CN112731584A - Core-free optical fiber Michelson structure based on femtosecond laser processing and preparation method - Google Patents
Core-free optical fiber Michelson structure based on femtosecond laser processing and preparation method Download PDFInfo
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- CN112731584A CN112731584A CN202011411302.XA CN202011411302A CN112731584A CN 112731584 A CN112731584 A CN 112731584A CN 202011411302 A CN202011411302 A CN 202011411302A CN 112731584 A CN112731584 A CN 112731584A
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- optical fiber
- femtosecond laser
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- glass rod
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 46
- 238000002360 preparation method Methods 0.000 title claims abstract description 10
- 238000003672 processing method Methods 0.000 title description 2
- 239000011521 glass Substances 0.000 claims abstract description 14
- 238000012545 processing Methods 0.000 claims abstract description 14
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052709 silver Inorganic materials 0.000 claims abstract description 7
- 239000004332 silver Substances 0.000 claims abstract description 7
- 238000001259 photo etching Methods 0.000 claims abstract description 5
- 238000007747 plating Methods 0.000 claims abstract description 5
- 239000000835 fiber Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000011152 fibreglass Substances 0.000 claims description 2
- 239000002345 surface coating layer Substances 0.000 claims description 2
- 239000011247 coating layer Substances 0.000 abstract description 3
- 238000005530 etching Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 7
- 238000001228 spectrum Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
- G02B6/02147—Point by point fabrication, i.e. grating elements induced one step at a time along the fibre, e.g. by scanning a laser beam, arc discharge scanning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/0208—Refractive index modulation gratings, e.g. Bragg gratings characterised by their structure, wavelength response
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention provides a preparation method of a coreless optical fiber Michelson waveguide structure based on femtosecond laser processing, which comprises the steps of removing a coating layer on the surface of a coreless optical fiber glass rod, focusing a femtosecond laser on the glass rod, etching perpendicularly to the axial direction of an optical fiber to obtain a cylindrical Michelson structure, and then plating a silver film on the end face after photoetching.
Description
Technical Field
The invention relates to the technical field of optical fibers, in particular to a coreless optical fiber Michelson structure based on femtosecond laser processing and a preparation method thereof.
Background
The Michelson (Michelson, MI) interferometer adopts a two-beam interference principle, and a corresponding measurement result can be accurate to a wavelength level, is commonly used for demonstrating and observing an interference phenomenon, measuring monochromatic light wavelength and micro displacement, and can also research the influence of a plurality of physical quantity factors on light propagation, such as: temperature, electric field, pressure, magnetic field, etc. In recent years, with the rapid development of optical fiber measurement technology, an optical fiber michelson interferometer is not easily affected by external factors such as air and vibration due to the adoption of an optical fiber path, and has high sensitivity to the influence of environmental parameters compared with a traditional michelson interferometer, and the optical fiber michelson interferometer is also commonly used as a sensor for measuring various physical quantities, and the specific working principle is as shown in fig. 1, and an optical fiber coupler adopts a 2 × 2 3dB coupler. M, L are two fiber optic mirrors, where M is fixed to the reference arm and L is fixed to the sensing arm. Under the same condition, the lengths of the reference arm and the sensing arm are equal, and the length of the sensing arm can be changed by means of the change of stress or other physical quantities, so that the optical path of light in the sensing arm is changed, the phase difference between the reference light and the signal light is changed, and the interference fringes of the reference light and the signal light are changed.
2015 Beijing university of science and engineering, Laozuo proposes a drilling strain sensor based on an optical fiber Michelson interferometer, and the measurement precision of the sensor is 117 nm; a45 ℃ cantilever beam high-temperature sensor based on femtosecond laser processing is proposed in the Zhou of Shenzhen university in 2016, and the temperature sensitivity from room temperature to 1000 ℃ is 17pm/° C.
However, the conventional optical fiber michelson interferometer is limited by an optical fiber structure at present, the repeatability of dislocation fusion of the optical fiber core is difficult to realize, and a large amount of time is needed for manual assembly; the fiber grating writing process is complex, the cost is high, and the structure is unstable; special fibers are expensive and, in addition, the Free Spectral Range (FSR) of the prior art is difficult to control accurately.
Disclosure of Invention
In order to overcome the defects of the optical fiber Michelson interferometer in the prior art, the invention provides a coreless optical fiber Michelson structure based on femtosecond laser processing and a specific scheme of a preparation method thereof, wherein the coreless optical fiber Michelson structure comprises the following steps:
a preparation method of a coreless fiber Michelson waveguide structure based on femtosecond laser processing comprises the following steps: removing the surface coating layer of the coreless optical fiber glass rod, cleaning the coreless optical fiber glass rod by using alcohol, placing the coreless optical fiber glass rod on a femtosecond laser processing table, focusing a femtosecond laser on the glass rod, performing line-by-line writing in a direction perpendicular to the axial direction of an optical fiber to obtain a cylindrical Michelson structure, and then plating a silver film on the end face after photoetching.
