CN115524040A - Ultra-sensitive stress sensor structure and system based on optical fiber - Google Patents

Ultra-sensitive stress sensor structure and system based on optical fiber Download PDF

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CN115524040A
CN115524040A CN202210989019.8A CN202210989019A CN115524040A CN 115524040 A CN115524040 A CN 115524040A CN 202210989019 A CN202210989019 A CN 202210989019A CN 115524040 A CN115524040 A CN 115524040A
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optical fiber
stress sensor
fiber
ultrasensitive
face
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仇旻
尚兴港
王宁
周南嘉
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Westlake University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y70/00—Materials specially adapted for additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G17/00—Apparatus for or methods of weighing material of special form or property
    • G01G17/04—Apparatus for or methods of weighing material of special form or property for weighing fluids, e.g. gases, pastes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses an ultrasensitive stress sensor structure based on optical fibers, which comprises: the optical fiber resonator comprises a spiral structure coaxially arranged on the end face of an optical fiber and a flat plate structure arranged at the other end of the spiral structure and parallel to the end face of the optical fiber, wherein an FP resonant cavity is formed between the end face of the optical fiber and the flat plate structure. The invention also provides an optical fiber-based ultra-sensitive stress sensor system. The FP type stress sensor can be directly processed on the end face of a single-mode optical fiber by adopting a two-photon polymerization 3D processing technology, the technology is simple in preparation flow and high in processing precision (the resolution is superior to 200 nm), and the prepared micro-nano structure has extremely low surface roughness (generally lower than 80 nm) by combining high-performance photoresist. The sensing sensitivity of the obtained sensor can reach 0.43nm/nN, the sensing limit of force can reach the NnN magnitude, and compared with the existing optical fiber stress sensor, the sensing sensitivity of the sensor is improved by 4 magnitudes.

Description

Ultra-sensitive stress sensor structure and system based on optical fiber
Technical Field
The invention relates to the technical field of optical fiber sensors, in particular to an ultrasensitive stress sensor structure and an ultrasensitive stress sensor system based on optical fibers.
Background
Fiber optic strain sensors have many advantages, including flexibility, biocompatibility, and resistance to electromagnetic interference while maintaining high sensitivity. Therefore, in recent years, optical fiber stress sensors have been the focus of research, and the FP type optical fiber stress sensor is widely used due to its simple design and good sensing linearity.
At present, FP type optical fiber stress sensor is mainly prepared based on methods such as capillary welding, focused ion beam etching and optical fiber splicing. FP chambers based on capillary fusion generally have the disadvantages of large surface roughness, complex operation and low sensing precision (> 0.6 muN). (document 1. In particular, when the surface roughness of the FP cavity greatly reduces the reflectance, the quality factor (Q-factor) of the FP cavity greatly decreases, and the detection accuracy is reduced.
Focused ion beam etching (Gong Y, yu C B, wang T, et al. High purity sensitive sensor based on optical micro-fiber interferometer [ J ]. Optics Express, 2014.) consumes a lot of time and is inefficient in machining relatively smooth FP chamber structure surfaces. Meanwhile, in order to meet the processing conditions, the fiber diameter generally needs to be tapered to less than 40 μm, and the extremely small fiber diameter significantly reduces the mechanical strength of the sensor, making it susceptible to breakage.
Fiber splicing (document 3. However, such a preparation method typically requires multiple fiber cleaving and splicing operations, and is a complex and time-consuming process.
The three methods all have the defect of low stress sensing precision by adopting the traditional processing mode. The requirement of accurate sensing of 'micro force' in a special scene is difficult to meet.
Patent literature (publication No. 114659963A, publication No. 2022-06-24) proposes a nanonewton-level force detection device, which is a method for significantly improving the stress sensing accuracy by using a spring structure. The elastic structure can produce a relatively large amount of deformation when subjected to the same force. However, in the limit, when the device is used for measuring 'micro force', the micro deformation quantity (< 100 nm) generated by the structure cannot be measured by a detector (an optical microscope, an industrial camera and the like) in real time, and the performance of the device is limited.
