CN115537718B - Screen tensioning control method - Google Patents
Screen tensioning control method Download PDFInfo
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- CN115537718B CN115537718B CN202110739637.2A CN202110739637A CN115537718B CN 115537718 B CN115537718 B CN 115537718B CN 202110739637 A CN202110739637 A CN 202110739637A CN 115537718 B CN115537718 B CN 115537718B
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- 238000000034 method Methods 0.000 title claims abstract description 41
- 239000000463 material Substances 0.000 claims abstract description 103
- 238000004364 calculation method Methods 0.000 claims description 14
- 230000008569 process Effects 0.000 abstract description 8
- 239000002184 metal Substances 0.000 description 25
- 238000006073 displacement reaction Methods 0.000 description 12
- 230000007246 mechanism Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 238000003466 welding Methods 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000012216 screening Methods 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 2
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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- 230000004044 response Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Mechanical Engineering (AREA)
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- Length Measuring Devices By Optical Means (AREA)
- Screen Printers (AREA)
Abstract
The embodiment of the invention discloses a net-stretching control method, which is executed by a net-stretching control system, wherein the net-stretching control system comprises a vision measuring device and net-stretching equipment; the method for controlling the net opening comprises the following steps: the net stretching device controls the material to move to a preset net stretching position; the material is provided with z groups of marks, and target positions corresponding to each group of marks are arranged at the positions of the preset net; the vision measuring device measures the ith position deviation between the position of the ith group of marks and the ith target position corresponding to the ith group of marks, and calculates the ith alignment compensation amount according to the ith position deviation parameter; the net stretching equipment performs compensation adjustment on the material according to the ith alignment compensation amount to enable the material to move to the ith target position; the alignment accuracy of at least one alignment compensation amount is smaller than the alignment accuracy of the previous alignment compensation amount. According to the invention, the net stretching process is controlled in multiple stages, the range is gradually reduced, and the precision is gradually improved, so that the net stretching process is controlled from coarse to fine, and the net stretching efficiency and precision are improved.
Description
Technical Field
The embodiment of the invention relates to a net tensioning technology, in particular to a net tensioning control method.
Background
The vapor deposition process is the only commercialized preparation method currently used for OLED manufacturing, and the specific pattern structure is formed by vapor deposition of a pattern with a specified shape on the surface of glass by virtue of the definition function of a metal mask. The screen welding equipment is the key equipment of the evaporation production line and is responsible for fixing the high-precision evaporation metal mask plate on a metal frame to manufacture a mask with a shielding function.
The current screen welding equipment welds a piece of sub-screen for 1-2 hours, and the time required for completing the screen welding of the whole screen is about 20-2.5 days.
It is known that the conventional open-net welding has extremely low efficiency. And the prior net-tensioning welding has larger net-tensioning error.
Disclosure of Invention
The embodiment of the invention provides a net-tensioning control method for solving the problems of low net-tensioning welding efficiency and poor precision.
The embodiment of the invention provides a net-stretching control method, which is executed by a net-stretching control system, wherein the net-stretching control system comprises a vision measuring device and net-stretching equipment;
the web-tensioning control method comprises the following steps:
the net stretching equipment controls the material to move to a preset net stretching position;
the material is provided with z groups of marks, and target positions corresponding to each group of marks are arranged at the preset net opening positions in a one-to-one correspondence manner;
the vision measuring device measures the ith position deviation between the position of the ith group of marks and the ith target position corresponding to the ith group of marks, and calculates the ith alignment compensation amount according to the ith position deviation parameter;
the net tensioning device performs compensation adjustment on the material according to the ith alignment compensation amount so that the material moves to the ith target position;
i=1, 2, …, z, z being a positive integer greater than 1;
Of the alignment accuracies of the z alignment compensation amounts, the alignment accuracy of at least 1 alignment compensation amount is smaller than the alignment accuracy of the previous alignment compensation amount.
In the embodiment of the invention, the net tensioning control system controls the vision measuring device and the net tensioning equipment to execute net tensioning compensation operation at least twice, the alignment precision of each net tensioning compensation operation is different, and the alignment precision of at least one net tensioning compensation operation is smaller than that of the previous net tensioning compensation operation. The net stretching error can be compensated through multi-dimensional adjustment and multi-stage net stretching control of the net stretching control system; the alignment precision of at least one net-stretching compensation operation is superior to that of the previous net-stretching compensation operation, the net-stretching process is controlled in multiple stages, the range is gradually reduced, the precision is gradually improved, the net-stretching process is controlled from thick to thin, and the net-stretching efficiency and net-stretching precision are improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, a brief description will be given below of the drawings required for the embodiments or the description of the prior art, and it is obvious that although the drawings in the following description are specific embodiments of the present invention, it is obvious to those skilled in the art that the basic concepts of the device structure, the driving method and the manufacturing method, which are disclosed and suggested according to the various embodiments of the present invention, are extended and extended to other structures and drawings, and it is needless to say that these should be within the scope of the claims of the present invention.