Further, the coreless fiber glass rod has a diameter of 125 μm and a length of 50 μm.
Further, the femtosecond laser has the specification that: the center wavelength was 800nm and the pulse width was 50 fs.
Further, the operating parameters of the femtosecond laser are as follows: the repetition frequency is 0.5-2.5KHZ, 15-25 times of lens, NA is 0.30, the single pulse energy is 8-12 muJ, and the step length delta y is 2μm.
Further, the silver plating film is realized by a full-automatic ion sputtering instrument.
The invention also provides a coreless optical fiber Michelson waveguide structure based on femtosecond laser processing.
Compared with the prior art, the invention has the beneficial effects that:
the coreless optical fiber Michelson structure based on femtosecond laser processing has the characteristics of compact structure and high sensitivity, and the sensitivity is tested. . . The accuracy is. . . Meanwhile, the preparation method uses the femtosecond laser technology and the coreless optical fiber, has simple operation, high repeatability and lower cost, can be used for batch production, and plates a silver film on the end surface after photoetching so as to improve the refractive index and reduce the light intensity loss.
Drawings
FIG. 1 is a schematic diagram of a fiber-optic Michelson interferometer;
FIG. 2 is a schematic diagram showing a comparison between a coreless fiber used in the embodiment and a normal fiber, wherein A is a normal fiber and B is a coreless fiber;
FIG. 3 is a schematic diagram of the structure and operation of Michelson in the example;
FIG. 4 is a schematic structural diagram of a femtosecond laser processing system in the embodiment;
FIG. 5 is a diagram illustrating the structure of a Michelson structure testing system in an embodiment;
FIG. 6 is an interference pattern diagram of a Michelson structure of a coreless fiber in an experimental example.
Description of reference numerals:
101-fiber core, 102-cladding, 103-coating layer, 401-femtosecond laser, 402-shutter, 403-signal attenuator, 404-aperture, 405-objective lens, 406-coreless fiber, 407-CCD camera, 408-optical component, 409-CCD camera, 410-three-dimensional processing platform, 411-BBS broadband light source.
Detailed Description
The objects and functions of the present invention and methods for accomplishing the same will be apparent by reference to the exemplary embodiments. However, the present invention is not limited to the exemplary embodiments disclosed below; it may be embodied in different forms and the essence of the description is merely to assist those skilled in the relevant art in comprehensive understanding of the specific details of the invention.
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings, the same reference numerals denote the same or similar parts, or the same or similar steps. The following describes a coreless fiber michelson structure based on femtosecond laser processing and a preparation method thereof according to the present invention by specific examples:
the present embodiment provides a method for preparing a coreless fiber michelson structure based on femtosecond laser processing, which includes the following steps:
the method comprises the steps of removing a coating layer of a coreless optical fiber by using a coreless optical fiber glass rod with the diameter of 125 mu m, cleaning the coreless optical fiber glass rod by using alcohol, and placing the coreless optical fiber glass rod on an object stage, wherein a schematic comparison diagram of the coreless optical fiber used in the embodiment and a common optical fiber is shown in figure 2, a femtosecond laser device shown in figure 4 is used, the femtosecond laser device is produced by a coherent company, the central wavelength is 800nm, the pulse width is 50fs, and the specific parameters set by the femtosecond laser device in the embodiment are as follows: the repetition frequency is 1KHZ, 20 × lens is selected, NA is 0.30, the single pulse energy is 10 μ J, and the step Δ y is 2 μm.