Therefore, it is urgently needed to develop a new optical fiber FP cavity stress sensor design and a preparation method thereof to solve the problem that the existing sensors cannot simultaneously take advantages of flexibility, electromagnetic interference resistance, high sensitivity and the like into consideration.
Disclosure of Invention
The invention provides an FP (Fabry-Perot) cavity ultrahigh-precision stress sensor structure based on optical fibers and application thereof.
In order to solve the problems, the invention adopts the following technical scheme:
an optical fiber-based ultrasensitive stress sensor structure, comprising: the optical fiber resonator comprises a spiral structure coaxially arranged on the end face of an optical fiber and a flat plate structure arranged at the other end of the spiral structure and parallel to the end face of the optical fiber, wherein an FP resonant cavity is formed between the end face of the optical fiber and the flat plate structure.
By adopting the structure of the invention, a high-quality FP cavity structure can be formed by utilizing the end surface of the optical fiber and the slab structure, thereby realizing higher sensitivity.
Preferably, the optical fiber is a single mode optical fiber. The helical structure is a 3D helical structure; the 3D spiral structure connects the flat plate structure with the optical fiber; and the hollow part between the end face of the single-mode optical fiber and the flat plate structure is an FP cavity structure required by sensing. Meanwhile, the adopted 3D spiral structure has excellent mechanical property (extremely low k value), the precision of the sensor reaches 0.43nm/nN, and the high sensitivity is further ensured fundamentally.
Preferably, the flat plate structure is a disc structure, and the 3D spiral structure, the flat plate structure and the center of the end face of the single-mode optical fiber are coaxially arranged.
When the 3D helical structure is subjected to a force (which can be a pressure force or a tensile force) perpendicular to the end face of the optical fiber (or along the axial direction of the helical structure), the 3D helical structure can be subjected to compressive deformation, so that the structure height of the FP cavity is changed, and finally the position of a trough of an interference spectrum is changed.
Preferably, the spiral structure and the flat plate structure form a 3D micro-nano structure, and the 3D micro-nano structure is an integrated structure.
Preferably, the 3D micro-nano structure is prepared by a two-photon polymerization 3D printing process.
Preferably, the flat plate structure is a disc structure, and the centers of the end faces of the flat single-mode optical fibers are coaxially arranged.
Preferably, the diameter of the effective reflection area of the flat plate structure is equal to or larger than the mode field diameter of the optical fiber.
The spiral structure and the flat plate structure form a 3D micro-nano structure, and the 3D micro-nano structure can be prepared on the end face of an optical fiber by a two-photon polymerization method. As a preferable solution, an FP cavity ultra-high precision stress sensor based on optical fiber comprises: single mode fiber and 3D micro-nano structure. The FP cavity is formed between the end face of the single-mode optical fiber and the flat plate structure (disc structure).
Preferably, the helical structure has a structure size of less than 1000 microns.
Preferably, the helical structure consists of one or more single helices with the same helical direction.
Preferably, the number of single helices is 1 to 5. The number of turns of a single spiral is 1-3. More preferably 1 to 2 turns.
Further preferably, when the 3D helical structure is plural (when it is composed of plural single helices), it should be arranged uniformly in the circumferential direction.
Preferably, the height of a cavity defined by the end face of the optical fiber, the spiral structure and the flat plate structure is 60-100 micrometers, and the diameter of the cavity is 70-100 micrometers; the cross-sectional area of the spiral structure (single spiral) is 5-20 microns.
More preferably, the cross section of the single spiral is a regular polygon such as a rectangle, a circle, a triangle, or other anisotropic cross-sectional structure. The thickness of the flat plate structure is 2-8 mu m.
As an experimental case, the 3D helix (single helix) was rectangular in cross-section with dimensions of 3 μm by 3.5 μm and a helix height of 80 μm. The diameter of the disc structure is 90 μm, and the thickness is 2 μm.
The invention also provides an ultrasensitive stress detection system, comprising:
the structure of the optical fiber-based ultrasensitive stress sensor in any technical scheme;
a tunable laser providing an optical signal;
the optical power meter receives the reflected optical signal;
and the optical fiber connecting piece is used for realizing the corresponding connection of the tunable laser and the optical power meter with the sensor structure.
