing standard blocks; the first direction is parallel to the bearing surface of the bearing table;
the height adjusting module is used for driving the standard block carrier to move in a second direction; wherein the second direction is perpendicular to the bearing surface of the bearing table;
the angle adjusting module is used for driving the standard block carrier to rotate by taking the first direction as an axis;
when laser coaxiality calibration is carried out, an upper laser sensor and a lower laser sensor of the correlation laser thickness gauge are respectively positioned on the bearing surface side of the bearing table and the bearing surface side deviating from the bearing table.
2. The apparatus of claim 1, wherein the reticle carrier further comprises a reticle hold down for holding the reticle positioned in the reticle positioning slot.
3. The apparatus of claim 1, further comprising: a fixing member; the height adjusting module and the angle adjusting module are fixedly arranged at one end of the bearing table through the fixing piece.
4. The apparatus of claim 1, wherein the height adjustment module and the angle adjustment module each comprise a micrometer screw.
5. The apparatus of claim 1, wherein the carrier includes an assembly slot; and the assembling slot position is used for being in alignment clamping with a detection carrier roller of the correlation laser thickness gauge.
6. A laser coaxiality calibration method based on the calibration device of any one of claims 1 to 5, comprising the following steps:
when an upper laser sensor and a lower laser sensor of the correlation laser thickness gauge respectively irradiate two opposite sides of a standard block placed on the standard block carrier, controlling the height adjusting module to drive the standard block carrier to move in a second direction and acquiring thickness information fed back by the correlation laser thickness gauge in real time;
when the thickness information fed back by the correlation laser thickness gauge is preset information, controlling the angle adjusting module to drive the standard block carrier to rotate by taking a first direction as an axis, and acquiring the thickness parameter fed back by the correlation laser thickness gauge in real time;
and controlling the relative positions of the upper laser sensor and the lower laser sensor according to the thickness parameter until the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial.
7. The laser coaxiality calibration method according to claim 6, wherein controlling the relative positions of the upper laser sensor and the lower laser sensor until the laser light emitted by the upper laser sensor and the laser light emitted by the lower laser sensor are coaxial according to the thickness parameter comprises:
determining a thickness parameter as a first thickness parameter when the angle adjusting module drives the standard block carrier to rotate clockwise by taking the first direction as an axis until an included angle between the standard block carrier and a bearing surface of the bearing table is a first preset angle; the first preset angle is greater than 0 degree;
determining a thickness parameter as a second thickness parameter when the angle adjusting module drives the standard block carrier to rotate anticlockwise by taking the first direction as an axis until an included angle between the standard block carrier and a bearing surface of the bearing table is a first preset angle;
judging whether the difference value between the first thickness parameter and the second thickness parameter is within a preset range or not;
if not, controlling the relative positions of the upper laser sensor and the lower laser sensor according to the difference between the first thickness parameter and the second thickness parameter, returning to execute the step of controlling the angle adjusting module to drive the standard block carrier to rotate by taking the first direction as an axis, and acquiring the thickness parameter fed back by the correlation laser thickness gauge in real time until the laser emitted by the upper laser sensor is coaxial with the laser emitted by the lower laser sensor.
8. The laser coaxiality calibration method according to claim 7, further comprising:
if the difference value between the first thickness parameter and the second thickness parameter is within the preset range, determining that the laser emitted by the upper laser sensor and the laser emitted by the lower laser sensor are coaxial in a third direction; the third direction is perpendicular to the current first direction and is parallel to the bearing surface of the bearing table;
and rotating the laser coaxiality calibration device for machine vision measurement by 90 degrees by taking the second direction as an axis, returning to execute the step of controlling the angle adjusting module to drive the standard block carrier to rotate by taking the first direction as an axis, and acquiring the thickness parameter fed back by the correlation laser thickness gauge in real time.
9. The laser coaxiality calibration method according to claim 8, further comprising, after determining that the laser light emitted by the upper laser sensor and the laser light emitted by the lower laser sensor are coaxial in a third direction:
and fixing the relative positions of the upper laser sensor and the lower laser sensor in the third direction.
10. The laser coaxiality calibration method according to claim 7, wherein controlling the relative positions of the upper laser sensor and the lower laser sensor based on the difference between the first thickness parameter and the second thickness parameter includes:
if the difference value between the first thickness parameter and the second thickness parameter is larger than the upper limit of the preset range, controlling the upper laser sensor to move for a first step length along the positive direction of a third direction; the positive direction of the third direction is intersected with the rotation direction of the standard block carrier which rotates clockwise by taking the first direction as an axis;
if the difference value between the first thickness parameter and the second thickness parameter is smaller than the lower limit of the preset range, controlling the upper laser sensor to move a second step length along the negative direction of the third direction; the negative direction of the third direction intersects with a rotation direction in which the standard block carrier rotates counterclockwise with the first direction as an axis.
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| CN115597504B (en) | 2023-04-07 |
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