Focusing femtosecond laser on a glass rod, perpendicular to the axial direction of the optical fiber, and etching a cylindrical Michelson structure by line-by-line etching, wherein L is 50 μm, and plating a silver film on the end face after photoetching by using a full-automatic ion sputtering instrument to improve the refractive index and reduce the light intensity loss, wherein the prepared coreless optical fiber Michelson structure is shown in figure 3, wherein E1、E2Two beams of input light are provided, because of the existence of the Michelson structure, two beams of reflected light interfere due to the existence of the optical path difference, and finally the output light E is obtainedout。
Test examples
The michelson structure of the coreless optical fiber prepared in the example was tested, compared with the michelson structure of the coreless optical fiber without the coating, the test system shown in fig. 5 was used, the optical fiber sensing analyzer manufactured by Yokogawa company was used, the broadband light source (NKT) was connected to one end of the circulator, one end of the circulator was connected to one end of the coreless optical fiber with the mach-zehnder structure, the other end of the coreless optical fiber was connected to the optical fiber sensing analyzer, the spectrum analyzer was used to collect and analyze the interference spectrum in real time, the interference spectrum was obtained as shown in fig. 6, the obvious interference spectrum was observed, the measurement accuracy was 143nm, the sensitivity was 25 pm/deg.c, and meanwhile, the spectrum after the coating was found to shift up by about 5dB as a whole than the spectrum without the coating, i.e., the spectral loss was reduced by 5dB
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
Claims (6)
1. A preparation method of a coreless optical fiber Michelson waveguide structure based on femtosecond laser processing is characterized in that the preparation method of the coreless optical fiber Michelson waveguide structure comprises the following steps: removing the surface coating layer of the coreless optical fiber glass rod, cleaning the coreless optical fiber glass rod by using alcohol, placing the coreless optical fiber glass rod on a femtosecond laser processing table, focusing a femtosecond laser on the glass rod, performing line-by-line writing in a direction perpendicular to the axial direction of an optical fiber to obtain a cylindrical Michelson structure, and then plating a silver film on the end face after photoetching.
2. The method of claim 1, wherein the coreless fiber glass rod has a diameter of 125 μm and a length of 50 μm.
3. The method of claim 1, wherein the femtosecond laser is specified as follows: the center wavelength was 800nm and the pulse width was 50 fs.
4. The method of claim 1, wherein the femtosecond laser has operating parameters of: the repetition frequency is 0.5-2.5KHZ, 15-25 times of lens, NA is 0.30, the single pulse energy is 8-12 muJ, and the step length delta y is 2μm.
5. The method of claim 1, wherein the silver coating is performed by a fully automatic ion sputtering apparatus.
6. A coreless fiber michelson waveguide structure made by the method of any one of claims 1 to 5.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN117073731A (en) * | 2023-10-18 | 2023-11-17 | 广东海洋大学 | Optical fiber Michelson interference device based on long-period fiber bragg grating and preparation method |
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CN105157875A (en) * | 2015-06-19 | 2015-12-16 | 中国计量学院 | Temperature sensor based on Michelson interferometer having optical fiber and air ring cavity structure |
CN107515054A (en) * | 2017-09-25 | 2017-12-26 | 中国计量大学 | A kind of fiber optic temperature and refractometry sensing device based on Michelson's interferometer |
CN207964137U (en) * | 2018-01-18 | 2018-10-12 | 中国计量大学 | A kind of M-Z strain gauges based on femtosecond laser parallel micromachining |
CN108731712A (en) * | 2018-05-25 | 2018-11-02 | 中国计量大学 | It is a kind of that Mach-Zehnder interferometer on the optical fiber cable of waveguide is inscribed based on femtosecond laser |
CN108918466A (en) * | 2018-05-22 | 2018-11-30 | 杭州光飞秒科技有限公司 | A kind of multiple Michelson's interferometer based on beam splitter in optical fiber cable |
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2020
- 2020-12-03 CN CN202011411302.XA patent/CN112731584A/en active Pending
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CN105157875A (en) * | 2015-06-19 | 2015-12-16 | 中国计量学院 | Temperature sensor based on Michelson interferometer having optical fiber and air ring cavity structure |
CN107515054A (en) * | 2017-09-25 | 2017-12-26 | 中国计量大学 | A kind of fiber optic temperature and refractometry sensing device based on Michelson's interferometer |
CN207964137U (en) * | 2018-01-18 | 2018-10-12 | 中国计量大学 | A kind of M-Z strain gauges based on femtosecond laser parallel micromachining |
CN108918466A (en) * | 2018-05-22 | 2018-11-30 | 杭州光飞秒科技有限公司 | A kind of multiple Michelson's interferometer based on beam splitter in optical fiber cable |
CN108731712A (en) * | 2018-05-25 | 2018-11-02 | 中国计量大学 | It is a kind of that Mach-Zehnder interferometer on the optical fiber cable of waveguide is inscribed based on femtosecond laser |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN117073731A (en) * | 2023-10-18 | 2023-11-17 | 广东海洋大学 | Optical fiber Michelson interference device based on long-period fiber bragg grating and preparation method |
CN117073731B (en) * | 2023-10-18 | 2023-12-22 | 广东海洋大学 | Optical fiber Michelson interference device based on long-period fiber bragg grating and preparation method |
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Application publication date: 20210430 |