Fig. 1 is a schematic diagram of a network tensioning control system according to an embodiment of the present invention;
FIG. 2 is a schematic illustration of a material according to an embodiment of the present invention;
fig. 3 is a schematic diagram of a method for controlling a network according to an embodiment of the present invention;
FIG. 4 is a schematic illustration of a2 nd mark provided in an embodiment of the present invention;
FIG. 5 is a schematic illustration of another type 2 tag provided in accordance with an embodiment of the present invention;
FIG. 6 is a schematic illustration of a 3 rd mark provided in an embodiment of the present invention;
FIG. 7 is a schematic view of a 4 th mark provided by an embodiment of the present invention;
FIG. 8 is a schematic view of another type 4 mark provided in an embodiment of the present invention;
FIG. 9 is a schematic illustration of yet another type 4 marker provided by an embodiment of the present invention;
Fig. 10 is a schematic diagram of a 5 th mark provided in an embodiment of the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described by means of implementation examples with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments obtained by those skilled in the art based on the basic concepts disclosed and suggested by the embodiments of the present invention are within the scope of the present invention.
The embodiment of the invention provides a net-stretching control method which can be executed by a net-stretching control system, wherein the net-stretching control system comprises a vision measuring device and net-stretching equipment.
Referring to fig. 1, a schematic diagram of a network tensioning control system according to an embodiment of the present invention is shown. The net tensioning control system provided by the embodiment comprises a visual measuring device 200 and net tensioning equipment 100, wherein the visual measuring device 200 is positioned above the net tensioning equipment 100, and can be used for accurately collecting position information of each mark in the net tensioning equipment 100, and the net tensioning equipment 100 can be used for controlling material displacement, rotation and the like. The optional vision measurement device 200 at least includes a high-definition camera. The optional material 110 is a metal mask sheet.
As shown in fig. 1, the screen apparatus 100 includes a metal mask frame 101 carrying a metal mask sheet 110, the metal mask frame 101 having a rectangular opening portion at the center thereof. The two sides of the metal mask frame 101 are respectively provided with a clamping jaw moving table 102, more than two clamping and stretching mechanism clamping jaws 107 are arranged on the clamping jaw moving tables 102, the clamping jaw moving tables 102 are connected with the guide rail 103, and then the clamping jaw moving tables 102 can move on the guide rail 103 along the Y direction and drive the clamping jaws 107 of the clamping and stretching mechanism clamping jaws on the clamping jaw moving tables to move along the Y direction.
Two clamping jaw moving tables 102 on two sides of the metal mask frame 101 are linked through a steel beam 104, one end of the steel beam 104 is arranged on the clamping jaw moving table 102 through a fixed support 105, and the other end of the steel beam 104 is connected with the two steel beams 104 through a flexible piece 106. The flexible member 106 may alternatively be a metal reed or a specific structure, the flexible member 106 having flexibility in a direction parallel to the X-Y plane and rigidity in a direction perpendicular to the X-Y plane. The two clamping jaw moving tables 102 are linked through the steel beam 104 to realize the overall displacement in the Y direction and the tiny Y displacement difference, and at the moment, the relative displacement difference of the two clamping jaw moving tables 102 can realize that the clamping jaw moving tables 102 have the rotation amount Rz (within +/-200 mu rad).
The web holding and stretching mechanism clamping jaw 107 is used to hold a metal mask sheet 110. The clamping jaw 107 of the net clamping and stretching mechanism comprises a clamping jaw main body unit 107a and a clamping head 107b, wherein the clamping jaw main body unit 107a is driven by a motor to move in X direction, so that stretching adjustment of the metal mask sheet 110 along the X direction is realized; the clamping head 107b is used for clamping the clamping lug of the metal mask sheet 110, and the clamping head 107b is driven by a motor or a cylinder to realize the adjustment of the metal mask sheet 110 along the Z direction.
At least two pairs of clamping and stretching mechanism clamping jaws 107 are arranged on the clamping jaw moving table 102, and it is understood that the actual logarithm is matched with the clamping lug logarithm of the metal mask sheet 110 of the tensioned net, and the clamping jaw moving table 102 is arranged on the clamping jaw moving table 102 to integrally move along the Y direction along with the clamping jaw moving table 102. Each clamping jaw guide rail 108 is correspondingly arranged on each clamping jaw 107 of the net clamping and stretching mechanism, the clamping jaws 107 of the net clamping and stretching mechanism can also carry out relative displacement in the Y direction on the clamping jaw moving table 102 along the respective clamping jaw guide rails 108, and the clamping jaw guide rails can be used for adjusting the Y spacing between different clamping jaw groups to adapt to the lug spacing of the metal mask sheet 110.