Preferably, the optical fiber connector is an optical fiber circulator. When the optical fiber circulator is connected, the tunable laser is connected with the first end of the optical fiber circulator, the second end of the optical fiber circulator is connected with the optical power meter, and the third end of the optical fiber circulator is connected with the FP (Fabry-Perot) cavity stress sensor based on the optical fiber.
The FP-type optical fiber stress sensor can measure micro force. The invention can detect the pull force or the push force with the weight as low as 0.5 nN; for example, the weight or tension of the object can be detected. The forces that can be detected by the present invention are typically not higher than 30nN (calculated from the maximum accurate amount of spectral drift).
The invention also provides an application demonstration of the sensor, which can be used for weighing ceramic micron particles. At the same time, this application can be considered as a calibration experiment of the sensor accuracy.
The material of the micron particles is silicon oxide (SiO) 2 ) For regular spherical particles, three sizes of particles with diameters of 45 μm, 60 μm and 75 μm and weights of 1.11nN, 2.64nN and 5.14nN are shown.
The 3D micro-nano structure is prepared by adopting a two-photon polymerization 3D printing technology. The two-photon polymerization 3D printing technology specifically comprises the following steps: dropping and coating photoresist (negative photoresist adopted by the method), two-photon polymerization, development, cleaning and the like; namely, firstly, a photoresist is coated in a dropping way; then according to the three-dimensional structure data of the 3D micro-nano structure, a femtosecond laser of two-photon laser is used for completing two-photon polymerization processing of the photoresist; after completion of the polymerization, the untreated portion is dissolved with a developer; and finally, washing the printing target by using a cleaning solution to finally obtain the 3D micro-nano structure.
In the present invention, the photoresist used is conventional photoresist including, but not limited to, IP-Dip, IP-S and IP-L.
As an experimental case, the photoresist adopts IP-Dip.
In the invention, the parameters of the adopted two-photon laser are as follows: the wavelength is 700-900 nm; the laser power is 10-40 mW; the laser scanning speed is 500-2000 mu m/s.
As experimental cases, the parameters of the two-photon laser used were: the wavelength is 780nm; the laser power is 20mW; the laser scanning speed was 1000. Mu.m/s.
In the invention, the developer used for development is Propylene Glycol Methyl Ether Acetate (PGMEA); the cleaning solution used for cleaning is isopropyl alcohol (IPA).
The stress sensor can be formed on the end face of an optical fiber in one step by a two-photon polymerization processing method, and has the outstanding advantages of simple preparation, good FP cavity surface roughness, high structural mechanical strength and the like. In addition, the invention also discloses a test system adapted to the sensor, and the quality sensing experiment is carried out on the silicon oxide microparticles, so that the performance of the sensor is verified.
The invention provides an FP (Fabry-Perot) cavity stress sensor and a system based on optical fibers, which have the following characteristics and advantages compared with the prior art:
the stress sensor is an FP type stress sensor; the FP type stress sensor is formed by directly processing the end face of a single-mode optical fiber by adopting a two-photon polymerization 3D processing technology, the technology is simple in preparation flow and high in processing precision (the resolution is superior to 200 nm), and the prepared micro-nano structure has extremely low surface roughness (generally lower than 80 nm) by combining high-performance photoresist. Particularly, the sensing sensitivity of the stress sensor can reach 0.43nm/nN, which is far superior to the existing optical fiber stress sensor, and the sensing limit of the force can reach the NnN magnitude, so that the sensing sensitivity is improved by 4 magnitudes compared with the existing optical fiber stress sensor.
Drawings
Fig. 1 is a schematic structural diagram of an FP cavity stress sensor based on an optical fiber according to the present invention.
FIG. 2 is a structural electron microscope image of an FP cavity stress sensor based on optical fibers provided by the invention.
FIG. 3 is a schematic view of a process for manufacturing a sensor according to the present invention.
Fig. 4 is a diagram of a sensing system apparatus provided by the present invention.
