CN105157875A - Temperature sensor based on Michelson interferometer having optical fiber and air ring cavity structure - Google Patents
Temperature sensor based on Michelson interferometer having optical fiber and air ring cavity structure Download PDFInfo
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- CN105157875A CN105157875A CN201510353355.3A CN201510353355A CN105157875A CN 105157875 A CN105157875 A CN 105157875A CN 201510353355 A CN201510353355 A CN 201510353355A CN 105157875 A CN105157875 A CN 105157875A
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- ring cavity
- air ring
- optical fiber
- michelson interferometer
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Abstract
The present invention provides a temperature sensor based on a Michelson interferometer having an optical fiber and an air ring cavity structure. The temperature sensor is characterized by consisting of an incident optical fiber (1), an air ring cavity structure (2), a graphene film (3) and a gold film (4); wherein two ends of the air ring cavity structure (2) are respectively connected with the incident optical fiber (1) and the graphene film (3); two ends of the graphene film (3) are respectively connected with the air ring cavity structure (2) and the gold film (4); the incident optical fiber (1), the air ring cavity structure (2), the graphene film (3) and the gold film (4) jointly form the Michelson interferometer. The temperature sensor of the present invention is high in sensitivity, small in structure, good in flexibility, and low in cost, and can be applied to practical engineering of various high temperature measurements.
Description
Technical field
The invention provides a kind of temperature sensor of the Michelson interferometer based on optical fiber air ring cavity, belong to technical field of optical fiber sensing.
Background technology
Optical Fiber Michelson Interferometer is widely used in sensory field.Traditional Optical Fiber Michelson Interferometer makes He-Ne laser enter single-mode fiber by coupled lens, is then divided into the equal two-beam of intensity by fiber coupler.Two-beam enters respectively in reference arm and pickup arm and propagates.The light transmitted in arm is interfered to return in optical fiber through the catoptron reflection of respective fiber end face two, pickup arm is subject to the impact of measurand in this course, therefore the light transmitted in two-arm produces optical path difference, will interfere at another output terminal of fiber coupler.The interference signal interferogram of output is detected by photodetector.Relative to the sensor of other structures as the Fibre Optical Sensor based on Mach-Zehnder interferometer, the particularly significant advantage of the Fibre Optical Sensor based on Michelson interferometer be this sensor measurement be reflectance spectrum.This feature makes it to be applied in real life more easily to go.In recent years, people propose a kind of novel all-fiber Michelson interferometer, by introducing some optical fiber processing technology, this interferometer structure can be realized on an optical fiber.This novel full optical fiber interferometer is simple relative to traditional interferometer structure, easy to use.The making of the temperature sensor of a kind of Michelson interferometer based on optical fiber air ring cavity proposed in this patent has used femto-second laser.Femto-second laser is mainly used in accurate micro-nano technology, can realize ultrahigh resolution, superhigh precision, thus reach the processing and manufacturing of nanoscale.The Michelson interferometer of this all-fiber has highly sensitive, and structure is small, and pliability is good, low cost and other advantages.
Based on the air ring cavity configuration in the temperature sensor of the Michelson interferometer of optical fiber air ring cavity, the light originally only transmitted in fibre core is transmitted respectively with the form of core mode and air ring cavity mould, and golden film make the light transmitted in fibre core and air ring cavity in golden film end, reflection occur and interfere at the initial end face of air ring cavity configuration.Interference spectrum is presented on spectrometer.When measure to external world by environment temperature for this sensor of use, each temperature that changes all can make interference fringe drift about.This is because air ring cavity mould is different with the responsiveness of core mode to temperature variation, thus causes original optical path difference to change.Along with the change of optical path difference, interference fringe will change to some extent.When temperature is after a series of change, a series of interference fringe corresponded namely can be observed on spectrometer.At some feature locations of interference fringe, such as interference peaks or interference paddy, can see that the wavelength that extreme value is positioned at drifts about, can realize temperature survey by the drift value of monitoring interference spectrum.
Summary of the invention
The object of the present invention is to provide a kind of temperature sensor of the Michelson interferometer based on optical fiber air ring cavity.This device can will treat that the variable quantity of testing temperature is converted into the wavelength shift of detectable signal.Have highly sensitive, structure is small, and pliability is good, low cost and other advantages.
The present invention is achieved through the following technical solutions:
Based on a temperature sensor for the Michelson interferometer of optical fiber air ring cavity, it is characterized in that: be made up of incident optical (1), air ring cavity configuration (2), graphene film (3) and golden film (4); The two ends of air ring cavity configuration (2) are connected with graphene film (3) with incident optical (1) respectively; Graphene film (3) two ends are connected with golden film (4) with air ring cavity configuration (2) respectively; Incident optical (1) forms Michelson interferometer jointly with air ring cavity configuration (2) and graphene film (3) and golden film (4).
The temperature sensor of described a kind of Michelson interferometer based on optical fiber air ring cavity, it is characterized in that: incident optical (1) can adopt G.652 single-mode fiber, incident optical (1) length is 20 ~ 40cm.