The collet 107b has one or more indicia 109 formed thereon. The metal mask sheet 110 is a mesh-adjusting material on which a plurality of vapor deposition mesh holes, marks, and the like are formed. The vision measuring device 200 is used to measure various mark positions on the metal mask sheet 110 and mark 109 position information on the jaw head 107 b.
Referring to fig. 2, a schematic diagram of a material according to an embodiment of the present invention is shown. The net object, i.e. the material, of the optional net-stretching device is a metal mask sheet. The net object includes a plurality of pairs of lugs 203 for clamping by the clamping head 107b, and two pairs of lugs 203 are distributed on one metal mask sheet 110 in the drawing.
The mesh object includes an inactive area 201 and one or more active graphics areas 202. The effective pattern area 202 of the expanded mesh object is distributed with array pixel holes, and the effective pattern area 202 is used for blocking and passing of the luminous material in the evaporation process. There are 5 active pattern areas 202 distributed on one of the metal mask sheets 110 in the illustration.
The inactive area 201 of the screen object includes a plurality of hole marks, such as half-etched hole marks 204 of a larger size (500 μm or more), for providing a coordinate system for use in coarse alignment of the material, distributed at both ends of the material. The inactive area 201 of the screen object further comprises smaller size half-etched hole marks (150 μm or less) 205 for providing coarse screen measurements of the material distributed around each pattern area 202, optionally 8 smaller size half-etched hole marks 205 per pattern area 202. The non-active area 201 of the net-tensioning object also includes pixel hole markers 206 located inside the active graphic area 202 for controlling the object for fine-tensioning of the material.
The above is a schematic diagram of the network tensioning control system provided by the embodiment of the invention.
The method for controlling the web according to the embodiment of the present invention will be described below with reference to a web control system.
Referring to fig. 3, a schematic diagram of a method for controlling a web according to an embodiment of the present invention is shown. The screen control system provided in this embodiment is used for executing the screen control method, and the screen control system includes a vision measurement device and a screen device, and the screen control system can be applied to a screen welding device of an OLED production line, but is not limited thereto. As shown in fig. 3, the web-tensioning control method includes:
step S1, controlling a material to move to a preset net-opening position by net-opening equipment, wherein the material is provided with z groups of marks, and target positions corresponding to the marks in each group are arranged at the preset net-opening position in a one-to-one correspondence manner;
s2, the vision measuring device measures the ith position deviation between the position of the ith mark group and the ith target position corresponding to the ith mark group, and the ith alignment compensation amount is calculated according to the ith position deviation parameter;
s3, carrying out compensation adjustment on the material by the net tensioning device according to the ith alignment compensation amount so as to enable the material to move to the ith target position;
i1,2, …, z, z being a positive integer greater than 1;
Of the alignment accuracies of the z alignment compensation amounts, the alignment accuracy of at least 1 alignment compensation amount is smaller than the alignment accuracy of the previous alignment compensation amount.
In the embodiment, the net tensioning device clamps and tightens materials through the net tensioning clamping and stretching mechanism clamping jaw, the materials are moved to a preset net tensioning position through the movement of the double-side clamping jaw moving table, and the clamping jaw moving table and the net tensioning and stretching mechanism clamping jaw on the clamping jaw moving table can adjust the displacement of the materials in the X direction and the displacement of the materials in the Y direction.
The vision measuring device moves to the upper part of the material, collects the position information of the ith group of marks of the material, and collects the ith target position corresponding to the ith group of marks at the position of the preset net. The vision measuring device measures the ith position deviation between the position of the ith group of marks and the ith target position, and calculates the ith alignment compensation amount according to the ith position deviation parameter.
And the net stretching equipment performs compensation adjustment on the material according to the ith alignment compensation amount, so that the material moves to the ith target position.
The above is a net-tensioning compensation operation. The alignment accuracy of the sheet-fed compensation operation that is optionally performed next time is better than that of the sheet-fed compensation operation that was performed last time. Until the material reaches the required net-opening precision.
It can be appreciated that the expanded network control system has a master control module. The main control module can be independently used as a device to be respectively communicated with the vision measuring device and the net stretching device; or the main control module is integrated in the net tensioning device and can be communicated with the vision measuring device; or the main control module is integrated in the vision measuring device and can be communicated with the net-tensioning equipment; or the main control module comprises two separated main control units which are respectively integrated in the vision measuring device and the net stretching equipment, and the two main control units can be communicated. It can be understood that the main control module controls the net-tensioning device to work and also controls the vision measuring device to work, and the net-tensioning operation of the materials is carried out under the cooperation of the main control module and the vision measuring device.