FIG. 5 is a graph of the interference spectrum of the fiber stress sensor and the spectral shifts of the positions of the valleys before and after placing silica particles of different sizes.
FIG. 6 is a linear relationship between the amount of spectral shift and the applied weight of a stress sensor prepared according to an embodiment of the present invention.
Detailed Description
For the sake of understanding, the present invention will be further described with reference to the accompanying drawings. Note that the following description is only a preferred embodiment of the present invention for the purpose of facilitating understanding of the present invention, and thus should not be construed as limiting the scope of the present invention.
The structural schematic diagram of the FP (Fabry-Perot) cavity stress sensor based on the optical fiber is shown in figure 1, and the sensor comprises a single-mode optical fiber (comprising an optical fiber core 101 and an optical fiber cladding 102) and a 3D micro-nano structure. The 3D micro-nano structure comprises a 3D spiral structure 103 and a top flat plate structure 104, the flat plate structure is aligned with the center of the end face of the optical fiber and is parallel to the end face of the optical fiber, and the diameter of the effective reflection area is larger than or equal to the diameter of the mode field of the optical fiber; 3D helical structure is used for connecting fiber end face and plate structure, and simultaneously, helical structure has very low k value (power-displacement ratio), when equal atress, can produce very big deformation in order to enlarge the atress effect, and the quantity of 3D spiral is one or more, and in this embodiment, the 3D spiral is three, and evenly arranges along ring base (being fiber end face) and plate structure circumference, single mode fiber end face, 3D helical structure with form the FP resonant cavity between the plate structure.
As an experimental case, the cross section of the 3D helical structure (i.e. the cross section of a single helix) is rectangular (although a circle, an ellipse, a triangle, or other regular polygon or other special-shaped structure may be selected as required), the cross-sectional dimension (w × t) is 3 μm × 3.5 μm, and the helical height is H =90 μm. The diameter of the flat plate structure is 90 μm, and the thickness is 2 μm. The electron microscope image of the product prepared by the two-photon polymerization 3D printing technology is shown in FIG. 2.
The 3D spiral structure and the optical fiber core 101 are coaxially arranged, and the inner diameter of the surrounded FP resonant cavity is larger than or equal to the diameter of an optical fiber mode field. The bundle number of the 3D spiral structure is 1-3 turns. In this embodiment about 1 turn.
The FP cavity stress sensor based on the optical fiber is obtained by two-photon polymerization, and the preparation process is shown in figure 3 and comprises the following steps: and (3) dropping and coating photoresist (negative photoresist adopted by the method), two-photon polymerization, development, cleaning and the like.
The processing parameters are as follows: the parameters of the adopted two-photon laser are as follows: the wavelength is 780nm; the laser power is 20mW; the laser scanning speed is 200 mu m/s; the developer used for development is Propylene Glycol Methyl Ether Acetate (PGMEA); the cleaning solution used for cleaning is isopropyl alcohol (IPA). The photoresist was IP DIP.
FIG. 4 is a schematic diagram of an FP cavity stress sensing system based on optical fibers provided by the invention. The optical fiber-based FP cavity refractive index sensing system comprises: a tunable laser, a fiber optic circulator, an optical power meter and the optical fiber-based FP cavity stress sensor of FIG. 1;
the tunable laser is connected with the first end of the optical fiber circulator and used for transmitting laser signals to the stress sensor, the second end of the optical fiber circulator is connected with the optical power meter and used for receiving reflected signals, and the third end of the optical fiber circulator is connected with the FP (Fabry-Perot) cavity stress sensor based on optical fibers and used for inputting laser signals, outputting reflected signals and the like.
