CN115469404A - Two-dimensional high-speed photoelectric conversion array chip - Google Patents
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- 238000013461 design Methods 0.000 description 3
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4298—Coupling light guides with opto-electronic elements coupling with non-coherent light sources and/or radiation detectors, e.g. lamps, incandescent bulbs, scintillation chambers
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/11—Arrangements specific to free-space transmission, i.e. transmission through air or vacuum
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
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Abstract
The invention discloses a two-dimensional high-speed photoelectric conversion array chip, which is based on an integrated photon technology, constructs a two-dimensional grating coupler array, realizes the high-efficiency receiving of space optical signals, and is matched with an on-chip photoelectric detector array to realize the multi-channel parallel output of microwave signals. Aiming at the problem that the high-speed signal parallel output is difficult to realize due to electrical crosstalk among channels in the two-dimensional high-speed optical signal detection of the traditional photoelectric detector array, the space two-dimensional optical signal receiving and one-dimensional high-speed photoelectric conversion are combined based on the advantages of photon high-speed parallel processing and transmission, so that the two-dimensional high-speed photoelectric detection of the space optical signal is realized.
Description
Technical Field
The invention belongs to the technical field of communication, and particularly relates to a technical research of a two-dimensional high-speed photoelectric conversion array chip in the field of integrated microwave photons.
Background
With the large-scale commercialization of 5G, the world has opened research and exploration into the next generation mobile communication technology (6G). Compared with the characteristics of high speed, large connection, low time delay and high reliability of 5G, the 6G brings about brand new trends of immersion, intellectualization, universalization and the like. In order to meet the requirements of future 6G richer business applications and extreme performance, a new physical dimension needs to be explored to realize revolutionary breakthrough of an information transmission mode. The intelligent holographic radio realizes dynamic reconstruction and real-time precise regulation and control of an electromagnetic space by utilizing a holographic interference principle of electromagnetic waves, realizes mapping from radio frequency holography to optical holography, realizes ultrahigh resolution spatial multiplexing by using radio frequency spatial spectrum holography and a holographic spatial wave field synthesis technology, and can meet the requirements of ultrahigh spectrum efficiency, ultrahigh data density, ultrahigh capacity and the like of 6G in the future.
The intelligent holographic radio technology introduces the photon technology into the field of large-scale radio frequency processing, based on the mutual conversion of radio frequency and optics of microwave photonics, the amplitude and the phase of a full-space radio frequency signal can be comprehensively recorded, complex space electromagnetic distribution can be synthesized, and the microwave optical real-time processing technology is one of core technologies for realizing intelligent holographic radio and needs to realize two-dimensional space optical signal detection. However, in the two-dimensional high-speed optical signal detection of the conventional photodetector array, the problem that parallel output of high-speed signals is difficult to realize due to electrical crosstalk between channels becomes a bottleneck limiting the development of the two-dimensional photodetector array. Therefore, a new idea is needed to solve the above bottleneck problem.
Disclosure of Invention
The present application is directed to solve at least the problems described in the background art, and therefore the present application proposes a two-dimensional high-speed photoelectric conversion array chip, which includes a grating coupler array located in a middle region of the chip, where the grating coupler array includes a plurality of grating couplers for receiving spatial light signals; the photoelectric detector array is positioned in the peripheral edge area of the chip and comprises a plurality of photoelectric detectors which are used for respectively converting each optical signal in the space optical signals into microwave signals and can realize the function of multi-channel parallel output of the microwave signals; and a plurality of light guides, wherein each light guide connects one grating coupler in the grating coupler array and one photodetector in the photodetector array for transmitting the optical signal received by the grating coupler to the photodetector.
In some embodiments, the arrangement layout of the grating couplers is a regular arrangement layout or a non-regular arrangement layout, and the purpose is to achieve a high filling factor of the grating in a fixed receiving plane and achieve high-efficiency receiving of the spatial light signal.
In some embodiments, the arrangement of the grating coupler array is a positive arrangement or a combination of positive and negative arrangements.
In some embodiments, the photodetectors comprise high frequency photodetectors arranged in an nx 1 or nx 2 linear array structure.
In some embodiments, the grating coupler is one of a uniform periodic grating coupler, a non-uniform periodic grating coupler, or a mirror grating coupler, or a dual-output grating coupler.
In some embodiments, the effective aperture of the grating coupler is determined according to the size of the spatial beam.
In some embodiments, the effective aperture of the grating coupler is from a few microns to a few tens of microns.
In some embodiments, the angle at which the grating coupler receives the spatial light beam is arbitrary.
The beneficial effects of the invention include but are not limited to:
1. the invention aims at high speed and large arrays, utilizes the advantages of high speed, large bandwidth, electromagnetic interference resistance and the like of the photon technology to construct a two-dimensional grating receiving array, and can effectively overcome the problem of serious electrical crosstalk in the high-speed two-dimensional detector array by matching with a one-dimensional high-speed photoelectric detector array.
2. The invention adopts the grating coupler array structure to realize the high-efficiency receiving of the space light information.