It should be noted that, the net stretching control system controls the vision measuring device and the net stretching device to execute the net stretching compensation operation at least twice, the alignment precision of each net stretching compensation operation is not identical, and the alignment precision of at least one net stretching compensation operation is smaller than that of the previous net stretching compensation operation. For example, i=2, the screen-tensioning control system controls the vision measuring device and the screen-tensioning device to execute the 1 st screen-tensioning compensation operation and then execute the 2 nd screen-tensioning compensation operation, wherein the alignment precision of the 1 st screen-tensioning compensation operation is greater than that of the 2 nd screen-tensioning compensation operation. The net stretching error can be compensated through multi-dimensional adjustment and multi-stage net stretching control of the net stretching control system; the alignment precision of at least one net-stretching compensation operation is superior to that of the previous net-stretching compensation operation, the net-stretching process is controlled in multiple stages, the range is gradually reduced, the precision is gradually improved, the net-stretching process is controlled from thick to thin, and the net-stretching efficiency is improved.
It should be noted that, the alignment accuracy of the alignment compensation amount may be understood as an error threshold range, for example, the error allowed by the current alignment accuracy is 15%, and the error allowed by the next alignment accuracy is 5%, which indicates that the alignment accuracy of the next screen-tensioning compensation operation is smaller than the alignment accuracy of the previous screen-tensioning compensation operation. In other embodiments, there may be an alignment accuracy of one screen compensating operation that is greater than or equal to an alignment accuracy of a previous screen compensating operation, where the number of marks of the previous screen compensating operation is greater than the number of marks of the previous screen compensating operation.
In the following embodiments, a detailed description will be given taking as an example that the alignment accuracy of the next sheet-fed compensation operation is smaller than that of the previous sheet-fed compensation operation. However, the invention is not limited thereto, and the alignment accuracy of the two adjacent net stretching compensation operations may be the same or different.
The method comprises the following steps of selecting i=1, wherein the 1 st group of marks comprise at least two coarse alignment marks positioned at two ends of a material, and the 1 st target position is a coarse alignment target position; the 1 st alignment compensation amount includes: a distance Tx_coarse of the material translated in the X direction, a distance Ty_coarse of the material translated in the Y direction, an overall multiplying power M_coarse of the material and an overall rotation rz_coarse of the material rotated around the Z axis; wherein,
Tx_coarse＝(dX1_al+dX2_al)/2；
Ty_coarse＝(dY1_al+dY2_al)/2；
M_coarse＝(dX2_al-dX1_al)/(X2_al-X1_al)；
Rz_coarse＝(dY2_al-dY1_al)/(X2_al-X1_al)；
The 1 st target position is (x1_al, y1_al), (x2_al, y2_al), and the 1 st positional deviation is (dx1_al, dy1_al), (dx2_al, dy2_al).
The 1 st net-tensioning compensation operation can be a coarse alignment operation on the material. The 1 st group of marks in the optional 1 st expanded metal compensation operation includes at least two coarse alignment marks at both ends of the material, and referring to FIG. 2, the 1 st group of marks includes two half-etched hole marks 204 of larger size (500 μm or more).
Specifically, after the material is conveyed to a preset net-opening position by the net-opening device, the vision measuring device measures the position information of the two large-size half-etched hole marks 204, and obtains the target position corresponding to the large-size half-etched hole marks 204 of the material at the preset net-opening position. It will be appreciated that the 1 st set of marks includes 2 hole marks, each hole mark corresponding to one target position, and that the two 1 st target positions corresponding to the 2 hole marks in the 1 st set of marks are (x1_al, y1_al) and (x2_al, y2_al), respectively.
The vision measuring device measures and obtains the 1 st position deviation of the position of one mark in the 1 st group of marks and the 1 st target position corresponding to the position of the one mark, and then measures and obtains the 1 st position deviation of the position of the other mark in the 1 st mark and the 1 st target position corresponding to the position of the other mark. The 1 st positional deviations corresponding to the two marks are (dx1_al, dy1_al) and (dx2_al, dy2_al), respectively.
And calculating the coarse alignment result of the material, namely the 1 st alignment compensation amount. The 1 st alignment compensation quantity respectively comprises a translation distance Tx_coarse of the material along the X direction, a translation distance Ty_coarse of the material along the Y direction, an overall multiplying power M_coarse of the material and an overall rotation rz_coarse of the material; wherein,
Tx_coarse＝(dX1_al+dX2_al)/2；
Ty_coarse＝(dY1_al+dY2_al)/2；
M_coarse＝(dX2_al-dX1_al)/(X2_al-X1_al)；
Rz_coarse＝(dY2_al-dY1_al)/(X2_al-X1_al)。
The net tensioning device controls the material to translate Tx_coarse to the X direction, ty_coarse to the Y direction, the whole zoom ratio M_coarse and the whole rotation rz_coarse according to the 1 st alignment compensation amount. And (5) finishing the rough alignment operation of the materials.