The temperature sensor of described a kind of Michelson interferometer based on optical fiber air ring cavity, it is characterized in that: the optical fiber that air ring cavity configuration (2) uses can adopt G.652 single-mode fiber, length is 50um ~ 100um, the ring cavity exradius of air ring cavity configuration (2) is 4um ~ 7um, inner circle radius is 2um ~ 5um, and the concentric circles semidiameter of air ring cavity configuration (2) is 2um.
The temperature sensor of described a kind of Michelson interferometer based on optical fiber air ring cavity, is characterized in that: golden film (3) thickness is 100nm.
Principle of work of the present invention is: the light sent when wideband light source arrives air ring cavity, because the core diameter of incident optical is thicker than the core diameter of this section of optical fiber with air ring cavity configuration through incident optical.The light that such script transmits in fibre core is divided into two parts, part light will continue to transmit along fibre core, another part light enters in air ring cavity and transmits, when two-beam arrives Jin Jingshi, there is reflection at golden film end face and interfere at the initial end face of air ring cavity configuration in the light transmitted in fibre core and air ring cavity, shows reflected light spectrogram by spectrometer.
The light wherein transmitted between fibre core and air ring cavity there occurs interference, can obtain with known formula:
Wherein I is the intensity of interference signal, I
coreand I
cavitybe the light intensity reflexing to the light fibre core and air ring cavity configuration from golden face respectively, λ is lambda1-wavelength, and OPD is the optical path difference back and forth of Michelson interferometer,
it is the initial phase of interfering.Initial OPD can represent with formula (2):
OPD＝2n
coreL(2)
Wherein n
corebe the refractive index of fibre core, L is the length of air ring cavity.
Due to the existence of thermo-optic effect and optical fiber thermal expansion, cause n
corecan change along with the change of temperature with L.The optical path difference OPD of Michelson interferometer vary with temperature Δ T change formula:
ΔOPD＝OPD(a
TO+a
TE)ΔT(3)
Wherein a
tOand a
tEthe thermal expansivity of thermo-optical coeffecient and optical fiber silicon medium respectively.Can show that temperature control is by formula (1) and formula (3)
Wherein λ
0be intensity maximum or minimum time wavelength, Δ λ
0at λ
0the wave length shift at place.The sensitivity of temperature depends mainly on the thermo-optic effect of sensor.
When measure to external world by temperature for this sensor of use, each change ambient temperature, because air ring cavity mould is different with the responsiveness of core mode to temperature, the optical path difference of air ring cavity mould and core mode is changed, thus the phase differential changed between air ring cavity mould and core mode, interference fringe is drifted about, and can reduce measured signal by monitoring interference spectrum wavelength shift.
The invention has the beneficial effects as follows: this temperature sensor is made based on the Michelson interferometer of air ring cavity configuration.The light transmitted in fibre core does not mate with the fibre core size of air ring cavity owing to importing optical fiber into, makes originally to be transmitted by the fibre core continued along scaling loss importing the light part transmitted in fiber core into, and another part light enters air ring cavity.When arriving golden film, will reflection be there is at golden film end face at air ring cavity and the light that transmits in fibre core and interfere at the initial end face of air ring cavity.When changing the ambient temperature of sensor, corresponding interference spectrum will drift about.This sensor adopts Michelson interferometer, and stability is better, and sensitivity is higher, and is not vulnerable to the impact of extraneous variations in refractive index.
Accompanying drawing explanation
Fig. 1 is the temperature sensor schematic diagram of the Michelson interferometer based on optical fiber air ring cavity of the present invention;
Fig. 2 is the fiber end face schematic diagram before and after femto-second laser punching of the present invention;
Embodiment
Below in conjunction with accompanying drawing and embodiment, the invention will be further described:
See accompanying drawing 1, a kind of temperature sensor of the Michelson interferometer based on optical fiber air ring cavity, is made up of incident optical (1), air ring cavity configuration (2), graphene film (3) and golden film (4); The two ends of air ring cavity configuration (2) are connected with graphene film (3) with incident optical (1) respectively; Graphene film (3) two ends are connected with golden film (4) with air ring cavity configuration (2) respectively; Incident optical (1) forms Michelson interferometer jointly with air ring cavity configuration (2) and graphene film (3) and golden film (4).The manufacturing process of air ring cavity configuration (2) is as follows: punch at fiber end face with femto-second laser, laser spot diameter is transferred to about 2um, makes a call to a circle aperture, have intersection between each aperture in covering along fibre core.Regulate simultaneously the intensity of femto-second laser and focus point far and near thus control the degree of depth of aperture.After femto-second laser process, annular air chamber can be formed at fibre core and cladding interface place.Before and after punching, fiber end face as shown in Figure 2, and wherein the black region at center represents fibre core, can find that, before and after punching, core diameter reduces.After having beaten hole, because the inside surface in annular air chamber is smooth not, so use HF to corrode optical fiber, make it level and smooth.As follows in the process of one end plated with gold film (3) of air ring cavity: because be at the gold-plated film of cavity end face, the method of metal spraying is used easily to be sprayed onto in cavity, therefore to first plate one deck graphene film at gold-plated optical fiber surface, thus prevent the gold sprayed from entering cavity.