Drawings
Fig. 1 is a schematic diagram of a two-dimensional high-speed photoelectric conversion array chip structure according to an embodiment of the present application.
Fig. 2 is a schematic diagram of a two-dimensional structure of a uniform grating coupler according to an embodiment of the present application.
Figure 3 is a schematic diagram of a two-dimensional structure of a non-uniform grating coupler, according to an embodiment of the present application.
FIG. 4 is a schematic diagram of a two-dimensional structure of a mirror grating coupler according to an embodiment of the present application.
Figure 5 is a schematic diagram of a dual output grating coupler according to an embodiment of the present application.
Figure 6 is a diagram of a regular (forward) arrangement grating coupler array layout according to an embodiment of the present application.
Figure 7 is a layout diagram of an irregular layout grating coupler array according to an embodiment of the present application.
Figure 8 is a layout diagram of a positive and negative combination alignment grating coupler array according to an embodiment of the present application.
Detailed Description
The present invention is further described below in conjunction with the drawings and the embodiments so that those skilled in the art can better understand and implement the present invention.
The invention provides a two-dimensional high-speed photoelectric conversion array chip based on an integrated photon technology by combining the advantages and the characteristics of an integrated microwave photon system, effectively solves the problem of serious electrical crosstalk among array elements of a high-speed two-dimensional photoelectric detector, can realize two-dimensional high-speed photoelectric conversion, has the advantages of high speed, large bandwidth, multiple array elements, high integration level, high stability, good channel consistency and the like, and has great application prospect.
One technical solution according to an embodiment of the present invention is: based on an integrated photon technology, a two-dimensional grating coupler array is constructed by utilizing the property of photon anti-electromagnetic interference, so that the high-efficiency receiving of space optical information is realized, optical signals received by each grating coupler are transmitted to an on-chip photoelectric detector through optical waveguides, the high-speed conversion from the optical waves to microwave signals is realized on the photoelectric detector, and the parallel output of multiple paths of microwave signals is completed. It should be further noted that this process can obtain the amplitude and phase information carried by the light wave and convert it into microwave signals.
The grating coupler array can simultaneously receive a plurality of signal beams, complete multi-beam simultaneous information processing by an optical means, and each signal beam transmits an optical signal to the photoelectric detector through the optical waveguide channel to realize the conversion of the signal from the optical wave to the microwave. In the process, the optical path difference among the optical waveguide channels can be controlled in a nanometer level, and the consistency of phase change among the channels is effectively ensured.
The effective aperture of the grating coupler is matched with the size of the space light beam, so that the space light beam is efficiently received. The grating coupler structure may be a uniform periodic grating coupler or a non-uniform periodic grating coupler or a mirror grating coupler or a dual output grating coupler. For example, it may be between a few microns and a few tens of microns, such as, but not limited to, 1 micron, 2 microns, 5 microns, 7 microns, 9 microns, 10 microns, 20 microns, 30 or 80 microns. The grating coupler is configured to receive spatial beams of arbitrary incidence angles.
The grating period in the uniform grating coupler is a fixed value, the design is simple, the processing is easy, and the coupling efficiency is low; the grating period of the non-uniform grating coupler is not a fixed value, the coupling efficiency is high, but the design is complex, and the process tolerance is low; the reflector grating coupler is formed by adding a high-reflection material below a grating layer, and reflecting light leaked into a substrate to the grating layer, so that the coupling efficiency of the grating coupler is improved; the light of the dual-output grating coupler can be diffracted into the waveguide from the two ends of the grating, and the coupling efficiency of the grating coupler is improved.
The grating array uses grating couplers as subunits, the arrangement layout of the grating arrays is a uniform and dense arrangement structure, or a non-uniform arrangement layout structure is obtained through a corresponding optimization algorithm, and the random arrangement layout structure is designed according to a system, so that the high filling factor of the grating couplers is realized in a fixed receiving plane, and the high-efficiency receiving of space optical signals is completed.
The above mentioned optimization algorithms include, but are not limited to, genetic algorithms, particle swarm optimization algorithms, and pattern search algorithms.
The fill factor of the grating coupler described above satisfies the following equation:
wherein eta is the filling factor of the grating coupler, a is the effective aperture area of the single grating coupler, N is the number of array elements of the grating coupler, and A is the area of the receiving plane. The high filling factor of the grating coupler needs to satisfy: eta > 0.5.
According to the photoelectric detector array, the high-frequency photoelectric detectors are used as the subunits, the linear array structures are arranged according to Nx 1 or Nx 2, the periphery of the edge of a chip is distributed, the difficulty of high-frequency wiring of a large array is reduced, and the problems of high-frequency wiring crosstalk and high-frequency crosstalk among photoelectric detector array elements are solved.
It should be further understood that the invention described above refers to a two-dimensional high-speed photoelectric conversion array chip, which can implement multi-channel parallel output of microwave signals.
Fig. 1 shows a schematic diagram of a two-dimensional high-speed photoelectric conversion array chip provided by an embodiment of the present invention, and referring to fig. 1, the chip includes a grating coupler array 102, a photodetector array 103, and an optical waveguide 104, and it needs to be further described that the chip can implement detection of amplitude and phase information of a multi-beam optical signal 101.