Optional i=2; the vision measuring device measures the ith position deviation between the position of the ith group mark and the ith target position, and the calculation of the ith alignment compensation amount according to the ith position deviation parameter comprises the following steps: calculating the 2 nd target position according to the measured position of the 2 nd group mark and the 1 st alignment compensation quantity; and calculating the 2 nd position deviation according to the position of the 2 nd group mark and the 2 nd target position, and calculating the 2 nd alignment compensation quantity according to the 2 nd position deviation parameter and the position of the 2 nd group mark.
The optional group 2 marks comprise four fine alignment marks (Xm_TP, ym_TP) positioned at the periphery of two image areas at the outermost edge in the material, and the 2 nd target position is a fine alignment expected position (Xm_ TPesp, ym_ TPesp); wherein,
Xm_TPesp＝Tx_coarse+Xm_TP*(1+M_coarse)-Ym_TP*Rz_coarse；
Ym_TPesp＝Ty_coarse+Ym_TP*(1+M_coarse)+Xm_TP*Rz_coarse；
Where tx_coarse, ty_coarse, m_coarse, and rz_coarse are the 1 st alignment compensation amounts obtained.
The optional 2 nd position deviation is (dXm _TP, dYm_TP);
dXm_TP＝Tx_fine+Xm_TP*M_fine-Ym_TP*Rz_fine+Res_xm_fine；
dYm_TP＝Ty_fine+Ym_TP*M_fine+Xm_TP*Rz_fine+Res_ym_fine；
wherein the 2 nd alignment compensation amount includes: the material is precisely aligned with the translational distance Tx_fine along the X direction, the material is precisely aligned with the translational distance Ty_fine along the Y direction, the precise alignment integral multiplying power M_fine of the material and the precise alignment integral rotation rz_fine of the material rotating around the Z axis; res_xn_fine and Res_yn_fine are the X-direction and Y-direction fitting position residuals of the fine alignment marks, respectively.
The 2 nd net tensioning compensation operation can be a fine alignment operation on the material. The 2 nd group of marks in the optional 2 nd expanded metal compensation operation includes four fine alignment marks located at the outer sides of two pattern areas at the outermost edges of the material, and as shown with reference to fig. 2 and 4, the 2 nd group of marks includes four small-sized half-etched hole marks 205a to 205d.
After the 1 st rough alignment operation, the vision measuring device measures the position information of the four small-sized half-etched hole marks 205, and it can be understood that the group 2 marks includes 4 hole marks and then includes four different position information (xm_tp, ym_tp). And calculating four 2 nd target positions (Xm_ TPesp and Ym_ TPesp) according to the positions of the four marks in the 2 nd group of marks and the 1 st alignment compensation amount. Wherein,
Xm_TPesp＝Tx_coarse+Xm_TP*(1+M_coarse)-Ym_TP*Rz_coarse；
Ym_TPesp＝Ty_coarse+Ym_TP*(1+M_coarse)+Xm_TP*Rz_coarse。
Then, the vision measuring device measures and obtains the 2 nd position deviation of the position of each mark in the 2 nd group mark and the 2 nd target position corresponding to the position, namely 42 nd position deviations (dXm _TP, dYm_TP) are obtained.
Substituting the calculated position of one mark in the group 2 marks and the corresponding position deviation of the group 2 marks into the following formula:
dXm_TP＝Tx_fine+Xm_TP*M_fine-Ym_TP*Rz_fine+Res_xm_fine；
dYm_TP＝Ty_fine+Ym_TP*M_fine+Xm_TP*Rz_fine+Res_ym_fine；
the equation set corresponding to one mark in the 2 nd group of marks can be obtained, the positions of the remaining three marks in the 2 nd group of marks and the 2 nd position deviation corresponding to the positions are substituted into the formula in sequence, and the 4 equation sets corresponding to the four marks in the 2 nd group of marks can be obtained. And solving to obtain a fine alignment result, namely a2 nd alignment compensation quantity, namely Tx_fine, ty_fine, M_fine and rz_fine, wherein Res_xn_fine and Res_yn_fine are fitting position residuals in the X direction and the Y direction of the fine alignment mark respectively.
The net tensioning device controls the material to integrally translate to the X direction-Tx_fine, integrally translate to the Y direction-Ty_fine, integrally zoom ratio M_fine and integrally relatively tiny rotation-rz_fine according to the 2 nd alignment compensation amount. And finishing the material fine alignment operation. The displacement of the clamping jaw set of the net clamping and stretching mechanism can be controlled in a closed loop mode through the fact that a visual measuring device observes the mark on the head of the clamping jaw to complete precise alignment operation.
In this embodiment, the group 2 marks include four fine alignment marks located outside of the two pattern areas at the very edge of the material. In other embodiments, four marks of group 2 as set 2 marks in fig. 5, or four marks of group 3 as set 2 marks, or two marks consisting of each selected point of left and right graphic areas in the marks selected by group 2 or group 3 may be selected. Not limited thereto.