FIG. 5 shows the interference spectrum of the optical fiber stress sensor and the position of the troughGraph of the change before and after placing different weights of silica microparticles. As can be seen from the results, before and after the particles (with weights of 1.11nN, 2.64nN and 5.14nN, respectively, in FIGS. a-c) were placed, the spectra produced blue shifts of 0.48nm, 1.115nm and 2.249nm, respectively, and as shown in FIG. 6, the amount of spectral shift was calculated from the spectrum obtained by the optical power meter, and the amount of spectral shift was linearly related to the added weight, confirming the excellent performance of the micro-force sensor. The sensing precision of the stress sensor obtained by calculation is 0.43nm/nN, which is far superior to that of the existing optical fiber stress sensor. Aiming at the 3D micro-nano structures with different sizes, the magnitude of the external force applied on the 3D micro-nano structure can be directly obtained through simple calculation according to the linear relation between the spectrum drift amount detected in advance and the added weight (or pulling force). The working principle is as follows: the FP cavity stress sensor based on the optical fiber mainly adopts the FP cavity interference principle. The intensities of the light reflected from the fiber end face and the plate structure are respectively marked as I 1 And I 2 Therefore, the interference signal of the two can be expressed as:
Figure BDA0003803152460000071
where n represents the ambient refractive index, L represents the cavity length of the FP cavity, λ represents the incident light wavelength,
Figure BDA0003803152460000072
indicating the initial phase. The wave trough position of the interference spectrum needs to satisfy the following phase condition:
Figure BDA0003803152460000073
wherein m represents an integer, λ m Representing the mth order trough position, the above equation can be transformed into:
Figure BDA0003803152460000074
as can be seen from the above equation, the interference trough wavelength decreases (blue-shifts) with decreasing FP cavity length, and a correlation between the two appears.

Claims (10)

1. An ultra-sensitive stress sensor structure based on optical fibers, comprising: the optical fiber resonator comprises a spiral structure coaxially arranged on the end face of an optical fiber and a flat plate structure arranged at the other end of the spiral structure and parallel to the end face of the optical fiber, wherein an FP resonant cavity is formed between the end face of the optical fiber and the flat plate structure.
2. The fiber-based ultrasensitive stress sensor structure of claim 1, wherein said fiber is a single mode fiber.
3. The fiber-based ultrasensitive stress sensor structure according to claim 1, wherein a diameter of an effective reflection area of the flat plate structure is equal to or greater than a mode field diameter of the optical fiber.
4. The structure of the ultrasensitive stress sensor based on optical fibers according to claim 1, wherein the spiral structure and the flat plate structure form a 3D micro-nano structure which is an integrated structure.
5. The structure of the ultrasensitive stress sensor based on optical fibers according to claim 4, wherein the 3D micro-nano structure is prepared by a two-photon polymerization method.
6. The optical fiber-based ultrasensitive stress sensor structure according to claim 1, wherein the helical structure has a structural dimension of less than 1000 μm.
7. The fiber-based ultrasensitive stress sensor structure of claim 1, wherein said helical structure consists of one or more single helices with a uniform helical direction.
8. The structure of the optical fiber-based ultrasensitive stress sensor according to claim 7, wherein the number of the single spirals is 1 to 5.
9. The structure of the fiber-based ultrasensitive stress sensor according to claim 7, wherein the cavity defined by the fiber end face, the spiral structure and the flat structure has a height of 60 to 100 micrometers and a diameter of 70 to 100 micrometers; the cross-sectional area of the single spiral is 5-20 microns.
10. An ultrasensitive stress detecting system, comprising:
the optical fiber-based ultrasensitive stress sensor structure of any one of claims 1 to 9;
a tunable laser providing an optical signal;
an optical power meter receiving the reflected optical signal;
and the optical fiber connecting piece is used for realizing the corresponding connection of the tunable laser and the optical power meter with the sensor structure.
CN202210989019.8A 2022-08-17 2022-08-17 Ultra-sensitive stress sensor structure and system based on optical fiber Pending CN115524040A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116519163A (en) * 2023-07-03 2023-08-01 西湖大学 Fiber-based spring FP (Fabry-Perot) cavity temperature sensor, method and system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116519163A (en) * 2023-07-03 2023-08-01 西湖大学 Fiber-based spring FP (Fabry-Perot) cavity temperature sensor, method and system
CN116519163B (en) * 2023-07-03 2023-09-05 西湖大学 Fiber-based spring FP (Fabry-Perot) cavity temperature sensor, method and system

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