The grating coupler array 102 is arranged in the middle area of the chip and is used for receiving the spatial optical signal 101, coupling the optical signal into the optical waveguide 104 of the chip, transmitting the optical waveguide 104 to the photodetector array, converting the optical signal into a microwave signal, and realizing multi-channel parallel output of the microwave signal.
The grating coupler array 102 is formed by arranging grating couplers as subunits, wherein the effective aperture of each grating coupler is matched with the size of a light spot of spatial light information, and efficient receiving of optical signals is realized.
The photodetector array 103 is located at the peripheral edge region of the chip, and the photodetector array 103 includes a plurality of photodetectors for respectively converting each optical signal in the spatial optical signal 101 into a microwave signal, and outputting in parallel through multiple channels.
A plurality of optical waveguides 104, wherein each optical waveguide connects one grating coupler in the grating coupler array and one photodetector in the photodetector array, for transmitting the optical signal received by the grating coupler 102 to the photodetector 103.
Fig. 2 shows a two-dimensional structure diagram of the uniform grating coupler 102, in which the device layer 1021 is a silicon thin film layer, the buffer layer 1022 is a silicon dioxide thin film layer, and the substrate layer 1023 is a silicon substrate, and a grating structure 1024 with a uniform period is obtained by etching the silicon thin film layer. The uniform grating coupler is a conventional grating coupler, is simple in design and easy to prepare and process.
Fig. 3 shows a two-dimensional structure diagram of a non-uniform grating coupler, the grating period is not a fixed value, and the period can be designed to be changed linearly or randomly.
Fig. 4 shows a two-dimensional structure diagram of a grating coupler of a mirror type, in which a layer is added as a mirror 1025 below a buffer layer 1022, so as to reflect light leaked into a substrate to a grating layer 1021, thereby improving the coupling efficiency of the grating coupler.
Fig. 5 shows a schematic diagram of a dual-output grating coupler, where light is output from both ends of the grating coupler, improving the receiving efficiency of the grating coupler.
The grating coupler structure obtains structural parameters through solving the electromagnetic field solved by using the finite difference time domain algorithm, and a corresponding grating coupler can be prepared based on a standard COMS process.
The grating coupler array uses the grating coupler 102 as a subunit, and the arrangement layout of the grating coupler array may be a regular arrangement grating coupler array layout (or a positive arrangement grating coupler array layout) shown in fig. 6, or an irregular arrangement grating coupler array layout shown in fig. 7 obtained by a corresponding optimization algorithm, or a positive and negative combination arrangement grating coupler array layout shown in fig. 8, which aims to achieve a high filling factor of a grating in a fixed receiving plane. The specific layout structure in implementation can flexibly layout the grating coupler array according to the actual application requirements.
The two-dimensional high-speed photoelectric conversion array chip can realize high-efficiency receiving of space optical signals and multi-channel parallel output of microwave signals, has the advantages of multiple array elements, high integration level, good stability and the like, can play a key role in an integrated microwave photonic system, and has high application value.
Finally, the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting, although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all of them should be covered in the claims of the present invention.
Claims (8)
1. Two-dimensional high-speed photoelectric conversion array chip, its characterized in that: comprises that
A grating coupler array located in a central region of the chip, the grating coupler array comprising a plurality of grating couplers for simultaneously receiving signals comprising spatial light;
the photoelectric detector array is positioned in the peripheral edge area of the chip and comprises a plurality of photoelectric detectors which are used for respectively converting each optical signal in the space optical signals into microwave signals and outputting the microwave signals in parallel through multiple channels;
and a plurality of optical waveguides, wherein each optical waveguide connects one grating coupler in the grating coupler array and one photodetector in the photodetector array, for transmitting the optical signal received by the grating coupler to the photodetector.
2. The two-dimensional high-speed photoelectric conversion array chip according to claim 1, wherein: arrangement layout of the grating couplerIs composed ofA regular arrangement structure or an irregular arrangement structure.
3. The two-dimensional high-speed photoelectric conversion array chip of claim 1, wherein the arrangement of the grating coupler array is a positive arrangement or a combination of a positive and a negative arrangement.
4. The two-dimensional high-speed photoelectric conversion array chip according to claim 1, wherein: the photodetectors include high-speed photodetectors arranged in an nx 1 or nx 2 linear array structure.
5. The two-dimensional high-speed photoelectric conversion array chip according to claim 1, wherein: the grating coupler is one of a uniform period grating coupler, a non-uniform period grating coupler, a reflector grating coupler or a dual-output grating coupler.
6. The two-dimensional high-speed photoelectric conversion array chip according to claim 1, wherein: the effective aperture of the grating coupler is determined according to the size of the spatial beam.
7. The two-dimensional high-speed photoelectric conversion array chip according to claim 1, wherein: the grating coupler is configured to receive spatial beams of arbitrary incidence angle.
8. The two-dimensional high-speed photoelectric conversion array chip according to claim 1, wherein: the effective aperture of the grating coupler is several micrometers to tens of micrometers.
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