Optionally, i=3, wherein the group 3 marks comprise a plurality of coarse mesh marks positioned at the periphery of the graphic area in the material; the vision measuring device measuring an i-th position deviation of the i-th group mark position from the i-th target position comprises: and performing coarse screen opening operation according to the first screen opening precision, and measuring to obtain the 3 rd position deviation, wherein the first screen opening precision is n times of the target screen opening precision, and n is more than 1 and less than or equal to 3.
The 3 rd net stretching compensation operation can be coarse net stretching operation on materials. The 3 rd group of marks in the optional 3 rd screen expansion compensation operation comprises a plurality of coarse screen marks positioned at the periphery of the material graphic area, specifically small-size half-etched hole marks 205 positioned above and below the middle position of each graphic area, and referring to fig. 2 and 6, the 3 rd group of marks comprises 10 small-size half-etched hole marks 205 e-205 n.
The current coarse net stretching precision is subjected to threshold control according to n times of the final net stretching precision requirement, wherein the final net stretching precision is the target net stretching precision, for example, the target net stretching precision is 1+5%, and n=3, and the first net stretching precision range is 1+15%.
The vision measuring device firstly measures the 3 rd position deviation of 10 coarse screen marks, and the calculating method of the 3 rd position deviation is the same as that of the 2 nd position deviation. Thus, according to the 103 rd position deviations, the 3 rd alignment compensation amount can be obtained, and the calculation method of the 3 rd alignment compensation amount is the same as the calculation method of the 2 nd alignment compensation amount.
The 3 rd alignment compensation amount includes an X adjustment amount for each of the in-use jaws. After the X adjustment quantity of each used clamping jaw is calculated by the net stretching device through the net stretching model, the net stretching device can be realized by establishing a response equation through the displacement influence of a single clamping jaw on the material or the displacement influence of the combined displacement of the clamping jaws on the material. The calculation method of the Y adjustment quantity and the Rz adjustment quantity of the clamping jaw moving table is the same as the 2 nd material fine alignment method, and Ty_CT and rz_CT are calculated through fitting through the error of the coarse net mark relative to the net target position.
And controlling the translation distance of the material in the X direction, the translation distance in the Y direction, the integral scaling factor and the integral relative micro rotation by the net stretching equipment according to the 3 rd alignment compensation quantity. And finishing the coarse net-opening operation of the materials.
Optionally, i=4, the group 4 marks comprising a plurality of pixel hole marks at top corner positions of the pattern area in the material;
The vision measuring device measuring an i-th position deviation of the i-th group mark position from the i-th target position comprises:
And performing key point net opening operation according to the second net opening precision, and measuring to obtain the 4 th position deviation, wherein the second net opening precision is m times of the target net opening precision, and m is more than 0.5 and less than 1.
The 4 th net stretching compensation operation can be a key point net stretching operation on the materials. The 4 th set of marks in the optional 4 th expanded metal compensation operation includes a plurality of pixel hole marks at four corners of each pattern area in the material, and as shown with reference to fig. 2 and 7, the 4 th set of marks includes 20 pixel hole marks 206.
The current critical point net opening precision is controlled by a threshold value according to m times of the final net opening precision requirement, wherein the final net opening precision is the target net opening precision, for example, the target net opening precision is 1+5%, m=80-90%, and the second net opening precision range is 1+4-1+4.5%.
The vision measuring device can obtain 204 th position deviations, and the measuring method of the 4 th position deviations is the same as that of the 3 rd position deviations. Thus, the 4 th alignment compensation amount can be obtained, and the calculation method of the 4 th alignment compensation amount is the same as the calculation method of the 3 rd alignment compensation amount.
The 4 th alignment compensation amount includes an X adjustment amount of each in-use gripper, a Y adjustment amount ty_kt of the gripper moving stage, and an Rz adjustment amount rz_kt. The calculation method of the 4 th alignment compensation amount is the same as the calculation method of the 3 rd alignment compensation amount.
And controlling the translation distance of the material in the X direction, the translation distance in the Y direction, the integral scaling factor and the integral relative micro rotation by the net stretching equipment according to the 4 th alignment compensation quantity. And (5) finishing the operation of material key point net-opening.
In this embodiment, the 4 th set of marks includes a plurality of pixel hole marks at four corners of each pattern area in the material. In other embodiments, the material key point net-opening measuring point, namely the 4 th group mark, can be selected in the adjacent area between two graphic areas, optionally, the edge of one graphic area is selected, and 2 pixel hole marks 206 on the vertex of one edge of one graphic area are used as the 4 th group mark as shown in fig. 8; or as shown in fig. 9, the 4 th group of marks may also include, as the 4 th group of marks, four pixel hole marks 206 located at the corners of the two outermost graphic areas in the material, and not all marks are required to participate in the calculation. Not limited thereto.