The working method of apparatus of the present invention is: by a termination wideband light source of temperature sensor, another termination spectrometer.When the light that wideband light source sends arrives air ring cavity configuration through incident optical, the light originally transmitted in fibre core is divided into two parts, and a part enters air ring cavity, and another part light will continue to transmit along fibre core.Gold film makes the light transmitted in fibre core and air ring cavity at golden film end face, reflection occur and interfere at the initial end face of air ring cavity configuration.When changing the ambient temperature of sensor, corresponding interference spectrum will drift about, and is monitored the change of the reflectance spectrum of Michelson interferometer, thus can draw the sensitivity of this sensor by spectrometer.
Claims (4)
1. the invention provides the temperature sensor of a kind of Michelson interferometer based on optical fiber air ring cavity (Michelsoninterferometer), it is characterized in that: be made up of incident optical (1), air ring cavity configuration (2), graphene film (3) and golden film (4); The two ends of air ring cavity configuration (2) are connected with graphene film (3) with incident optical (1) respectively; Graphene film (3) two ends are connected with golden film (4) with air ring cavity configuration (2) respectively; Incident optical (1) forms Michelson interferometer jointly with air ring cavity configuration (2) and graphene film (3) and golden film (4).
2. the temperature sensor of a kind of Michelson interferometer based on optical fiber air ring cavity according to claim 1, it is characterized in that: incident optical (1) can adopt G.652 single-mode fiber, incident optical (1) length is 20 ~ 40cm.
3. the temperature sensor of a kind of Michelson interferometer based on optical fiber air ring cavity according to claim 1, it is characterized in that: the optical fiber that air ring cavity configuration (2) uses can adopt G.652 single-mode fiber, length is 50um ~ 100um, the ring cavity exradius of air ring cavity configuration (2) is 4um ~ 7um, inner circle radius is 2um ~ 5um, and the concentric circles semidiameter of air ring cavity configuration (2) is 2um.
4. the temperature sensor of a kind of Michelson interferometer based on optical fiber air ring cavity according to claim 1, is characterized in that: golden film (4) thickness is 100nm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111189802A (en) * | 2020-03-23 | 2020-05-22 | 浙江师范大学 | Graphene characteristic-based gas sensor research method |
| CN112731584A (en) * | 2020-12-03 | 2021-04-30 | 北京信息科技大学 | Core-free optical fiber Michelson structure based on femtosecond laser processing and preparation method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101957227A (en) * | 2010-10-22 | 2011-01-26 | 南京信息工程大学 | Photonic crystal fiber optic liquid level sensor and sensing system formed by same |
| CN103900994A (en) * | 2014-04-18 | 2014-07-02 | 深圳大学 | All-fiber refractive index meter based on michelson interferometer, manufacturing method and system |
| CN104236602A (en) * | 2014-09-26 | 2014-12-24 | 安徽大学 | Full-optical-fiber sensor capable of measuring temperature and humidity at same time |
| US20150131103A1 (en) * | 2012-08-14 | 2015-05-14 | US Seismic Systems, Inc. | Noise compensated fiber optic sensing systems and methods of operating the same |
| CN204807234U (en) * | 2015-06-19 | 2015-11-25 | 中国计量学院 | Temperature sensor of michelson interferometer based on optic fibre air ring cavity |
-
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- 2015-06-19 CN CN201510353355.3A patent/CN105157875A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101957227A (en) * | 2010-10-22 | 2011-01-26 | 南京信息工程大学 | Photonic crystal fiber optic liquid level sensor and sensing system formed by same |
| US20150131103A1 (en) * | 2012-08-14 | 2015-05-14 | US Seismic Systems, Inc. | Noise compensated fiber optic sensing systems and methods of operating the same |
| CN103900994A (en) * | 2014-04-18 | 2014-07-02 | 深圳大学 | All-fiber refractive index meter based on michelson interferometer, manufacturing method and system |
| CN104236602A (en) * | 2014-09-26 | 2014-12-24 | 安徽大学 | Full-optical-fiber sensor capable of measuring temperature and humidity at same time |
| CN204807234U (en) * | 2015-06-19 | 2015-11-25 | 中国计量学院 | Temperature sensor of michelson interferometer based on optic fibre air ring cavity |
Non-Patent Citations (2)
| Title |
|---|
| 倪凯 等: "单光纤光栅对温度与应变的同步测量", 《光电子 激光》 * |
| 廖国珍 等: "基于石墨烯的全光纤温度传感器的研究", 《光学学报》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111189802A (en) * | 2020-03-23 | 2020-05-22 | 浙江师范大学 | Graphene characteristic-based gas sensor research method |
| CN112731584A (en) * | 2020-12-03 | 2021-04-30 | 北京信息科技大学 | Core-free optical fiber Michelson structure based on femtosecond laser processing and preparation method |
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