Optionally, i=5, the group 5 marks comprising a plurality of pixel hole marks located at a central location and at a border location of a graphic area in the material; the vision measuring device measuring an i-th position deviation of the i-th group mark position from the i-th target position comprises: and performing characteristic point net opening operation according to the target net opening precision, and measuring to obtain the 5 th position deviation.
The 5 th net stretching compensation operation can be a characteristic point net stretching operation on the material. The 5 th set of marks in the optional 5 th expanded metal compensation operation includes a pixel hole mark 206 at a center position of each graphic region in the material, a pixel hole mark 206 at a boundary vertex position of the graphic region, and a pixel hole mark 206 at a boundary midpoint position of the graphic region. Referring to fig. 2 and 10, the 5 th set of marks includes 5 pixel hole marks 206 located at the center of the material pattern area, and the selectable pattern area is a quadrangle, and then the 5 th set of marks further includes 20 pixel hole marks 206 located at the vertex positions of the material pattern area, and the 5 th set of marks further includes 20 pixel hole marks 206 located at the midpoint positions of the boundary of the material pattern area.
And performing threshold control on the current characteristic point net opening precision according to the final net opening precision, wherein the final net opening precision is the target net opening precision, for example, the target net opening precision is 1+5%, and the current alignment precision is the range of the target net opening precision.
The vision measuring device can obtain 45 5 th position deviations, and the measuring method of the 5 th position deviations is the same as that of the 3 rd position deviations. Thus, the 5 th alignment compensation amount can be obtained, and the calculation method of the 5 th alignment compensation amount is the same as the calculation method of the 3 rd alignment compensation amount.
The 5 th alignment compensation amount includes an X adjustment amount of each of the in-use gripper, a Y adjustment amount Ty_MT of the gripper motion table, and an Rz adjustment amount rz_MT. The calculation method of the 5 th alignment compensation amount is the same as the calculation method of the 3 rd alignment compensation amount.
And controlling the translation distance of the material in the X direction, the translation distance in the Y direction, the integral scaling factor and the integral relative micro rotation by the net stretching equipment according to the 5 th alignment compensation quantity. And (5) finishing the characteristic point net-opening operation of the material.
As described above, the optional mesh control method may sequentially perform multidimensional mesh operations in the following order: coarse alignment of materials, fine alignment of materials, coarse screening of materials, screening of key points and screening of characteristic points.
The net tensioning control method provided by the embodiment can improve net tensioning precision, and specifically compensates net tensioning errors through multi-dimensional adjustment of net tensioning equipment; the displacement of the clamping jaw is controlled in a closed loop mode through the vision measuring device, the action precision of the net stretching equipment is improved, and further net stretching precision is improved. In addition, in the method for controlling the net stretching provided by the embodiment, the net stretching process is controlled in multiple stages, the net stretching precision range is gradually reduced in different stages, and the net stretching precision is gradually improved. The net stretching control is from thick to thin, so that net stretching efficiency can be improved.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, and that various obvious changes, rearrangements, combinations, and substitutions can be made by those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.
Claims (8)
1. The net-stretching control method is characterized in that a net-stretching control system executes the net-stretching control method and comprises a vision measuring device and net-stretching equipment;
the web-tensioning control method comprises the following steps:
the net stretching equipment controls the material to move to a preset net stretching position;
the material is provided with z groups of marks, and target positions corresponding to each group of marks are arranged at the preset net opening positions in a one-to-one correspondence manner;
the vision measuring device measures the ith position deviation between the position of the ith group of marks and the ith target position corresponding to the ith group of marks, and calculates the ith alignment compensation amount according to the ith position deviation parameter;
the net tensioning device performs compensation adjustment on the material according to the ith alignment compensation amount so that the material moves to the ith target position;
i=1, 2, …, z, z is 5;
Among the alignment accuracies of the z alignment compensation amounts, the alignment accuracy of at least 1 alignment compensation amount is smaller than the alignment accuracy of the previous alignment compensation amount;
Wherein the 1 st group of marks comprises at least two coarse alignment marks positioned at two ends of the material;
the group 2 marks comprise four fine alignment marks positioned at the periphery of two image areas at the extreme edge in the material;
the 3 rd group of marks comprises a plurality of coarse net marks positioned at the periphery of a graph area in the material;
the 4 th group of marks comprises a plurality of pixel hole marks positioned at the vertex angle positions of the graph area in the material;
Group 5 marks include a plurality of pixel hole marks at a center location and at a boundary location of a pattern area in the material.
2. The method of claim 1, wherein i=1, the 1 st target position is a coarse alignment target position;
The 1 st alignment compensation amount includes: the distance Tx_coarse of the material translating along the X direction, the distance Ty_coarse of the material translating along the Y direction, the integral multiplying power M_coarse of the material and the integral rotation rz_coarse of the material rotating around the Z axis; wherein,
Tx_coarse＝(dX1_al+dX2_al)/2；
Ty_coarse＝(dY1_al+dY2_al)/2；
M_coarse＝(dX2_al-dX1_al)/(X2_al-X1_al)；
Rz_coarse＝(dY2_al-dY1_al)/(X2_al-X1_al)；
The 1 st target position is (x1_al, y1_al), (x2_al, y2_al), and a1 st position deviation is calculated according to the position of the 1 st group mark and the 1 st target position, wherein the 1 st position deviation is (dx1_al, dy1_al), (dx2_al, and dy2_al).
3. The web tension control method according to claim 1, wherein i=2;
The vision measuring device measures the ith position deviation between the position of the ith group of marks and the ith target position, and the calculation of the ith alignment compensation amount according to the ith position deviation parameter comprises the following steps:
calculating the 2 nd target position according to the measured position of the 2 nd group mark and the 1 st alignment compensation quantity;
And calculating the 2 nd position deviation according to the position of the 2 nd group mark and the 2 nd target position, and calculating the 2 nd alignment compensation quantity according to the 2 nd position deviation parameter and the position of the 2 nd group mark.
4. A method of controlling a sheet-fed machine according to claim 3, wherein the position information (xm_tp, ym_tp) of the fine alignment mark in the group 2 mark, the 2 nd target position is a fine alignment desired position (xm_ TPesp, ym_ TPesp); wherein,
Xm_TPesp＝Tx_coarse+Xm_TP×(1+M_coarse)-Ym_TP×Rz_coarse；
Ym_TPesp＝Ty_coarse+Ym_TP×(1+M_coarse)+Xm_TP×Rz_coarse；
Wherein tx_coarse, ty_coarse, m_coarse, and rz_coarse are the 1 st alignment compensation amounts obtained.
5. The method of claim 4, wherein the 2 nd position deviation is (dXm _tp, dym_tp);
dXm_TP＝Tx_fine+Xm_TP×M_fine-Ym_TP×Rz_fine+Res_xm_fine；
dYm_TP＝Ty_fine+Ym_TP×M_fine+Xm_TP×Rz_fine+Res_ym_fine；
wherein the 2 nd alignment compensation amount includes: the material is precisely aligned with the translational distance Tx_fine along the X direction, the material is precisely aligned with the translational distance Ty_fine along the Y direction, and the precise alignment integral multiplying power M_fine of the material and the precise alignment integral rotation rz_fine of the material rotating around the Z axis are respectively formed; res_xn_fine and Res_yn_fine are the X-direction and Y-direction fitting position residuals of the fine alignment marks, respectively.
6. The method of claim 1, wherein i=3;
The vision measuring device measuring the ith position deviation between the position of the ith group of marks and the ith target position comprises:
And performing coarse screen opening operation according to the first screen opening precision, and measuring to obtain the 3 rd position deviation, wherein the first screen opening precision is n times of the target screen opening precision, and n is more than 1 and less than or equal to 3.
7. The method of web tensioning control according to claim 1, wherein i = 4;
The vision measuring device measuring the ith position deviation between the position of the ith group of marks and the ith target position comprises:
And performing key point net opening operation according to the second net opening precision, and measuring to obtain the 4 th position deviation, wherein the second net opening precision is m times of the target net opening precision, and m is more than 0.5 and less than 1.
8. The method of web tensioning control according to claim 1, wherein i = 5;
The vision measuring device measuring the ith position deviation between the position of the ith group of marks and the ith target position comprises:
and performing characteristic point net opening operation according to the target net opening precision, and measuring to obtain the 5 th position deviation.
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| CN109402558A (en) * | 2018-11-01 | 2019-03-01 | 上海精骊电子技术有限公司 | The aligning control method that fine metal mask version is thrown the net |
| CN112458402A (en) * | 2021-02-03 | 2021-03-09 | 上海精骊电子技术有限公司 | Net-opening control method of metal mask |
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| JP2004193487A (en) * | 2002-12-13 | 2004-07-08 | Sony Corp | Exposure method and aligner |
| CN109504938B (en) * | 2019-01-09 | 2020-04-17 | 昆山国显光电有限公司 | Mask unit, manufacturing method thereof and mask |
| CN112410724B (en) * | 2019-08-23 | 2022-02-15 | 上海微电子装备（集团）股份有限公司 | Net tensioning device and net tensioning method |
| CN112695272B (en) * | 2019-10-22 | 2022-03-15 | 上海微电子装备（集团）股份有限公司 | Mask manufacturing device and method |
| CN111218645B (en) * | 2020-02-28 | 2022-02-11 | 云谷（固安）科技有限公司 | Mask plate screen tensioning method, mask plate screen tensioning device and mask plate |
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| CN112458402A (en) * | 2021-02-03 | 2021-03-09 | 上海精骊电子技术有限公司 | Net-opening control method of metal mask |
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